JP2011090381A - フローコントローラ - Google Patents
フローコントローラ Download PDFInfo
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- JP2011090381A JP2011090381A JP2009241343A JP2009241343A JP2011090381A JP 2011090381 A JP2011090381 A JP 2011090381A JP 2009241343 A JP2009241343 A JP 2009241343A JP 2009241343 A JP2009241343 A JP 2009241343A JP 2011090381 A JP2011090381 A JP 2011090381A
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- 238000001514 detection method Methods 0.000 claims abstract description 84
- 239000012530 fluid Substances 0.000 claims abstract description 80
- 238000003825 pressing Methods 0.000 claims description 15
- 238000011144 upstream manufacturing Methods 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 abstract description 3
- 238000004891 communication Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F5/00—Measuring a proportion of the volume flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/005—Control of flow characterised by the use of auxiliary non-electric power combined with the use of electric means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/03—Control of flow with auxiliary non-electric power
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7762—Fluid pressure type
- Y10T137/7764—Choked or throttled pressure type
- Y10T137/7768—Pilot controls supply to pressure chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7762—Fluid pressure type
- Y10T137/7769—Single acting fluid servo
- Y10T137/777—Spring biased
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87169—Supply and exhaust
- Y10T137/87193—Pilot-actuated
- Y10T137/87209—Electric
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Automation & Control Theory (AREA)
- Power Engineering (AREA)
- Flow Control (AREA)
- Measuring Volume Flow (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Abstract
【解決手段】フローコントローラ10は、流体の流量を検出する検出部12を備えた流量検出ユニット14と、該流量検出ユニット14に連結された流量制御ユニット18を含み、検出センサ38は、MEMS技術を用いた熱式のフローセンサからなり、検出センサ38で検出された流体の流量が制御部24へと出力される。また、流量制御ユニット18では、供給室84への空気の供給状態が、供給用電磁弁92及び排出用電磁弁94によって切り換えられ、空気の供給状態に基づいて制御弁58が開閉動作する。そして、流量検出ユニット14で検出された流体の流量に基づいて制御部24から供給用電磁弁92及び排出用電磁弁94へと制御信号を出力することにより、制御弁58を開閉動作させ流体の流量が予め設定された流量となるようにフィードバック制御する。
【選択図】図1
Description
前記ボディに設けられ、前記第1通路から第2通路へと流通する前記流体の流量を検出可能な検出部を有する流量検出部と、
前記流量検出部と並設され、パイロットエアの供給作用下に変位するダイヤフラム部と、該ダイヤフラム部にステムを介して連結された弁体と、前記弁体を前記ボディに形成された弁座部に着座させる方向に付勢するスプリングとを有し、前記弁体の流体の流量を制御する流量制御部と、
を備え、
前記検出部は、MEMSセンサであると共に、前記流量制御部には、前記弁体に対して前記ダイヤフラム部側から付与される押圧力と、前記弁体に対して前記スプリング側から付与される押圧力とが均衡するバランス構造を備えることを特徴とする。
14…流量検出ユニット 18…流量制御ユニット
24…制御部 26…表示部
32…絞り部 36…検出用通路
38…検出センサ 58…制御弁
60…切換部 64…弁体
66…弁座部 72…ダイヤフラム部
74…ステム 78…スプリング
80…ダイヤフラム 84…供給室
86…供給通路 92…供給用電磁弁
94…排出用電磁弁
Claims (5)
- 流体が流通する上流側に設けられる第1通路と、前記第1通路に対して下流側に設けられる第2通路と、該第1通路と第2通路との間に設けられた絞りとを有するボディと、
前記ボディに設けられ、前記第1通路から第2通路へと流通する前記流体の流量を検出可能な検出部を有する流量検出部と、
前記流量検出部と並設され、パイロットエアの供給作用下に変位するダイヤフラム部と、該ダイヤフラム部にステムを介して連結された弁体と、前記弁体を前記ボディに形成された弁座部に着座させる方向に付勢するスプリングとを有し、前記弁体の流体の流量を制御する流量制御部と、
を備え、
前記検出部は、MEMSセンサであると共に、前記流量制御部には、前記弁体に対して前記ダイヤフラム部側から付与される押圧力と、前記弁体に対して前記スプリング側から付与される押圧力とが均衡するバランス構造を備えることを特徴とするフローコントローラ。 - 請求項1記載のフローコントローラにおいて、
前記流量制御部には、前記パイロットエアの供給状態を切り換える切換弁を備え、前記切換弁は、制御部から出力される制御信号によって駆動し、前記制御信号は、PWM信号又はPFM信号であることを特徴とするフローコントローラ。 - 請求項2記載のフローコントローラにおいて、
前記切換弁は、前記パイロットエアを供給して前記ダイヤフラム部を駆動させる供給用弁と、前記パイロットエアを排出して前記ダイヤフラム部を復帰させる排出用弁とからなり、前記供給用弁及び排出用弁は、前記制御信号によって駆動する2方弁であることを特徴とするフローコントローラ。 - 請求項1〜3のいずれか1項に記載のフローコントローラにおいて、
前記スプリングの弾発力が、前記弁体に対して前記流体の流通方向と同一方向に付勢されることを特徴とするフローコントローラ。 - 請求項1〜4のいずれか1項に記載のフローコントローラにおいて、
前記パイロットエアは、前記流量検出部の上流側から前記ダイヤフラム部に対して供給されることを特徴とするフローコントローラ。
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009241343A JP5250875B2 (ja) | 2009-10-20 | 2009-10-20 | フローコントローラ |
US13/502,757 US8800593B2 (en) | 2009-10-20 | 2010-09-16 | Flow controller |
PCT/JP2010/066034 WO2011048896A1 (ja) | 2009-10-20 | 2010-09-16 | フローコントローラ |
CN201080047325.5A CN102576230B (zh) | 2009-10-20 | 2010-09-16 | 流控制器 |
RU2012119820/28A RU2515208C2 (ru) | 2009-10-20 | 2010-09-16 | Регулятор потока |
KR1020127010022A KR101416285B1 (ko) | 2009-10-20 | 2010-09-16 | 유량 제어기 |
DE112010004226.8T DE112010004226B4 (de) | 2009-10-20 | 2010-09-16 | Durchflusssteuerung |
BR112012009504-8A BR112012009504B1 (pt) | 2009-10-20 | 2010-09-16 | Controlador de Fluxo |
TW99133247A TWI432931B (zh) | 2009-10-20 | 2010-09-30 | 流量控制器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009241343A JP5250875B2 (ja) | 2009-10-20 | 2009-10-20 | フローコントローラ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011090381A true JP2011090381A (ja) | 2011-05-06 |
JP2011090381A5 JP2011090381A5 (ja) | 2011-07-21 |
JP5250875B2 JP5250875B2 (ja) | 2013-07-31 |
Family
ID=43900136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009241343A Active JP5250875B2 (ja) | 2009-10-20 | 2009-10-20 | フローコントローラ |
Country Status (9)
Country | Link |
---|---|
US (1) | US8800593B2 (ja) |
JP (1) | JP5250875B2 (ja) |
KR (1) | KR101416285B1 (ja) |
CN (1) | CN102576230B (ja) |
BR (1) | BR112012009504B1 (ja) |
DE (1) | DE112010004226B4 (ja) |
RU (1) | RU2515208C2 (ja) |
TW (1) | TWI432931B (ja) |
WO (1) | WO2011048896A1 (ja) |
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2009
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- 2010-09-16 US US13/502,757 patent/US8800593B2/en active Active
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- 2010-09-16 WO PCT/JP2010/066034 patent/WO2011048896A1/ja active Application Filing
- 2010-09-16 KR KR1020127010022A patent/KR101416285B1/ko active IP Right Grant
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JPS61173319A (ja) * | 1985-01-26 | 1986-08-05 | Shoketsu Kinzoku Kogyo Co Ltd | 流体用レギユレ−タ |
JPS6320605A (ja) * | 1986-07-15 | 1988-01-28 | Kuroda Precision Ind Ltd | 空気圧レギユレ−タ |
JPS63316110A (ja) * | 1987-06-19 | 1988-12-23 | Hitachi Metals Ltd | デジタルバルブを用いたパイロット式ガスガバナ− |
JPH08185229A (ja) * | 1994-12-27 | 1996-07-16 | Ckd Corp | マスフローコントローラ |
JPH09101827A (ja) * | 1995-10-03 | 1997-04-15 | Smc Corp | 空気圧レギュレータ |
JP2002181594A (ja) * | 2000-12-11 | 2002-06-26 | Yamatake Corp | 流量制御ユニット |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103809621A (zh) * | 2012-11-13 | 2014-05-21 | 深圳迈瑞生物医疗电子股份有限公司 | 以机械式控制作为备用的电控式流量控制*** |
CN103809621B (zh) * | 2012-11-13 | 2018-04-06 | 深圳迈瑞生物医疗电子股份有限公司 | 以机械式控制作为备用的电控式流量控制*** |
Also Published As
Publication number | Publication date |
---|---|
RU2515208C2 (ru) | 2014-05-10 |
CN102576230A (zh) | 2012-07-11 |
KR101416285B1 (ko) | 2014-07-08 |
RU2012119820A (ru) | 2013-11-27 |
TW201133171A (en) | 2011-10-01 |
TWI432931B (zh) | 2014-04-01 |
WO2011048896A1 (ja) | 2011-04-28 |
US20120204974A1 (en) | 2012-08-16 |
CN102576230B (zh) | 2015-05-13 |
US8800593B2 (en) | 2014-08-12 |
DE112010004226B4 (de) | 2017-06-01 |
KR20120085263A (ko) | 2012-07-31 |
JP5250875B2 (ja) | 2013-07-31 |
BR112012009504B1 (pt) | 2019-10-15 |
DE112010004226T5 (de) | 2013-01-03 |
BR112012009504A2 (pt) | 2016-05-17 |
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