JP2015532442A - センサ素子を備えた空気質量流量計 - Google Patents
センサ素子を備えた空気質量流量計 Download PDFInfo
- Publication number
- JP2015532442A JP2015532442A JP2015538392A JP2015538392A JP2015532442A JP 2015532442 A JP2015532442 A JP 2015532442A JP 2015538392 A JP2015538392 A JP 2015538392A JP 2015538392 A JP2015538392 A JP 2015538392A JP 2015532442 A JP2015532442 A JP 2015532442A
- Authority
- JP
- Japan
- Prior art keywords
- sensor element
- air mass
- mass flow
- temperature sensor
- resistors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 50
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000011109 contamination Methods 0.000 abstract description 6
- 239000000356 contaminant Substances 0.000 description 9
- 238000002485 combustion reaction Methods 0.000 description 8
- 239000003921 oil Substances 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 6
- 239000000446 fuel Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6845—Micromachined devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/696—Circuits therefor, e.g. constant-current flow meters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
Abstract
Description
Claims (5)
- センサ素子(15)を備えた空気質量流量計(2)であって、
測定すべき空気質量流(10)は、前記センサ素子(15)の上を越えて移動し、
前記センサ素子(15)は、微小電気機械システムとして形成されており、該微小電気機械システムはダイアフラム(17)を有しており、該ダイアフラム(17)の上に加熱素子(12)が形成されており、
前記空気質量流(10)の方向において、前記加熱素子(12)の前方及び後方に、1つの電気的な測定抵抗(22)と、少なくとも2つの電気的な比較抵抗(21)が、それぞれ配置されており、
それぞれ前記1つの測定抵抗(22)を前記少なくとも2つの比較抵抗(21)と電気的に結線することにより、第1の温度センサ素子(7)と第2の温度センサ素子(8)が形成される、
センサ素子(15)を備えた空気質量流量計(2)において、
前記第1の温度センサ素子(7)は、前記センサ素子(15)に設けられた複数の抵抗から成る直列接続回路として形成されており、該複数の抵抗は、前記空気質量流(10)の方向を基準として、前記加熱素子(12)の前方に配置された1つの測定抵抗(22)と、前記空気質量流(10)の方向を基準として、前記加熱素子(12)の後方に配置された2つの比較抵抗(21)とを含み
前記第2の温度センサ素子(8)は、前記センサ素子(15)に設けられた複数の抵抗から成る直列接続回路として形成されており、該複数の抵抗は、前記空気質量流(10)の方向を基準として、前記加熱素子(12)の後方に配置された1つの測定抵抗(22)と、前記空気質量流(10)の方向を基準として、前記加熱素子(12)の前方に配置された2つの比較抵抗(21)とを含む
ことを特徴とする、
センサ素子(15)を備えた空気質量流量計(2)。 - 前記測定抵抗(22)各々の抵抗値は、前記比較抵抗(21)各々の抵抗値よりも著しく大きい、
請求項1に記載のセンサ素子(15)を備えた空気質量流量計(2)。 - 前記測定抵抗(22)各々の抵抗値は、前記比較抵抗(21)各々の抵抗値よりも少なくとも10倍大きい、
請求項2に記載のセンサ素子(15)を備えた空気質量流量計(2)。 - 前記比較抵抗(21)は、前記ダイアフラム(17)の周縁領域に配置されている、
請求項1から3のいずれか1項に記載のセンサ素子(15)を備えた空気質量流量計(2)。 - 前記測定抵抗(22)は、前記ダイアフラム(17)の内部領域に配置されている、
請求項1から4のいずれか1項に記載のセンサ素子(15)を備えた空気質量流量計(2)。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102012219305.7 | 2012-10-23 | ||
DE102012219305.7A DE102012219305B3 (de) | 2012-10-23 | 2012-10-23 | Luftmassenmesser mit einem Sensorelement |
PCT/EP2013/071917 WO2014064026A2 (de) | 2012-10-23 | 2013-10-21 | Luftmassenmesser mit einem sensorelement |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015532442A true JP2015532442A (ja) | 2015-11-09 |
JP6073489B2 JP6073489B2 (ja) | 2017-02-01 |
Family
ID=49485711
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015538392A Active JP6073489B2 (ja) | 2012-10-23 | 2013-10-21 | センサ素子を備えた空気質量流量計 |
Country Status (7)
Country | Link |
---|---|
US (1) | US9557202B2 (ja) |
EP (1) | EP2912414A2 (ja) |
JP (1) | JP6073489B2 (ja) |
KR (1) | KR20150070390A (ja) |
CN (1) | CN104736977B (ja) |
DE (1) | DE102012219305B3 (ja) |
WO (1) | WO2014064026A2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014219541A1 (de) * | 2014-09-26 | 2016-03-31 | Continental Automotive Gmbh | Luftmassenmesser mit einem Sensorelement |
US10274353B2 (en) * | 2017-03-22 | 2019-04-30 | A. O. Smith Corporation | Flow sensor with hot film anemometer |
DE102017119667B4 (de) | 2017-08-28 | 2023-05-25 | Dionex Softron Gmbh | Messung eines Fluidflusses |
EP3671139A1 (en) * | 2018-12-20 | 2020-06-24 | Sensirion AG | Detection of contaminations on a sensing surface of a thermal sensor |
KR102177856B1 (ko) | 2020-07-13 | 2020-11-11 | (주)바이올 | 주위온도 의존성을 제거한 열질량 풍속센서를 이용한 풍속계 |
CN113513605B (zh) * | 2021-04-01 | 2023-03-24 | 青岛芯笙微纳电子科技有限公司 | 一种基于电磁控制阀的mems质量流量控制器及控制方法 |
CN113325198B (zh) * | 2021-06-09 | 2022-04-29 | 东南大学 | 一种柔性热对流式加速度传感器及其制备方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000227352A (ja) * | 1999-02-08 | 2000-08-15 | Denso Corp | 熱式流量センサ |
JP2000352531A (ja) * | 1999-06-10 | 2000-12-19 | Mitsubishi Electric Corp | 感熱式流量センサ |
JP2006064710A (ja) * | 2005-11-21 | 2006-03-09 | Hitachi Ltd | 熱式流量計測装置 |
JP2006098057A (ja) * | 2004-09-28 | 2006-04-13 | Hitachi Ltd | 流量センサ |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4208135A1 (de) * | 1992-03-13 | 1993-09-16 | Siemens Ag | Vorrichtung zur messung einer gas- oder fluessigkeitsstroemung |
DE4407209C2 (de) * | 1994-03-04 | 1996-10-17 | Bosch Gmbh Robert | Vorrichtung zur Messung der Masse eines in einer Leitung strömenden Mediums |
DE19509555B4 (de) | 1995-03-16 | 2006-01-19 | Robert Bosch Gmbh | Durchflußsensor |
JP3475853B2 (ja) * | 1998-12-21 | 2003-12-10 | 三菱電機株式会社 | 流量測定装置 |
US6508117B1 (en) * | 2001-07-12 | 2003-01-21 | Delphi Technologies, Inc. | Thermally balanced mass air flow sensor |
DE10217884B4 (de) | 2002-04-22 | 2004-08-05 | Siemens Ag | Vorrichtung zur Messung der in einer Leitung strömenden Luftmasse |
JP3817497B2 (ja) * | 2002-06-10 | 2006-09-06 | 株式会社日立製作所 | 熱式流量計測装置 |
JP3945385B2 (ja) * | 2002-11-15 | 2007-07-18 | オムロン株式会社 | フローセンサ及び流量計測方法 |
JP2006058078A (ja) * | 2004-08-18 | 2006-03-02 | Hitachi Ltd | 熱式空気流量計 |
DE102005016447A1 (de) * | 2005-04-11 | 2006-10-12 | Robert Bosch Gmbh | Verfahren zum Betrieb von Heißfilmluftmassenmessern |
JP5210491B2 (ja) | 2006-02-03 | 2013-06-12 | 日立オートモティブシステムズ株式会社 | 熱式流量センサ |
EP1965179B1 (en) * | 2007-02-28 | 2017-04-12 | Sensirion Holding AG | Flow detector device with self check |
JP4836864B2 (ja) * | 2007-05-16 | 2011-12-14 | 日立オートモティブシステムズ株式会社 | 熱式流量計 |
DE102008032300A1 (de) * | 2008-07-09 | 2010-01-14 | Continental Automotive Gmbh | Vorrichtung zur thermischen Massenstrommessung, insbesondere zur Messung der einer Brennkraftmaschine zugeführten Luftmasse |
JP5120289B2 (ja) | 2009-02-18 | 2013-01-16 | 株式会社デンソー | 空気流量測定装置 |
JP5406674B2 (ja) * | 2009-11-06 | 2014-02-05 | 日立オートモティブシステムズ株式会社 | 熱式流体流量センサおよびその製造方法 |
-
2012
- 2012-10-23 DE DE102012219305.7A patent/DE102012219305B3/de active Active
-
2013
- 2013-10-21 WO PCT/EP2013/071917 patent/WO2014064026A2/de active Application Filing
- 2013-10-21 US US14/437,732 patent/US9557202B2/en active Active
- 2013-10-21 JP JP2015538392A patent/JP6073489B2/ja active Active
- 2013-10-21 CN CN201380055304.1A patent/CN104736977B/zh active Active
- 2013-10-21 KR KR1020157013192A patent/KR20150070390A/ko not_active Application Discontinuation
- 2013-10-21 EP EP13782682.2A patent/EP2912414A2/de not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000227352A (ja) * | 1999-02-08 | 2000-08-15 | Denso Corp | 熱式流量センサ |
JP2000352531A (ja) * | 1999-06-10 | 2000-12-19 | Mitsubishi Electric Corp | 感熱式流量センサ |
JP2006098057A (ja) * | 2004-09-28 | 2006-04-13 | Hitachi Ltd | 流量センサ |
JP2006064710A (ja) * | 2005-11-21 | 2006-03-09 | Hitachi Ltd | 熱式流量計測装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2014064026A3 (de) | 2014-07-03 |
DE102012219305B3 (de) | 2014-02-13 |
KR20150070390A (ko) | 2015-06-24 |
CN104736977A (zh) | 2015-06-24 |
JP6073489B2 (ja) | 2017-02-01 |
US20150285666A1 (en) | 2015-10-08 |
CN104736977B (zh) | 2017-09-22 |
US9557202B2 (en) | 2017-01-31 |
WO2014064026A2 (de) | 2014-05-01 |
EP2912414A2 (de) | 2015-09-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6073489B2 (ja) | センサ素子を備えた空気質量流量計 | |
US8069718B2 (en) | Thermal flowmeter | |
JP5080020B2 (ja) | 熱式流量センサ | |
JP5883887B2 (ja) | 流量計測装置 | |
JP2008020193A (ja) | 熱式流量センサ | |
JP4157034B2 (ja) | 熱式流量計測装置 | |
JP2014169948A (ja) | 熱式流体計測装置 | |
JP6186244B2 (ja) | 温湿度センサ用ヒータの温度制御装置 | |
JP6177334B2 (ja) | 空気質量流量計を動作させるための方法 | |
JP6073491B2 (ja) | エアフローメータ | |
JP6109322B2 (ja) | 空気質量計 | |
JP5634698B2 (ja) | 質量流量センサ装置の製造方法および質量流量センサ装置 | |
JP2003090750A (ja) | 流量及び流速測定装置 | |
JP2012247266A (ja) | 熱式流量測定装置 | |
WO2017203860A1 (ja) | 湿度測定装置 | |
JP2016217813A (ja) | 熱式流量計及びその傾斜誤差改善方法 | |
JP4914226B2 (ja) | 気体流量計 | |
JP2005274515A (ja) | センサ及びその測定方法 | |
JP2012078228A (ja) | 空気流量測定装置 | |
JP2017219426A (ja) | 気体流量測定装置 | |
JP2007286006A (ja) | 流量測定装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20150618 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20160425 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20160530 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20160720 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20161220 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170104 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6073489 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |