JP2011007049A5 - - Google Patents
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- Publication number
- JP2011007049A5 JP2011007049A5 JP2009148192A JP2009148192A JP2011007049A5 JP 2011007049 A5 JP2011007049 A5 JP 2011007049A5 JP 2009148192 A JP2009148192 A JP 2009148192A JP 2009148192 A JP2009148192 A JP 2009148192A JP 2011007049 A5 JP2011007049 A5 JP 2011007049A5
- Authority
- JP
- Japan
- Prior art keywords
- side wall
- exhaust port
- pump according
- molecular pump
- wall portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009148192A JP5420323B2 (ja) | 2009-06-23 | 2009-06-23 | 分子ポンプ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009148192A JP5420323B2 (ja) | 2009-06-23 | 2009-06-23 | 分子ポンプ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2011007049A JP2011007049A (ja) | 2011-01-13 |
JP2011007049A5 true JP2011007049A5 (de) | 2012-08-02 |
JP5420323B2 JP5420323B2 (ja) | 2014-02-19 |
Family
ID=43563987
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009148192A Active JP5420323B2 (ja) | 2009-06-23 | 2009-06-23 | 分子ポンプ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5420323B2 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE202013008470U1 (de) | 2013-09-24 | 2015-01-08 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
JP6390098B2 (ja) | 2013-12-25 | 2018-09-19 | 株式会社島津製作所 | 真空ポンプ |
JP6331491B2 (ja) | 2013-12-27 | 2018-05-30 | 株式会社島津製作所 | 真空ポンプ |
JP6386737B2 (ja) | 2014-02-04 | 2018-09-05 | エドワーズ株式会社 | 真空ポンプ |
EP3135919B1 (de) * | 2015-08-24 | 2019-02-20 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
CN109253926A (zh) * | 2018-10-19 | 2019-01-22 | 太原理工大学 | 模拟巷道围岩全长锚固质量检测的拉拔试验装置及方法 |
JP7467882B2 (ja) * | 2019-10-28 | 2024-04-16 | 株式会社島津製作所 | 真空ポンプ |
JP7336392B2 (ja) * | 2020-01-24 | 2023-08-31 | エドワーズ株式会社 | 真空ポンプおよびステータコラム |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09303289A (ja) * | 1996-05-14 | 1997-11-25 | Osaka Shinku Kiki Seisakusho:Kk | 分子ポンプの表面処理方法 |
DE10107341A1 (de) * | 2001-02-16 | 2002-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP2005194921A (ja) * | 2004-01-06 | 2005-07-21 | Boc Edwards Kk | 分子ポンプ |
JP4703279B2 (ja) * | 2004-06-25 | 2011-06-15 | 株式会社大阪真空機器製作所 | 複合分子ポンプの断熱構造 |
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2009
- 2009-06-23 JP JP2009148192A patent/JP5420323B2/ja active Active
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