JP2013124378A - Plasma spraying device and method of controlling the same - Google Patents
Plasma spraying device and method of controlling the same Download PDFInfo
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本発明は、基材表面に溶射粉末材料の皮膜を効率的に形成することができるプラズマ溶射装置及びその制御方法に関する。 The present invention relates to a plasma spraying apparatus capable of efficiently forming a coating of a thermal spray powder material on a surface of a substrate and a control method thereof.
基材表面に皮膜を形成させる装置として、従来、プラズマアークに投入された溶射粉末材料（例えば、セラミックスや金属粉末材料など）を溶融して基材表面に吹き付け、皮膜を形成させるプラズマ溶射装置などが用いられている（例えば、特許文献１の図１などを参照）。 Conventionally, as a device for forming a film on the surface of a substrate, a plasma spraying device for forming a film by melting and spraying a sprayed powder material (for example, ceramics or metal powder material) put on a plasma arc on the surface of the substrate. (For example, see FIG. 1 of Patent Document 1).
上述のようなプラズマ溶射装置においては、溶射粉末材料の投入口が電極中心部の出口付近に固定されているが、プラズマの火花の発生位置は一定でないため、溶射粉末材料を効率的な位置で投入することができず、基材表面に対して溶射粉末材料の皮膜の形成を効率的に行うことができないという問題がある。
本発明は、上記課題に鑑みてなされたものであり、基材表面に溶射粉末材料の皮膜を効率的に形成することができるプラズマ溶射装置及びその制御方法を提供することを目的とする。
In the plasma spraying apparatus as described above, the inlet of the thermal spray powder material is fixed near the outlet of the central part of the electrode, but since the generation position of the plasma spark is not constant, There is a problem that the film cannot be charged and the coating of the thermal spray powder material cannot be efficiently formed on the surface of the substrate.
This invention is made | formed in view of the said subject, and it aims at providing the plasma spraying apparatus which can form the membrane | film | coat of a thermal spraying powder material on the base-material surface efficiently, and its control method.
上記課題を解決するために、本発明に係るプラズマ溶射装置は、プラズマアーク中又はプラズマジェット中に投入され、溶融された溶射粉末材料を吹き付けることにより、基材表面に前記溶射粉末材料の皮膜を形成させる装置であって、前記プラズマアーク中又は前記プラズマジェット中に前記溶射粉末材料を投入する溶射粉末材料投入管と、前記プラズマアーク又は前記プラズマジェットの温度分布を計測する温度分布計測手段と、前記温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動させる制御手段と、を備える。前記温度分布計測手段は、例えばサーモグラフィカメラなどである。 In order to solve the above-mentioned problems, a plasma spraying apparatus according to the present invention applies a coating of the above-mentioned sprayed powder material to the surface of a base material by spraying the melted sprayed powder material into a plasma arc or a plasma jet. An apparatus for forming a thermal spray powder material injection tube for introducing the thermal spray powder material into the plasma arc or the plasma jet; and a temperature distribution measuring means for measuring a temperature distribution of the plasma arc or the plasma jet; Control means for moving the inlet of the thermal spray powder material inlet tube to the maximum temperature region of the temperature distribution. The temperature distribution measuring means is, for example, a thermography camera.
前記温度分布計測手段がサーモグラフィカメラであって、サーモグラフィカメラを複数備える場合、複数のサーモグラフィカメラは、異なる方向から前記プラズマアーク又は前記プラズマジェットの二次元温度分布をそれぞれ計測できるように設置されており、前記制御手段は、前記複数のサーモグラフィカメラによって計測された前記複数の二次元温度分布から三次元温度分布を作成し、前記三次元温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動させるように制御してもよい。また、前記温度分布計測手段がサーモグラフィカメラであって、サーモグラフィカメラを２台備える場合、２台のサーモグラフィカメラは、前記プラズマアーク又は前記プラズマジェットの中心軸に対して真上と真横に設置され、異なる方向から前記プラズマアーク又は前記プラズマジェットの二次元温度分布をそれぞれ計測できるように設置されており、前記制御手段は、前記２台のサーモグラフィカメラによって計測された２つの二次元温度分布データから三次元温度分布データを作成し、前記三次元温度分布データの最高温度領域に前記溶射粉末材料投入管の投入口を移動させるように制御してもよい。 When the temperature distribution measuring means is a thermography camera and includes a plurality of thermography cameras, the plurality of thermography cameras are installed so as to respectively measure the two-dimensional temperature distribution of the plasma arc or the plasma jet from different directions. The control means creates a three-dimensional temperature distribution from the plurality of two-dimensional temperature distributions measured by the plurality of thermographic cameras, and inserts the sprayed powder material input pipe into the highest temperature region of the three-dimensional temperature distribution. You may control to move. Further, when the temperature distribution measuring means is a thermography camera and includes two thermography cameras, the two thermography cameras are installed directly above and next to the central axis of the plasma arc or the plasma jet, The two-dimensional temperature distributions of the plasma arc or the plasma jet can be measured from different directions, respectively, and the control means can obtain a third order from the two two-dimensional temperature distribution data measured by the two thermographic cameras. Original temperature distribution data may be created, and control may be performed so that the inlet of the thermal spray powder material inlet tube is moved to the maximum temperature region of the three-dimensional temperature distribution data.
前記温度分布計測手段によって計測された温度分布が、三次元温度分布である場合、前記制御手段は、前記三次元温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動させるように制御してもよい。 When the temperature distribution measured by the temperature distribution measuring unit is a three-dimensional temperature distribution, the control unit moves the inlet of the thermal spray powder material inlet pipe to the highest temperature region of the three-dimensional temperature distribution. You may control.
なお、上述のプラズマ溶射装置において、前記温度分布計測手段は、前記温度分布を連続計測し、前記制御手段は、前記温度分布の最高温度領域の変化に基づいて前記溶射粉末材料投入管の投入口を移動させるように制御してもよい。 In the above-described plasma spraying apparatus, the temperature distribution measuring means continuously measures the temperature distribution, and the control means is based on a change in the maximum temperature region of the temperature distribution, and the inlet of the thermal spray powder material charging pipe You may control to move.
また、本発明に係る、溶射粉末材料投入管からプラズマアーク又はプラズマジェットに投入され、溶融された溶射粉末材料を吹き付けることにより、基材表面に前記溶射粉末材料の皮膜を形成させるプラズマ溶射装置の制御方法は、前記プラズマアーク又は前記プラズマジェットの温度分布を計測する工程と、前記温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動する工程と、を含む。 Further, according to the present invention, there is provided a plasma spraying apparatus that forms a coating of the sprayed powder material on the surface of the base material by spraying the melted sprayed powder material charged into a plasma arc or plasma jet from the sprayed powder material charging tube. The control method includes a step of measuring a temperature distribution of the plasma arc or the plasma jet, and a step of moving the inlet of the sprayed powder material input tube to the highest temperature region of the temperature distribution.
本発明によれば、基材表面に溶射粉末材料の皮膜を効率的に形成することができるプラズマ溶射装置及びその制御方法を提供することができる。 ADVANTAGE OF THE INVENTION According to this invention, the plasma spraying apparatus which can form the membrane | film | coat of thermal spraying powder material on the base-material surface efficiently, and its control method can be provided.
以下、本発明の好ましい実施形態につき、添付図面を参照して詳細に説明する。本発明に係るプラズマ溶射装置は、プラズマの熱エネルギーを利用して、例えばセラミックスや金属粉末材料などの溶射粉末材料を溶融し、基材表面に吹き付け皮膜を形成する装置である。 Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The plasma spraying apparatus according to the present invention is an apparatus that uses thermal energy of plasma to melt a sprayed powder material such as ceramics or a metal powder material, and forms a sprayed film on the surface of the substrate.
図１は、本発明の一実施形態として説明するプラズマ溶射装置１００の概略構成を示す図である。図１に示すように、本発明に係るプラズマ溶射装置１００は、対向する２つのアノードトーチ１１１，１１２と、１つのカソードトーチ１２０を備えるツインアノード型プラズマ溶射装置である。プラズマ溶射装置１００は、主電源１０１，１０２、アノードトーチ１１１，１１２、アルゴン供給管１１３，１１４、カソードトーチ１２０、アルゴン供給管１３０、二次ガス供給管１４０、アクセルノズル１５０、プラズマトリミング１６０、溶射粉末材料投入管１７０などを備える。 FIG. 1 is a diagram showing a schematic configuration of a plasma spraying apparatus 100 described as an embodiment of the present invention. As shown in FIG. 1, a plasma spraying apparatus 100 according to the present invention is a twin anode type plasma spraying apparatus including two anode torches 111 and 112 facing each other and one cathode torch 120. The plasma spraying apparatus 100 includes main power supplies 101 and 102, anode torches 111 and 112, argon supply pipes 113 and 114, cathode torch 120, argon supply pipe 130, secondary gas supply pipe 140, accelerator nozzle 150, plasma trimming 160, thermal spraying. A powder material input tube 170 and the like are provided.
主電源１０１，１０２により電極１１１，１１２，１２０に電圧が印加されると、アルゴン供給管１３０から供給されたアルゴンガスと、二次ガス供給管１４０から供給された二次ガス（例えば空気、窒素ガス、ヘリウムガス、二酸化炭素ガスなど）によりカソードトーチ１２０からプラズマアークが生成され、また、アルゴン供給管１１３，１１４から供給されたアルゴンガスによりアノードトーチ１１１，１１２からプラズマアークが生成される。カソードトーチ１２０から生成されたプラズマアークは、アクセルノズル１５０によって加速されてプラズマアーク（ＰＡ）が生成され、アノードトーチ１１１，１１２から生成されたプラズマアークと合流し、プラズマジェット（ＰＪ）となる。また、アクセルノズル１５０によって生成されたプラズマアーク（ＰＡ）には、溶射粉末材料投入管１７０から溶射粉末材料が投入され、溶融される。プラズマジェット（ＰＪ）において溶射粉末材料の溶融に利用されない熱は、プラズマトリミング１６０から供給された空気によりトリミングされる。溶射粉末材料が溶融されたプラズマジェット（ＰＪ）は、基材（Ｍ）の表面に吹き付けられ、溶射粉末材料の皮膜（Ｃ）が形成される。 When a voltage is applied to the electrodes 111, 112, and 120 by the main power supplies 101 and 102, the argon gas supplied from the argon supply pipe 130 and the secondary gas supplied from the secondary gas supply pipe 140 (for example, air, nitrogen) A plasma arc is generated from the cathode torch 120 by gas, helium gas, carbon dioxide gas, etc., and a plasma arc is generated from the anode torches 111 and 112 by argon gas supplied from the argon supply pipes 113 and 114. The plasma arc generated from the cathode torch 120 is accelerated by the accelerator nozzle 150 to generate a plasma arc (PA), and merges with the plasma arc generated from the anode torches 111 and 112 to form a plasma jet (PJ). In addition, the plasma spray (PA) generated by the accelerator nozzle 150 is charged with a thermal spray powder material from the thermal spray powder material input tube 170 and melted. The heat that is not used for melting the thermal spray powder material in the plasma jet (PJ) is trimmed by the air supplied from the plasma trimming 160. The plasma jet (PJ) in which the thermal spray powder material is melted is sprayed on the surface of the base material (M) to form a coating (C) of the thermal spray powder material.
本実施の形態において、本発明に係るプラズマ溶射装置１００は、制御装置１７３、サーモグラフィカメラ１８１，１８２などをさらに備えている。２台のサーモグラフィカメラ１８１，１８２は、アクセルノズル１５０によって生成されたプラズマアーク（ＰＡ）の二次元温度分布を計測するものであり、それらは異なる方向からプラズマアーク（ＰＡ）の二次元温度分布を計測できるように設置されている。なお、２台のサーモグラフィカメラ１８１，１８２は、プラズマアーク（ＰＡ）の中心軸の上下、該中心軸の左右など異なる位置に設置されていればよいが、三次元温度分布を作成できるように、例えば、計測したそれぞれの二次元温度分布の平面がプラズマアーク（ＰＡ）の中心軸で垂直に交わるように設置されていることが好ましく、プラズマアーク（ＰＡ）の中心軸に対して真上と真横の方向にそれぞれ設置されていることがより好ましい。また、２台のサーモグラフィカメラ１８１，１８２は、アクセルノズル１５０によって生成されたプラズマアーク（ＰＡ）の全てを計測するものであってもよいが、プラズマアーク（ＰＡ）の発生部付近、すなわちプラズマアーク（ＰＡ）の最高温度領域付近、具体的にはアクセルノズル１５０の出口付近を計測するものであってもよい。 In the present embodiment, the plasma spraying apparatus 100 according to the present invention further includes a control device 173, thermographic cameras 181, 182 and the like. The two thermographic cameras 181 and 182 measure the two-dimensional temperature distribution of the plasma arc (PA) generated by the accelerator nozzle 150, and they measure the two-dimensional temperature distribution of the plasma arc (PA) from different directions. It is installed so that it can be measured. The two thermographic cameras 181 and 182 only need to be installed at different positions such as above and below the central axis of the plasma arc (PA), right and left of the central axis, so that a three-dimensional temperature distribution can be created. For example, it is preferable that the measured two-dimensional temperature distribution planes are arranged so that they intersect perpendicularly with the central axis of the plasma arc (PA). It is more preferable that they are respectively installed in the directions. The two thermographic cameras 181 and 182 may measure all of the plasma arc (PA) generated by the accelerator nozzle 150, but in the vicinity of the plasma arc (PA) generating portion, that is, the plasma arc. The vicinity of the maximum temperature region of (PA), specifically, the vicinity of the outlet of the accelerator nozzle 150 may be measured.
計測されたプラズマアーク（ＰＡ）の平面の二次元温度分布のデータは、通信線１８３を介してサーモグラフィカメラ１８１，１８２から制御装置１７３に送信される。制御装置１７３は、サーモグラフィカメラ１８１，１８２から受信したデータに基づいて、アクセルノズル１５０によって生成されたプラズマアーク（ＰＡ）の三次元温度分布データを作成する。制御装置１７３は、三次元温度分布データから最高温度領域を特定し、溶射粉末材料投入管１７０と接続された制御線１７２を介して溶射粉末材料投入管１７０の投入口１７１をＸＹＺ軸方向に移動させ、溶射粉末材料が最高温度領域に投入されるように投入口１７１を調整する。このように、プラズマアーク（ＰＡ）の最高温度領域に溶射粉末材料投入管１７０の投入口１７１を移動させることにより、溶射粉末材料を効率よく溶融させることができるようになり、もって基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）を効率的に形成することができるようになる。 The measured two-dimensional temperature distribution data of the plasma arc (PA) plane is transmitted from the thermographic cameras 181 and 182 to the control device 173 via the communication line 183. The control device 173 creates three-dimensional temperature distribution data of the plasma arc (PA) generated by the accelerator nozzle 150 based on the data received from the thermographic cameras 181 and 182. The control device 173 identifies the maximum temperature region from the three-dimensional temperature distribution data, and moves the inlet 171 of the thermal spray powder material input tube 170 in the XYZ axis direction via the control line 172 connected to the thermal spray powder material input tube 170. The injection port 171 is adjusted so that the thermal spray powder material is introduced into the maximum temperature region. In this way, by moving the inlet 171 of the thermal spray powder material input pipe 170 to the maximum temperature region of the plasma arc (PA), the thermal spray powder material can be efficiently melted, and thus the base material (M ) Can be efficiently formed on the surface of the thermal spray powder material.
なお、上述の、サーモグラフィカメラ１８１，１８２における計測、並びに、制御装置１７３における三次元温度分布データの作成、及びプラズマアーク（ＰＡ）の最高温度領域に対する溶射粉末材料投入管１７０の投入口１７１の移動は、本発明に係るプラズマ溶射装置１００を稼動する際にのみ行うこととしてもよいが、溶射粉末材料をより効率よく溶融させ、基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）をより効率的に形成できるようにするために、稼動時以降も定期的又は連続的に行うこととしてもよい。この場合、サーモグラフィカメラ１８１，１８２は、二次元温度分布を定期的又は連続的に計測し、制御装置１７３は、定期的又は連続的に作成した三次元温度分布データにおける最高温度領域の変化に基づいて溶射粉末材料投入管１７０の投入口１７１を瞬時に移動させる。 Note that the above-described measurement by the thermographic cameras 181 and 182, the creation of three-dimensional temperature distribution data by the control device 173, and the movement of the inlet 171 of the thermal spray powder material inlet pipe 170 with respect to the maximum temperature region of the plasma arc (PA). May be performed only when the plasma spraying apparatus 100 according to the present invention is operated, but the sprayed powder material is more efficiently melted and a coating (C) of the sprayed powder material is applied to the surface of the base material (M). In order to be able to form more efficiently, it is good also as performing periodically or continuously after an operation. In this case, the thermographic cameras 181 and 182 measure the two-dimensional temperature distribution regularly or continuously, and the control device 173 is based on the change in the maximum temperature region in the three-dimensional temperature distribution data created periodically or continuously. Thus, the charging port 171 of the thermal spray powder material charging tube 170 is moved instantaneously.
図２は、本発明の他の一実施形態として説明するプラズマ溶射装置２００の一部の概略構成を示す図である。図２に示すように、本発明に係るプラズマ溶射装置２００は、単トーチ型のプラズマ溶射装置（一般的なプラズマ溶射ガン）である。プラズマ溶射装置２００は、陽極２１０、陰極２２０、溶射粉末材料投入管２３０、制御装置２３３、サーモグラフィカメラ２４１，２４２などを備える。 FIG. 2 is a diagram showing a schematic configuration of a part of a plasma spraying apparatus 200 described as another embodiment of the present invention. As shown in FIG. 2, the plasma spraying apparatus 200 according to the present invention is a single torch type plasma spraying apparatus (general plasma spraying gun). The plasma spraying apparatus 200 includes an anode 210, a cathode 220, a spray powder material charging tube 230, a control device 233, thermographic cameras 241, 242 and the like.
陽極２１０と陰極２２０との電極間に発生させた直流アーク放電（ＰＤ）に、後方から供給された作動ガス（例えばアルゴン、ヘリウムなどのガス）２２１を吹きつけ、高温高速のプラズマジェット（ＰＪ）を形成させる。このプラズマジェット（ＰＪ）中に溶射粉末材料が溶射粉末材料投入口２３０から投入されて溶融される。溶融された溶射粉末材料は基材（Ｍ）の表面に吹き付けられ、基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）が形成される。 A working gas (for example, a gas such as argon or helium) 221 supplied from behind is blown into a direct current arc discharge (PD) generated between the electrodes of the anode 210 and the cathode 220, and a high-temperature and high-speed plasma jet (PJ). To form. In this plasma jet (PJ), the thermal spray powder material is introduced from the thermal spray powder material inlet 230 and melted. The molten thermal spray powder material is sprayed onto the surface of the base material (M), and a coating (C) of the thermal spray powder material is formed on the surface of the base material (M).
２台のサーモグラフィカメラ２４１，２４２は、形成されたプラズマジェット（ＰＪ）の二次元温度分布を計測するものであり、それらは異なる方向からプラズマジェット（ＰＪ）の二次元温度分布を計測できるように設置されている。なお、２台のサーモグラフィカメラ２４１，２４２は、プラズマジェット（ＰＪ）の中心軸の上下、該中心軸の左右など異なる位置に設置されていればよいが、三次元温度分布を作成できるように、例えば、計測したそれぞれの二次元温度分布の平面がプラズマジェット（ＰＪ）の中心軸で垂直に交わるように設置されていることが好ましく、プラズマジェット（ＰＪ）の中心軸に対して真上と真横の方向にそれぞれ設置されていることがより好ましい。また、２台のサーモグラフィカメラ２４１，２４２は、形成されたプラズマジェット（ＰＪ）の全てを計測するものであってもよいが、プラズマジェット（ＰＪ）の発生部付近、すなわちプラズマアーク（ＰＡ）の最高温度領域付近を計測するものであってもよい。 The two thermographic cameras 241 and 242 measure the two-dimensional temperature distribution of the formed plasma jet (PJ) so that they can measure the two-dimensional temperature distribution of the plasma jet (PJ) from different directions. is set up. The two thermographic cameras 241 and 242 need only be installed at different positions such as the upper and lower sides of the central axis of the plasma jet (PJ) and the left and right sides of the central axis. For example, it is preferable that the measured two-dimensional temperature distribution planes are installed so that they intersect perpendicularly with the central axis of the plasma jet (PJ). It is more preferable that they are respectively installed in the directions. The two thermographic cameras 241 and 242 may measure all of the formed plasma jet (PJ), but in the vicinity of the plasma jet (PJ) generating portion, that is, the plasma arc (PA). It may measure the vicinity of the maximum temperature range.
計測されたプラズマジェット（ＰＪ）の平面の二次元温度分布のデータは、通信線２４３を介してサーモグラフィカメラ２４１，２４２から制御装置２３３に送信される。制御装置２３３は、サーモグラフィカメラ２４１，２４２から受信したデータに基づいて、形成されたプラズマジェット（ＰＪ）の三次元温度分布データを作成する。制御装置２３３は、三次元温度分布データから最高温度領域を特定し、溶射粉末材料投入管２３０と接続された制御線２３２を介して溶射粉末材料投入管２３０の投入口２３１をＸＹＺ軸方向に移動させ、溶射粉末材料が最高温度領域に投入されるように投入口２３１を調整する。このように、プラズマジェット（ＰＪ）の最高温度領域に溶射粉末材料投入管２３０の投入口２３１を移動させることにより、溶射粉末材料を効率よく溶融させることができるようになり、もって基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）を効率的に形成することができるようになる。 The measured two-dimensional temperature distribution data of the plasma jet (PJ) plane is transmitted from the thermographic cameras 241 and 242 to the control device 233 via the communication line 243. The control device 233 creates three-dimensional temperature distribution data of the formed plasma jet (PJ) based on the data received from the thermographic cameras 241 and 242. The control device 233 identifies the maximum temperature region from the three-dimensional temperature distribution data, and moves the inlet 231 of the thermal spray powder material input tube 230 in the XYZ axis direction via the control line 232 connected to the thermal spray powder material input tube 230. The injection port 231 is adjusted so that the thermal spray powder material is introduced into the maximum temperature region. Thus, by moving the inlet 231 of the thermal spray powder material injection tube 230 to the maximum temperature region of the plasma jet (PJ), the thermal spray powder material can be efficiently melted, and thus the base material (M ) Can be efficiently formed on the surface of the thermal spray powder material.
なお、上述の、サーモグラフィカメラ２４１，２４２における計測、並びに、制御装置２３３における三次元温度分布データの作成、及びプラズマジェット（ＰＪ）の最高温度領域に対する溶射粉末材料投入管２３０の投入口２３１の移動は、本発明に係るプラズマ溶射装置２００を稼動する際にのみ行うこととしてもよいが、溶射粉末材料をより効率よく溶融させ、基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）をより効率的に形成できるようにするために、稼動時以降も定期的又は連続的に行うこととしてもよい。この場合、サーモグラフィカメラ２４１，２４２は、二次元温度分布を定期的又は連続的に計測し、制御装置２３３は、定期的又は連続的に作成した三次元温度分布データにおける最高温度領域の変化に基づいて溶射粉末材料投入管２３０の投入口２３１を瞬時に移動させる。 It should be noted that the above-described measurement by the thermographic cameras 241 and 242, the creation of three-dimensional temperature distribution data by the control device 233, and the movement of the inlet 231 of the thermal spray powder material inlet tube 230 with respect to the maximum temperature region of the plasma jet (PJ). May be performed only when the plasma spraying apparatus 200 according to the present invention is operated, but the sprayed powder material is more efficiently melted and the coating (C) of the sprayed powder material is applied to the surface of the base material (M). In order to be able to form more efficiently, it is good also as performing periodically or continuously after an operation. In this case, the thermographic cameras 241 and 242 regularly or continuously measure the two-dimensional temperature distribution, and the control device 233 is based on the change in the maximum temperature region in the three-dimensional temperature distribution data created periodically or continuously. The inlet 231 of the thermal spray powder material inlet tube 230 is moved instantaneously.
図３は、本発明の他の一実施形態として説明するプラズマ溶射装置３００の一部の概略構成を示す図である。図３に示すように、本発明に係るプラズマ溶射装置３００は、アノードトーチ（陽極）及びカソードトーチ（陰極）の１組のプラズマトーチからなる複合トーチ型プラズマ溶射装置である。プラズマ溶射装置３００は、アノードトーチ３１０、カソードトーチ３２０、溶射粉末材料投入管３３０、制御装置３３３、サーモグラフィカメラ３４１，３４２などを備える。 FIG. 3 is a diagram showing a schematic configuration of a part of a plasma spraying apparatus 300 described as another embodiment of the present invention. As shown in FIG. 3, a plasma spraying apparatus 300 according to the present invention is a composite torch type plasma spraying apparatus including a pair of plasma torches of an anode torch (anode) and a cathode torch (cathode). The plasma spraying apparatus 300 includes an anode torch 310, a cathode torch 320, a spray powder material charging tube 330, a control device 333, thermographic cameras 341 and 342, and the like.
アノードトーチ３１０とカソードトーチ３２０は、それぞれの中心軸の延長が交差するように配置されており、これらのトーチ３１０，３２０間でアーク放電（ＰＤ）が発生する。このアーク放電（ＰＤ）に、カソードトーチ３２０から供給される作動ガスが吹き付けられることにより、プラズマアーク（ＰＡ）が形成される。形成されたプラズマアーク（ＰＡ）には、溶射粉末材料投入管３３０から溶射粉末材料が投入され、溶融される。溶射粉末材料が溶融されたプラズマアーク（ＰＡ）は、高温高速化されて基材（Ｍ）の表面に吹き付けられ、溶射粉末材料の皮膜（Ｃ）が形成される。 The anode torch 310 and the cathode torch 320 are arranged so that the extensions of the respective central axes intersect with each other, and arc discharge (PD) is generated between these torches 310 and 320. A plasma arc (PA) is formed by blowing the working gas supplied from the cathode torch 320 to the arc discharge (PD). The formed plasma arc (PA) is supplied with the thermal spray powder material from the thermal spray powder material input tube 330 and melted. The plasma arc (PA) in which the thermal spray powder material is melted is sprayed onto the surface of the base material (M) at a high temperature and a high speed to form a coating (C) of the thermal spray powder material.
２台のサーモグラフィカメラ３４１，３４２は、形成されたプラズマアーク（ＰＡ）の二次元温度分布を計測するものであり、それらは異なる方向からプラズマアーク（ＰＡ）の二次元温度分布を計測できるように設置されている。なお、２台のサーモグラフィカメラ３４１，３４２は、プラズマアーク（ＰＡ）の中心軸の上下、該中心軸の左右など異なる位置に設置されていればよいが、三次元温度分布を作成できるように、例えば、計測したそれぞれの二次元温度分布の平面がプラズマアーク（ＰＡ）の中心軸で垂直に交わるように設置されていることが好ましく、プラズマアーク（ＰＡ）の中心軸に対して真上と真横の方向にそれぞれ設置されていることがより好ましい。また、２台のサーモグラフィカメラ３４１，３４２は、形成されたプラズマアーク（ＰＡ）の全てを計測するものであってもよいが、プラズマアーク（ＰＡ）の発生部付近、すなわちプラズマアーク（ＰＡ）の最高温度領域付近を計測するものであってもよい。 The two thermographic cameras 341 and 342 measure the two-dimensional temperature distribution of the formed plasma arc (PA) so that they can measure the two-dimensional temperature distribution of the plasma arc (PA) from different directions. is set up. The two thermographic cameras 341 and 342 need only be installed at different positions such as the upper and lower sides of the central axis of the plasma arc (PA) and the left and right sides of the central axis. For example, it is preferable that the measured two-dimensional temperature distribution planes are arranged so that they intersect perpendicularly with the central axis of the plasma arc (PA). It is more preferable that they are respectively installed in the directions. The two thermographic cameras 341 and 342 may measure all of the formed plasma arc (PA), but the vicinity of the generation portion of the plasma arc (PA), that is, the plasma arc (PA). It may measure the vicinity of the maximum temperature range.
計測されたプラズマアーク（ＰＡ）の平面の二次元温度分布のデータは、通信線３４３を介してサーモグラフィカメラ３４１，３４２から制御装置３３３に送信される。制御装置３３３は、サーモグラフィカメラ３４１，３４２から受信したデータに基づいて、形成されたプラズマアーク（ＰＡ）の三次元温度分布データを作成する。制御装置３３３は、三次元温度分布データから最高温度領域を特定し、溶射粉末材料投入管３３０と接続された制御線３３２を介して溶射粉末材料投入管３３０の投入口３３１をＸＹＺ軸方向に移動させ、溶射粉末材料が最高温度領域に投入されるように投入口３３１を調整する。このように、プラズマアーク（ＰＡ）の最高温度領域に溶射粉末材料投入管３３０の投入口３３１を移動させることにより、溶射粉末材料を効率よく溶融させることができるようになり、もって基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）を効率的に形成することができるようになる。 The measured two-dimensional temperature distribution data of the plasma arc (PA) plane is transmitted from the thermographic cameras 341 and 342 to the control device 333 via the communication line 343. The control device 333 creates three-dimensional temperature distribution data of the formed plasma arc (PA) based on the data received from the thermographic cameras 341 and 342. The control device 333 identifies the maximum temperature region from the three-dimensional temperature distribution data, and moves the inlet 331 of the thermal spray powder material input tube 330 in the XYZ axis direction via the control line 332 connected to the thermal spray powder material input tube 330. The injection port 331 is adjusted so that the thermal spray powder material is introduced into the maximum temperature region. In this way, by moving the inlet 331 of the thermal spray powder material input tube 330 to the maximum temperature region of the plasma arc (PA), the thermal spray powder material can be efficiently melted, and thus the base material (M ) Can be efficiently formed on the surface of the thermal spray powder material.
なお、上述の、サーモグラフィカメラ３４１，３４２における計測、並びに、制御装置３３３における三次元温度分布データの作成、及びプラズマアーク（ＰＡ）の最高温度領域に対する溶射粉末材料投入管３３０の投入口３３１の移動は、本発明に係るプラズマ溶射装置３００を稼動する際にのみ行うこととしてもよいが、溶射粉末材料をより効率よく溶融させ、基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）をより効率的に形成できるようにするために、稼動時以降も定期的又は連続的に行うこととしてもよい。この場合、サーモグラフィカメラ３４１，３４２は、二次元温度分布を定期的又は連続的に計測し、制御装置３３３は、定期的又は連続的に作成した三次元温度分布データにおける最高温度領域の変化に基づいて溶射粉末材料投入管３３０の投入口３３１を瞬時に移動させる。 Note that the above-described measurement by the thermographic cameras 341 and 342, the creation of three-dimensional temperature distribution data by the control device 333, and the movement of the inlet 331 of the thermal spray powder material inlet pipe 330 with respect to the maximum temperature region of the plasma arc (PA). May be performed only when the plasma spraying apparatus 300 according to the present invention is operated, but the sprayed powder material is more efficiently melted and the coating (C) of the sprayed powder material is applied to the surface of the base material (M). In order to be able to form more efficiently, it is good also as performing periodically or continuously after an operation. In this case, the thermographic cameras 341 and 342 periodically or continuously measure the two-dimensional temperature distribution, and the control device 333 is based on the change in the maximum temperature region in the three-dimensional temperature distribution data created periodically or continuously. Thus, the charging port 331 of the thermal spray powder material charging pipe 330 is instantaneously moved.
本実施の形態において、本発明に係るプラズマ溶射装置１００，２００，３００は、２台のサーモグラフィカメラ（１８１及び１８２，２４１及び２４２，３４１及び３４２）を備えることとしているが、１台又は３台以上のサーモグラフィカメラを備えていてもよいし、赤外線カメラ、光ファイバを温度センサとして用いた温度分布測定装置、分光法を用いた温度分布計測装置、プラズマアーク（ＰＡ）やプラズマジェット（ＰＪ）から放射されるマイクロ波により温度分布を計測する装置などの、既存の二次元又は三次元の温度分布計測装置を１又は複数台備えていてもよい。なお、本発明に係るプラズマ溶射装置が、サーモグラフィカメラのように、プラズマアーク（ＰＡ）やプラズマジェット（ＰＪ）の二次元温度分布しか計測できない温度分布計測装置を１台しか備えていない場合には、プラズマアーク（ＰＡ）の二次元温度分布の平面が、溶射粉末材料投入管の投入口を可動可能な平面と一致するように、サーモグラフィカメラなどの温度分布計測装置と、制御装置によって移動可能な溶射粉末材料投入管を設置することが好ましい。 In the present embodiment, the plasma spraying apparatus 100, 200, 300 according to the present invention includes two thermographic cameras (181 and 182, 241, 242, 341, and 342). The above-described thermographic camera may be provided, or from an infrared camera, a temperature distribution measuring device using an optical fiber as a temperature sensor, a temperature distribution measuring device using spectroscopy, a plasma arc (PA) or a plasma jet (PJ) One or a plurality of existing two-dimensional or three-dimensional temperature distribution measuring devices such as a device for measuring a temperature distribution by radiated microwaves may be provided. In the case where the plasma spraying apparatus according to the present invention includes only one temperature distribution measuring apparatus that can measure only the two-dimensional temperature distribution of a plasma arc (PA) or a plasma jet (PJ) like a thermographic camera. The plasma arc (PA) two-dimensional temperature distribution plane can be moved by a temperature distribution measuring device such as a thermography camera and a control unit so that the inlet of the spray powder material inlet tube can be moved. It is preferable to install a spraying powder material charging tube.
また、本発明に係るプラズマ溶射装置１００，２００，３００に最高温度領域予測装置をさらに備え、プラズマ溶射装置１００，２００，３００の稼動時あるいは運転中に、蓄積された最高温度領域のデータに基づいて最高温度領域を予測し、その領域に溶射粉末材料が投入されるように溶射粉末材料投入管１７０，２３０，３３０の投入口１７１，２３１，３３１を予め移動させることとしてもよい。これにより、基材（Ｍ）の表面に溶射粉末材料の皮膜（Ｃ）をより効率的に形成することが可能となる。 Further, the plasma spraying apparatus 100, 200, 300 according to the present invention further includes a maximum temperature region predicting device, and is based on data stored in the maximum temperature region during operation or during operation of the plasma spraying device 100, 200, 300. It is also possible to predict the maximum temperature region and move the inlets 171, 231 and 331 of the thermal spray powder material supply pipes 170, 230, and 330 in advance so that the thermal spray powder material is input into that region. Thereby, it becomes possible to more efficiently form the coating (C) of the thermal spray powder material on the surface of the base material (M).
ＰＡ プラズマアーク、ＰＤ アーク放電、ＰＪ プラズマジェット、Ｍ 基材、Ｃ 皮膜、１００，２００，３００ プラズマ溶射装置、１０１，１０２ 主電源、１１１，１１２，３１０ アノードトーチ、１１３，１１４ アルゴン供給管、１２０，３２０ カソードトーチ、１３０ アルゴン供給管、１４０ 二次ガス供給管、１５０ アクセルノズル、１６０ プラズマトリミング、１７０，２３０，３３０ 溶射粉末材料投入管、１７１，２３１，３３１ 投入口、１７２，２３２，３３２ 制御線、１７３，２３３，３３３ 制御装置、１８１，１８２，２４１，２４２，３４１，３４２ サーモグラフィカメラ、１８３，２４３，３４３ 通信線、２１０ 陽極、２２０ 陰極、２２１ 作動ガス PA plasma arc, PD arc discharge, PJ plasma jet, M substrate, C coating, 100, 200, 300 plasma spraying apparatus, 101, 102 main power source, 111, 112, 310 anode torch, 113, 114 argon supply pipe, 120 , 320 Cathode torch, 130 Argon supply pipe, 140 Secondary gas supply pipe, 150 Accelerator nozzle, 160 Plasma trimming, 170, 230, 330 Thermal spray powder material input pipe, 171, 231, 331 Input port, 172, 232, 332 Control Wire, 173, 233, 333 control device, 181, 182, 241, 242, 341, 342 thermography camera, 183, 243, 343 communication line, 210 anode, 220 cathode, 221 working gas
Claims (7)
前記プラズマアーク中又は前記プラズマジェット中に前記溶射粉末材料を投入する溶射粉末材料投入管と、
前記プラズマアーク又は前記プラズマジェットの温度分布を計測する温度分布計測手段と、
前記温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動させる制御手段と、
を備えるプラズマ溶射装置。 A plasma spraying apparatus that forms a coating of the thermal spraying powder material on the surface of the substrate by spraying the melted thermal spraying powder material into a plasma arc or a plasma jet,
A thermal spray powder material charging tube for charging the thermal spray powder material into the plasma arc or the plasma jet;
Temperature distribution measuring means for measuring the temperature distribution of the plasma arc or the plasma jet;
Control means for moving the inlet of the thermal spray powder material inlet tube to the highest temperature region of the temperature distribution;
A plasma spraying apparatus comprising:
前記複数のサーモグラフィカメラは、異なる方向から前記プラズマアーク又は前記プラズマジェットの二次元温度分布をそれぞれ計測できるように設置されており、
前記制御手段は、前記複数のサーモグラフィカメラによって計測された前記複数の二次元温度分布から三次元温度分布を作成し、前記三次元温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動させることを特徴とする請求項２に記載のプラズマ溶射装置。 A plurality of the thermographic cameras;
The plurality of thermographic cameras are installed so as to be able to measure the two-dimensional temperature distribution of the plasma arc or the plasma jet from different directions, respectively.
The control means creates a three-dimensional temperature distribution from the plurality of two-dimensional temperature distributions measured by the plurality of thermographic cameras, and sets the inlet of the thermal spray powder material inlet tube in the highest temperature region of the three-dimensional temperature distribution. The plasma spraying apparatus according to claim 2, wherein the plasma spraying apparatus is moved.
前記２台のサーモグラフィカメラは、前記プラズマアーク又は前記プラズマジェットの中心軸に対して真上と真横に設置され、異なる方向から前記プラズマアーク又は前記プラズマジェットの二次元温度分布をそれぞれ計測できるように設置されており、
前記制御手段は、前記２台のサーモグラフィカメラによって計測された２つの二次元温度分布データから三次元温度分布データを作成し、前記三次元温度分布データの最高温度領域に前記溶射粉末材料投入管の投入口を移動させることを特徴とする請求項２に記載のプラズマ溶射装置。 Two thermographic cameras,
The two thermographic cameras are installed directly above and next to the central axis of the plasma arc or the plasma jet so that two-dimensional temperature distributions of the plasma arc or the plasma jet can be measured from different directions, respectively. Installed,
The control means creates three-dimensional temperature distribution data from the two two-dimensional temperature distribution data measured by the two thermographic cameras, and the spray powder material injection tube is placed in the highest temperature region of the three-dimensional temperature distribution data. The plasma spraying apparatus according to claim 2, wherein the inlet is moved.
前記制御手段は、前記三次元温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動させることを特徴とする請求項１に記載のプラズマ溶射装置。 The temperature distribution is a three-dimensional temperature distribution;
2. The plasma spraying apparatus according to claim 1, wherein the control unit moves an inlet of the sprayed powder material input tube to a maximum temperature region of the three-dimensional temperature distribution.
前記制御手段は、前記温度分布の最高温度領域の変化に基づいて前記溶射粉末材料投入管の投入口を移動させることを特徴とする請求項１〜５のいずれかに記載のプラズマ溶射装置。 The temperature distribution measuring means continuously measures the temperature distribution,
The plasma spraying apparatus according to any one of claims 1 to 5, wherein the control means moves an inlet of the thermal spray powder material inlet pipe based on a change in a maximum temperature region of the temperature distribution.
前記プラズマアーク又は前記プラズマジェットの温度分布を計測する工程と、
前記温度分布の最高温度領域に前記溶射粉末材料投入管の投入口を移動する工程と、
を含むことを特徴とするプラズマ溶射装置の制御方法。 A method for controlling a plasma spraying apparatus in which a coating of the sprayed powder material is formed on the surface of a substrate by spraying the melted sprayed powder material, which is charged into a plasma arc or a plasma jet from a sprayed powder material charging tube,
Measuring a temperature distribution of the plasma arc or the plasma jet;
Moving the inlet of the thermal spray powder material inlet tube to the highest temperature region of the temperature distribution;
A method for controlling a plasma spraying apparatus, comprising:
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