JP2010212319A - 固体撮像装置、電子機器および固体撮像装置の製造方法 - Google Patents
固体撮像装置、電子機器および固体撮像装置の製造方法 Download PDFInfo
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- 238000003384 imaging method Methods 0.000 title claims abstract description 61
- 238000004519 manufacturing process Methods 0.000 title description 9
- 239000012535 impurity Substances 0.000 claims abstract description 98
- 238000002955 isolation Methods 0.000 claims abstract description 46
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 6
- 238000002513 implantation Methods 0.000 claims description 3
- 230000005684 electric field Effects 0.000 description 26
- 238000006243 chemical reaction Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 230000007547 defect Effects 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
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- H01L31/113—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor
- H01L31/1136—Devices sensitive to infrared, visible or ultraviolet radiation characterised by field-effect operation, e.g. junction field-effect phototransistor being of the conductor-insulator-semiconductor type, e.g. metal-insulator-semiconductor field-effect transistor the device being a metal-insulator-semiconductor field-effect transistor
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
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- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
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Abstract
【解決手段】本発明は、受光領域で取り込んだ電荷を取り扱う能動素子と、能動素子の領域を分離する素子分離領域と、素子分離領域を囲む第1の不純物領域と、第1の不純物領域より濃度の低い不純物によって構成される領域であって、第1の不純物領域と能動素子との間に設けられる第2の不純物領域とを有する固体撮像装置である。また、この固体撮像装置を用いた電子機器でもある。
【選択図】図1
Description
1.固体撮像装置の構成(第1の構成、第2の構成の例)
2.固体撮像装置の製造方法
3.電子機器
[第1の構成]
図1は、本実施形態に係る固体撮像装置(第1の構成)を説明する模式断面図である。本実施形態に係る固体撮像装置は、半導体基板等の半導体材料に形成されるもので、受光領域10で取り込んだ電荷を取り扱う能動素子と、能動素子の領域を分離する素子分離領域20とを備えている。
図3は、本実施形態に係る固体撮像装置(第2の構成)を説明する模式断面図である。本実施形態に係る固体撮像装置は、第1の構成と同様、半導体材料に形成されるもので、受光領域10で取り込んだ電荷を取り扱う能動素子と、能動素子の領域を分離する素子分離領域20とを備えている。
図6〜図7は、本実施形態に係る固体撮像装置の製造方法の一例を説明する模式図である。先ず、図6(a)に示すように、半導体基板S上に素子分離領域20を形成する。半導体基板Sには、例えばシリコン(Si)基板を用い、素子分離領域20は、例えば絶縁膜(SiO2)からからなるLOCOS(Local Oxidation of Silicon)やSTI(Shallow Trench Isolation)構造で形成する。
図8は、本実施形態に係る電子機器の一例である撮像装置の構成例を示すブロック図である。図8に示すように、撮像装置90は、レンズ群91を含む光学系、固体撮像装置92、カメラ信号処理回路であるDSP回路93、フレームメモリ94、表示装置95、記録装置96、操作系97および電源系98等を有している。これらのうち、DSP回路93、フレームメモリ94、表示装置95、記録装置96、操作系97および電源系98がバスライン99を介して相互に接続された構成となっている。
Claims (6)
- 受光領域で取り込んだ電荷を取り扱う能動素子と、
前記能動素子の領域を分離する素子分離領域と、
前記素子分離領域を囲む第1の不純物領域と、
前記第1の不純物領域より濃度の低い不純物によって構成される領域であって、前記第1の不純物領域と前記能動素子との間に設けられる第2の不純物領域と
を有する固体撮像装置。 - 前記能動素子はトランジスタであり、
前記トランジスタのソースおよびドレインの少なくとも一方の周辺に当該ソースおよびドレインより不純物濃度が低い第3の不純物領域が設けられている
請求項1記載の固体撮像装置。 - 前記能動素子は、前記受光領域で取り込んだ電荷を電圧に変換する不純物注入部と隣接するトランジスタである
請求項1または2記載の固体撮像装置。 - 前記能動素子は、前記受光領域と隣接するトランジスタである
請求項1または2記載の固体撮像装置。 - 受光量に応じた電気信号を出力する固体撮像装置と、
前記固体撮像装置から出力された電気信号を処理する信号処理装置とを有し、
前記固体撮像装置が、
受光領域で取り込んだ電荷を取り扱う能動素子と、
前記能動素子の領域を分離する素子分離領域と、
前記素子分離領域を囲む第1の不純物領域と、
前記第1の不純物領域より濃度の低い不純物によって構成される領域であって、前記第1の不純物領域と前記能動素子との間に設けられる第2の不純物領域と
を有する電子機器。 - 半導体基板に能動素子を形成する領域を囲む不純物領域を形成し、当該不純物領域の内側に素子分離領域を形成する工程と、
前記能動素子を形成する領域の内側に開口を有するマスクを形成し、当該マスクを介して前記能動素子を形成する領域に不純物を注入し、能動素子を形成する工程と
を有する固体撮像装置の製造方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009054353A JP2010212319A (ja) | 2009-03-09 | 2009-03-09 | 固体撮像装置、電子機器および固体撮像装置の製造方法 |
EP10001286.3A EP2228825B1 (en) | 2009-03-09 | 2010-02-08 | Solid-state imaging device and electronic equipment |
TW099103963A TWI424559B (zh) | 2009-03-09 | 2010-02-09 | 固態成像裝置、電子設備及固態成像裝置之製造方法 |
US12/712,846 US20100224759A1 (en) | 2009-03-09 | 2010-02-25 | Solid-state imaging device, electronic equipment and manufacturing method of the solid-state imaging device |
KR1020100017038A KR20100101522A (ko) | 2009-03-09 | 2010-02-25 | 고체 촬상 장치, 전자 기기 및 고체 촬상 장치의 제조 방법 |
CN201010117131.XA CN101834191B (zh) | 2009-03-09 | 2010-03-02 | 固态成像装置、电子设备以及固态成像装置的制造方法 |
US13/618,765 US8975667B2 (en) | 2009-03-09 | 2012-09-14 | Solid-state imaging device, electronic equipment and manufacturing method of the solid-state imaging device |
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JP2009054353A JP2010212319A (ja) | 2009-03-09 | 2009-03-09 | 固体撮像装置、電子機器および固体撮像装置の製造方法 |
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US (2) | US20100224759A1 (ja) |
EP (1) | EP2228825B1 (ja) |
JP (1) | JP2010212319A (ja) |
KR (1) | KR20100101522A (ja) |
CN (1) | CN101834191B (ja) |
TW (1) | TWI424559B (ja) |
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KR102114343B1 (ko) * | 2013-11-06 | 2020-05-22 | 삼성전자주식회사 | 센싱 픽셀 및 이를 포함하는 이미지 센서 |
Citations (7)
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JPH03239368A (ja) * | 1990-02-16 | 1991-10-24 | Mitsubishi Electric Corp | 半導体装置 |
JP2000299453A (ja) * | 1999-02-09 | 2000-10-24 | Sony Corp | 固体撮像装置及びその製造方法 |
JP2004111746A (ja) | 2002-09-19 | 2004-04-08 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2004207351A (ja) | 2002-12-24 | 2004-07-22 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2004253729A (ja) * | 2003-02-21 | 2004-09-09 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
JP2007088002A (ja) * | 2005-09-20 | 2007-04-05 | Seiko Instruments Inc | Cmosイメージセンサic |
JP2008016771A (ja) * | 2006-07-10 | 2008-01-24 | Canon Inc | 光電変換装置、光電変換装置の製造方法および光電変換装置を用いた撮像システム |
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-
2009
- 2009-03-09 JP JP2009054353A patent/JP2010212319A/ja active Pending
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2010
- 2010-02-08 EP EP10001286.3A patent/EP2228825B1/en not_active Not-in-force
- 2010-02-09 TW TW099103963A patent/TWI424559B/zh not_active IP Right Cessation
- 2010-02-25 US US12/712,846 patent/US20100224759A1/en not_active Abandoned
- 2010-02-25 KR KR1020100017038A patent/KR20100101522A/ko not_active Application Discontinuation
- 2010-03-02 CN CN201010117131.XA patent/CN101834191B/zh active Active
-
2012
- 2012-09-14 US US13/618,765 patent/US8975667B2/en active Active
Patent Citations (7)
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JPH03239368A (ja) * | 1990-02-16 | 1991-10-24 | Mitsubishi Electric Corp | 半導体装置 |
JP2000299453A (ja) * | 1999-02-09 | 2000-10-24 | Sony Corp | 固体撮像装置及びその製造方法 |
JP2004111746A (ja) | 2002-09-19 | 2004-04-08 | Fujitsu Ltd | 半導体装置及びその製造方法 |
JP2004207351A (ja) | 2002-12-24 | 2004-07-22 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2004253729A (ja) * | 2003-02-21 | 2004-09-09 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
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US20130099094A1 (en) | 2013-04-25 |
EP2228825B1 (en) | 2014-04-02 |
TWI424559B (zh) | 2014-01-21 |
KR20100101522A (ko) | 2010-09-17 |
CN101834191A (zh) | 2010-09-15 |
US20100224759A1 (en) | 2010-09-09 |
EP2228825A3 (en) | 2012-05-23 |
TW201106477A (en) | 2011-02-16 |
CN101834191B (zh) | 2012-11-14 |
US8975667B2 (en) | 2015-03-10 |
EP2228825A2 (en) | 2010-09-15 |
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