JP2015150561A - 照射装置のための運転法 - Google Patents
照射装置のための運転法 Download PDFInfo
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- JP2015150561A JP2015150561A JP2015028465A JP2015028465A JP2015150561A JP 2015150561 A JP2015150561 A JP 2015150561A JP 2015028465 A JP2015028465 A JP 2015028465A JP 2015028465 A JP2015028465 A JP 2015028465A JP 2015150561 A JP2015150561 A JP 2015150561A
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- irradiation
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- 238000000034 method Methods 0.000 title claims abstract description 32
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 238000010438 heat treatment Methods 0.000 claims description 69
- 230000005855 radiation Effects 0.000 claims description 33
- 238000001816 cooling Methods 0.000 claims description 23
- 238000011017 operating method Methods 0.000 claims description 17
- 230000001678 irradiating effect Effects 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 abstract description 19
- 230000008569 process Effects 0.000 abstract description 3
- 239000003570 air Substances 0.000 description 57
- 238000009423 ventilation Methods 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 230000007704 transition Effects 0.000 description 5
- 238000013021 overheating Methods 0.000 description 4
- 238000004659 sterilization and disinfection Methods 0.000 description 4
- 230000006978 adaptation Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 230000001954 sterilising effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 229910000497 Amalgam Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
- A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
- A61L2/08—Radiation
- A61L2/10—Ultraviolet radiation
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/10—Irradiation devices with provision for relative movement of beam source and object to be irradiated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
- B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
- B41F23/0403—Drying webs
- B41F23/0406—Drying webs by radiation
- B41F23/0409—Ultraviolet dryers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
- B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
- B41F23/044—Drying sheets, e.g. between two printing stations
- B41F23/045—Drying sheets, e.g. between two printing stations by radiation
- B41F23/0453—Drying sheets, e.g. between two printing stations by radiation by ultraviolet dryers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B55/00—Preserving, protecting or purifying packages or package contents in association with packaging
- B65B55/02—Sterilising, e.g. of complete packages
- B65B55/12—Sterilising contents prior to, or during, packaging
- B65B55/16—Sterilising contents prior to, or during, packaging by irradiation
Landscapes
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Toxicology (AREA)
- Mechanical Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- Animal Behavior & Ethology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Epidemiology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Apparatus For Disinfection Or Sterilisation (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
Abstract
Description
(a) UV放射器を、目標運転温度に関連した目標運転放射出力で運転する方法ステップと、
(b) 基板を、UV放射器により規定された照射領域に所定の供給速度で連続的に供給する方法ステップと、
(c) 基板に照射領域で照射を行う方法ステップと
を有する、照射装置のための運転法に関する。
(aa) UV放射器をオフにして、
(bb) 加熱エレメントをオンにし、
連続的な基板供給の中断の解消時には、
(cc) UV放射器をオンにして、
(dd) 加熱エレメントをオフにする
と有利であると判った。
2 ワークピース
3 コーティング
4 搬送装置
5 放射器ユニット
6a,6b,6c 放射器モジュール
7 搬送方向
8a,8b 照射野(線)
9a UV放射器
10a,10b,10c 加熱エレメント
11 光学式のセンサ
12 温度センサ
13 調整ユニット
200 放射器モジュール
201 ハウジング
201a ハウジング背面
202,203 通気通路
204 加熱螺旋体
205a〜205h UV放射器
400 放射器モジュール
401 ハウジング
402 反射器
403 ハウジング窓
404 加熱エレメント
405a〜405h UV放射器
500 放射器モジュール
501 ハウジング
502 窓
503 UV放射器
504 空冷システム
601〜604 曲線推移
Claims (10)
- 基板(2)にUV放射器(9a;205a〜205h;405a〜405h,503)によって照射を行う照射装置(1)のための運転法であって、
(a) UV放射器(9a;205a〜205h;405a〜405h,503)を、目標運転温度に関連した目標運転放射出力で運転する方法ステップと、
(b) 基板(2)を、UV放射器(9a;205a〜205h;405a〜405h,503)により規定された照射領域に所定の供給速度で連続的に供給する方法ステップと、
(c) 基板(2)に照射領域で照射を行う方法ステップと
を有する、照射装置のための運転法において、
連続的な基板供給の中断時には、UV放射器(9a;205a〜205h;405a〜405h,503)をオフにし、該オフにされたUV放射器(9a;205a〜205h;405a〜405h,503)の放射器温度を測定し、目標運転温度を10℃よりも多い分だけ下回る放射器温度の低下を防ぐための対策を行うことを特徴とする、照射装置のための運転法。 - 前記対策として、加熱エレメント(10a,10b,10c,404)によるUV放射器(9a;205a〜205h;405a〜405h)の加熱を行う、請求項1記載の運転法。
- 放射器温度に、空冷装置(202;203)により発生させられる空気流によって影響を与え、前記対策として、加熱エレメント(204)による空気流の加熱を行う、請求項1記載の運転法。
- 放射器温度に、空冷装置(202;203)により発生させられる空気流によって影響を与え、前記対策として、空気流の質量流量の変更を行う、請求項1から3までのいずれか1項記載の運転法。
- 連続的な基板供給の中断時には、
(aa) UV放射器(9a;205a〜205h;405a〜405h)をオフにして、
(bb) 加熱エレメント(10a,10b,10c,404)をオンにし、
連続的な基板供給の中断の解消時には、
(cc) UV放射器(9a;205a〜205h;405a〜405h,503)をオンにして、
(dd) 加熱エレメント(10a,10b,10c,404)をオフにする、
請求項2または3記載の運転法。 - 空気流の加熱を空冷装置(202;203)の空気供給通路(202)内で行う、請求項3記載の運転法。
- 照射装置(1)が、UV放射器(405a〜405h)に面した側と、UV放射器(405a〜405h)とは反対の側とを備えた反射器(402)を有しており、空気流の加熱を、反射器(402)の前記反対の側に配置された加熱エレメント(404)によって行う、請求項3または6記載の運転法。
- 放射器長手方向に対して垂直な方向でUV放射器(9a;205a〜205h)の周囲に空気流を流す、請求項3、4、6または7記載の運転法。
- 供給速度をセンサ(11)によって継続的に検出する、請求項1から8までのいずれか1項記載の運転法。
- UV放射器(9a;205a〜205h;405a〜405h,503)の温度をセンサ(12)によって継続的に検出する、請求項1から9までのいずれか1項記載の運転法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014101935.0 | 2014-02-17 | ||
DE102014101935.0A DE102014101935B4 (de) | 2014-02-17 | 2014-02-17 | Betriebsverfahren für eine Bestrahlungsvorrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015150561A true JP2015150561A (ja) | 2015-08-24 |
JP5980357B2 JP5980357B2 (ja) | 2016-08-31 |
Family
ID=52450023
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015028465A Expired - Fee Related JP5980357B2 (ja) | 2014-02-17 | 2015-02-17 | 照射装置のための運転法 |
Country Status (10)
Country | Link |
---|---|
US (1) | US9281093B2 (ja) |
EP (1) | EP2907527B1 (ja) |
JP (1) | JP5980357B2 (ja) |
CN (1) | CN104851472B (ja) |
DE (1) | DE102014101935B4 (ja) |
DK (1) | DK2907527T3 (ja) |
ES (1) | ES2603802T3 (ja) |
HU (1) | HUE031085T2 (ja) |
LT (1) | LT2907527T (ja) |
PL (1) | PL2907527T3 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014101935B4 (de) * | 2014-02-17 | 2018-05-30 | Heraeus Noblelight Gmbh | Betriebsverfahren für eine Bestrahlungsvorrichtung |
US9674963B1 (en) * | 2015-06-03 | 2017-06-06 | Eric Sari | Multilevel machine to process coatings |
DE102017217881A1 (de) | 2016-11-08 | 2018-05-09 | Heidelberger Druckmaschinen Ag | Verfahren zum Betreiben einer UV-Härtungsvorrichtung einer Druckmaschine |
JP7109930B2 (ja) * | 2018-02-05 | 2022-08-01 | 日機装株式会社 | 流体殺菌装置 |
USD914232S1 (en) | 2019-12-19 | 2021-03-23 | Bridgeport Magnetics Group, Inc. | Ultraviolet radiation surface disinfection device |
US20220189759A1 (en) * | 2020-12-11 | 2022-06-16 | The Boeing Company | Ultraviolet light-emitting module and disinfecting system |
US12023413B2 (en) | 2020-12-11 | 2024-07-02 | The Boeing Company | Ultraviolet light-emitting module and disinfecting system |
Citations (8)
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JPS61107795A (ja) * | 1984-10-31 | 1986-05-26 | 日立化成工業株式会社 | フレキシブル配線板の製造法 |
JPS6271533A (ja) * | 1985-09-26 | 1987-04-02 | Toshiba Corp | 紫外線照射装置 |
JPH09503432A (ja) * | 1993-10-06 | 1997-04-08 | ウォーター・リカバリー・ピーエルシー | 流体処理のための紫外線装置 |
JPH09282918A (ja) * | 1996-04-16 | 1997-10-31 | Yazaki Corp | 車両計器用バックライト照明装置 |
JPH11103163A (ja) * | 1997-09-26 | 1999-04-13 | Nec Corp | ビームはんだ付け装置 |
JP2008034143A (ja) * | 2006-07-26 | 2008-02-14 | Matsushita Electric Works Ltd | 埋込型照明器具 |
JP2009103981A (ja) * | 2007-10-24 | 2009-05-14 | Fujifilm Corp | 光学補償フィルムの製造方法及び光学補償フィルム |
JP2013033636A (ja) * | 2011-08-02 | 2013-02-14 | Harison Toshiba Lighting Corp | 紫外線照射システム |
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JPH03238041A (ja) * | 1989-11-30 | 1991-10-23 | Toshiba Lighting & Technol Corp | 紫外線照射装置 |
JPH0794251B2 (ja) | 1992-08-03 | 1995-10-11 | 澁谷工業株式会社 | キャップ殺菌装置 |
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-
2014
- 2014-02-17 DE DE102014101935.0A patent/DE102014101935B4/de not_active Expired - Fee Related
-
2015
- 2015-02-09 PL PL15154264T patent/PL2907527T3/pl unknown
- 2015-02-09 LT LTEP15154264.4T patent/LT2907527T/lt unknown
- 2015-02-09 ES ES15154264.4T patent/ES2603802T3/es active Active
- 2015-02-09 HU HUE15154264A patent/HUE031085T2/hu unknown
- 2015-02-09 DK DK15154264.4T patent/DK2907527T3/en active
- 2015-02-09 EP EP15154264.4A patent/EP2907527B1/de not_active Not-in-force
- 2015-02-13 US US14/621,624 patent/US9281093B2/en not_active Expired - Fee Related
- 2015-02-15 CN CN201510081368.XA patent/CN104851472B/zh not_active Expired - Fee Related
- 2015-02-17 JP JP2015028465A patent/JP5980357B2/ja not_active Expired - Fee Related
Patent Citations (8)
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JPS61107795A (ja) * | 1984-10-31 | 1986-05-26 | 日立化成工業株式会社 | フレキシブル配線板の製造法 |
JPS6271533A (ja) * | 1985-09-26 | 1987-04-02 | Toshiba Corp | 紫外線照射装置 |
JPH09503432A (ja) * | 1993-10-06 | 1997-04-08 | ウォーター・リカバリー・ピーエルシー | 流体処理のための紫外線装置 |
JPH09282918A (ja) * | 1996-04-16 | 1997-10-31 | Yazaki Corp | 車両計器用バックライト照明装置 |
JPH11103163A (ja) * | 1997-09-26 | 1999-04-13 | Nec Corp | ビームはんだ付け装置 |
JP2008034143A (ja) * | 2006-07-26 | 2008-02-14 | Matsushita Electric Works Ltd | 埋込型照明器具 |
JP2009103981A (ja) * | 2007-10-24 | 2009-05-14 | Fujifilm Corp | 光学補償フィルムの製造方法及び光学補償フィルム |
JP2013033636A (ja) * | 2011-08-02 | 2013-02-14 | Harison Toshiba Lighting Corp | 紫外線照射システム |
Also Published As
Publication number | Publication date |
---|---|
PL2907527T3 (pl) | 2017-02-28 |
CN104851472B (zh) | 2017-11-10 |
EP2907527A1 (de) | 2015-08-19 |
LT2907527T (lt) | 2016-11-25 |
DE102014101935B4 (de) | 2018-05-30 |
US9281093B2 (en) | 2016-03-08 |
DE102014101935A1 (de) | 2015-08-20 |
EP2907527B1 (de) | 2016-08-24 |
ES2603802T3 (es) | 2017-03-01 |
CN104851472A (zh) | 2015-08-19 |
JP5980357B2 (ja) | 2016-08-31 |
DK2907527T3 (en) | 2016-11-28 |
US20150235727A1 (en) | 2015-08-20 |
HUE031085T2 (hu) | 2017-06-28 |
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