JP2009521176A - Mems共振器、その製造方法、およびmems発振器 - Google Patents
Mems共振器、その製造方法、およびmems発振器 Download PDFInfo
- Publication number
- JP2009521176A JP2009521176A JP2008546790A JP2008546790A JP2009521176A JP 2009521176 A JP2009521176 A JP 2009521176A JP 2008546790 A JP2008546790 A JP 2008546790A JP 2008546790 A JP2008546790 A JP 2008546790A JP 2009521176 A JP2009521176 A JP 2009521176A
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- Prior art keywords
- movable element
- young
- modulus
- temperature coefficient
- mems resonator
- Prior art date
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- 238000004519 manufacturing process Methods 0.000 title claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 38
- 229910052710 silicon Inorganic materials 0.000 claims description 35
- 239000010703 silicon Substances 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 30
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 30
- 239000000463 material Substances 0.000 claims description 28
- 230000003647 oxidation Effects 0.000 claims description 20
- 238000007254 oxidation reaction Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 54
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 32
- 238000000151 deposition Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 238000001015 X-ray lithography Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- -1 germanium (Ge) Chemical class 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002164 ion-beam lithography Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02433—Means for compensation or elimination of undesired effects
- H03H9/02448—Means for compensation or elimination of undesired effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/0072—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
- H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
- H03H9/2447—Beam resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Micromachines (AREA)
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP05112938 | 2005-12-23 | ||
PCT/IB2006/054931 WO2007072409A2 (en) | 2005-12-23 | 2006-12-18 | A mems resonator, a method of manufacturing thereof, and a mems oscillator |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009521176A true JP2009521176A (ja) | 2009-05-28 |
Family
ID=38066692
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008546790A Withdrawn JP2009521176A (ja) | 2005-12-23 | 2006-12-18 | Mems共振器、その製造方法、およびmems発振器 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7847649B2 (zh) |
EP (1) | EP1974465B1 (zh) |
JP (1) | JP2009521176A (zh) |
CN (1) | CN101346879B (zh) |
WO (1) | WO2007072409A2 (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011041282A (ja) * | 2009-08-13 | 2011-02-24 | Eta Sa Manufacture Horlogere Suisse | 熱補償機械共振子 |
JP2011259426A (ja) * | 2010-06-10 | 2011-12-22 | Swatch Group Research & Development Ltd | 1次係数および2次係数の温度補償型共振子 |
JP2013506334A (ja) * | 2009-09-28 | 2013-02-21 | テクノロギアン トゥトキムスケスクス ヴェーテーテー | マイクロメカニカル共振器 |
JP2013525743A (ja) * | 2009-12-15 | 2013-06-20 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | 少なくとも1次と2次の温度補正が施された振動子 |
JP2014519260A (ja) * | 2011-05-13 | 2014-08-07 | テクノロジアン テュトキムスケスクス ヴェーテーテー | 微小機械素子及びその設計方法 |
JP2015501591A (ja) * | 2011-11-04 | 2015-01-15 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | セラミック温度補償型共振器 |
JPWO2014185280A1 (ja) * | 2013-05-13 | 2017-02-23 | 株式会社村田製作所 | 振動装置 |
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US7911010B2 (en) * | 2006-07-17 | 2011-03-22 | Kwj Engineering, Inc. | Apparatus and method for microfabricated multi-dimensional sensors and sensing systems |
US7639104B1 (en) * | 2007-03-09 | 2009-12-29 | Silicon Clocks, Inc. | Method for temperature compensation in MEMS resonators with isolated regions of distinct material |
US8426932B2 (en) | 2007-07-17 | 2013-04-23 | Kwj Engineering Inc. | Apparatus and method for microfabricated multi-dimensional sensors and sensing systems |
US8884382B2 (en) * | 2007-07-17 | 2014-11-11 | Kwj Engineering, Inc. | Multi-Dimensional sensors and sensing systems |
US8310016B2 (en) * | 2007-07-17 | 2012-11-13 | Kwj Engineering, Inc. | Apparatus and method for microfabricated multi-dimensional sensors and sensing systems |
JP5122888B2 (ja) * | 2007-08-27 | 2013-01-16 | セイコーインスツル株式会社 | 発振子、発振子の製造方法、及び発振器 |
JP4995675B2 (ja) * | 2007-09-10 | 2012-08-08 | セイコーインスツル株式会社 | 振動子デバイス及び発振器 |
US8234774B2 (en) | 2007-12-21 | 2012-08-07 | Sitime Corporation | Method for fabricating a microelectromechanical system (MEMS) resonator |
WO2009097167A2 (en) * | 2008-01-05 | 2009-08-06 | The Regents Of The University Of California | Partially-filled electrode-to-resonator gap |
JP2009190150A (ja) * | 2008-02-18 | 2009-08-27 | Sanyo Electric Co Ltd | マイクロエレクトロメカニカルデバイス及びその製造方法。 |
JP5316748B2 (ja) * | 2008-03-28 | 2013-10-16 | セイコーエプソン株式会社 | 振動片の製造方法 |
US7990229B2 (en) | 2008-04-01 | 2011-08-02 | Sand9, Inc. | Methods and devices for compensating a signal using resonators |
US8044736B2 (en) | 2008-04-29 | 2011-10-25 | Sand9, Inc. | Timing oscillators and related methods |
US8044737B2 (en) | 2008-04-29 | 2011-10-25 | Sand9, Inc. | Timing oscillators and related methods |
US8476809B2 (en) | 2008-04-29 | 2013-07-02 | Sand 9, Inc. | Microelectromechanical systems (MEMS) resonators and related apparatus and methods |
US8410868B2 (en) | 2009-06-04 | 2013-04-02 | Sand 9, Inc. | Methods and apparatus for temperature control of devices and mechanical resonating structures |
JP5561959B2 (ja) * | 2008-06-25 | 2014-07-30 | セイコーインスツル株式会社 | 静電振動子及び電子機器 |
FR2933824B1 (fr) * | 2008-07-11 | 2010-08-13 | St Microelectronics Sa | Resonateur a ondes de volume |
US8111108B2 (en) | 2008-07-29 | 2012-02-07 | Sand9, Inc. | Micromechanical resonating devices and related methods |
US7999635B1 (en) * | 2008-07-29 | 2011-08-16 | Silicon Laboratories Inc. | Out-of plane MEMS resonator with static out-of-plane deflection |
US7888843B2 (en) | 2008-09-10 | 2011-02-15 | Georgia Tech Research Corporation | Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein |
US8689426B2 (en) | 2008-12-17 | 2014-04-08 | Sand 9, Inc. | Method of manufacturing a resonating structure |
WO2010077311A1 (en) | 2008-12-17 | 2010-07-08 | Sand9, Inc. | Multi-port mechanical resonating devices and related methods |
EP2377176B1 (en) | 2008-12-17 | 2016-12-14 | Analog Devices, Inc. | Mechanical resonating structures including a temperature compensation structure |
US8040207B2 (en) | 2009-01-15 | 2011-10-18 | Infineon Technologies Ag | MEMS resonator devices with a plurality of mass elements formed thereon |
US7939990B2 (en) | 2009-01-30 | 2011-05-10 | Integrated Device Technology, Inc. | Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations |
US9048811B2 (en) | 2009-03-31 | 2015-06-02 | Sand 9, Inc. | Integration of piezoelectric materials with substrates |
US8158448B2 (en) * | 2009-04-27 | 2012-04-17 | The Boeing Company | Resonator and methods of making resonators |
FR2946478A1 (fr) * | 2009-06-08 | 2010-12-10 | St Microelectronics Sa | Resonateur a ondes de volume. |
FR2946971B1 (fr) * | 2009-06-18 | 2011-07-15 | Commissariat Energie Atomique | Procede d'excitation d'un element mobile d'une microstructure |
US8106724B1 (en) | 2009-07-23 | 2012-01-31 | Integrated Device Technologies, Inc. | Thin-film bulk acoustic resonators having perforated resonator body supports that enhance quality factor |
EP2302792B1 (en) | 2009-09-22 | 2012-11-14 | Nxp B.V. | Resonator |
EP2339748B1 (en) * | 2009-09-28 | 2018-12-19 | Nxp B.V. | Resonator |
JP5471303B2 (ja) | 2009-10-27 | 2014-04-16 | セイコーエプソン株式会社 | 振動片及び振動子 |
US8736388B2 (en) | 2009-12-23 | 2014-05-27 | Sand 9, Inc. | Oscillators having arbitrary frequencies and related systems and methods |
WO2011109382A1 (en) | 2010-03-01 | 2011-09-09 | Sand9, Inc. | Microelectromechanical gyroscopes and related apparatus and methods |
US8833161B2 (en) | 2010-04-20 | 2014-09-16 | Sand 9, Inc. | Microelectromechanical gyroscopes and related apparatus and methods |
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WO2012040043A1 (en) | 2010-09-20 | 2012-03-29 | Sand9, Inc. | Resonant sensing using extensional modes of a plate |
FR2966305B1 (fr) | 2010-10-15 | 2013-07-12 | Commissariat Energie Atomique | Structure acoustique heterogene formee a partir d'un materiau homogene |
US8501515B1 (en) | 2011-02-25 | 2013-08-06 | Integrated Device Technology Inc. | Methods of forming micro-electromechanical resonators using passive compensation techniques |
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US8643140B2 (en) * | 2011-07-11 | 2014-02-04 | United Microelectronics Corp. | Suspended beam for use in MEMS device |
US9431993B1 (en) * | 2011-09-26 | 2016-08-30 | Micrel, Incorporated | Temperature compensated resonator with a pair of spaced apart internal dielectric layers |
US8610336B1 (en) | 2011-09-30 | 2013-12-17 | Integrated Device Technology Inc | Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies |
US9383208B2 (en) | 2011-10-13 | 2016-07-05 | Analog Devices, Inc. | Electromechanical magnetometer and applications thereof |
US8593230B2 (en) | 2011-10-14 | 2013-11-26 | Nxp, B.V. | Circuit and method for correcting temperature dependence of frequency for piezoresistive oscillators |
US9000833B2 (en) * | 2013-03-06 | 2015-04-07 | Silicon Laboratories Inc. | Compensation of changes in MEMS capacitive transduction |
TWI522307B (zh) | 2013-03-25 | 2016-02-21 | 財團法人工業技術研究院 | 複合材料的微機電裝置與其製作方法 |
US9702769B2 (en) | 2013-06-11 | 2017-07-11 | Intel Corporation | Self-calibrated thermal sensors of an integrated circuit die |
US9489000B2 (en) | 2013-09-30 | 2016-11-08 | Silicon Laboratories Inc. | Use of a thermistor within a reference signal generator |
US10254176B2 (en) | 2014-04-07 | 2019-04-09 | Silicon Laboratories Inc. | Strain-insensitive temperature sensor |
US9804046B2 (en) * | 2015-10-27 | 2017-10-31 | DunAn Sensing, LLC | Pressure sensor with support structure for non-silicon diaphragm |
US10800649B2 (en) | 2016-11-28 | 2020-10-13 | Analog Devices International Unlimited Company | Planar processing of suspended microelectromechanical systems (MEMS) devices |
US9989927B1 (en) | 2016-11-30 | 2018-06-05 | Silicon Laboratories Inc. | Resistance-to-frequency converter |
WO2018182657A1 (en) * | 2017-03-30 | 2018-10-04 | Intel Corporation | Compensation for temperature coefficient of resonant frequency using atomic layer deposition materials |
US10843920B2 (en) | 2019-03-08 | 2020-11-24 | Analog Devices International Unlimited Company | Suspended microelectromechanical system (MEMS) devices |
WO2021141636A1 (en) * | 2020-01-08 | 2021-07-15 | Invensense, Inc. | Method and system for sensor configuration |
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-
2006
- 2006-12-18 US US12/158,985 patent/US7847649B2/en active Active
- 2006-12-18 US US12/158,986 patent/US8058952B2/en active Active
- 2006-12-18 WO PCT/IB2006/054931 patent/WO2007072409A2/en active Application Filing
- 2006-12-18 JP JP2008546790A patent/JP2009521176A/ja not_active Withdrawn
- 2006-12-18 EP EP06842592.5A patent/EP1974465B1/en not_active Not-in-force
- 2006-12-18 CN CN200680048616.XA patent/CN101346879B/zh not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011041282A (ja) * | 2009-08-13 | 2011-02-24 | Eta Sa Manufacture Horlogere Suisse | 熱補償機械共振子 |
JP2013506334A (ja) * | 2009-09-28 | 2013-02-21 | テクノロギアン トゥトキムスケスクス ヴェーテーテー | マイクロメカニカル共振器 |
JP2013525743A (ja) * | 2009-12-15 | 2013-06-20 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | 少なくとも1次と2次の温度補正が施された振動子 |
JP2011259426A (ja) * | 2010-06-10 | 2011-12-22 | Swatch Group Research & Development Ltd | 1次係数および2次係数の温度補償型共振子 |
JP2014519260A (ja) * | 2011-05-13 | 2014-08-07 | テクノロジアン テュトキムスケスクス ヴェーテーテー | 微小機械素子及びその設計方法 |
JP2015501591A (ja) * | 2011-11-04 | 2015-01-15 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | セラミック温度補償型共振器 |
JP2016191711A (ja) * | 2011-11-04 | 2016-11-10 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | セラミック温度補償型共振器 |
JPWO2014185280A1 (ja) * | 2013-05-13 | 2017-02-23 | 株式会社村田製作所 | 振動装置 |
Also Published As
Publication number | Publication date |
---|---|
EP1974465B1 (en) | 2015-04-15 |
WO2007072409A2 (en) | 2007-06-28 |
WO2007072409A3 (en) | 2007-10-18 |
US20090121808A1 (en) | 2009-05-14 |
US7847649B2 (en) | 2010-12-07 |
US20090219104A1 (en) | 2009-09-03 |
CN101346879A (zh) | 2009-01-14 |
US8058952B2 (en) | 2011-11-15 |
CN101346879B (zh) | 2012-12-05 |
EP1974465A2 (en) | 2008-10-01 |
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