JP2012192729A - 液体吐出ヘッドおよびその製造方法 - Google Patents
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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Abstract
【解決手段】本発明は、液体を吐出する吐出口が配列方向に沿って複数設けられた吐出口部材を備える液体吐出ヘッドの製造方法であって、光硬化性樹脂を含有する樹脂層が設けられた基板を用意する工程と、前記樹脂層を露光する露光処理である、第1の露光処理及び第2の露光処理を行う露光工程と、前記第1の露光処理及び第2の露光処理を行った樹脂層から前記吐出口を形成する工程と、を有し、前記第1の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角と、前記第2の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角とが異なることを特徴とする液体吐出ヘッドの製造方法である。
【選択図】図1
Description
液体を吐出する吐出口が配列方向に沿って複数設けられた吐出口部材を備える液体吐出ヘッドの製造方法であって、
光硬化性樹脂を含有する樹脂層が設けられた基板を用意する工程と、
前記樹脂層を露光する露光処理である、第1の露光処理及び第2の露光処理を行う露光工程と、
前記第1の露光処理及び第2の露光処理を行った樹脂層から前記吐出口を形成する工程と、を有し、
前記第1の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角と、前記第2の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角とが異なることを特徴とする液体吐出ヘッドの製造方法である。
以下に、本実施形態の製造方法により作製されるインクジェット記録ヘッドの構成例についてより具体的に説明する。図1(A)は図2の吐出口の上面図であり、図1(B)は図1(A)のA−A線における断面図、図1(C)は図1(A)のB−B線における断面図である。また、A−A線は配列方向を表すこととなり、B−B線は配列方向に直交する直交方向を表すことになる。したがって、図1(B)は直交方向に垂直な面による吐出口の断面形状であり、図1(C)は配列方向に垂直な面による吐出口の断面形状である。
以下に、本実施形態の露光条件について具体的に説明する。
2 流路形成部材
3 密着向上層
4 吐出エネルギー発生素子
5 シリコン基板
7 インク供給口(液体供給口)
301 熱酸化膜(表面側)
302 犠牲層
303 シリコン酸化膜
304 シリコン窒化膜
305 熱酸化膜(裏面側)
307 流路型材
308 ネガ型感光性樹脂
401 流路壁
402 ドライフィルム
403 吐出口部材
Claims (6)
- 液体を吐出する吐出口が配列方向に沿って複数設けられた吐出口部材を備える液体吐出ヘッドの製造方法であって、
光硬化性樹脂を含有する樹脂層が設けられた基板を用意する工程と、
前記樹脂層を露光する露光処理である、第1の露光処理及び第2の露光処理を行う露光工程と、
前記第1の露光処理及び第2の露光処理を行った樹脂層から前記吐出口を形成する工程と、を有し、
前記第1の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角と、前記第2の露光処理によって形成される吐出口の側壁の前記基板に対する傾斜角とが異なることを特徴とする液体吐出ヘッドの製造方法。 - 前記吐出口は前記配列方向に直交する直交方向に沿った側壁を有し、
前記第1の露光処理は、前記吐出口の表面側開口の前記配列方向の幅をa、前記吐出口の裏面側開口の前記配列方向の幅をbとした場合、比(b/a)が1以上となるように、前記直交方向に沿った側壁に対応する前記樹脂層の部分を露光する処理であり、
前記第2の露光処理は、前記吐出口の表面側開口の前記直交方向の幅をc、前記吐出口の裏面側開口の前記直交方向の幅をdとした場合、比(d/c)が1より大きくなるように、前記直交方向に沿った側壁以外の側壁に対応する前記樹脂層の部分を露光する処理であり、
前記比(d/c)は前記比(b/a)より大きいことを特徴とする請求項1に記載の液体吐出ヘッドの製造方法。 - 前記配列方向に垂直な面による前記吐出口の断面形状がテーパ状である請求項2に記載の液体吐出ヘッドの製造方法。
- 前記直交方向に垂直な面による前記吐出口の断面形状がテーパ状又は四角形状である請求項2又は3に記載の液体吐出ヘッドの製造方法。
- 前記幅a及び前記幅bは、それぞれ、前記配列方向に垂直であって前記吐出口の中心を通る面による前記吐出口の断面形状における上辺の幅及び下辺の幅であり、
前記幅c及び前記幅dは、それぞれ、前記直交方向に垂直であって前記吐出口の中心を通る面による前記吐出口の断面形状における上辺の幅及び下辺の幅である請求項2乃至4のいずれかに記載の液体吐出ヘッドの製造方法。 - 基板と、前記基板上に液体を吐出する吐出口が配列方向に沿って複数設けられた吐出口部材を備える液体吐出ヘッドであって、
前記吐出口の前記配列方向に直交する直交方向に沿った側壁は前記基板に対して垂直であり、前記吐出口の前記配列方向に沿った側壁は前記基板に対して鋭角を形成していることを特徴とする液体吐出ヘッド。
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JP2012024153A JP5460760B2 (ja) | 2011-02-28 | 2012-02-07 | 液体吐出ヘッドの製造方法 |
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JP2011042028 | 2011-02-28 | ||
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JP2012192729A true JP2012192729A (ja) | 2012-10-11 |
JP5460760B2 JP5460760B2 (ja) | 2014-04-02 |
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US (1) | US8652767B2 (ja) |
EP (1) | EP2492096B1 (ja) |
JP (1) | JP5460760B2 (ja) |
KR (1) | KR101438267B1 (ja) |
CN (1) | CN102673156B (ja) |
BR (1) | BR102012004467A2 (ja) |
RU (1) | RU2507073C2 (ja) |
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JP2015052754A (ja) * | 2013-09-09 | 2015-03-19 | 富士フイルム株式会社 | 樹脂硬化物の製造方法、並びにこれを用いた固体撮像素子および液晶表示装置の製造方法 |
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JP6008556B2 (ja) * | 2012-04-25 | 2016-10-19 | キヤノン株式会社 | 液体吐出ヘッドの製造方法及び露光方法 |
US9308728B2 (en) * | 2013-05-31 | 2016-04-12 | Stmicroelectronics, Inc. | Method of making inkjet print heads having inkjet chambers and orifices formed in a wafer and related devices |
JP6137950B2 (ja) | 2013-06-10 | 2017-05-31 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
US9776409B2 (en) | 2014-04-24 | 2017-10-03 | Hewlett-Packard Development Company, L.P. | Fluidic ejection device with layers having different light sensitivities |
JP6929639B2 (ja) * | 2016-01-08 | 2021-09-01 | キヤノン株式会社 | 液体吐出ヘッド、液体吐出装置及び液体の供給方法 |
US10040290B2 (en) | 2016-01-08 | 2018-08-07 | Canon Kabushiki Kaisha | Liquid ejection head, liquid ejection apparatus, and method of supplying liquid |
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- 2012-02-07 JP JP2012024153A patent/JP5460760B2/ja active Active
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- 2012-02-27 RU RU2012107068/12A patent/RU2507073C2/ru not_active IP Right Cessation
- 2012-02-28 CN CN201210048283.8A patent/CN102673156B/zh not_active Expired - Fee Related
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US20120218350A1 (en) | 2012-08-30 |
EP2492096B1 (en) | 2015-04-08 |
EP2492096A1 (en) | 2012-08-29 |
JP5460760B2 (ja) | 2014-04-02 |
BR102012004467A2 (pt) | 2013-07-23 |
RU2012107068A (ru) | 2013-09-10 |
CN102673156A (zh) | 2012-09-19 |
KR101438267B1 (ko) | 2014-09-04 |
CN102673156B (zh) | 2014-10-29 |
KR20120098434A (ko) | 2012-09-05 |
RU2507073C2 (ru) | 2014-02-20 |
US8652767B2 (en) | 2014-02-18 |
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