JP2016112485A - 廃液処理装置および廃液処理方法 - Google Patents
廃液処理装置および廃液処理方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000010808 liquid waste Substances 0.000 title abstract 5
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 97
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 93
- 239000003054 catalyst Substances 0.000 claims abstract description 26
- 238000007599 discharging Methods 0.000 claims abstract description 3
- 239000007788 liquid Substances 0.000 claims description 88
- 239000002699 waste material Substances 0.000 claims description 77
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000004080 punching Methods 0.000 claims description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 24
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 16
- 238000005192 partition Methods 0.000 description 14
- 238000003860 storage Methods 0.000 description 13
- 238000012545 processing Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000002253 acid Substances 0.000 description 5
- 239000002585 base Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 239000003513 alkali Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- OSGAYBCDTDRGGQ-UHFFFAOYSA-L calcium sulfate Chemical compound [Ca+2].[O-]S([O-])(=O)=O OSGAYBCDTDRGGQ-UHFFFAOYSA-L 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002440 industrial waste Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000006386 neutralization reaction Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- -1 but the shape Substances 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 235000011132 calcium sulphate Nutrition 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/70—Treatment of water, waste water, or sewage by reduction
- C02F1/705—Reduction by metals
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/58—Treatment of water, waste water, or sewage by removing specified dissolved compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
- C02F1/725—Treatment of water, waste water, or sewage by oxidation by catalytic oxidation
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/10—Inorganic compounds
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
- C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
- C02F2103/346—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from semiconductor processing, e.g. waste water from polishing of wafers
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/02—Fluid flow conditions
- C02F2301/024—Turbulent
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/02—Fluid flow conditions
- C02F2301/028—Tortuous
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- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Removal Of Specific Substances (AREA)
- Catalysts (AREA)
Abstract
Description
(2)アルカリ剤を使用しない方法として、過酸化水素の分解触媒へ水素を供給しながら過酸化水素を分解処理する方法(特許文献1参照)。
(3)炭素質物質へ温度を上げた廃液を通じて過酸化水素を分解処理する方法(特許文献2参照)。
(4)過酸化水素を含む被処理液を粒状活性炭を充填した活性炭塔に底部側から上部側へ向けて上向流で流し、被処理液を粒状活性炭と接触させて過酸化水素を分解する活性炭処理装置であって、活性炭塔内部に充填された粒状活性炭によって形成される活性炭層の上部側の断面積を底部側に比べ大きくする方法(特許文献3参照)。
20 廃液処理装置
21 筐体
22 導入口
23 排出口
24 流路画定部材
25 仕切り壁
30 第2の貯留槽
100 廃液処理システム
Claims (6)
- 少なくとも過酸化水素を含有する被処理水の過酸化水素を分解し、当該被処理水を処理する廃液処理装置であって、
筐体と、
前記筐体に設けられ、被処理水を当該筐体の内部に導入する導入口と、
前記筐体に設けられ、前記被処理水を処理して得られる処理水を排出する排出口と、
前記筐体の内部に設けられ、表面に過酸化水素を分解可能な触媒が設けられた流路画定部材と、を備え、
前記流路画定部材は、前記導入口と前記排出口との間で、少なくとも一つの位置で折れ曲がる、前記被処理水用の流路を画定する、
廃液処理装置。 - 請求項1に記載の廃液処理装置であって、
前記流路画定部材が、
前記筐体の底面および第1の側面に取り付けられる第1の流路画定部材と、
前記筐体の前記底面および前記第1の側面に対向する第2の側面に取り付けられる第2の流路画定部材と、を含み、
前記第1の流路画定部材と前記第2の流路画定部材が、前記導入口と前記排出口との間で交互に配置され、前記被処理水が水平方向に異なる少なくとも二つの位置で折り返しながら流れるように、前記流路が画定される、廃液処理装置。 - 請求項1に記載の廃液処理装置であって、
前記流路画定部材が、
前記筐体の底面に取り付けられる第1の流路画定部材と、
前記筐体の前記底面から離れて設けられる第2の流路画定部材と、を含み、
前記第1の流路画定部材と前記第2の流路画定部材が、前記導入口と前記排出口との間で交互に配置され、前記被処理水が垂直方向に異なる少なくとも二つの高さで折り返しながら流れるように、前記流路が画定される、廃液処理装置。 - 請求項1に記載の廃液処理装置であって、
前記流路画定部材には前記被処理水が通過可能な穴が設けられており、当該流路画定部材を通過する前記被処理水が乱流を起こすことにより、少なくとも一つの位置で疑似的に折れ曲がる前記流路が画定される、廃液処理装置。 - 請求項1から4のいずれか1項に記載の廃液処理装置であって、
前記流路画定部材が、一枚の板、パンチングメタル、エキスパンドメタルの少なくともいずれかにより形成される、廃液処理装置。 - 被処理水中に含まれる過酸化水素を分解し、当該被処理水を処理する廃液処理方法であって、
表面に過酸化水素を分解可能な触媒が設けられた流路画定部材を有する筐体の内部に被処理水を導入し、
前記流路画定部材によって画定される、少なくとも一つの位置で折れ曲がる流路に前記被処理水を流すことにより、前記被処理水を処理する、廃液処理方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014251316A JP6387293B2 (ja) | 2014-12-11 | 2014-12-11 | 廃液処理装置および廃液処理方法 |
KR1020177015511A KR101970905B1 (ko) | 2014-12-11 | 2015-12-10 | 폐액 처리 장치 및 폐액 처리 방법 |
PCT/JP2015/084725 WO2016093330A1 (ja) | 2014-12-11 | 2015-12-10 | 廃液処理装置および廃液処理方法 |
US15/534,728 US10407326B2 (en) | 2014-12-11 | 2015-12-10 | Waste liquid treatment device and waste liquid treatment method |
TW104141676A TW201632471A (zh) | 2014-12-11 | 2015-12-11 | 廢液處理裝置及廢液處理方法 |
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JP2014251316A JP6387293B2 (ja) | 2014-12-11 | 2014-12-11 | 廃液処理装置および廃液処理方法 |
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JP2016112485A true JP2016112485A (ja) | 2016-06-23 |
JP6387293B2 JP6387293B2 (ja) | 2018-09-05 |
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JP2014251316A Active JP6387293B2 (ja) | 2014-12-11 | 2014-12-11 | 廃液処理装置および廃液処理方法 |
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Country | Link |
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US (1) | US10407326B2 (ja) |
JP (1) | JP6387293B2 (ja) |
KR (1) | KR101970905B1 (ja) |
TW (1) | TW201632471A (ja) |
WO (1) | WO2016093330A1 (ja) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63122698U (ja) * | 1987-01-30 | 1988-08-09 | ||
JPH0422494A (ja) * | 1990-05-17 | 1992-01-27 | Komatsu Ltd | 排水の分解処理方法 |
JPH0739993U (ja) * | 1993-12-29 | 1995-07-18 | 重春 中尾 | 浄化槽 |
JP3030389U (ja) * | 1996-04-19 | 1996-10-22 | 株式会社センテック | 軟水化装置付浄水器 |
JP2000107773A (ja) * | 1998-09-30 | 2000-04-18 | Asahi Denka Kogyo Kk | 過酸化水素と過酢酸を含有する廃水の処理方法 |
JP2000213341A (ja) * | 1999-01-20 | 2000-08-02 | Aisin Seiki Co Ltd | エンジン駆動式空気調和機のドレン中和器 |
JP2003170175A (ja) * | 2001-12-10 | 2003-06-17 | Nippon Shokubai Co Ltd | 廃水の浄化法 |
JP2006035040A (ja) * | 2004-07-23 | 2006-02-09 | Matsumoto:Kk | 光触媒による環境ホルモン除去装置、および同除去方法 |
JP2012045472A (ja) * | 2010-08-26 | 2012-03-08 | Swing Corp | 過酢酸含有廃水を処理する処理方法及び処理装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61186208A (ja) | 1985-02-12 | 1986-08-19 | Shoko Tsusho Kk | 過酸化水素の分解方法 |
JPH0763703B2 (ja) | 1992-06-11 | 1995-07-12 | 東信化学工業株式会社 | 過酸化水素の分解方法 |
JP3030389B2 (ja) * | 1993-12-06 | 2000-04-10 | 日本航空電子工業株式会社 | 光導波路 |
JPH10211487A (ja) | 1997-01-29 | 1998-08-11 | Japan Organo Co Ltd | 活性炭処理装置 |
US6136186A (en) * | 1997-01-31 | 2000-10-24 | Lynntech, Inc. | Photocatalytic oxidation of organics using a porous titanium dioxide membrane and an efficient oxidant |
US6004469A (en) * | 1998-01-28 | 1999-12-21 | Advanced Catalyst Systems, Inc. | Process for removing H2 o2 from aqueous streams |
EP0993859A1 (en) * | 1998-09-18 | 2000-04-19 | Hitachi Metals, Ltd. | Three-dimensional, photocatalytic filter apparatus |
-
2014
- 2014-12-11 JP JP2014251316A patent/JP6387293B2/ja active Active
-
2015
- 2015-12-10 KR KR1020177015511A patent/KR101970905B1/ko active IP Right Grant
- 2015-12-10 US US15/534,728 patent/US10407326B2/en active Active
- 2015-12-10 WO PCT/JP2015/084725 patent/WO2016093330A1/ja active Application Filing
- 2015-12-11 TW TW104141676A patent/TW201632471A/zh unknown
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63122698U (ja) * | 1987-01-30 | 1988-08-09 | ||
JPH0422494A (ja) * | 1990-05-17 | 1992-01-27 | Komatsu Ltd | 排水の分解処理方法 |
JPH0739993U (ja) * | 1993-12-29 | 1995-07-18 | 重春 中尾 | 浄化槽 |
JP3030389U (ja) * | 1996-04-19 | 1996-10-22 | 株式会社センテック | 軟水化装置付浄水器 |
JP2000107773A (ja) * | 1998-09-30 | 2000-04-18 | Asahi Denka Kogyo Kk | 過酸化水素と過酢酸を含有する廃水の処理方法 |
JP2000213341A (ja) * | 1999-01-20 | 2000-08-02 | Aisin Seiki Co Ltd | エンジン駆動式空気調和機のドレン中和器 |
JP2003170175A (ja) * | 2001-12-10 | 2003-06-17 | Nippon Shokubai Co Ltd | 廃水の浄化法 |
JP2006035040A (ja) * | 2004-07-23 | 2006-02-09 | Matsumoto:Kk | 光触媒による環境ホルモン除去装置、および同除去方法 |
JP2012045472A (ja) * | 2010-08-26 | 2012-03-08 | Swing Corp | 過酢酸含有廃水を処理する処理方法及び処理装置 |
Also Published As
Publication number | Publication date |
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US20170341961A1 (en) | 2017-11-30 |
US10407326B2 (en) | 2019-09-10 |
WO2016093330A1 (ja) | 2016-06-16 |
KR101970905B1 (ko) | 2019-04-19 |
JP6387293B2 (ja) | 2018-09-05 |
TW201632471A (zh) | 2016-09-16 |
KR20170081246A (ko) | 2017-07-11 |
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