JP2010159978A - Board testing device - Google Patents

Board testing device Download PDF

Info

Publication number
JP2010159978A
JP2010159978A JP2009000568A JP2009000568A JP2010159978A JP 2010159978 A JP2010159978 A JP 2010159978A JP 2009000568 A JP2009000568 A JP 2009000568A JP 2009000568 A JP2009000568 A JP 2009000568A JP 2010159978 A JP2010159978 A JP 2010159978A
Authority
JP
Japan
Prior art keywords
contact
inspection
suction
probe
flexible printed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2009000568A
Other languages
Japanese (ja)
Other versions
JP5236506B2 (en
Inventor
Shinji Ogiwara
伸治 荻原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hioki EE Corp
Original Assignee
Hioki EE Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hioki EE Corp filed Critical Hioki EE Corp
Priority to JP2009000568A priority Critical patent/JP5236506B2/en
Publication of JP2010159978A publication Critical patent/JP2010159978A/en
Application granted granted Critical
Publication of JP5236506B2 publication Critical patent/JP5236506B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a board testing device precisely in contact with a flexible printed board without damage. <P>SOLUTION: In the board testing device 11 including: a jig 12 holding the flexible printed board 41; a one-side test unit 22 positioned at a one-side surface 44 of the board 41; and an other-side test unit 32 positioned at the other-side surface 45, each of test units 22, 32 includes a movable body 23, 33 capable of moving in three-axis directions and a suction probe body 25, 35 attached to the movable body 23, 33. The suction probe body 25, 35 includes one or more suction tube parts 26, 36 arranged so as to suck air from a tip opening part 26a, 36a, and a contact probe 27, 37 in which a tip opening part 27a, 37a of the suction tube parts 26, 36 is in contact with the board 41 so that the pressure of the inside of a space part 26b, 36b thereof is negative and which causes a contact end 27a, 37a to be in contact with a test point. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、検査対象基板であるフレキシブルプリント配線板の両面に位置する各検査ポイントに対し所定の電気的検査を行うことができる基板検査装置に関する技術である。   The present invention relates to a substrate inspection apparatus capable of performing a predetermined electrical inspection on each inspection point located on both surfaces of a flexible printed wiring board which is a substrate to be inspected.

図５は、プリント配線板を検査対象基板とする基板検査装置の従来例の概略構成を示す説明図である。同図によれば、基板検査装置１は、プリント配線板Ｐが載置される支持台２と、プリント配線板Ｐのパターンに接触させて所定の電気的検査を行う検査ユニット３とを少なくとも備えて構成されている。   FIG. 5 is an explanatory diagram showing a schematic configuration of a conventional example of a substrate inspection apparatus using a printed wiring board as a substrate to be inspected. As shown in FIG. 1, the board inspection apparatus 1 includes at least a support base 2 on which the printed wiring board P is placed, and an inspection unit 3 that makes a predetermined electrical inspection in contact with the pattern of the printed wiring board P. Configured.

この場合、支持台２は、所定位置にブルプリント配線板Ｐを位置決めして配置できるようになっている。また、検査ユニット３は、Ｘ−Ｙ−Ｚの３軸方向への移動を可能に配設される可動本体４と、該可動本体４に取り付けられた検査用プローブ５とで構成されている。   In this case, the support base 2 can position and arrange the bull printed wiring board P at a predetermined position. Further, the inspection unit 3 includes a movable main body 4 that is arranged to be movable in the X-Y-Z directions and an inspection probe 5 attached to the movable main body 4.

そして、検査用プローブ５は、その接触端５ａをプリント配線板Ｐの所定位置に接触させるプロービング動作を行うことで、例えばプリント配線板Ｐの導体パターンなどの検査ポイントに接触させて、良否判定に必要な信号を取得できるようになっている。   Then, the inspection probe 5 performs a probing operation in which the contact end 5a is brought into contact with a predetermined position of the printed wiring board P, so that the inspection probe 5 is brought into contact with an inspection point such as a conductor pattern of the printed wiring board P to make a pass / fail judgment. Necessary signals can be acquired.

この場合、プリント配線板Ｐは、正確に支持台２上に位置決めして配置しておく必要があることから、例えば囲枠状の位置固定板で上側から押さえ付けたり、検査用プローブ５が存在しない下面側を空気引きするなどして位置固定されていた。   In this case, since the printed wiring board P needs to be positioned and arranged accurately on the support base 2, for example, the printed wiring board P is pressed from above with a frame-shaped position fixing plate, or the inspection probe 5 exists. The position of the lower surface side was fixed by pulling air.

また、この種の検査用プローブについては、例えば下記特許文献１に開示されているように、検査対象であるプリント配線板側に吸着させる吸盤と、該吸盤の内部空間内に配置されてプリント配線板の検査ポイントに接触させるスプリングプローブとを備えているものも既に提案されている。   As for this type of inspection probe, for example, as disclosed in Patent Document 1 below, a suction cup to be adsorbed on the printed wiring board to be inspected, and a printed wiring arranged in the internal space of the suction cup Some have already been proposed with a spring probe in contact with the inspection point of the plate.

特開平６−３４７４７６号公報JP-A-6-347476

そして、図５に示す基板検査装置１が備える検査用プローブ５と上記特許文献１に開示されている検査用プローブとは、そのいずれもが片面検査方式のもとでプリント配線板の検査ポイントに対し検査を行おうとするものであった。   And the inspection probe 5 with which the board | substrate inspection apparatus 1 shown in FIG. 5 is equipped, and the inspection probe currently disclosed by the said patent document 1 are all used as the inspection point of a printed wiring board under the single-sided inspection system. The test was to be performed.

一方、最近における検査対象基板としてのプリント配線板は、両面に検査ポイントを有するフレキシブルプリント配線板が主流となってきており、図５に示すように支持台２に載置されることなく、その周縁部を位置固定した上で、両面側にそれぞれ検査ユニットを配置して両面検査できる基板検査装置を導入することでその対応を図っている。   On the other hand, in recent printed wiring boards as inspection target substrates, flexible printed wiring boards having inspection points on both sides have become mainstream, and without being placed on the support base 2 as shown in FIG. This is achieved by introducing a substrate inspection apparatus capable of inspecting both sides by arranging inspection units on both sides after fixing the peripheral edge.

図６は、上記両面検査方式に対応させた基板検査装置の従来例を示す説明図である。同図によれば、基板検査装置１は、フレキシブルプリント配線板４１の周縁部４２，４３を保持する治具６と、該治具６に保持させたフレキシブルプリント配線板４１の両面側に各別に配置される検査ユニット７とを少なくとも備えて構成されている。   FIG. 6 is an explanatory view showing a conventional example of a substrate inspection apparatus corresponding to the double-side inspection method. According to the figure, the board inspection apparatus 1 includes a jig 6 that holds the peripheral portions 42 and 43 of the flexible printed wiring board 41, and a flexible printed wiring board 41 that is held by the jig 6. The inspection unit 7 to be arranged is provided at least.

この場合、各検査ユニット７は、図５と同様にＸ−Ｙ−Ｚの３軸方向への移動を可能に配設される可動本体８と、該可動本体８に取り付けられた検査用プローブ９とで構成されている。   In this case, each inspection unit 7 includes a movable main body 8 that can be moved in the X-Y-Z directions in the same manner as in FIG. 5, and an inspection probe 9 attached to the movable main body 8. It consists of and.

そして、各検査用プローブ９は、それぞれの接触端９ａをフレキシブルプリント配線板４１の両面に位置する検査ポイントに接触させるプロービング動作を行うことで、該フレキシブルプリント配線板４１の良否判定に必要な信号を取得できるようになっている。   Each inspection probe 9 performs a probing operation in which each contact end 9a is brought into contact with an inspection point located on both surfaces of the flexible printed wiring board 41, so that signals necessary for determining whether the flexible printed wiring board 41 is good or bad. Can be obtained.

しかし、図６に示す基板検査装置１による場合には、検査対象基板が薄くて剛性の乏しいキシブルプリント配線板４１であることから、検査用プローブ９を接触させた際にその荷重で撓んでしまい、接触端９ａを検査ポイントに正確に接触させることができなくなるという不都合があった。   However, in the case of the substrate inspection apparatus 1 shown in FIG. 6, since the inspection target substrate is a thin and poorly rigid kibble printed wiring board 41, it is bent by the load when the inspection probe 9 is brought into contact. The contact end 9a cannot be accurately brought into contact with the inspection point.

また、図６に示す基板検査装置１による場合には、検査用プローブ９を無理に押し込んでキシブルプリント配線板４１側を傷付けてしまうという不具合もあった。   Further, in the case of the board inspection apparatus 1 shown in FIG. 6, there is also a problem that the inspection probe 9 is forcibly pushed to damage the kibble printed wiring board 41 side.

本発明は、従来技術の上記課題に鑑み、検査対象基板がフレキシブルプリント配線板であり、その両面に検査ポイントを有するものであっても、傷付けることなく、正確に検査ポイントに接触させることができる基板検査装置を提供することに目的がある。   In view of the above-described problems of the prior art, the present invention can accurately contact an inspection point without damaging even if the substrate to be inspected is a flexible printed wiring board and has inspection points on both sides thereof. An object is to provide a substrate inspection apparatus.

本発明は、上記目的を達成すべくなされたものであり、検査対象基板であるフレキシブルプリント基板を保持する治具と、該フレキシブルプリント基板の一側面側に配置される一側検査ユニットと、他側面側に配置される他側検査ユニットとを少なくとも備える基板検査装置において、前記一側検査ユニットと前記他側検査ユニットとは、装置本体側にＸ−Ｙ−Ｚの３軸方向への移動を可能に各別に配設される可動本体と、これらの可動本体に各別に取り付けられた吸引プローブ体とで構成され、該吸引プローブ体のそれぞれは、先端開口部からの空気引きを可能に配設される少なくとも１本以上の吸引筒体部と、該吸引筒体部の前記先端開口部を前記フレキシブルプリント基板に接触させてその空間部内が負圧となった状態のもとで検査ポイントにその接触端を接触させるコンタクトプローブとで形成したことを最も主要な特徴とする。   The present invention has been made to achieve the above-described object, and includes a jig for holding a flexible printed circuit board that is a substrate to be inspected, a one-side inspection unit disposed on one side of the flexible printed circuit board, and the like. In the board inspection apparatus including at least the other-side inspection unit disposed on the side surface side, the one-side inspection unit and the other-side inspection unit are moved in the three-axis directions of XYZ toward the apparatus main body side. Each of the suction probe bodies is configured to allow air to be drawn from the tip opening portion. At least one suction cylinder portion and the tip opening of the suction cylinder portion are brought into contact with the flexible printed circuit board and the space portion is under negative pressure. The most important feature that is formed by the contact probe contacting the contact end to the cement.

この場合、前記吸引プローブ体のそれぞれは、１本の前記吸引筒体部と、前記先端開口部からの出没を可能にして前記吸引筒体部内の軸方向に配設されたコンタクトプローブとで形成したり、複数本の前記吸引筒体部と、これら吸引筒体部を長さ方向に束ねて中心位置に確保される空間部内にその軸方向に沿わせて配設されたコンタクトプローブとで形成することができる。   In this case, each of the suction probe bodies is formed by one suction cylinder body portion and a contact probe disposed in the axial direction in the suction cylinder body portion so as to be able to protrude and retract from the tip opening portion. Or a plurality of the suction cylinder parts and a contact probe arranged along the axial direction in a space portion that is bundled in the length direction and secured at the center position. can do.

本発明によれば、空気引きしながらコンタクトプローブの接触端をフレキシブルプリント基板の検査ポイントに接触させて検査することができるので、検査対象基板が薄くて剛性の乏しいフレキシブルプリント配線板であっても、検査用プローブを接触させた際に撓ませたり突き破ることなくその接触端を検査ポイントに正確に接触させることができる。   According to the present invention, the contact end of the contact probe can be in contact with the inspection point of the flexible printed circuit board while drawing air, so that even if the inspection object substrate is a thin and poorly flexible printed circuit board, When the inspection probe is brought into contact, the contact end can be accurately brought into contact with the inspection point without bending or breaking through.

本発明の概略構成例を示す説明図。Explanatory drawing which shows the schematic structural example of this invention. 一側検査ユニット側の吸引プローブ体を例に要部を拡大して示す部分斜視図。The fragmentary perspective view which expands and shows a principal part for the suction probe body by the side of the one side test | inspection unit as an example. 本発明における吸引プローブ体の動きを（ａ）〜（ｃ）として示す説明図。Explanatory drawing which shows the motion of the suction probe body in this invention as (a)-(c). 本発明における吸引プローブ体の他例を示す説明図。Explanatory drawing which shows the other example of the suction probe body in this invention. プリント配線板を検査対象基板とする基板検査装置の従来例の概略構成を示す説明図。Explanatory drawing which shows schematic structure of the prior art example of the board | substrate inspection apparatus which uses a printed wiring board as a test object board | substrate. フレキシブルプリント配線板を検査対象基板として両面検査方式に対応させた基板検査装置の従来例を示す説明図。Explanatory drawing which shows the prior art example of the board | substrate inspection apparatus which made the flexible printed wiring board respond | correspond to a double-sided inspection system by making it a board | substrate to be examined.

図１は、本発明の概略構成例を示す説明図であり、基板検査装置１１は、検査対象基板であるフレキシブルプリント配線板４１の周側縁側を保持して位置決め固定する治具１２と、該治具１２に保持されたフレキシブルプリント配線板４１の一側面４４側に配置される一側検査ユニット２２と、他側面４５側に配置される他側検査ユニット３２とを少なくとも備えて構成されている。   FIG. 1 is an explanatory diagram showing a schematic configuration example of the present invention. A substrate inspection apparatus 11 includes a jig 12 that holds and fixes a peripheral edge of a flexible printed wiring board 41 that is a substrate to be inspected, The flexible printed wiring board 41 held by the jig 12 is configured to include at least the one-side inspection unit 22 disposed on the one side surface 44 side and the other-side inspection unit 32 disposed on the other side surface 45 side. .

このうち、図示しない装置本体に配設される治具１２は、例えば１００ｍｍ×５０ｍｍ程度の面サイズの矩形を呈するフレキシブルプリント配線板４１の少なくとも対向二辺である各側縁部４２，４３を各別に保持する機構を備えて形成されている。すなわち、各治具１２は、フレキシブルプリント配線板４１の側縁部４２，４３を支持する固定側支持部１３と、該固定側支持部１３と向き合う位置に配置されて図示しないエアシリンダなどにより進退制御される可動側支持部１４とで形成されている。   Among these, the jig 12 disposed in the apparatus main body (not shown) has the side edge portions 42 and 43 which are at least two opposite sides of the flexible printed wiring board 41 having a rectangular surface size of, for example, about 100 mm × 50 mm. It is formed with a separate holding mechanism. That is, each jig 12 is disposed at a position facing the fixed side support portion 13 that supports the side edges 42 and 43 of the flexible printed wiring board 41 and an air cylinder (not shown). It is formed with the movable side support part 14 to be controlled.

また、一側検査ユニット２２と他側検査ユニット２３とは、図示しない装置本体側にＸ−Ｙ−Ｚの３軸方向への移動を可能に各別に配設される可動本体２３，３３と、これらの可動本体２３，３３に各別に取り付けられた吸引プローブ体２５，３５とで、いずれもが同一構造を備えて形成されている。   Further, the one-side inspection unit 22 and the other-side inspection unit 23 include movable main bodies 23 and 33 that are separately arranged on the apparatus main body side (not shown) so as to be movable in three axial directions of XYZ. The suction probe bodies 25 and 35 attached to the movable main bodies 23 and 33 are respectively formed with the same structure.

この場合、可動本体２３，３３は、図示しない移動機構に取付け片２４，３４を介して固定することで、Ｘ−Ｙ−Ｚの３軸方向への制御された移動を可能に配設されることになる。   In this case, the movable main bodies 23 and 33 are arranged to be controlled to move in the three-axis directions of XYZ by being fixed to a moving mechanism (not shown) via the attachment pieces 24 and 34. It will be.

しかも、吸引プローブ体２５，３５のそれぞれは、先端開口部２６ａ，３６ａからの空気引きを可能に配設される少なくとも１本以上の吸引筒体部２６，３６と、該吸引筒体部２６，３６の先端開口部２６ａ，３６ａをフレキシブルプリント基板４１に接触させてそ内部の空間部２６ｂ，３６ｂが負圧となった状態のもとで検査ポイントにその接触端２７ａ，３７ａを接触させるコンタクトプローブ２７，３７とで形成されている。   In addition, each of the suction probe bodies 25 and 35 includes at least one suction cylinder body portions 26 and 36 disposed so as to be able to draw air from the tip openings 26a and 36a, and the suction cylinder body portions 26 and 36. A contact probe for bringing the contact ends 27a, 37a into contact with the inspection point in a state in which the tip openings 26a, 36a of 36 are brought into contact with the flexible printed circuit board 41 and the internal space portions 26b, 36b are under negative pressure. 27, 37.

これを図１に示す例に基づいてより具体的に説明すれば、それぞれが１本で構成されている各吸引プローブ体２５，３５は、例えば検査ポイントを中心として直径０．５ｍｍ程度の外径を有する先端開口部２６ａ，３６ａからの空気引きを可能に配設される吸引筒体部２６，３６と、先端開口部２６ａ，３６ａからの出没を可能にして吸引筒体部２６，３６内の軸方向に配設されるコンタクトプローブ２７，３７とで形成されている。   More specifically, based on the example shown in FIG. 1, each of the suction probe bodies 25, 35 each constituted by one piece has an outer diameter of about 0.5 mm around the inspection point, for example. The suction cylinder parts 26, 36 are arranged so as to be able to draw air from the front end openings 26a, 36a, and the insides of the suction cylinder parts 26, 36 can be projected and retracted from the front end openings 26a, 36a. The contact probes 27 and 37 are arranged in the axial direction.

図２は、一側検査ユニット２２側の吸引プローブ体２５を例に要部を拡大して示す部分斜視図であり、保形性のある吸引筒体部２６は、先端開口部２６ａへと至る先端部がやや先細りとなった略円筒形状を呈する硬質ゴム材や合成樹脂材により形成されている。   FIG. 2 is a partial perspective view showing an enlarged main portion of the suction probe body 25 on the side of the one-side inspection unit 22 as an example, and the suction cylinder body portion 26 having a shape retaining property reaches the distal end opening portion 26a. It is formed of a hard rubber material or a synthetic resin material having a substantially cylindrical shape with a slightly tapered tip.

このため、吸引筒体部２６は、他所に配設されている図示しないエジェクタ側などに通気路を介して接続して外気が強制的に空間部２６ａ内に吸引されるようになった状態のもとで、先端開口部２６ａをフレキシブルプリント配線板４１の一側面４４側に密に接触させた際に空間部２６ａ内が大気圧に対し負圧になっても変形を生じなくさせることができる。   For this reason, the suction cylinder portion 26 is connected to an unillustrated ejector side or the like, which is disposed elsewhere, through an air passage so that outside air is forcibly sucked into the space portion 26a. Originally, when the tip opening 26a is brought into close contact with the one side surface 44 of the flexible printed wiring board 41, deformation can be prevented even if the inside of the space 26a becomes negative with respect to atmospheric pressure. .

また、コンタクトプローブ２７は、内蔵させた図示しないコイルスプリングを介してその直径が０．１ｍｍ程度の接触端２７ａ側が常に進出方向に付勢されて形成されている。しかも、該コンタクトプローブ２７は、先端開口部２６ａを有する吸引筒体部２６の空間部２６ｂ内に、その軸心方向に沿わせた位置関係のもとで配置されており、図示しない基端部側は、可動本体２３に対し制御された進退移動を可能にして取り付けられている。   Further, the contact probe 27 is formed such that the contact end 27a side having a diameter of about 0.1 mm is always urged in the advancing direction through a coil spring (not shown) incorporated therein. Moreover, the contact probe 27 is disposed in the space portion 26b of the suction cylinder portion 26 having the distal end opening portion 26a in a positional relationship along the axial direction, and is not shown in the drawing. The side is attached to the movable main body 23 so as to allow controlled advance and retreat.

次に、本発明の作用・効果につき、図１および図２に示す一側検査ユニット２２側の動きを例に説明すれば、まず、図３（ａ）に示すように、フレキシブルプリント配線板４１の一側面４４側に位置する今回の検査ポイント上に、一側検査ユニット２２における吸引プローブ体２５が正確に位置するようにＸ−Ｙ−Ｚの３軸方向に可動本体２３を移動させた上で、一側検査ユニット２２の全体をフレキシブルプリント配線板４１の一側面４４方向に下降させる。なお、吸引筒体部２６は、この時点で図示しないエジェクタを介して先端開口部２６ａから外気の空気引きを開始している。   Next, the operation and effect of the present invention will be described by taking the movement on the side of the one-side inspection unit 22 shown in FIGS. 1 and 2 as an example. First, as shown in FIG. The movable main body 23 is moved in the XYZ three-axis directions so that the suction probe body 25 in the one-side inspection unit 22 is accurately positioned on the current inspection point located on the one side 44 side. Thus, the entire one-side inspection unit 22 is lowered in the direction of the one side surface 44 of the flexible printed wiring board 41. In addition, at this time, the suction cylinder portion 26 starts to draw outside air from the distal end opening portion 26a via an ejector (not shown).

やがて、吸引プローブ体２５における吸引筒体部２６の先端開口部２６ａは、図３（ｂ）に示すようにフレキシブルプリント配線板４１の一側面４４の今回の検査ポイント領域に密に面接触するに至る。   Eventually, the tip opening 26a of the suction cylinder body portion 26 in the suction probe body 25 comes into close surface contact with the current inspection point region on the one side surface 44 of the flexible printed wiring board 41 as shown in FIG. It reaches.

吸引筒体部２６は、その先端開口部２６ａがフレキシブルプリント配線板４１の一側面４４側に密に接触することにより、その空間部２６ｂ内の空気が吸引されて外気圧に対し負圧となる結果、図３（ｂ）に示すように今回の検査ポイント領域が先端開口部２６ａに吸着される。   The suction cylinder portion 26 has its tip opening portion 26a in close contact with the one side surface 44 of the flexible printed wiring board 41, whereby the air in the space portion 26b is sucked and becomes negative pressure with respect to the external pressure. As a result, as shown in FIG. 3B, the current inspection point area is adsorbed to the tip opening 26a.

吸引プローブ体２５におけるコンタクトプローブ２７は、吸引筒体部２６によるこのような吸着状態のもとでその下降を開始し、やがてその接触端２７ａが図３（ｃ）に示すように検査ポイントに接触して押圧するに至り、この状態のもとで所定の電気的検査を行い必要な電気信号を取得することができることになる。   The contact probe 27 in the suction probe body 25 starts to descend under such an adsorption state by the suction cylinder body portion 26, and the contact end 27a eventually comes into contact with the inspection point as shown in FIG. In this state, a predetermined electrical inspection can be performed and a necessary electrical signal can be acquired.

したがって、本発明によれば、吸引筒体部２６，３６の先端開口部２６ａ，３６ａ側から空気引きしながらコンタクトプローブ２７，３７の接触端２７ａ，３７ａをフレキシブルプリント基板４１の一側面４４と他側面４５とに位置する検査ポイントに接触させて検査することができる。   Therefore, according to the present invention, the contact ends 27a and 37a of the contact probes 27 and 37 are connected to the one side surface 44 of the flexible printed circuit board 41 and the like while air is drawn from the tip opening portions 26a and 36a of the suction cylinder portions 26 and 36, respectively. Inspection can be performed by contacting an inspection point located on the side surface 45.

このため、本発明によれば、検査対象基板が薄くて剛性の乏しいフレキシブルプリント配線板４１であっても、コンタクトプローブ２７，３７を接触させた際に、その吸着面の反対方向に撓まることなくその接触端２７ａ，３７ａを検査ポイントに正確に接触させることができる。また、フレキシブルプリント配線板４１は、その検査時に吸引筒体部２６，３６によりある程度の弾性を伴って保持される結果、コンタクトプローブ２７，３７の接触端２７ａ，３７ａにより押し込まれることがあっても、突き破られることなく検査ポイントに正確に接触させることができる。   Therefore, according to the present invention, even if the substrate to be inspected is a thin and poorly flexible printed wiring board 41, when the contact probes 27 and 37 are brought into contact with each other, the substrate is bent in the direction opposite to the suction surface. Therefore, the contact ends 27a and 37a can be brought into contact with the inspection point accurately. Further, the flexible printed wiring board 41 may be pushed by the contact ends 27a and 37a of the contact probes 27 and 37 as a result of being held with some elasticity by the suction cylinder portions 26 and 36 during the inspection. The inspection point can be accurately contacted without being pierced.

以上は、本発明の一例を説明したものであり、その具体的な構成は、これに限定されるものではない。例えば、吸引プローブ体２５（３３）は、図４に示すように５本を含む適宜の複数本の吸引筒体部２６（３６）と、これら吸引筒体部２６（３６）を長さ方向に束ねて中心位置に確保される空間部２９内にその軸方向に沿わせて配設されたコンタクトプローブ２７（３７）とで形成することもできる。このように複数本の吸引筒体部２６（３６）を具備させた場合は、フレキシブルプリント配線板４１の検査ポイント領域をより安定的に空気引きしながら、コンタクトプローブ３２７（３７）を正確に接触させることができることのなる。   The above is one example of the present invention, and the specific configuration is not limited to this. For example, the suction probe body 25 (33) includes a plurality of appropriate suction cylinder bodies 26 (36) including five as shown in FIG. 4, and the suction cylinder bodies 26 (36) in the length direction. It is also possible to form the contact probe 27 (37) disposed along the axial direction in the space 29 which is bundled and secured at the center position. When the plurality of suction cylinder portions 26 (36) are provided in this way, the contact probe 327 (37) is accurately contacted while the inspection point area of the flexible printed wiring board 41 is aired more stably. Can be made to.

また、本発明は、図示例のようなフライングタイプのコンタクトプローブのほか、例えば剣山タイプのコンタクトプローブの周囲に吸引筒体部を配置することで実施することもできる。   In addition to the flying type contact probe as shown in the illustrated example, the present invention can also be implemented, for example, by arranging a suction cylinder body around a sword mountain type contact probe.

１１ 基板検査装置
１２ 治具
１３ 固定側支持部
１４ 可動側支持部
２２ 一側検査ユニット
２３ 可動本体
２４ 取付け片
２５ 吸引プローブ体
２６ 吸引筒体部
２６ａ 先端開口部
２６ｂ 空間部
２７ コンタクトプローブ
２７ａ 接触端
２９ 空間部
３２ 他側検査ユニット
３３ 可動本体
３４ 取付け片
３５ 吸引プローブ体
３６ 吸引筒体部
３６ａ 先端開口部
３６ｂ 空間部
３７ コンタクトプローブ
３７ａ 接触端
４１ フレキシブルプリント基板
４２，４３ 側縁部
４４ 一側面
４５ 他側面 DESCRIPTION OF SYMBOLS 11 Board | substrate inspection apparatus 12 Jig 13 Fixed side support part 14 Movable side support part 22 One side inspection unit 23 Movable main body 24 Mounting piece 25 Suction probe body 26 Suction cylinder body part 26a Tip opening part 26b Space part 27 Contact probe 27a Contact end DESCRIPTION OF SYMBOLS 29 Space part 32 Other side inspection unit 33 Movable main body 34 Mounting piece 35 Suction probe body 36 Suction cylinder part 36a Tip opening part 36b Space part 37 Contact probe 37a Contact end 41 Flexible printed circuit boards 42 and 43 Side edge part 44 One side face 45 Other aspects

Claims (3)

検査対象基板であるフレキシブルプリント基板を保持する治具と、該フレキシブルプリント基板の一側面側に配置される一側検査ユニットと、他側面側に配置される他側検査ユニットとを少なくとも備える基板検査装置において、
前記一側検査ユニットと前記他側検査ユニットとは、装置本体側にＸ−Ｙ−Ｚの３軸方向への移動を可能に各別に配設される可動本体と、これらの可動本体に各別に取り付けられた吸引プローブ体とで構成され、
該吸引プローブ体のそれぞれは、先端開口部からの空気引きを可能に配設される少なくとも１本以上の吸引筒体部と、該吸引筒体部の前記先端開口部を前記フレキシブルプリント基板に接触させてその空間部内が負圧となった状態のもとで検査ポイントにその接触端を接触させるコンタクトプローブとで形成したことを特徴とする基板検査装置。 Substrate inspection comprising at least a jig for holding a flexible printed circuit board that is a substrate to be inspected, a one-side inspection unit disposed on one side of the flexible printed circuit, and another side inspection unit disposed on the other side In the device
The one-side inspection unit and the other-side inspection unit include a movable main body that is separately arranged on the apparatus main body side so as to be movable in the three-axis directions of XYZ, It consists of an attached suction probe body,
Each of the suction probe bodies includes at least one suction cylinder portion disposed so as to be able to draw air from the tip opening portion, and the tip opening portion of the suction cylinder body portion contacts the flexible printed circuit board. And a contact probe for bringing the contact end into contact with the inspection point under a negative pressure in the space. 前記吸引プローブ体のそれぞれは、１本の前記吸引筒体部と、前記先端開口部からの出没を可能にして前記吸引筒体部内の軸方向に配設されたコンタクトプローブとで形成した請求項１に記載の基板検査装置。 Each of the suction probe bodies is formed of one suction cylinder body portion and a contact probe arranged in an axial direction in the suction cylinder body portion so as to be able to protrude and retract from the tip opening portion. 2. The substrate inspection apparatus according to 1. 前記吸引プローブ体のそれぞれは、複数本の前記吸引筒体部と、これら吸引筒体部を長さ方向に束ねて中心位置に確保される空間部内にその軸方向に沿わせて配設されたコンタクトプローブとで形成した請求項１に記載の基板検査装置。 Each of the suction probe bodies is disposed along the axial direction in a plurality of the suction cylinder parts and a space part secured in the central position by bundling the suction cylinder parts in the length direction. The board inspection apparatus according to claim 1, wherein the board inspection apparatus is formed with a contact probe.
JP2009000568A 2009-01-06 2009-01-06 Board inspection equipment Active JP5236506B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009000568A JP5236506B2 (en) 2009-01-06 2009-01-06 Board inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009000568A JP5236506B2 (en) 2009-01-06 2009-01-06 Board inspection equipment

Publications (2)

Publication Number Publication Date
JP2010159978A true JP2010159978A (en) 2010-07-22
JP5236506B2 JP5236506B2 (en) 2013-07-17

Family

ID=42577253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009000568A Active JP5236506B2 (en) 2009-01-06 2009-01-06 Board inspection equipment

Country Status (1)

Country Link
JP (1) JP5236506B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013541029A (en) * 2010-08-20 2013-11-07 エルジー・ケム・リミテッド Optical filter for composite functional 3D image display device and 3D image display device including the same
CN106483452A (en) * 2016-10-17 2017-03-08 苏州润弘安创自动化科技有限公司 A kind of high accuracy reflection-proof ultrathin flexible circuit board ICT test equipment and its method of work
JP7364100B2 (en) 2019-09-30 2023-10-18 三菱電機株式会社 Inspection method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4626153Y1 (en) * 1968-12-20 1971-09-08
JPS63184348A (en) * 1987-01-26 1988-07-29 Nec Corp Contact pin for semiconductor device
JPS63152564U (en) * 1987-03-25 1988-10-06
JPH06347476A (en) * 1993-06-10 1994-12-22 Nec Corp Probe for signal measurement
JP2008039725A (en) * 2006-08-10 2008-02-21 Matsushita Electric Ind Co Ltd Method and apparatus for electrically inspecting printed wiring board

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4626153Y1 (en) * 1968-12-20 1971-09-08
JPS63184348A (en) * 1987-01-26 1988-07-29 Nec Corp Contact pin for semiconductor device
JPS63152564U (en) * 1987-03-25 1988-10-06
JPH06347476A (en) * 1993-06-10 1994-12-22 Nec Corp Probe for signal measurement
JP2008039725A (en) * 2006-08-10 2008-02-21 Matsushita Electric Ind Co Ltd Method and apparatus for electrically inspecting printed wiring board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013541029A (en) * 2010-08-20 2013-11-07 エルジー・ケム・リミテッド Optical filter for composite functional 3D image display device and 3D image display device including the same
CN106483452A (en) * 2016-10-17 2017-03-08 苏州润弘安创自动化科技有限公司 A kind of high accuracy reflection-proof ultrathin flexible circuit board ICT test equipment and its method of work
CN106483452B (en) * 2016-10-17 2024-03-19 苏州润弘安创自动化科技有限公司 ICT (information and communication technology) testing equipment for high-precision anti-reflection ultrathin flexible circuit board and working method thereof
JP7364100B2 (en) 2019-09-30 2023-10-18 三菱電機株式会社 Inspection method

Also Published As

Publication number Publication date
JP5236506B2 (en) 2013-07-17

Similar Documents

Publication Publication Date Title
CN104931870B (en) Flexible base board detection device
JP2010281583A (en) Inspection jig
KR101164012B1 (en) Probe device
JP2009252853A5 (en)
KR20150053232A (en) Inspection jig
JP2009156676A (en) Substrate inspecting apparatus
JP5236506B2 (en) Board inspection equipment
JP2009300103A (en) Jig for wire probe, and inspection device
KR101111974B1 (en) Probe
JP6084140B2 (en) Electrical inspection device
JP2006226702A (en) Substrate inspection tool, substrate inspection device, and inspection contactor
JP2008039725A5 (en)
US10295591B2 (en) Method and device for testing wafers
JP2008275488A (en) Conductive contact pin, pin retainer, electric component inspection apparatus, and method of manufacturing electric component
JP2012182378A (en) Positioning mechanism and inspection device of probe card
CN101782596A (en) Connecting board for testing touch screen
JP2010033696A (en) Handling robot of magnetic head assembly, magnetic head test method and magnetic head tester
KR101192209B1 (en) The fixture for circuit board inspection
TWI663407B (en) Probe card device and three-dimensional signal transfer structure
JP2008232851A (en) Probe unit and inspection device
JP2010085398A5 (en)
JP4897558B2 (en) Probe unit and inspection device
JP6697913B2 (en) probe
JP2011053129A (en) Electric inspection method
JP2010083663A (en) Substrate flotation device, substrate inspection device and substrate inspection method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20120105

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20121112

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121114

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130306

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130327

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160405

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250