JP2009255141A - High-efficiency hydrogen-storing metallic material and method for manufacturing the same - Google Patents
High-efficiency hydrogen-storing metallic material and method for manufacturing the same Download PDFInfo
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Abstract
Description
本発明は高効率水素吸蔵金属材およびその製造方法に関し、特に、フェムト秒レーザを用いた高効率水素吸蔵金属材の有利な製造方法に関する。 The present invention relates to a high-efficiency hydrogen storage metal material and a method for manufacturing the same, and more particularly to an advantageous method for manufacturing a high-efficiency hydrogen storage metal material using a femtosecond laser.
近年、低環境負荷なエネルギーシステムとして水素を用いたエネルギーシステムが注目されており、小は水素電池から大は水素を燃やす内燃機関まで、幅広い研究が遂行されている。水素エネルギーを有効に利用するためには、水素を効率よく貯蔵する技術が必要不可欠であり、その一翼を担っているのが水素吸蔵機能を有する材料である。 In recent years, an energy system using hydrogen has attracted attention as an energy system with a low environmental load, and a wide range of research has been carried out from small hydrogen batteries to large internal combustion engines that burn hydrogen. In order to effectively use hydrogen energy, a technique for efficiently storing hydrogen is indispensable, and a material having a hydrogen storage function plays a part in the technology.
水素を用いたエネルギーシステムに関する従来の技術では、水素吸蔵機能を有する材料としてバルク材を用いている（特許文献１および２参照）。水素吸蔵機能を有する材料としてバルク材を用いた場合は水素吸蔵量に限界（水素吸蔵機能を有する材料の格子間間隙数の８０％程度）がある。これに対し、水素吸蔵機能を有する材料としてナノ粒子を用いることによって、水素吸蔵量を格子間間隙数の４００％程度にまで高める方法が提案されている（非特許文献１および２参照）。 In the conventional technology related to an energy system using hydrogen, a bulk material is used as a material having a hydrogen storage function (see Patent Documents 1 and 2). When a bulk material is used as a material having a hydrogen storage function, the amount of hydrogen storage is limited (about 80% of the number of interstitial gaps of the material having a hydrogen storage function). On the other hand, a method has been proposed in which nanoparticles are used as a material having a hydrogen storage function to increase the hydrogen storage amount to about 400% of the number of interstitial gaps (see Non-Patent Documents 1 and 2).
水素吸蔵機能を有する材料としてナノ粒子を用いることが水素吸蔵量の観点から効果的であるのは上述の通りであるが、ナノ粒子は製法が複雑であり、大量生産が困難である。また、ナノ粒子が極めて高コストであることが実用化にとって大きな障害となっている。 As described above, it is effective to use nanoparticles as a material having a hydrogen storage function from the viewpoint of the amount of hydrogen storage. However, the manufacturing method of the nanoparticles is complicated, and mass production is difficult. In addition, the extremely high cost of nanoparticles is a major obstacle to commercialization.
ここで、水素吸蔵機能を有するバルク材の表面をナノ構造化することができれば、該バルク材の水素吸蔵量を大幅に増加させることができるものと思われる。しかしながら、水素吸蔵機能を有するバルク材の表面を簡便にナノ構造化する技術は未だ確立されていないのが現状である。 Here, if the surface of the bulk material having a hydrogen storage function can be nanostructured, it is considered that the hydrogen storage amount of the bulk material can be greatly increased. However, at present, a technology for easily nano-structuring the surface of a bulk material having a hydrogen storage function has not yet been established.
本発明は上記課題に鑑みなされたものであり、フェムト秒レーザを利用して、短時間かつ低コストで水素吸蔵機能を有する金属材の表面にナノメートルオーダーの微細加工を施す方法を提供するものであり、高効率水素吸蔵金属材の簡便な製造方法を提供することを目的とする。 The present invention has been made in view of the above problems, and provides a method for performing micromachining on the surface of a metal material having a hydrogen storage function in a short time and at a low cost using a femtosecond laser. It is an object of the present invention to provide a simple method for producing a highly efficient hydrogen storage metal material.
本発明の高効率水素吸蔵金属材の製造方法は、水素吸蔵機能を有する金属材の表面にフェムト秒レーザを照射し、該照射によって水素吸蔵機能を有する金属材の表面に微細周期構造を形成させるものである。水素吸蔵機能を有する金属材としてはパラジウムを用いることが好ましく、微細周期構造の周期は１ｎｍ〜８００ｎｍであることが好ましい。 The method for producing a high-efficiency hydrogen storage metal material according to the present invention irradiates the surface of a metal material having a hydrogen storage function with a femtosecond laser and forms a fine periodic structure on the surface of the metal material having a hydrogen storage function by the irradiation. Is. Palladium is preferably used as the metal material having a hydrogen storage function, and the period of the fine periodic structure is preferably 1 nm to 800 nm.
本発明の高効率水素吸蔵金属材は、水素吸蔵機能を有する金属材の表面に微細周期構造が形成されているものである。水素吸蔵機能を有する金属材はパラジウムであることが好ましく、微細周期構造の周期は１ｎｍ〜８００ｎｍであることが好ましい。 The highly efficient hydrogen storage metal material of the present invention has a fine periodic structure formed on the surface of a metal material having a hydrogen storage function. The metal material having a hydrogen storage function is preferably palladium, and the period of the fine periodic structure is preferably 1 nm to 800 nm.
本発明の高効率水素吸蔵金属材の製造方法は、水素吸蔵機能を有する金属材のレーザ誘起構造変化を利用しているため、短時間、低コストで水素吸蔵機能を有する金属材の表面に微細周期構造を形成することができる。また、本発明の高効率水素吸蔵金属材は、表面にナノメートルオーダーの微細周期構造を有しているため、効率的に水素を吸蔵することができる。 Since the method for producing a highly efficient hydrogen storage metal material according to the present invention utilizes the laser-induced structural change of a metal material having a hydrogen storage function, the surface of the metal material having a hydrogen storage function is finely formed in a short time and at a low cost. Periodic structures can be formed. Moreover, since the highly efficient hydrogen storage metal material of this invention has the fine periodic structure of a nanometer order on the surface, it can occlude hydrogen efficiently.
図１は本発明の高効率水素吸蔵金属材の製造方法の概略図である。フェムト秒レーザ発振器１０で発生したフェムト秒レーザは減衰器１２、反射ミラー１４、シャッター１６を経由して、プロセスチャンバー３０に入射される。プロセスチャンバー３０に入射したフェムト秒レーザはハーフミラー１８で二つに分けられ、一方のフェムト秒レーザはレンズ２０によってＸＹステージ２４に固定された水素吸蔵能を有する金属材２２の表面に集光される。他方のフェムト秒レーザは反射ミラー１４を経由して、モニタリングシステム２６に入射される。なお、プロセスチャンバー３０内はロータリーポンプ等により、適当な減圧状態となっている。 FIG. 1 is a schematic view of a method for producing a highly efficient hydrogen storage metal material of the present invention. The femtosecond laser generated by the femtosecond laser oscillator 10 is incident on the process chamber 30 via the attenuator 12, the reflection mirror 14, and the shutter 16. The femtosecond laser incident on the process chamber 30 is divided into two by the half mirror 18, and one of the femtosecond lasers is focused on the surface of the metal material 22 having a hydrogen occlusion ability fixed to the XY stage 24 by the lens 20. The The other femtosecond laser is incident on the monitoring system 26 via the reflecting mirror 14. The process chamber 30 is appropriately decompressed by a rotary pump or the like.
水素吸蔵能を有する金属材２２の表面は集光したフェムト秒レーザパルスによって加工され、微細周期構造が形成される。水素吸蔵能を有する金属材２２の位置は適宜ＸＹステージ２４によって制御されるため、水素吸蔵能を有する金属材２２の必要な領域に微細周期構造を形成することができる。また、フェムト秒レーザの状況は随時モニタリングシステム２６によって観測される。 The surface of the metal material 22 having a hydrogen storage capacity is processed by a focused femtosecond laser pulse to form a fine periodic structure. Since the position of the metal material 22 having hydrogen storage capability is appropriately controlled by the XY stage 24, a fine periodic structure can be formed in a necessary region of the metal material 22 having hydrogen storage capability. Further, the status of the femtosecond laser is observed by the monitoring system 26 as needed.
フェムト秒レーザパルスの照射によって生じる、水素吸蔵能を有する金属材２２の表面のアブレーションおよび原子配列構造変化等により、該表面に微細周期構造が形成される。微細周期構造の形状および周期は、照射に用いるフェムト秒レーザの波長、フルエンスおよびパルス数等によって制御することができる。なお、微細周期構造の周期は、照射するフェムト秒レーザの波長と同程度になることが知られており、ナノメートルオーダーの波長を有するフェムト秒レーザを用いることで、ナノメートルオーダーの微細周期構造を得ることができる。 A fine periodic structure is formed on the surface by ablation of the surface of the metal material 22 having a hydrogen storage capacity, change in atomic arrangement structure, and the like caused by irradiation with the femtosecond laser pulse. The shape and period of the fine periodic structure can be controlled by the wavelength, fluence, number of pulses, and the like of the femtosecond laser used for irradiation. The period of the fine periodic structure is known to be approximately the same as the wavelength of the femtosecond laser to be irradiated. By using a femtosecond laser having a wavelength of the nanometer order, the fine periodic structure of the nanometer order is used. Can be obtained.
フェムト秒レーザを用いた微細周期構造の形成に関し、原子番号、原子量、比熱、融点等が近い金属については、ほぼ同一のレーザ条件で同様の加工が達成される。例えば、１６６８℃の融点を有するチタンと１５５５℃の融点を有するパラジウムとは、ほぼ同一のレーザ条件で同様の周期構造が形成されることが予想される。 Regarding the formation of a fine periodic structure using a femtosecond laser, the same processing can be achieved under substantially the same laser conditions for metals having similar atomic numbers, atomic weights, specific heats, melting points, and the like. For example, titanium having a melting point of 1668 ° C. and palladium having a melting point of 1555 ° C. are expected to form a similar periodic structure under almost the same laser conditions.
水素吸蔵能を有する金属材２２としては、種々の水素吸蔵合金を用いることができる。水素吸蔵合金にはＡＢ２型（チタン、マンガン、ジルコニウム、ニッケル等の遷移元素の合金をベースとしたもの）、ＡＢ５型（希土類元素、ニオブ、ジルコニウム１に対して触媒効果を持つ遷移元素（ニッケル、コバルト、アルミニウムなど）５を含む合金をベースとしたもの）、チタン−鉄系、バナジウム系、マグネシウム合金、パラジウム系、カルシウム系合金等が知られているが、パラジウムを用いることが好ましい。 As the metal material 22 having hydrogen storage ability, various hydrogen storage alloys can be used. Hydrogen storage alloys include AB2 type (based on alloys of transition elements such as titanium, manganese, zirconium, nickel), AB5 type (transition elements having a catalytic effect on rare earth elements, niobium, zirconium 1 (nickel, nickel, Cobalt, aluminum, etc.) based on alloys containing 5), titanium-iron-based, vanadium-based, magnesium alloys, palladium-based, calcium-based alloys, etc. are known, but palladium is preferably used.
従来、パラジウム固体内への水素原子の侵入は、パラジウム格子間に０．８個が入るとされていた。これに対し、パラジウム材がナノメートルオーダーの形状を有している場合、２個以上の水素原子がパラジウム格子間に入り、水素吸収効率が圧倒的に高くなることが報告されている。つまり、パラジウム材の表面にナノメートルオーダーの微細周期構造を形成することができれば、高効率な水素吸蔵材を得ることができる。なお、効率的な水素の吸蔵および放出の観点から、水素吸蔵能を有する金属材２２の表面に形成させる微細周期構造の周期は１ｎｍ〜８００ｎｍであることが好ましい。 Conventionally, it has been assumed that 0.8 atoms of hydrogen atoms enter the palladium solid between the palladium lattices. On the other hand, when the palladium material has a shape of nanometer order, it has been reported that two or more hydrogen atoms enter between the palladium lattices, and the hydrogen absorption efficiency is overwhelmingly high. That is, if a fine periodic structure of nanometer order can be formed on the surface of the palladium material, a highly efficient hydrogen storage material can be obtained. In addition, from the viewpoint of efficient occlusion and release of hydrogen, it is preferable that the period of the fine periodic structure formed on the surface of the metal material 22 having hydrogen occlusion capacity is 1 nm to 800 nm.
以下に本発明の実施例及び比較例を図面を参照して説明するが、本発明はこれらの実施例に限定されるものではない。
実施例１
フェムト秒レーザの発振子としてチタン：サファイヤを用いたフェムト秒レーザ加工システムを使用し、チタン板材の表面に微細周期構造を形成させた（チタン板材は高価なパラジウム板材の代替として用いた）。フェムト秒レーザの波長、パルス長、繰り返し速度、ビーム径はそれぞれ８００ｎｍ、１００ｆｓｅｃ、１ｋＨｚ、４ｍｍとした。フェムト秒レーザは焦点距離が１００ｍｍのレンズによって、チタン板材の表面に集光された。被加工材として用いたチタン板材の厚さは１００μｍ、表面粗さは０．０５μｍである。チタン板材の表面におけるフェムト秒レーザのフルエンスは減衰器によって制御され、０．２５、０．７５、１．５Ｊ／ｃｍ２とし、加工には１０パルスを用いた。なお、加工は１３．３ｐａの減圧下で行った。
EXAMPLES Examples and comparative examples of the present invention will be described below with reference to the drawings, but the present invention is not limited to these examples.
Example 1
A femtosecond laser processing system using titanium: sapphire as a femtosecond laser oscillator was used to form a fine periodic structure on the surface of the titanium plate (the titanium plate was used as an alternative to the expensive palladium plate). The wavelength, pulse length, repetition rate, and beam diameter of the femtosecond laser were 800 nm, 100 fsec, 1 kHz, and 4 mm, respectively. The femtosecond laser was focused on the surface of the titanium plate by a lens having a focal length of 100 mm. The titanium plate used as the workpiece has a thickness of 100 μm and a surface roughness of 0.05 μm. The fluence of the femtosecond laser on the surface of the titanium plate was controlled by an attenuator, which was 0.25, 0.75, 1.5 J / cm 2, and 10 pulses were used for processing. The processing was performed under reduced pressure of 13.3 pa.
図２および図３にフルエンス０．２５Ｊ／ｃｍ２のフェムト秒レーザ１０パルスで形成した微細周期構造のＳＥＭ写真（低倍率）およびフルエンス０．２５Ｊ／ｃｍ２のフェムト秒レーザ１０パルスで形成した微細周期構造のＳＥＭ写真（高倍率）を示す。約７００ｎｍの周期を有する微細周期構造が形成されていることが確認された。 2 and SEM photographs of the fine periodic structure formed by the femtosecond laser 10 pulse fluence 0.25 J / cm 2 in FIG. 3 (low magnification) and fluence 0.25 J / cm fine formed by two femtosecond laser 10 pulse The SEM photograph (high magnification) of a periodic structure is shown. It was confirmed that a fine periodic structure having a period of about 700 nm was formed.
図４および図５にフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ１０パルスで形成した微細周期構造のＳＥＭ写真（低倍率）およびフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ１０パルスで形成した微細周期構造のＳＥＭ写真（高倍率）を示す。図４において、異なった形状を有する２つの領域（中心部および外側部）が確認できる。図５は図４の中心部の拡大であるが、微細周期構造に対して垂直方向に、より大きな周期を有する周期構造が形成されている。 4 and finely formed with fluence 0.75 J / cm SEM photograph of the fine periodic structure formed of two femtosecond laser 10 pulse (low magnification) and fluence 0.75 J / cm 2 of the femtosecond laser 10 pulse in FIG. 5 The SEM photograph (high magnification) of a periodic structure is shown. In FIG. 4, two regions (a central portion and an outer portion) having different shapes can be confirmed. FIG. 5 is an enlargement of the central portion of FIG. 4, but a periodic structure having a larger period is formed in a direction perpendicular to the fine periodic structure.
図６および図７にフルエンス１．５０Ｊ／ｃｍ２のフェムト秒レーザ１０パルスで形成した微細周期構造のＳＥＭ写真（低倍率）およびフルエンス１．５０Ｊ／ｃｍ２のフェムト秒レーザ１０パルスで形成した微細周期構造のＳＥＭ写真（高倍率）を示す。図６において、異なった形状を有する３つの領域（中心部、中間部、外側部）が確認できる。外側部には微細周期構造、中間部には微細周期構造および微細周期構造に対して垂直方向に形成されたより大きな周期を有する周期構造が確認される。図７は図６の中心部の拡大であるが、微細周期構造が形成されていない。 6 and 7 show an SEM photograph (low magnification) of a fine periodic structure formed with 10 pulses of a femtosecond laser with a fluence of 1.50 J / cm 2 and a fine structure formed with 10 pulses of a femtosecond laser with a fluence of 1.50 J / cm 2. The SEM photograph (high magnification) of a periodic structure is shown. In FIG. 6, three regions (center portion, intermediate portion, and outer portion) having different shapes can be confirmed. A fine periodic structure is confirmed in the outer portion, and a fine periodic structure and a periodic structure having a larger period formed in a direction perpendicular to the fine periodic structure are confirmed in the intermediate portion. FIG. 7 is an enlargement of the center of FIG. 6, but no fine periodic structure is formed.
図２〜図７より、フェムト秒レーザの照射によって、チタン板材の表面にナノメートルオーダーの周期を有する微細周期構造が形成されることが明らかとなった。また、照射するフェムト秒レーザのフルエンスを変化させることによって、材料表面に形成される微細周期構造を制御し得ることが確認された。 2-7, it became clear that the fine periodic structure which has a period of a nanometer order was formed in the surface of a titanium plate material by irradiation of femtosecond laser. It was also confirmed that the fine periodic structure formed on the material surface can be controlled by changing the fluence of the femtosecond laser to be irradiated.
実施例２
フェムト秒レーザの発振子としてチタン：サファイヤを用いたフェムト秒レーザ加工システムを使用し、チタン板材の表面に微細周期構造を形成させた（チタン板材は高価なパラジウム板材の代替として用いた）。フェムト秒レーザの波長、パルス長、繰り返し速度、ビーム径はそれぞれ８００ｎｍ、１００ｆｓｅｃ、１ｋＨｚ、４ｍｍとした。フェムト秒レーザは焦点距離が１００ｍｍのレンズによって、チタン板材の表面に集光された。被加工材として用いたチタン板材の厚さは１００μｍ、表面粗さは０．０５μｍである。チタン板材の表面におけるフェムト秒レーザのフルエンスは減衰器によって０．７５Ｊ／ｃｍ２に制御し、加工には１０〜１１０パルスを用いた。なお、加工は１３．３ｐａの減圧下で行った。
Example 2
A femtosecond laser processing system using titanium: sapphire as a femtosecond laser oscillator was used to form a fine periodic structure on the surface of the titanium plate (the titanium plate was used as an alternative to the expensive palladium plate). The wavelength, pulse length, repetition rate, and beam diameter of the femtosecond laser were 800 nm, 100 fsec, 1 kHz, and 4 mm, respectively. The femtosecond laser was focused on the surface of the titanium plate by a lens having a focal length of 100 mm. The titanium plate used as the workpiece has a thickness of 100 μm and a surface roughness of 0.05 μm. The fluence of the femtosecond laser on the surface of the titanium plate was controlled to 0.75 J / cm 2 by an attenuator, and 10 to 110 pulses were used for processing. The processing was performed under reduced pressure of 13.3 pa.
図８にフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ１０パルスで形成した微細周期構造のＳＥＭ写真を示す。微細周期構造および微細周期構造に対して垂直方向に形成されたより大きな周期を有する周期構造が確認される。 FIG. 8 shows an SEM photograph of a fine periodic structure formed with 10 pulses of a femtosecond laser with a fluence of 0.75 J / cm 2 . A fine periodic structure and a periodic structure having a larger period formed in a direction perpendicular to the fine periodic structure are confirmed.
図９にフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ２５パルスで形成した微細周期構造のＳＥＭ写真を示す。微細周期構造および微細周期構造に対して垂直方向に形成されたより大きな周期を有する周期構造が確認される。 FIG. 9 shows an SEM photograph of a fine periodic structure formed by 25 femtosecond laser pulses with a fluence of 0.75 J / cm 2 . A fine periodic structure and a periodic structure having a larger period formed in a direction perpendicular to the fine periodic structure are confirmed.
図１０にフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ５０パルスで形成した微細周期構造のＳＥＭ写真を示す。微細周期構造および微細周期構造に対して垂直方向に形成されたより大きな周期を有する周期構造が確認されるが、より大きな周期を有する周期構造を構成する凸部には微細周期構造が存在しない。また、該凸部に小さな球形の領域が形成されている。 FIG. 10 shows an SEM photograph of a fine periodic structure formed by 50 femtosecond laser pulses with a fluence of 0.75 J / cm 2 . Although the fine periodic structure and the periodic structure having a larger period formed in a direction perpendicular to the fine periodic structure are confirmed, the fine periodic structure does not exist on the convex portion constituting the periodic structure having a larger period. A small spherical region is formed on the convex portion.
図１１にフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ７０パルスで形成した微細周期構造のＳＥＭ写真を示す。微細周期構造および微細周期構造に対して垂直方向に形成された、より大きな周期を有する周期構造が確認されるが、より大きな周期を有する周期構造を構成する凸部には微細周期構造が存在しない。また、該凸部に小さな球形の領域が形成されており、該球形の領域同士が連結されている領域も存在する。 FIG. 11 shows an SEM photograph of a fine periodic structure formed by a femtosecond laser 70 pulse having a fluence of 0.75 J / cm 2 . Although the periodic structure having a larger period formed in the direction perpendicular to the fine periodic structure and the fine periodic structure is confirmed, the fine periodic structure does not exist on the convex portion constituting the periodic structure having the larger period. . Moreover, a small spherical region is formed on the convex portion, and there is a region where the spherical regions are connected to each other.
図１２にフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ９０パルスで形成した微細周期構造のＳＥＭ写真を示す。微細周期構造および微細周期構造に対して垂直方向に形成されたより大きな周期を有する周期構造が確認されるが、より大きな周期を有する周期構造を構成する凸部には微細周期構造が存在しない。また、該凸部に小さな球形の領域が形成されており、該球形の領域同士が連結されている領域が多く存在する。 FIG. 12 shows an SEM photograph of a fine periodic structure formed by 90 femtosecond laser pulses with a fluence of 0.75 J / cm 2 . Although the fine periodic structure and the periodic structure having a larger period formed in a direction perpendicular to the fine periodic structure are confirmed, the fine periodic structure does not exist on the convex portion constituting the periodic structure having a larger period. In addition, a small spherical region is formed on the convex portion, and there are many regions where the spherical regions are connected to each other.
図１３にフルエンス０．７５Ｊ／ｃｍ２のフェムト秒レーザ１１０パルスで形成した微細周期構造のＳＥＭ写真を示す。微細周期構造および微細周期構造に対して垂直方向に形成されたより大きな周期を有する周期構造が確認されるが、より大きな周期を有する周期構造を構成する凸部には微細周期構造が存在しない。また、該凸部に小さな球形の領域およびより大きな球形の領域が形成されている。 FIG. 13 shows an SEM photograph of a fine periodic structure formed by 110 pulses of a femtosecond laser with a fluence of 0.75 J / cm 2 . Although the fine periodic structure and the periodic structure having a larger period formed in a direction perpendicular to the fine periodic structure are confirmed, the fine periodic structure does not exist on the convex portion constituting the periodic structure having a larger period. In addition, a small spherical region and a larger spherical region are formed on the convex portion.
１０…フェムト秒レーザ発振器
１２…減衰器
１４…反射ミラー
１６…シャッター
１８…ハーフミラー
２０…レンズ
２２…水素吸蔵機能を有する金属材
２４…ＸＹステージ
２６…モニタリングシステム
３０…プロセスチャンバー
DESCRIPTION OF SYMBOLS 10 ... Femtosecond laser oscillator 12 ... Attenuator 14 ... Reflection mirror 16 ... Shutter 18 ... Half mirror 20 ... Lens 22 ... Metal material 24 which has a hydrogen occlusion function ... XY stage 26 ... Monitoring system 30 ... Process chamber
Claims (6)
前記照射によって前記水素吸蔵機能を有する金属材の表面に微細周期構造を形成することを特徴とする高効率水素吸蔵金属材の製造方法。 Irradiate the surface of the metal material with hydrogen storage function with femtosecond laser,
A method for producing a highly efficient hydrogen storage metal material, wherein a fine periodic structure is formed on the surface of the metal material having the hydrogen storage function by the irradiation.
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| WO2015087482A1 (en) * | 2013-12-09 | 2015-06-18 | 株式会社デンソー | Metal member, metal member surface processing method, semiconductor device, semiconductor device manufacturing method, and composite molded body |
| WO2015125950A1 (en) * | 2014-02-24 | 2015-08-27 | イーグル工業株式会社 | Sliding member and sliding member processing method |
| JP2015530925A (en) * | 2012-08-06 | 2015-10-29 | リヴァス，ヴィクター，エイ． | Materials nanofabricated by femtosecond pulsed laser technology to increase surface area and thermal energy dissipation |
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| JP2015530925A (en) * | 2012-08-06 | 2015-10-29 | リヴァス，ヴィクター，エイ． | Materials nanofabricated by femtosecond pulsed laser technology to increase surface area and thermal energy dissipation |
| WO2015087482A1 (en) * | 2013-12-09 | 2015-06-18 | 株式会社デンソー | Metal member, metal member surface processing method, semiconductor device, semiconductor device manufacturing method, and composite molded body |
| CN105722633A (en) * | 2013-12-09 | 2016-06-29 | 株式会社电装 | Metal member, metal member surface processing method, semiconductor device, semiconductor device manufacturing method, and composite molded body |
| US9517532B2 (en) | 2013-12-09 | 2016-12-13 | Denso Corporation | Metal member, metal member surface processing method, semiconductor device, semiconductor device manufacturing method, and composite molded body |
| CN105722633B (en) * | 2013-12-09 | 2017-08-15 | 株式会社电装 | Hardware and its method of surface finish, semiconductor device and its manufacture method, composite shaped body |
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