JP2012033575A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2012033575A JP2012033575A JP2010169830A JP2010169830A JP2012033575A JP 2012033575 A JP2012033575 A JP 2012033575A JP 2010169830 A JP2010169830 A JP 2010169830A JP 2010169830 A JP2010169830 A JP 2010169830A JP 2012033575 A JP2012033575 A JP 2012033575A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 64
- 229910002704 AlGaN Inorganic materials 0.000 claims abstract description 102
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000012535 impurity Substances 0.000 claims description 13
- 229910052760 oxygen Inorganic materials 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- 229910052793 cadmium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052749 magnesium Inorganic materials 0.000 claims description 3
- 229910052698 phosphorus Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 230000000052 comparative effect Effects 0.000 description 21
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 19
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 17
- 239000010408 film Substances 0.000 description 16
- 239000007789 gas Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 12
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 238000004088 simulation Methods 0.000 description 10
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000011777 magnesium Substances 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 239000002994 raw material Substances 0.000 description 5
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 4
- 239000011651 chromium Substances 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- SIPUZPBQZHNSDW-UHFFFAOYSA-N bis(2-methylpropyl)aluminum Chemical compound CC(C)C[Al]CC(C)C SIPUZPBQZHNSDW-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- SQBBHCOIQXKPHL-UHFFFAOYSA-N tributylalumane Chemical compound CCCC[Al](CCCC)CCCC SQBBHCOIQXKPHL-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
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- H01L21/02373—Group 14 semiconducting materials
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- H01L21/02455—Group 13/15 materials
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/02104—Forming layers
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
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Abstract
【解決手段】本発明は、SiC基板10上に設けられ、アクセプタ濃度(Na)がドナー濃度(Nd)以上の濃度であるAlGaNバッファ層18と、AlGaNバッファ層18上に設けられたGaN電子走行層14と、GaN電子走行層14上に設けられ、GaNよりもバンドギャップが大きいAlGaN電子供給層16と、を有する半導体装置である。
【選択図】図5
Description
原料ガス:TMA(トリメチルアルミニウム)、NH3(アンモニア)
成長温度:1100℃
圧力 :13.3kPa
膜厚 :25nm
原料ガス :TMG(トリメチルガリウム)、NH3
成長温度 :1100℃
圧力 :13.3kPa
V/III比:5000
成長速度 :0.2nm/sec
膜厚 :1500nm
原料ガス :TMA、TMG、NH3
Al組成比:20%
膜厚 :25nm
原料ガス:TMA、NH3
成長温度:1100℃
圧力 :13.3kPa
膜厚 :25nm
原料ガス :TMA、TMG、NH3
成長温度 :1100℃
圧力 :13.3kPa
V/III比:5000
成長速度 :0.2nm/sec
Al組成比 :5%
膜厚 :1000nm
原料ガス :TMG、NH3
成長温度 :1100℃
圧力 :13.3kPa
V/III比:5000
成長速度 :0.2nm/sec
膜厚 :500nm
原料ガス :TMA、TMG、NH3
Al組成比:20%
膜厚 :25nm
原料ガス:TMA、NH3
成長温度:1100℃
圧力 :13.3kPa
膜厚 :25nm
原料ガス :TMA、TMG、NH3
成長温度 :1050℃
圧力 :13.3kPa
V/III比:1000
成長速度 :0.3nm/sec
Al組成比 :5%
膜厚 :1000nm
原料ガス :TMG、NH3
成長温度 :1100℃
圧力 :13.3kPa
V/III比:5000
成長速度 :0.2nm/sec
膜厚 :500nm
原料ガス :TMA、TMG、NH3
Al組成比:20%
膜厚 :25nm
原料ガス:TEA(トリエチルアルミニウム)、TMG、NH3
成長温度:1100℃
圧力 :13.3kPa、
V/III比:5000
成長速度 :0.2nm/sec
Al組成比 :5%
膜厚 :1000nm
原料ガス:TMA、NH3
成長温度:1100℃
圧力 :13.3kPa
膜厚 :25nm
原料ガス :TMA、TMG、NH3
成長温度 :1100℃
圧力 :13.3kPa
V/III比:5000
成長速度 :0.2nm/sec
Al組成比 :シード層12側からGaN電子走行層14側に向けて10%から5%に徐々に減少(つまり、シード層12側のAl組成比は10%でGaN電子走行層14側のAl組成比は5%)
膜厚 :1000nm
原料ガス :TMG、NH3
成長温度 :1100℃
圧力 :13.3kPa
V/III比:5000
成長速度 :0.2nm/sec
膜厚 :500nm
原料ガス :TMA、TMG、NH3
Al組成比:20%
膜厚 :25nm
12 シード層
14 GaN電子走行層
16 AlGaN電子供給層
18 AlGaNバッファ層
22 ソース電極
24 ドレイン電極
26 ゲート電極
Claims (5)
- SiC基板上に設けられ、アクセプタ濃度がドナー濃度以上の濃度であるAlGaN層と、
前記AlGaN層上に設けられたGaN層と、
前記GaN層上に設けられ、GaNよりもバンドギャップが大きい電子供給層と、を有することを特徴とする半導体装置。 - 前記AlGaN層は、アクセプタ不純物として炭素を、ドナー不純物として酸素および珪素を含み、前記炭素の濃度は、前記酸素の濃度と前記珪素の濃度との合計濃度以上であることを特徴とする請求項1記載の半導体装置。
- 前記アクセプタ濃度は、前記ドナー濃度の2倍以上であることを特徴とする請求項1記載の半導体装置。
- 前記AlGaN層は、アクセプタ不純物としてMg、P、Zn、As、Cd、Hg、Fe、Cr、Co、Cuの少なくとも1つが添加されていることを特徴とする請求項1記載の半導体装置。
- SiC基板上に設けられたAlGaN層と、
前記AlGaN層上に設けられたGaN層と、
前記GaN層上に設けられ、GaNよりもバンドギャップが大きい電子供給層と、を有し、
前記AlGaN層は、前記SiC基板から前記GaN層に向かうに連れてAl組成比が減少し、前記SiC基板側におけるAl組成比と前記GaN層側におけるAl組成比との差は20%以下であることを特徴とする半導体装置。
Priority Applications (2)
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JP2010169830A JP2012033575A (ja) | 2010-07-28 | 2010-07-28 | 半導体装置 |
US13/192,247 US8742426B2 (en) | 2010-07-28 | 2011-07-27 | Semiconductor device |
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JP2010169830A JP2012033575A (ja) | 2010-07-28 | 2010-07-28 | 半導体装置 |
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JP (1) | JP2012033575A (ja) |
Cited By (22)
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JP2013084819A (ja) * | 2011-10-11 | 2013-05-09 | Toshiba Corp | 窒化物半導体ウェーハ、窒化物半導体装置及び窒化物半導体結晶の成長方法 |
JP2013206976A (ja) * | 2012-03-27 | 2013-10-07 | Fujitsu Ltd | 化合物半導体装置及びその製造方法 |
JP2014072430A (ja) * | 2012-09-28 | 2014-04-21 | Fujitsu Ltd | 半導体装置 |
KR20140120519A (ko) * | 2013-04-03 | 2014-10-14 | 엘지전자 주식회사 | 질화물 반도체 소자 및 그 제조 방법 |
JP2014197645A (ja) * | 2013-03-29 | 2014-10-16 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
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JP2015060986A (ja) * | 2013-09-19 | 2015-03-30 | 富士通株式会社 | 半導体装置及び半導体装置の製造方法 |
WO2015045412A1 (ja) * | 2013-09-27 | 2015-04-02 | Dowaエレクトロニクス株式会社 | 電子デバイス用エピタキシャル基板およびその製造方法 |
JP2015185809A (ja) * | 2014-03-26 | 2015-10-22 | 住友電気工業株式会社 | 半導体基板の製造方法及び半導体装置 |
WO2016051935A1 (ja) * | 2014-10-03 | 2016-04-07 | 日本碍子株式会社 | 半導体素子用のエピタキシャル基板およびその製造方法 |
JP2016100471A (ja) * | 2014-11-21 | 2016-05-30 | 住友電気工業株式会社 | 半導体装置及び半導体装置の製造方法 |
JP2016524332A (ja) * | 2013-06-18 | 2016-08-12 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh | 半導体パワースイッチ及び半導体パワースイッチの製造方法 |
JP2016213507A (ja) * | 2016-09-07 | 2016-12-15 | 富士通株式会社 | 化合物半導体装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000068498A (ja) * | 1998-08-21 | 2000-03-03 | Nippon Telegr & Teleph Corp <Ntt> | 絶縁性窒化物膜およびそれを用いた半導体装置 |
JP2004342810A (ja) * | 2003-05-15 | 2004-12-02 | Fujitsu Ltd | 化合物半導体装置 |
JP2006114655A (ja) * | 2004-10-14 | 2006-04-27 | Hitachi Cable Ltd | 半導体エピタキシャルウェハ及び電界効果トランジスタ |
JP2006332367A (ja) * | 2005-05-26 | 2006-12-07 | Sumitomo Electric Ind Ltd | 高電子移動度トランジスタ、電界効果トランジスタ、エピタキシャル基板、エピタキシャル基板を作製する方法およびiii族窒化物系トランジスタを作製する方法 |
WO2007077666A1 (ja) * | 2005-12-28 | 2007-07-12 | Nec Corporation | 電界効果トランジスタ、ならびに、該電界効果トランジスタの作製に供される多層エピタキシャル膜 |
JP2007251144A (ja) * | 2006-02-20 | 2007-09-27 | Furukawa Electric Co Ltd:The | 半導体素子 |
JP2009021279A (ja) * | 2007-07-10 | 2009-01-29 | Hitachi Cable Ltd | 半導体エピタキシャルウエハ |
JP2009117482A (ja) * | 2007-11-02 | 2009-05-28 | Sumitomo Electric Ind Ltd | Iii族窒化物電子デバイス及びiii族窒化物半導体エピタキシャル基板 |
JP2011187643A (ja) * | 2010-03-08 | 2011-09-22 | Sharp Corp | ヘテロ接合型電界効果トランジスタ |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5670798A (en) * | 1995-03-29 | 1997-09-23 | North Carolina State University | Integrated heterostructures of Group III-V nitride semiconductor materials including epitaxial ohmic contact non-nitride buffer layer and methods of fabricating same |
US6559467B2 (en) * | 1997-11-18 | 2003-05-06 | Technologies And Devices International, Inc. | P-n heterojunction-based structures utilizing HVPE grown III-V compound layers |
US6621725B2 (en) * | 2000-08-17 | 2003-09-16 | Kabushiki Kaisha Toshiba | Semiconductor memory device with floating storage bulk region and method of manufacturing the same |
JP5383974B2 (ja) | 2006-12-27 | 2014-01-08 | 住友電工デバイス・イノベーション株式会社 | 半導体基板および半導体装置 |
US20100109018A1 (en) * | 2008-10-31 | 2010-05-06 | The Regents Of The University Of California | Method of fabricating semi-insulating gallium nitride using an aluminum gallium nitride blocking layer |
-
2010
- 2010-07-28 JP JP2010169830A patent/JP2012033575A/ja active Pending
-
2011
- 2011-07-27 US US13/192,247 patent/US8742426B2/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000068498A (ja) * | 1998-08-21 | 2000-03-03 | Nippon Telegr & Teleph Corp <Ntt> | 絶縁性窒化物膜およびそれを用いた半導体装置 |
JP2004342810A (ja) * | 2003-05-15 | 2004-12-02 | Fujitsu Ltd | 化合物半導体装置 |
JP2006114655A (ja) * | 2004-10-14 | 2006-04-27 | Hitachi Cable Ltd | 半導体エピタキシャルウェハ及び電界効果トランジスタ |
JP2006332367A (ja) * | 2005-05-26 | 2006-12-07 | Sumitomo Electric Ind Ltd | 高電子移動度トランジスタ、電界効果トランジスタ、エピタキシャル基板、エピタキシャル基板を作製する方法およびiii族窒化物系トランジスタを作製する方法 |
WO2007077666A1 (ja) * | 2005-12-28 | 2007-07-12 | Nec Corporation | 電界効果トランジスタ、ならびに、該電界効果トランジスタの作製に供される多層エピタキシャル膜 |
JP2007251144A (ja) * | 2006-02-20 | 2007-09-27 | Furukawa Electric Co Ltd:The | 半導体素子 |
JP2009021279A (ja) * | 2007-07-10 | 2009-01-29 | Hitachi Cable Ltd | 半導体エピタキシャルウエハ |
JP2009117482A (ja) * | 2007-11-02 | 2009-05-28 | Sumitomo Electric Ind Ltd | Iii族窒化物電子デバイス及びiii族窒化物半導体エピタキシャル基板 |
JP2011187643A (ja) * | 2010-03-08 | 2011-09-22 | Sharp Corp | ヘテロ接合型電界効果トランジスタ |
Cited By (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8835983B2 (en) | 2011-10-11 | 2014-09-16 | Kabushiki Kaisha Toshiba | Nitride semiconductor device including a doped nitride semiconductor between upper and lower nitride semiconductor layers |
US8928000B2 (en) | 2011-10-11 | 2015-01-06 | Kabushiki Kaisha Toshiba | Nitride semiconductor wafer including different lattice constants |
JP2013084819A (ja) * | 2011-10-11 | 2013-05-09 | Toshiba Corp | 窒化物半導体ウェーハ、窒化物半導体装置及び窒化物半導体結晶の成長方法 |
JP2013206976A (ja) * | 2012-03-27 | 2013-10-07 | Fujitsu Ltd | 化合物半導体装置及びその製造方法 |
US9502525B2 (en) | 2012-03-27 | 2016-11-22 | Fujitsu Limited | Compound semiconductor device and method of manufacturing the same |
US9831310B2 (en) | 2012-07-10 | 2017-11-28 | Fujitsu Limited | Compound semiconductor device, method for producing the same, power-supply unit, and high-frequency amplifier |
JP2014072430A (ja) * | 2012-09-28 | 2014-04-21 | Fujitsu Ltd | 半導体装置 |
JPWO2014108946A1 (ja) * | 2013-01-10 | 2017-01-19 | パナソニックIpマネジメント株式会社 | 電界効果トランジスタ |
US9595606B2 (en) | 2013-01-10 | 2017-03-14 | Panasonic Intellectual Property Management Co., Ltd. | Field-effect transistor |
JP2014197645A (ja) * | 2013-03-29 | 2014-10-16 | 富士通株式会社 | 化合物半導体装置及びその製造方法 |
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KR20140139346A (ko) * | 2013-05-27 | 2014-12-05 | 엘지전자 주식회사 | 질화물 반도체 소자 및 그 제조 방법 |
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JP2016524332A (ja) * | 2013-06-18 | 2016-08-12 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツングRobert Bosch Gmbh | 半導体パワースイッチ及び半導体パワースイッチの製造方法 |
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