JP2011222954A - 多結晶シリコン層とその製造方法、該多結晶シリコン層を利用した薄膜トランジスタ及び該薄膜トランジスタを備えた有機発光表示装置 - Google Patents
多結晶シリコン層とその製造方法、該多結晶シリコン層を利用した薄膜トランジスタ及び該薄膜トランジスタを備えた有機発光表示装置 Download PDFInfo
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 107
- 239000010409 thin film Substances 0.000 title claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 title abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 81
- 229910052751 metal Inorganic materials 0.000 claims abstract description 81
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 58
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 51
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 51
- 239000010703 silicon Substances 0.000 claims abstract description 51
- 239000013078 crystal Substances 0.000 claims abstract description 50
- 239000012297 crystallization seed Substances 0.000 claims abstract description 39
- 239000003054 catalyst Substances 0.000 claims abstract description 35
- 238000002425 crystallisation Methods 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 239000010410 layer Substances 0.000 claims description 231
- 239000010408 film Substances 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 51
- 230000003197 catalytic effect Effects 0.000 claims description 25
- 239000011229 interlayer Substances 0.000 claims description 21
- 229910052759 nickel Inorganic materials 0.000 claims description 18
- 229910021332 silicide Inorganic materials 0.000 claims description 14
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 8
- 239000012044 organic layer Substances 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 229910052763 palladium Inorganic materials 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 7
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229910052787 antimony Inorganic materials 0.000 claims description 5
- 229910052793 cadmium Inorganic materials 0.000 claims description 5
- 229910052703 rhodium Inorganic materials 0.000 claims description 5
- 229910052707 ruthenium Inorganic materials 0.000 claims description 5
- 229910052718 tin Inorganic materials 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 28
- 230000008025 crystallization Effects 0.000 description 24
- 238000010586 diagram Methods 0.000 description 7
- 125000004429 atom Chemical group 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000000724 energy-dispersive X-ray spectrum Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000000089 atomic force micrograph Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
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- 238000007715 excimer laser crystallization Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000001350 scanning transmission electron microscopy Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000012876 topography Methods 0.000 description 3
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000002003 electron diffraction Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 150000002500 ions Chemical group 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910021334 nickel silicide Inorganic materials 0.000 description 2
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000002524 electron diffraction data Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005499 laser crystallization Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000879 optical micrograph Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】基板10上のバッファ層11上に非晶質シリコン層12を形成する工程と、非晶質シリコン層12上に触媒金属層を1011ないし1015原子/cm2の密度を有するように形成する工程と、触媒金属層の触媒金属が非晶質シリコン層12に拡散して非晶質シリコン層12とバッファ層11との界面でピラミッド形態の結晶化シードを形成し、結晶化シードによってシリコン結晶が成長して多結晶シリコン層22を形成するように、非晶質シリコン層12を熱処理する工程と、を含むシリコン層の結晶化方法である。
【選択図】図9C
Description
前記結晶化シードは、前記触媒金属のシリサイドを含む。
図2Aないし図2Eは、本発明の一実施形態によるシリコン層の結晶化方法を順次に示した断面図である。
11,102 バッファ層
12 非晶質シリコン層
14 触媒金属層
21 金属シリサイド結晶化シード
22 多結晶シリコン層
105 活性層
105a ソース/ドレイン領域
105b チャネル領域
114 ゲート絶縁膜
120 ゲート電極
122 第1層間絶縁膜
130 ソース/ドレイン電極
132 第2層間絶縁膜
134 画素定義膜
142 第1電極
144 有機層
146 第2電極
Claims (16)
- 基板上のバッファ層上に非晶質シリコン層を形成する工程と、
前記非晶質シリコン層上に触媒金属層を1011ないし1015原子/cm2の密度を有するように形成する工程と、
前記触媒金属層の触媒金属が前記非晶質シリコン層に拡散して前記非晶質シリコン層と前記バッファ層との界面でピラミッド形態の結晶化シードを形成し、前記結晶化シードによってシリコン結晶が成長して多結晶シリコン層を形成するように、前記非晶質シリコン層を熱処理する工程と、を含むシリコン層の結晶化方法。 - 前記シリコン結晶は、前記ピラミッド状の前記結晶化シードの方向と同じ方向に成長することを特徴とする請求項1に記載のシリコン層の結晶化方法。
- 前記シリコン結晶は、まず(111)方向から成長することを特徴とする請求項1に記載のシリコン層の結晶化方法。
- 前記多結晶シリコン層の形成後、前記触媒金属の成分が前記多結晶シリコン層と前記バッファ層との界面に存在することを特徴とする請求項1に記載のシリコン層の結晶化方法。
- 前記結晶化シードは、前記触媒金属のシリサイドを含むことを特徴とする請求項1に記載のシリコン層の結晶化方法。
- 前記触媒金属層は、Ni、Pd、Ti、Ag、Au、Al、Sn、Sb、Cu、Co、Mo、Tr、Ru、Rh、Cd及びPtからなるグループから選択された少なくともいずれか一つを含むことを特徴とする請求項1に記載のシリコン層の結晶化方法。
- 前記非晶質シリコン層は、PECVDまたはLPCVDによって形成することを特徴とする請求項1に記載のシリコン層の結晶化方法。
- 前記触媒金属層は、PVD、CVD、ドーピング方法によって形成することを特徴とする請求項1に記載のシリコン層の結晶化方法。
- 前記触媒金属層は、ALDによって形成することを特徴とする請求項8に記載のシリコン層の結晶化方法。
- 基板と、
前記基板上のバッファ層と、
前記バッファ層上のソース領域、ドレイン領域及びチャネル領域を含んで多結晶シリコン層からなる活性層と、
前記活性層上のゲート絶縁膜と、
前記ゲート絶縁膜上の前記チャネル領域に対向するゲート電極と、
前記ゲート電極、前記活性層及び前記バッファ層上の第1層間絶縁膜を貫通して、それぞれ前記ソース領域及びドレイン領域と接触するソース電極及びドレイン電極と、を備え、
前記多結晶シリコン層は、前記バッファ層と前記多結晶シリコン層との界面にピラミッド状の結晶化シードを含む薄膜トランジスタ。 - 前記多結晶シリコン層の結晶のサイズは、数μmないし数百μmの範囲を有することを特徴とする請求項10に記載の薄膜トランジスタ。
- 前記多結晶シリコン層の前記結晶の方向は、(111)方向を含むことを特徴とする請求項10に記載の薄膜トランジスタ。
- 前記結晶化シードは、Ni、Pd、Ti、Ag、Au、Al、Sn、Sb、Cu、Co、Mo、Tr、Ru、Rh、Cd及びPtからなるグループから選択された少なくともいずれか一つを含むことを特徴とする請求項10に記載の薄膜トランジスタ。
- 基板と、
前記基板上のバッファ層と、
前記バッファ層上のソース領域、ドレイン領域及びチャネル領域を含んで多結晶シリコン層からなる活性層と、
前記活性層上のゲート絶縁膜と、
前記ゲート絶縁膜上の前記チャネル領域に対向するゲート電極と、
前記ゲート電極、前記活性層及び前記バッファ層上の第1層間絶縁膜を貫通して、それぞれ前記ソース領域及び前記ドレイン領域と接触するソース電極及びドレイン電極と、
前記ソース電極、ドレイン電極及び前記第1層間絶縁膜上に形成された第2層間絶縁膜を貫通して、前記ソース電極及び前記ドレイン電極のうちいずれか一つと接触して前記第2層間絶縁膜上に延びた第1電極と、
前記第1電極上の発光層を備える有機層と、
前記有機層上の第2電極と、を備え、
前記多結晶シリコン層は、前記バッファ層と前記多結晶シリコン層との界面にピラミッド状の結晶化シードを含む有機発光表示装置。 - 前記多結晶シリコン層の結晶のサイズは、数μmないし数百μmの範囲を有することを特徴とする請求項14に記載の有機発光表示装置。
- 前記多結晶シリコン層の前記結晶の方向は、(111)方向を含むことを特徴とする請求項14に記載の有機発光表示装置。
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KR1020100034388A KR101050467B1 (ko) | 2010-04-14 | 2010-04-14 | 다결정 실리콘층, 그 제조방법, 상기 다결정 실리층을 이용한 박막 트랜지스터 및 상기 박막 트랜지스터를 구비한 유기발광표시장치 |
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US (1) | US8623746B2 (ja) |
JP (1) | JP2011222954A (ja) |
KR (1) | KR101050467B1 (ja) |
CN (1) | CN102222608A (ja) |
TW (1) | TWI527087B (ja) |
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KR20120131753A (ko) * | 2011-05-26 | 2012-12-05 | 삼성디스플레이 주식회사 | 박막 트랜지스터, 박막 트랜지스터의 제조 방법 및 유기 발광 표시 장치 |
KR101944919B1 (ko) | 2012-05-08 | 2019-02-08 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조방법 |
US9991463B2 (en) * | 2012-06-14 | 2018-06-05 | Universal Display Corporation | Electronic devices with improved shelf lives |
FR2992980B1 (fr) * | 2012-07-03 | 2018-04-13 | Saint-Gobain Recherche | Substrat comprenant une couche de silicium et/ou de germanium et un ou plusieurs nanofils d'orientation perpendiculaire a la surface du substrat |
KR20140039863A (ko) * | 2012-09-25 | 2014-04-02 | 삼성디스플레이 주식회사 | 다결정 규소막 형성 방법, 다결정 규소막을 포함하는 박막 트랜지스터 및 표시 장치 |
KR20230140658A (ko) * | 2022-03-29 | 2023-10-10 | 삼성디스플레이 주식회사 | 표시 장치, 이의 제조 방법 및 이를 포함하는 타일형 표시 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0822954A (ja) * | 1994-07-06 | 1996-01-23 | Sharp Corp | 結晶性ケイ素膜、並びに半導体装置およびその製造方法 |
JP2001223166A (ja) * | 1999-11-30 | 2001-08-17 | Semiconductor Energy Lab Co Ltd | 半導体薄膜の作製方法及び半導体装置の作製方法 |
JP2005197526A (ja) * | 2004-01-08 | 2005-07-21 | Sharp Corp | 半導体装置とその製造方法 |
JP2007073953A (ja) * | 2005-09-06 | 2007-03-22 | Tera Semicon Corp | 多結晶シリコン薄膜製造方法及びその製造装置 |
JP2009260239A (ja) * | 2008-04-11 | 2009-11-05 | Samsung Mobile Display Co Ltd | 薄膜トランジスタ、その製造方法、並びに、それを含む有機電界発光表示装置 |
WO2009144915A1 (ja) * | 2008-05-29 | 2009-12-03 | シャープ株式会社 | 半導体装置およびその製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101031759B1 (ko) | 2003-10-23 | 2011-04-29 | 엘지디스플레이 주식회사 | 미세 실리콘 결정화 방법과 이를 포함하는 박막트랜지스터 제조방법 |
KR100579179B1 (ko) * | 2004-06-09 | 2006-05-11 | 삼성에스디아이 주식회사 | 박막트랜지스터 및 그 제조 방법 |
TW200605229A (en) | 2004-07-28 | 2006-02-01 | Adv Lcd Tech Dev Ct Co Ltd | Method of manufacturing semiconductor device |
US7683373B2 (en) | 2004-10-05 | 2010-03-23 | Samsung Mobile Display Co., Ltd. | Thin film transistor and method of fabricating the same |
CN100433260C (zh) * | 2006-01-16 | 2008-11-12 | 中华映管股份有限公司 | 多晶硅层以及薄膜晶体管的制造方法 |
US20080095975A1 (en) | 2006-10-23 | 2008-04-24 | Jin Jang | Polycrystalline silicon thin film and method for forming the same |
KR100859761B1 (ko) * | 2006-10-23 | 2008-09-24 | 실리콘 디스플레이 (주) | 다결정 실리콘 박막 및 그 제조방법 |
KR100864883B1 (ko) * | 2006-12-28 | 2008-10-22 | 삼성에스디아이 주식회사 | 박막트랜지스터, 그의 제조방법 및 이를 구비한유기전계발광표시장치. |
CN100999388B (zh) * | 2006-12-30 | 2011-02-09 | 南开大学 | 表面修饰溶液诱导晶化多晶硅薄膜的制备方法 |
KR100889627B1 (ko) * | 2007-08-23 | 2009-03-20 | 삼성모바일디스플레이주식회사 | 박막트랜지스터, 그의 제조방법, 및 이를 구비한유기전계발광표시장치 |
KR101007244B1 (ko) | 2008-04-10 | 2011-01-13 | 주식회사 비아트론 | 박막 트랜지스터 제조방법 |
US8283667B2 (en) * | 2008-09-05 | 2012-10-09 | Semiconductor Energy Laboratory Co., Ltd. | Thin film transistor |
-
2010
- 2010-04-14 KR KR1020100034388A patent/KR101050467B1/ko not_active IP Right Cessation
- 2010-12-06 JP JP2010271533A patent/JP2011222954A/ja active Pending
-
2011
- 2011-01-24 US US13/012,619 patent/US8623746B2/en not_active Expired - Fee Related
- 2011-04-06 CN CN2011100873894A patent/CN102222608A/zh active Pending
- 2011-04-11 TW TW100112451A patent/TWI527087B/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0822954A (ja) * | 1994-07-06 | 1996-01-23 | Sharp Corp | 結晶性ケイ素膜、並びに半導体装置およびその製造方法 |
JP2001223166A (ja) * | 1999-11-30 | 2001-08-17 | Semiconductor Energy Lab Co Ltd | 半導体薄膜の作製方法及び半導体装置の作製方法 |
JP2005197526A (ja) * | 2004-01-08 | 2005-07-21 | Sharp Corp | 半導体装置とその製造方法 |
JP2007073953A (ja) * | 2005-09-06 | 2007-03-22 | Tera Semicon Corp | 多結晶シリコン薄膜製造方法及びその製造装置 |
JP2009260239A (ja) * | 2008-04-11 | 2009-11-05 | Samsung Mobile Display Co Ltd | 薄膜トランジスタ、その製造方法、並びに、それを含む有機電界発光表示装置 |
WO2009144915A1 (ja) * | 2008-05-29 | 2009-12-03 | シャープ株式会社 | 半導体装置およびその製造方法 |
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TW201214520A (en) | 2012-04-01 |
TWI527087B (zh) | 2016-03-21 |
US20110253987A1 (en) | 2011-10-20 |
US8623746B2 (en) | 2014-01-07 |
CN102222608A (zh) | 2011-10-19 |
KR101050467B1 (ko) | 2011-07-20 |
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