JP2011197008A - 光ファイバ水素純度センサ及びシステム - Google Patents
光ファイバ水素純度センサ及びシステム Download PDFInfo
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- 239000000835 fiber Substances 0.000 title claims abstract description 112
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 84
- 239000001257 hydrogen Substances 0.000 title claims abstract description 84
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 84
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- 238000010521 absorption reaction Methods 0.000 claims description 20
- 238000005253 cladding Methods 0.000 claims description 20
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 16
- 230000035945 sensitivity Effects 0.000 claims description 14
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 230000000737 periodic effect Effects 0.000 claims description 8
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- 239000010949 copper Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000002086 nanomaterial Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 229910052709 silver Inorganic materials 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910001252 Pd alloy Inorganic materials 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 52
- 239000010410 layer Substances 0.000 description 35
- 238000001514 detection method Methods 0.000 description 25
- 239000011540 sensing material Substances 0.000 description 21
- 230000005540 biological transmission Effects 0.000 description 16
- 229910003445 palladium oxide Inorganic materials 0.000 description 15
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 description 15
- 230000004044 response Effects 0.000 description 15
- 239000000523 sample Substances 0.000 description 13
- 239000010408 film Substances 0.000 description 11
- 239000013307 optical fiber Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 150000004678 hydrides Chemical class 0.000 description 8
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 150000002431 hydrogen Chemical class 0.000 description 4
- 238000004088 simulation Methods 0.000 description 4
- 238000000357 thermal conductivity detection Methods 0.000 description 4
- 230000003993 interaction Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
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- 239000012528 membrane Substances 0.000 description 3
- 229910000510 noble metal Inorganic materials 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
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- 230000008859 change Effects 0.000 description 2
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- 239000000446 fuel Substances 0.000 description 2
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 2
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- 238000005070 sampling Methods 0.000 description 2
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- 102100024513 F-box only protein 6 Human genes 0.000 description 1
- 101001052796 Homo sapiens F-box only protein 6 Proteins 0.000 description 1
- 229910021078 Pd—O Inorganic materials 0.000 description 1
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- 230000015556 catabolic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
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- 238000006731 degradation reaction Methods 0.000 description 1
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- 238000004868 gas analysis Methods 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
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- 239000003595 mist Substances 0.000 description 1
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- 239000011148 porous material Substances 0.000 description 1
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- 230000001902 propagating effect Effects 0.000 description 1
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- 239000000377 silicon dioxide Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
- G01N21/774—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides the reagent being on a grating or periodic structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/005—H2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N2021/7769—Measurement method of reaction-produced change in sensor
- G01N2021/7773—Reflection
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- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Combustion & Propulsion (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Abstract
【解決手段】水素純度検知システム50は光ファイバケーブル56を通して光学信号を提供する光源52を含む。本システムには、光学信号を受け取るために高屈折率及び低屈折率の材料からなる多層ナノ構造薄膜を備えた水素純度センサ60が設けられている。本システムはさらに、水素純度センサからの反射光学信号を受け取るための光検出器62と、反射光学信号を解析するために該光検出器に結合させた処理回路68と、を含む。
【選択図】図1
Description
Δλ(t)=λ1(t)−λ2(t)∝温度変動 (3)
式(2)及び(3)は、気体流量が一定に保たれている場合に、Δλ(t)は局所温度変動を反映することになることを示している。
Δλ2(t)=λ2(t1)−λ2(t2)∝H2ガス濃度 (5)
正確なH2純度検出を提供するように任意の時点で流量と水素濃度の両者が同時監視される。
52 光源
54 光カプラ
56 光ファイバケーブル
60 ファイバ気体水素純度センサ
62 光検出器
64 光ファイバケーブル
66 光ファイバケーブル
68 コンピュータ
70 ワイヤレスインタフェース
80 強度ベースのファイバ気体水素純度センサ
82 複合型ファイバ束
84 ナノ構造多層検知チップ
86 検知プローブ先端ハウス
88 フィルタ
90 光信号
92 反射信号
94 ファイバ束先端
95 強度ベースのファイバ気体水素純度センサ
96 穴
97 穴
100 多重化スキーム
101 レーザ源
102 第1の光分割器
103 光カプラ
104 光検出器アレイ
105 処理回路
106 水素センサハウジング
107 ファイバ検知プローブ
108 第2の光分割器
110 反射信号の振幅変動を距離Dに対して示したプロット
120 水素純度多層検知チップ
121 検知チップの2次元像
122 多層検知薄膜
123 検知チップの3次元像
124 高屈折率材料
126 低屈折率材料
128 石英ガラスプレート
140 高屈折率及び低屈折率の多層検知薄膜
142 屈折率プロット
160 反射及び透過光学特性のシミュレーションのプロット
162 水平軸
164 垂直軸
166 反射曲線
168 反射曲線
170 反射曲線
172 透過曲線
174 透過曲線
176 透過曲線
180 光学吸収特性のシミュレーションのプロット
182 水平軸
184 垂直軸
186 吸収曲線
188 吸収曲線
190 吸収曲線
200 ファイバ気体水素純度センサ
202 ファイバコア
204 軸
206 長周期ファイバグレーティング(LPG)構造
208 ファイバクラッド
210 ナノ構造多層検知層
220 ファイバグレーティングアレイベースのファイバ気体水素純度センサパッケージ
222 気体流入口
224 気体流出口
226 流入口バルブ
228 圧力制御弁
230 石英管
232 検知ファイバ
234 ファイバセンサ
236 ファイバセンサ
238 ファイバセンサ
250 ファイバ気体純度センサ応答
252 ファイバ気体純度センサ応答
260 感度応答
262 感度応答
Claims (10)
- 水素純度を計測するためのシステム(50)であって、
光ファイバケーブル(56)を通して光学信号を提供するための光源(52)と、
高屈折率材料(124)と低屈折率材料(126)からなる多層ナノ構造薄膜(122)を備えている光学信号を受け取るための水素純度センサ(60)と、
水素純度センサからの反射光学信号を受け取るための光検出器(62)と、
反射光学信号を解析するために光検出器(62)に結合させた処理回路(68)と、
を備えるシステム(50)。 - 前記高屈折率材料は水素化可能材料を含みかつ前記低屈折率材料は水素化不可能材料を含む、請求項1に記載の水素純度センサ。
- 前記水素化可能材料はパラジウムまたはパラジウム合金を含む、請求項2に記載のシステム。
- 前記水素化不可能材料は金、銀、ニッケル、銅あるいはこれらの組み合わせを含む、請求項2に記載のシステム。
- 前記多層ナノ構造薄膜の厚さは10〜100ナノメートルの範囲にあり、かつ該多層ナノ構造薄膜は500〜800nmレンジの光源波長において反射及び吸収に関する最大感度を有する、請求項1に記載のシステム。
- ファイバコア(202)と、
ファイバコア(202)の周りに位置決めされた屈折率周期変調性のグレーティング構造(206)と、
屈折率周期変調性のグレーティング構造(206)を囲繞して位置決めされたファイバクラッド(208)と、
ファイバクラッド(208)の周りに位置決めされた、高屈折率と低屈折率の複数の材料層からなる変調構造を備えた多層検知薄膜(210)と、
を備える水素純度センサ(200)。 - 前記高屈折率材料は水素化可能材料を含みかつ前記低屈折率材料は水素化不可能材料を含む、請求項6に記載の水素純度センサ。
- 前記多層検知薄膜はナノ多孔性構造とナノ粒子構造のうちの少なくとも一方を備える、請求項6に記載のシステム。
- 前記多層検知薄膜は柱状の表面形態を備える、請求項6に記載のシステム。
- 水素化可能材料及び水素化不可能材料からなる多層ナノ構造薄膜(234)と、熱鈍感性の石英材料ベースのチェンバー内に据え付けられた少なくとも2つのファイバBraggグレーティング(236、238)と、を備える水素純度センサパッケージ(220)。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/725,664 | 2010-03-17 | ||
US12/725,664 US8547553B2 (en) | 2010-03-17 | 2010-03-17 | Fiber optic hydrogen purity sensor and system |
Publications (2)
Publication Number | Publication Date |
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JP2011197008A true JP2011197008A (ja) | 2011-10-06 |
JP2011197008A5 JP2011197008A5 (ja) | 2014-04-24 |
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JP2011082253A Pending JP2011197008A (ja) | 2010-03-17 | 2011-03-16 | 光ファイバ水素純度センサ及びシステム |
Country Status (5)
Country | Link |
---|---|
US (1) | US8547553B2 (ja) |
JP (1) | JP2011197008A (ja) |
KR (1) | KR20110104916A (ja) |
DE (1) | DE102011001190A1 (ja) |
GB (1) | GB2478829B (ja) |
Cited By (1)
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US8467977B2 (en) * | 2010-07-29 | 2013-06-18 | General Electric Company | Fiber optic carbon dioxide purity sensor package and system |
US8768112B2 (en) | 2010-10-22 | 2014-07-01 | General Electric Company | System having fiber optic purity sensor |
US8542955B2 (en) * | 2010-10-28 | 2013-09-24 | General Electric Company | Gas detection system incorporating fiber gas sensors having fiber bragg gratings |
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GB2497787B (en) * | 2011-12-21 | 2019-06-26 | Intelligent Energy Ltd | Hydrogen quality monitor |
FR2985315B1 (fr) * | 2011-12-30 | 2014-03-14 | Andra | Dispositif de detection et/ou de dosage d'hydrogene et procede de detection et/ou de dosage d'hydrogene |
KR101321557B1 (ko) * | 2012-03-05 | 2013-10-23 | 부경대학교 산학협력단 | 광섬유 수소 센서 및 이를 이용한 수소 농도 측정 방법 |
WO2014116840A1 (en) * | 2013-01-23 | 2014-07-31 | California Institute Of Technology | Miniature tunable laser spectrometer for detection of a trace gas |
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Citations (8)
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Also Published As
Publication number | Publication date |
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US8547553B2 (en) | 2013-10-01 |
GB201103985D0 (en) | 2011-04-20 |
GB2478829B (en) | 2014-04-30 |
DE102011001190A1 (de) | 2011-12-15 |
US20110228275A1 (en) | 2011-09-22 |
KR20110104916A (ko) | 2011-09-23 |
GB2478829A (en) | 2011-09-21 |
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