JP2009229013A - Roller hearth kiln having rapid temperature rising function - Google Patents

Roller hearth kiln having rapid temperature rising function Download PDF

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JP2009229013A
JP2009229013A JP2008076329A JP2008076329A JP2009229013A JP 2009229013 A JP2009229013 A JP 2009229013A JP 2008076329 A JP2008076329 A JP 2008076329A JP 2008076329 A JP2008076329 A JP 2008076329A JP 2009229013 A JP2009229013 A JP 2009229013A
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speed
roller hearth
hearth kiln
conveyance
normal
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Michiro Aoki
道郎 青木
Noriaki Ito
則明 伊藤
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NGK Insulators Ltd
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NGK Insulators Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/60—Production of ceramic materials or ceramic elements, e.g. substitution of clay or shale by alternative raw materials, e.g. ashes

Abstract

<P>PROBLEM TO BE SOLVED: To provide a roller hearth kiln having a quick temperature rising function capable of ideally performing quick temperature rise while preventing temperature interference to front and back zones, and preventing degradation of burning quality caused by inflow of a binder gas into a maximum temperature zone. <P>SOLUTION: A high-speed conveying region 14 for conveying a burnt object at a speed higher than a prescribed speed, is formed on the way of normal conveying regions 12, 13 for conveying the burnt object such as a stacked device and the like at the prescribed speed, and a heating source 19 of high output higher than that of a heating source 18 in the normal conveying regions is disposed in a furnace chamber of the high-speed conveying region 14. The high-speed conveying region 14 is preferably a quick temperature rising zone between a binder removing zone and a burning zone. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、LTCC等の積層デバイスの連続焼成に適した、急速昇温機能を有するローラハースキルンに関するものである。   The present invention relates to a roller hearth kiln having a rapid temperature raising function suitable for continuous firing of laminated devices such as LTCC.

電子工業用のセラミック部品として、基材に電極を印刷し、これを多数積層した積層デバイスが広く普及している。LTCC（低温同時焼成セラミック）の場合には基材はガラスが含有されたセラミックス、電極は銀や銅である。また積層コンデンサの場合には、基材はBaTiO3、電極はニッケルなどである。このような積層デバイスにおいては、基材と電極との間に焼成中の収縮開始温度や収縮率に差に起因する積層剥離の問題がある。 As ceramic parts for the electronic industry, laminated devices in which electrodes are printed on a base material and many of them are laminated are widely used. In the case of LTCC (low temperature co-fired ceramic), the base material is ceramic containing glass, and the electrode is silver or copper. In the case of a multilayer capacitor, the base material is BaTiO 3 and the electrode is nickel or the like. In such a laminated device, there is a problem of delamination due to a difference in shrinkage start temperature and shrinkage rate during firing between the substrate and the electrode.

近年における積層厚みの薄型化に伴い、電極材料の粒子は微細化の方向にあり、これは焼成温度の低下となる。もともと基材に対して電極の焼成温度は低いので、基材と電極との焼成温度の違いがより顕著になっている。   With the recent reduction in the lamination thickness, the electrode material particles are in the direction of miniaturization, which results in a decrease in the firing temperature. Since the firing temperature of the electrode is originally lower than that of the substrate, the difference in firing temperature between the substrate and the electrode is more prominent.

上記した積層剥離の問題を解決するため、特許文献１では電極の焼成温度付近で所定時間にわたり一定温度をキープするなどの手段によって積層デバイスに与えられる温度変化を緩慢にし、焼成温度の違いによる相互の材料間の収縮差を回避する方法が開示されている。しかしこの方法では焼成に余分の時間を必要とし、生産性が低下すことを避けられない。   In order to solve the above-described problem of delamination, in Patent Document 1, the temperature change given to the laminated device is slowed by means such as keeping a constant temperature for a predetermined time around the firing temperature of the electrode, and mutual differences due to the firing temperature differ. A method for avoiding shrinkage differences between these materials is disclosed. However, this method requires extra time for firing, and it is inevitable that productivity is lowered.

これに対して特許文献１とは逆に、電極の焼成される温度域を急昇温することにより、収縮差を回避する方法がある。すなわち図１に示すように、基材である誘電体と電極との収縮率は温度によって変化するが、電極材料は急昇温を行なうことによって焼成開始温度、つまり収縮が開始する温度をより高温側にシフトすることができ、基材である誘電体との収縮タイミングを近づけることができる。   On the other hand, contrary to Patent Document 1, there is a method of avoiding the shrinkage difference by rapidly raising the temperature range in which the electrodes are fired. That is, as shown in FIG. 1, the shrinkage rate between the dielectric material as the base material and the electrode changes depending on the temperature, but the electrode material has a higher firing start temperature, that is, the temperature at which the shrinkage starts, by performing a rapid temperature rise. It can shift to the side, and the contraction timing with the dielectric material which is a base material can be brought close.

特許文献２では複数の搬送機構を備えた特殊なウォーキングビーム炉を用い、ビームを急速に移動させて焼成領域における太陽電池基板の移動速度を高速化することによって太陽電池基板を急昇温する方法が開示されている。しかし特許文献２に開示された焼成炉は特殊製品向けであって、一般的な積層デバイスの焼成に広く用いられているローラハースキルンには適用することができない。   In Patent Document 2, a method for rapidly raising the temperature of a solar cell substrate by using a special walking beam furnace having a plurality of transfer mechanisms and rapidly moving the beam to increase the moving speed of the solar cell substrate in the firing region. Is disclosed. However, the firing furnace disclosed in Patent Document 2 is for a special product and cannot be applied to a roller hearth kiln widely used for firing a general laminated device.

なお、図２は通常のローラハースキルンの焼成ゾーン１の先端部に高出力のヒーター２を設置することにより、急昇温を行なう例を示す図である。ところが高出力のヒーター２によって炉室内に強力な熱入力を行なうと、その熱により前後の領域の温度も高温となり、図２の上段のグラフに示すように温度変化がなだらかになったり、オーバーシュートしたりする温度干渉が生ずる。このため、矢印で示すような理想的な温度変化を達成することが難しいという問題が発生する。   FIG. 2 is a diagram showing an example in which the temperature is rapidly raised by installing a high-power heater 2 at the tip of the firing zone 1 of a normal roller hearth kiln. However, if strong heat input is applied to the furnace chamber by the high-power heater 2, the temperature in the front and rear regions becomes high due to the heat, and the temperature changes gradually as shown in the upper graph of FIG. Temperature interference occurs. For this reason, there arises a problem that it is difficult to achieve an ideal temperature change as indicated by an arrow.

また急昇温のために脱バインダーゾーン３と最高温度ゾーン４との距離が接近し、脱バインダーゾーン３で発生したバインダーガスが最高温度ゾーン４に流入し易くなり、焼成される積層デバイスの焼成品質を低下させるという問題も発生する。   Further, due to the rapid temperature rise, the distance between the debinding zone 3 and the maximum temperature zone 4 is close, and the binder gas generated in the debinding zone 3 tends to flow into the maximum temperature zone 4, and the laminated device to be baked is fired. There is also a problem that the quality is lowered.

また現在では、脱バインダーと焼成とを別の炉により行なう方法が一般的に実施されているが、脱バインダーされた段階では基材の保形力が低下しているため、焼成炉に移送する途中におけるわずかな振動で欠けや割れが発生し易い。このため移送に耐える保形力を維持させるために、バインダーを若干残留させるという望ましくない方法を取らざるを得なかった。
特開２００４−４７９０２号公報 特開２００６−１８９２３６号公報 At present, a method in which debinding and firing are performed in different furnaces is generally carried out, but since the shape retention of the base material is reduced at the stage of debinding, it is transferred to the firing furnace. Chipping and cracking are likely to occur due to slight vibrations along the way. For this reason, in order to maintain the shape retaining force that can withstand the transfer, an undesired method of leaving a small amount of the binder has to be taken.
JP 2004-47902 A JP 2006-189236 A

従って本発明の目的は上記した従来の問題点を解決し、前後のゾーンへの温度干渉を防止しつつ理想的な急昇温が可能であり、またバインダーガスが最高温度ゾーンに流入することによる焼成品質の低下をも防止することができる急速昇温機能を有するローラハースキルンを提供することである。   Accordingly, the object of the present invention is to solve the above-mentioned conventional problems, and to achieve an ideal rapid temperature rise while preventing temperature interference with the preceding and following zones, and because the binder gas flows into the maximum temperature zone. It is an object of the present invention to provide a roller hearth kiln having a rapid temperature raising function capable of preventing a reduction in firing quality.

上記の課題を解決するためになされた本発明は、多数のローラによって被焼成品を所定速度で移送しながら脱バインダーと焼成とを行なうローラハースキルンにおいて、被焼成品を所定速度で移送する通常搬送領域の途中に、被焼成品をこの所定速度よりも高速で搬送する高速搬送領域を形成し、この高速搬送領域の炉室内に、通常搬送領域の加熱源よりも高出力の加熱源を設けたことを特徴とするものである。   The present invention made in order to solve the above-mentioned problem is a method for transferring a product to be baked at a predetermined speed in a roller hearth kiln that performs debinding and baking while transferring the product to be baked at a predetermined speed by a large number of rollers. A high-speed conveyance area is formed in the middle of the conveyance area to convey the product to be fired at a speed higher than the predetermined speed, and a heating source having a higher output than the heating source in the normal conveyance area is provided in the furnace chamber of the high-speed conveyance area It is characterized by that.

なお請求項２のように、高速搬送領域の両端に、搬送速度変更部が形成されてセッターの受け渡しを円滑に行なわせる。また請求項３のように、被焼成品が一定サイズのセッターに搭載されて炉内を移送されるものであり、搬送速度変更部が、セッター１枚分の長さを持つことが好ましい。また請求項４に示すように、高速搬送領域のローラが、通常搬送速度とこれよりも高速の急速搬送速度との間で速度可変なものであることが好ましい。   According to the second aspect of the present invention, transfer speed changing portions are formed at both ends of the high-speed transfer area so that the setter can be delivered smoothly. Further, as in claim 3, it is preferable that the product to be fired is mounted on a setter having a certain size and is transferred through the furnace, and the transfer speed changing portion has a length corresponding to one setter. According to a fourth aspect of the present invention, it is preferable that the rollers in the high-speed conveyance region have a variable speed between a normal conveyance speed and a rapid conveyance speed higher than the normal conveyance speed.

さらに請求項５に示すように、高速搬送領域の前端の炉室に、セッターが通過する際に開かれるシャッターを設けることが好ましく、請求項６に示すように、高速搬送領域が脱バインダーゾーンと焼成ゾーンとの間に形成されていることが好ましい。また請求項７のように、高速搬送領域の前半側に、通常搬送領域よりも多数の固定隔壁と天井排気孔を設置しておくことが好ましい。   Furthermore, as shown in claim 5, it is preferable to provide a shutter that is opened when the setter passes in the furnace chamber at the front end of the high-speed conveyance area, and as shown in claim 6, the high-speed conveyance area has a debinding zone. It is preferably formed between the firing zone. Further, as in claim 7, it is preferable that a larger number of fixed partition walls and ceiling exhaust holes are provided on the first half side of the high-speed transfer area than in the normal transfer area.

本発明によれば、ローラハースキルンの通常搬送領域の途中に被焼成品をこの所定速度よりも高速で搬送する高速搬送領域を形成し、この高速搬送領域の炉室内に通常搬送領域よりも高出力の加熱源を設けたので、被焼成品を高速搬送領域から急速に引き離しながら急速昇温させることが可能となる。このため一般的な積層デバイスの焼成に広く用いられているローラハースキルンによって、理想的な急昇温を達成することができ、電極と基材である誘電体との収縮率の差に起因する積層剥離を解決することができる。   According to the present invention, a high-speed conveyance area for conveying the product to be fired at a speed higher than the predetermined speed is formed in the middle of the normal conveyance area of the roller hearth kiln, and is higher than the normal conveyance area in the furnace chamber of the high-speed conveyance area. Since the output heating source is provided, it is possible to rapidly raise the temperature of the product to be fired while rapidly separating it from the high-speed conveyance region. For this reason, an ideal rapid increase in temperature can be achieved by the roller hearth kiln widely used for firing general laminated devices, which is caused by the difference in shrinkage between the electrode and the dielectric material as the substrate. Delamination can be solved.

また本発明によれば、脱バインダーゾーンから被焼成品を引き離して高出力の加熱源で加熱するので、脱バインダーゾーンと最高温度ゾーンの距離を十分に確保することができ、バインダーガスが最高温度ゾーンに流入することによる焼成品質の低下をも防止することができる。   Further, according to the present invention, since the article to be fired is separated from the debinding zone and heated by a high-output heating source, a sufficient distance between the debinding zone and the maximum temperature zone can be ensured, and the binder gas has the maximum temperature. It is also possible to prevent a reduction in firing quality due to flowing into the zone.

なお被焼成品が一定サイズのセッターに搭載されて炉内を移送される構造とし、セッター１枚分の長さを持つ搬送速度変更部を高速搬送領域の前後両端に設けておけば、通常搬送領域と高速搬送領域との間のセッターの移行に支障が生じない。また高速搬送領域の前端の炉室にセッターが通過する際に開かれるシャッターを設けておけば、ガスの移動を抑制することができるので、バインダーガスが焼成ゾーンに流入することによる焼成品質の低下をより確実に防止することができる。   If the product to be fired is mounted on a setter of a certain size and transported through the furnace, and a transfer speed changer with the length of one setter is provided at both ends of the high-speed transfer area, normal transfer There is no problem in the transfer of the setter between the area and the high-speed conveyance area. In addition, if a shutter that is opened when the setter passes through the furnace chamber at the front end of the high-speed transfer area, gas movement can be suppressed, so that the quality of the fire is reduced due to the binder gas flowing into the fire zone. Can be prevented more reliably.

以下に本発明の好ましい実施形態を示す。
図３は実施形態のローラハースキルンの要部を示す断面図であり、１０は多数の搬送用のローラ１１を備えたローラハースキルンの炉体である。通常のローラハースキルンは全部のローラ１１を共通の駆動系により同一速度で回転させ、被焼成品を所定速度で移送しながら脱バインダーと焼成とを行なうものである。しかし本発明では、被焼成品を所定速度で移送する通常搬送領域１２，１３の途中に、被焼成品をこの所定速度よりも高速で搬送する高速搬送領域１４を形成した。 Preferred embodiments of the present invention are shown below.
FIG. 3 is a cross-sectional view showing a main part of the roller hearth kiln according to the embodiment, and reference numeral 10 denotes a roller hearth kiln furnace provided with a number of conveying rollers 11. In a normal roller hearth kiln, all the rollers 11 are rotated at the same speed by a common drive system, and the binder is removed and fired while the article to be fired is transferred at a predetermined speed. However, in the present invention, the high-speed conveyance area 14 for conveying the product to be baked at a higher speed than the predetermined speed is formed in the normal conveyance areas 12 and 13 for transferring the product to be baked at a predetermined speed.

具体的には、ローラ１１の駆動系を高速搬送領域１４の部分で通常搬送領域１２，１３におけるローラ１１の駆動系から切り離して独立させ、この部分のローラ１１を例えばサーボモータ等によって、通常搬送速度とこれよりも高速の急速搬送速度との間で速度可変なものとしておく。なおこの部分のローラ１１を完全停止できるようにしてもよい。   Specifically, the drive system of the roller 11 is separated from the drive system of the roller 11 in the normal transport areas 12 and 13 in the high-speed transport area 14 and is made independent, and the roller 11 in this section is normally transported by a servo motor, for example. It is assumed that the speed is variable between the speed and a rapid conveyance speed higher than this. In addition, you may enable it to completely stop the roller 11 of this part.

被焼成品である積層デバイスは従来と同様に、一定サイズのセッター１５に搭載されてローラ１１によって炉内を移送されるもので、高速搬送領域１４の前後両端に、セッター１枚分の長さを持つ搬送速度変更部１６、１７が形成されている。この搬送速度変更部１６、１７は、図３に示すように通常搬送領域１２，１３と高速搬送領域１４とを重複させた部分であり、通常搬送領域１２の搬送用ローラ１１によって搬送速度変更部１６まで移送されてきたセッター１５は、搬送速度変更部１６に載せられる。セッター１５が搬送速度変更部１６まで移動完了したことをセンサーが検知すると、高速搬送領域１４のローラ１１が高速回転を開始し、セッター１５を急速搬送する。   The laminated device, which is a product to be fired, is mounted on a setter 15 of a certain size and is transferred through the furnace by a roller 11 as in the conventional case. Are formed. The transport speed changing units 16 and 17 are portions where the normal transport regions 12 and 13 and the high-speed transport region 14 are overlapped as shown in FIG. 3, and the transport speed changing unit is moved by the transport roller 11 in the normal transport region 12. The setter 15 that has been transported to 16 is placed on the transport speed changing unit 16. When the sensor detects that the setter 15 has been moved to the conveyance speed changing unit 16, the roller 11 in the high-speed conveyance region 14 starts high-speed rotation and rapidly conveys the setter 15.

またこの高速搬送領域１４の後半部の炉室内には、通常搬送領域１２，１３の加熱源１８よりも高出力の加熱源１９が設けられている。加熱源１８、１９はともに電熱ヒーターであるが、この実施形態では通常搬送領域１２，１３では加熱源１８はローラ１１の上方のみに配置されているのに対し、高速搬送領域１４においてはローラ１１の上下両側に配置されており、しかも設置間隔が小さくなっている。なおヒーター１本当たりの出力をより高出力なものとしてもよいことはいうまでもない。高速搬送領域１４の前半部には加熱源は設けられていない。   A heating source 19 having a higher output than the heating source 18 in the normal transfer areas 12 and 13 is provided in the furnace chamber in the latter half of the high-speed transfer area 14. Although the heating sources 18 and 19 are both electric heaters, in this embodiment, the heating source 18 is disposed only above the roller 11 in the normal conveyance regions 12 and 13, whereas the roller 11 in the high-speed conveyance region 14. It is arranged on both the upper and lower sides, and the installation interval is reduced. Needless to say, the output per heater may be higher. A heating source is not provided in the first half of the high-speed conveyance area 14.

この結果、セッター１５上に搭載された積層デバイスは、通常搬送領域１２から高速搬送領域１４に移行すると同時に急速移動されながら高出力の加熱源１９によって強く加熱される。その結果、図３の上段の温度グラフに示されるように、シャープな昇温が可能である。このように通常搬送領域１２から高速搬送領域１４に移行すると同時にセッター１５を引き離すことによって双方の領域間の温度干渉を抑制することができる。   As a result, the laminated device mounted on the setter 15 is strongly heated by the high-power heating source 19 while moving rapidly from the normal transfer region 12 to the high-speed transfer region 14 at the same time. As a result, as shown in the upper temperature graph of FIG. 3, a sharp temperature increase is possible. As described above, the transition from the normal conveyance area 12 to the high-speed conveyance area 14 and the setter 15 are separated at the same time, so that temperature interference between the two areas can be suppressed.

このような高速搬送領域１４は、脱バインダーゾーンと焼成ゾーンとの間に形成しておくことが好ましい。このような構成を取ることによって、焼成開始時の急速昇温が可能となるからである。焼成温度まで昇温させた後は一定温度での焼成を行えばよく、この焼成は通常搬送領域１３において行われる。高速搬送領域１４の後端にも搬送速度変更部１７が設けられており、高速搬送領域１４内を急速移動されてきたセッター１５はこの搬送速度変更部１７において通常搬送速度のローラ１１に乗り移り、それ以降は通常のローラハースキルンと同様の焼成が行われる。   Such a high-speed conveyance region 14 is preferably formed between the debinding zone and the firing zone. This is because by adopting such a configuration, rapid temperature increase at the start of firing becomes possible. After raising the temperature to the firing temperature, firing at a constant temperature may be performed, and this firing is usually performed in the transport region 13. A transfer speed changing unit 17 is also provided at the rear end of the high speed transfer area 14, and the setter 15 that has been rapidly moved in the high speed transfer area 14 is transferred to the roller 11 having the normal transfer speed in the transfer speed changing section 17. Thereafter, firing is performed in the same manner as a normal roller hearth kiln.

なおローラハースキルンの炉室内の天井と床面には、従来と同様にローラ１１の方向に突出する固定隔壁２０が設けられてガスの流動を防止しているが、より確実なガス遮断効果を達成するためには、高速搬送領域１４の前端の炉室に、セッター１５が通過する際に開かれるシャッター２１を設けておくことが好ましい。このシャッター２１はローラ１１の隙間を介して昇降できるようにしておき、セッター１５が通過するタイミング以外は閉じておく。これによってバインダーガスが脱バインダーゾーンから焼成ゾーンに流入することをより確実に防止することができる。ただしシャッター２１は必須のものではなく、被焼成物の形状やバインダーガスの影響度に応じて省略したり、完全閉鎖しない構造とすることもできる。   In addition, on the ceiling and floor surfaces of the furnace chamber of the roller hearth kiln, the fixed partition wall 20 protruding in the direction of the roller 11 is provided as in the conventional case to prevent the gas flow, but a more reliable gas blocking effect is provided. In order to achieve this, it is preferable to provide a shutter 21 that is opened when the setter 15 passes in the furnace chamber at the front end of the high-speed transfer region 14. The shutter 21 can be moved up and down through the gap between the rollers 11 and is closed except for the timing when the setter 15 passes. This can more reliably prevent the binder gas from flowing from the debinding zone into the firing zone. However, the shutter 21 is not essential, and may be omitted according to the shape of the object to be fired or the influence of the binder gas, or may be configured not to be completely closed.

さらに、高速搬送領域１４の前半側には、通常搬送領域１２、１４よりも多数の固定隔壁２０と天井排気孔２２を設置しておくことが好ましい。これは焼成ゾーンに供給された窒素等の不活性ガスを天井排気孔２２に向かって流すことによって、バインダーガスが焼成ゾーンに流入することを防止するためである。   Furthermore, it is preferable to install a larger number of fixed partition walls 20 and ceiling exhaust holes 22 than the normal transfer areas 12 and 14 on the first half side of the high-speed transfer area 14. This is to prevent the binder gas from flowing into the firing zone by flowing an inert gas such as nitrogen supplied to the firing zone toward the ceiling exhaust hole 22.

図４は本発明の急速昇温機能を有するローラハースキルンを通常のローラハースキルンと組み合わせ、積層デバイスの焼成とアニールとを行うようにした装置の断面図である。上段が図３に説明した急速昇温機能を有するローラハースキルンであり、下段が通常のローラハースキルンである。前端部と後端部にはそれぞれセッター１５を昇降させることができるリフター３１，３２が設けられている。リフター３２は外部に露出しないように外壁３により覆われている。   FIG. 4 is a cross-sectional view of an apparatus in which a roller hearth kiln having a rapid temperature raising function of the present invention is combined with a normal roller hearth kiln to perform firing and annealing of a laminated device. The upper row is a roller hearth kiln having the rapid temperature raising function described in FIG. 3, and the lower row is a normal roller hearth kiln. Lifters 31 and 32 that can raise and lower the setter 15 are provided at the front end portion and the rear end portion, respectively. The lifter 32 is covered with the outer wall 3 so as not to be exposed to the outside.

セッター１５上に載せられて入口３３からリフター３１上に供給された積層デバイスは、上段のローラハースキルンの通常搬送領域１２において脱バインダーが行われ、次いで高速搬送領域１４において焼成開始時の急速昇温が行われたうえで、通常搬送領域１３において一定温度の焼成が行われる。その後にリフター３２によってセッター１５は下段のローラハースキルンに運ばれ、アニールされたうえで出口３４から取り出される。このような2段構造とすれば設置面積を拡大することなく、脱バインダー、焼成、アニールを行うことができる。   The laminated device placed on the setter 15 and supplied from the inlet 33 onto the lifter 31 is debindered in the normal conveying area 12 of the upper roller hearth kiln, and then rapidly raised at the start of firing in the high-speed conveying area 14. After the temperature is performed, firing at a constant temperature is performed in the normal transport region 13. Thereafter, the setter 15 is transported to the lower roller hearth kiln by the lifter 32, annealed, and taken out from the outlet 34. With such a two-stage structure, binder removal, firing, and annealing can be performed without increasing the installation area.

以上に説明した本発明の急速昇温機能を有するローラハースキルンによって得られる利点を要約すると、次のとおりである。
（1）高速搬送領域を急速昇温ゾーンとすれば、急速昇温ゾーンと脱バインダーゾーンとの距離を離すことができ、被焼成品は通常の脱バインダー温度から焼成温度まで、急速昇温が可能である。このため、前後のゾーンへの温度干渉を防止しつつ理想的な急昇温が可能である。
（2）脱バインダーゾーンにおいて発生したバインダーガスが焼成ゾーンに流入することを防止することができる。
（3）被焼成品はセッターに載せられたまま脱バインダーゾーン、急速昇温ゾーン、焼成ゾーン間をローラによって水平移動するので、振動等による欠けや割れを生じにくい。またセッターを外部に取り出すことがないので、再昇温するためのエネルギーロスがない。
（4）ローラハースキルンは一般的な積層デバイスの焼成に広く用いられている炉であるから、各種の積層デバイスの焼成に利用することができる。 The advantages obtained by the roller hearth kiln having the rapid temperature raising function of the present invention described above are summarized as follows.
(1) If the high-speed transfer area is a rapid heating zone, the distance between the rapid heating zone and the debinding zone can be increased, and the product to be fired can be rapidly heated from the normal debinding temperature to the firing temperature. Is possible. For this reason, ideal rapid temperature rise is possible, preventing the temperature interference to the front and back zones.
(2) The binder gas generated in the debinding zone can be prevented from flowing into the firing zone.
(3) Since the product to be fired is horizontally moved by a roller between the debinding zone, the rapid temperature raising zone, and the firing zone while being placed on the setter, chipping or cracking due to vibration or the like is unlikely to occur. Further, since the setter is not taken out, there is no energy loss for reheating.
(4) Since the roller hearth kiln is a furnace widely used for firing general laminated devices, it can be used for firing various laminated devices.

基材である誘電体と電極との収縮率のグラフである。It is a graph of the shrinkage | contraction rate of the dielectric material which is a base material, and an electrode. 通常のローラハースキルンの焼成ゾーン先端部に高出力のヒーターを設置し、急昇温を行なう例を示す説明図である。It is explanatory drawing which shows the example which installs a high output heater in the baking zone front-end | tip part of a normal roller hearth kiln, and performs rapid temperature rising. 本発明の実施形態の要部を示す断面図である。It is sectional drawing which shows the principal part of embodiment of this invention. 本発明を通常のローラハースキルンと組み合わせた実施形態を示す断面図である。It is sectional drawing which shows embodiment which combined this invention with the normal roller hearth kiln.

符号の説明Explanation of symbols

１ 通常のローラハースキルンの焼成ゾーン
２ 高出力のヒーター
３ 脱バインダーゾーン
４ 最高温度ゾーン
１０ 炉体
１１ ローラ
１２ 通常搬送領域
１３ 通常搬送領域
１４ 高速搬送領域
１５ セッター
１６ 搬送速度変更部
１７ 搬送速度変更部
１８ 通常搬送領域の加熱源
１９ 高出力の加熱源
２０ 固定隔壁
２１ シャッター
２２ 天井排気孔
３１ リフター
３２ リフター
３３ 入口
３４ 出口 DESCRIPTION OF SYMBOLS 1 Normal roller hearth kiln firing zone 2 High output heater 3 Debinding zone 4 Maximum temperature zone 10 Furnace 11 Roller 12 Normal conveyance area 13 Normal conveyance area 14 High-speed conveyance area 15 Setter 16 Conveyance speed change part 17 Conveyance speed change Section 18 Heating source 19 in normal conveyance area High-power heating source 20 Fixed partition wall 21 Shutter 22 Ceiling exhaust hole 31 Lifter 32 Lifter 33 Inlet 34 Outlet

Claims (7)

多数のローラによって被焼成品を所定速度で移送しながら熱処理を行なうローラハースキルンにおいて、被焼成品を所定速度で移送する通常搬送領域の途中に、被焼成品をこの所定速度よりも高速で搬送する高速搬送領域を形成し、この高速搬送領域の炉室内に、通常搬送領域の加熱源よりも高出力の加熱源を設けたことを特徴とする急速昇温機能を有するローラハースキルン。   In a roller hearth kiln that performs heat treatment while transferring the product to be baked at a predetermined speed by a large number of rollers, the product to be baked is transported at a speed higher than this predetermined speed in the middle of the normal transfer area where the product to be baked is transferred at a predetermined speed. A roller hearth kiln having a rapid heating function, characterized in that a high-speed transfer region is formed, and a heating source having a higher output than a heating source in the normal transfer region is provided in a furnace chamber of the high-speed transfer region. 高速搬送領域の両端に、搬送速度変更部が形成されていることを特徴とする請求項１記載の急速昇温機能を有するローラハースキルン。   2. The roller hearth kiln having a rapid temperature raising function according to claim 1, wherein a conveyance speed changing portion is formed at both ends of the high-speed conveyance region. 被焼成品が一定サイズのセッターに搭載されて炉内を移送されるものであり、搬送速度変更部が、セッター１枚分の長さを持つことを特徴とする請求項２記載の急速昇温機能を有するローラハースキルン。   3. The rapid temperature rise according to claim 2, wherein the article to be fired is mounted on a setter having a certain size and is transferred through the furnace, and the transfer speed changing portion has a length corresponding to one setter. Laura Heartilkin with functionality. 高速搬送領域のローラが、通常搬送速度とこれよりも高速の急速搬送速度との間で速度可変なものであることを特徴とする請求項１記載の急速昇温機能を有するローラハースキルン。   2. The roller hearth kiln having a rapid temperature raising function according to claim 1, wherein the roller in the high-speed conveyance region has a variable speed between a normal conveyance speed and a rapid conveyance speed higher than the normal conveyance speed. 高速搬送領域の前端の炉室に、セッターが通過する際に開かれるシャッターを設けたことを特徴とする請求項２記載の急速昇温機能を有するローラハースキルン。   3. A roller hearth kiln having a rapid temperature raising function according to claim 2, wherein a shutter that is opened when a setter passes is provided in a furnace chamber at a front end of the high-speed conveyance region. 高速搬送領域が、脱バインダーゾーンと焼成ゾーンとの間に形成されていることを特徴とする請求項１記載の急速昇温機能を有するローラハースキルン。   2. The roller hearth kiln having a rapid temperature raising function according to claim 1, wherein the high-speed conveyance region is formed between the binder removal zone and the firing zone. 高速搬送領域の前半側に、通常搬送領域よりも多数の固定隔壁と天井排気孔を設置したことを特徴とする請求項１記載の急速昇温機能を有するローラハースキルン。   2. The roller hearth kiln having a rapid heating function according to claim 1, wherein a larger number of fixed partition walls and ceiling exhaust holes are provided on the first half side of the high-speed transfer area than in the normal transfer area.
JP2008076329A 2008-03-24 2008-03-24 Roller hearth kiln having rapid temperature rising function Withdrawn JP2009229013A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015513659A (en) * 2012-03-16 2015-05-14 ゲーカーエン シンター メタルズ ホールディング ゲーエムベーハーＧｋｎ Ｓｉｎｔｅｒ Ｍｅｔａｌｓ Ｈｏｌｄｉｎｇ Ｇｍｂｈ Sintering furnace with gas release device
CN112857034A (en) * 2021-02-26 2021-05-28 黄超 Temperature control system of push plate kiln

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015513659A (en) * 2012-03-16 2015-05-14 ゲーカーエン シンター メタルズ ホールディング ゲーエムベーハーＧｋｎ Ｓｉｎｔｅｒ Ｍｅｔａｌｓ Ｈｏｌｄｉｎｇ Ｇｍｂｈ Sintering furnace with gas release device
US9841236B2 (en) 2012-03-16 2017-12-12 Gkn Sinter Metals Holding Gmbh Sintering furnace with a gas removal device
CN112857034A (en) * 2021-02-26 2021-05-28 黄超 Temperature control system of push plate kiln
CN112857034B (en) * 2021-02-26 2023-10-03 黄超 Push plate kiln temperature control system

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