JP2009190807A - Conveying device - Google Patents

Conveying device Download PDF

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JP2009190807A
JP2009190807A JP2008030625A JP2008030625A JP2009190807A JP 2009190807 A JP2009190807 A JP 2009190807A JP 2008030625 A JP2008030625 A JP 2008030625A JP 2008030625 A JP2008030625 A JP 2008030625A JP 2009190807 A JP2009190807 A JP 2009190807A
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belt
fixed
movable part
movable
conveyor
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JP5111144B2 (en
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Takashi Shibuya
孝史 澁谷
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Canon Tokki Corp
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Tokki Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive conveying device having a large conveying distance and a simple structure. <P>SOLUTION: The conveying device comprises a fixed part 2 having a first conveyor with a first belt 23 wound therearound on its top surface, a supporting member 6 fixed to a lower portion of the first belt and extending upwardly from the first belt, a first movable part 3 supported by the supporting member and arranged above the fixed part, and having a second conveyor with a second belt wound therearound on its top surface, and a second movable part 4 fixed to an upper portion of the second belt and arranged above the first movable part to load objects to be conveyed. Parts 8 of opposing portions of the second belt and the first belt are fixed to each other. The first movable part is slidable in the advancing/retracting direction of the first belt. The second movable part is slidable with respect to the first movable part. When the first movable part slides with respect to the fixed part by a distance L, the second movable part slides with respect to the first movable part by a distance 2L, and the second movable part slides with respect to the fixed part by a distance 3L. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、搬送装置に関する。   The present invention relates to a transport apparatus.

従来、物品を所定位置から移動運搬する搬送手段として、コンベア、電動又はエアシリンダ、多関節ロボット等が用いられている。しかし、外気を遮断した空間内でガラス基板等の精密部品を搬送する必要がある有機ＥＬディスプレイパネル等の生産工程においては、従来の搬送手段では次のような問題がある。
まず、コンベアは、搬送先まで広範囲に設置する必要があり、生産ライン等の限られたスペースに設置することが難しい。又、有機ＥＬディスプレイパネル等の生産では、搬送先である次工程に搬送装置の一部が残ったままであると、次工程での処理プロセスが搬送装置に施され、搬送装置が前工程に戻った際に前工程での処理に影響を与えることがある。そのため、有機ＥＬディスプレイパネル等の搬送装置は、搬送先に搬送後に搬送装置全体が元の位置に戻る必要があるが、コンベアはこの条件を満足しない。さらに、コンベアのベルトやコロが搬送物に当接してキズ等を生じたり、搬送時の振動が大きいという問題もある。
又、シリンダは、外筒と同じ長さのピストンが進退する構造上、搬送距離が長くなるとシリンダも長くなり、設置スペースが大きくなる。
多関節ロボットは汎用性が高いが、構造が複雑で高価である。 Conventionally, conveyors, electric or air cylinders, articulated robots, and the like are used as conveying means for moving and transporting articles from a predetermined position. However, in the production process of an organic EL display panel or the like in which it is necessary to transport precision parts such as a glass substrate in a space where outside air is blocked, the conventional transport means has the following problems.
First, it is necessary to install the conveyor in a wide range up to the conveyance destination, and it is difficult to install the conveyor in a limited space such as a production line. In addition, in the production of organic EL display panels and the like, if a part of the transport device remains in the next process as the transport destination, the processing process in the next process is performed on the transport apparatus, and the transport device returns to the previous process. May affect the processing in the previous process. For this reason, a transport device such as an organic EL display panel needs to return to the original position after transport to the transport destination, but the conveyor does not satisfy this condition. Furthermore, there is a problem that the belt or roller of the conveyor comes into contact with the conveyed product, causing scratches or the like, and vibration during conveyance is large.
Further, the cylinder has a structure in which a piston having the same length as that of the outer cylinder advances and retreats, so that the cylinder becomes longer and the installation space becomes larger as the transport distance becomes longer.
An articulated robot is highly versatile, but has a complicated structure and is expensive.

このようなことから、不動部から可動部が摺動突出し、可動部上の物品を移動・搬送するコンパクトで簡易な構造が提案されている（特許文献参照）。   For this reason, there has been proposed a compact and simple structure in which the movable portion slides and protrudes from the non-movable portion and moves and conveys the article on the movable portion (see Patent Document).

特開2004-238137号公報JP 2004-238137 A

上記した特許文献１記載の技術は、不動部上に可動部を１個以上載置し、可動部を前方に順次繰り出すことで、搬送距離を増やすようになっている。例えば、不動部上に可動部を３個載置した場合、各可動部を繰り出すことで、繰り出し量の３倍の距離を移動（搬送）することができる（特許文献１の図３）。
本発明は、この技術をさらに改良し、２個の可動部を固定部上に載置するだけで、繰り出し量の３倍の距離を移動（搬送）可能な機構を提案するものであり、同じ搬送距離で可動部の個数が特許文献１記載の技術より少なくなるので、構造をさらに簡易にしてコストダウンが図られる。
すなわち本発明は、搬送距離が大きく、かつ構造が簡易で低コストな搬送装置の提供を目的とする。 In the technique described in Patent Document 1 described above, one or more movable parts are placed on the non-moving part, and the movable part is sequentially fed forward to increase the transport distance. For example, when three movable parts are mounted on the non-moving part, each movable part can be moved out (moved) by a distance three times the amount of feeding (FIG. 3 of Patent Document 1).
The present invention further improves this technique and proposes a mechanism capable of moving (conveying) a distance three times the feeding amount by simply placing two movable parts on the fixed part. Since the number of movable parts is smaller than the technique described in Patent Document 1 at the transport distance, the structure can be further simplified and the cost can be reduced.
That is, an object of the present invention is to provide a transport apparatus having a large transport distance, a simple structure, and low cost.

上記の目的を達成するために、本発明の搬送装置は、一対のローラ間に第１ベルトが巻回されてなる第１コンベアを上面に有する固定部と、前記第１ベルトの下側部分に固定され、前記第１ベルトから上方に延びる支持部材と、前記支持部材に支持されて前記固定部の上方に配置され、かつ一対のローラ間に第２ベルトが巻回されてなる第２コンベアを上面に有する第１可動部と、前記第２ベルトの上側部分に固定されて前記第１可動部の上方に配置され、搬送物を載置可能な第２可動部とを有し、前記第２ベルトは、前記第１ベルトと平行でかつ前記第１ベルトの上側部分に対向し、その対向部分の一部が互いに固定され、前記第１可動部は、前記第１ベルトの進退方向に沿って前記固定部に対し摺動可能であり、前記第２可動部は、前記第２ベルトの進退方向に沿って前記第１可動部に対し摺動可能であり、前記第１可動部が前記固定部に対し距離Ｌだけ摺動したとき、前記第２可動部は前記第１可動部に対し距離２Ｌだけ摺動し、前記第２可動部が前記固定部に対して距離３Ｌ摺動可能である。
このような構成とすると、第１ベルトの下側部分をＬだけ前進させると第１可動部がＬだけ前進し、第１ベルトの上側部分がＬだけ後退する。しかしながら、第２ベルトから見ると、第１可動部が相対的に前進した分だけ、第１ベルトと繋がっている第２ベルト下側の後退量が増えて２Ｌ（Ｌ＋Ｌ）となる。従って、第２ベルトの上側部分に固定されている第２可動部は、第１可動部に対して２Ｌだけ前進し、固定部に対しては合計３Ｌ（Ｌ＋２Ｌ）だけ前進することになる。 In order to achieve the above-described object, the conveying device of the present invention includes a fixing unit having a first conveyor formed by winding a first belt between a pair of rollers on an upper surface, and a lower portion of the first belt. A support member that is fixed and extends upward from the first belt; and a second conveyor that is supported by the support member and disposed above the fixing portion and in which a second belt is wound between a pair of rollers. A first movable part on the upper surface; and a second movable part fixed on the upper part of the second belt and disposed above the first movable part and capable of placing a transported object, The belt is parallel to the first belt and faces the upper portion of the first belt, and a part of the facing portions is fixed to each other, and the first movable portion moves along the advancing and retreating direction of the first belt. The second movable part is slidable relative to the fixed part, and the second movable part is 2 slidable with respect to the first movable part along the advancing / retreating direction of the belt, and when the first movable part slides with respect to the fixed part by a distance L, the second movable part is moved to the first movable part. The second movable part is slidable by a distance of 3L relative to the fixed part.
With such a configuration, when the lower portion of the first belt is advanced by L, the first movable portion is advanced by L, and the upper portion of the first belt is retracted by L. However, when viewed from the second belt, the amount of retreat on the lower side of the second belt connected to the first belt is increased by 2 L (L + L) by the amount that the first movable portion is relatively advanced. Accordingly, the second movable portion fixed to the upper portion of the second belt advances by 2L with respect to the first movable portion, and advances by a total of 3L (L + 2L) with respect to the fixed portion.

前記第２可動部の上面に、別の前記搬送装置の固定部が固定されていてもよい。
このような構成とすると、下側搬送装置の第２可動部上の搬送装置においても上記した第１コンベアの繰り出し量の３倍の移動量が第２可動部に生じるため、合計６倍の移動量を生じさせることができる。 A fixing portion of another transport device may be fixed to the upper surface of the second movable portion.
In such a configuration, the transfer device on the second movable portion of the lower transfer device also has a movement amount of three times the feed amount of the first conveyer generated in the second movable portion. Amount can be produced.

本発明によれば、搬送距離が大きく、かつ構造が簡易で低コストな搬送装置が得られる。   According to the present invention, it is possible to obtain a transport apparatus having a large transport distance, a simple structure, and low cost.

以下、本発明の実施形態について、図面を参照して説明する。
図１は、本発明の実施形態に係る搬送装置を含む製造ラインの斜視図である。この図において、有機ＥＬディスプレイパネルの製造ラインは、パネルとなるガラス基板１００を搬送する搬送チャンバー３００と、ドアバルブ５００を介して搬送チャンバー３００に隣接するプロセスチャンバー４００とを備えている。搬送チャンバー３００内には本発明の実施形態に係る搬送装置５０が配置され、搬送装置５０の上部には前工程で所定寸法に切り出したガラス基板１００が載置されている。搬送装置５０は、搬送チャンバーの出口３１０からガラス基板１００をプロセスチャンバー４００に搬送し、プロセスチャンバー４００内の基板受け取り機構４１０に渡すようになっている。そして、プロセスチャンバー４００内で基板受け取り機構４１０上に載置されたガラス基板１００に対し、画素や各種膜の成膜や封止等のプロセス処理が施される。
プロセスチャンバー４００内では、例えば真空蒸着等が施されるため、ガラス基板１００搬送後に搬送装置５０はプロセスチャンバー４００から搬送チャンバー３００内に完全に戻っている必要がある。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view of a production line including a transfer device according to an embodiment of the present invention. In this figure, the organic EL display panel production line includes a transfer chamber 300 for transferring a glass substrate 100 serving as a panel, and a process chamber 400 adjacent to the transfer chamber 300 via a door valve 500. A transfer device 50 according to an embodiment of the present invention is disposed in the transfer chamber 300, and a glass substrate 100 cut out to a predetermined size in the previous process is placed on the transfer device 50. The transfer device 50 transfers the glass substrate 100 to the process chamber 400 from the exit 310 of the transfer chamber and passes it to the substrate receiving mechanism 410 in the process chamber 400. The glass substrate 100 placed on the substrate receiving mechanism 410 in the process chamber 400 is subjected to process processing such as formation and sealing of pixels and various films.
Since, for example, vacuum deposition or the like is performed in the process chamber 400, the transfer apparatus 50 needs to be completely returned from the process chamber 400 to the transfer chamber 300 after the glass substrate 100 is transferred.

搬送装置５０は、搬送チャンバー３００に固定される矩形板状の固定部２と、固定部２の上方に配置される矩形板状の第１可動部３と、第１可動部３の上方に配置される矩形板状の第２可動部４とを備え、第２可動部４上に搬送物（ガラス基板）１００が載置されている。
固定部２の上面には長手方向に沿って第１コンベア２０が設置され、第１コンベア２０の図示しないベルトの下側部分に箱型の支持部材６が固定され、支持部材６は固定部２の上方に延びている。そして、第１可動部３の下面が支持部材６の上面に支持されている。又、固定部２上面には第１コンベア２０に沿い、かつ第１コンベア２０の両側に第１レール２４が配置され、支持部材６の下面が第１レール２４上に載置されて第１レール２４に沿って摺動可能になっている。
従って、駆動ギヤ３２０の駆動により、第１コンベア２０が固定部２の長手方向に沿って進退すると、第１可動部３が第１コンベア２０の進退方向に摺動するようになっている。 The transfer device 50 is disposed above the first movable unit 3, the rectangular plate-shaped fixed unit 2 fixed to the transfer chamber 300, the rectangular plate-shaped first movable unit 3 disposed above the fixed unit 2, and the first movable unit 3. The second movable part 4 having a rectangular plate shape is provided, and a conveyed product (glass substrate) 100 is placed on the second movable part 4.
A first conveyor 20 is installed on the upper surface of the fixing portion 2 along the longitudinal direction, and a box-shaped support member 6 is fixed to a lower portion of a belt (not shown) of the first conveyor 20, and the support member 6 is fixed to the fixing portion 2. It extends above. The lower surface of the first movable part 3 is supported on the upper surface of the support member 6. The first rail 24 is disposed on the upper surface of the fixed portion 2 along the first conveyor 20 and on both sides of the first conveyor 20, and the lower surface of the support member 6 is placed on the first rail 24 to be placed on the first rail. 24 is slidable along the line 24.
Therefore, when the first conveyor 20 advances and retreats along the longitudinal direction of the fixed part 2 by driving the drive gear 320, the first movable part 3 slides in the advancing and retreating direction of the first conveyor 20.

又、第１可動部３の上面には、第１コンベア２０と平行でかつ第１コンベア２０の上側にかぶさるように第２コンベア３０が設置され、第２コンベア３０の図示しないベルトの上側部分に第２可動部４の下面が固定されている。さらに、第１可動部３の上面には第２コンベア３０に沿い、かつ第２コンベア３０の両側に第２レール３４が配置され、第２可動部４の下面が第２レール３４上に載置されて第２レール３４に沿って摺動可能になっている。
従って、駆動ギヤ３２０の駆動により、第２コンベア３０が第１可動部３の長手方向に沿って進退すると、第２可動部４が第２コンベア３０の進退方向に摺動するようになっている。 In addition, a second conveyor 30 is installed on the upper surface of the first movable part 3 so as to be parallel to the first conveyor 20 and on the upper side of the first conveyor 20. The lower surface of the second movable part 4 is fixed. Furthermore, the second rail 34 is disposed on the upper surface of the first movable portion 3 along the second conveyor 30 and on both sides of the second conveyor 30, and the lower surface of the second movable portion 4 is placed on the second rail 34. Thus, it can slide along the second rail 34.
Therefore, when the second conveyor 30 advances and retracts along the longitudinal direction of the first movable part 3 by driving the drive gear 320, the second movable part 4 slides in the advance and retract direction of the second conveyor 30. .

第１コンベア２０及び第２コンベア３０の進退方向は、搬送チャンバー３００からプロセスチャンバー４００へのガラス基板１００の搬送方向Ｔに一致するので、第１コンベア２０及び第２コンベア３０の進退によって第１可動部３及び第２可動部４が摺動し、ガラス基板１００が搬送される。又、第１コンベア２０及び第２コンベア３０が元の位置に戻ると、第２可動部４は完全に搬送チャンバー３００内の初期位置に戻り、プロセスチャンバー４００内に残らないようになっている。   Since the forward and backward directions of the first conveyor 20 and the second conveyor 30 coincide with the transport direction T of the glass substrate 100 from the transport chamber 300 to the process chamber 400, the first movable 20 and the second conveyor 30 move forward and backward. The part 3 and the second movable part 4 slide, and the glass substrate 100 is conveyed. In addition, when the first conveyor 20 and the second conveyor 30 return to their original positions, the second movable part 4 completely returns to the initial position in the transfer chamber 300 and does not remain in the process chamber 400.

次に、図２を参照して本発明の実施形態に係る搬送装置５０の詳細な構成について説明する。図２において、第１コンベア２０は、一対のローラ２１、２２間に第１ベルト２３が巻回されてなり、第１ベルト２３の下側部分の右端に支持部材６の下面が固定されている。ローラ２１、２２はそれぞれ支持脚２１ａ、２２ａに軸支されている。
又、第２コンベア３０は、一対のローラ３１、３２間に第２ベルト３３が巻回されてなり、第２ベルト３３の下側部分の左端は、固定部材８を介して第１ベルト２３の上側部分の左端に互いに固定されている。さらに、第２ベルト３３の上側部分の右端は、取付け部材３５を介して第２可動部４の下面に固定されている。ローラ３１、３２はそれぞれ支持脚３１ａ、３２ａに軸支されている。
なお、第２ベルト３３が第１ベルト２３に近接して対向するよう、第１可動部３における第２コンベア３０の配置部分に矩形状の切り抜き３ｈが形成され、第２ベルト３３の進退を邪魔しないようになっている。 Next, a detailed configuration of the transfer device 50 according to the embodiment of the present invention will be described with reference to FIG. In FIG. 2, the first conveyor 20 has a first belt 23 wound between a pair of rollers 21 and 22, and the lower surface of the support member 6 is fixed to the right end of the lower portion of the first belt 23. . The rollers 21 and 22 are pivotally supported by support legs 21a and 22a, respectively.
The second conveyor 30 has a second belt 33 wound between a pair of rollers 31 and 32, and the left end of the lower portion of the second belt 33 is connected to the first belt 23 via the fixing member 8. It is mutually fixed to the left end of the upper part. Further, the right end of the upper portion of the second belt 33 is fixed to the lower surface of the second movable portion 4 via the attachment member 35. The rollers 31 and 32 are pivotally supported by support legs 31a and 32a, respectively.
In addition, a rectangular cutout 3h is formed in the arrangement portion of the second conveyor 30 in the first movable portion 3 so that the second belt 33 faces the first belt 23 in the vicinity thereof, thereby obstructing the advancement / retraction of the second belt 33. It is supposed not to.

第１ベルト２３及び第２ベルト３３は、例えばスチールベルト、樹脂製ベルトとすることができる。又、第１ベルト２３と支持部材６の固定、第２ベルト３３と第２可動部４の固定、及び第１ベルト２３と第２ベルト３３の固定は、ボルト等で行うことができるがこれに限られない。
又、支持部材６は第１ベルト２３との固定位置から第１ベルト２３の両側端より外側に水平に延びた後、上方に立ち上がるアーム部６ａを形成し、アーム部６ａ上端に第１可動部３の下面が支持されている。従って、支持部材６が第１ベルト２の進退を邪魔しないようになっている。 The first belt 23 and the second belt 33 can be, for example, a steel belt or a resin belt. The first belt 23 and the support member 6 can be fixed, the second belt 33 and the second movable part 4 can be fixed, and the first belt 23 and the second belt 33 can be fixed with bolts or the like. Not limited.
Further, the support member 6 forms an arm portion 6a that extends horizontally outward from both side ends of the first belt 23 from a fixed position with the first belt 23, and then rises upward. The first movable portion is formed at the upper end of the arm portion 6a. The lower surface of 3 is supported. Therefore, the support member 6 does not disturb the advance / retreat of the first belt 2.

図３は、図２のＩＩＩ-ＩＩＩ線に沿う断面図である。この図において、支持部材６下面の２つの脚６ｂに凹部が設けられ、この凹部が第１レール２４に被さるようになっている。同様に、第２可動部４下面の２つの脚４ｂに凹部が設けられ、この凹部が第２レール３４に被さるようになっている。上記各凹部には、例えばローラ又はベアリングが配置され、各レールとの転がり摩擦を低減し、スムースな摺動を行えるようになっている。
なお、第１ベルト２３と第２ベルト３３は固定部材８で固定されているので、ローラ２１、２２のいずれか、又は第1可動部３の側面を駆動ギヤ３２０で駆動させると、第１ベルト２３の進退に応じて第２ベルト３３が進退する。従って、ローラ３１、３２の駆動を制御する必要はない。 3 is a cross-sectional view taken along line III-III in FIG. In this figure, a recess is provided in the two legs 6 b on the lower surface of the support member 6, and this recess covers the first rail 24. Similarly, a recess is provided in the two legs 4 b on the lower surface of the second movable portion 4, and this recess covers the second rail 34. For example, a roller or a bearing is disposed in each of the recesses, so that rolling friction with each rail can be reduced and smooth sliding can be performed.
Since the first belt 23 and the second belt 33 are fixed by the fixing member 8, when the driving gear 320 drives one of the rollers 21 and 22 or the side surface of the first movable portion 3, the first belt The second belt 33 advances and retreats according to the advance and retreat of 23. Therefore, it is not necessary to control the driving of the rollers 31 and 32.

図４は、第１コンベア２０、第２コンベア３０の進退に伴って、第１可動部３及び第２可動部４が進退（摺動）する状態を示す工程図である。なお、図４において、左方向への移動を「前進」、右方向への移動を「後退」と適宜称する。
まず、初期位置で、支持部材６が第１コンベア２０の右端に位置し、固定部材８が第１コンベア２０の左端に位置し、取付け部材３５が第２コンベア３０の右端に位置している。このときの位置を基準とする（図４（ａ））。
次に、第１コンベア２０を駆動させ、第１ベルト２３の下側部分が左にＬ／２だけ前進するようにする（図４（ｂ））。このとき、第１ベルト２３の下側部分の前進につれて支持部材６及び第１可動部３がＬ／２だけ前進する。一方、第１ベルト２３の上側部分は右にＬ／２だけ後退するので、固定部材８もＬ／２後退する。しかしながら、第１ベルト２３の下側部分の前進につれて固定部材８で固定されている第１可動部３がＬ／２前進したため、第２ベルト３３の上側は元の位置からL（第1可動部３の移動距離の２倍）だけ左に前進することになる。従って、第２ベルト３３の上側部分に固定されている取付け部材３５(及び第２可動部４)は、Ｌだけ前進することになる。 FIG. 4 is a process diagram showing a state in which the first movable unit 3 and the second movable unit 4 advance and retreat (slide) as the first conveyor 20 and the second conveyor 30 advance and retreat. In FIG. 4, the movement in the left direction is appropriately referred to as “forward”, and the movement in the right direction is appropriately referred to as “reverse”.
First, in the initial position, the support member 6 is positioned at the right end of the first conveyor 20, the fixing member 8 is positioned at the left end of the first conveyor 20, and the attachment member 35 is positioned at the right end of the second conveyor 30. The position at this time is used as a reference (FIG. 4A).
Next, the first conveyor 20 is driven so that the lower portion of the first belt 23 advances to the left by L / 2 (FIG. 4B). At this time, the support member 6 and the first movable portion 3 advance by L / 2 as the lower portion of the first belt 23 advances. On the other hand, since the upper part of the first belt 23 is retracted to the right by L / 2, the fixing member 8 is also retracted by L / 2. However, as the lower part of the first belt 23 advances, the first movable part 3 fixed by the fixed member 8 advances L / 2, so that the upper side of the second belt 33 moves from the original position to L (first movable part). Will move to the left by 2 times the travel distance of 3). Accordingly, the attachment member 35 (and the second movable portion 4) fixed to the upper portion of the second belt 33 moves forward by L.

つまり、第１ベルト２３をＬ／２だけ駆動させると、第１可動部３がＬ／２前進すると共に、第２ベルト３３がＬだけ進退することに起因して第２可動部４が第１可動部３上でＬだけ相対的に前進するので、第２可動部４は固定部２に対して３／２Ｌ（Ｌ／２＋Ｌ）前進することになる。さらに第１ベルト２３を駆動量Ｌだけ駆動すると、上記と同様の議論により、第２可動部４は固定部２に対して３Ｌだけ前進する（図４（ｃ））。
このように、２個の可動部を固定部上に載置するだけで、最上部の第２可動部は、第１コンベアの繰り出し量（駆動量）Ｌの３倍の移動（搬送）量が得られる。 That is, when the first belt 23 is driven by L / 2, the first movable portion 3 moves forward by L / 2, and the second movable portion 4 moves to the first by moving the second belt 33 forward and backward by L. Since the movable part 3 moves forward relatively by L, the second movable part 4 moves forward by 3 / 2L (L / 2 + L) with respect to the fixed part 2. When the first belt 23 is further driven by the drive amount L, the second movable portion 4 moves forward by 3L relative to the fixed portion 2 by the same discussion as above (FIG. 4C).
In this way, the uppermost second movable portion has a movement (conveyance) amount that is three times the feed amount (drive amount) L of the first conveyor, by simply placing the two movable portions on the fixed portion. can get.

又、本発明において、第２可動部の上面に、本発明に係る別の搬送装置の固定部を固定してもよい。このようにすると、下側搬送装置の第２可動部上の搬送装置においても上記した第１コンベアの繰り出し量Ｌの３倍の移動量が第２可動部に生じるため、合計として６倍の移動量を生じさせることができる。さらに、搬送装置を３台以上積層してもよい。   Moreover, in this invention, you may fix the fixing | fixed part of another conveying apparatus which concerns on this invention on the upper surface of a 2nd movable part. If it does in this way, in the conveyance apparatus on the 2nd movable part of a lower conveyance apparatus, since the movement amount 3 times as much as the feeding amount L of the 1st conveyor mentioned above will arise in the 2nd movable part, it will move 6 times in total. Amount can be produced. Further, three or more transfer devices may be stacked.

本発明は上記した実施形態に限定されず、本発明の思想と範囲に含まれる様々な変形及び均等物に及ぶことはいうまでもない。   It goes without saying that the present invention is not limited to the above-described embodiments, and extends to various modifications and equivalents included in the spirit and scope of the present invention.

本発明の実施形態に係る搬送装置を含む製造ラインの斜視図である。It is a perspective view of a production line including a conveyance device according to an embodiment of the present invention. 本発明の実施形態に係る搬送装置の構成の斜視図である。It is a perspective view of the structure of the conveying apparatus which concerns on embodiment of this invention. 図２のＩＩＩ−ＩＩＩ線に沿う断面図である。It is sectional drawing which follows the III-III line of FIG. 第１可動部及び第２可動部が摺動する状態を示す工程図である。It is process drawing which shows the state which a 1st movable part and a 2nd movable part slide.

符号の説明Explanation of symbols

２ 固定部
３ 第１可動部
４ 第２可動部
６ 支持部材
２０ 第１コンベア
２１、２２ ローラ
２３ 第１ベルト
３０ 第２コンベア
３１、３２ ローラ
３３ 第２ベルト
５０ 搬送装置
１００ 搬送物（ガラス基板） DESCRIPTION OF SYMBOLS 2 Fixed part 3 1st movable part 4 2nd movable part 6 Support member 20 1st conveyor 21, 22 Roller 23 1st belt 30 2nd conveyor 31, 32 Roller 33 2nd belt 50 Conveyance apparatus 100 Conveyed material (glass substrate)

Claims (2)

一対のローラ間に第１ベルトが巻回されてなる第１コンベアを上面に有する固定部と、
前記第１ベルトの下側部分に固定され、前記第１ベルトから上方に延びる支持部材と、
前記支持部材に支持されて前記固定部の上方に配置され、かつ一対のローラ間に第２ベルトが巻回されてなる第２コンベアを上面に有する第１可動部と、
前記第２ベルトの上側部分に固定されて前記第１可動部の上方に配置され、搬送物を載置可能な第２可動部とを有し、
前記第２ベルトは、前記第１ベルトと平行でかつ前記第１ベルトの上側部分に対向し、その対向部分の一部が互いに固定され、
前記第１可動部は、前記第１ベルトの進退方向に沿って前記固定部に対し摺動可能であり、前記第２可動部は、前記第２ベルトの進退方向に沿って前記第１可動部に対し摺動可能であり、
前記第１可動部が前記固定部に対し距離Ｌだけ摺動したとき、前記第２可動部は前記第１可動部に対し距離２Ｌだけ摺動し、前記第２可動部が前記固定部に対して距離３Ｌだけ摺動可能な搬送装置。 A fixed part having a first conveyor formed by winding a first belt between a pair of rollers on the upper surface;
A support member fixed to the lower portion of the first belt and extending upward from the first belt;
A first movable part supported by the support member and disposed above the fixed part, and having a second conveyor formed on a top surface by a second belt wound between a pair of rollers;
A second movable part that is fixed to the upper part of the second belt and is disposed above the first movable part, and on which a conveyed product can be placed;
The second belt is parallel to the first belt and faces the upper portion of the first belt, and a part of the facing portions are fixed to each other.
The first movable portion is slidable with respect to the fixed portion along the advance / retreat direction of the first belt, and the second movable portion is the first movable portion along the advance / retreat direction of the second belt. Is slidable against
When the first movable part slides with respect to the fixed part by a distance L, the second movable part slides with respect to the first movable part by a distance of 2L, and the second movable part moves with respect to the fixed part. A transport device that can slide by a distance of 3L. 前記第２可動部の上面に、別の前記搬送装置の固定部が固定されている請求項１記載の搬送装置。 The transport device according to claim 1, wherein a fixed portion of another transport device is fixed to an upper surface of the second movable portion.
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CN102887317A (en) * 2011-07-20 2013-01-23 株式会社Ihi Transfer device and transfer method
CN106734681A (en) * 2016-12-11 2017-05-31 安徽海拓志永智能装备股份有限公司 Servo shuttle unit in the middle of a kind of punching automation

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JPH0297315U (en) * 1989-01-23 1990-08-02
JPH0333808U (en) * 1989-08-09 1991-04-03
JPH11208854A (en) * 1998-01-20 1999-08-03 Tsudakoma Corp Linear body-type double feeding device and method for driving it
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JP2006001658A (en) * 2004-06-15 2006-01-05 Ishikawajima Harima Heavy Ind Co Ltd Transfer device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102887317A (en) * 2011-07-20 2013-01-23 株式会社Ihi Transfer device and transfer method
CN106734681A (en) * 2016-12-11 2017-05-31 安徽海拓志永智能装备股份有限公司 Servo shuttle unit in the middle of a kind of punching automation

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