JP2015534513A - マイクロ流体吐出ヘッドのためのメンテナンスバルブ - Google Patents
マイクロ流体吐出ヘッドのためのメンテナンスバルブ Download PDFInfo
- Publication number
- JP2015534513A JP2015534513A JP2015530519A JP2015530519A JP2015534513A JP 2015534513 A JP2015534513 A JP 2015534513A JP 2015530519 A JP2015530519 A JP 2015530519A JP 2015530519 A JP2015530519 A JP 2015530519A JP 2015534513 A JP2015534513 A JP 2015534513A
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- 238000012423 maintenance Methods 0.000 title claims description 12
- 239000012530 fluid Substances 0.000 claims abstract description 184
- 239000000758 substrate Substances 0.000 claims abstract description 64
- 239000010410 layer Substances 0.000 claims abstract description 52
- 239000002346 layers by function Substances 0.000 claims abstract description 19
- 238000004891 communication Methods 0.000 claims abstract description 16
- 239000000463 material Substances 0.000 claims description 17
- 239000012528 membrane Substances 0.000 claims description 9
- 229920001971 elastomer Polymers 0.000 claims description 3
- 239000000806 elastomer Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 description 31
- 229910052751 metal Inorganic materials 0.000 description 31
- 238000002161 passivation Methods 0.000 description 17
- 238000006073 displacement reaction Methods 0.000 description 15
- 238000004519 manufacturing process Methods 0.000 description 15
- 239000006260 foam Substances 0.000 description 11
- 239000004020 conductor Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 239000002861 polymer material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- -1 polydimethylsiloxane Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000012864 cross contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- HQQADJVZYDDRJT-UHFFFAOYSA-N ethene;prop-1-ene Chemical group C=C.CC=C HQQADJVZYDDRJT-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920009441 perflouroethylene propylene Polymers 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/17—Ink jet characterised by ink handling
- B41J2/175—Ink supply systems ; Circuit parts therefor
- B41J2/17596—Ink pumps, ink valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14145—Structure of the manifold
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Prevention or detection of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/16535—Cleaning of print head nozzles using wiping constructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/05—Heads having a valve
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
Claims (19)
- 1つ以上の流体チャネルと、前記1つ以上の流体チャネルのうちの少なくとも1つに各々が連通する1つ以上の流体ポートを含む基板と、
前記基板の上に配置され、前記1つ以上の流体ポートのうちの少なくとも1つに各々が連通する、1つ以上のフロー機能を含むフロー機能層と、
前記フロー機能層の上に配置され、前記1つ以上のフロー機能のうちの少なくとも1つに各々が連通する1つ以上のノズルを含み、その結果、1つ以上の流体通路が、前記1つ以上の流体チャネル、前記1つ以上の流体ポート、前記1つ以上のフロー機能および前記1つ以上のノズルによって定められるノズルプレートと、
前記1つ以上の流体通路を通る流体の流れを選択的に妨げる1つ以上のバルブとを備える、吐出チップ。 - 前記1つ以上のバルブは、前記基板の下に配置される、請求項1に記載の吐出チップ。
- 前記1つ以上のバルブは、前記基板の上に配置される、請求項1に記載の吐出チップ。
- 前記1つ以上のバルブは、メンテナンス操作中に前記1つ以上の流体通路のうち選択された流体通路を通る流体の流れを妨げる、請求項1に記載の吐出チップ。
- 前記1つ以上のバルブは、噴射動作中に前記1つ以上の流体通路のうち選択された流体通路を通る流体の流れを妨げる、請求項1に記載の吐出チップ。
- 前記基板上に配置された1つ以上の吐出要素をさらに備える、請求項1に記載の吐出チップ。
- 前記1つ以上のバルブは、少なくとも前記1つ以上の流体通路に沿って配置された気泡を備えている、請求項6に記載の吐出チップ。
- 前記1つ以上のバルブのうち少なくとも1つは、前記1つ以上の流体ポートの流体の流れを選択的に妨げる、請求項1に記載の吐出チップ。
- 前記1つ以上のバルブは、前記1つ以上の流体通路への流体の流れを選択的に妨げる柔軟膜を備えている、請求項1に記載の吐出チップ。
- 前記柔軟膜は、エラストマにより形成されている、請求項9に記載の吐出チップ。
- 前記柔軟膜がより低い圧力の領域に向けてたわむように、前記1つ以上の流体通路の少なくとも1つに沿って圧力差を生成するように構成された空気圧チャネルをさらに備える、請求項9に記載の吐出チップ。
- 前記柔軟膜は、前記1つ以上の流体通路の少なくとも1つに沿った流体の流れを選択的に妨げる壁に係合するように構成されている、請求項9に記載の吐出チップ。
- 前記1つ以上のバルブは、バイメタルバルブを含む、請求項1に記載の吐出チップ。
- 前記バイメタルバルブは、異なる熱膨張係数をそれぞれ有する複数の材料を含む、請求項13に記載の吐出チップ。
- 前記バイメタルバルブは、前記複数の材料のうちの最も低い熱膨張係数を有する材料の方向にたわむように加熱されるように構成されている、請求項14に記載の吐出チップ。
- 前記バイメタルバルブは、前記1つ以上の流体ポートの少なくとも1つを実質的に横切るように延びる、請求項13に記載の吐出チップ。
- 前記バイメタルバルブは、前記1つ以上の流体ポートのうち少なくとも1つの全体を横切るように延びる、請求項16に記載の吐出チップ。
- 前記バイメタルバルブは、1つ以上のマウントによって、前記1つ以上の流体ポートの少なくとも1つから離間されて配置されている、請求項13に記載の吐出チップ。
- 前記1つ以上のバルブの少なくとも1つは、圧電バルブまたは静電バルブであってもよい、請求項1に記載の吐出チップ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261700013P | 2012-09-12 | 2012-09-12 | |
US61/700,013 | 2012-09-12 | ||
PCT/IB2013/002980 WO2014060845A1 (en) | 2012-09-12 | 2013-09-12 | Maintenance valves for micro-fluid ejection heads |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015534513A true JP2015534513A (ja) | 2015-12-03 |
JP6292234B2 JP6292234B2 (ja) | 2018-03-14 |
Family
ID=50239677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015530519A Active JP6292234B2 (ja) | 2012-09-12 | 2013-09-12 | 流体吐出ヘッドのためのメンテナンスバルブ |
Country Status (7)
Country | Link |
---|---|
US (2) | US9630419B2 (ja) |
EP (2) | EP2892725B1 (ja) |
JP (1) | JP6292234B2 (ja) |
CN (1) | CN104781077B (ja) |
AU (1) | AU2013333568A1 (ja) |
BR (1) | BR112015005501A2 (ja) |
WO (1) | WO2014060845A1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2013333568A1 (en) * | 2012-09-12 | 2015-04-09 | Funai Electric Co., Ltd. | Maintenance valves for micro-fluid ejection heads |
DE102013222377B3 (de) * | 2013-11-04 | 2015-02-19 | J. Schmalz Gmbh | Sauggreifvorrichtung |
US10363731B2 (en) | 2014-12-18 | 2019-07-30 | Palo Alto Research Center Incorporated | Ejector device |
ITUA20162174A1 (it) * | 2016-03-31 | 2017-10-01 | St Microelectronics Srl | Procedimento di fabbricazione di un sensore di pressione mems e relativo sensore di pressione mems |
IT201600118584A1 (it) | 2016-11-23 | 2018-05-23 | St Microelectronics Srl | Dispositivo microfluidico per la spruzzatura di gocce di liquidi di piccole dimensioni |
JP7306063B2 (ja) * | 2019-05-29 | 2023-07-11 | セイコーエプソン株式会社 | 液体吐出ユニット、および、液体吐出装置 |
US11577513B2 (en) | 2020-10-06 | 2023-02-14 | Funai Electric Co., Ltd. | Photoimageable nozzle member for reduced fluid cross-contamination and method therefor |
US11926157B2 (en) * | 2021-03-05 | 2024-03-12 | Funai Electric Co., Ltd. | Photoresist imaging and development for enhanced nozzle plate adhesion |
Citations (9)
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JPS6328654A (ja) * | 1986-07-23 | 1988-02-06 | Nec Corp | インクジエツトヘツドのインク整流機構 |
JPH09131891A (ja) * | 1995-10-26 | 1997-05-20 | Hewlett Packard Co <Hp> | インク・ジェット・ペン内の液体の流れを制御する弁アセンブリ |
JP2002086729A (ja) * | 2000-07-12 | 2002-03-26 | Canon Inc | 液体吐出ヘッド、その製造方法及び液体吐出装置 |
JP2002254647A (ja) * | 2001-03-02 | 2002-09-11 | Canon Inc | 液体吐出ヘッド、液体吐出方法、および液体吐出ヘッドの製造方法 |
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-
2013
- 2013-09-12 AU AU2013333568A patent/AU2013333568A1/en not_active Abandoned
- 2013-09-12 CN CN201380047465.6A patent/CN104781077B/zh active Active
- 2013-09-12 EP EP13836210.8A patent/EP2892725B1/en active Active
- 2013-09-12 EP EP16207503.0A patent/EP3173236B1/en active Active
- 2013-09-12 US US14/427,267 patent/US9630419B2/en active Active
- 2013-09-12 WO PCT/IB2013/002980 patent/WO2014060845A1/en active Application Filing
- 2013-09-12 BR BR112015005501A patent/BR112015005501A2/pt not_active IP Right Cessation
- 2013-09-12 JP JP2015530519A patent/JP6292234B2/ja active Active
-
2017
- 2017-04-11 US US15/484,358 patent/US9902166B2/en active Active
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JPS6328654A (ja) * | 1986-07-23 | 1988-02-06 | Nec Corp | インクジエツトヘツドのインク整流機構 |
JPH09131891A (ja) * | 1995-10-26 | 1997-05-20 | Hewlett Packard Co <Hp> | インク・ジェット・ペン内の液体の流れを制御する弁アセンブリ |
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Also Published As
Publication number | Publication date |
---|---|
EP2892725A1 (en) | 2015-07-15 |
CN104781077B (zh) | 2017-07-14 |
EP2892725B1 (en) | 2017-03-08 |
JP6292234B2 (ja) | 2018-03-14 |
EP3173236B1 (en) | 2020-06-03 |
EP3173236A1 (en) | 2017-05-31 |
US20170225484A1 (en) | 2017-08-10 |
US9630419B2 (en) | 2017-04-25 |
BR112015005501A2 (pt) | 2017-07-04 |
WO2014060845A1 (en) | 2014-04-24 |
CN104781077A (zh) | 2015-07-15 |
US9902166B2 (en) | 2018-02-27 |
US20150224784A1 (en) | 2015-08-13 |
AU2013333568A1 (en) | 2015-04-09 |
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