JP2013254783A5 - - Google Patents
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- Publication number
- JP2013254783A5 JP2013254783A5 JP2012128158A JP2012128158A JP2013254783A5 JP 2013254783 A5 JP2013254783 A5 JP 2013254783A5 JP 2012128158 A JP2012128158 A JP 2012128158A JP 2012128158 A JP2012128158 A JP 2012128158A JP 2013254783 A5 JP2013254783 A5 JP 2013254783A5
- Authority
- JP
- Japan
- Prior art keywords
- mold
- butane
- gas
- imprint
- resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- IJDNQMDRQITEOD-UHFFFAOYSA-N butane Chemical compound CCCC IJDNQMDRQITEOD-UHFFFAOYSA-N 0.000 claims description 8
- 239000001273 butane Substances 0.000 claims description 8
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007789 gas Substances 0.000 claims 12
- 235000020127 ayran Nutrition 0.000 claims 1
- 238000009835 boiling Methods 0.000 claims 1
- 235000021152 breakfast Nutrition 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012128158A JP5932500B2 (ja) | 2012-06-05 | 2012-06-05 | インプリント方法およびインプリント装置、それを用いた物品の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012128158A JP5932500B2 (ja) | 2012-06-05 | 2012-06-05 | インプリント方法およびインプリント装置、それを用いた物品の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013254783A JP2013254783A (ja) | 2013-12-19 |
| JP2013254783A5 true JP2013254783A5 (zh) | 2015-07-16 |
| JP5932500B2 JP5932500B2 (ja) | 2016-06-08 |
Family
ID=49952078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012128158A Active JP5932500B2 (ja) | 2012-06-05 | 2012-06-05 | インプリント方法およびインプリント装置、それを用いた物品の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5932500B2 (zh) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6176937B2 (ja) * | 2012-09-19 | 2017-08-09 | キヤノン株式会社 | インプリント用光硬化性組成物及び膜の製造方法 |
| JP2016162863A (ja) * | 2015-02-27 | 2016-09-05 | キヤノン株式会社 | パターンの形成方法、加工基板の製造方法、光学部品の製造方法、回路基板の製造方法、電子部品の製造方法 |
| JP6647027B2 (ja) | 2015-12-03 | 2020-02-14 | キヤノン株式会社 | インプリント装置および物品製造方法 |
| US10754243B2 (en) * | 2016-03-31 | 2020-08-25 | Canon Kabushiki Kaisha | Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold |
| US10578965B2 (en) * | 2016-03-31 | 2020-03-03 | Canon Kabushiki Kaisha | Pattern forming method |
| US10754245B2 (en) * | 2016-03-31 | 2020-08-25 | Canon Kabushiki Kaisha | Pattern forming method as well as production methods for processed substrate, optical component, circuit board, electronic component and imprint mold |
| CN109116679A (zh) * | 2018-09-19 | 2019-01-01 | 京东方科技集团股份有限公司 | 纳米压印方法及纳米压印装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4975008B2 (ja) * | 2007-12-13 | 2012-07-11 | エルジー ディスプレイ カンパニー リミテッド | インキ組成物及びこれを用いたパターン形成方法 |
| KR101363783B1 (ko) * | 2008-11-14 | 2014-02-17 | 엘지디스플레이 주식회사 | 임프린팅용 감광성 수지 조성물 및 기판 상에 유기막을 형성하는 방법 |
| JP5175771B2 (ja) * | 2009-02-27 | 2013-04-03 | 株式会社日立ハイテクノロジーズ | 微細構造転写装置及び微細構造転写方法 |
-
2012
- 2012-06-05 JP JP2012128158A patent/JP5932500B2/ja active Active
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