JP2014081234A5 - - Google Patents
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- Publication number
- JP2014081234A5 JP2014081234A5 JP2012228005A JP2012228005A JP2014081234A5 JP 2014081234 A5 JP2014081234 A5 JP 2014081234A5 JP 2012228005 A JP2012228005 A JP 2012228005A JP 2012228005 A JP2012228005 A JP 2012228005A JP 2014081234 A5 JP2014081234 A5 JP 2014081234A5
- Authority
- JP
- Japan
- Prior art keywords
- probe unit
- inspection apparatus
- mechanisms
- inspection
- pair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 claims description 46
- 238000007689 inspection Methods 0.000 claims description 32
- 230000000875 corresponding Effects 0.000 claims 3
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012228005A JP6084426B2 (ja) | 2012-10-15 | 2012-10-15 | 検査装置 |
CN201310481443.2A CN103728505B (zh) | 2012-10-15 | 2013-10-15 | 检查装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012228005A JP6084426B2 (ja) | 2012-10-15 | 2012-10-15 | 検査装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2014081234A JP2014081234A (ja) | 2014-05-08 |
JP2014081234A5 true JP2014081234A5 (hr) | 2015-09-17 |
JP6084426B2 JP6084426B2 (ja) | 2017-02-22 |
Family
ID=50452666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012228005A Active JP6084426B2 (ja) | 2012-10-15 | 2012-10-15 | 検査装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6084426B2 (hr) |
CN (1) | CN103728505B (hr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104393837A (zh) * | 2014-11-28 | 2015-03-04 | 苏州晟成光伏设备有限公司 | 高位el检查机放电触头连接机构 |
JP6422376B2 (ja) * | 2015-03-06 | 2018-11-14 | 三菱電機株式会社 | 半導体装置検査用治具 |
KR102614075B1 (ko) * | 2017-12-26 | 2023-12-14 | 주식회사 탑 엔지니어링 | 기판 검사 장치 |
KR102202035B1 (ko) * | 2020-09-03 | 2021-01-12 | 주식회사 프로이천 | 오토 프로브장치 |
KR102202033B1 (ko) * | 2020-09-03 | 2021-01-12 | 주식회사 프로이천 | 캠승강식 오토 프로브장치 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59100600A (ja) * | 1982-11-30 | 1984-06-09 | 九州日本電気株式会社 | 半導体素子製造用自動選別装置 |
JPS59100599A (ja) * | 1982-11-30 | 1984-06-09 | 九州日本電気株式会社 | 半導体素子製造用自動選別装置 |
JPS61272946A (ja) * | 1985-05-28 | 1986-12-03 | Nec Corp | 半導体検査装置 |
JPH03252571A (ja) * | 1990-03-01 | 1991-11-11 | Tokyo Electron Ltd | 基板の検査装置 |
JPH04177849A (ja) * | 1990-11-13 | 1992-06-25 | Nec Kyushu Ltd | プロービング装置 |
JP2000180807A (ja) * | 1998-12-15 | 2000-06-30 | Micronics Japan Co Ltd | 液晶基板の検査装置 |
JP3480925B2 (ja) * | 2000-09-12 | 2003-12-22 | 株式会社双晶テック | ディスプレイパネル又はプローブブロックの支持枠体 |
JP3457938B2 (ja) * | 2000-10-16 | 2003-10-20 | 株式会社双晶テック | 表示基板又は回路基板の検査装置における表示基板又は回路基板の交換方法 |
JP2002222839A (ja) * | 2001-01-29 | 2002-08-09 | Advantest Corp | プローブカード |
TWI231964B (en) * | 2003-03-10 | 2005-05-01 | Phicom Corp | LCD panel auto gripping apparatus and method for use in a panel carrier for an automatic probe unit |
JP4490066B2 (ja) * | 2003-09-18 | 2010-06-23 | 株式会社日本マイクロニクス | 表示用パネルの検査装置 |
CN1731203A (zh) * | 2005-03-09 | 2006-02-08 | 飞而康公司 | 液晶显示器面板的检查装置及其检查方法 |
KR20060109194A (ko) * | 2005-04-15 | 2006-10-19 | 삼성전자주식회사 | 액정표시패널의 검사방법 |
KR100611608B1 (ko) * | 2005-11-15 | 2006-08-11 | 주식회사 코디에스 | 평판형 디스플레이 검사 방법 및 평판형 디스플레이 검사용유닛 |
JP2007285727A (ja) * | 2006-04-12 | 2007-11-01 | Tokyo Cathode Laboratory Co Ltd | プローブカード配置ユニット及びプローブカードを有する測定装置 |
JP4808135B2 (ja) * | 2006-11-09 | 2011-11-02 | 株式会社日本マイクロニクス | プローブ位置合わせ方法及び可動式プローブユニット機構並びに検査装置 |
JP2010122092A (ja) * | 2008-11-20 | 2010-06-03 | Toshiba Corp | プローブカード |
JP5631114B2 (ja) * | 2010-08-24 | 2014-11-26 | 株式会社日本マイクロニクス | 平板状被検査体の検査装置 |
-
2012
- 2012-10-15 JP JP2012228005A patent/JP6084426B2/ja active Active
-
2013
- 2013-10-15 CN CN201310481443.2A patent/CN103728505B/zh active Active
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