JP2012061556A - Suction plate made of nonwoven fabric - Google Patents
Suction plate made of nonwoven fabric Download PDFInfo
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- JP2012061556A JP2012061556A JP2010207575A JP2010207575A JP2012061556A JP 2012061556 A JP2012061556 A JP 2012061556A JP 2010207575 A JP2010207575 A JP 2010207575A JP 2010207575 A JP2010207575 A JP 2010207575A JP 2012061556 A JP2012061556 A JP 2012061556A
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- 238000002844 melting Methods 0.000 claims abstract description 85
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- 239000000835 fiber Substances 0.000 claims description 144
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- 239000004744 fabric Substances 0.000 abstract 6
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- 229910001369 Brass Inorganic materials 0.000 description 1
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- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
本発明は紙，フィルム，ウエハ，ガラス板，金属板等のワークを搬送あるいは固定するため、ロボットの手部分など真空吸着装置の吸着面に使用し、ワークに皺や吸着跡が残らず、また吸着汚れ等を発生させることのない不織布製吸着プレートに関するものである。 Since the present invention transports or fixes a workpiece such as paper, film, wafer, glass plate, metal plate, etc., it is used on the suction surface of a vacuum suction device such as a robot hand, so that no wrinkles or suction marks remain on the workpiece. The present invention relates to a non-woven fabric suction plate that does not generate suction dirt or the like.
液晶用ガラス板や半導体ウエハの精密切断や精密加工においてはワークが位置ずれしないように確実に固定されることが必要であり、その際の固定装置として真空吸着装置が一般的に使用されている。 In precision cutting and precision processing of glass plates for liquid crystals and semiconductor wafers, it is necessary to securely fix the workpiece so as not to be displaced, and a vacuum suction device is generally used as a fixing device at that time .
ところで、真空吸着装置は上記の如くワークを安定して確実に固定しなければならない関係上、吸着面が重要な役割を有しており、従来より吸着面構造に関して種々の提案がなされ、ワークに皺や吸着跡が残らなくするため、また均一に吸着がなされるためにスポンジとネオプレンにより構成された吸着部材（例えば特許文献１参照）や、ワークを高精度に保持固定するため超高分子量ポリエチレンかならる多孔質シート（例えば特許文献２参照）、あるいはステンレスまたは真鍮の焼結金属からなる多孔質吸着プレート（例えば特許文献３参照）、更に吸着面の気孔径を小さくしてより吸着を均一に行うためのセラミックス系多孔質材料（例えば特許文献４参照）などが提案されて来た。 By the way, in the vacuum suction device, the suction surface has an important role because the workpiece must be fixed stably and reliably as described above, and various proposals have been made regarding the suction surface structure. Adsorption member composed of sponge and neoprene (for example, refer to Patent Document 1) in order to eliminate wrinkles and adsorption traces and uniform adsorption, and ultrahigh molecular weight polyethylene to hold and fix a workpiece with high accuracy A porous sheet (for example, see Patent Document 2) or a porous adsorption plate made of a sintered metal of stainless steel or brass (for example, see Patent Document 3), and further reducing the pore size of the adsorption surface for more uniform adsorption Ceramic-based porous materials (see, for example, Patent Document 4) have been proposed.
しかし、上記各提案に係る吸着面部材は、先ず、吸着面に用いられている材料のスポンジは耐摩耗性に劣り、また多孔質シート，焼結金属とか多孔質セラミックスは一般的に通気量が少なく充分な吸着力が得難く、しかも曲げ硬さが大きいため圧縮時の密着性が乏しく、更に高価であるなどの各欠点を有している。 However, in the suction surface member according to each of the above proposals, first, the sponge of the material used for the suction surface is inferior in wear resistance, and the porous sheet, sintered metal, or porous ceramic generally has an air flow rate. It is difficult to obtain a small amount of sufficient adsorbing force, and also has various drawbacks such as poor adhesion during compression due to high bending hardness and high cost.
本発明は上述の如き実状に対処し、特に熱接着性不織布の使用に着目し、夫々に適合する熱接着性不織布を吸着面側ならびに真空吸引側に使用することを見出し、吸着面はワークに皺や吸着跡を発生させることなく、一方、吸引面は強い吸引力でワークを強固に把持，固定，移動を可能ならしめる不織布製吸着プレートを提供することを目的とするものである。 The present invention addresses the actual situation as described above, particularly paying attention to the use of heat-adhesive nonwoven fabric, finds that a heat-adhesive nonwoven fabric suitable for each is used on the suction surface side and the vacuum suction side, and the suction surface is used for the workpiece. On the other hand, it is an object of the present invention to provide a non-woven fabric suction plate that can firmly grip, fix, and move a workpiece with a strong suction force without generating wrinkles or suction marks.
即ち、上記目的に適合する本発明の吸着プレートは、真空吸引によって紙，フィルム，ガラス板，金属板等を搬送あるいは固定する真空吸着装置の吸着面に用いられる不織布製の吸着プレートであって、吸着面側Ａは低融点繊維９０〜１００重量％、該低融点繊維よりも融点が７０℃以上高い繊維が１０〜０重量％からなり混綿，カーディング，交絡加工後、熱接着された目付５０〜２００ｇ／ｍ2，嵩密度０．６０〜１．２０ｇ／ｃｍ3の熱接着タイプの不織布であり、一方、真空吸引側Ｂは低融点繊維２０〜９０重量％、低融点繊維よりも融点が７０℃以上高い繊維８０〜１０重量％の比率で混綿、カード，交絡加工後熱接着された目付３００〜８００ｇ／ｍ2、嵩密度０．１０〜０．５０ｇ／ｃｍ3の熱接着タイプの不織布であって、前記両不織布Ａ，Ｂは積層され外周が熱プレスにて融着されて、非融着部の通気量が５０〜１５０ｃｃ／ｃｍ2／ｓｅｃ，融着部の通気量が５ｃｃ／ｃｍ2／ｓｅｃ以下の特性を有していることを特徴とする。 That is, the suction plate of the present invention suitable for the above purpose is a non-woven suction plate used on the suction surface of a vacuum suction device that transports or fixes paper, film, glass plate, metal plate, etc. by vacuum suction, Adsorption surface side A consists of 90 to 100% by weight of low-melting fiber, and 10 to 0% by weight of fiber whose melting point is 70 ° C. or higher than that of low-melting fiber. ˜200 g / m 2 , bulk density 0.60 to 1.20 g / cm 3 , non-woven fabric of thermobonding type, while vacuum suction side B is 20 to 90% by weight of low melting point fiber, melting point than low melting point fiber Heat bonded type nonwoven fabric with a basis weight of 300 to 800 g / m 2 and a bulk density of 0.10 to 0.50 g / cm 3 , which is heat-bonded after blending, carding, and entanglement at a ratio of 80 to 10% by weight of fibers higher than 70 ° C. And before Both the nonwoven fabrics A and B are laminated and the outer periphery is fused by a hot press, the air flow rate of the non-fused part is 50 to 150 cc / cm 2 / sec, and the gas flow rate of the fused part is 5 cc / cm 2 / sec. It has the following characteristics.
なお、上記不織布に使用される低融点繊維は融点が１００〜２００℃、繊維径が１〜７０ｄｔｅｘ、繊維長が１〜１００ｍｍである変性ポリエステル繊維，変性ナイロン繊維，ポリプロピレン，ポリエチレンなどのオレフィン繊維あるいはポリエステル／ナイロンなどの芯鞘構造の繊維、あるいは繊維断面の半分がポリプロピレン、半分がポリエチレンなどの２成分系繊維より選ばれた少なくとも１種の繊維であり、また該繊維よりも融点が７０℃以上高い繊維は繊維径が１〜７０ｄｔｅｘ、繊維長が１〜１００ｍｍのポリエステル繊維，ナイロン繊維，レーヨン繊維より選ばれた少なくとも１種の繊維が用いられる。 In addition, the low melting point fiber used for the nonwoven fabric is an olefin fiber such as a modified polyester fiber, a modified nylon fiber, a polypropylene, or a polyethylene having a melting point of 100 to 200 ° C., a fiber diameter of 1 to 70 dtex, and a fiber length of 1 to 100 mm, or A fiber having a core-sheath structure such as polyester / nylon, or at least one fiber selected from two-component fibers such as polypropylene and half of the fiber cross section are polypropylene and the melting point is 70 ° C. or higher than the fiber. As the high fiber, at least one fiber selected from polyester fiber, nylon fiber, and rayon fiber having a fiber diameter of 1 to 70 dtex and a fiber length of 1 to 100 mm is used.
本発明は上記の如く吸着プレートが比較的安価な不織布で構成され、吸着面は低融点繊維を多く含み平滑な加圧・加熱された比較的嵩密度の大きい接着タイプの不織布であるからワークに皺や吸着跡が発生することなく、また吸引面は吸着面に比し低融点繊維量が少なく、嵩密度の小さい熱接着タイプの不織布で構成されているため吸引力（吸着力）が強く、ワークを強固に把持、固定し、移動を可能とし、ロボットの手部分など、真空吸着装置の吸着面に使用して頗る優れた効果を有している。 In the present invention, the adsorption plate is composed of a relatively inexpensive non-woven fabric as described above, and the adsorption surface is a non-woven fabric of adhesive type with a relatively large bulk density that is smooth and pressurized and heated, containing many low melting point fibers. There is no generation of wrinkles or adsorption marks, and the suction surface has a low amount of low melting point fibers compared to the adsorption surface and is composed of a non-woven fabric of thermal bonding type with a low bulk density, so the suction force (adsorption force) is strong, The work can be firmly gripped, fixed and moved, and has an excellent effect when used on a suction surface of a vacuum suction device such as a robot hand.
以下、本発明について添付図面を参照し詳しく説明するが、本発明はこれらの説明に拘束されることなく、本発明の趣旨を損なわない範囲で適宜変更して実施し得ることは勿論である。 Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited to these explanations, and can of course be modified as appropriate without departing from the spirit of the present invention.
図１は本発明に係る吸着プレートの１例を示す平面図、図２は図１のＸ−Ｘ断面図であり、これら図において１は吸着プレートで、図示の如く吸着面を形成する熱接着不織布Ａと真空吸引側に使用される熱接着不織布Ｂの両不織布を積層することによって構成されていると共に、その外周において熱プレスなどにより融着されて融着部Ｃとして前記両不織布Ａ，Ｂを一体化している。 FIG. 1 is a plan view showing an example of an adsorption plate according to the present invention, and FIG. 2 is a sectional view taken along line XX in FIG. 1. In these figures, 1 is an adsorption plate, and thermal bonding that forms an adsorption surface as shown in FIG. The non-woven fabric A and the heat-bonded non-woven fabric B used on the vacuum suction side are laminated to each other, and the non-woven fabric A, B is fused as a fusion part C at the outer periphery thereof by heat pressing or the like. Are integrated.
ここで、上記吸着面に使用される熱接着不織布Ａとしては低融点繊維９０〜１００重量％、低融点繊維よりも融点が７０℃以上高い繊維が１０〜０重量％からなり、混綿，カーディング，ニードルパンチ加工又は水流交絡加工による交絡加工後、熱接着された目付５０〜２００ｇ／ｍ2、嵩密度０．６０〜１．２０ｇ／ｃｍ3の熱接着タイプの不織布が用いられる。 Here, the heat-bonding nonwoven fabric A used for the adsorbing surface is composed of 90 to 100% by weight of low melting point fibers, and 10 to 0% by weight of fibers having a melting point of 70 ° C. or higher than the low melting point fibers. , After the entanglement process by needle punching process or hydroentanglement process, a heat-bonded nonwoven fabric with a basis weight of 50 to 200 g / m 2 and a bulk density of 0.60 to 1.20 g / cm 3 is used.
低融点繊維としては通常の熱カレンダー，ホットプレス等にて溶融固化するタイプの繊維であれば特に限定されるまのではなく、例えば変性ポリエステル繊維，変性ナイロン繊維，ポリエチレン，ポリプロピレンなどのポリオレフィン繊維、あるいはポリエステル／ナイロンなどの芯鞘構造又は繊維断面の半分がポリプロピレン，他の半分がポリエチレンの２成分系繊維などの複合繊維が通常、使用される。 The low melting point fiber is not particularly limited as long as it is a fiber that is melted and solidified by an ordinary heat calender, hot press, etc. For example, a modified polyester fiber, a modified nylon fiber, a polyolefin fiber such as polyethylene or polypropylene, Alternatively, a core-sheath structure such as polyester / nylon or a composite fiber such as a bicomponent fiber in which half of the fiber cross section is polypropylene and the other half is polyethylene is usually used.
また、これら低融点繊維は、融点が１０〜２００℃，繊維径が１〜７０デシテックス（ｄｔｅｘ），繊維長が１〜１００ｍｍであることが一般に好ましい。勿論、混綿，カーディング，ニードルパンチ加工あるいは水流交絡加工などの交絡加工が可能であれば上記に拘るものではない
しかし、繊維が１ｄｔｅｘ以下になると混綿，カーディングが難しくなるという欠点があり、７０ｄｔｅｘ以上になると使用される繊維の本数が減少し、不織布の均一性が低下する欠点が発生するので好ましくない。また繊維長が１ｍｍ以下になると、繊維の絡みが悪くなり、均一な不織布となり難い欠点があり、繊維長が１００ｍｍ以上になると混綿，カーディングが難しくなるので一般的には好ましくない。
These low-melting fibers generally have a melting point of 10 to 200 ° C., a fiber diameter of 1 to 70 dtex, and a fiber length of 1 to 100 mm. Of course, it is not limited to the above as long as entanglement processing such as mixed cotton, carding, needle punch processing or hydroentanglement processing is possible. If it becomes more than the above, the number of fibers to be used is reduced, and there is a disadvantage that the uniformity of the nonwoven fabric is lowered. Further, when the fiber length is 1 mm or less, the entanglement of the fibers deteriorates and there is a disadvantage that it is difficult to form a uniform nonwoven fabric. When the fiber length is 100 mm or more, blending and carding become difficult, which is generally not preferable.
一方、 前記低融点繊維よりも融点が７０℃以上高い繊維はレギュラータイプのポリエステル繊維，ナイロン繊維，レーヨン繊維，木綿などが含まれ、これら繊維も前記と同じく混綿，カーディング，交絡加工などから繊維径１〜７０ｄｔｅｘ、繊維長１〜１００ｍｍであることが好ましい。この低融点繊維よりも７０℃以上高い繊維は、前記低融点繊維に対し少なく１０〜０重量％、即ち、１０重量％以下の混綿で、混綿しない場合であってもよい。 On the other hand, fibers having a melting point higher than that of the low melting point fiber by 70 ° C. or more include regular type polyester fiber, nylon fiber, rayon fiber, cotton and the like. The diameter is preferably 1 to 70 dtex and the fiber length is preferably 1 to 100 mm. The fiber higher by 70 ° C. or more than the low-melting fiber may be 10 to 0% by weight, that is, 10% by weight or less of the low-melting fiber, and may not be mixed.
なお、上記低融点繊維の融点よりも７０℃以上高い融点をもつ繊維を１０重量％以下含むか、または全く含まない低融点繊維１００重量％からなる繊維をカード，ニードルパンチ又は水流交絡加工による交絡処理後、熱プレス等により加熱接着した吸着面側の熱接着タイプ不織布は目付が５０〜２００ｇ／ｍ2，嵩密度が０．６０〜１．２０ｇ／ｃｍ3であることが好ましい。目付が５０ｇ／ｍ2以下では繊維量少なく、均一で平滑な面が得られない難があり、また、目付が２００ｇ／ｍ2以上になると熱圧着・融着された繊維の層が厚く形成されるため、著しく通気量の低下を招き、ワークを吸着，固定する力が乏しくなる。従って目付は５０〜２００ｇ／ｍ2の範囲が好適であり、より好ましくは７５〜１５０ｇ／ｍ2である。 It is to be noted that a fiber comprising 10% by weight or less of a fiber having a melting point 70 ° C. higher than the melting point of the low-melting fiber or 100% by weight of a low-melting fiber not contained at all is entangled by card, needle punch or hydroentanglement processing. After the treatment, it is preferable that the heat-bonding type nonwoven fabric on the adsorption surface side which is heat-bonded by a hot press or the like has a basis weight of 50 to 200 g / m 2 and a bulk density of 0.60 to 1.20 g / cm 3 . If the basis weight is 50 g / m 2 or less, the amount of fibers is small, and there is a difficulty in obtaining a uniform and smooth surface. If the basis weight is 200 g / m 2 or more, a layer of thermocompression-bonded fibers is formed thick. For this reason, the air flow rate is significantly reduced, and the force for adsorbing and fixing the work becomes insufficient. Accordingly, the basis weight is preferably in the range of 50 to 200 g / m 2 , more preferably 75 to 150 g / m 2 .
また、嵩密度は０．６０ｇ／ｃｍ3以下であると表面の平滑性が充分でなく、吸着，搬送を繰り返しているうちに毛羽だってくるという欠点があり、１．２０ｇ／ｃｍ3以上になると低融点繊維に融着，固化が進捗しすぎて通気量を著く阻害する難があるので、前記の如く０．６０〜１．２０ｇ／ｃｍ3が好ましく、とりわけ０．７〜１．１ｇ／ｃｍ3はより好適である。 Further, when the bulk density is 0.60 g / cm 3 or less, the surface is not sufficiently smooth, and there is a disadvantage that it becomes fluffy during repeated adsorption and transportation, and when it is 1.20 g / cm 3 or more. Since fusion and solidification of the low-melting fiber progresses too much and there is a difficulty in remarkably hindering the air flow rate, 0.60 to 1.20 g / cm 3 is preferable as described above, especially 0.7 to 1.1 g / cm 3 is more preferred.
なお、上記吸着面に用いられる熱接着不織布Ａの製造工程である混綿，カーディング，交絡加工は何れも特定の設備，条件の必要はなく、既存のニードルパンチ不織布，水流交絡不織布の製造方法で充分可能である。なお、上記熱接着不織布Ａは吸着面が紙，フィルムなどのワークに皺を発生させたり、吸着跡を残すことなく吸着させることにあり、表面の均一性，平滑性が重要であり、不織布にあっては充分に繊維が熱によって溶融、平滑化されている必要がある。そのため熱処理条件としては、使用される低融点繊維の融点からプラス１０℃の範囲の温度にて加圧・熱処理するのが好ましい。但し、生産性を向上させるため融点よりも２０℃以上高い温度にて処理する場合は接触時間を短くする配慮が必要であり、接触時間が長くなると、全面融着固化し、著しく通気性を阻害するため好ましくない。 The mixed cotton, carding, and entanglement processes, which are the manufacturing process of the thermal bonding nonwoven fabric A used for the adsorption surface, do not require any specific equipment and conditions, and are existing needle punch nonwoven fabrics and hydroentangled nonwoven fabric manufacturing methods. It is possible enough. The thermal bonding nonwoven fabric A has an adsorption surface that causes wrinkles on a workpiece such as paper or film, or adsorption without leaving an adsorption trace. Surface uniformity and smoothness are important. In that case, it is necessary that the fiber is sufficiently melted and smoothed by heat. Therefore, as heat treatment conditions, it is preferable to apply pressure and heat treatment at a temperature in the range of plus 10 ° C. from the melting point of the low-melting fiber used. However, in order to improve productivity, it is necessary to consider shortening the contact time when processing at a temperature 20 ° C. or higher than the melting point. If the contact time is increased, the entire surface is fused and solidified, and the air permeability is significantly inhibited. Therefore, it is not preferable.
一方、前記吸着面側の不織布Ａに積層される真空吸引側に使用される熱接着不織布Ｂを構成する繊維は、通常の熱接着工程、即ち、エアスルータイプのオーブン、コンベア式熱風循環式乾燥機などにて繊維が溶融・固化する繊維であれば特に限定されるものではなく、使用しうる繊維としては上記熱接着不織布Ａで使用される低融点繊維、即ち変性ポリエステル繊維、変性ナイロン繊維、ポリプロピレン、ポリエチレンなどのポリオレフィン繊維、あるいはポリエステル／ナイロンなどの芯鞘構造の繊維、あるいは繊維断面の半分がポリプロピレン、半分がポリエチレンの２成分系繊維などの低融点繊維と該低融点繊維よりも融点が７０℃以上高い繊維として、レギュラータイプのポリエステル繊維，ナイロン繊維，セルロース系繊維のレーヨン繊維、木綿などである。 On the other hand, the fibers constituting the heat-bonding nonwoven fabric B used on the vacuum suction side laminated on the suction surface-side nonwoven fabric A are ordinary heat-bonding processes, that is, air-through type ovens, conveyor-type hot air circulation dryers. The fiber is not particularly limited as long as the fiber is melted and solidified, and the usable fiber is a low-melting fiber used in the thermal bonding nonwoven fabric A, that is, modified polyester fiber, modified nylon fiber, polypropylene. Polyolefin fibers such as polyethylene, core / sheath fibers such as polyester / nylon, or low-melting fibers such as bicomponent fibers in which half of the fiber cross-section is polypropylene and half is polyethylene, and the melting point of the low-melting fiber is 70. Regular type polyester fiber, nylon fiber, cellulosic fiber Down fiber, cotton and the like.
この熱接着不織布Ｂの主たる目的は、熱接着不織布Ａを介して吸引される空気が均一に吸引されるべく空気の通過する流露を調整することにある。但し、通気量は多いほうが好ましいために、熱接着の方法は熱接着不織布Ａと異なり、エアスルータイプの熱処理が好ましい。そのため不織布製造に使用される低融点繊維は、繊維径１〜７０ｄｔｅｘの変性ポリエステル繊維などを２０〜９０重量％、低融点繊維よりも融点が７０℃以上高い繊維が繊維径１〜７０ｄｔｅｘのレギュラーポリエステル繊維などを８０〜１０重量％の比率で混綿、カード、交絡加工を行った後、低融点繊維の融点よりもプラス１０℃以下の範囲の温度にてウエブが嵩高いままの状態で熱処理を行うのが好ましい。しかし、場合によってはニードルパンチや水流交絡による加工のみで熱処理工程を省略することも可能である。熱接着不織布Ｂの製造工程である混綿、カーディング加工もいずれも特定の設備、条件は必要ではなく、通常の不織布の製造方法で可能である。 The main purpose of this heat-bonded nonwoven fabric B is to adjust the flow of air through which the air sucked through the heat-bonded nonwoven fabric A is uniformly sucked. However, since it is preferable that the air flow rate is large, the heat bonding method is different from the heat bonding nonwoven fabric A, and air-through type heat treatment is preferable. Therefore, the low melting point fiber used for the production of the nonwoven fabric is 20 to 90% by weight of the modified polyester fiber having a fiber diameter of 1 to 70 dtex, and the regular polyester having a fiber diameter of 1 to 70 dtex whose melting point is 70 ° C. higher than the low melting point fiber. After blending, carding, and entanglement processing of fibers and the like at a ratio of 80 to 10% by weight, heat treatment is performed in a state where the web remains bulky at a temperature in a range of 10 ° C. or lower than the melting point of the low melting point fiber. Is preferred. However, in some cases, it is possible to omit the heat treatment step only by processing by needle punching or hydroentanglement. Neither the mixed cotton or the carding process, which is the production process of the heat-bonded nonwoven fabric B, requires any specific equipment and conditions, and can be performed by a normal nonwoven fabric production method.
熱接着不織布Ｂは混綿、カード，交絡加工のみ、あるいは更に熱接着された目付３００〜８００ｇ／ｍ2の交絡あるいは熱接着タイプの不織布である。不織布の目付が３００ｇ／ｍ2以下では繊維量が少なく均一な空気の流路が得られない。また、不織布の目付が８００ｇ／ｍ2以上になると、繊維の層が厚く、著しく通気量の低下を招きワークを吸着・固定する力が乏しくなり好ましくない。従って熱接着不織布Ｂの好ましい目付の範囲は、３００〜８００ｇ／ｍ2であり、特に４５０〜６５０ｇ／ｍ2は効果的である。また、該不織布の嵩密度は、０．１〜０．５ｇ／ｃｍ3、好ましくは０．２〜０．３ｇ／ｃｍ3である。嵩密度０．１ｇ／ｃｍ3以下であると繊維間の固着が充分でなく、真空吸着するとプレートが変形するという欠点があり、嵩密度０．５ｇ／ｃｍ3以上になると低融点繊維に融着・固化が進捗しすぎて通気量を著しく阻害するという欠点がある。 The heat-bonding nonwoven fabric B is a mixed cotton, card, entanglement process only, or a heat-bonded nonwoven fabric of basis weight 300 to 800 g / m 2 and having a basis weight of 300 to 800 g / m 2 . If the basis weight of the nonwoven fabric is 300 g / m 2 or less, the amount of fibers is small and a uniform air flow path cannot be obtained. On the other hand, when the basis weight of the nonwoven fabric is 800 g / m 2 or more, the fiber layer is thick, which causes a significant decrease in the air flow rate, which is not preferable. Therefore, the preferable basis weight range of the heat-bonding nonwoven fabric B is 300 to 800 g / m 2 , and 450 to 650 g / m 2 is particularly effective. The bulk density of the nonwoven fabric, 0.1 to 0.5 g / cm 3, preferably 0.2 to 0.3 g / cm 3. When the bulk density is 0.1 g / cm 3 or less, the fibers are not sufficiently fixed, and there is a disadvantage that the plate is deformed when vacuum-adsorbed. When the bulk density is 0.5 g / cm 3 or more, the fibers are fused to the low melting point fiber. -There is a disadvantage that solidification progresses too much and the air flow rate is significantly inhibited.
かくして吸着プレートとすべく得られた上記の熱接着不織布Ａと熱接着不織布Ｂを次に重ね合わせ、吸引した際に周囲からエアーが進入するのを防止するのと同時に吸着プレート本体に取り付け易くするために、外周を７〜２０ｍｍホットプレスにて融着・固化し、両熱接着不織布Ａ，Ｂを一体化させる。この際、融着部Ｃ以外の部分においては、通気量の低下を招かない溜めに可能な限り嵩高く仕上げるのが望ましい。また、外周の融着部は、装着を容易にすると共に、非融着部以外からエアーが漏れ混入し吸着力が低下することを防止している。従って非融着部の通気量を５０〜１５０ｃｃ／ｃｍ2／ｓｅｃ，融着部の通気量を５ｃｃ／ｃｍ2／ｓｅｃ以下とすることが好適である。 The heat bonding nonwoven fabric A and the heat bonding nonwoven fabric B thus obtained to become the suction plate are then overlapped, and when sucked, air is prevented from entering from the surroundings and at the same time easy to attach to the suction plate body. For this purpose, the outer periphery is fused and solidified by a 7 to 20 mm hot press to integrate the two heat-bonded nonwoven fabrics A and B together. At this time, it is desirable that the portion other than the fused portion C is finished as bulky as possible in a reservoir that does not cause a decrease in the air flow rate. Moreover, the fusion part on the outer periphery facilitates attachment and prevents air from leaking from other than the non-fusion part and lowering the adsorption power. Therefore 50~150cc ventilation amount of unfused portion / cm 2 / sec, the airflow amount of the fused portion to be less 5cc / cm 2 / sec is preferred.
なお、以上の熱接着不織Ａ，Ｂよりなる吸着プレートにおいて、不織布Ａ，Ｂは使用目的，使用場所により熱成型される前に常用の加工方法、即ち、含浸加工，コーティング加工あるいはスプレー加工により帯電防止剤，難燃剤などを付与することも好適である。 In the adsorption plate composed of the above heat-bonding nonwoven fabrics A and B, the nonwoven fabrics A and B are subjected to conventional processing methods, ie, impregnation processing, coating processing or spray processing, before being thermoformed depending on the purpose and place of use. It is also preferable to add an antistatic agent, a flame retardant, or the like.
図３は上記吸着プレート１を真空吸着装置などの吸着部をなす真空ポート２に取り付け使用している場合を示しており、吸引プレート１をワーク固定部をなす真空ポート２内に熱接着不織布Ａを吸着面側に、一方、熱接着不織布Ｂを吸引側に配して穴あき板４を介し取り付け、吸引部３より吸引することによりワークを随時、固定・保持せしめるようになている。
FIG. 3 shows a case where the
なお、吸着プレート１は図１においては長方形状となっているが、正方形，円形，楕円形など、吸着部の構造に合わせて適宜形状に形成することができる。
Although the
以上のようにして本発明吸着プレートはワークの搬送あるいは固定に随時使用され、前述した効果を発揮することができる。 As described above, the suction plate of the present invention is used at any time for conveying or fixing a workpiece, and can exhibit the above-described effects.
以下、更に本発明の実施例を比較例と共に説明する。 Hereinafter, examples of the present invention will be described together with comparative examples.
実施例１
繊度４．４ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１７０℃）８０重量％と、繊度１７ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１７０℃）２０重量％を均一に混綿し、次いでカーディングし目付約１００ｇ／ｍ2、厚さ０．１０ｍｍとし、引き続き、表面から深さ９ｍｍ、打ち込み本数６０本／ｃｍ2のニードルパンチ加工を施したのち、２２０℃の熱処理を施したものを吸着面側の不織布Ａとし、繊度２２ｄｔｅｘ、繊維長６４ｍｍの低融点ポリエステル繊維（融点：２００℃）７０重量％と、繊度４．４ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１３０℃）１５重量％と繊度１７ｄｔｅｘ、繊維長５１ｍｍのポリエステル繊維（融点：２６０℃）１５重量％を均一に混綿し、次いでカーディングし目付約５００ｇ／ｍ2、厚さ２．２４ｍｍの繊維層とし、引き続き、表面に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2、裏面に同様に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2のニードルパンチ加工を施したのち、２２０℃の熱処理を施したものを真空吸引側の不織布Ｂとして、上記両不織布Ａ，Ｂを積層後、外周部を幅１５ｍｍで全周を表面温度２００℃の熱プレスにて融着・成型し、吸着プレートを作成した。
実施例２
繊度４．４ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１７０℃）８０重量％と、繊度１７ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１７０℃）２０重量％を均一混合し、次いでカーディングし目付約１００ｇ／ｍ2、厚さ０．１２ｍｍの繊維層とし、引き続き、表面に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2のニードルパンチ加工を施したのち、２２０℃の熱処理を施したものを吸着面側の不織布Ａとし、繊度２２ｄｔｅｘ、繊維長６４ｍｍの低融点ポリエステル繊維（融点：２００℃）７０重量％と、繊度４．４ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１３０℃）１５重量％と繊度１７ｄｔｅｘ、繊維長５１ｍｍのポリエステル繊維（融点：２６０℃）１５重量％を均一混綿し、次いでカーディングし目付約６００ｇ／ｍ2、厚さ２．３２ｍｍの繊維層とし、引き続き、表面に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2、裏面に同様に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2のニードルパンチ処理を施したのち、２２０℃の熱処理を施したものを真空吸引側の不織布Ｂとした。次いで前記不織布Ａ，Ｂを積層後、外周部を幅１５ｍｍで全周を表面温度２００℃の熱プレスにて融着・成型し、吸着プレートを作成した。
比較例１
繊度４．４ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１７０℃）８０重量％と、繊度１７ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１７０℃）２０重量％を均一混合し、次いでカーディングし目付約１００ｇ／ｍ2、厚さ０．９０ｍｍの繊維層とし、引き続き、表面に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2のニードルパンチ加工を施したのち、２２０℃の熱処理を施したものを吸着綿側の不織布Ａとし、繊度２２ｄｔｅｘ、繊維長６４ｍｍの低融点ポリエステル繊維（融点：２００℃）７０重量％と、繊度４．４ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点：１３０℃）１５重量％と繊度１７ｄｔｅｘ、繊維長５１ｍｍのポリエステル繊維（融点：２６０℃）１５重量％を均一混綿し、次いでカーディングし目付約９００ｇ／ｍ2、厚さ３．５１ｍｍの繊維層とし、引き続き、表面に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2、裏面に同様に深さ９ｍｍ，打ち込み本数６０本／ｃｍ2のニードルパンチ加工を施したのち、２２０℃の熱処理を施したものを真空吸引側の不織布Ｂとした。次いで前記両不織布Ａ，Ｂを積層後、外周部を幅１５ｍｍで全周を表面温度２００℃の熱プレスにて融着・成型し、吸着プレートを作成した。
比較例２
繊度２２ｄｔｅｘ、繊維長６４ｍｍの低融点ポリエステル繊維（融点：２００℃）７０重量％と、繊度４．４ｄｔｅｘ、繊維長５１ｍｍの低融点ポリエステル繊維（融点１３０℃）１５重量％と繊度１７ｄｔｅｘ、繊維長５１ｍｍのポリエステル繊維（融点：２６０℃）１５重量％を均一混綿し、次いでカーディングして目付約６００ｇ／ｍ2、厚さ２．２４ｍｍの繊維層とし、引き続き、表面に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2、裏面に同様に深さ９ｍｍ、打ち込み本数６０本／ｃｍ2のニードルパンチ加工を施したのち、２２０℃の熱処理を施したものの外周部を幅１５ｍｍで全周にわたり表面温度２００℃の熱プレスにて融着・成型し、吸着プレートを作成した。
Example 1
80% by weight of a low-melting polyester fiber (melting point: 170 ° C.) having a fineness of 4.4 dtex and a fiber length of 51 mm and 20% by weight of a low-melting polyester fiber having a fineness of 17 dtex and a fiber length of 51 mm (melting point: 170 ° C.) Next, carding to a weight of about 100 g / m 2 and a thickness of 0.10 mm, followed by needle punching with a depth of 9 mm from the surface and a driving number of 60 pieces / cm 2 , followed by heat treatment at 220 ° C. Is a non-woven fabric A on the adsorption surface side, low-melting polyester fiber having a fineness of 22 dtex and a fiber length of 64 mm (melting point: 200 ° C.), low-melting polyester fiber having a fineness of 4.4 dtex and a fiber length of 51 mm (melting point: 130 ° C.) Uniform blending of 15% by weight of polyester fiber (melting point: 260 ° C.) with a fineness of 17 dtex and a fiber length of 51 mm. Then carded basis weight of about 500 g / m 2, a fiber layer with a thickness of 2.24 mm, subsequently, the depth to the surface of 9 mm, end counts 60 lines / cm 2, similarly to the back surface depth 9 mm, end counts 60 lines / After performing the needle punching of cm 2 , the heat treated at 220 ° C. is used as the non-woven fabric B on the vacuum suction side, and after laminating the non-woven fabrics A and B, the outer peripheral portion has a width of 15 mm and the entire periphery has a surface temperature of 200. A suction plate was prepared by fusing and molding with a hot press at ℃.
Example 2
80% by weight of a low-melting polyester fiber (melting point: 170 ° C.) having a fineness of 4.4 dtex and a fiber length of 51 mm and 20% by weight of a low-melting polyester fiber having a fineness of 17 dtex and a fiber length of 51 mm (melting point: 170 ° C.) After carding into a fiber layer with a basis weight of about 100 g / m 2 and a thickness of 0.12 mm, the surface was subjected to needle punching with a depth of 9 mm and a driving number of 60 / cm 2 , followed by heat treatment at 220 ° C. The non-woven fabric A on the adsorption surface side is used as a non-woven fabric A having a fineness of 22 dtex and a low melting point polyester fiber having a fiber length of 64 mm (melting point: 200 ° C.), 70% by weight, a low melting point polyester fiber having a fineness of 4.4 dtex and a fiber length of 51 mm (melting point: 130). C) 15% by weight, fineness 17dtex, fiber length 51mm polyester fiber (melting point: 260 ° C) 15% by weight uniform blend , Then carded basis weight of about 600 g / m 2, a fiber layer with a thickness of 2.32 mm, subsequently, the depth to the surface of 9mm, end counts sixty / cm 2, similarly depth 9mm on the back, end counts sixty A nonwoven fabric B on the vacuum suction side was subjected to a heat treatment at 220 ° C. after a needle punch treatment of / cm 2 . Next, after laminating the non-woven fabrics A and B, the outer peripheral part was 15 mm wide and the entire circumference was fused and molded by a hot press with a surface temperature of 200 ° C. to prepare an adsorption plate.
Comparative Example 1
80% by weight of a low-melting polyester fiber (melting point: 170 ° C.) having a fineness of 4.4 dtex and a fiber length of 51 mm and 20% by weight of a low-melting polyester fiber having a fineness of 17 dtex and a fiber length of 51 mm (melting point: 170 ° C.) After carding into a fiber layer with a basis weight of about 100 g / m 2 and a thickness of 0.90 mm, the surface was subjected to needle punching with a depth of 9 mm and a driving number of 60 / cm 2 , followed by heat treatment at 220 ° C. The resulting non-woven fabric A on the absorbent cotton side is a low melting point polyester fiber having a fineness of 22 dtex and a fiber length of 64 mm (melting point: 200 ° C.), 70% by weight, a fineness of 4.4 dtex and a fiber length of 51 mm (melting point: 130). C) 15% by weight, fineness 17dtex, fiber length 51mm polyester fiber (melting point: 260 ° C) 15% by weight uniform blend , Then carded basis weight of about 900 g / m 2, a fiber layer with a thickness of 3.51Mm, subsequently, the depth to the surface of 9mm, end counts sixty / cm 2, similarly depth 9mm on the back, end counts sixty After performing a needle punching process of / cm 2, a material subjected to heat treatment at 220 ° C. was designated as a nonwoven fabric B on the vacuum suction side. Next, after laminating both the nonwoven fabrics A and B, the outer peripheral portion was 15 mm wide and the entire circumference was fused and molded by a hot press having a surface temperature of 200 ° C. to prepare an adsorption plate.
Comparative Example 2
Low-melting polyester fiber (melting point: 200 ° C.) 70% by weight with a fineness of 22 dtex and fiber length of 64 mm, low-melting polyester fiber (melting point: 130 ° C.) with a fineness of 4.4 dtex and fiber length of 15 mm, fineness of 17 dtex, fiber length of 51 mm 15% by weight of polyester fiber (melting point: 260 ° C.) was uniformly blended, and then carded to form a fiber layer having a basis weight of about 600 g / m 2 and a thickness of 2.24 mm. this / cm 2, similarly depth 9mm on the back, after having been subjected to needle punching the end count sixty / cm 2, surface temperature 200 ° C. over the entire circumference in width 15mm outer peripheral portion but subjected to a heat treatment at 220 ° C. Adhesion plates were prepared by fusing and molding with a hot press.
次いで上記各実施例，比較例により得られた各吸着プレートについて嵩密度，通気量，平滑性を対比するため下記試験方法に基づいて試験を行った。結果を下記表１に示す。
試験方法
１．厚さ ＪＩＳＬ−１９１３ ６．１に準拠した。
２．目付 ＪＩＳＬ−１９１３ ６．２に準拠した。
３．嵩密度 目付と厚さから算出した。
４．通気量 カトーテック製通気量試験機にて測定した。
５．平滑性 目視と触感で評価した。
Next, each adsorption plate obtained in each of the above Examples and Comparative Examples was tested based on the following test method in order to compare the bulk density, air flow rate, and smoothness. The results are shown in Table 1 below.
2. Based on JISL-1913 6.2.
3. Bulk density Calculated from basis weight and thickness.
4). Aeration rate Measured with a Kato Tech aeration rate tester.
5. Smoothness Evaluated by visual and tactile sensations.
上記表より本発明に係る吸着プレートは通気量，平滑性の総合において各比較例より優れていることが理解される。 From the above table, it can be understood that the suction plate according to the present invention is superior to the comparative examples in terms of overall ventilation and smoothness.
本発明による不織布製吸着プレートは、紙，フィルム，ウェハ，ガラス板，金属板等のワークに皺が発生したり吸着跡が残らず、また吸着汚れ等を発生させることのない真空吸着装置の吸着部の部材として使用される。 The non-woven fabric suction plate according to the present invention is a vacuum suction device that does not cause wrinkles or suction marks on the work such as paper, film, wafer, glass plate, metal plate, etc. Used as part member.
１：吸着プレート
Ａ：吸着面側不織布
Ｂ：真空吸引側不織布
Ｃ：融着部
２：真空ポート
３：吸引部
４：穴あき板
1: Adsorption plate A: Adsorption surface side non-woven fabric B: Vacuum suction side non-woven fabric C: Fusion part 2: Vacuum port 3: Suction part 4: Perforated plate
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016021239A1 (en) * | 2014-08-07 | 2016-02-11 | 日本バイリーン株式会社 | Air-permeable sheet |
| JP2018049961A (en) * | 2016-09-22 | 2018-03-29 | 日本バイリーン株式会社 | Method for manufacturing electronic device and air-permeable sheet used in the same |
| EP4252977A1 (en) * | 2022-03-28 | 2023-10-04 | SMC Corporation | Suction board |
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| JP2008138580A (en) * | 2006-12-01 | 2008-06-19 | Kureha Ltd | Nonwoven fabric for canister filter |
| JP2008190051A (en) * | 2007-02-01 | 2008-08-21 | Kureha Ltd | High-efficiency nonwoven fabric with low pressure loss |
| JP2009023777A (en) * | 2007-07-18 | 2009-02-05 | Nitto Denko Corp | Sheet for suction fixing |
| JP2009235649A (en) * | 2008-03-28 | 2009-10-15 | Kureha Ltd | Water absorption and evaporation sheet |
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| JP2008138580A (en) * | 2006-12-01 | 2008-06-19 | Kureha Ltd | Nonwoven fabric for canister filter |
| JP2008190051A (en) * | 2007-02-01 | 2008-08-21 | Kureha Ltd | High-efficiency nonwoven fabric with low pressure loss |
| JP2009023777A (en) * | 2007-07-18 | 2009-02-05 | Nitto Denko Corp | Sheet for suction fixing |
| JP2009235649A (en) * | 2008-03-28 | 2009-10-15 | Kureha Ltd | Water absorption and evaporation sheet |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016021239A1 (en) * | 2014-08-07 | 2016-02-11 | 日本バイリーン株式会社 | Air-permeable sheet |
| KR20170039220A (en) | 2014-08-07 | 2017-04-10 | 니혼바이린 가부시기가이샤 | Air-permeable sheet |
| CN106715112A (en) * | 2014-08-07 | 2017-05-24 | 日本宝翎株式会社 | Air-permeable sheet |
| JPWO2016021239A1 (en) * | 2014-08-07 | 2017-05-25 | 日本バイリーン株式会社 | Breathable sheet |
| TWI657928B (en) * | 2014-08-07 | 2019-05-01 | 日本寶翎股份有限公司 | Air-permeable sheet |
| US10525664B2 (en) | 2014-08-07 | 2020-01-07 | Japan Vilene Company, Ltd. | Air-permeable sheet |
| KR102256834B1 (en) | 2014-08-07 | 2021-05-26 | 니혼바이린 가부시기가이샤 | Air-permeable sheet |
| JP2018049961A (en) * | 2016-09-22 | 2018-03-29 | 日本バイリーン株式会社 | Method for manufacturing electronic device and air-permeable sheet used in the same |
| EP4252977A1 (en) * | 2022-03-28 | 2023-10-04 | SMC Corporation | Suction board |
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