JP2009159795A - 超音波モータ - Google Patents
超音波モータ Download PDFInfo
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- JP2009159795A JP2009159795A JP2007338366A JP2007338366A JP2009159795A JP 2009159795 A JP2009159795 A JP 2009159795A JP 2007338366 A JP2007338366 A JP 2007338366A JP 2007338366 A JP2007338366 A JP 2007338366A JP 2009159795 A JP2009159795 A JP 2009159795A
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- piezoelectric element
- vibration
- ultrasonic motor
- reinforcing member
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- 230000003014 reinforcing effect Effects 0.000 claims abstract description 34
- 238000005452 bending Methods 0.000 claims abstract description 31
- 229920005989 resin Polymers 0.000 claims description 15
- 239000011347 resin Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 9
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000007769 metal material Substances 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 238000000465 moulding Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 abstract description 7
- 230000010355 oscillation Effects 0.000 abstract 4
- 230000001066 destructive effect Effects 0.000 abstract 1
- 238000005336 cracking Methods 0.000 description 5
- 239000004734 Polyphenylene sulfide Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 description 3
- 238000005096 rolling process Methods 0.000 description 3
- 229910000737 Duralumin Inorganic materials 0.000 description 2
- 229920000106 Liquid crystal polymer Polymers 0.000 description 2
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 2
- 239000004696 Poly ether ether ketone Substances 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920002530 polyetherether ketone Polymers 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 239000002990 reinforced plastic Substances 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 210000001015 abdomen Anatomy 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- JUPQTSLXMOCDHR-UHFFFAOYSA-N benzene-1,4-diol;bis(4-fluorophenyl)methanone Chemical compound OC1=CC=C(O)C=C1.C1=CC(F)=CC=C1C(=O)C1=CC=C(F)C=C1 JUPQTSLXMOCDHR-UHFFFAOYSA-N 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- NJLLQSBAHIKGKF-UHFFFAOYSA-N dipotassium dioxido(oxo)titanium Chemical compound [K+].[K+].[O-][Ti]([O-])=O NJLLQSBAHIKGKF-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
- H02N2/004—Rectangular vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/026—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors by pressing one or more vibrators against the driven body
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
- H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
【解決手段】圧電素子10の屈曲振動による応力集中を招く屈曲振動の腹に対応する両側面を含む外周面に補強部材11を固着して屈曲振動による応力集中部位の強度を高めて耐久性の向上を図るように構成したものである。
【選択図】 図1
Description
Claims (5)
- 縦振動及び屈曲振動を同時に励起して楕円振動を発生させ、前記楕円振動により駆動力を得て被駆動体を駆動する超音波モータであって、
圧電素子と、
前記圧電素子の上面側における屈曲振動の腹に設けられた補強部材と、
前記圧電素子の下面側における屈曲振動の腹に設けられ、前記駆動力を前記被駆動体に伝達する駆動子と、
前記圧電素子に設けられ、筐体に位置決め保持される保持部材と、
前記保持部材を押圧して前記圧電素子の駆動子を前記被駆導体に摩擦駆動可能に圧接する押圧部材と、
を具備することを特徴とする超音波モータ。 - 縦振動及び屈曲振動を同時に励起して楕円振動を発生させ、前記楕円振動により駆動力を得て被駆動体を駆動する超音波モータであって、
圧電素子と、
前記圧電素子の屈曲振動の腹を囲む外面のうち少なくとも下面を含む3面に設けられ、下面側が前記駆動力を前記被駆動体に伝達する駆動子として機能する補強部材と、
前記圧電素子に設けられ、筐体に位置決め保持される保持部材と、
前記保持部材を押圧して前記補強部材の下面側を前記被駆導体に摩擦駆動可能に圧接する押圧部材と、
を具備することを特徴とする超音波モータ。 - 前記補強部材は、下面側に突部が設けられ、該突部が前記被駆動体に摩擦駆動可能に圧接されることを特徴とする請求項2記載の超音波モータ。
- 前記補強部材は、樹脂材料,金属材料又はセラミックのいずれかで形成され、前記圧電素子に接着剤を用いて固着されること特徴とする請求項1乃至3のいずれか記載の超音波モータ。
- 前記補強部材は、樹脂材料で形成され、前記圧電素子をインサート成形して設けられたことを特徴とする請求項1乃至4のいずれか記載の超音波モータ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007338366A JP2009159795A (ja) | 2007-12-27 | 2007-12-27 | 超音波モータ |
US12/330,106 US7960897B2 (en) | 2007-12-27 | 2008-12-08 | Ultrasonic motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007338366A JP2009159795A (ja) | 2007-12-27 | 2007-12-27 | 超音波モータ |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2009159795A true JP2009159795A (ja) | 2009-07-16 |
Family
ID=40797301
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007338366A Pending JP2009159795A (ja) | 2007-12-27 | 2007-12-27 | 超音波モータ |
Country Status (2)
Country | Link |
---|---|
US (1) | US7960897B2 (ja) |
JP (1) | JP2009159795A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017175695A (ja) * | 2016-03-22 | 2017-09-28 | セイコーエプソン株式会社 | 圧電アクチュエーター、積層アクチュエーター、圧電モーター、ロボット、ハンド、及びポンプ |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009142014A (ja) * | 2007-12-04 | 2009-06-25 | Olympus Corp | 超音波モータ |
CN102324867B (zh) * | 2011-09-22 | 2013-10-09 | 哈尔滨工业大学 | 使用复合弯振双足直线超声振子的直线平台 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006211839A (ja) * | 2005-01-28 | 2006-08-10 | Olympus Corp | 超音波駆動装置 |
JP2007209073A (ja) * | 2006-01-31 | 2007-08-16 | Olympus Corp | 超音波振動子 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0818379A (ja) | 1994-06-27 | 1996-01-19 | Murata Mfg Co Ltd | 圧電振動部品 |
JP4309736B2 (ja) * | 2003-10-01 | 2009-08-05 | オリンパス株式会社 | 振動波リニアモータ |
AU2004286865B2 (en) * | 2003-11-04 | 2008-07-24 | University Of Washington | Toothbrush employing an acoustic waveguide |
US7242131B2 (en) * | 2004-05-12 | 2007-07-10 | Olympus Corporation | Ultrasonic motor |
JP2005333749A (ja) * | 2004-05-20 | 2005-12-02 | Olympus Corp | 超音波振動子及びそれを用いた超音波モータ |
JP4576185B2 (ja) * | 2004-09-22 | 2010-11-04 | オリンパス株式会社 | 超音波振動子 |
JP2006094591A (ja) * | 2004-09-22 | 2006-04-06 | Olympus Corp | 超音波モータとその運転方法 |
JP4583190B2 (ja) * | 2005-01-28 | 2010-11-17 | 富士通株式会社 | 共振器、超音波接合ヘッド及び超音波接合装置 |
JP4794897B2 (ja) * | 2005-04-26 | 2011-10-19 | オリンパス株式会社 | 超音波モータ |
JP2007221865A (ja) * | 2006-02-14 | 2007-08-30 | Seiko Epson Corp | 圧電振動体、圧電振動体の固有振動数調整方法、圧電アクチュエータ、および電子機器 |
US7929382B2 (en) * | 2007-02-14 | 2011-04-19 | Seiko Epson Corporation | Piezoelectric transducer, piezoelectric actuator, and portable device |
-
2007
- 2007-12-27 JP JP2007338366A patent/JP2009159795A/ja active Pending
-
2008
- 2008-12-08 US US12/330,106 patent/US7960897B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006211839A (ja) * | 2005-01-28 | 2006-08-10 | Olympus Corp | 超音波駆動装置 |
JP2007209073A (ja) * | 2006-01-31 | 2007-08-16 | Olympus Corp | 超音波振動子 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017175695A (ja) * | 2016-03-22 | 2017-09-28 | セイコーエプソン株式会社 | 圧電アクチュエーター、積層アクチュエーター、圧電モーター、ロボット、ハンド、及びポンプ |
Also Published As
Publication number | Publication date |
---|---|
US20090167112A1 (en) | 2009-07-02 |
US7960897B2 (en) | 2011-06-14 |
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