JP2014090098A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2014090098A JP2014090098A JP2012239534A JP2012239534A JP2014090098A JP 2014090098 A JP2014090098 A JP 2014090098A JP 2012239534 A JP2012239534 A JP 2012239534A JP 2012239534 A JP2012239534 A JP 2012239534A JP 2014090098 A JP2014090098 A JP 2014090098A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/11001—Involving a temporary auxiliary member not forming part of the manufacturing apparatus, e.g. removable or sacrificial coating, film or substrate
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/114—Manufacturing methods by blanket deposition of the material of the bump connector
- H01L2224/1146—Plating
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/115—Manufacturing methods by chemical or physical modification of a pre-existing or pre-deposited material
- H01L2224/11505—Sintering
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/119—Methods of manufacturing bump connectors involving a specific sequence of method steps
- H01L2224/11901—Methods of manufacturing bump connectors involving a specific sequence of method steps with repetition of the same manufacturing step
- H01L2224/11902—Multiple masking steps
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- H—ELECTRICITY
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
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- H01L2224/13011—Shape comprising apertures or cavities, e.g. hollow bump
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
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Abstract
【解決手段】半導体素子11と、前記半導体素子と基板21とを電気的および機械的に接続し、複数の金属粒子と前記複数の金属粒子間を接続するめっき層とを含み、金属32と空洞34が混在するポーラス構造を含む接続部材30と、を具備する半導体装置。半導体素子11上にマスク層を形成し、前記マスク層の開口内に複数の金属粒子32aを配置し、前記複数の金属粒子32a間をめっきにより接続することにより、前記半導体素子と基板21とを電気的および機械的に接続し、金属32と空洞34が混在するポーラス構造を含む接続部材30を形成する半導体装置の製造方法。
【選択図】図2
Description
(付記1)半導体素子と、前記半導体素子と基板とを電気的および機械的に接続し、複数の金属粒子と前記複数の金属粒子間を接続するめっき層とを含み、金属と空洞が混在するポーラス構造を含む接続部材と、を具備することを特徴とする半導体装置。
(付記2)前記複数の金属粒子と前記めっき層とは同じ金属を主成分とすることを特徴とする付記1記載の半導体装置。
(付記3)前記金属は銅を主成分とすることを特徴とする付記2記載の半導体装置。
(付記4)半導体素子上にマスク層を形成し、前記マスク層の開口内に複数の金属粒子を配置し、前記複数の金属粒子間をめっきにより接続することにより、前記半導体素子と基板とを電気的および機械的に接続し、金属と空洞が混在するポーラス構造を含む接続部材を形成することを特徴とする半導体装置の製造方法。
(付記5)前記複数の金属粒子と溶剤を含むペーストを印刷法により前記開口内に配置することを特徴とする付記4記載の半導体装置の製造方法。
(付記6)前記開口に前記複数の金属粒子の径より小さな孔を備えるシートを配置し、前記孔を介し前記溶剤とめっき液とを交換することを特徴とする付記5記載の半導体装置の製造方法。
(付記7)前記複数の金属粒子間を電気めっきにより接続することを特徴とする付記4から6のいずれか一項記載の半導体装置の製造方法。
(付記8)前記複数の金属粒子間を前記金属粒子と同じ主成分の金属により接続することを特徴とする付記4から7のいずれか一項記載の半導体装置。
(付記9)前記金属は銅を主成分とすることを特徴とする付記8記載の半導体装置。
21 基板
30 接続部材
32a 金属粒子
32b めっき層
34 空洞部
42 ペースト
46 めっき液
68 シート
69 孔
Claims (5)
- 半導体素子と、
前記半導体素子と基板とを電気的および機械的に接続し、複数の金属粒子と前記複数の金属粒子間を接続するめっき層とを含み、金属と空洞が混在するポーラス構造を含む接続部材と、
を具備することを特徴とする半導体装置。 - 前記複数の金属粒子と前記めっき層とは同じ金属を主成分とすることを特徴とする請求項1記載の半導体装置。
- 半導体素子上にマスク層を形成し、
前記マスク層の開口内に複数の金属粒子を配置し、
前記複数の金属粒子間をめっきにより接続することにより、前記半導体素子と基板とを電気的および機械的に接続し、金属と空洞が混在するポーラス構造を含む接続部材を形成することを特徴とする半導体装置の製造方法。 - 前記複数の金属粒子と溶剤を含むペーストを印刷法により前記開口内に配置することを特徴とする請求項3記載の半導体装置の製造方法。
- 前記開口に前記複数の金属粒子の径より小さな孔を備えるシートを配置し、
前記孔を介し前記溶剤とめっき液とを交換することを特徴とする請求項4記載の半導体装置の製造方法。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022176563A1 (ja) * | 2021-02-19 | 2022-08-25 | ソニーセミコンダクタソリューションズ株式会社 | 電子機器 |
CN117832170A (zh) * | 2024-03-05 | 2024-04-05 | 北京大学 | 一种适用于电子封装的连接结构的制备方法及连接结构 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140381A (ja) * | 1985-12-13 | 1987-06-23 | 沖電気工業株式会社 | 電子部品用接続導体 |
JP2003174055A (ja) * | 2001-12-06 | 2003-06-20 | Asahi Kasei Corp | 微細パターン接続用回路部品およびその形成方法 |
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140381A (ja) * | 1985-12-13 | 1987-06-23 | 沖電気工業株式会社 | 電子部品用接続導体 |
JP2003174055A (ja) * | 2001-12-06 | 2003-06-20 | Asahi Kasei Corp | 微細パターン接続用回路部品およびその形成方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2022176563A1 (ja) * | 2021-02-19 | 2022-08-25 | ソニーセミコンダクタソリューションズ株式会社 | 電子機器 |
CN117832170A (zh) * | 2024-03-05 | 2024-04-05 | 北京大学 | 一种适用于电子封装的连接结构的制备方法及连接结构 |
CN117832170B (zh) * | 2024-03-05 | 2024-05-07 | 北京大学 | 一种适用于电子封装的连接结构的制备方法及连接结构 |
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