JP2015093445A - 液体吐出ヘッドの製造方法 - Google Patents
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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Abstract
【解決手段】 液体供給口が形成された基板と、基板上に液体供給口と連通する液体流路を形成する流路形成部材と、を有する液体吐出ヘッドの製造方法であって、液体供給口となる穴が開口した基板を用意する工程と、基板上にドライフィルムを貼り付けドライフィルムで穴の開口に蓋をする工程と、ドライフィルムの蓋部分を硬化させる工程と、ドライフィルムをパターニングしドライフィルムの蓋部分を含む領域で液体流路の型材を形成する工程と、型材を覆うように流路形成部材を形成する工程と、型材を除去し液体流路を形成する工程と、を有することを特徴とする液体吐出ヘッドの製造方法。
【選択図】 図1
Description
まず、図2(a)に示すように、基板2として、シリコンで形成された(100)基板を用意した。基板2には、絶縁膜6としてSiO2、耐キャビテーション膜7としてTaが形成されている。
まず、図3(a)、図3(b)に示すように、基板2に液体供給口3を形成した。これらの工程は、実施例1の図2(a)、図2(b)に関して説明した内容と同様とした。
実施例1では、ドライフィルム8を露光して硬化させたが、比較例1では、この工程を行わなかった。ドライフィルム8のパターニングは、RIEによって行った。これ以外は実施例1と同様にして、液体吐出ヘッドを製造した。
Claims (9)
- 液体供給口が形成された基板と、前記基板上に前記液体供給口と連通する液体流路を形成する流路形成部材と、を有する液体吐出ヘッドの製造方法であって、
前記液体供給口となる穴が開口した基板を用意する工程と、
前記基板上にドライフィルムを貼り付け、前記ドライフィルムで前記穴の開口に蓋をする工程と、
前記ドライフィルムの前記穴の蓋となっている蓋部分を硬化させる工程と、
前記ドライフィルムをパターニングし、前記ドライフィルムの前記蓋部分を含む領域で前記液体流路の型材を形成する工程と、
前記型材を覆うように、前記流路形成部材を形成する工程と、
前記型材を除去し、前記液体流路を形成する工程と、
を有することを特徴とする液体吐出ヘッドの製造方法。 - 前記蓋部分の硬化が、前記ドライフィルムを露光することによる光硬化である請求項1に記載の液体吐出ヘッドの製造方法。
- 前記ドライフィルムが、ネガ型感光性樹脂で形成されている請求項1または2に記載の液体吐出ヘッドの製造方法。
- 前記ドライフィルムの厚みは、3μm以上30μm以下である請求項1乃至3のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記蓋部分の上に感光性樹脂層を形成し、前記蓋部分を第一の型材、前記感光性樹脂層を第二の型材とし、前記第一の型材と前記第二の型材とで前記型材を形成する請求項1乃至4のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記第二の型材に空間を形成し、前記空間に前記流路形成部材を入り込ませることで、入り込ませた流路形成部材の部分を液体流路の間の壁とする請求項5に記載の液体吐出ヘッドの製造方法。
- 前記第一の型材と前記第二の型材とを一括し、前記液体流路を形成する請求項5または6に記載の液体吐出ヘッドの製造方法。
- 前記第一の型材と前記第二の型材とが同じ種類の感光性樹脂で形成されている請求項5乃至7のいずれか1項に記載の液体吐出ヘッドの製造方法。
- 前記蓋部分の硬化が、前記ドライフィルムを加熱することによる熱硬化である請求項1に記載の液体吐出ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013234943A JP6327836B2 (ja) | 2013-11-13 | 2013-11-13 | 液体吐出ヘッドの製造方法 |
US14/538,660 US9090067B2 (en) | 2013-11-13 | 2014-11-11 | Method for manufacturing liquid discharge head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2013234943A JP6327836B2 (ja) | 2013-11-13 | 2013-11-13 | 液体吐出ヘッドの製造方法 |
Publications (3)
Publication Number | Publication Date |
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JP2015093445A true JP2015093445A (ja) | 2015-05-18 |
JP2015093445A5 JP2015093445A5 (ja) | 2016-12-28 |
JP6327836B2 JP6327836B2 (ja) | 2018-05-23 |
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JP2013234943A Expired - Fee Related JP6327836B2 (ja) | 2013-11-13 | 2013-11-13 | 液体吐出ヘッドの製造方法 |
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US (1) | US9090067B2 (ja) |
JP (1) | JP6327836B2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170203569A1 (en) | 2016-01-19 | 2017-07-20 | Canon Kabushiki Kaisha | Liquid ejection head manufacturing method |
CN107031189A (zh) * | 2016-01-08 | 2017-08-11 | 佳能株式会社 | 液体喷出头、液体喷出设备及制造方法 |
US20200209742A1 (en) * | 2018-12-27 | 2020-07-02 | Canon Kabushiki Kaisha | Method of producing microstructure and method of producing liquid ejection head |
WO2020222739A1 (en) * | 2019-04-29 | 2020-11-05 | Hewlett-Packard Development Company L.P. | Manufacturing a corrosion tolerant micro-electromechanical fluid ejection device |
US11787180B2 (en) | 2019-04-29 | 2023-10-17 | Hewlett-Packard Development Company, L.P. | Corrosion tolerant micro-electromechanical fluid ejection device |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016221866A (ja) * | 2015-06-01 | 2016-12-28 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP6700977B2 (ja) * | 2016-05-27 | 2020-05-27 | キヤノン株式会社 | 構造体の製造方法 |
WO2019021503A1 (ja) | 2017-07-28 | 2019-01-31 | グリー株式会社 | ゲームシステム |
JP2022085629A (ja) * | 2020-11-27 | 2022-06-08 | キヤノン株式会社 | 溶着方法、液体吐出ヘッドの製造方法および液体吐出ヘッド |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08323985A (ja) * | 1995-03-31 | 1996-12-10 | Canon Inc | インクジェットヘッドの製造方法 |
US20060146092A1 (en) * | 2004-12-30 | 2006-07-06 | Barnes Johnathan L | Process for making a micro-fluid ejection head structure |
JP2009220286A (ja) * | 2008-03-13 | 2009-10-01 | Canon Inc | 液体吐出記録ヘッド及その製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4532785B2 (ja) * | 2001-07-11 | 2010-08-25 | キヤノン株式会社 | 構造体の製造方法、および液体吐出ヘッドの製造方法 |
JP2006224598A (ja) | 2005-02-21 | 2006-08-31 | Canon Inc | インクジェットヘッドおよびその製造方法 |
US20090136875A1 (en) * | 2007-11-15 | 2009-05-28 | Canon Kabushiki Kaisha | Manufacturing method of liquid ejection head |
JP5197724B2 (ja) * | 2009-12-22 | 2013-05-15 | キヤノン株式会社 | 液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 |
JP5546504B2 (ja) * | 2011-07-14 | 2014-07-09 | キヤノン株式会社 | 記録ヘッドの製造方法 |
-
2013
- 2013-11-13 JP JP2013234943A patent/JP6327836B2/ja not_active Expired - Fee Related
-
2014
- 2014-11-11 US US14/538,660 patent/US9090067B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08323985A (ja) * | 1995-03-31 | 1996-12-10 | Canon Inc | インクジェットヘッドの製造方法 |
US20060146092A1 (en) * | 2004-12-30 | 2006-07-06 | Barnes Johnathan L | Process for making a micro-fluid ejection head structure |
JP2009220286A (ja) * | 2008-03-13 | 2009-10-01 | Canon Inc | 液体吐出記録ヘッド及その製造方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107031189A (zh) * | 2016-01-08 | 2017-08-11 | 佳能株式会社 | 液体喷出头、液体喷出设备及制造方法 |
US20170203569A1 (en) | 2016-01-19 | 2017-07-20 | Canon Kabushiki Kaisha | Liquid ejection head manufacturing method |
CN106976316A (zh) * | 2016-01-19 | 2017-07-25 | 佳能株式会社 | 液体喷射头制造方法 |
US10343406B2 (en) | 2016-01-19 | 2019-07-09 | Canon Kabushiki Kaisha | Liquid ejection head manufacturing method |
CN106976316B (zh) * | 2016-01-19 | 2019-11-22 | 佳能株式会社 | 液体喷射头制造方法 |
US20200209742A1 (en) * | 2018-12-27 | 2020-07-02 | Canon Kabushiki Kaisha | Method of producing microstructure and method of producing liquid ejection head |
WO2020222739A1 (en) * | 2019-04-29 | 2020-11-05 | Hewlett-Packard Development Company L.P. | Manufacturing a corrosion tolerant micro-electromechanical fluid ejection device |
US11787180B2 (en) | 2019-04-29 | 2023-10-17 | Hewlett-Packard Development Company, L.P. | Corrosion tolerant micro-electromechanical fluid ejection device |
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Publication number | Publication date |
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US9090067B2 (en) | 2015-07-28 |
JP6327836B2 (ja) | 2018-05-23 |
US20150129542A1 (en) | 2015-05-14 |
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