JP2013256441A - 半極性窒化ガリウムブールの大規模アモノサーマル製造のためのプロセス - Google Patents
半極性窒化ガリウムブールの大規模アモノサーマル製造のためのプロセス Download PDFInfo
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- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/04—Pattern deposit, e.g. by using masks
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- C30B7/10—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by application of pressure, e.g. hydrothermal processes
- C30B7/105—Single-crystal growth from solutions using solvents which are liquid at normal temperature, e.g. aqueous solutions by application of pressure, e.g. hydrothermal processes using ammonia as solvent, i.e. ammonothermal processes
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Abstract
【解決手段】大面積単結晶シードプレートをラック内に吊るすことと、前記ラックをアンモニアおよび鉱化剤と共に大径オートクレーブまたは内部加熱型高圧力装置中に配置することと、結晶を自動的に成長させることとを含む。バイファセット成長形態を維持することで、肉厚ブールを成長させることなしに、大面積半極性ウェーハの作製を容易化することができる。
【選択図】図4B
Description
政府ライセンス権
本発明は、米国エネルギー省から付与された契約DE−SC0006168における政府援助に基づく。政府は本発明における特定の権利を有する。
上記から、特に半極性ブールおよびウェーハのための大規模GaN結晶成長における向上した技術が望まれていることが理解される。
ε1=tan−1[(x−cosθ)/sinθ] (1)
例1
例2
例3
例4
例5
例6
Claims (20)
- ガリウム含有窒化物結晶であって、
長さが約5ミリメートルを超える結晶基板部材と;
半極性配向を有する少なくとも1つの大面積表面であって、前記半極性配向は、前記m面配向および前記c面配向ぞれぞれから少なくとも約5度だけミスカットされている大面積表面と;
約1016cm―3を超える不純物濃度であって、少なくとも1つの不純物は、O、H、Li、Na、K、F、Cl、Br、I、Si、Ge、Cu、MnおよびFeから選択され、前記少なくとも1つの不純物は、前記結晶の少なくとも1つの大面積表面に平行な方向において分布を有し、前記結晶は、前記少なくとも1つの不純物のより高い不純物濃度及びより低い不純物濃度の少なくとも4つの交互の帯を含み、前記より高い不純物濃度は、前記より低い不純物濃度と比較して約1.05倍〜約40倍高い不純物濃度と
を備えたガリウム含有窒化物結晶。
- 前記半極性配向は、{60−6±1}、{50−5±1}、{40−4±1}、{30−3±1}、{50−5±2}、{20−2±1}、{30−3±2}、{40−4±3}および{50−5±4}の何れかの約3度以内である請求項1に記載の結晶。
- 前記長さは約25ミリメートルを超える請求項1に記載の結晶。
- 少なくとも1つの大面積表面の転位密度は約107cm−2未満である請求項1に記載の結晶。
- 少なくとも1つの大面積表面の結晶配向に対応する対称X線ロッキングカーブの半値全幅は約150秒未満である請求項1に記載の結晶。
- 前記結晶内の少なくとも1つの不純物の分布は、前記より高い不純物濃度および前記より低い不純物濃度の少なくとも8つの交互の帯を含み、前記より高い不純物濃度は前記より低い不純物濃度と比較して約1.05倍〜約10倍高い請求項1に記載の結晶。
- 前記結晶基板部材は、実質的にウルツ鉱構造を有し、他の結晶構造を実質的に含まず、前記他の結晶構造は前記実質的にウルツ鉱構造である構造の体積の約1%未満である請求項1に記載の結晶。
- 前記少なくとも1つの不純物はOおよびHから選択され、前記分布は前記より高い不純物濃度および前記より低い不純物濃度の少なくとも8つの交互の帯を含み、前記より高い不純物濃度は前記より低い不純物濃度と比較して約1.1倍〜約2倍高い請求項1に記載の結晶。
- 少なくとも1つの大面積表面の転位密度は約105cm−2未満である請求項1に記載のの結晶。
- 少なくとも1つの大面積表面の結晶配向と関連付けられた最低次対称X線ロッキングカーブの半値全幅は約150秒未満である請求項1に記載の結晶。
- 少なくとも1つの大面積表面の転位密度は約105cm−2未満である請求項1に記載の結晶。
- 少なくとも1つの大面積表面の転位密度は約104cm−2未満である請求項1に記載の結晶。
- 少なくとも1つの大面積表面の結晶配向に対応する対称X線ロッキングカーブの半値全幅は約100秒未満である請求項1に記載の結晶。
- 少なくとも1つの大面積表面の結晶配向と関連付けられた最低次対称X線ロッキングカーブの半値全幅は約100秒未満である請求項1に記載の結晶。
- 少なくとも1つの大面積表面の結晶配向に対応する対称X線ロッキングカーブの半値全幅は約50秒未満である請求項1に記載の結晶。
- 少なくとも1つの大面積表面の結晶配向に対応する最低次対称X線ロッキングカーブの半値全幅は約50秒未満である請求項1に記載の結晶。
- 前記帯は、前記少なくとも1つの大面積表面に平行な方向において周期的分布を有し、約0.01ミリメートル〜約10センチメートルの周期を有する、請求項1に記載の結晶。
- 前記帯は、前記少なくとも1つの大面積表面に平行な方向において周期的分布を有し、約0.1ミリメートル〜約50ミリメートルの周期を有する、請求項1に記載の結晶。
- 前記帯は、前記少なくとも1つの大面積表面に平行な方向において周期的分布を有し、約1ミリメートル〜約10ミリメートルの周期を有する、請求項1に記載の結晶。
- ガリウム含有窒化物結晶であって、
長さが約25ミリメートルを超える結晶基板部材と;
半極性配向を有する少なくとも1つの大面積表面であって、前記半極性配向は、前記m面配向および前記c面配向ぞれぞれから少なくとも約5度だけミスカットされ、{60−6±1}、{50−5±1}、{40−4±1}、{30−3±1}、{50−5±2}、{20−2±1}、{30−3±2}、{40−4±3}および{50−5±4}のうち1つの約3度以内である大面積表面と;
約1016cm―3を超える不純物濃度であって、少なくとも1つの不純物は、O、H、Li、Na、K、F、Cl、BrおよびIから選択され、前記少なくとも1つの不純物は、前記結晶の少なくとも1つの大面積表面に平行な方向において分布を有し、前記結晶は、前記少なくとも1つの不純物のより高い不純物濃度及びより低い不純物濃度の少なくとも4つの交互の帯を含み、前記より高い不純物濃度は、前記より低い不純物濃度と比較して約1.05倍〜約10倍高い不純物濃度と
を備えたガリウム含有窒化物結晶。
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US10145026B2 (en) | 2018-12-04 |
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