JP2011086910A - 半導体発光素子 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 222
- 230000004888 barrier function Effects 0.000 claims abstract description 65
- 239000010949 copper Substances 0.000 claims abstract description 29
- 229910052802 copper Inorganic materials 0.000 claims abstract description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000010410 layer Substances 0.000 claims description 532
- 229910052751 metal Inorganic materials 0.000 claims description 29
- 239000002184 metal Substances 0.000 claims description 29
- 239000000463 material Substances 0.000 claims description 25
- 229910052759 nickel Inorganic materials 0.000 claims description 22
- 229910052719 titanium Inorganic materials 0.000 claims description 15
- 229910000990 Ni alloy Inorganic materials 0.000 claims description 12
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 12
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 10
- 238000000465 moulding Methods 0.000 claims description 10
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 9
- 229910052709 silver Inorganic materials 0.000 claims description 9
- 239000002356 single layer Substances 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 6
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 4
- 229910000599 Cr alloy Inorganic materials 0.000 claims description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 30
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 26
- 239000000758 substrate Substances 0.000 description 22
- 230000000903 blocking effect Effects 0.000 description 19
- 150000001875 compounds Chemical class 0.000 description 17
- 238000004519 manufacturing process Methods 0.000 description 17
- 239000010931 gold Substances 0.000 description 15
- 239000011787 zinc oxide Substances 0.000 description 13
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 11
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 239000010936 titanium Substances 0.000 description 9
- 229910002704 AlGaN Inorganic materials 0.000 description 8
- 239000002019 doping agent Substances 0.000 description 8
- 229910052733 gallium Inorganic materials 0.000 description 8
- 229910052738 indium Inorganic materials 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 7
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 4
- 229910005540 GaP Inorganic materials 0.000 description 4
- 229910010413 TiO 2 Inorganic materials 0.000 description 4
- 239000007769 metal material Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- DZLPZFLXRVRDAE-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] Chemical compound [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] DZLPZFLXRVRDAE-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- YZZNJYQZJKSEER-UHFFFAOYSA-N gallium tin Chemical compound [Ga].[Sn] YZZNJYQZJKSEER-UHFFFAOYSA-N 0.000 description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 3
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- VRIVJOXICYMTAG-IYEMJOQQSA-L iron(ii) gluconate Chemical compound [Fe+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O VRIVJOXICYMTAG-IYEMJOQQSA-L 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910019897 RuOx Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910021478 group 5 element Inorganic materials 0.000 description 2
- 229910021476 group 6 element Inorganic materials 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910003465 moissanite Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000011135 tin Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- -1 ITO Substances 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45139—Silver (Ag) as principal constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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Abstract
【解決手段】本発明の半導体発光素子は、電極層と;前記電極層の上に配置され、第1導電型半導体層と、前記第1導電型半導体層の上に配置された活性層と、前記活性層の上に配置された第2導電型半導体層とを含む発光構造物と;前記発光構造物の上に配置された電極と;を含み、前記電極は、前記第2導電型半導体層の上部表面に接触されたオーミックコンタクト層と、前記オーミックコンタクト層の上に配置された第1バリア層と、前記第1バリア層の上に配置され、銅を含む伝導層と、前記伝導層の上に配置された第2バリア層と、前記第2バリア層の上に配置されたボンディング層とを含む。
【選択図】図1
Description
31 第1リード電極
32 第2リード電極
40 モールディング部
100 半導体発光素子
101 基板
110 第1導電型半導体層
112 凹凸パターン
115 電極
120 活性層
130 第2導電型半導体層
135 発光構造物
140 チャンネル層
145 電流ブロッキング層
150 オーミック層
160 電極層
170 接合層
175 伝導性支持部材
180 絶縁層
E1 半導体領域
L1 オーミックコンタクト層
L2 第1バリア層
L3 伝導層
L4 第2バリア層
L5 ボンディング層
Claims (20)
- 電極層と、
前記電極層の上に配置され、第1導電型半導体層と、前記第1導電型半導体層の上に配置された活性層と、前記活性層の上に配置された第2導電型半導体層とを含む発光構造物と、
前記発光構造物の上に配置された電極と、を含み、
前記電極は、前記第2導電型半導体層の上部表面に接触されたオーミックコンタクト層と、前記オーミックコンタクト層の上に配置された第1バリア層と、前記第1バリア層の上に配置され、銅を含む伝導層と、前記伝導層の上に配置された第2バリア層と、前記第2バリア層の上に配置されたボンディング層とを含む、
半導体発光素子。 - 凹凸パターンが前記第2導電型半導体層の上部表面に形成されたことを特徴とする請求項1に記載の半導体発光素子。
- 前記オーミックコンタクト層は前記凹凸パターンに対応して形成されたことを特徴とする請求項2に記載の半導体発光素子。
- 前記オーミックコンタクト層はCr、Cr合金、Al、Al合金、Ti、Ti合金、Ag、Ag合金、Ni、Ni合金の中から選択される少なくとも1つの物質を含むことを特徴とする請求項2に記載の半導体発光素子。
- 前記オーミックコンタクト層は、反射金属からなる上部層を含む複数層の構造に形成されたことを特徴とする請求項1に記載の半導体発光素子。
- 前記第1バリア層はNi、Ni合金、Ti、Ti合金の中から選択される少なくとも1つの物質から形成されたことを特徴とする請求項1に記載の半導体発光素子。
- 前記第1バリア層は10nm〜500nmの厚さに形成されたことを特徴とする請求項6に記載の半導体発光素子。
- 前記伝導層はCuまたはCu合金から形成されたことを特徴とする請求項1に記載の半導体発光素子。
- 前記伝導層は500nm〜5000nmの厚さに形成されたことを特徴とする請求項8に記載の半導体発光素子。
- 前記第2バリア層はNi、Ni合金、Ti、Ti合金の中から選択される少なくとも1つの物質から形成されたことを特徴とする請求項1に記載の半導体発光素子。
- 前記ボンディング層は、Au、Al、Cu、Cu合金の中から選択される物質から形成された単一層または多重層であることを特徴とする請求項1に記載の半導体発光素子。
- 前記ボンディング層は500nm〜3000nmの厚さに形成されたことを特徴とする請求項1に記載の半導体発光素子。
- 請求項1〜請求項12中のいずれか1項に記載の半導体発光素子を含む半導体発光素子パッケージ。
- 前記半導体発光素子が配置されたボディーと、
前記半導体発光素子が電気的に連結される複数のリード電極と、
前記半導体発光素子をモールディングするモールディング部と、
を含むことを特徴とする請求項13に記載の半導体発光素子パッケージ。 - 電極層と、
前記電極層の上に配置され、第1導電型半導体層と、前記第1導電型半導体層の上に配置された第2導電型半導体層と、前記第2導電型半導体層の上に配置された活性層と、前記活性層の上に配置されて第1導電型の第3半導体層とを含む発光構造物と、
前記発光構造物の上に配置された電極と、を含み、
前記電極は、前記第3半導体層の上部表面に接触されたオーミックコンタクト層と、前記オーミックコンタクト層の上に配置された第1バリア層と、前記第1バリア層の上に配置され、銅を含む伝導層と、前記伝導層の上に配置された第2バリア層と、前記第2バリア層の上に配置されたボンディング層とを含む、
半導体発光素子。 - 凹凸パターンが前記第3半導体層の上部表面に形成されたことを特徴とする請求項15に記載の半導体発光素子。
- 前記オーミックコンタクト層は前記凹凸パターンに対応して形成されたことを特徴とする請求項16に記載の半導体発光素子。
- 前記オーミックコンタクト層はCr、Cr合金、Al、Al合金、Ti、Ti合金、Ag、Ag合金、Ni、Ni合金の中から選択される少なくとも1つの物質を含み、
前記第1バリア層はNi、Ni合金、Ti、Ti合金の中から選択される少なくとも1つの物質で10nm〜500nmの厚さに形成され、
前記伝導層はCuまたはCu合金から500nm〜5000nmの厚さに形成され、
前記第2バリア層はNi、Ni合金、Ti、Ti合金の中から選択される少なくとも1つの物質から形成され、
前記ボンディング層はAu、Al、Cu、Cu合金の中から選択される物質から500nm〜3000nmの厚さに形成された単一層または多重層である、
ことを特徴とする請求項15に記載の半導体発光素子。 - 請求項15〜請求項18中のいずれか1項に記載の半導体発光素子を含む半導体発光素子パッケージ。
- 前記半導体発光素子が配置されたボディーと、
前記半導体発光素子が電気的に連結される複数のリード電極と、
前記半導体発光素子をモールディングするモールディング部と、
を含むことを特徴とする請求項19に記載の半導体発光素子パッケージ。
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US (1) | US8772803B2 (ja) |
EP (1) | EP2312654B1 (ja) |
JP (1) | JP2011086910A (ja) |
KR (1) | KR101014013B1 (ja) |
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US8686398B2 (en) | 2012-03-02 | 2014-04-01 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
JP2017139477A (ja) * | 2012-11-23 | 2017-08-10 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングOsram Opto Semiconductors GmbH | 集合体を半導体チップに個片化する方法および半導体チップ |
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KR101830719B1 (ko) | 2011-09-01 | 2018-02-21 | 엘지이노텍 주식회사 | 발광 소자 |
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TW201114064A (en) | 2011-04-16 |
CN102044609B (zh) | 2015-07-08 |
TWI514625B (zh) | 2015-12-21 |
EP2312654B1 (en) | 2018-12-26 |
KR101014013B1 (ko) | 2011-02-10 |
CN102044609A (zh) | 2011-05-04 |
US20110089451A1 (en) | 2011-04-21 |
EP2312654A2 (en) | 2011-04-20 |
US8772803B2 (en) | 2014-07-08 |
EP2312654A3 (en) | 2014-01-29 |
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