JP2014110270A - 洗浄装置 - Google Patents
洗浄装置 Download PDFInfo
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- JP2014110270A JP2014110270A JP2012262734A JP2012262734A JP2014110270A JP 2014110270 A JP2014110270 A JP 2014110270A JP 2012262734 A JP2012262734 A JP 2012262734A JP 2012262734 A JP2012262734 A JP 2012262734A JP 2014110270 A JP2014110270 A JP 2014110270A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 70
- 239000007788 liquid Substances 0.000 claims abstract description 111
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 230000003028 elevating effect Effects 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 abstract description 22
- 238000011109 contamination Methods 0.000 abstract description 15
- 239000000356 contaminant Substances 0.000 abstract description 3
- 238000001035 drying Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】外周保持手段20は、液体を上面21aに貯留し液体層6を形成する液体貯留部21と液体貯留部21の上面21aに液体を供給する液体供給口22と液体貯留部21を作用位置P1と非作用位置P2とに選択的に位置づける昇降部23とを備えているため、ウェーハWの洗浄の際は、液体貯留部21が作用位置P1に位置づけられて液体貯留部21に形成された液体層6の上面7がスピンナーテーブル2の上面3と同等の高さとなり液体層6がウェーハWの外周部Wcを保持し、洗浄手段10によりウェーハWの表面Waを洗浄できる。また、ウェーハWの裏面Wbは液体層6が封止しているため、コンタミが裏面Wbに回り込むことを防ぎ、ウェーハWの裏面汚染を低減することができる。
【選択図】図1
Description
また、液体層がウェーハの外周部を保持することでウェーハの外周部側の裏面が液体層によって封止されるため、ウェーハの表面にあるコンタミが裏面に回り込むことを防ぐことができる。したがって、ウェーハの裏面汚染を低減することができ、デバイスの品質に悪影響を及ぼすことを抑制することができる。
また、液体層6がウェーハWの外周部Wcを保持することでウェーハWの外周部Wc側の裏面Wbが液体層6によって封止されるため、ウェーハWの表面Waにあるコンタミが裏面に回り込むことを防ぐことができる。これにより、ウェーハの裏面汚染を低減することができる。
4:多孔質部材 5:回転軸 6:液体層 7:上面
8:収容器 9a:搬送エリア 9b:洗浄エリア
10:洗浄手段 11:スクラブ洗浄部材 12:支持柱 13:洗浄水供給ノズル
14:洗浄水供給源 15:圧縮エアー供給ノズル 16:エアー供給源 17:支持部
20:外周保持手段 21:液体貯留部 21a:上面
22:液体供給口 23:昇降部 23a:ピストン
24:供給管 25:開閉バルブ 26:供給源
30:研削装置
31:基台 32:コラム 33a,33b:ステージ
34a,34b:カセット 35:搬送手段
36:仮置き手段 37:ターンテーブル 38:チャックテーブル
39:研削手段
40:研削送り手段 41:第1の搬送アーム 42:第2の搬送アーム
P1:作用位置 P2:非作用位置
W:ウェーハ Wa:表面(被洗浄面) Wb:裏面 Wc:外周部
Claims (1)
- ウェーハの外径よりも小径に形成され、ウェーハを上面に保持して回転可能なスピンナーテーブルと、
該スピンナーテーブルの上面に保持されたウェーハの被洗浄面に洗浄水を供給し該ウェーハの被洗浄面を洗浄する洗浄手段と、
該スピンナーテーブルを囲繞して形成されウェーハの外周部を液体層によって支持する外周保持手段と、を備え、
該外周保持手段は、液体を上面に貯留し液体層を形成する液体貯留部と、
該液体貯留部の上面に液体を供給する液体供給口と、
該液体貯留部を作用位置と非作用位置とに選択的に位置づける昇降部と、を備え、
該作用位置では、該液体貯留部に形成された該液体層の上面が該スピンナーテーブルの上面と同等の高さ位置に位置づけられ、
該非作用位置では、該液体貯留部の上面が該スピンナーテーブルの上面よりも下方に位置づけられ、
ウェーハ洗浄の際には、該液体貯留部は該作用位置に位置づけられ該液体供給口から液体が該液体貯留部の上面に供給され、該スピンナーテーブルの上面に保持されたウェーハの外周部が該液体貯留部に形成された液体層により保持されるとともに該スピンナーテーブルの回転によってウェーハが回転し該洗浄手段によりウェーハの被洗浄面の洗浄が行われ、
ウェーハ乾燥の際には、該液体貯留部は該非作用位置に位置づけられ、該スピンナーテーブルが高速回転することによってウェーハの被洗浄面の乾燥が行われること、を特徴とする洗浄装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012262734A JP2014110270A (ja) | 2012-11-30 | 2012-11-30 | 洗浄装置 |
KR1020130133392A KR20140070371A (ko) | 2012-11-30 | 2013-11-05 | 세정 장치 |
CN201310601770.7A CN103855059A (zh) | 2012-11-30 | 2013-11-25 | 清洗装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012262734A JP2014110270A (ja) | 2012-11-30 | 2012-11-30 | 洗浄装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2014110270A true JP2014110270A (ja) | 2014-06-12 |
Family
ID=50862546
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012262734A Pending JP2014110270A (ja) | 2012-11-30 | 2012-11-30 | 洗浄装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2014110270A (ja) |
KR (1) | KR20140070371A (ja) |
CN (1) | CN103855059A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2014087761A1 (ja) * | 2012-12-04 | 2017-01-05 | リソテック ジャパン株式会社 | 基板処理機構及びこれを用いた小型製造装置 |
KR20170120024A (ko) | 2016-04-20 | 2017-10-30 | 가부시기가이샤 디스코 | 세정 장치 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105180986B (zh) * | 2015-09-25 | 2017-11-28 | 西安立芯光电科技有限公司 | 一种样品测试/处理装置 |
CN113035744B (zh) * | 2021-02-25 | 2021-12-03 | 无锡亚电智能装备有限公司 | 一种半导体晶圆清洗装置 |
CN113035743B (zh) * | 2021-02-25 | 2022-01-25 | 无锡亚电智能装备有限公司 | 一种逐步抬升晶圆的晶圆清洗方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02193815A (ja) * | 1989-01-18 | 1990-07-31 | Shibayama Kikai Kk | 半導体ウエハの移送方法とその移送機構 |
JP2000049135A (ja) * | 1998-07-27 | 2000-02-18 | Toho Kasei Kk | ウェーハ処理装置及びウェーハ処理方法 |
JP2000260740A (ja) * | 1999-03-12 | 2000-09-22 | Disco Abrasive Syst Ltd | スピンナー洗浄装置 |
JP2003197718A (ja) * | 2001-12-26 | 2003-07-11 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP2003273055A (ja) * | 2002-03-13 | 2003-09-26 | Disco Abrasive Syst Ltd | スピンナー洗浄装置 |
JP2010109209A (ja) * | 2008-10-31 | 2010-05-13 | Disco Abrasive Syst Ltd | 研削装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5669461B2 (ja) * | 2010-07-01 | 2015-02-12 | 株式会社ディスコ | スピンナ洗浄装置 |
JP5669518B2 (ja) * | 2010-10-18 | 2015-02-12 | 株式会社ディスコ | ウエーハ搬送機構 |
JP2012094659A (ja) * | 2010-10-26 | 2012-05-17 | Disco Abrasive Syst Ltd | スピンナ洗浄装置 |
-
2012
- 2012-11-30 JP JP2012262734A patent/JP2014110270A/ja active Pending
-
2013
- 2013-11-05 KR KR1020130133392A patent/KR20140070371A/ko not_active Application Discontinuation
- 2013-11-25 CN CN201310601770.7A patent/CN103855059A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02193815A (ja) * | 1989-01-18 | 1990-07-31 | Shibayama Kikai Kk | 半導体ウエハの移送方法とその移送機構 |
JP2000049135A (ja) * | 1998-07-27 | 2000-02-18 | Toho Kasei Kk | ウェーハ処理装置及びウェーハ処理方法 |
JP2000260740A (ja) * | 1999-03-12 | 2000-09-22 | Disco Abrasive Syst Ltd | スピンナー洗浄装置 |
JP2003197718A (ja) * | 2001-12-26 | 2003-07-11 | Tokyo Electron Ltd | 基板処理装置及び基板処理方法 |
JP2003273055A (ja) * | 2002-03-13 | 2003-09-26 | Disco Abrasive Syst Ltd | スピンナー洗浄装置 |
JP2010109209A (ja) * | 2008-10-31 | 2010-05-13 | Disco Abrasive Syst Ltd | 研削装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2014087761A1 (ja) * | 2012-12-04 | 2017-01-05 | リソテック ジャパン株式会社 | 基板処理機構及びこれを用いた小型製造装置 |
KR20170120024A (ko) | 2016-04-20 | 2017-10-30 | 가부시기가이샤 디스코 | 세정 장치 |
Also Published As
Publication number | Publication date |
---|---|
KR20140070371A (ko) | 2014-06-10 |
CN103855059A (zh) | 2014-06-11 |
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