JP2011239132A - Vibration piece, vibrator and oscillator - Google Patents

Vibration piece, vibrator and oscillator Download PDF

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JP2011239132A
JP2011239132A JP2010107981A JP2010107981A JP2011239132A JP 2011239132 A JP2011239132 A JP 2011239132A JP 2010107981 A JP2010107981 A JP 2010107981A JP 2010107981 A JP2010107981 A JP 2010107981A JP 2011239132 A JP2011239132 A JP 2011239132A
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arm
vibrating
resonator element
base
holding
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Akinori Yamada
明法 山田
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Seiko Epson Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a vibration piece capable of improving shock resistance, a vibrator having the vibration piece and an oscillator having the vibration piece.SOLUTION: A crystal vibration piece 1 comprises a base section 10, a pair of vibration arms 11 extending from the base section 10, and a notch section 12 that notches the base section 10 in a direction crossing relative to an extending direction of the vibration arms 11. In a plane view, a coupling section 17 where the base section 10 and the vibration arms 11 are coupled is formed with a curved line so as to be widened as the width of an arm section 14 on the vibration arms 11 comes close to the base section 10, as well as a tip section 12a of the notch section 12 is formed with a curved line.

Description

本発明は、振動片、この振動片を備えた振動子及びこの振動片を備えた発振器に関する。   The present invention relates to a resonator element, a vibrator including the resonator element, and an oscillator including the resonator element.

特許文献１には、第１と第２の平行な振動アーム（以下、振動腕という）が延びるベース（以下、基部という）と、各振動腕の自由端を形成するフリッパー形状をした拡大部分（以下、錘部という）と、各振動腕の正面と裏面の少なくとも一方に形成された溝（以下、溝部という）と、を有し、この溝部が振動腕の自由端（先端）の方向に、錘部の開始点を越えて延びているピエゾ電子同調フォーク型共振器（以下、振動片という）が開示されている。   Patent Document 1 discloses a base (hereinafter referred to as a base) from which first and second parallel vibrating arms (hereinafter referred to as vibrating arms) extend, and a flipper-shaped enlarged portion (which forms a free end of each vibrating arm) ( Hereinafter referred to as a weight portion) and a groove (hereinafter referred to as a groove portion) formed on at least one of the front and back surfaces of each vibrating arm, and this groove portion is in the direction of the free end (tip) of the vibrating arm, A piezo electronic tuning fork type resonator (hereinafter referred to as a vibrating piece) extending beyond the starting point of the weight portion is disclosed.

特開２００９−２７７１１号公報（図１）JP 2009-27711 A (FIG. 1)

特許文献１によれば、上記振動片は、振動腕に形成された溝部が振動腕の先端の方向に、錘部の開始点を越えて延びていることから、衝撃時の溝部における応力が分散し、耐衝撃特性が向上するとされている。
しかしながら、上記振動片は、実施例の平面視（特許文献１の図１参照）において、錘部の開始点である錘部と腕部（振動腕の本体部分）との結合部が鋭角に形成され、振動腕の根元部と基部とが直線状の斜線で結合され、一方の振動腕と他方の振動腕とを繋ぐ股部が鋭角に形成されている。
これらにより、上記振動片は、衝撃時において、錘部と腕部との結合部などの上記各部分に応力集中が発生し、上記各部分から破損する虞がある。 According to Patent Document 1, since the groove portion formed on the vibrating arm extends beyond the starting point of the weight portion in the direction of the tip of the vibrating arm, the stress in the groove portion at the time of impact is dispersed. The impact resistance is improved.
However, in the vibration piece, in the plan view of the embodiment (see FIG. 1 of Patent Document 1), the connecting portion between the weight portion, which is the starting point of the weight portion, and the arm portion (main body portion of the vibrating arm) is formed at an acute angle. In addition, the base portion and the base portion of the vibrating arm are coupled by a linear oblique line, and a crotch portion that connects one vibrating arm and the other vibrating arm is formed at an acute angle.
As a result, during the impact, there is a possibility that stress concentration occurs in the respective portions such as the joint portion between the weight portion and the arm portion, and the vibration pieces are damaged from the respective portions.

本発明は、上記課題の少なくとも一部を解決するためになされたものであり、以下の形態または適用例として実現することが可能である。   SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

［適用例１］本適用例にかかる振動片は、基部と、前記基部から延びる少なくとも１本の振動腕と、前記基部を、前記振動腕の延びる方向に対して交差する方向に切り欠いた切り欠き部と、を備え、平面視において、前記基部と前記振動腕との結合部が、前記振動腕の幅が前記基部に近づくに連れて広がるように曲線で形成されていると共に、前記切り欠き部の先端部が曲線で形成されていることを特徴とする。   Application Example 1 A resonator element according to this application example includes a base portion, at least one vibrating arm extending from the base portion, and a notch obtained by cutting the base portion in a direction intersecting the extending direction of the vibrating arm. A coupling portion between the base and the vibrating arm in a plan view is formed in a curve so that the width of the vibrating arm becomes wider as approaching the base, and the notch The tip of the part is formed with a curve.

これによれば、振動片は、平面視において、基部と振動腕との結合部が、振動腕の幅が基部に近づくに連れて広がるように曲線で形成されていると共に、切り欠き部の先端部が曲線で形成されている。
この結果、振動片は、衝撃時に基部と振動腕との結合部及び切り欠き部の先端部に応力集中が発生し難い（応力集中が緩和される）ことから、応力集中による上記部分の破損を低減することが可能となる。
したがって、振動片は、耐衝撃特性を向上させることができる。 According to this, in the plan view, the resonator element is formed in a curve so that the coupling portion between the base portion and the vibrating arm expands as the width of the vibrating arm approaches the base portion, and the tip of the notch portion The part is formed with a curve.
As a result, in the resonator element, stress concentration is unlikely to occur at the joint between the base and the vibrating arm and the tip of the notch during impact (stress concentration is mitigated). It becomes possible to reduce.
Therefore, the vibration piece can improve the impact resistance.

［適用例２］上記適用例にかかる振動片において、前記振動腕は、前記基部側に位置する腕部と、前記腕部より先端側に位置し前記腕部より幅が広い錘部と、を有し、平面視において、前記錘部と前記腕部との結合部が、前記腕部の幅が前記錘部に近づくに連れて広がるように曲線で形成されていることが好ましい。   Application Example 2 In the resonator element according to the application example described above, the vibrating arm includes: an arm portion positioned on the base portion side; and a weight portion positioned on the distal end side of the arm portion and wider than the arm portion. And, in plan view, the connecting portion between the weight portion and the arm portion is preferably formed in a curve so that the width of the arm portion becomes wider as it approaches the weight portion.

これによれば、振動片は、平面視において、錘部と腕部との結合部が、腕部の幅が錘部に近づくに連れて広がるように曲線で形成されている。
この結果、振動片は、錘部の慣性質量の増加によるＱ値（振動の状態を現す無次元数であって、この値が大きいほど振動が安定であることを意味する）の向上効果により、例えば、Ｑ値を維持しながら振動腕を短くすることができると共に、衝撃時に錘部と腕部との結合部に応力集中が発生し難い（応力集中が緩和される）ことによって、応力集中による上記部分の破損を低減することが可能となる。 According to this, the resonator element is formed in a curved line so that the coupling portion between the weight portion and the arm portion expands as the width of the arm portion approaches the weight portion in plan view.
As a result, the resonator element has an effect of improving the Q value (a dimensionless number representing the state of vibration, which means that the larger the value is, the more stable the vibration) is due to the increase of the inertial mass of the weight part. For example, the vibration arm can be shortened while maintaining the Q value, and stress concentration is less likely to occur at the joint between the weight portion and the arm portion at the time of impact (stress concentration is mitigated). It becomes possible to reduce the damage of the said part.

［適用例３］上記適用例にかかる振動片において、前記基部から、前記振動腕の延びる方向に対して交差する方向に延びる第１保持腕と、前記第１保持腕から屈曲し、前記振動腕の延びる方向に延びる第２保持腕と、を有する保持部をさらに備え、平面視において、前記保持部の前記第１保持腕と前記第２保持腕との屈曲部の内側が、曲線で形成されていることが好ましい。   Application Example 3 In the resonator element according to the application example described above, a first holding arm that extends from the base in a direction intersecting with a direction in which the vibrating arm extends, a bent from the first holding arm, and the vibrating arm A holding portion having a second holding arm extending in the direction in which the holding portion extends, and in a plan view, an inner side of the bent portion of the holding portion between the first holding arm and the second holding arm is formed in a curved line. It is preferable.

これによれば、振動片は、保持部をさらに備え、平面視において、保持部の第１保持腕と第２保持腕との屈曲部の内側が、曲線で形成されている。
この結果、振動片は、衝撃時に屈曲部の内側部分に応力集中が発生し難い（応力集中が緩和される）ことによって、応力集中による上記部分の破損を低減することが可能となる。 According to this, the resonator element further includes a holding portion, and the inner side of the bent portion of the first holding arm and the second holding arm of the holding portion is formed in a curved line in plan view.
As a result, the vibration piece is less likely to cause stress concentration in the inner portion of the bent portion at the time of impact (stress concentration is mitigated), so that damage to the portion due to stress concentration can be reduced.

［適用例４］上記適用例３にかかる振動片において、前記第２保持腕は、前記屈曲部側に位置する保持腕部と、前記保持腕部より先端側に位置し前記保持腕部より幅が広い外部接続部と、を有し、平面視において、前記外部接続部と前記保持腕部との結合部が、前記保持腕部の幅が前記外部接続部に近づくに連れて広がるように曲線で形成されていることが好ましい。   Application Example 4 In the resonator element according to Application Example 3, the second holding arm includes a holding arm portion located on the bent portion side, a distal end side from the holding arm portion, and a width wider than the holding arm portion. A wide external connection portion, and in a plan view, the coupling portion between the external connection portion and the holding arm portion is curved so that the width of the holding arm portion increases as the width approaches the external connection portion. It is preferable that it is formed.

これによれば、振動片は、平面視において、第２保持腕の外部接続部と保持腕部との結合部が、保持腕部の幅が外部接続部に近づくに連れて広がるように曲線で形成されている。
この結果、振動片は、衝撃時に第２保持腕の外部接続部と保持腕部との結合部に、応力集中が発生し難い（応力集中が緩和される）ことによって、応力集中による上記部分の破損を低減することが可能となる。 According to this, in the plan view, the resonator element has a curved line so that the coupling portion between the external connection portion of the second holding arm and the holding arm portion expands as the width of the holding arm portion approaches the external connection portion. Is formed.
As a result, the vibration piece is less likely to cause stress concentration at the joint between the external connection portion of the second holding arm and the holding arm portion at the time of impact (stress concentration is mitigated). Breakage can be reduced.

［適用例５］上記適用例にかかる振動片において、前記振動腕を複数本備え、前記複数本の振動腕と、前記基部とを含んで音叉を構成することが好ましい。   Application Example 5 In the resonator element according to the application example described above, it is preferable that a plurality of the vibrating arms are provided, and the tuning fork is configured to include the plurality of vibrating arms and the base portion.

これによれば、振動片は、複数本の振動腕と、基部とを含んで音叉を構成することから、応力集中による破損を低減することが可能な音叉型振動片を提供できる。   According to this, since the vibration piece constitutes a tuning fork including a plurality of vibrating arms and a base, a tuning fork type vibration piece capable of reducing breakage due to stress concentration can be provided.

［適用例６］本適用例にかかる振動子は、適用例１ないし適用例５のいずれか一例に記載の振動片と、前記振動片を収容するパッケージと、を備えたことを特徴とする。   Application Example 6 A vibrator according to this application example includes the resonator element according to any one of Application Examples 1 to 5, and a package that accommodates the resonator element.

これによれば、振動子は、適用例１ないし適用例５のいずれか一例に記載の振動片を備えたことから、耐衝撃特性を向上させることができる。   According to this, since the vibrator includes the resonator element described in any one of Application Examples 1 to 5, it is possible to improve the impact resistance characteristics.

［適用例７］本適用例にかかる発振器は、適用例１ないし適用例５のいずれか一例に記載の振動片と、前記振動片を発振させる発振回路を有する回路素子と、前記振動片及び前記回路素子を収容するパッケージと、を備えたことを特徴とする。   Application Example 7 An oscillator according to this application example includes a resonator element according to any one of application examples 1 to 5, a circuit element having an oscillation circuit that oscillates the resonator element, the resonator element, and the resonator element. And a package for accommodating a circuit element.

これによれば、発振器は、適用例１ないし適用例５のいずれか一例に記載の振動片を備えたことから、耐衝撃特性を向上させることができる。   According to this, since the oscillator includes the resonator element described in any one of Application Examples 1 to 5, it is possible to improve the shock resistance characteristics.

第１の実施形態の振動片の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。2A and 2B are schematic diagrams illustrating a schematic configuration of a resonator element according to the first embodiment, in which FIG. 3A is a plan view and FIG. 変形例の振動片の要部の概略構成を示す模式要部平面図であり、（ａ）、（ｂ）は変形例のバリエーションを示す。It is a typical principal part top view which shows schematic structure of the principal part of the vibration piece of a modification, (a), (b) shows the variation of a modification. 第２の実施形態の振動子の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。It is a schematic diagram which shows schematic structure of the vibrator | oscillator of 2nd Embodiment, (a) is a top view, (b) is sectional drawing of (a). 第３の実施形態の発振器の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。It is a schematic diagram which shows schematic structure of the oscillator of 3rd Embodiment, (a) is a top view, (b) is sectional drawing of (a).

以下、本発明を具体化した実施形態について図面を参照して説明する。   DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings.

（第１の実施形態）
図１は、第１の実施形態の振動片の概略構成を示す模式図であり、図１（ａ）は平面図、図１（ｂ）は、図１（ａ）のＡ−Ａ線での断面図である。 (First embodiment)
FIG. 1 is a schematic diagram illustrating a schematic configuration of the resonator element according to the first embodiment. FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along line AA in FIG. It is sectional drawing.

図１に示すように、振動片としての水晶振動片１は、水晶の原石などから所定の角度で切り出されたウエハー状の水晶基板を基材とし、外形形状がフォトリソグラフィ技術を用いたウエットエッチングなどによって形成されている。   As shown in FIG. 1, a quartz crystal vibrating piece 1 as a vibrating piece has a wafer-shaped quartz substrate cut out from a quartz crystal or the like at a predetermined angle as a base material, and the outer shape is wet etching using a photolithography technique. It is formed by.

水晶振動片１は、基部１０と、基部１０から、互いに沿って延びる一対の振動腕１１と、基部１０を、振動腕１１の延びる方向に対して交差する方向（ここでは、略直交する方向）に切り欠いた一対の切り欠き部１２とを備えている。
そして、水晶振動片１は、基部１０から、振動腕１１の延びる方向に対して交差する方向（ここでは、略直交する方向）に延びる一対の第１保持腕１３ａと、第１保持腕１３ａから屈曲し、振動腕１１の延びる方向に延びる一対の第２保持腕１３ｂと、を有する保持部１３をさらに備えている。 The quartz crystal resonator element 1 includes a base 10, a pair of vibrating arms 11 that extend from the base 10 along each other, and a direction that intersects the base 10 with respect to the direction in which the vibrating arms 11 extend (here, substantially orthogonal directions). And a pair of cutout portions 12 cut out.
The quartz crystal resonator element 1 includes a pair of first holding arms 13a extending from the base 10 in a direction intersecting with the extending direction of the vibrating arms 11 (here, a direction substantially orthogonal to the first holding arms 13a) and the first holding arms 13a. The holding unit 13 further includes a pair of second holding arms 13b that are bent and extend in a direction in which the vibrating arm 11 extends.

振動腕１１は、基部１０側に位置する腕部１４と、腕部１４より先端側に位置し腕部１４より幅が広い錘部１５と、振動腕１１の延びる方向に沿って形成され、一対の振動腕１１の並ぶ方向に沿って切断した振動腕１１の断面形状が、略Ｈ字状となる溝部１６と、を有している。
保持部１３の第２保持腕１３ｂは、屈曲部１３ｃ側に位置する保持腕部１３ｄと、保持腕部１３ｄより先端側に位置し、保持腕部１３ｄより幅が広い外部接続部１３ｅと、を有している。 The vibrating arm 11 is formed along an extending direction of the vibrating arm 11, an arm portion 14 positioned on the base portion 10 side, a weight portion 15 positioned on the distal end side of the arm portion 14 and wider than the arm portion 14. The cross-sectional shape of the resonating arm 11 cut along the direction in which the resonating arms 11 are arranged has a groove portion 16 that is substantially H-shaped.
The second holding arm 13b of the holding portion 13 includes a holding arm portion 13d positioned on the bent portion 13c side, and an external connection portion 13e positioned on the distal end side of the holding arm portion 13d and wider than the holding arm portion 13d. Have.

水晶振動片１は、平面視において、基部１０と振動腕１１との結合部１７が、振動腕１１の腕部１４の幅が基部１０に近づくに連れて広がるように曲線で形成されていると共に、切り欠き部１２の先端部１２ａが、角張らないように、曲線（例えば、円弧状の曲線）で形成されている。
そして、水晶振動片１は、平面視において、振動腕１１の錘部１５と腕部１４との結合部１８が、腕部１４の幅が錘部１５に近づくに連れて広がるように、曲線（例えば、円弧状の曲線）で形成されている。
そして、水晶振動片１は、平面視において、保持部１３の第１保持腕１３ａと第２保持腕１３ｂとの屈曲部１３ｃの内側１３ｆが、角張らないように、曲線（例えば、円弧状の曲線）で形成されている。
さらに、水晶振動片１は、平面視において、第２保持腕１３ｂの外部接続部１３ｅと保持腕部１３ｄとの結合部１３ｇが、保持腕部１３ｄの幅が外部接続部１３ｅに近づくに連れて広がるように、曲線（例えば、円弧状の曲線）で形成されている。
なお、上記各曲線は、異なる曲率の複数の円弧や、スプライン曲線から構成されていてもよい。 The crystal resonator element 1 is formed in a curved line so that the connecting portion 17 between the base 10 and the vibrating arm 11 expands as the width of the arm portion 14 of the vibrating arm 11 approaches the base 10 in a plan view. The tip 12a of the notch 12 is formed with a curve (for example, an arcuate curve) so as not to be angular.
The crystal resonator element 1 has a curved line (in a plan view) so that the connecting portion 18 between the weight portion 15 and the arm portion 14 of the vibrating arm 11 expands as the width of the arm portion 14 approaches the weight portion 15 in plan view. For example, it is formed of an arcuate curve).
Then, the quartz crystal resonator element 1 has a curved line (for example, an arcuate shape) so that the inner side 13f of the bent portion 13c of the first holding arm 13a and the second holding arm 13b of the holding portion 13 is not angular in plan view. Curve).
Further, in the crystal resonator element 1, when the coupling portion 13 g between the external connection portion 13 e of the second holding arm 13 b and the holding arm portion 13 d is viewed in a plan view, the width of the holding arm portion 13 d approaches the external connection portion 13 e. It is formed with a curve (for example, an arcuate curve) so as to spread.
In addition, each said curve may be comprised from the several circular arc of a different curvature, or a spline curve.

図１（ａ）に示すように、水晶振動片１は、基部１０と、一対（２本）の振動腕１１とを含んで音叉を構成することで、音叉型振動片としての音叉型水晶振動片となっており、保持部１３の一対の外部接続部１３ｅが、パッケージなどの外部部材に、導電性接着剤などを用いて固定されるようになっている。
そして、水晶振動片１は、一対の振動腕１１に形成された図示しない励振電極に、保持部１３に形成された図示しないマウント電極、基部１０に形成された図示しない引き出し電極を経由して外部から駆動信号が印加されることにより、一対の振動腕１１が、所定の周波数（例えば、３２ｋＨｚ）で矢印Ｂ方向（一対の振動腕１１が互いに離れる方向）及び矢印Ｃ方向（一対の振動腕１１が互いに近づく方向）に交互に屈曲振動（共振）する。 As shown in FIG. 1A, the quartz crystal vibrating piece 1 includes a base 10 and a pair (two) of vibrating arms 11 to form a tuning fork, so that the tuning fork type crystal vibration as a tuning fork type vibrating piece. The pair of external connection portions 13e of the holding portion 13 is fixed to an external member such as a package using a conductive adhesive or the like.
The quartz crystal resonator element 1 is externally connected to an excitation electrode (not shown) formed on the pair of vibrating arms 11 via a mount electrode (not shown) formed on the holding portion 13 and an extraction electrode (not shown) formed on the base portion 10. Is applied to the pair of vibrating arms 11 at a predetermined frequency (for example, 32 kHz) in the arrow B direction (the direction in which the pair of vibrating arms 11 are separated from each other) and the arrow C direction (the pair of vibrating arms 11). Bend and vibrate (resonate) alternately.

この際、水晶振動片１は、振動腕１１に溝部１６が形成されていることで、屈曲振動によって発生する熱が、溝部１６によって拡散（熱伝導）し難くなるように構成されていることから、熱弾性損失（屈曲振動する振動片の圧縮部と伸張部との間で発生する熱伝導により生じる振動エネルギーの損失）を抑制できる。
また、水晶振動片１は、振動腕１１に錘部１５が形成されていることで、錘部１５の慣性質量の増加によるＱ値の向上効果により、例えば、Ｑ値を維持しながら振動腕を短くすることができる。
加えて、水晶振動片１は、基部１０に切り欠き部１２及び保持部１３を有することで、振動腕１１の屈曲振動に伴う基部１０の振動を吸収し、外部への振動漏れを低減することができる。 At this time, the quartz crystal resonator element 1 is configured so that the groove 16 is formed in the vibrating arm 11 so that the heat generated by the bending vibration is difficult to diffuse (heat conduction) by the groove 16. In addition, thermoelastic loss (loss of vibration energy caused by heat conduction generated between the compression part and the extension part of the vibration piece that flexes and vibrates) can be suppressed.
Further, since the crystal vibrating piece 1 has the weight portion 15 formed on the vibration arm 11, for example, the Q arm is improved by increasing the inertial mass of the weight portion 15. Can be shortened.
In addition, the quartz crystal resonator element 1 has the notch portion 12 and the holding portion 13 in the base portion 10 to absorb the vibration of the base portion 10 caused by the bending vibration of the vibrating arm 11 and reduce vibration leakage to the outside. Can do.

上述したように、第１の実施形態の水晶振動片１は、平面視において、基部１０と振動腕１１との結合部１７が、振動腕１１の腕部１４の幅が基部１０に近づくに連れて広がるように曲線で形成されていると共に、切り欠き部１２の先端部１２ａが、角張らないように曲線で形成されている。   As described above, the crystal resonator element 1 according to the first embodiment has the coupling portion 17 between the base portion 10 and the vibrating arm 11 in plan view as the width of the arm portion 14 of the vibrating arm 11 approaches the base portion 10. The tip 12a of the notch 12 is formed in a curve so as not to be angular.

これにより、水晶振動片１は、落下、衝突などによる衝撃が加わった時に、基部１０と振動腕１１との結合部１７及び切り欠き部１２の先端部１２ａに応力集中が発生し難い（応力集中が緩和される）ことから、応力集中による上記部分の破損を低減することが可能となる。
したがって、水晶振動片１は、耐衝撃特性を向上させることができる。 As a result, the crystal resonator element 1 is less likely to generate stress concentration at the joint portion 17 between the base portion 10 and the vibrating arm 11 and the distal end portion 12a of the notch portion 12 when an impact due to dropping or collision is applied (stress concentration). Therefore, it is possible to reduce breakage of the portion due to stress concentration.
Therefore, the quartz crystal vibrating piece 1 can improve the impact resistance characteristics.

また、水晶振動片１は、平面視において、振動腕１１の錘部１５と腕部１４との結合部１８が、腕部１４の幅が錘部１５に近づくに連れて広がるように曲線で形成されている。   Further, the quartz crystal resonator element 1 is formed in a curved line so that the connecting portion 18 between the weight portion 15 and the arm portion 14 of the vibrating arm 11 expands as the width of the arm portion 14 approaches the weight portion 15 in plan view. Has been.

これにより、水晶振動片１は、落下、衝突などによる衝撃が加わった時に、振動腕１１の錘部１５と腕部１４との結合部１８に応力集中が発生し難い（応力集中が緩和される）ことから、応力集中による上記部分の破損を低減することが可能となる。
したがって、水晶振動片１は、耐衝撃特性を向上させることができる。 As a result, the crystal resonator element 1 is less likely to generate stress concentration at the joint portion 18 between the weight portion 15 and the arm portion 14 of the vibrating arm 11 when an impact due to dropping, collision, or the like is applied (stress concentration is reduced). Therefore, it becomes possible to reduce the damage of the said part by stress concentration.
Therefore, the quartz crystal vibrating piece 1 can improve the impact resistance characteristics.

また、水晶振動片１は、平面視において、保持部１３の第１保持腕１３ａと第２保持腕１３ｂとの屈曲部１３ｃの内側１３ｆが、角張らないように曲線で形成されている。
さらに、水晶振動片１は、平面視において、第２保持腕１３ｂの外部接続部１３ｅと保持腕部１３ｄとの結合部１３ｇが、保持腕部１３ｄの幅が外部接続部１３ｅに近づくに連れて広がるように曲線で形成されている。 Further, the crystal vibrating piece 1 is formed in a curved line so that the inner side 13f of the bent portion 13c of the first holding arm 13a and the second holding arm 13b of the holding portion 13 is not angular in plan view.
Further, in the crystal resonator element 1, when the coupling portion 13 g between the external connection portion 13 e of the second holding arm 13 b and the holding arm portion 13 d is viewed in a plan view, the width of the holding arm portion 13 d approaches the external connection portion 13 e. It is formed with a curve to spread.

これにより、水晶振動片１は、落下、衝突などによる衝撃が加わった時に、保持部１３の屈曲部１３ｃの内側１３ｆ及び外部接続部１３ｅと保持腕部１３ｄとの結合部１３ｇに応力集中が発生し難い（応力集中が緩和される）ことから、応力集中による上記部分の破損を低減することが可能となる。
したがって、水晶振動片１は、耐衝撃特性を向上させることができる。 As a result, when the crystal vibrating reed 1 is subjected to an impact due to a drop, a collision or the like, stress concentration occurs at the inner side 13f of the bent portion 13c of the holding portion 13 and the joint portion 13g between the external connection portion 13e and the holding arm portion 13d. Since it is difficult (relaxation of stress concentration), it becomes possible to reduce the damage of the part due to stress concentration.
Therefore, the quartz crystal vibrating piece 1 can improve the impact resistance characteristics.

また、水晶振動片１は、基部１０と、一対（２本）の振動腕１１とを含んで音叉を構成することから、応力集中による破損を低減することが可能な音叉型振動片としての音叉型水晶振動片を提供できる。   Further, since the crystal vibrating piece 1 includes a base 10 and a pair (two) of vibrating arms 11 to form a tuning fork, the tuning fork as a tuning fork type vibrating piece that can reduce damage due to stress concentration. Type crystal vibrating piece can be provided.

（変形例）
ここで、第１の実施形態の変形例について説明する。
図２は、変形例の振動片の要部の概略構成を示す模式要部平面図である。図２（ａ）、図２（ｂ）は、変形例のバリエーションを示す。なお、第１の実施形態との共通部分については、同一符号を付して詳細な説明を省略し、第１の実施形態と異なる部分を中心に説明する。 (Modification)
Here, a modification of the first embodiment will be described.
FIG. 2 is a schematic plan view of a main part illustrating a schematic configuration of a main part of a resonator element according to a modification. Fig.2 (a) and FIG.2 (b) show the variation of a modification. In addition, about a common part with 1st Embodiment, the same code | symbol is attached | subjected, detailed description is abbreviate | omitted, and it demonstrates centering on a different part from 1st Embodiment.

図２（ａ）に示すように、変形例１の振動片としての水晶振動片２は、錘部１１５が、各腕部１４に対して各腕部１４の近傍の外部接続部１３ｅ側に偏って形成されている。
そして、水晶振動片２は、一対の振動腕１１において、互いに対向する側の腕部１４の側面と錘部１１５の側面とが、段差の無い一体化された平面状に形成されている。
これにより、結合部１８は、腕部１４と錘部１１５との外部接続部１３ｅ側のみに形成されることになる。 As shown in FIG. 2A, in the quartz crystal resonator element 2 as the resonator element of Modification 1, the weight portion 115 is biased toward the external connection portion 13e side in the vicinity of each arm portion 14 with respect to each arm portion 14. Is formed.
The quartz crystal resonator element 2 has a pair of vibrating arms 11 in which the side surfaces of the arm portions 14 facing each other and the side surfaces of the weight portion 115 are formed in an integrated flat shape without a step.
As a result, the coupling portion 18 is formed only on the external connection portion 13e side of the arm portion 14 and the weight portion 115.

これによれば、水晶振動片２は、錘部１１５が各腕部１４に対して近傍の外部接続部１３ｅ側に偏って形成され、一対の振動腕１１の間隔が広がることから、振動腕１１同士の振動時の干渉を容易に回避することができる。   According to this, in the crystal vibrating piece 2, the weight portion 115 is formed so as to be biased toward the external connection portion 13 e in the vicinity with respect to each arm portion 14, and the interval between the pair of vibrating arms 11 is widened. Interference during vibration between each other can be easily avoided.

図２（ｂ）に示すように、変形例２の振動片としての水晶振動片３は、保持部１３の外部接続部２１３ｅの幅が、第２保持腕１３ｂの保持腕部１３ｄの両側に広がって形成されている。
そして、水晶振動片３は、平面視において、外部接続部２１３ｅと保持腕部１３ｄとの結合部１３ｇが保持腕部１３ｄの両側に形成され、保持腕部１３ｄの幅が外部接続部２１３ｅに近づくに連れて広がるように曲線（例えば、円弧状の曲線）で形成されている。 As shown in FIG. 2B, in the quartz crystal resonator element 3 as the resonator element of the modified example 2, the width of the external connection portion 213e of the holding portion 13 spreads on both sides of the holding arm portion 13d of the second holding arm 13b. Is formed.
In the crystal resonator element 3, when viewed in plan, a coupling portion 13 g between the external connection portion 213 e and the holding arm portion 13 d is formed on both sides of the holding arm portion 13 d, and the width of the holding arm portion 13 d approaches the external connection portion 213 e. It is formed with a curved line (for example, an arcuate curved line) so as to spread along with.

これによれば、水晶振動片３は、第１の実施形態と比較して、外部接続部２１３ｅの幅が広がることから、パッケージなどの外部部材との導電性接着剤などを用いた電気的接続を、より確実に行うことができる。   According to this, since the width of the external connection portion 213e is wider than that of the first embodiment, the crystal resonator element 3 is electrically connected to an external member such as a package using a conductive adhesive or the like. Can be performed more reliably.

（第２の実施形態）
次に、第２の実施形態として、上記で説明した水晶振動片を備えた振動子について説明する。
図３は、第２の実施形態の振動子の概略構成を示す模式図であり、図３（ａ）は平面図、図３（ｂ）は、図３（ａ）のＤ−Ｄ線での断面図である。 (Second Embodiment)
Next, as a second embodiment, a vibrator provided with the crystal vibrating piece described above will be described.
FIG. 3 is a schematic diagram illustrating a schematic configuration of the vibrator according to the second embodiment. FIG. 3A is a plan view, and FIG. 3B is a cross-sectional view taken along line DD in FIG. It is sectional drawing.

図３に示すように、振動子としての水晶振動子５は、第１の実施形態の水晶振動片１と、水晶振動片１を収容するパッケージ８０と、を備えている。
パッケージ８０は、パッケージベース８１、シームリング８２、蓋体８５などから構成されている。
パッケージベース８１は、水晶振動片１を収容できるように凹部が形成され、その凹部に水晶振動片１の図示しないマウント電極と接続される接続パッド８８が設けられている。
接続パッド８８は、パッケージベース８１内の配線に接続され、パッケージベース８１の外周部に設けられた外部接続端子８３と導通可能に構成されている。 As shown in FIG. 3, a crystal resonator 5 as a resonator includes the crystal resonator element 1 of the first embodiment and a package 80 that houses the crystal resonator element 1.
The package 80 includes a package base 81, a seam ring 82, a lid 85, and the like.
The package base 81 is formed with a recess so as to accommodate the crystal vibrating piece 1, and a connection pad 88 connected to a mount electrode (not shown) of the crystal vibrating piece 1 is provided in the recess.
The connection pad 88 is connected to the wiring in the package base 81 and is configured to be electrically connected to the external connection terminal 83 provided on the outer periphery of the package base 81.

パッケージベース８１の凹部の周囲には、シームリング８２が設けられている。さらに、パッケージベース８１の底部には、貫通穴８６が設けられている。
水晶振動片１は、パッケージベース８１の接続パッド８８に導電性接着剤８４を介して接着固定されている。そして、パッケージ８０は、パッケージベース８１の凹部を覆う蓋体８５とシームリング８２とがシーム溶接されている。
パッケージベース８１の貫通穴８６には、金属材料などからなる封止材８７が充填されている。この封止材８７は、減圧雰囲気内で溶融後固化され、パッケージベース８１内が減圧状態を保持できるように、貫通穴８６を気密に封止している。
水晶振動子５は、外部接続端子８３を介した外部からの駆動信号により水晶振動片１が励振され、所定の周波数（例えば、３２ｋＨｚ）で発振（共振）する。 A seam ring 82 is provided around the recess of the package base 81. Further, a through hole 86 is provided at the bottom of the package base 81.
The quartz crystal resonator element 1 is bonded and fixed to the connection pad 88 of the package base 81 via a conductive adhesive 84. In the package 80, a lid body 85 and a seam ring 82 that cover the concave portion of the package base 81 are seam-welded.
A through hole 86 of the package base 81 is filled with a sealing material 87 made of a metal material or the like. The sealing material 87 is solidified after being melted in a reduced pressure atmosphere, and the through hole 86 is hermetically sealed so that the inside of the package base 81 can be kept in a reduced pressure state.
The crystal resonator 5 is oscillated (resonated) at a predetermined frequency (for example, 32 kHz) when the crystal resonator element 1 is excited by an external drive signal via the external connection terminal 83.

上述したように、水晶振動子５は、耐衝撃特性が向上した水晶振動片１を備えていることから、耐衝撃特性を向上させることができる。
なお、水晶振動子５は、水晶振動片１に代えて水晶振動片２，３のいずれかを用いても、同様の効果を奏することができる。 As described above, since the crystal unit 5 includes the crystal vibrating piece 1 with improved shock resistance, the shock resistance can be improved.
Note that the crystal resonator 5 can achieve the same effect even if any one of the crystal vibrating pieces 2 and 3 is used instead of the crystal vibrating piece 1.

（第３の実施形態）
次に、第３の実施形態として、上記で説明した水晶振動片を備えた発振器について説明する。
図４は、第３の実施形態の発振器の概略構成を示す模式図であり、図４（ａ）は平面図、図４（ｂ）は図４（ａ）のＥ−Ｅ線での断面図である。 (Third embodiment)
Next, as a third embodiment, an oscillator including the quartz crystal resonator element described above will be described.
4A and 4B are schematic diagrams showing a schematic configuration of the oscillator according to the third embodiment. FIG. 4A is a plan view, and FIG. 4B is a cross-sectional view taken along line EE in FIG. It is.

発振器としての水晶発振器６は、上記水晶振動子５の構成に回路素子をさらに備えた構成となっている。なお、水晶振動子５との共通部分については、同一符号を付して詳細な説明を省略する。
図４に示すように、水晶発振器６は、第１の実施形態の水晶振動片１と、水晶振動片１を発振させる発振回路を有する回路素子としてのＩＣチップ９１と、水晶振動片１及びＩＣチップ９１を収容するパッケージ８０と、を備えている。
ＩＣチップ９１は、パッケージベース８１の底部に固着され、Ａｕ、Ａｌなどの金属ワイヤー９２により他の配線と接続されている。
水晶発振器６は、ＩＣチップ９１の発振回路からの駆動信号により水晶振動片１が励振され、所定の周波数（例えば、３２ｋＨｚ）で発振（共振）する。 The crystal oscillator 6 as an oscillator has a configuration in which a circuit element is further provided in the configuration of the crystal resonator 5. In addition, about the common part with the crystal oscillator 5, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.
As shown in FIG. 4, the crystal oscillator 6 includes the crystal resonator element 1 according to the first embodiment, an IC chip 91 as a circuit element having an oscillation circuit that oscillates the crystal oscillator piece 1, the crystal oscillator piece 1, and the IC. And a package 80 for accommodating the chip 91.
The IC chip 91 is fixed to the bottom of the package base 81 and is connected to other wiring by a metal wire 92 such as Au or Al.
In the crystal oscillator 6, the crystal resonator element 1 is excited by a drive signal from the oscillation circuit of the IC chip 91, and oscillates (resonates) at a predetermined frequency (for example, 32 kHz).

上述したように、水晶発振器６は、耐衝撃特性が向上した水晶振動片１を備えていることから、耐衝撃特性を向上させることができる。
なお、水晶発振器６は、水晶振動片１に代えて水晶振動片２，３のいずれかを用いても、同様の効果を奏することができる。 As described above, since the crystal oscillator 6 includes the crystal vibrating piece 1 with improved shock resistance, the shock resistance can be improved.
The crystal oscillator 6 can achieve the same effect even if any one of the crystal vibrating pieces 2 and 3 is used instead of the crystal vibrating piece 1.

なお、上記各実施形態及び変形例において、水晶振動片１，２，３の保持部１３、錘部１５，１１５、溝部１６は、なくてもよい。
また、保持部１３は、第１保持腕１３ａ及び第２保持腕１３ｂが一対ではなく、一方だけでもよい。また、保持部１３は、第２保持腕１３ｂが逆方向に屈曲していてもよい。 In each of the above-described embodiments and modifications, the holding portion 13, the weight portions 15 and 115, and the groove portion 16 of the crystal vibrating pieces 1, 2 and 3 may be omitted.
In addition, the holding unit 13 may include only the first holding arm 13a and the second holding arm 13b instead of a pair. Moreover, as for the holding | maintenance part 13, the 2nd holding arm 13b may be bent in the reverse direction.

なお、上記各実施形態及び変形例では、振動片を水晶としたが、これに限定するものではなく、例えば、タンタル酸リチウム（ＬｉＴａＯ3）、四ホウ酸リチウム（Ｌｉ2Ｂ4Ｏ7）、ニオブ酸リチウム（ＬｉＮｂＯ3）、チタン酸ジルコン酸鉛（ＰＺＴ）、酸化亜鉛（ＺｎＯ）、窒化アルミニウム（ＡｌＮ）などの圧電体、または酸化亜鉛（ＺｎＯ）、窒化アルミニウム（ＡｌＮ）などの圧電体を被膜として備えたシリコンなどであってもよい。 In each of the above-described embodiments and modifications, the resonator element is made of quartz, but is not limited thereto. For example, lithium tantalate (LiTaO 3 ), lithium tetraborate (Li 2 B 4 O 7 ), Piezoelectric materials such as lithium niobate (LiNbO 3 ), lead zirconate titanate (PZT), zinc oxide (ZnO), and aluminum nitride (AlN), or piezoelectric materials such as zinc oxide (ZnO) and aluminum nitride (AlN) Silicon provided as a coating may be used.

１，２，３…振動片としての水晶振動片、５…振動子としての水晶振動子、６…発振器としての水晶発振器、１０…基部、１１…振動腕、１２…切り欠き部、１２ａ…先端部、１３…保持部、１３ａ…第１保持腕、１３ｂ…第２保持腕、１３ｃ…屈曲部、１３ｄ…保持腕部、１３ｅ…外部接続部、１３ｆ…屈曲部の内側、１３ｇ…結合部、１４…腕部、１５…錘部、１６…溝部、１７，１８…結合部、８０…パッケージ、８１…パッケージベース、８２…シームリング、８３…外部接続端子、８４…導電性接着剤、８５…蓋体、８６…貫通穴、８７…封止材、８８…接続パッド、９１…回路素子としてのＩＣチップ、９２…金属ワイヤー、１１５…錘部、２１３ｅ…外部接続部。   DESCRIPTION OF SYMBOLS 1, 2, 3 ... Crystal vibrating piece as a vibrating piece, 5 ... Crystal resonator as a vibrator, 6 ... Crystal oscillator as an oscillator, 10 ... Base, 11 ... Vibrating arm, 12 ... Notch part, 12a ... Tip Part, 13 ... holding part, 13a ... first holding arm, 13b ... second holding arm, 13c ... bent part, 13d ... holding arm part, 13e ... external connecting part, 13f ... inside of bent part, 13g ... coupling part, DESCRIPTION OF SYMBOLS 14 ... Arm part, 15 ... Weight part, 16 ... Groove part, 17, 18 ... Joint part, 80 ... Package, 81 ... Package base, 82 ... Seam ring, 83 ... External connection terminal, 84 ... Conductive adhesive, 85 ... Lid, 86 ... through hole, 87 ... sealing material, 88 ... connection pad, 91 ... IC chip as circuit element, 92 ... metal wire, 115 ... weight part, 213e ... external connection part.

Claims (7)

基部と、
前記基部から延びる少なくとも１本の振動腕と、
前記基部を、前記振動腕の延びる方向に対して交差する方向に切り欠いた切り欠き部と、を備え、
平面視において、前記基部と前記振動腕との結合部が、前記振動腕の幅が前記基部に近づくに連れて広がるように曲線で形成されていると共に、前記切り欠き部の先端部が曲線で形成されていることを特徴とする振動片。 The base,
At least one vibrating arm extending from the base;
A notch portion in which the base portion is notched in a direction intersecting with the extending direction of the vibrating arm,
In plan view, the coupling portion between the base portion and the vibrating arm is formed in a curve so that the width of the vibrating arm becomes wider as the base portion approaches the base portion, and the tip portion of the notch portion is curved. A vibrating piece characterized by being formed. 請求項１に記載の振動片において、前記振動腕は、前記基部側に位置する腕部と、前記腕部より先端側に位置し前記腕部より幅が広い錘部と、を有し、
平面視において、前記錘部と前記腕部との結合部が、前記腕部の幅が前記錘部に近づくに連れて広がるように曲線で形成されていることを特徴とする振動片。 The resonating piece according to claim 1, wherein the resonating arm includes an arm portion located on the base side, and a weight portion located on a distal end side from the arm portion and wider than the arm portion,
In the plan view, the resonator element is characterized in that a connecting portion between the weight portion and the arm portion is formed in a curve so that the width of the arm portion becomes wider as the arm portion approaches the weight portion. 請求項１または請求項２に記載の振動片において、前記基部から、前記振動腕の延びる方向に対して交差する方向に延びる第１保持腕と、前記第１保持腕から屈曲し、前記振動腕の延びる方向に延びる第２保持腕と、を有する保持部をさらに備え、
平面視において、前記保持部の前記第１保持腕と前記第２保持腕との屈曲部の内側が、曲線で形成されていることを特徴とする振動片。 3. The resonator element according to claim 1, wherein a first holding arm that extends from the base portion in a direction intersecting with a direction in which the vibrating arm extends, and the vibrating arm that is bent from the first holding arm, And a second holding arm extending in the extending direction of
A vibration piece, wherein an inner side of a bent portion of the first holding arm and the second holding arm of the holding portion is formed in a curved line in a plan view. 請求項３に記載の振動片において、前記第２保持腕は、前記屈曲部側に位置する保持腕部と、前記保持腕部より先端側に位置し前記保持腕部より幅が広い外部接続部と、を有し、
平面視において、前記外部接続部と前記保持腕部との結合部が、前記保持腕部の幅が前記外部接続部に近づくに連れて広がるように曲線で形成されていることを特徴とする振動片。 4. The resonator element according to claim 3, wherein the second holding arm includes a holding arm portion positioned on the bent portion side, and an external connection portion positioned on a distal end side of the holding arm portion and wider than the holding arm portion. And having
In a plan view, the coupling portion between the external connection portion and the holding arm portion is formed in a curved line so that the width of the holding arm portion becomes wider as it approaches the external connection portion. Piece. 請求項１ないし請求項４のいずれか一項に記載の振動片において、前記振動腕を複数本備え、前記複数本の振動腕と、前記基部とを含んで音叉を構成することを特徴とする振動片。   5. The resonator element according to claim 1, wherein a plurality of the vibrating arms are provided, and the tuning fork includes the plurality of vibrating arms and the base portion. Vibrating piece. 請求項１ないし請求項５のいずれか一項に記載の振動片と、
前記振動片を収容するパッケージと、を備えたことを特徴とする振動子。 A vibrating piece according to any one of claims 1 to 5,
And a package for housing the resonator element. 請求項１ないし請求項５のいずれか一項に記載の振動片と、
前記振動片を発振させる発振回路を有する回路素子と、
前記振動片及び前記回路素子を収容するパッケージと、を備えたことを特徴とする発振器。 A vibrating piece according to any one of claims 1 to 5,
A circuit element having an oscillation circuit for oscillating the resonator element;
An oscillator comprising: the resonator element and a package that accommodates the circuit element.
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