JP2010245344A - 薄膜太陽電池パネルの高圧液噴射洗浄装置 - Google Patents
薄膜太陽電池パネルの高圧液噴射洗浄装置 Download PDFInfo
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- 239000007788 liquid Substances 0.000 title claims abstract description 128
- 238000004140 cleaning Methods 0.000 title claims abstract description 73
- 238000002347 injection Methods 0.000 title claims abstract description 24
- 239000007924 injection Substances 0.000 title claims abstract description 24
- 239000010409 thin film Substances 0.000 title claims abstract description 23
- 239000007921 spray Substances 0.000 claims description 16
- 238000005507 spraying Methods 0.000 claims description 4
- 239000002245 particle Substances 0.000 abstract description 26
- 239000010408 film Substances 0.000 abstract description 18
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- 239000002184 metal Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000032258 transport Effects 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
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- 239000004020 conductor Substances 0.000 description 2
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- 230000010354 integration Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
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- 239000010703 silicon Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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- 239000000758 substrate Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/024—Cleaning by means of spray elements moving over the surface to be cleaned
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24S—SOLAR HEAT COLLECTORS; SOLAR HEAT SYSTEMS
- F24S40/00—Safety or protection arrangements of solar heat collectors; Preventing malfunction of solar heat collectors
- F24S40/20—Cleaning; Removing snow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02S—GENERATION OF ELECTRIC POWER BY CONVERSION OF INFRARED RADIATION, VISIBLE LIGHT OR ULTRAVIOLET LIGHT, e.g. USING PHOTOVOLTAIC [PV] MODULES
- H02S40/00—Components or accessories in combination with PV modules, not provided for in groups H02S10/00 - H02S30/00
- H02S40/10—Cleaning arrangements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Photovoltaic Devices (AREA)
- Cleaning In General (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
【解決手段】 薄膜太陽電池パネルXの各スクライブX2の位置に対応して噴射ノズル3をノズルホルダー2の長手方向に沿って一定の間隔をあけて配列し、ノズルホルダー2をその両側の支持部13・14でノズルホルダーの長手方向に移動自在に支持し、太陽電池パネルXをスクライブX2に平行に相対的に搬送しながら、ノズルホルダー2の各噴射ノズル3から一本の直線状に噴射する高圧液を太陽電池パネルXの多数のスクライブX2に対し平行に噴射させて洗浄する。
【選択図】 図1
Description
前記太陽電池パネルの前記各スクライブの位置に対応して前記噴射ノズルをノズルホルダーの長手方向に沿って一定の間隔(前記スクライブの間隔)をあけて配列し、前記ノズルホルダーをその両側の支持部で(固定または前記ノズルホルダーの長手方向に移動自在に)支持し、前記太陽電池パネルを前記ノズルホルダーの長手方向に直交する方向で、かつ前記太陽電池パネルの前記スクライブに平行に相対的に搬送しながら、前記ノズルホルダーの前記各噴射ノズルから高圧液を前記太陽電池パネルの多数のスクライブに対し平行に噴射させて洗浄することを特徴としている。
・太陽電池パネルの各スクライブ内に付着した導電性や半導電性のパーティクルを確実に除去して、光電変換素子間が短絡するなど太陽電池パネルの品質低下の原因になることを防止する。
2 ノズルホルダー
2aノズルホルダー本体
2b・2c支持杆
3 噴射ノズル
4 ノズル部
4c開口
4d接続孔
9・9’高圧液供給管
10 洗浄室
10a洗浄台
11 主支持台
12 副支持台
13・14 LMガイド
15 ナット部
16 ボールネジ軸
17 軸受装置
18 サーボモータ
19 L形ステー
20 スクライブ位置センサー
21 直動用キャリッジ
22 レール
23 搬送台車
24 連結部材
25 吸盤
26 電磁発振機
32 高圧液供給路
X 太陽電池パネル
X2スクライブ
X3光電変換素子層
X4板ガラス
Claims (5)
- 薄膜太陽電池パネルの幅方向に一定間隔で、かつ前記幅方向に直交する方向に連続して設けられた各スクライブに対し、高圧液を一本の直線状に噴射して洗浄する高圧液噴射ノズルを備えた薄膜太陽電池パネルの高圧液噴射洗浄装置であって、
前記太陽電池パネルの前記各スクライブの位置に対応して前記噴射ノズルをノズルホルダーの長手方向に沿って一定の間隔をあけて配列し、
前記ノズルホルダーをその両側の支持部で支持し、
前記太陽電池パネルを前記ノズルホルダーの長手方向に直交する方向で、かつ前記太陽電池パネルの前記スクライブに平行に相対的に搬送しながら、前記ノズルホルダーの前記各噴射ノズルから高圧液を前記太陽電池パネルの多数のスクライブに対し平行に噴射させて洗浄することを特徴とする薄膜太陽電池パネルの高圧液噴射洗浄装置。 - 前記ノズルホルダーをその両側の支持部でノズルホルダーの長手方向に移動自在に支持するとともに、前記支持部の少なくとも一方に、前記ノズルホルダーを微小移動させて位置決め可能な微小位置決め装置を設けたことを特徴とする請求項1記載の薄膜太陽電池パネルの高圧液噴射洗浄装置。
- 前記各噴射ノズルから噴射させる高圧液の噴射圧を可変にしたことを特徴とする請求項1または2記載の薄膜太陽電池パネルの高圧液噴射洗浄装置。
- 両側の前記支持部に前記ノズルホルダーをその長手方向の軸回りに回転可能に支持して、前記噴射ノズルから噴射される高圧液の向きを調節できるようにしたことを特徴とする請求項1〜3のいずれか記載の薄膜太陽電池パネルの高圧液噴射洗浄装置。
- 前記ノズルホルダーの下面に前記各噴射ノズルを長手方向に沿って等間隔に配列するとともに、前記ノズルホルダーの長手方向に沿って高圧液供給路を前記各噴射ノズルに連通させて設け、前記高圧液供給路の端部に可撓性の高圧液供給管の一端を接続したことを特徴とする請求項1〜4のいずれか記載の薄膜太陽電池パネルの高圧液噴射洗浄装置。
Priority Applications (7)
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JP2009093207A JP5377037B2 (ja) | 2009-04-07 | 2009-04-07 | 薄膜太陽電池パネルの高圧液噴射洗浄装置 |
US13/263,625 US9079226B2 (en) | 2009-04-07 | 2010-03-31 | High-pressure liquid jet cleaner and high-pressure liquid jet cleaning method for cleaning thin film solar cell panel |
EP10761397.8A EP2418022B1 (en) | 2009-04-07 | 2010-03-31 | Apparatus and method for cleaning thin film solar cell panel by jetting high-pressure liquid |
KR1020117023133A KR101317060B1 (ko) | 2009-04-07 | 2010-03-31 | 박막 태양전지 패널의 고압액 분사 세정장치 및 방법 |
PCT/JP2010/002385 WO2010116691A1 (ja) | 2009-04-07 | 2010-03-31 | 薄膜太陽電池パネルの高圧液噴射洗浄装置および方法 |
CN201080012131.1A CN102355960B (zh) | 2009-04-07 | 2010-03-31 | 薄膜太阳能电池板的高压液体喷射清洗装置及方法 |
TW99110066A TWI459578B (zh) | 2009-04-07 | 2010-04-01 | Thin film solar cell panel high pressure liquid jet cleaning device and method |
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JP2009093207A JP5377037B2 (ja) | 2009-04-07 | 2009-04-07 | 薄膜太陽電池パネルの高圧液噴射洗浄装置 |
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JP2010245344A true JP2010245344A (ja) | 2010-10-28 |
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US (1) | US9079226B2 (ja) |
EP (1) | EP2418022B1 (ja) |
JP (1) | JP5377037B2 (ja) |
KR (1) | KR101317060B1 (ja) |
CN (1) | CN102355960B (ja) |
TW (1) | TWI459578B (ja) |
WO (1) | WO2010116691A1 (ja) |
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WO2014097679A1 (ja) * | 2012-12-21 | 2014-06-26 | シャープ株式会社 | 洗浄装置 |
WO2016143929A1 (ko) * | 2015-03-12 | 2016-09-15 | ㈜하이레벤 | 이상 유동 발생 노즐이 구비된 태양광 발전설비의 효율 향상 장치 |
JP6013557B1 (ja) * | 2015-06-02 | 2016-10-25 | 株式会社Nsc | スプレイエッチング装置 |
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WO2016194647A1 (ja) * | 2015-06-02 | 2016-12-08 | 株式会社Nsc | スプレイエッチング装置 |
JP2017005264A (ja) * | 2016-08-30 | 2017-01-05 | 株式会社Nsc | スプレイエッチング装置 |
KR20190019509A (ko) * | 2017-08-18 | 2019-02-27 | (주) 엔피홀딩스 | 이동형 기판 세정장치 및 이를 이용한 세정방법 |
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KR101317060B1 (ko) | 2013-10-11 |
JP5377037B2 (ja) | 2013-12-25 |
WO2010116691A1 (ja) | 2010-10-14 |
TWI459578B (zh) | 2014-11-01 |
EP2418022B1 (en) | 2018-10-17 |
EP2418022A1 (en) | 2012-02-15 |
CN102355960B (zh) | 2015-05-06 |
EP2418022A4 (en) | 2013-12-18 |
US9079226B2 (en) | 2015-07-14 |
KR20110124343A (ko) | 2011-11-16 |
CN102355960A (zh) | 2012-02-15 |
TW201044627A (en) | 2010-12-16 |
US20120125365A1 (en) | 2012-05-24 |
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