JP2010191274A - Image blur correction device, imaging device using the same, and inspection method of image blur correction device - Google Patents

Image blur correction device, imaging device using the same, and inspection method of image blur correction device Download PDF

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JP2010191274A
JP2010191274A JP2009036676A JP2009036676A JP2010191274A JP 2010191274 A JP2010191274 A JP 2010191274A JP 2009036676 A JP2009036676 A JP 2009036676A JP 2009036676 A JP2009036676 A JP 2009036676A JP 2010191274 A JP2010191274 A JP 2010191274A
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holder
image blur
base
protrusion
blur correction
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JP5093144B2 (en
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Naohiko Hayashi
直彦 林
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Konica Minolta Opto Inc
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00—Details of cameras or camera bodies; Accessories therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
    • G02B7/10—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens
    • G02B7/102—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification by relative axial movement of several lenses, e.g. of varifocal objective lens controlled by a microcomputer

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  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Adjustment Of Camera Lenses (AREA)
  • Studio Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To prevent the flow-out of a defective product to a succeeding process, in an optical image blur correction device configured to displace optical components such as a sensor and lenses to a direction perpendicular to an optical axis so as to cancel hand-shake vibration. <P>SOLUTION: The image blur correction device 100 is configured to drive one end of a holder 12 on which a sensor body is loaded by an ultrasonic actuator, and support the other end of the holder 12 by balls 71 and 72 so as to be freely displaced by sliding on the bases 2 and 4. Protrusions 127 and 128 are formed near the storage position of the balls 71 and 72 in the holder 12, and recessed portions 27 and 48 are formed outside the moving range of the balls 71 and 72 in the bases 2 and 4, the height of each protrusion is made lower than the clearance of the holder, and also, the inside dimension of each of the recessed portions 27 and 48 and the outside dimension of each of the protrusions 127 and 128 are set so that the movable range ±X2 of the protrusion may become smaller than the original movable range ±X1 of the holder in a state that the ball is fitted into the recessed portion. Accordingly, if the ball is omitted in assembling, the movement of the holder 12 is restricted and the defective product can be determined. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、光学的にカメラの像ぶれを補正する装置およびその検査方法ならびにそれを用いる撮像装置に関する。   The present invention relates to an apparatus that optically corrects image blur of a camera, an inspection method thereof, and an imaging apparatus using the apparatus.

前記カメラの像ぶれ補正装置は、スローシャッターを可能にして、夜間撮影で３脚を不要にできる等のメリットがあり、搭載が進んでいる。その中でも、光学的な補正は、電子的な補正に比べて、解像度等の点で有利であり、像ぶれ補正装置の主流となっている。その光学的な像ぶれ補正の１つの手法としては、レンズ内に設けた補正レンズや、カメラ本体内に設けた撮像素子などの光学部品を光軸と直交方向に変位することで行われる。   The image blur correction device of the camera has advantages such as enabling a slow shutter and eliminating the need for a tripod for night photography. Among them, optical correction is advantageous in terms of resolution and the like compared with electronic correction, and has become the mainstream of image blur correction apparatuses. One method of optical image blur correction is performed by displacing an optical component such as a correction lens provided in the lens or an image sensor provided in the camera body in a direction orthogonal to the optical axis.

具体的には、特許文献１はレンズ側での像ぶれ補正装置であるが、補正レンズはホルダーに支持されて光学系に介在され、前記ホルダーの一端に変位用のアクチュエータであるコイルが設けられ、他端に球体が設けられ、前記コイルに通電することで、固定位置に設けられた永久磁石との間で駆動力が発生し、前記光軸と直交方向に変位するようになっている。   Specifically, Patent Document 1 is an image blur correction device on the lens side, but the correction lens is supported by a holder and interposed in an optical system, and a coil as a displacement actuator is provided at one end of the holder. A spherical body is provided at the other end, and when the coil is energized, a driving force is generated between the permanent magnet provided at a fixed position and displaced in a direction orthogonal to the optical axis.

特開２００８−２３３３８５号公報JP 2008-233385 A

上述のような構成では、組立て工程で球体を組み忘れた場合でも、それによって失われるクリアランスは小さく（ユニット自体がそもそも小さい）、判別が困難であるという問題がある。また、判別できるとしても、難しい検査で可能となるものであり、具体的には、光学性能を見るまで気付かないという問題がある。すなわち、テスト撮影によって、球体側で、フォーカスずれやボケが生じていることでしか判定できない。このため、後工程に不良ユニットが流れてしまい、無駄が生じることがある。さらに、本体側像ぶれ補正の場合、撮像素子のセンサユニットに像ぶれ補正機構を設けることになるが、そのセンサユニットを搭載した像ぶれ補正機構と、レンズ鏡筒との間にあおり（光軸）調整機構が設けられていると、球体の抜けによる前記フォーカスずれやボケを、あおり調整で補正して出荷してしまう可能性もある。   In the configuration as described above, even when the sphere is forgotten to be assembled in the assembling process, there is a problem that the clearance lost by the sphere is small (the unit itself is small in the first place) and is difficult to discriminate. Moreover, even if it can be discriminated, it is possible with difficult inspections, and specifically, there is a problem that it is not noticed until the optical performance is seen. That is, it can be determined only by the fact that a focus shift or blur occurs on the sphere side by the test photographing. For this reason, a defective unit flows in a post process, and waste may arise. In addition, in the case of image blur correction on the main body side, an image blur correction mechanism is provided in the sensor unit of the image sensor. However, there is an optical blur between the image blur correction mechanism equipped with the sensor unit and the lens barrel (optical axis). ) If an adjustment mechanism is provided, there is a possibility that the focus shift or blur caused by the sphere dropout is corrected by tilt adjustment before shipment.

本発明の目的は、光学部品をホルダーに搭載し、そのホルダーを変位用のアクチュエータと球体とによって基台上を滑動変位させて前記光学部品を光軸との交差方向に変位させることで光学的に像ぶれを補正するにあたって、前記球体の組込み忘れを判定することができる像ぶれ補正装置およびそれを用いる撮像装置ならびに像ぶれ補正装置の検査方法を提供することである。   It is an object of the present invention to mount an optical component on a holder, and to slide the holder on a base by a displacement actuator and a sphere to displace the optical component in a direction intersecting the optical axis. An object of the present invention is to provide an image blur correction device capable of determining whether the sphere is forgotten to be incorporated in correcting image blur, an imaging device using the same, and an inspection method for the image blur correction device.

本発明の像ぶれ補正装置は、光学系に介在される光学部品を、光軸と交差方向に変位することで、光学的に像ぶれを補正する装置において、前記光学部品はホルダーに支持され、そのホルダーは前記変位用のアクチュエータと、１または複数の球体とによって基台上を滑動変位自在に支持され、前記ホルダーには、前記球体の収納位置の近傍で、突起または凹所の一方が形成され、前記基台には、前記球体の移動範囲外の位置で、前記突起または凹所の他方が形成され、前記突起の高さは、前記球体が介在されることで基台上を浮上したホルダーとその基台との間隔よりも低く形成され、かつ前記凹所内に嵌り込んだ突起の可動範囲が前記ホルダーの可動範囲よりも小さくなるように、前記凹所の内寸および突起の外寸が設定されていることを特徴とする。   An image blur correction apparatus of the present invention is an apparatus that optically corrects an image blur by displacing an optical component interposed in an optical system in a direction intersecting the optical axis, and the optical component is supported by a holder, The holder is slidably supported on the base by the displacement actuator and one or more spheres, and the holder has one of a protrusion or a recess in the vicinity of the storage position of the sphere. In the base, the other of the protrusion or the recess is formed at a position outside the moving range of the sphere, and the height of the protrusion is levitated above the base due to the interposition of the sphere. The inner dimension of the recess and the outer dimension of the projection are formed so that the movable range of the protrusion formed in the recess is smaller than the distance between the holder and its base and smaller than the movable range of the holder. Is set And features.

また、本発明の像ぶれ補正装置の検査方法は、光学系に介在される光学部品を、光軸と交差方向に変位することで、光学的に像ぶれを補正する装置を検査するための方法において、前記光学部品がホルダーに支持され、そのホルダーが前記変位用のアクチュエータと、１または複数の球体とによって基台上を滑動変位自在に支持される場合、前記ホルダーには、前記球体の収納位置の近傍で、突起または凹所の一方を形成し、前記基台には、前記球体の移動範囲外の位置で、前記突起または凹所の他方を形成し、前記突起の高さを、前記球体が介在されることで基台上を浮上したホルダーとその基台との間隔よりも低く設定しておき、かつ前記凹所内に嵌り込んだ突起の可動範囲が前記ホルダーの可動範囲よりも小さくなるように、前記凹所の内寸および突起の外寸を設定しておき、前記球体の組込み忘れがあった場合、ホルダーの移動によって突起が凹所内に嵌り込み、以降の移動を制限することで、前記球体の組込み忘れを検知することを特徴とする。   The image blur correction apparatus inspection method of the present invention is a method for inspecting an apparatus that optically corrects image blur by displacing an optical component interposed in an optical system in a direction intersecting the optical axis. In this case, when the optical component is supported by a holder and the holder is slidably supported on a base by the displacement actuator and one or a plurality of spheres, the holder accommodates the sphere. One of a protrusion or a recess is formed in the vicinity of the position, and the other of the protrusion or the recess is formed on the base at a position outside the movement range of the sphere, and the height of the protrusion is It is set lower than the distance between the holder that has floated on the base due to the sphere and the base, and the movable range of the protrusion fitted in the recess is smaller than the movable range of the holder. The recess to be If you forget to incorporate the sphere by setting the inner dimension and the outer dimension of the protrusion, the protrusion fits into the recess by moving the holder, and the subsequent movement is restricted, so that you can forget to incorporate the sphere. It is characterized by detecting.

上記の構成によれば、光学系に介在されるセンサやレンズ等の光学部品を、手ぶれ振動を打ち消すように光軸と交差方向に変位することで、前記手ぶれによる像ぶれを光学的に補正する装置において、前記光学部品がホルダーに支持され、そのホルダーが超音波などによる変位用のアクチュエータと、少なくとも１箇所に設けられる球体とによって基台上を滑動変位自在に支持される場合、その球体の組込み忘れを判定できるような構造を設ける。具体的には、前記ホルダーには、前記球体の収納位置の近傍で、突起または凹所の一方を形成しておき、前記基台には、前記球体の移動範囲外の位置で、前記突起または凹所の他方を形成しておく。そして、前記突起の高さを、前記球体が介在されることで基台上を浮上したホルダーとその基台との間隔よりも低く形成し、かつ前記凹所内に嵌り込んだ突起の可動範囲が前記ホルダーの本来の可動範囲よりも小さくなるように、前記凹所の内寸および突起の外寸を設定しておくことで、前記球体の組込み忘れがあった場合、ホルダーの移動によって突起が凹所内に一旦嵌り込むと、以降の移動は通常の可動範囲よりも狭い範囲に規制されることになる。   According to the above configuration, the image blur caused by the camera shake is optically corrected by displacing an optical component such as a sensor or a lens interposed in the optical system in a direction intersecting the optical axis so as to cancel the camera shake vibration. In the apparatus, when the optical component is supported by a holder, and the holder is slidably supported on a base by an actuator for displacement by ultrasonic waves or the like and a sphere provided in at least one place, Provide a structure that can determine whether to forget to install. Specifically, one of a protrusion or a recess is formed in the holder in the vicinity of the storage position of the sphere, and the protrusion or the recess is formed on the base at a position outside the movement range of the sphere. The other side of the recess is formed. And the height of the projection is formed lower than the distance between the holder that has floated on the base by interposing the spherical body and the base, and the movable range of the projection fitted in the recess is By setting the inner dimension of the recess and the outer dimension of the protrusion so as to be smaller than the original movable range of the holder, if the ball is forgotten to be assembled, the protrusion is recessed by moving the holder. Once fitted in the station, the subsequent movement is restricted to a range narrower than the normal movable range.

したがって、球体の組込み忘れがある場合、像ぶれ補正ユニットの検査工程で、所期の像ぶれ補正の性能（ユニットの動き）は得られず、球体の組込み忘れを検知することができ、後続工程への不良品の流出を未然に防止することができる。   Therefore, if there is forgetting to install the sphere, the image blur correction performance (unit movement) cannot be obtained in the inspection process of the image blur correction unit, and the forgetting to install the sphere can be detected. It is possible to prevent the outflow of defective products.

さらにまた、本発明の像ぶれ補正装置では、前記基台は、前記ホルダーの一方の面側に配置される固定の第１の基台と、前記ホルダーの他方の面側に配置されて前記第１の基台との間で前記ホルダーを挟持し、前記第１の基台上を前記ホルダーと共に第１の方向に滑動変位するとともに、前記ホルダーを前記第１の方向と交差する第２の方向に滑動変位自在に支持する第２の基台とを備えて構成され、前記変位用のアクチュエータは、前記ホルダーの前記第１の方向または第２の方向の端部付近にそれぞれ配置されるリニアアクチュエータであり、前記ホルダーにおいてそれらのリニアアクチュエータが交差する側と反対側の辺の両面に、前記球体が一対で配置されることを特徴とする。   Furthermore, in the image blur correction device of the present invention, the base is a fixed first base disposed on one surface side of the holder, and is disposed on the other surface side of the holder. The holder is sandwiched between the first base, the first base is slid along the first base in the first direction, and the holder is in a second direction intersecting the first direction. And a second base that is slidably displaceably supported, and the displacement actuators are respectively arranged near the end portions of the holder in the first direction or the second direction. In the holder, a pair of the spheres are arranged on both sides of the side opposite to the side where the linear actuators intersect.

上記の構成によれば、第１の方向、たとえばｘ方向と、第２の方向、たとえばｙ方向との両方向の像ぶれ補正を行う場合に、前記ホルダーを滑動変位自在に支持する基台は、前記ホルダーの一方の面側に配置される固定部材から成る第１の基台と、前記ホルダーの他方の面側に配置されて前記第１の基台との間で前記ホルダーを挟持するスライダーから成る第２の基台とによって構成され、前記変位用のアクチュエータが、前記ホルダーの前記第１の方向または第２の方向の端部付近にそれぞれ配置され、好ましくは超音波リニアアクチュエータから成るリニアアクチュエータから成る場合に、前記球体を、前記ホルダーにおいて、そのリニアアクチュエータの反対側の辺付近に１個とし、その１個をホルダーの各面で同じ位置に設ける。   According to the above configuration, when performing image blur correction in both the first direction, for example, the x direction and the second direction, for example, the y direction, the base for supporting the holder slidably and From a first base made of a fixing member disposed on one surface side of the holder and a slider disposed on the other surface side of the holder and sandwiching the holder between the first base And the displacement actuator is disposed near the end of the holder in the first direction or the second direction, and preferably comprises an ultrasonic linear actuator. In this case, one sphere is provided near the opposite side of the linear actuator in the holder, and one of the spheres is provided at the same position on each surface of the holder.

したがって、２枚の基台で、ホルダーをバランス良く挟持することができる。   Therefore, the holder can be clamped between the two bases with good balance.

また、本発明の撮像装置は、前記の像ぶれ補正装置に、レンズユニットを備えて成ることを特徴とする。   The image pickup apparatus of the present invention is characterized in that the image blur correction apparatus includes a lens unit.

上記の構成によれば、不良品の発生の少ない撮像装置を実現することができる。   According to said structure, an imaging device with few generation | occurrence | production of inferior goods is realizable.

本発明の像ぶれ補正装置およびその検査方法は、以上のように、光学系に介在されるセンサやレンズ等の光学部品を、手ぶれ振動を打ち消すように光軸と交差方向に変位することで光学的に像ぶれを補正する装置において、前記光学部品がホルダーに支持され、そのホルダーが超音波などによる変位用のアクチュエータと、少なくとも１箇所に設けられる球体とによって基台上を滑動変位自在に支持される場合、前記ホルダーには、前記球体の収納位置の近傍で、突起または凹所の一方を形成しておき、前記基台には、前記球体の移動範囲外の位置で、前記突起または凹所の他方を形成しておき、前記突起の高さを、前記球体が介在されることで基台上を浮上したホルダーとその基台との間隔よりも低く形成し、かつ前記凹所内に嵌り込んだ突起の可動範囲が前記ホルダーの本来の可動範囲よりも小さくなるように、前記凹所の内寸および突起の外寸を設定しておく。   As described above, the image blur correction apparatus and the inspection method thereof according to the present invention optically displaces optical components such as sensors and lenses interposed in the optical system in a direction intersecting the optical axis so as to cancel out camera shake vibration. In an image blur correction apparatus, the optical component is supported by a holder, and the holder is slidably supported on a base by an actuator for displacement by ultrasonic waves or the like and a sphere provided in at least one place. In this case, the holder is formed with one of a protrusion and a recess in the vicinity of the storage position of the sphere, and the protrusion or the recess is formed on the base at a position outside the movement range of the sphere. The other of the positions is formed, and the height of the protrusion is formed lower than the distance between the holder that floats on the base by interposing the sphere and the base, and is fitted in the recess. Crowded As the movable range of the force is less than the original movable range of the holder, setting the inner dimensions and outer dimensions of the projections of the recess.

それゆえ、前記球体の組込み忘れがあった場合、ホルダーの移動によって突起が凹所内に一旦嵌り込むと、以降の移動は通常の可動範囲よりも狭い範囲に規制されることになり、像ぶれ補正ユニットの検査工程で、所期の像ぶれ補正の性能（ユニットの動き）が得られないことから、球体の組込み忘れを検知することができる。これによって、後続工程への不良品の流出を未然に防止することができる。   Therefore, if you have forgotten to incorporate the sphere, once the protrusion is inserted into the recess due to the movement of the holder, the subsequent movement will be restricted to a range narrower than the normal movable range, and image blur correction will be performed. Since the expected image blur correction performance (unit movement) cannot be obtained in the unit inspection process, it is possible to detect forgetting to incorporate the sphere. As a result, the outflow of defective products to the subsequent process can be prevented in advance.

また、本発明の撮像装置は、以上のように、前記の像ぶれ補正装置に、レンズユニットを備えて成る。   Further, as described above, the image pickup apparatus of the present invention includes the lens unit in the image blur correction apparatus.

それゆえ、不良品の発生の少ない撮像装置を実現することができる。   Therefore, it is possible to realize an imaging device with less occurrence of defective products.

本発明の実施の一形態に係る像ぶれ補正ユニットの斜視図であり、背面左下から見上げた図である。FIG. 3 is a perspective view of an image blur correction unit according to an embodiment of the present invention, and is a view looking up from the lower left side of the back surface. 図１の像ぶれ補正ユニットを背面左上から見下ろした図である。FIG. 2 is a view of the image blur correction unit of FIG. 図１の像ぶれ補正ユニットを背面右上から見下ろした図である。It is the figure which looked down at the image blurring correction unit of FIG. 1 from the back upper right. 図１の像ぶれ補正ユニットを背面右上から見下ろした図である。It is the figure which looked down at the image blurring correction unit of FIG. 1 from the back upper right. 図１の像ぶれ補正ユニットを前面右からやや見下ろした図である。FIG. 2 is a view of the image blur correction unit of FIG. 図１の像ぶれ補正ユニットを前面左からやや見下ろした図である。FIG. 2 is a view of the image blur correction unit of FIG. 本発明に係る像ぶれ補正装置の検査方法を説明するための図である。It is a figure for demonstrating the inspection method of the image blurring correction apparatus which concerns on this invention. 前記像ぶれ補正ユニットに撮像レンズ鏡筒を備えて構成される撮像装置を前面側から見た斜視図である。It is the perspective view which looked at the imaging device comprised by providing the imaging lens barrel in the image blur correction unit from the front side. 前記像ぶれ補正ユニットに撮像レンズ鏡筒を備えて構成される撮像装置を背面側から見た斜視図である。It is the perspective view which looked at the imaging device comprised by providing the imaging lens barrel in the image blur correction unit from the back side.

図１〜図６は、本発明の実施の一形態に係る像ぶれ補正ユニット１００の斜視図であり、図１は背面左下から見上げており、図２は背面左上から見下ろしており、図３は背面右上から見下ろしており、図４は背面右上から見下ろしており、図５は前面右からやや見下ろしており、図６は前面左からやや見下ろしている。この像ぶれ補正ユニット１００は、図８および図９で示すように、撮像レンズ鏡筒２００と一体的に固定されてカメラに用いられ、撮像素子１１を含むセンサユニット１を光軸ｚと直交するｘ方向およびｙ方向に変位することで、光学的に像ぶれを補正するものである。この像ぶれ補正ユニット１００は、レンズ交換不能な単眼のカメラに用いられ、センサユニット１を光軸ｚと直交するｘ方向およびｙ方向に変位することで、光学的に像ぶれを補正するものである。   1 to 6 are perspective views of an image blur correction unit 100 according to an embodiment of the present invention, FIG. 1 is looking up from the lower left of the back, FIG. 2 is looking down from the upper left of the back, and FIG. 4 is looking down from the upper right of the back, FIG. 5 is looking down slightly from the front right, and FIG. 6 is looking down slightly from the front left. As shown in FIGS. 8 and 9, the image blur correcting unit 100 is used integrally with an imaging lens barrel 200 and used in a camera, and the sensor unit 1 including the imaging element 11 is orthogonal to the optical axis z. By displacing in the x direction and the y direction, image blur is optically corrected. This image blur correction unit 100 is used for a monocular camera in which lenses cannot be exchanged, and optically corrects image blur by displacing the sensor unit 1 in the x and y directions perpendicular to the optical axis z. is there.

カメラ本体前面側には、板金加工品から成り、第１の基台である固定部材２が設けられ、該像ぶれ補正ユニット１００が組み上がった後に、この固定部材２に対して、前記撮像レンズ鏡筒２００が３本のビス３１〜３３およびそれに巻付けられたばね３４〜３６によってガタ付きなく支持され、ビス３１〜３３を六角レンチで調整することで、前記センサユニット１の光軸ｚと撮像レンズ鏡筒２００との光軸とが一致するようにあおり調整が行われる。調整後は、前記ビス３１〜３３の緩みを防止するために該ビス３１〜３３が固定部材２に接着固定される。この固定部材２に形成された開口２１を通して、前記撮像レンズ鏡筒２００から光が入射し、撮像素子１１に結像する。   On the front side of the camera body, there is provided a fixed member 2 which is a first metal base and is a first base. After the image blur correction unit 100 is assembled, the imaging lens is mounted on the fixed member 2. The lens barrel 200 is supported without backlash by the three screws 31 to 33 and the springs 34 to 36 wound around the screws 31, and the screws 31 to 33 are adjusted with a hexagon wrench so that the optical axis z of the sensor unit 1 and an image are captured. The tilt adjustment is performed so that the optical axis of the lens barrel 200 coincides. After the adjustment, the screws 31 to 33 are bonded and fixed to the fixing member 2 in order to prevent the screws 31 to 33 from loosening. Light enters from the imaging lens barrel 200 through the opening 21 formed in the fixing member 2 and forms an image on the imaging element 11.

前記センサユニット１は、大略的に、該センサユニット１の前面側に配置される前記固定部材２と、ダイキャスト成形品から成り、該センサユニット１の背面側に配置され、第２の基台であるスライダー４とによって挟持され、前記固定部材２上を前記スライダー４と共にｘ方向に滑動変位可能であるとともに、単体ではさらにスライダー４に対してｙ方向に滑動変位自在に支持される。   The sensor unit 1 is generally composed of the fixing member 2 disposed on the front surface side of the sensor unit 1 and a die-cast molded product, and is disposed on the rear surface side of the sensor unit 1 to provide a second base. The slider 4 is sandwiched by the slider 4 and can be slidably displaced in the x direction together with the slider 4 on the fixed member 2 and further supported by the slider 4 so as to be slidably displaced in the y direction.

前記撮像素子１１は、ＣＣＤやＣＭＯＳなどから成り、背面側はＦＰＣに貼付けられる。なお、図１〜図６では、図面の簡略化のために、多数の配線が形成され、さらに適宜チップ部品が実装された前記ＦＰＣは、省略している。このようにＦＰＣにマウントされた撮像素子１１は、さらに樹脂成型品などから成る前記ホルダー１２に形成された凹所１２１に背面側から嵌め込まれ、板金加工品から成るシールド板５がビス５１〜５３によってホルダー１２に螺着されることで、ホルダー１２に保持固定され、前記センサユニット１となる。   The image sensor 11 is composed of a CCD, a CMOS, etc., and the back side is attached to the FPC. In FIG. 1 to FIG. 6, the FPC in which a large number of wirings are formed and chip components are appropriately mounted is omitted for simplification of the drawings. The image pickup device 11 mounted on the FPC in this way is further fitted from the back side into the recess 121 formed in the holder 12 made of a resin molded product or the like, and the shield plate 5 made of a sheet metal processed product is screwed 51-53. By being screwed to the holder 12, the sensor unit 1 is held and fixed to the holder 12.

前記シールド板５の上端部に形成された支持部５４は、前記撮像素子１１からのＦＰＣの引出し部分を保持固定し、固定部材２の上端部に形成された支持部２４は、そのＦＰＣの引回しを受け、方向を変換して、該像ぶれ補正ユニット１００から延出させるためのものである。   A support portion 54 formed on the upper end portion of the shield plate 5 holds and fixes the FPC lead-out portion from the image sensor 11, and a support portion 24 formed on the upper end portion of the fixing member 2 holds the FPC pull-out portion. In response to rotation, the direction is changed and the image blur correction unit 100 is extended.

そして、先ず第１の方向である前記ｘ方向の摺動変位を実現するために、固定部材２側には、超音波リニアアクチュエータ２２が設けられる。この超音波リニアアクチュエータ２２は、前記ｘ方向に伸縮する圧電素子２２１と、その圧電素子２２１から前記ｘ方向に引出されるロッド２２２と、錘２２９とを備えて構成される。前記錘２２９は、ブラケット２２３によって前記固定部材２に保持固定され、その錘２２９に前記圧電素子２２１の一端が接着され、該圧電素子２２１の他端にはロッド２２２が接着される。前記ロッド２２２は、一対のブラケット２２４によって、前記固定部材２に、前記ｘ方向に伸縮変位自在に支持されている。このロッド２２２に対応して、前面側には、前記ｘ方向の直交断面がＶ字状に形成される帯状の受け部材２２５が設けられ、背面側には、スライダー４の上端に、前記ｘ方向に延びるＶ溝４１１を形成して成る摺動部４１が設けられる。前記帯状の受け部材２２５の一方の側部に設けられる係合片２２５ａが前記摺動部４１に隣接して設けられた支持片４２の凹所４２１に差込まれ、受け部材２２５の他方の側部に設けられる一対の係合片２２５ｂとスライダー４の上端に設けられたフック４３との間に、ばね６１が巻き掛けられることで、スライダー４と固定部材２との間にセンサユニット１が挟み込まれ、前記ｘ方向の摺動変位が可能となる。   First, in order to realize the sliding displacement in the x direction, which is the first direction, an ultrasonic linear actuator 22 is provided on the fixed member 2 side. The ultrasonic linear actuator 22 includes a piezoelectric element 221 that expands and contracts in the x direction, a rod 222 that is drawn out from the piezoelectric element 221 in the x direction, and a weight 229. The weight 229 is held and fixed to the fixing member 2 by a bracket 223, one end of the piezoelectric element 221 is bonded to the weight 229, and a rod 222 is bonded to the other end of the piezoelectric element 221. The rod 222 is supported on the fixing member 2 by a pair of brackets 224 so as to be freely expanded and contracted in the x direction. Corresponding to the rod 222, a belt-shaped receiving member 225 having a V-shaped cross section in the x direction is provided on the front side, and on the back side, on the upper end of the slider 4, the x direction is provided. A sliding portion 41 formed by forming a V-groove 411 is provided. An engagement piece 225 a provided on one side of the belt-shaped receiving member 225 is inserted into a recess 421 of a support piece 42 provided adjacent to the sliding portion 41, and the other side of the receiving member 225. The sensor unit 1 is sandwiched between the slider 4 and the fixing member 2 by the spring 61 being wound between the pair of engaging pieces 225 b provided in the section and the hook 43 provided at the upper end of the slider 4. Thus, sliding displacement in the x direction is possible.

このように構成される超音波リニアアクチュエータ２２において、前記圧電素子２２１が、錘２２９を基台として、ロッド２２２を、たとえば緩やかに伸長方向に押し出し、瞬時に縮退させると、支持片４２は押し出し位置に取り残され、このような動作を繰返すことで、スライダー４およびそれに連係するセンサユニット１は、伸長方向に変位されてゆく。反対に、前記圧電素子２２１が、ロッド２２２を、瞬時に伸長方向に押し出し、緩やかに縮退させると、支持片４２は縮退位置に引き戻され、このような動作を繰返すことで、スライダー４およびそれに連係するセンサユニット１は、縮退方向に変位されてゆく。   In the ultrasonic linear actuator 22 configured as described above, when the piezoelectric element 221 pushes the rod 222 gently, for example, in the extending direction with the weight 229 as a base, and retracts instantaneously, the support piece 42 is pushed out. By repeating such an operation, the slider 4 and the sensor unit 1 linked thereto are displaced in the extending direction. On the other hand, when the piezoelectric element 221 instantaneously pushes the rod 222 in the extending direction and gently retracts, the support piece 42 is pulled back to the retracted position, and by repeating such an operation, the slider 4 and the link are associated therewith. The sensor unit 1 is displaced in the degenerate direction.

次に、第２の方向であるｙ方向の摺動変位を実現するために、ホルダー１２の背面右側には、超音波リニアアクチュエータ１３が設けられる。この超音波リニアアクチュエータ１３も、前述の超音波リニアアクチュエータ２２と同様に、前記ｙ方向に伸縮する圧電素子１３１と、その圧電素子１３１から前記ｙ方向に引出されるロッド１３２と、錘１３９とを備えて構成される。前記錘１３９は、ブラケット１２３によって前記ホルタ１２に保持固定され、その錘１３９に前記圧電素子１３１の一端が接着され、該圧電素子１３１の他端にはロッド１３２が接着される。前記ロッド１３２は、一対のブラケット１２４によって、前記ホルダー１２に、前記ｙ方向に伸縮変位自在に支持されている。このロッド１３２に対応して、前面側には、前記受け部材２２５と同様に前記ｙ方向の直交断面がＶ字状に形成される帯状の受け部材１３５が設けられ、背面側には、スライダー４の背面右側に、前記ｙ方向に延びるＶ溝４４１を形成して成る摺動部４４が設けられる。前記帯状の受け部材１３５の一方の側部に設けられる係合片が前記摺動部４４に隣接して設けられた支持片４５の凹所４５１に差込まれ、受け部材１３５の他方の側部に設けられる一対の係合片１３５ｂとスライダー４の背面右側に設けられたフック４６との間に、ばね６２が巻き掛けられることで、センサユニット１がスライダー４に支持され、前記ｙ方向の摺動変位が可能となる。このように構成される超音波リニアアクチュエータ１３の動作は、前述の超音波リニアアクチュエータ２２と同様である。   Next, an ultrasonic linear actuator 13 is provided on the right side of the back surface of the holder 12 in order to realize sliding displacement in the y direction, which is the second direction. Similarly to the ultrasonic linear actuator 22, the ultrasonic linear actuator 13 includes a piezoelectric element 131 that expands and contracts in the y direction, a rod 132 that is drawn out from the piezoelectric element 131 in the y direction, and a weight 139. It is prepared for. The weight 139 is held and fixed to the holter 12 by a bracket 123, one end of the piezoelectric element 131 is bonded to the weight 139, and a rod 132 is bonded to the other end of the piezoelectric element 131. The rod 132 is supported on the holder 12 by a pair of brackets 124 so that the rod 132 can expand and contract in the y direction. Corresponding to the rod 132, a belt-like receiving member 135 having a V-shaped cross section in the y direction is provided on the front side as in the case of the receiving member 225, and the slider 4 is provided on the back side. A sliding portion 44 is provided on the right side of the rear surface. The sliding portion 44 is formed by forming a V groove 441 extending in the y direction. An engaging piece provided on one side of the belt-shaped receiving member 135 is inserted into a recess 451 of a support piece 45 provided adjacent to the sliding portion 44, and the other side of the receiving member 135 is inserted. The sensor unit 1 is supported by the slider 4 and is slid in the y direction by the spring 62 being wound between the pair of engagement pieces 135b provided on the right side and the hook 46 provided on the right side of the back surface of the slider 4. Dynamic displacement is possible. The operation of the ultrasonic linear actuator 13 configured as described above is the same as that of the ultrasonic linear actuator 22 described above.

こうして前記ホルダー１２のｘ方向の一辺およびｙ方向の一辺が支持され、それらの辺から離れた側に、球体７１，７２が前後に一対で設けられることで、該ホルダー１２は、固定部材２上およびスライダー４上を滑動変位自在となる。このため、ホルダー１２の固定部材２に対向した前面側には、前記球体７１を収容する凹所１２５が、ホルダー１２のスライダー４に対向した背面側には、前記球体７２を収容する凹所１２６が、それぞれ形成される。凹所１２５は、ホルダー１２の固定部材２上でのｘ，ｙ方向での変位を許容するために矩形に形成され、凹所１２６は、ホルダー１２のスライダー４上でのｙ方向での変位を許容するために長孔に形成され、これによってホルダー１２は、前記ｘ，ｙ方向それぞれに、たとえば±０．５ｍｍ変位可能となっている。   Thus, one side in the x direction and one side in the y direction of the holder 12 are supported, and a pair of spheres 71 and 72 are provided on the front and rear sides on the side away from these sides. The slider 4 is slidably displaceable. Therefore, a recess 125 for accommodating the spherical body 71 is provided on the front side of the holder 12 facing the fixing member 2, and a recess 126 for accommodating the spherical body 72 is provided on the back side of the holder 12 facing the slider 4. Are formed respectively. The recess 125 is formed in a rectangular shape in order to allow displacement in the x and y directions on the fixing member 2 of the holder 12, and the recess 126 allows displacement of the holder 12 in the y direction on the slider 4. In order to allow it, it is formed in a long hole, so that the holder 12 can be displaced by, for example, ± 0.5 mm in each of the x and y directions.

なお、球体７１，７２は、ホルダー１２の各面で、複数設けられていてもよい。また、必ずしも前後面で一対に設けられなくてもよい。しかしながら、前後面で一対に設けることで、固定部材２およびスライダー４で、ホルダー１２をバランス良く挟持することができる。   A plurality of spheres 71 and 72 may be provided on each surface of the holder 12. Further, it is not always necessary to provide a pair on the front and rear surfaces. However, by providing a pair on the front and rear surfaces, the holder 12 can be clamped between the fixing member 2 and the slider 4 with good balance.

また、前記超音波リニアアクチュエータ２２，１３およびばね６１，６２によって、固定部材１２とスライダー４とのｘ方向の一辺およびｙ方向の一辺間が連結されるのに対して、反対側は、固定部材１２に形成されたフック２８とスライダー４に形成されたフック４９との間に、ばね６３張架がされることで連結されている。さらに固定部材２の上端には前記支持部２４が設けられており、下端には一対のフック２９１，２９２が設けられている。これらのフック２９１，２９２は、衝撃が加わった場合に、前記スライダー４およびセンサユニット１が光軸ｚ方向（背面方向）に脱落しないように設けられている。   The ultrasonic linear actuators 22 and 13 and the springs 61 and 62 connect one side in the x direction and one side in the y direction between the fixing member 12 and the slider 4, whereas the opposite side is the fixing member. 12 and a hook 49 formed on the slider 4 are connected by a tension of a spring 63. Further, the support member 24 is provided at the upper end of the fixing member 2, and a pair of hooks 291 and 292 are provided at the lower end. These hooks 291 and 292 are provided so that the slider 4 and the sensor unit 1 do not fall off in the optical axis z direction (backward direction) when an impact is applied.

一方、前記ホルダー１２の変位を検出するために、該ホルダー１２の前記球体７１，７２が設けられる側とは反対側の側部には、ホルダー１２９が形成されており、このホルダー１２９には永久磁石６が搭載され、これに対応して固定部材２側には、前記ホルダー１２９の可動範囲をカバーするホール素子７が設けられている。   On the other hand, in order to detect the displacement of the holder 12, a holder 129 is formed on the side of the holder 12 opposite to the side on which the spherical bodies 71 and 72 are provided. A magnet 6 is mounted, and a Hall element 7 that covers the movable range of the holder 129 is provided on the fixed member 2 side correspondingly.

上述のように構成される像ぶれ補正ユニットにおいて、注目すべきは、本実施の形態では、前記ホルダー１２には、前記球体７１，７２の収納凹所１２５，１２６の近傍に、突起１２７，１２８が形成され、前記固定部材２およびスライダー４の対応位置には、凹所２７，４８がそれぞれ形成されることである。なお、ホルダー１２側に凹所が、固定部材２およびスライダー４側に突起が設けられてもよい。図７は、前記球体７１，７２付近の断面（ｘ，ｚ断面）図である。前記ｘ，ｚ断面では、前述の矩形の凹所１２５と長孔の凹所１２６との関係で、凹所１２５が幅広に見えているが、ｙ，ｚ断面で見た場合、それらの幅は略等しい。これらの凹所１２５，１２６は、球体７１，７２の移動範囲外に形成される。   In the image blur correction unit configured as described above, it should be noted that in the present embodiment, the holder 12 has protrusions 127 and 128 in the vicinity of the storage recesses 125 and 126 of the spheres 71 and 72. And recesses 27 and 48 are formed at corresponding positions of the fixing member 2 and the slider 4, respectively. A recess may be provided on the holder 12 side, and a protrusion may be provided on the fixing member 2 and the slider 4 side. FIG. 7 is a cross-sectional view (x, z cross section) near the spheres 71, 72. In the x and z cross sections, the recess 125 appears to be wide due to the relationship between the rectangular recess 125 and the long hole recess 126 described above, but when viewed in the y and z cross section, their width is Almost equal. These recesses 125 and 126 are formed outside the moving range of the spheres 71 and 72.

また注目すべきは、前記突起１２７，１２８の高さは、前記球体７１，７２が介在されることで固定部材２およびスライダー４上をそれぞれ浮上したホルダー１２とそれらの固定部材２およびスライダー４との間隔Ｗよりも低く形成され、かつ図７（ｂ）で示すように前記凹所２７，４８内に嵌り込んだ突起１２７，１２８の可動範囲±ｘ２が、前記ホルダー４の可動範囲±ｘ１よりも小さくなるように、前記凹所２７，４８の内寸および突起１２７，１２８の外寸が設定されていることである。前記可動範囲±ｘ１は、図７（ａ）のホーム（ニュートラル）ポジションから、前記超音波リニアアクチュエータ２２の駆動によって左方および右方へそれぞれ変位可能な距離であり、たとえば前述のように±０．５ｍｍの範囲である。前記超音波リニアアクチュエータ１３によるｙ方向の可動範囲も同様に、±０．５ｍｍである。一方、前記凹所２７，４８内での突起１２７，１２８の可動範囲±ｘ２は、たとえば±０．２ｍｍに設定される。   It should also be noted that the heights of the protrusions 127 and 128 are such that the spheres 71 and 72 are interposed so that the holder 12 floats on the fixing member 2 and the slider 4 and the fixing member 2 and the slider 4 respectively. The movable range ± x2 of the protrusions 127, 128 formed in the recesses 27, 48 as shown in FIG. 7B is lower than the movable range ± x1 of the holder 4 as shown in FIG. The inner dimensions of the recesses 27 and 48 and the outer dimensions of the projections 127 and 128 are set so that the outer dimensions of the recesses 27 and 48 are reduced. The movable range ± x1 is a distance displaceable leftward and rightward by driving the ultrasonic linear actuator 22 from the home (neutral) position in FIG. 7A, for example, ± 0 as described above. The range is 5 mm. Similarly, the movable range in the y direction by the ultrasonic linear actuator 13 is ± 0.5 mm. On the other hand, the movable range ± x2 of the protrusions 127 and 128 in the recesses 27 and 48 is set to ± 0.2 mm, for example.

したがって、図７（ｂ）で示すように球体７２の組込み忘れがあった場合、ホルダー１２の移動によって突起１２８が凹所４８内に一旦嵌り込むと、以降の移動は通常の可動範囲±ｘ１よりも狭い範囲±ｘ２に規制されることになる。これによって、像ぶれ補正ユニット１００の検査工程の段階で、所期の像ぶれ補正の性能（センサユニット１の動き）は得られず、球体７１，７２の組込み忘れを検知することができ、後続工程への不良品の流出を未然に防止することができる。すなわち、前記像ぶれ補正ユニット１００の検査は、前記超音波リニアアクチュエータ１３，２２を最大の可動範囲で駆動し、その際に前記ホール素子７の検出結果から、所期の移動量が得られているか否かを判断することで行うことができる。したがって、撮像素子１１などからの配線を総て結線しないと行えない最終段階の検査工程に比べて、遙かに上流側で行うことができる。   Therefore, as shown in FIG. 7 (b), if the sphere 72 is forgotten to be assembled, once the projection 128 is once fitted into the recess 48 by the movement of the holder 12, the subsequent movement is from the normal movable range ± x1. Is restricted to a narrow range ± x2. As a result, the expected image blur correction performance (movement of the sensor unit 1) cannot be obtained at the stage of the inspection process of the image blur correction unit 100, and it is possible to detect forgetting to incorporate the spheres 71 and 72. Outflow of defective products to the process can be prevented in advance. That is, in the inspection of the image blur correction unit 100, the ultrasonic linear actuators 13 and 22 are driven in the maximum movable range, and at that time, the desired movement amount is obtained from the detection result of the Hall element 7. This can be done by determining whether or not. Therefore, it can be performed far upstream as compared with the final inspection process that cannot be performed unless all the wiring from the image sensor 11 or the like is connected.

図８および図９は、上述のように構成される像ぶれ補正ユニット１００に撮像レンズ鏡筒２００を備えて構成される撮像装置の斜視図であり、図８は上面側から見た図であり、図９は背面側から見た図である。この撮像装置は、撮像レンズ鏡筒２００に、図示しない本体筐体内に収納される前記像ぶれ補正ユニット１００を備えて構成され、前記撮像素子１１からはＦＰＣ８が、超音波リニアアクチュエータ１３，２２からはＦＰＣ８０が引出され、ＦＰＣ２０１はズーム用のモータやフォーカス用のモータから引出される。   8 and 9 are perspective views of an image pickup apparatus configured by including the image pickup lens barrel 200 in the image blur correction unit 100 configured as described above, and FIG. 8 is a view seen from the upper surface side. FIG. 9 is a view as seen from the back side. This imaging device is configured to include the image blur correction unit 100 housed in a main body housing (not shown) in an imaging lens barrel 200, and the FPC 8 is connected to the ultrasonic linear actuators 13 and 22 from the imaging element 11. FPC 80 is pulled out, and FPC 201 is pulled out from a zoom motor or a focus motor.

大略的に、前記撮像レンズ鏡筒２００では、ズーム用のモータ２０２からの動力はギアボックス２０３を介して固定筒２０４内に収納されたカム筒２０５に伝達され、該カム筒２０５の回転によって第１の直進移動筒２０６が進退し、前玉２０７が前記光軸ｚ方向に変位するとともに、図示しない内部の直進移動筒も前記カム筒２０５に駆動され、該直進移動筒に保持されるズームレンズも前記光軸ｚ方向に変位する。なお、フォーカス用には別途直進移動筒およびそれに保持されるフォーカスレンズが設けられており、内蔵の小型のモータで駆動される。   In general, in the imaging lens barrel 200, the power from the zooming motor 202 is transmitted to the cam barrel 205 housed in the fixed barrel 204 via the gear box 203, and the cam barrel 205 is rotated by the rotation of the cam barrel 205. The zoom lens held by the straight movement cylinder is driven by the cam cylinder 205 and the internal straight movement cylinder (not shown) is driven while the front movement lens 206 is moved in the direction of the optical axis z. Is also displaced in the optical axis z direction. Note that a straight moving cylinder and a focus lens held by the cylinder are separately provided for focusing, and are driven by a small built-in motor.

したがって、このような撮像装置の組立て工程に、前記球体７１，７２の組込み忘れがある像ぶれ補正ユニット１００が流れて来ないことで、不良品の発生の少ない撮像装置を実現することができる。   Therefore, since the image blur correction unit 100 in which the spheres 71 and 72 are forgotten to be assembled does not flow in the assembling process of such an imaging apparatus, an imaging apparatus with few defective products can be realized.

上述の説明では、本実施の形態の像ぶれ補正ユニット１００は、レンズ交換不可のカメラに用いられたけれども、一眼レフカメラで用いられてもよい。また、レンズ側の像ぶれ補正ユニットに用いられてもよい。さらにまた、アクチュエータには、超音波リニアアクチュエータ１３，２２以外に、ボイスコイルモータ、ステッピングモータ等も使用可能である。   In the above description, the image blur correction unit 100 according to the present embodiment is used for a camera whose lens cannot be exchanged, but may be used for a single-lens reflex camera. Further, it may be used in an image blur correction unit on the lens side. In addition to the ultrasonic linear actuators 13 and 22, a voice coil motor, a stepping motor, or the like can be used as the actuator.

１ センサユニット
１１ センサ本体
１２ ホルダー
１２５，１２６ 凹所
１２７，１２８ 突起
１２９ ホルダー
１３，２２ 超音波リニアアクチュエータ
１３１，２２１ 圧電素子
１３２，２２２ ロッド
１３５，２２５ 受け部材
２ 固定部材
２７，４８ 凹所
３１〜３３ ビス
３４〜３６ ばね
４ スライダー
４１，４４ 摺動部
４２，４５ 支持片
４３，４６，４９ フック
５ シールド板
６ 永久磁石
６１，６２，６３ ばね
７ ホール素子
７１，７２ 球体
１００ 像ぶれ補正ユニット
２００ 撮像レンズ鏡筒 DESCRIPTION OF SYMBOLS 1 Sensor unit 11 Sensor main body 12 Holder 125, 126 Recess 127, 128 Protrusion 129 Holder 13, 22 Ultrasonic linear actuator 131, 221 Piezoelectric element 132, 222 Rod 135, 225 Receiving member 2 Fixing member 27, 48 Recess 31- 33 Screws 34 to 36 Spring 4 Sliders 41, 44 Sliding parts 42, 45 Support pieces 43, 46, 49 Hooks 5 Shield plates 6 Permanent magnets 61, 62, 63 Spring 7 Hall elements 71, 72 Spherical body 100 Image blur correction unit 200 Imaging lens barrel

Claims (5)

光学系に介在される光学部品を、光軸と交差方向に変位することで、光学的に像ぶれを補正する装置において、
前記光学部品はホルダーに支持され、そのホルダーは前記変位用のアクチュエータと、１または複数の球体とによって基台上を滑動変位自在に支持され、
前記ホルダーには、前記球体の収納位置の近傍で、突起または凹所の一方が形成され、前記基台には、前記球体の移動範囲外の位置で、前記突起または凹所の他方が形成され、
前記突起の高さは、前記球体が介在されることで基台上を浮上したホルダーとその基台との間隔よりも低く形成され、かつ前記凹所内に嵌り込んだ突起の可動範囲が前記ホルダーの可動範囲よりも小さくなるように、前記凹所の内寸および突起の外寸が設定されていることを特徴とする像ぶれ補正装置。 In an apparatus that optically corrects image blur by displacing an optical component interposed in the optical system in a direction intersecting the optical axis,
The optical component is supported by a holder, and the holder is slidably supported on a base by the displacement actuator and one or a plurality of spheres,
The holder is formed with one of a protrusion or a recess in the vicinity of the storage position of the sphere, and the base is formed with the other of the protrusion or the recess at a position outside the movement range of the sphere. ,
The height of the protrusion is formed lower than the distance between the holder that floats on the base and the base due to the interposition of the sphere, and the movable range of the protrusion fitted into the recess is the holder. An image blur correction device characterized in that the inner dimension of the recess and the outer dimension of the protrusion are set so as to be smaller than the movable range of. 前記基台は、前記ホルダーの一方の面側に配置される固定の第１の基台と、前記ホルダーの他方の面側に配置されて前記第１の基台との間で前記ホルダーを挟持し、前記第１の基台上を前記ホルダーと共に第１の方向に滑動変位するとともに、前記ホルダーを前記第１の方向と交差する第２の方向に滑動変位自在に支持する第２の基台とを備えて構成され、
前記変位用のアクチュエータは、前記ホルダーの前記第１の方向または第２の方向の端部付近にそれぞれ配置されるリニアアクチュエータであり、前記ホルダーにおいてそれらのリニアアクチュエータが交差する側と反対側の辺の両面に、前記球体が一対で配置されることを特徴とする請求項１記載の像ぶれ補正装置。 The base is sandwiched between the fixed first base disposed on one surface side of the holder and the first base disposed on the other surface side of the holder. And a second base that slidably displaces on the first base together with the holder in a first direction and that supports the holder in a second direction intersecting the first direction. And configured with
The displacement actuators are linear actuators arranged near the end portions of the holder in the first direction or the second direction, respectively, and the side of the holder opposite to the side where the linear actuators intersect The image blur correction apparatus according to claim 1, wherein a pair of the spheres are arranged on both surfaces of the image blur correction apparatus. 前記リニアアクチュエータは、超音波のリニアアクチュエータであることを特徴とする請求項２記載の像ぶれ補正装置。   The image blur correction apparatus according to claim 2, wherein the linear actuator is an ultrasonic linear actuator. 前記請求項１〜３のいずれか１項に記載の像ぶれ補正装置に、レンズユニットを備えて成ることを特徴とする撮像装置。   An image pickup apparatus comprising the lens unit in the image blur correction apparatus according to claim 1. 光学系に介在される光学部品を、光軸と交差方向に変位することで、光学的に像ぶれを補正する装置を検査するための方法において、
前記光学部品がホルダーに支持され、そのホルダーが前記変位用のアクチュエータと、１または複数の球体とによって基台上を滑動変位自在に支持される場合、
前記ホルダーには、前記球体の収納位置の近傍で、突起または凹所の一方を形成し、
前記基台には、前記球体の移動範囲外の位置で、前記突起または凹所の他方を形成し、
前記突起の高さを、前記球体が介在されることで基台上を浮上したホルダーとその基台との間隔よりも低く設定しておき、かつ前記凹所内に嵌り込んだ突起の可動範囲が前記ホルダーの可動範囲よりも小さくなるように、前記凹所の内寸および突起の外寸を設定しておき、
前記球体の組込み忘れがあった場合、ホルダーの移動によって突起が凹所内に嵌り込み、以降の移動を制限することで、前記球体の組込み忘れを検知することを特徴とする像ぶれ補正装置の検査方法。 In a method for inspecting an apparatus that optically corrects image blur by displacing an optical component interposed in an optical system in a direction intersecting with an optical axis,
When the optical component is supported by a holder, and the holder is slidably supported on a base by the displacement actuator and one or more spheres,
The holder forms one of a protrusion or a recess in the vicinity of the storage position of the sphere,
On the base, at the position outside the movement range of the sphere, the other of the protrusion or the recess is formed,
The height of the protrusion is set to be lower than the distance between the holder that has floated on the base by interposing the sphere and the base, and the movable range of the protrusion fitted into the recess is Set the inner dimension of the recess and the outer dimension of the protrusion so as to be smaller than the movable range of the holder,
An inspection of an image blur correction device characterized in that when the forgetting to incorporate the sphere is detected, the protrusion is fitted into the recess by the movement of the holder, and the subsequent movement is limited to detect the forgetting to incorporate the sphere. Method.
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