JP2012159756A5 - Gray scale mask and micro lens - Google Patents
Gray scale mask and micro lens Download PDFInfo
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本発明は、マイクロレンズを製造する目的等のために用いられるグレースケールマスク及び当該グレースケールマスクを用いて加工されたマイクロレンズに関するものである。 The present invention relates to a gray scale mask used for the purpose of manufacturing a micro lens, and a micro lens processed using the gray scale mask .
本発明は、このような事情に鑑みてなされたものであり、光透過率の連続性を保った上で、高い光透過率を再現することができるグレースケールマスク及び当該グレースケールマスクを用いて加工されたマイクロレンズを提供することを目的とする。 The present invention has been made in view of such circumstances, using a grayscale mask capable of reproducing high light transmittance while maintaining continuity of light transmittance, and the grayscale mask. An object is to provide a processed microlens .
かかる課題を解決するために、本発明は、各々が所定の光透過率を有する複数の単位領域(10)を含むグレースケールマスクであって、前記単位領域(10)は、光透過領域(a)と光遮蔽領域(b)の少なくとも一方を有するとともに対称軸(L)を挟んで互いに隣接し前記対称軸(L)に対して対称な外形形状を有する複数の部分領域(11,12,13,14)からなり、前記光透過領域(a)が占める面積比率がTである前記単位領域(10)における前記光透過領域(a)の形状と、前記面積比率が1−Tである前記単位領域(10)における前記光透過領域(a)の形状とが、前記対称軸(L)に関して反転関係にあるグレースケールマスクとしたことを特徴とする。
また、本発明は、前記したグレースケールマスクを用いて加工されたマイクロレンズとしたことを特徴とする。
In order to solve such a problem, the present invention provides a grayscale mask including a plurality of unit regions (10) each having a predetermined light transmittance, and the unit region (10) includes a light transmission region (a). ) And a light shielding region (b), and a plurality of partial regions (11, 12, 13) that are adjacent to each other across the symmetry axis (L) and have a symmetrical outer shape with respect to the symmetry axis (L). , 14), and the area ratio occupied by the light transmission region (a) is T. The shape of the light transmission region (a) in the unit region (10) and the unit where the area ratio is 1-T. The gray scale mask is characterized in that the shape of the light transmission region (a) in the region (10) has a reversal relationship with respect to the symmetry axis (L) .
Further, the present invention is characterized in that the microlens is processed using the gray scale mask described above.
本発明によれば、複数の単位領域がそれぞれ、光透過領域と光遮蔽領域の少なくとも一方を有するとともに対称軸を挟んで互いに隣接し対称軸に対して対称な外形形状を有する複数の部分領域からなり、光透過領域が占める面積比率がTである単位領域における光透過領域の形状と、面積比率が1−Tである単位領域における光透過領域の形状とが、対称軸に関して反転関係にあることで、光透過率の連続性を保った上で、高い光透過率を再現することができる。 According to the present invention, each of the plurality of unit regions includes at least one of a light transmission region and a light shielding region, and is adjacent to each other across the symmetry axis and has a plurality of partial regions that are symmetrical with respect to the symmetry axis. Thus, the shape of the light transmissive region in the unit region where the area ratio occupied by the light transmissive region is T and the shape of the light transmissive region in the unit region where the area ratio is 1-T are in an inverted relationship with respect to the symmetry axis. Thus, it is possible to reproduce a high light transmittance while maintaining the continuity of the light transmittance.
本発明のグレースケールマスクは、図1に示すような、ピクセル1を複数、隣接配置した構成となっており、1ピクセル中に少なくとも1の単位領域10を有している。この単位領域10とは、後述する本発明の特徴を備える最小単位の領域であり、1ピクセルそのままの領域又は1ピクセルを同じ形状で等分割した1つの領域となっている。本実施の形態のグレースケールマスクでは、1ピクセル中に1つの単位領域10を有している(すなわち、1ピクセル1そのままが1つの単位領域10を構成している)。また、本実施の形態の単位領域10は正方形状となっており、その単位領域10がさらに4つの正方形状部(部分領域)11,12,13,14に区分けされている。 The gray scale mask of the present invention has a configuration in which a plurality of pixels 1 are arranged adjacent to each other as shown in FIG. 1, and has at least one unit region 10 in one pixel. The unit area 10 is a minimum unit area having the characteristics of the present invention to be described later. The unit area 10 is a single pixel area or a single area obtained by equally dividing one pixel into the same shape. In the gray scale mask according to the present embodiment, one unit area 10 is included in one pixel (that is, one pixel 1 itself constitutes one unit area 10). In addition, the unit area 10 of the present embodiment is square, and the unit area 10 is further divided into four square portions (partial areas) 11, 12, 13, and 14.
また、単位領域10は、光を通す透光部(光透過領域)である第1領域aと、光を通さない遮光部(光遮蔽領域)である第2領域bとで構成されている。そして、これら第1領域aと第2領域bの面積が、マスク描画装置の分解能の限界に至るまでそれぞれ増減することで、当該単位領域10における開口率(光透過率)が拡縮するようになっている。 The unit region 10 includes a first region a that is a light transmitting portion (light transmitting region) that transmits light, and a second region b that is a light blocking portion (light shielding region) that does not transmit light . The area of the first region a and the second region b is increased or decreased until reaching the resolution limit of the mask drawing apparatus, so that the aperture ratio (light transmittance) in the unit region 10 is expanded or reduced. ing.
そして、単位領域10における開口率の拡縮において、第1領域aと第2領域bの面積比が1:1(すなわち、50%ずつ)となると(例えば、図1における中央の図参照)、4つの正方形状部11,12,13,14のうちの左上部11と右下部14は全て第1領域aとなり、右上部13と左下部12は全て第2領域bとなる状態(所謂、市松模様の状態)になる。このときの第1領域aと第2領域bとの境界(ここでは、単位領域10の上下方向の中心線(なお、この場合刃単位領域10の左右方向の中心線でも可))を境界線(対称軸)Lとする。 When the area ratio of the first region a and the second region b is 1: 1 (that is, 50% each) in the enlargement / reduction of the aperture ratio in the unit region 10 (see, for example, the center diagram in FIG. 1), 4 Of the two square portions 11, 12, 13, and 14, the upper left portion 11 and the lower right portion 14 are all in the first region a, and the upper right portion 13 and the lower left portion 12 are all in the second region b (so-called checkered pattern). State). The boundary between the first region a and the second region b at this time (here, the vertical center line of the unit region 10 (in this case, the horizontal center line of the blade unit region 10 is also acceptable)) (Symmetry axis) L.
本実施の形態では、前記したように、第1領域aと第2領域bの面積比を変化させていく際、図1における中央の図に示すような第1領域aと第2領域bの面積比が1:1(すなわち、1ピクセルの光透過率が50%)となる単位領域10を基準とし、これより開口率が高いものと低いものとで、その面積比が丁度逆となるものについて(すなわち、1ピクセルの光透過率が50%からの差の絶対値が同じで、50%よりも大きい光透過率を有したときと小さい光透過率を有したときを比較すると)、面積比が1:1となる単位領域10における第1領域aと第2領域bとの境界線Lを中心線として線対称で、かつ、第1領域aと第2領域bとが入れ替わった状態となっている。すなわち、単位領域10における第1領域aと第2領域bの面積比がA:Bのもの(1ピクセルの光透過率が50%+α)とB:Aのもの(1ピクセルの光透過率が50%−α)については、それぞれ、境界線Lで線対称で、かつ、第1領域aと第2領域bとを入れ替えた形状となるように、単位領域10の形状が構成されている(光透過領域が占める面積比率がTである単位領域における光透過領域の形状と、面積比率が1−Tである単位領域における光透過領域の形状とが、対称軸に関して反転関係にある)。このようにすることで、急に開口形状が変化してグレースケールマスクの光透過率の連続性にずれが生じることを防ぎ、当該連続性を保ちながら、高い開口率(光透過率)を確保することができるものである。 In the present embodiment, as described above, when the area ratio between the first region a and the second region b is changed, the first region a and the second region b as shown in the center diagram in FIG. A unit area 10 having an area ratio of 1: 1 (that is, a light transmittance of 1 pixel of 50%) is used as a reference. (I.e., when the light transmittance of one pixel is the same as the absolute value of the difference from 50%, comparing when it has a light transmittance greater than 50% and when it has a small light transmittance) A state in which the first region a and the second region b are interchanged with each other in a line symmetry with respect to the boundary line L between the first region a and the second region b in the unit region 10 having a ratio of 1: 1; It has become. That is, the area ratio of the first region a and the second region b in the unit region 10 is A: B (light transmittance of one pixel is 50% + α) and B: A (light transmittance of one pixel is For 50% −α), the shape of the unit region 10 is configured so as to be symmetrical with respect to the boundary line L and to have a shape in which the first region a and the second region b are interchanged ( The shape of the light transmissive region in the unit region where the area ratio occupied by the light transmissive region is T and the shape of the light transmissive region in the unit region where the area ratio is 1-T are in an inverted relationship with respect to the symmetry axis) . By doing this, the aperture shape suddenly changes and the continuity of light transmittance of the gray scale mask is prevented from shifting, and high aperture ratio (light transmittance) is secured while maintaining the continuity. Is something that can be done.
以上のように、本発明の各実施の形態のグレースケールマスクによれば、1ピクセル1に少なくとも1つ有する単位領域10,110,210,310,410,510,610がそれぞれ、光を通す第1領域(光透過領域)aと光を通さない第2領域(光遮蔽領域)bの少なくとも一方を有するとともに、1ピクセル1の光透過率が50%からの差の絶対値が同じで、50%よりも大きい光透過率を有したときと小さい光透過率を有したときを比較すると、第1領域aと第2領域bの面積比が1:1となる単位領域10,110,210,310,410,510,610における双方の領域の境界線(対称軸)L,L1,L2,L3,L4,L5,L6を中心線として線対称で(対称軸を挟んで互いに隣接し対称軸に対して対称な外形形状を有する複数の部分領域からなり)、かつ、その領域同士が入れ替わった形状となる(光透過領域が占める面積比率がTである単位領域における光透過領域の形状と、面積比率が1−Tである単位領域における光透過領域の形状とが、対称軸に関して反転関係にある)ことで、光透過率の連続性を保った上で、高い光透過率を再現することができる。 As described above, according to the grayscale mask of each embodiment of the present invention, each of the unit regions 10, 110, 210, 310, 410, 510, 610 having at least one per pixel 1 transmits light. 1 region (light transmission region) a and at least one of a second region (light shielding region) b that does not transmit light, and the absolute value of the difference between the light transmittance of one pixel 1 from 50% is the same as 50 When the light transmittance greater than% is compared with the light transmittance smaller than%, the unit regions 10, 110, 210, where the area ratio of the first region a and the second region b is 1: 1. 310, 410, 510, 610 boundary lines (symmetric axes) of both regions L, L1, L2, L3, L4, L5, and L6 are centered on line symmetry (adjacent to each other across the symmetry axis) Symmetrical outline A plurality of partial regions having a shape) , and the regions are replaced with each other ( the shape of the light transmission region in the unit region where the area ratio occupied by the light transmission region is T and the area ratio is 1-T) The shape of the light transmission region in the unit region is in an inverted relationship with respect to the symmetry axis), so that high light transmittance can be reproduced while maintaining the continuity of the light transmittance.
1,101,201,301,401,501,601 ピクセル
10,110,210,310,410,510,610 単位領域
11,12,13,14 正方形状部(部分領域)
a 第1領域(光透過領域)
b 第2領域(光遮蔽領域)
L,L1,L2,L3,L4,L5,L6 境界線(対称軸)
1,101,201,301,401,501,601 pixels 10,110,210,310,410,510,610 unit area
11, 12, 13, 14 Square portion (partial region)
a First area (light transmission area)
b Second area (light shielding area)
L, L1, L2, L3, L4, L5, L6 boundary line (symmetrical axis)
Claims (5)
前記単位領域は、光透過領域と光遮蔽領域の少なくとも一方を有するとともに対称軸を挟んで互いに隣接し前記対称軸に対して対称な外形形状を有する複数の部分領域からなり、
前記光透過領域が占める面積比率がTである前記単位領域における前記光透過領域の形状と、前記面積比率が1−Tである前記単位領域における前記光透過領域の形状とが、前記対称軸に関して反転関係にあることを特徴とするグレースケールマスク。 A gray scale mask including a plurality of unit regions each having a predetermined light transmittance,
The unit region has at least one of a light transmission region and a light shielding region and is composed of a plurality of partial regions adjacent to each other across a symmetry axis and having a symmetric outer shape with respect to the symmetry axis,
The shape of the light transmission region in the unit region where the area ratio occupied by the light transmission region is T and the shape of the light transmission region in the unit region where the area ratio is 1-T are related to the symmetry axis. A gray scale mask characterized by being in an inversion relationship .
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US5310623A (en) * | 1992-11-27 | 1994-05-10 | Lockheed Missiles & Space Company, Inc. | Method for fabricating microlenses |
JP4296943B2 (en) * | 2003-01-28 | 2009-07-15 | ソニー株式会社 | Exposure mask manufacturing method, exposure method, and three-dimensional shape manufacturing method |
JP2006030510A (en) * | 2004-07-15 | 2006-02-02 | Toppan Printing Co Ltd | Distributed density mask |
JP5083518B2 (en) * | 2007-06-28 | 2012-11-28 | 凸版印刷株式会社 | Density distribution mask |
JP5629964B2 (en) * | 2008-06-20 | 2014-11-26 | 凸版印刷株式会社 | Density distribution mask, manufacturing method thereof, and manufacturing method of microlens array |
JP5136288B2 (en) * | 2008-08-22 | 2013-02-06 | 凸版印刷株式会社 | Concentration distribution mask and manufacturing method thereof |
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