JP2010060677A - Tool for measuring film surface shape, and method of measurement - Google Patents

Tool for measuring film surface shape, and method of measurement Download PDF

Info

Publication number
JP2010060677A
JP2010060677A JP2008224295A JP2008224295A JP2010060677A JP 2010060677 A JP2010060677 A JP 2010060677A JP 2008224295 A JP2008224295 A JP 2008224295A JP 2008224295 A JP2008224295 A JP 2008224295A JP 2010060677 A JP2010060677 A JP 2010060677A
Authority
JP
Japan
Prior art keywords
film
measurement
measuring
film surface
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008224295A
Other languages
Japanese (ja)
Other versions
JP5282489B2 (en
Inventor
Atsushi Sugizaki
敦 杉崎
Ritsuya Kawasaki
律也 川崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Bakelite Co Ltd
Original Assignee
Sumitomo Bakelite Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Bakelite Co Ltd filed Critical Sumitomo Bakelite Co Ltd
Priority to JP2008224295A priority Critical patent/JP5282489B2/en
Publication of JP2010060677A publication Critical patent/JP2010060677A/en
Application granted granted Critical
Publication of JP5282489B2 publication Critical patent/JP5282489B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fixing tool for measuring a film surface shape and a method of measuring the film surface shape for suppressing the influence of a film fixing method and the like on the measurement data to the minimum, when quantitatively measuring film surface shape. <P>SOLUTION: The fixing tool for measuring film surface shape, being the film fixing tool used when measuring the shape of film surface or the shape of a structure formed on the film surface has: a mechanism for holding the circumference of the measuring area of the film surface from both top and bottom directions of the film; and a mechanism for pulling it in both outward directions of the XY plane of the film. Preferably, the mechanism for holding the film from both top and bottom directions of the film is so constituted that a fixing tool made of parallel flat plates holds the film from both the top and bottom. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、フィルム表面形状測定用治具および測定方法に関する。   The present invention relates to a film surface shape measuring jig and a measuring method.

近年開発が盛んなフィルム基板ディスプレイ用のプラスチック基板は、高い表面平滑性が要求される。これまでのＪＩＳＢ０６０１で定義するＲａのような短周期の表面粗さばかりでなく、数mm〜数cmにわたる周期の表面うねりも、フィルム液晶基板などでは制御する必要性がある。しかしながら、長周期のうねりを測定することは、測定時におけるフィルムの固定状態のばらつきのため困難であった。
また、液晶基板におけるフィルム基板上に形成されたスペーサーや、種々デバイスで必要なＴＦＴなどの微細構造物も、フィルム上に形成した場合にその正確な高さを精度良く測定することは難しい。
これらの測定が難しい原因は、主に２つ考えられる。フィルムが撓むこと、及び異物の影響を受けることである。 A plastic substrate for a film substrate display which has been actively developed in recent years is required to have high surface smoothness. It is necessary to control not only a short-period surface roughness such as Ra defined in JIS B0601 but also a surface waviness of a period ranging from several mm to several cm in a film liquid crystal substrate or the like. However, it has been difficult to measure long-period waviness due to variations in the fixed state of the film during measurement.
Further, it is difficult to accurately measure the height of a fine structure such as a spacer formed on a film substrate in a liquid crystal substrate and a TFT necessary for various devices when formed on the film.
There are two main reasons why these measurements are difficult. The film bends and is affected by foreign matter.

これまでフィルムが撓み易く平滑に固定することが難しいために、ポーラスな固定台に真空吸着させる方法や静電チャックする方法が一般的に行われてきた。しかしながら、これらの方法では、フィルムの下、すなわちフィルムの被測定面の反対面とこれらの固定台の間に噛み込んだ異物の影響を受けてしまう。また、固定台自体の表面性の影響を受けてしまうことがある。
一方、異物の影響を避けるためにフィルムをフリーで置いたり、被測定面の周囲に重石を置いて固定する方法も一般的に行われているが、これでは、フィルムの撓みの影響をうけてしまう。 Conventionally, since the film is easily bent and difficult to fix smoothly, a method of vacuum-adsorbing to a porous fixing table or a method of electrostatic chucking has been generally performed. However, these methods are affected by foreign matter caught under the film, that is, between the opposite surface of the film to be measured and the fixing base. In addition, the surface of the fixing base itself may be affected.
On the other hand, in order to avoid the influence of foreign matter, a method of placing the film free of charge or placing a heavy stone around the surface to be measured is generally used, but this is affected by the bending of the film. End up.

本発明の目的は、フィルム表面形状を定量的に測定する場合に、フィルムの固定方法などによる測定データへの影響を最小限に抑制することのできるフィルム表面形状測定用固定治具とその測定方法を提供することである。   An object of the present invention is to provide a film surface shape measurement fixing jig capable of suppressing the influence on measurement data by a film fixing method or the like when measuring the film surface shape quantitatively, and a measurement method therefor Is to provide.

本発明は以下の通りである。
（１）フィルム表面の形状又はフィルム表面に形成された構造物の形状を測定する際に使用するフィルム固定治具であって、フィルム表面の測定領域の周囲部をフィルムの上下両側方向から挟持する機構、及びフィルムのＸＹ平面の両外側方向に引張る機構を有するフィルム表面形状測定用固定冶具。
（２）フィルムの上下両側方向から挟持する機構が、平行平板の固定冶具でフィルムの上下両側から挟持するものである（１）記載のフィルム表面形状測定用固定冶具。
（３）フィルムを上下両側から挟持する力、及びフィルムのＸＹ平面の両外側方向に引張る力をそれぞれ調整する機構を有する（１）又は（２）記載のフィルム表面形状測定用固定冶具。
（４）（１）〜（３）いずれか記載のフィルム表面形状測定用固定冶具を用いて、フィルム表面形状又はフィルム表面に形成された構造物の形状を測定する測定方法であって、フィルムのＸＹ平面の両外側方向に引張る力が、フィルムを上下方向から挟持する最大摩擦力よりも大きい状態で測定する測定方法。 The present invention is as follows.
(1) A film fixing jig used when measuring the shape of the film surface or the shape of a structure formed on the film surface, and sandwiches the periphery of the measurement area on the film surface from both the upper and lower sides of the film. A fixing jig for measuring the film surface shape, which has a mechanism and a mechanism for pulling in both outer directions of the XY plane of the film.
(2) The fixing tool for measuring the film surface shape according to (1), wherein the mechanism for holding the film from both the upper and lower sides of the film is to hold the film from both the upper and lower sides of the film with a parallel plate fixing jig.
(3) The fixing tool for measuring the film surface shape according to (1) or (2), which has a mechanism for adjusting a force for clamping the film from both upper and lower sides and a force for pulling the film in both outer directions of the XY plane.
(4) A measuring method for measuring the film surface shape or the shape of a structure formed on the film surface using the film surface shape measuring fixing jig according to any one of (1) to (3), A measurement method in which the force of pulling in both outer directions of the XY plane is measured in a state where the force is greater than the maximum frictional force for clamping the film from above and below.

本発明のフィルム表面形状測定用固定治具及び測定方法によれば、フィルムの固定方法などによる測定データへの影響を最小限に抑制して精度良くフィルム表面形状を定量的に測定することが可能になる。   According to the film surface shape measuring fixture and the measuring method of the present invention, it is possible to quantitatively measure the film surface shape with high accuracy while minimizing the influence of the film fixing method on the measurement data. become.

本発明は、フィルム表面の形状又はフィルム表面に形成された構造物の形状を測定する際に使用するフィルム固定治具であって、フィルム表面の測定領域の周囲部をフィルムの上下両側方向から挟持する機構、及びフィルムのＸＹ平面の両外側方向に引張る機構を有するフィルム表面形状測定用固定冶具である。   The present invention is a film fixing jig used for measuring the shape of a film surface or the shape of a structure formed on the film surface, and sandwiches the periphery of the measurement area on the film surface from both the upper and lower sides of the film. And a fixing jig for measuring the film surface shape having a mechanism for pulling in the both outer directions of the XY plane of the film.

従来のフィルムの固定方法には２つの問題点があった。すなわち（１）フィルムが撓むこと、及び（２）噛み込み異物の影響を受けることである。これらの問題点を解決するために、本発明では、（１）フィルムを被測定面外側に平行にテンションをかけてフィルム表面の本来の形状で固定すること、及び（２）フィルムを浮かせて固定すること、の２点を考慮した。   There are two problems with conventional film fixing methods. That is, (1) the film bends, and (2) it is affected by biting foreign matter. In order to solve these problems, in the present invention, (1) the film is fixed in the original shape of the film surface by applying tension in parallel to the outside of the surface to be measured, and (2) the film is fixed by floating. 2 points were considered.

本発明の固定冶具の第１の実施形態の一例を図１、図２に示す。測定サンプルのフィルム１は、測定領域の周囲部を２枚の平行平板２，３による固定冶具で上下両側方向から挟持される。又、フィルムは周辺部をチャック４で保持され、バネ６によりＸＹ平面の両外側方向に引張られ、フィルムが撓まないように、適度なテンションを与えられる。   An example of the first embodiment of the fixing jig of the present invention is shown in FIGS. The film 1 of the measurement sample is sandwiched around the measurement area from both the upper and lower sides by a fixing jig made of two parallel flat plates 2 and 3. In addition, the film is held at the periphery by the chuck 4 and is pulled by the spring 6 toward both outer sides of the XY plane, so that an appropriate tension is applied so that the film does not bend.

本発明に使用されるフィルムのサイズは、特に限定されないが、５０〜５００ｍｍ×５０〜５００ｍｍ程度で、厚みは０．０５〜２ｍｍ程度である。フィルムの材質は特に限定されないが、例えば、ポリエーテルスルホン樹脂、ポリエチレンテレフタレート樹脂、ポリカーボネート樹脂等の熱可塑性樹脂、エポキシ樹脂、アクリル樹脂等の熱硬化性樹脂、又はこれらの樹脂と無機物との複合体で可撓性を有するものが用いられる。   The size of the film used in the present invention is not particularly limited, but is about 50 to 500 mm × 50 to 500 mm and the thickness is about 0.05 to 2 mm. The material of the film is not particularly limited. For example, thermoplastic resins such as polyethersulfone resin, polyethylene terephthalate resin, polycarbonate resin, thermosetting resins such as epoxy resin and acrylic resin, or composites of these resins and inorganic substances A flexible one is used.

フィルムを上下両側方向から挟持する平行平板の材質は、特に限定されないが、アルミニウム、ステンレス、チタンなどの金属材料、セラミック材料、アクリル樹脂、ポリカーボネート樹脂、エポキシ樹脂、フェノール樹脂、ポリエーテルエーテルケトン樹脂などの樹脂材料、又はこれらの材料の複合体を使用することができる。
平行平板のサイズは、使用されるフィルムの測定領域より大きいことが必要であり、厚みは１〜１０ｍｍ程度である。 The material of the parallel plate that sandwiches the film from both the upper and lower sides is not particularly limited, but metal materials such as aluminum, stainless steel, titanium, ceramic materials, acrylic resin, polycarbonate resin, epoxy resin, phenol resin, polyether ether ketone resin, etc. These resin materials or composites of these materials can be used.
The size of the parallel plate needs to be larger than the measurement area of the film to be used, and the thickness is about 1 to 10 mm.

平行平板による固定治具は、フィルムの測定領域、及びその周囲のチャック固定部は穴開け加工等により部材が除去されていて、窓枠状の構造を有することが好ましい。   It is preferable that a fixing jig using a parallel plate has a window frame-like structure in which a film measurement region and a chuck fixing portion around the film are removed by drilling or the like.

フィルムの周辺部を保持するチャック４、及び平行平板の最周辺部を保持するチャック５は、目玉クリップ等を用いることができる。   An eyeball clip or the like can be used for the chuck 4 for holding the peripheral portion of the film and the chuck 5 for holding the outermost peripheral portion of the parallel plate.

フィルムのＸＹ平面の両外側方向に引張る機構としては、ゴム状弾性体、バネ等任意の方法を用いることができるが、バネ６として引張りコイルばねを使用することが好ましい。引張りコイルばねは、フィルムの各辺に少なくとも１つ設置し、各辺に３つ以上設置することが好ましい。   As a mechanism for pulling in the both outer directions of the XY plane of the film, any method such as a rubber-like elastic body or a spring can be used, but it is preferable to use a tension coil spring as the spring 6. It is preferable that at least one tension coil spring is installed on each side of the film, and three or more tension coil springs are installed on each side.

本発明の固定冶具の第２の実施形態の一例を図３、図４に示す。これは、第１の実施形態において、上下チャック力調整用ネジ７を設置し、上下の板を締め付ける力を調整できるようにした。更に、フィルム張力調整用ネジ８を、ばねに直結して設置し、ばねの伸び量を定量的に調整できるようにした。これらにより、フィルムを上下両側から挟持する力、及びフィルムのＸＹ平面の両外側方向に引張る力をそれぞれ調整することが可能となる。   An example of the second embodiment of the fixing jig of the present invention is shown in FIGS. In the first embodiment, the upper and lower chuck force adjusting screws 7 are installed so that the force for tightening the upper and lower plates can be adjusted. Furthermore, the film tension adjusting screw 8 is directly connected to the spring so that the amount of extension of the spring can be adjusted quantitatively. By these, it becomes possible to adjust the force which clamps a film from the up-and-down both sides, and the force pulled to the both outer sides of XY plane of a film, respectively.

これらの固定治具を使用して、フィルム表面形状又はフィルム表面に形成された構造物の形状を測定することができる。本発明の測定方法においては、フィルムのＸＹ平面の両外側方向に引張る力が、フィルムを上下方向から挟持する最大摩擦力よりも大きい状態で測定することが好ましい。これは、フィルムの被測定範囲の周囲を挟持した治具の固定する力よりも、フィルムが外側に引っ張られる力が勝るために、被測定部を撓まずに測定することができるためである。   Using these fixtures, the film surface shape or the shape of the structure formed on the film surface can be measured. In the measuring method of this invention, it is preferable to measure in the state where the force pulling in the both outer directions of the XY plane of the film is larger than the maximum frictional force for sandwiching the film from above and below. This is because the portion to be measured can be measured without bending because the force by which the film is pulled outward is superior to the force by which the jig holding the periphery of the measurement range of the film is fixed.

本発明の測定方法は、フィルム表面形状又はフィルム表面に形成された構造物の形状として、表面粗さ、表面平滑性、凹凸形状、表面のうねり、厚み等の測定に利用できる。   The measuring method of the present invention can be used for measuring surface roughness, surface smoothness, uneven shape, surface waviness, thickness and the like as the film surface shape or the shape of the structure formed on the film surface.

(実施例１)
被測定サンプルフィルムの固定治具として、図１、２に示す治具を作製した。１６０ｍｍ角、厚み５ｍｍの表面平滑なアクリル板２枚を被測定部にあたる中央部５０ｍｍ角と、周囲のチャック治具固定用穴部８か所(各穴間距離は７．５ｍｍ)を炭酸ガスレーザーで穴開け加工した。また、チャック治具には、フィルムを両側から挟むことのできる目玉クリップを用い、サンプルと実際に接触するチャック部の摩擦係数を上げるため、クリップ先端にシリコンゴムを貼り滑り止めとした。バネには自由長１０ｍｍの引張コイルばね用いた。バネ定数の異なるバネを準備し、フィルムの種類により、適宜調整するようにした。この治具を用いたサンプルフィルムのセットの仕方は、図１、２に示す通りである。 (Example 1)
1 and 2 were produced as fixtures for the sample film to be measured. Carbon dioxide laser for two centrally smooth acrylic plates of 160mm square and 5mm thickness, 50mm square in the center, which corresponds to the part to be measured, and eight holes for fixing the chuck jig (the distance between each hole is 7.5mm) Drilled with. In addition, an eyeball clip capable of sandwiching the film from both sides was used as the chuck jig, and in order to increase the friction coefficient of the chuck portion actually in contact with the sample, silicone rubber was attached to the tip of the clip to prevent slippage. A tensile coil spring having a free length of 10 mm was used as the spring. Springes having different spring constants were prepared and adjusted appropriately according to the type of film. The method of setting the sample film using this jig is as shown in FIGS.

(実施例２)
被測定サンプルフィルムの固定治具として、図３、４に示す治具を作製した。実施例１に示す治具に対し、チャック力調整用ネジ上下の板を締め付ける力を調整できるようにした。更に、張力調整用ネジは、バネに直結した構造にして、バネの伸び量を定量的に調整できるようにした。 (Example 2)
3 and 4 were produced as fixtures for the sample film to be measured. With respect to the jig shown in Example 1, the force for tightening the upper and lower plates of the chuck force adjusting screw can be adjusted. Furthermore, the tension adjusting screw has a structure directly connected to the spring so that the amount of extension of the spring can be quantitatively adjusted.

(実施例３)
実施例１の治具を用いて、ＰＥＴフィルム(東洋紡績製コスモシャインA4100,厚み１００μｍ)の表面凹凸を白色干渉計(菱化システム製VertScan2.0R5200H)で測定した。サンプルサイズは９５ｍｍ×９５ｍｍ、測定エリアは３０ｍｍ×２２ｍｍの範囲。実施例１の固定治具にＰＥＴフィルムを固定し、測定を３回繰り返した。次に、一旦測定したフィルムを固定治具から外し、同様の被測定部分が、同じ位置になる様に再セットした。そして、再度測定を３回繰り返した。さらに、同様にサンプルを外し、再セットし、３回測定を繰り返した。
表面凹凸の算出のために、ＪＩＳＢ０６０１の粗さ指標Ｒａを２次元に拡張したＳａを用いた。Ｓａを算出するために、測定データから、４次近似曲面を求め、この近似局面と対応する測定データとの差の絶対値を算出し、全測定点から、この絶対値平均を求め、Ｓａの値として算出した。
以下に測定より求めたＳａ(ｎｍ)値を示す。
(セット1回目,測定1回目)52.47
(セット1回目,測定2回目)52.41
(セット1回目,測定3回目)52.61
(セット2回目,測定1回目)52.17
(セット2回目,測定2回目)52.32
(セット2回目,測定3回目)52.20
(セット3回目,測定1回目)52.01
(セット3回目,測定2回目)52.33
(セット3回目,測定3回目)52.30 Example 3
Using the jig of Example 1, the surface roughness of the PET film (Toyobo Cosmo Shine A4100, thickness 100 μm) was measured with a white interferometer (Ryoka System VertScan 2.0R5200H). The sample size is 95mm x 95mm, and the measurement area is 30mm x 22mm. The PET film was fixed to the fixing jig of Example 1, and the measurement was repeated three times. Next, the film once measured was removed from the fixing jig, and reset so that the same portion to be measured would be in the same position. And measurement was repeated 3 times again. Further, the sample was removed in the same manner, reset, and the measurement was repeated three times.
In order to calculate the surface unevenness, Sa, which is a two-dimensional extension of the roughness index Ra of JIS B0601, was used. In order to calculate Sa, a quaternary approximate curved surface is obtained from the measurement data, the absolute value of the difference between the approximate situation and the corresponding measurement data is calculated, the absolute value average is obtained from all measurement points, and Sa Calculated as value.
The Sa (nm) value obtained from the measurement is shown below.
(First set, first measurement) 52.47
(First set, second measurement) 52.41
(First set, third measurement) 52.61
(2nd set, 1st measurement) 52.17
(2nd set, 2nd measurement) 52.32
(2nd set, 3rd measurement) 52.20
(3rd set, 1st measurement) 52.01
(3rd set, 2nd measurement) 52.33
(3rd set, 3rd measurement) 52.30

(比較例１)
固定無しのフリー状態で実施例３のＰＥＴフィルムの表面性を実施例３の白色干渉計で同様に測定した。セットはサンプルの置き直しを示す。
以下に測定より求めたＳａ(ｎｍ)値を示す。
(セット1回目,測定1回目)792.55
(セット1回目,測定2回目)622.60
(セット1回目,測定3回目)725.19
(セット2回目,測定1回目)1097.62
(セット2回目,測定2回目)1122.83
(セット2回目,測定3回目)825.08
(セット3回目,測定1回目)711.00
(セット3回目,測定2回目)885.79
(セット3回目,測定3回目)591.16 (Comparative Example 1)
The surface property of the PET film of Example 3 was measured in the same manner with the white interferometer of Example 3 in a free state without fixing. The set shows sample repositioning.
The Sa (nm) value obtained from the measurement is shown below.
(First set, first measurement) 792.55
(First set, second measurement) 622.60
(First set, third measurement) 725.19
(2nd set, 1st measurement) 1097.62
(2nd set, 2nd measurement) 1122.83
(2nd set, 3rd measurement) 825.08
(3rd set, 1st measurement) 711.00
(3rd set, 2nd measurement) 885.79
(3rd set, 3rd measurement) 591.16

(比較例２)
マイクロポーラス(穴径１８μm)真空吸着台に固定して、実施例３のＰＥＴフィルムの表面性を実施例３の白色干渉計で同様に測定した。セットはサンプルを取り外して再度置き直したことを示す。
以下に測定より求めたＳａ(ｎｍ)値を示す。
(セット1回目,測定1回目)91.93
(セット1回目,測定2回目)91.69
(セット1回目,測定3回目)92.01
(セット2回目,測定1回目)170.00
(セット2回目,測定2回目)169.93
(セット2回目,測定3回目)170.18
(セット3回目,測定1回目)67.21
(セット3回目,測定2回目)67.06
(セット3回目,測定3回目)67.30 (Comparative Example 2)
The surface property of the PET film of Example 3 was measured in the same manner with the white interferometer of Example 3 while being fixed to a microporous (hole diameter: 18 μm) vacuum suction table. The set indicates that the sample has been removed and replaced.
The Sa (nm) value obtained from the measurement is shown below.
(First set, first measurement) 91.93
(First set, second measurement) 91.69
(First set, third measurement) 92.01
(2nd set, 1st measurement) 170.00
(2nd set, 2nd measurement) 169.93
(2nd set, 3rd measurement) 170.18
(3rd set, 1st measurement) 67.21
(3rd set, 2nd measurement) 67.06
(3rd set, 3rd measurement) 67.30

(比較例３)
サンプルとして表面平滑なシリコンウェハを用いて、その表面性を実施例３の白色干渉計で同様に測定した。セットはサンプルの置き直しを示す。
以下に測定より求めたＳａ(ｎｍ)値を示す。
(セット1回目,測定1回目)13.26
(セット1回目,測定2回目)13.17
(セット1回目,測定3回目)13.01
(セット2回目,測定1回目)12.98
(セット2回目,測定2回目)13.11
(セット2回目,測定3回目)13.05
(セット3回目,測定1回目)12.89
(セット3回目,測定2回目)12.99
(セット3回目,測定3回目)12.71 (Comparative Example 3)
Using a silicon wafer having a smooth surface as a sample, the surface property was similarly measured with the white interferometer of Example 3. The set shows sample repositioning.
The Sa (nm) value obtained from the measurement is shown below.
(First set, first measurement) 13.26
(First set, second measurement) 13.17
(First set, third measurement) 13.01
(2nd set, 1st measurement) 12.98
(2nd set, 2nd measurement) 13.11
(2nd set, 3rd measurement) 13.05
(3rd set, 1st measurement) 12.89
(3rd set, 2nd measurement) 12.99
(3rd set, 3rd measurement) 12.71

実施例３では、セットによる測定データのバラツキ、測定の繰り返しのバラツキが共に小さく、精度良くフィルム表面の凹凸が測定できていることがわかる。一方、比較例１ではフリーの状態でフィルムを置いたため、フィルムの反り等の影響で、測定ごとにデータがばらついた。比較例２では、測定の繰り返し精度は良好であるが、サンプルセットごとのデータのバラツキが顕著に認められた。これは、真空吸着台とフィルムとの間に噛み込んだ異物の影響と考えられる。実際に、固定後のフィルム表面を部屋の照明に反射させて観察すると、異物によると考えられる凹凸が認められた。
比較例３では、表面が剛直で平滑性が優れていると考えられるシリコンウエハの測定を行った。これは、実施例３同様セットによる測定データのバラツキ、測定の繰り返しのバラツキが共に小さくなった。このことにより、測定装置の影響でセットのバラツキが出ているのでは無いことが分かった。
以上の実施例と比較例の結果から、本発明の固定治具はサンプルのセットごとのバラツキによる測定データの変動を抑えることができ、フィルム表面形状を測定する上で有効であることがわかった。 In Example 3, it can be seen that the variation in the measurement data by the set and the variation in the repeated measurement are both small, and the unevenness on the film surface can be measured with high accuracy. On the other hand, in Comparative Example 1, since the film was placed in a free state, the data varied for each measurement due to the influence of the warp of the film. In Comparative Example 2, the measurement repeatability was good, but there was a noticeable variation in data for each sample set. This is considered to be due to the influence of foreign matter caught between the vacuum suction table and the film. Actually, when the surface of the fixed film was reflected by the room illumination and observed, irregularities thought to be due to foreign matters were observed.
In Comparative Example 3, a silicon wafer that is considered to have a rigid surface and excellent smoothness was measured. This is because both the variation in the measurement data and the variation in the measurement repeated by the set as in Example 3 were reduced. Thus, it was found that there was no variation in the set due to the influence of the measuring device.
From the results of the above examples and comparative examples, it was found that the fixing jig of the present invention can suppress fluctuations in measurement data due to variations among sample sets, and is effective in measuring the film surface shape. .

本発明の固定治具の第１の実施形態の一例の平面概略図Schematic plan view of an example of the first embodiment of the fixing jig of the present invention 図１の中央部断面の概略図Schematic of the cross section at the center of FIG. 本発明の固定治具の第２の実施形態の一例の平面概略図Schematic plan view of an example of the second embodiment of the fixing jig of the present invention 図２の中央部断面の概略図Schematic of the cross section at the center of FIG.

符号の説明Explanation of symbols

１ フィルム
２ 平行平板（上側）
３ 平行平板（下側）
４ フィルム周辺部保持チャック
５ 平行平板保持チャック
６ バネ
７ 上下チャック力調整用ネジ
８ フィルム張力調整用ネジ 1 Film 2 Parallel plate (Upper side)
3 Parallel plate (lower side)
4 Film Peripheral Holding Chuck 5 Parallel Plate Holding Chuck 6 Spring 7 Vertical Chuck Force Adjustment Screw 8 Film Tension Adjustment Screw

Claims (4)

フィルム表面の形状又はフィルム表面に形成された構造物の形状を測定する際に使用するフィルム固定治具であって、フィルム表面の測定領域の周囲部をフィルムの上下両側方向から挟持する機構、及びフィルムのＸＹ平面の両外側方向に引張る機構を有するフィルム表面形状測定用固定冶具。   A film fixing jig used when measuring the shape of the film surface or the shape of a structure formed on the film surface, and a mechanism for sandwiching the periphery of the measurement area on the film surface from both the upper and lower sides of the film, and A fixing jig for measuring the film surface shape, which has a mechanism for pulling in both outer directions of the XY plane of the film. フィルムの上下両側方向から挟持する機構が、平行平板の固定冶具でフィルムの上下両
側から挟持するものである請求項１記載のフィルム表面形状測定用固定冶具。 2. A fixing jig for film surface shape measurement according to claim 1, wherein the mechanism for holding the film from both the upper and lower sides of the film is held by the parallel plate fixing jig from the upper and lower sides of the film. フィルムを上下両側から挟持する力、及びフィルムのＸＹ平面の両外側方向に引張る力をそれぞれ調整する機構を有する請求項１又は２記載のフィルム表面形状測定用固定冶具。   The fixing tool for measuring the film surface shape according to claim 1 or 2, further comprising a mechanism for adjusting a force for clamping the film from both upper and lower sides and a force for pulling the film in both directions on the XY plane of the film. 請求項１〜３いずれか記載のフィルム表面形状測定用固定冶具を用いて、フィルム表面形状又はフィルム表面に形成された構造物の形状を測定する測定方法であって、フィルムのＸＹ平面の両外側方向に引張る力が、フィルムを上下方向から挟持する最大摩擦力よりも大きい状態で測定する測定方法。   A measuring method for measuring the film surface shape or the shape of a structure formed on the film surface using the film surface shape measuring fixture according to any one of claims 1 to 3, wherein both outer sides of the XY plane of the film A measuring method in which the force of pulling in the direction is larger than the maximum frictional force for sandwiching the film from above and below.
JP2008224295A 2008-09-02 2008-09-02 Film surface shape measuring jig and measuring method Expired - Fee Related JP5282489B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008224295A JP5282489B2 (en) 2008-09-02 2008-09-02 Film surface shape measuring jig and measuring method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008224295A JP5282489B2 (en) 2008-09-02 2008-09-02 Film surface shape measuring jig and measuring method

Publications (2)

Publication Number Publication Date
JP2010060677A true JP2010060677A (en) 2010-03-18
JP5282489B2 JP5282489B2 (en) 2013-09-04

Family

ID=42187567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008224295A Expired - Fee Related JP5282489B2 (en) 2008-09-02 2008-09-02 Film surface shape measuring jig and measuring method

Country Status (1)

Country Link
JP (1) JP5282489B2 (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64406A (en) * 1987-06-23 1989-01-05 Nidek Co Ltd Instrument for measuring shape of sample
JPH0552501A (en) * 1991-08-23 1993-03-02 Mitsubishi Electric Corp Measuring device
JPH0915119A (en) * 1995-06-28 1997-01-17 Sony Corp Method for fixing and measuring surface profile measuring sample of filmy strip
JP2001165651A (en) * 1999-12-07 2001-06-22 Toa Engineering Co Ltd Detector and detecting method for curve of outer wall material
JP2001277457A (en) * 2000-03-29 2001-10-09 Kyocera Corp Laminating device and laminating method using the same
JP2002273631A (en) * 2001-03-15 2002-09-25 Matsushita Electric Ind Co Ltd Method and device for holding and positioning work
JP3135577U (en) * 2007-07-10 2007-09-20 松栄ゴム工業株式会社 Sheet material forming equipment

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS64406A (en) * 1987-06-23 1989-01-05 Nidek Co Ltd Instrument for measuring shape of sample
JPH0552501A (en) * 1991-08-23 1993-03-02 Mitsubishi Electric Corp Measuring device
JPH0915119A (en) * 1995-06-28 1997-01-17 Sony Corp Method for fixing and measuring surface profile measuring sample of filmy strip
JP2001165651A (en) * 1999-12-07 2001-06-22 Toa Engineering Co Ltd Detector and detecting method for curve of outer wall material
JP2001277457A (en) * 2000-03-29 2001-10-09 Kyocera Corp Laminating device and laminating method using the same
JP2002273631A (en) * 2001-03-15 2002-09-25 Matsushita Electric Ind Co Ltd Method and device for holding and positioning work
JP3135577U (en) * 2007-07-10 2007-09-20 松栄ゴム工業株式会社 Sheet material forming equipment

Also Published As

Publication number Publication date
JP5282489B2 (en) 2013-09-04

Similar Documents

Publication Publication Date Title
JP4022527B2 (en) Apparatus and method for supporting and carrying thin opaque plates
JP6198016B2 (en) Manufacturing method of optical member and manufacturing method of lens
JP2008203092A (en) Bending fatigue testing device
US9575282B2 (en) Apparatus for fixing solid immersion lens
JP5282489B2 (en) Film surface shape measuring jig and measuring method
US20150351255A1 (en) Manufacturing jig and manufacturing apparatus for temperature measuring sample
US11886031B2 (en) Optical assemblies and apparatuses and methods for aligning components of optical assemblies
US11549872B2 (en) Methods and apparatus for determining a crush strength of an edge
DE602008001548D1 (en) Measuring method of creep of a thin film sandwiched between two rigid substrates and having one end thereof clamped
JP6835629B2 (en) Equipment and methods for mounting the measuring scale
JP5457237B2 (en) Liquid adhesion measuring device, liquid adhesion measuring method
JP2014224705A (en) Scale holding device and encoder
KR101667598B1 (en) COUPLING APPARATUS FOR SiC REFLEX MIRROR
TW201039198A (en) Wire stretching device
JP2013178156A (en) Measuring object support device and shape measuring device
TW201947293A (en) Flexible display device
US20200312204A1 (en) Clamper and lighting fixture
WO2020073452A1 (en) Roughness measurement clamp and measurement method therefor
JP2009276168A (en) Sample holder of scanning probe microscope and sample measurement method
CN213702851U (en) Sample grinding auxiliary tool
JP6162411B2 (en) Film sample fixing method, fixing holder, and film characteristic analysis method using them
JP5136279B2 (en) Pencil scratch testing machine
JP3232134U (en) Flexibility evaluation device
CN210771358U (en) Pressure controller mounting structure
RU162093U1 (en) DEVICE FOR CREATING ELASTIC STRESSES IN THIN FILMS

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110428

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20130129

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130401

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130430

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130513

LAPS Cancellation because of no payment of annual fees