JP2009150780A - Back pressure type gas micrometer, and internal diameter simultaneous inspection system and internal diameter simultaneous inspection method of plurality of hole parts to be inspected - Google Patents
Back pressure type gas micrometer, and internal diameter simultaneous inspection system and internal diameter simultaneous inspection method of plurality of hole parts to be inspected Download PDFInfo
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Abstract
Description
本発明は、背圧式気体マイクロメータ、そのマイクロメータを用いた複数の被検査孔部の内径同時検査システムおよび内径同時検査方法に関する。 The present invention relates to a back pressure gas micrometer, an inner diameter simultaneous inspection system and an inner diameter simultaneous inspection method for a plurality of holes to be inspected using the micrometer.
被検査孔部を有してワークの一端に開口する孔に測定ヘッドを抜差可能に挿入し、その測定ヘッドの外周面に設けた空気噴出口より被検査孔部に対し検査用圧縮空気をそれぞれ噴射して、その噴射時の背圧を測定し、その背圧測定値から被検査孔部の内径（例えば内径寸法や、真円度等）の適否を判定、検査可能とした背圧式空気マイクロメータは、例えば下記特許文献１に示されるように従来公知である。
しかしながら上記従来公知の背圧式空気マイクロメータでは、測定ヘッドの外周面に軸方向に間隔をおいて３個の空気噴出口が同一母線上に整列しているため、その３個の空気噴出口と外部の３系統の空気導管との間を接続する３系統の内部通路を測定ヘッド内で相互に独立して取り回す必要があり、それだけその通路構造が複雑化し、コストが嵩む等の問題があり、この問題は、空気噴出口の設置個数を増やせば増やすほどに顕著となる。 However, in the above-described conventionally known back pressure type air micrometer, since three air outlets are aligned on the same bus line with an axial interval on the outer peripheral surface of the measuring head, the three air outlets and It is necessary to route the three internal passages connected to the three external air conduits independently from each other in the measuring head, and the passage structure is complicated and the cost is increased. This problem becomes more prominent as the number of installed air outlets increases.
また上記従来のものでは、内径検査に当たり、３個の空気噴出口から検査用圧縮空気を順次に噴出させるようになっていて、複数の被検査孔部に対して同時に検査を行うことはできなかったため、作業能率が悪い問題もあった。 Further, in the above-described conventional one, the compressed air for inspection is sequentially ejected from the three air ejection ports in the inner diameter inspection, and it is not possible to inspect a plurality of holes to be inspected at the same time. Therefore, there was a problem that work efficiency was poor.
本発明は、斯かる実情に鑑みてなされたもので、従来構造の上記問題を解決できるようにした構造簡単な背圧式気体マイクロメータ、同メータを用いた複数の被検査孔部の内径同時検査システムおよび検査方法を提供することを目的とする。 The present invention has been made in view of such circumstances, and has a simple back pressure type gas micrometer capable of solving the above-described problems of the conventional structure, and a simultaneous inner diameter inspection of a plurality of holes to be inspected using the same meter. An object is to provide a system and an inspection method.
上記目的を達成するために請求項１の発明は、互いに同軸上に並ぶ複数の被検査孔部を有してワークに設けられる孔に抜差可能に挿入される測定ヘッドを備え、前記複数の被検査孔部に対し検査用圧縮気体をそれぞれ噴射した時の背圧に基づいて該複数の被検査孔部の内径を同時に検査するために用いる背圧式気体マイクロメータであって、 前記測定ヘッドには、前記複数の被検査孔部にそれぞれ対応して該測定ヘッドの外周面に両端が開口するように、該測定ヘッドをその軸方向に相互に間隔をおいて横切る複数の横通路と、その複数の横通路に内端がそれぞれ開口し且つ外端が該測定ヘッドの基端部の端面まで該測定ヘッドの軸線方向に沿って直線状に延びる複数の縦通路と、該測定ヘッドの基端部外面に開口し且つ前記複数の縦通路の外端部にそれぞれ連通する複数の気体導入口とが形成され、前記複数の縦通路は、前記測定ヘッドの軸線と直交する投影面で見て、周方向に互いに間隔をおいて環状に配列されて相互に独立しており、前記複数の横通路は、前記投影面で見て、前記孔の中心線と前記複数の縦通路とを各々結ぶ相異なる複数の直径線に沿ってそれぞれ直線状に延びており、前記測定ヘッドには、前記複数の縦通路の外端部を外気から遮断して複数の気体導管に個別に連通させる圧縮気体導入手段が設けられ、それら気体導管より前記複数の縦通路の外端部に前記検査用圧縮気体を個別に導入可能であることを特徴とする。 In order to achieve the above object, the invention of claim 1 includes a measuring head having a plurality of holes to be inspected coaxially and inserted into a hole provided in a workpiece so as to be attachable / detachable. A back pressure type gas micrometer used for simultaneously inspecting the inner diameters of the plurality of hole portions to be inspected based on back pressures when the compressed gas for inspection is respectively injected into the hole portions to be inspected. A plurality of lateral passages that cross the measurement head at intervals in the axial direction so that both ends open on the outer peripheral surface of the measurement head corresponding to the plurality of holes to be inspected, and A plurality of vertical passages each having an inner end opened in a plurality of horizontal passages and an outer end extending linearly along the axial direction of the measurement head to the end face of the base end of the measurement head; and the base end of the measurement head The plurality of vertical passages that open to the outer surface of the section A plurality of gas introduction ports communicating with the outer end portions are formed, and the plurality of vertical passages are annularly arranged at intervals in the circumferential direction when viewed from a projection plane orthogonal to the axis of the measurement head. The plurality of horizontal passages are linearly formed along a plurality of different diameter lines respectively connecting the center line of the hole and the plurality of vertical passages when viewed in the projection plane. The measuring head is provided with compressed gas introduction means for blocking the outer ends of the plurality of vertical passages from the outside air and individually communicating with the plurality of gas conduits. The compressed gas for inspection can be individually introduced into the outer end of the passage.
また請求項２の発明は、請求項１の特徴に加えて、前記圧縮気体導入手段が、前記複数の縦通路の外端を閉塞する閉塞手段と、前記測定ヘッドの外面に開口して前記複数の気体導管の下流端をそれぞれ接続可能な複数の気体導入口と、その複数の気体導入口及び前記複数の縦通路の外端部間を個別に連通すべく該基端部内に形成される複数の連絡通路とで構成されることを特徴とする。 According to a second aspect of the present invention, in addition to the feature of the first aspect, the compressed gas introducing means includes a closing means for closing outer ends of the plurality of longitudinal passages, and an opening on an outer surface of the measuring head. A plurality of gas inlets connectable to the downstream ends of the gas conduits, and a plurality of gas inlets formed in the base end portion to individually communicate between the gas inlets and the outer ends of the plurality of longitudinal passages. It is characterized by comprising a communication passage.
また請求項３の発明は、請求項２の特徴に加えて、前記測定ヘッドが、ヘッド先部側よりも大径に形成されていてワークとの係合により該測定ヘッドの挿入限界を規制する拡径基端部を一体に備え、その拡径基端部の外周面に前記複数の気体導入口が周方向に間隔をおいて配設され、複数の連絡通路が前記拡径基端部内を径方向に延びていることを特徴とする。 According to a third aspect of the present invention, in addition to the feature of the second aspect, the measurement head is formed to have a larger diameter than the head tip side, and the insertion limit of the measurement head is restricted by engagement with a workpiece. An enlarged diameter base end is integrally provided, and the plurality of gas inlets are arranged on the outer peripheral surface of the enlarged diameter base end at intervals in the circumferential direction, and a plurality of communication passages are provided in the enlarged diameter base end. It is characterized by extending in the radial direction.
また請求項４の発明は、請求項２又は３の特徴に加えて、前記測定ヘッドの基端部端面には、作業者により把持し得る有底筒状のホルダが着脱可能に結合され、前記複数の気体導入口にそれぞれ接続される複数の気体導管が、前記ホルダの内部を通して外部に引き出されることを特徴とする。 According to a fourth aspect of the present invention, in addition to the features of the second or third aspect, a bottomed cylindrical holder that can be gripped by an operator is detachably coupled to a base end face of the measuring head, A plurality of gas conduits respectively connected to the plurality of gas introduction ports are drawn out through the inside of the holder.
また請求項５の発明は、請求項３又は４の特徴に加えて、前記ホルダが前記閉塞手段を兼ねることを特徴とする。
The invention of
また請求項６の発明は、請求項１〜５の何れかの特徴に加えて、前記測定ヘッドは、合金工具鋼を真空焼き入れして形成され、前記複数の縦通路及び前記複数の横通路はそれぞれ細孔放電加工により形成されることを特徴とする。 According to a sixth aspect of the present invention, in addition to the feature of any one of the first to fifth aspects, the measuring head is formed by vacuum-quenching alloy tool steel, and the plurality of longitudinal passages and the plurality of transverse passages. Are each formed by pore electrical discharge machining.
また請求項７の発明は、ワークの一端に開口する孔に設けられて互いに同軸上に並ぶ複数の被検査孔部に対する内径同時検査システムであって、前記請求項２〜６の何れか１項に記載の背圧式気体マイクロメータと、そのメータの測定ヘッドにおける前記複数の縦通路に前記複数の気体導管を介して検査用圧縮気体を供給可能な圧縮気体源と、前記気体導管にそれぞれ介装される複数の開閉弁と、その各開閉弁と測定ヘッド間の各気体導管に接続されて前記背圧を検出する背圧検出手段と、その背圧検出手段の検出結果を表示する表示手段とを備えたことを特徴とする。
The invention according to
また請求項８の発明は、請求項７の特徴に加えて、前記複数の気体導管の途中を纏めてワンタッチで接続・分離可能なワンタッチジョイントを備えたことを特徴とする。
The invention of
また請求項９の発明は、ワークの一端に開口する孔に設けられて互いに同軸上に並ぶ複数の被検査孔部に対する内径同時検査方法であって、前記請求項２〜６の何れか１項に記載の背圧式気体マイクロメータの測定ヘッドを前記孔に挿入して、その測定ヘッドの外周面に開口する前記複数の横通路の両端開口を該孔の前記複数の被検査孔部にそれぞれ対向させる工程と、前記測定ヘッドの複数の気体導入口に検査用圧縮気体を同時に供給して、前記複数の横通路の両端開口より前記複数の被検査孔部に対し検査用圧縮気体を同時に噴射する工程と、その噴射時の背圧を測定し、その測定された背圧に基づいて前記複数の被検査孔部の内径の適否を判定する工程とを含むことを特徴とする。
The invention of
以上のように本発明によれば、ワークの一端に開口する孔に設けられて互いに同軸上に並ぶ複数の被検査孔部に対し内径検査を行うに当たり、測定ヘッドをワークの孔に挿入して、その測定ヘッドの外周面に開口する複数の横通路の両端開口を該孔の複数の被検査孔部にそれぞれ対向させ、その状態で測定ヘッド内の複数の縦通路に検査用圧縮気体を同時に供給して、複数の横通路の両端開口より複数の被検査孔部に対し検査用圧縮気体を同時に噴射し、その噴射時の背圧を測定できるようにしたので、複数の被検査孔部に対する内径検査を単一の測定ヘッドにより同時に行うことができ、検査作業の能率向上に大いに寄与することができる。また測定ヘッドの軸線に沿って直線状に延びる前記複数の縦通路は、測定ヘッドの軸線と直交する投影面で見て、周方向に互いに間隔をおいて環状に配列されて相互に独立しており、また複数の被検査孔部に対応した位置で該ヘッドをそれぞれ横切る前記複数の横通路は、前記投影面で見て、孔の中心線と複数の縦通路とを各々結ぶ相異なる複数の直径線に沿ってそれぞれ直線状に延びるので、被検査孔部の数に応じて検査用圧縮気体の通路系統を多くしても、それらを測定ヘッド内部で相互に干渉させることなく無理なく取り回すことができ、それらの加工も比較的容易となり、コスト節減が図られる。 As described above, according to the present invention, when performing an inner diameter inspection on a plurality of holes to be inspected that are provided in a hole opened at one end of a workpiece and are arranged coaxially with each other, the measurement head is inserted into the hole of the workpiece. , Both ends of the plurality of horizontal passages that open to the outer peripheral surface of the measuring head are respectively opposed to the plurality of holes to be inspected, and in this state, the test compressed gas is simultaneously applied to the plurality of vertical passages in the measuring head. Since the compressed gas for inspection is simultaneously injected to the plurality of holes to be inspected from the openings at both ends of the plurality of horizontal passages and the back pressure at the time of injection can be measured, The inner diameter inspection can be performed simultaneously by a single measuring head, which can greatly contribute to the improvement of the efficiency of the inspection work. Further, the plurality of vertical passages extending linearly along the axis of the measuring head are arranged in an annular manner at intervals from each other in the circumferential direction when viewed from a projection plane orthogonal to the axis of the measuring head. In addition, the plurality of horizontal passages that respectively cross the head at positions corresponding to the plurality of holes to be inspected are different from each other that respectively connect the center line of the hole and the plurality of vertical passages when viewed from the projection plane. Since each of them extends linearly along the diameter line, even if the number of inspection compressed gas passages is increased according to the number of holes to be inspected, they can be easily routed without interfering with each other inside the measuring head. Can be processed relatively easily, and the cost can be reduced.
また特に請求項２の発明によれば、測定ヘッド内の複数の縦通路がヘッド基端部の端面まで直線状に延びていても、これら縦通路に検査用圧縮気体を供給する気体導入口を相互に極力離間させてヘッド外面に開口できるため、複数の気体導入口への複数の気体導管の接続を容易に行うことができる。 In particular, according to the invention of claim 2, even if the plurality of vertical passages in the measuring head extend linearly to the end face of the head base end portion, the gas inlet for supplying the compressed gas for inspection to these vertical passages is provided. Since they can be opened as far as possible from each other as far as possible, the plurality of gas conduits can be easily connected to the plurality of gas inlets.
また特に請求項３の発明によれば、測定ヘッドは、先部側よりも大径に形成されていてワークとの係合により該測定ヘッドの挿入限界を規制する拡径基端部を一体に備え、その拡径基端部の外周面に複数の気体導入口が周方向に間隔をおいて配設されるので、測定ヘッドの先部側が比較的小径であっても、その拡径基端部において複数の気体導入口の開口位置を周方向に互いに十分に離間させることができて、それら複数の気体導入口への気体導管の接続を一層容易に且つ無理なく行うことができる。しかも上記拡径基端部を利用した簡単な構造で、測定ヘッドのワーク孔への挿入限界位置を容易且つ的確に規定することができる。
In particular, according to the invention of
また特に請求項４の発明によれば、測定ヘッドの基端部端面には、作業者により把持し得る有底筒状のホルダが着脱可能に結合され、複数の気体導入口にそれぞれ接続される複数の気体導管がホルダの内部を通して外部に引き出されるので、上記拡径基端部の外周に複数の気体導管が接続されても、それら気体導管をホルダ内に纏めて通すことで、気体導管の取り回しが簡便となり、ホルダ外部に体裁よく整然と引き出すことができる。また測定ヘッドの把持部となる上記ホルダを、気体導管の保護筒に兼用できて、それだけ構造簡素化が図られる。
According to the invention of
また特に請求項５の発明によれば、前記ホルダが複数の縦通路外端の閉塞手段を兼ねるので、前記ホルダを利用して、測定ヘッドの基端部端面に開口する複数の縦通路の外端を纏めて閉塞することができ、その閉塞構造の簡素化が図られる。
In particular, according to the invention of
また特に請求項６の発明によれば、測定ヘッドは、合金工具鋼を真空焼き入れして形成され、複数の縦通路及び複数の横通路はそれぞれ細孔放電加工により形成されるので、複数の縦通路及び複数の横通路が細く且つ長いものであっても、比較的小径の測定ヘッド内部に無理なく孔加工することができる。
In particular, according to the invention of
また特に請求項７の発明によれば、ワークの一端に開口する孔に設けられて互いに同軸上に並ぶ複数の被検査孔部に対する内径同時検査システムが比較的簡単な構成で得られ、取り扱いが簡便であると共に、コスト節減が図られる。
In particular, according to the invention of
また特に請求項８の発明によれば、複数の気体導管の途中を纏めてワンタッチで接続・分離可能なワンタッチジョイントを備えるので、気体導管が複数有っても、その気体導管群の、測定ヘッド側と検査システムにおける検査用圧縮気体供給系との間をワンタッチで簡単に接続・分離することができ、従って、測定ヘッドをメンテナンスしたり或いは他の測定ヘッドと交換したりする場合に、その作業能率を高めることができる。
In particular, according to the invention of
本発明の実施の形態を、添付図面に例示した本発明の実施例に基づいて以下に具体的に説明する。 Embodiments of the present invention will be specifically described below based on the embodiments of the present invention illustrated in the accompanying drawings.
添付図面において、図１〜図７は、本発明の第１実施例を示すものであって、図１は、背圧式空気マイクロメータを含む、複数の被検査孔部の内径同時検査システムの一例を示す全体概要図、図２は、前記マイクロメータの測定ヘッドをワークの孔に挿入した状態を示す側面図、図３は、図２の３−３線拡大断面図、図４は、前記測定ヘッドを先部側から見た斜視図、図５は、図３の５−５線拡大断面図、図６は、図３の６−６線拡大断面図、図７は、図３の７−７線拡大断面図である。また図８は、本発明の第２実施例に係る背圧式空気マイクロメータの測定ヘッドをワークの孔に挿入した状態を示す、図３に対応した断面図である。 1 to 7 show a first embodiment of the present invention, and FIG. 1 shows an example of a simultaneous inner diameter inspection system for a plurality of holes to be inspected, including a back pressure type air micrometer. FIG. 2 is a side view showing a state in which the measurement head of the micrometer is inserted into the hole of the workpiece, FIG. 3 is an enlarged sectional view taken along line 3-3 in FIG. 2, and FIG. FIG. 5 is an enlarged sectional view taken along line 5-5 in FIG. 3, FIG. 6 is an enlarged sectional view taken along line 6-6 in FIG. 3, and FIG. It is a 7-line enlarged sectional view. FIG. 8 is a cross-sectional view corresponding to FIG. 3, showing a state in which the measurement head of the back pressure type air micrometer according to the second embodiment of the present invention is inserted into the hole of the workpiece.
先ず、第１実施例について説明する。図２、図３において、ワークとしての自動変速機用バルブボディＷの一端に開口する孔Ｗｈには、互いに同軸上に並ぶ第１〜第９スプール孔部ｈ１〜ｈ９が相互間に連絡ポートｐ…を各々挟んで縦列配置される。前記孔Ｗｈには、図示しないスプールバルブが嵌挿され、そのスプールバルブは、第１〜第９スプール孔部ｈ１〜ｈ９にそれぞれ摺動可能に嵌合する複数のランド部を外周に有していて、該孔Ｗｈにおける摺動位置に応じて連絡ポートｐ…相互間の連通切換えを行えるようになっている。 First, the first embodiment will be described. 2 and 3, in a hole Wh opened at one end of an automatic transmission valve body W as a workpiece, first to ninth spool holes h1 to h9 arranged coaxially with each other are communication ports p between each other. ... are arranged in tandem across each. A spool valve (not shown) is fitted into the hole Wh, and the spool valve has a plurality of land portions on the outer periphery that are slidably fitted into the first to ninth spool holes h1 to h9. Thus, communication between the communication ports p... Can be switched according to the sliding position in the hole Wh.
第１〜第９スプール孔部ｈ１〜ｈ９は、スプールバルブの作動精度を確保すべく精密機械加工が施され、その加工後において、それらスプール孔部ｈ１〜ｈ９の内径の適否が図１に例示した内径同時検査システムにより検査される。その検査システムは、第１〜第９スプール孔部ｈ１〜ｈ９に対し所定圧力の検査用圧縮空気を個別に噴射した時の背圧に基づいて第１〜第９スプール孔部ｈ１〜ｈ９の内径を同時に検査できるようになっており、以下にその構成を具体的に説明する。 The first to ninth spool holes h1 to h9 are precision machined to ensure the operation accuracy of the spool valve. After the machining, the suitability of the inner diameters of the spool holes h1 to h9 is illustrated in FIG. It is inspected by the internal diameter simultaneous inspection system. The inspection system uses the inner diameters of the first to ninth spool holes h1 to h9 based on the back pressure when the compressed air for inspection having a predetermined pressure is individually injected into the first to ninth spool holes h1 to h9. Can be simultaneously inspected, and the configuration will be specifically described below.
即ち、内径同時検査システムは、本発明に係る背圧式気体マイクロメータとしての空気マイクロメータＭと、そのメータＭの測定ヘッドＳに対し、共通１本の主導管Ｌ及びその下流端より分岐した第１〜第９空気導管Ｌ１〜Ｌ９を介して所定圧力に加圧された検査用圧縮空気を供給可能な圧縮空気源Ａと、前記第１〜第９空気導管Ｌ１〜Ｌ９にそれぞれ介装される第１〜第９開閉弁Ｖ１〜Ｖ９と、その各開閉弁Ｖ１〜Ｖ９と測定ヘッドＳ間の各空気導管Ｌ１〜Ｌ９に接続されて前記背圧を検出する第１〜第９背圧検出手段Ｓ１〜Ｓ９と、それら背圧検出手段Ｓ１〜Ｓ９の検出結果を纏めて表示可能な表示手段としてのモニターＭＯと、システムの運転操作を行う操作部Ｋと、システムの運転を制御すべく各構成要素（開閉弁Ｖ１〜Ｖ９、背圧検出手段Ｓ１〜Ｓ９、モニターＭＯ、操作部Ｋ等）に接続されるマイクロコンピュータよりなる電子制御部Ｃとを備えている。 That is, the internal diameter simultaneous inspection system is divided into a common main conduit L and a downstream end thereof with respect to an air micrometer M as a back pressure gas micrometer according to the present invention and a measuring head S of the meter M. Compressed air source A capable of supplying compressed air for inspection pressurized to a predetermined pressure via first to ninth air conduits L1 to L9, and the first to ninth air conduits L1 to L9, respectively. First to ninth back pressure detection means for detecting the back pressure connected to the first to ninth on / off valves V1 to V9 and the air conduits L1 to L9 between the on / off valves V1 to V9 and the measuring head S. S1 to S9, a monitor MO as a display means capable of collectively displaying the detection results of the back pressure detection means S1 to S9, an operation unit K for operating the system, and each component for controlling the operation of the system Elements (open / close valves V1 to V9, back pressure Detecting means S1-S9, and a monitor MO, a microcomputer which is connected to the operation unit K) the electronic control unit C.
前記背圧式空気マイクロメータＭは、ワークＷの孔Ｗｈに挿入し得る測定ヘッドＳと、その測定ヘッドＳの基端部Ｓｅ端面に締結ボルトＢを以て着脱可能に結合されて作業者により把持し得る有底筒状のホルダＨとを備える。 The back pressure type air micrometer M is detachably coupled with a measuring head S that can be inserted into the hole Wh of the workpiece W and a base end portion Se end surface of the measuring head S with a fastening bolt B and can be gripped by an operator. A bottomed cylindrical holder H is provided.
そして、測定ヘッドＳは、前記孔Ｗｈに抜差可能に挿入される円柱状の軸部Ｓｍと、その軸部Ｓｍの基端に一体に連設される、該軸部Ｓｍよりも大径の拡径基端部Ｓｅとより構成されており、その基端部Ｓｅの軸部Ｓｍ側の端面がバルブボディＷの外端に係合することで測定ヘッドＳの孔Ｗｈへの挿入限界位置が規定される。前記軸部Ｓｍの外径は、各スプール孔部ｈ１〜ｈ９の内径より僅かに小さく設定され、即ち、該軸部Ｓｍのスプール孔部ｈ１〜ｈ９への挿入時において、後述する横通路ｙ１〜ｙ９より検査用圧縮空気を噴射したときに内径検査に適当な背圧が発生するような微小間隙が、軸部Ｓｍの外周面とスプール孔部ｈ１〜ｈ９の内周面との間に設定される。 The measuring head S has a columnar shaft portion Sm that is inserted into the hole Wh so as to be insertable / removable, and is integrally connected to the base end of the shaft portion Sm and has a larger diameter than the shaft portion Sm. The end face on the shaft part Sm side of the base end Se is engaged with the outer end of the valve body W so that the insertion limit position of the measuring head S into the hole Wh is determined. It is prescribed. The outer diameter of the shaft portion Sm is set to be slightly smaller than the inner diameters of the spool hole portions h1 to h9. That is, when the shaft portion Sm is inserted into the spool hole portions h1 to h9, a lateral passage y1 to be described later will be described. A small gap is set between the outer peripheral surface of the shaft portion Sm and the inner peripheral surfaces of the spool holes h1 to h9 so that a back pressure suitable for the inner diameter inspection is generated when compressed air for inspection is injected from y9. The
前記測定ヘッドＳには、第１〜第９スプール孔部ｈ１〜ｈ９にそれぞれ対応して該ヘッドＳの外周面に両端が開口するように、該ヘッドＳをその軸方向に相互に間隔をおいて横切る第１〜第９横通路ｙ１〜ｙ９が軸部Ｓｍにおいて形成され、またその第１〜第９横通路ｙ１〜ｙ９に内端がそれぞれ開口し且つ外端が該ヘッドＳの基端部Ｓｅの端面に開口して該測定ヘッドＳの軸線方向に沿って直線状に延びる第１〜第９縦通路ｔ１〜ｔ９が軸部Ｓｍ及び基端部Ｓｅに跨がって形成される。 The measuring head S is spaced apart from each other in the axial direction so that both ends open on the outer peripheral surface of the head S corresponding to the first to ninth spool holes h1 to h9, respectively. The first to ninth transverse passages y1 to y9 are formed at the shaft portion Sm, the inner ends are opened to the first to ninth transverse passages y1 to y9, respectively, and the outer ends are the base end portions of the head S. First to ninth vertical passages t1 to t9 that open to the end surface of Se and extend linearly along the axial direction of the measuring head S are formed across the shaft portion Sm and the base end portion Se.
第１〜第９縦通路ｔ１〜ｔ９は、測定ヘッドＳの軸線と直交する投影面で見て、周方向に互いに等間隔をおいて環状に配列されて相互に独立している。また、第１〜第９横通路ｙ１〜ｙ９は、前記投影面で見て、前記孔Ｗｈの中心線Ｏと前記第１〜第９縦通路ｔ１〜ｔ９の中心線とを各々結ぶ相異なる第１〜第９直径線に沿ってそれぞれ直線状に延びている。 The first to ninth vertical passages t1 to t9 are arranged in an annular manner at equal intervals in the circumferential direction when viewed from a projection plane orthogonal to the axis of the measuring head S, and are independent from each other. Further, the first to ninth horizontal passages y1 to y9 are different from each other connecting the center line O of the hole Wh and the center lines of the first to ninth vertical passages t1 to t9, respectively, when viewed from the projection plane. Each extends linearly along the first to ninth diameter lines.
また測定ヘッドＳには、第１〜第９縦通路ｔ１〜ｔ９の外端部を外気から遮断して第１〜第９空気導管Ｌ１〜Ｌ９に個別に連通させる圧縮空気導入手段ＳＡが設けられ、その圧縮空気導入手段ＳＡにより、第１〜第９空気導管Ｌ１〜Ｌ９より第１〜第９縦通路ｔ１〜ｔ９の外端部に前記検査用圧縮空気を個別に導入できるようになっている。 Further, the measurement head S is provided with compressed air introduction means SA that blocks the outer ends of the first to ninth vertical passages t1 to t9 from the outside air and individually communicates with the first to ninth air conduits L1 to L9. The compressed air introduction means SA can individually introduce the compressed air for inspection into the outer end portions of the first to ninth vertical passages t1 to t9 from the first to ninth air conduits L1 to L9. .
而して圧縮空気導入手段ＳＡは、第１〜第９縦通路ｔ１〜ｔ９の外端を閉塞する閉塞手段としての前記ホルダＨと、測定ヘッドＳの外面に開口して第１〜第９空気導管Ｌ１〜Ｌ９の下流端がそれぞれ接続される第１〜第９空気導入口ａ１〜ａ９と、その第１〜第９空気導入口ａ１〜ａ９及び第１〜第９縦通路ｔ１〜ｔ９の外端部間を個別に連通する第１〜第９連絡通路ｉ１〜ｉ９とで構成される。 Thus, the compressed air introducing means SA opens to the outer surface of the measuring head S and the holder H as the closing means for closing the outer ends of the first to ninth vertical passages t1 to t9, and the first to ninth air. The first to ninth air introduction ports a1 to a9 to which the downstream ends of the conduits L1 to L9 are respectively connected, and the outside of the first to ninth air introduction ports a1 to a9 and the first to ninth vertical passages t1 to t9 It is comprised by the 1st-9th communication path i1-i9 which connects between edge parts separately.
即ち、測定ヘッドＳの拡径基端部Ｓｅの外周面には、その周方向に等間隔おきに並ぶ第１〜第９空気導入口ａ１〜ａ９が開口しており、それら第１〜第９空気導入口ａ１〜ａ９と第１〜第９縦通路ｔ１〜ｔ９の外端部との間が、放射状に延びる第１〜第９連絡通路ｉ１〜ｉ９によりそれぞれ連通される。第１〜第９空気導入口ａ１〜ａ９には、それら空気導入口ａ１〜ａ９に前記検査用圧縮空気を別々に供給するための第１〜第９空気導管Ｌ１〜Ｌ９の下流端がそれぞれ接続ジョイントｊ１〜ｊ９を介して着脱可能に接続される。 That is, the first to ninth air introduction ports a1 to a9 arranged at equal intervals in the circumferential direction are opened on the outer peripheral surface of the diameter expansion base end portion Se of the measurement head S. The air inlets a1 to a9 and the outer end portions of the first to ninth vertical passages t1 to t9 are communicated with each other by first to ninth communication passages i1 to i9 extending radially. The first to ninth air inlets a1 to a9 are connected to downstream ends of first to ninth air conduits L1 to L9 for supplying the compressed air for inspection separately to the air inlets a1 to a9, respectively. It is detachably connected through joints j1 to j9.
このように測定ヘッドＳの拡径基端部Ｓｅの外周面に第１〜第９空気導入口ａ１〜ａ９を開設したことにより、測定ヘッドＳの先部側（即ち軸部Ｓｍ）が比較的小径であっても、その拡径基端部Ｓｅの外周面において複数の空気導入口ａ１〜ａ９の開口位置を周方向に互いに離間させることができるため、それら複数の空気導入口ａ１〜ａ９への空気導管Ｌ１〜Ｌ９の接続を無理なく容易に行うことができる。しかもこの拡径基端部Ｓｅを利用した簡単な構造で、前述のように測定ヘッドＳのワーク孔Ｗｈへの挿入限界位置を容易且つ的確に規定することができる。 Thus, by opening the first to ninth air introduction ports a1 to a9 on the outer peripheral surface of the diameter-expanded base end portion Se of the measurement head S, the front side (that is, the shaft portion Sm) of the measurement head S is relatively Even if the diameter is small, since the opening positions of the plurality of air introduction ports a1 to a9 can be separated from each other in the circumferential direction on the outer peripheral surface of the enlarged diameter base end portion Se, to the plurality of air introduction ports a1 to a9. The air conduits L1 to L9 can be easily and easily connected. Moreover, with a simple structure using the enlarged diameter base end portion Se, the insertion limit position of the measuring head S into the work hole Wh can be easily and accurately defined as described above.
そして、第１〜第９空気導入口ａ１〜ａ９にそれぞれ接続される第１〜第９空気導管Ｌ１〜Ｌ９が、ホルダＨの周壁に等間隔置きに開設した複数の横孔Ｈｂ、ならびにホルダＨの中心孔Ｈａを通してホルダＨ外端より外部に引き出される。 The first to ninth air conduits L1 to L9 connected to the first to ninth air introduction ports a1 to a9 respectively have a plurality of lateral holes Hb opened at equal intervals on the peripheral wall of the holder H, and the holder H. Is pulled out from the outer end of the holder H through the center hole Ha.
而して、本実施例のように測定ヘッドＳの拡径基端部Ｓｅの外周における複数の空気導入口ａ１〜ａ９に複数の空気導管Ｌ１〜Ｌ９が接続されても、それら空気導管Ｌ１〜Ｌ９の上流部分をホルダＨ内に纏めて通すことで、空気導管Ｌ１〜Ｌ９の取り回しが簡便となり、ホルダＨの外端より外部に体裁よく整然と引き出すことができる。また測定ヘッドＳの把持部となる上記ホルダＨを、空気導管Ｌ１〜Ｌ９の上流部分に対する保護筒に兼用できるため、それだけ構造簡素化が図られる。 Thus, even if a plurality of air conduits L1 to L9 are connected to the plurality of air introduction ports a1 to a9 on the outer periphery of the diameter expansion base end portion Se of the measurement head S as in this embodiment, the air conduits L1 to L9 are connected. By collectively passing the upstream portion of L9 through the holder H, the air conduits L1 to L9 can be easily routed, and can be drawn out from the outer end of the holder H in an orderly manner. Further, since the holder H serving as the gripping portion of the measuring head S can be used as a protective cylinder for the upstream portion of the air conduits L1 to L9, the structure can be simplified.
しかもそのホルダＨは、前記ボルトＢの締結により測定ヘッドＳの基端部Ｓｅ端面と密着、結合されることで、該端面における複数の縦通路ｔ１〜ｔ９の外端を纏めて閉塞していて、本発明の閉塞手段に兼用されることから、その閉塞構造の簡素化が図られる。尚、ホルダＨとヘッド基端部Ｓｅの端面との間には、その間を気密にシールするＯリング等の環状シール手段を設けてもよい。この場合、その環状シール手段は、複数の縦通路ｔ１〜ｔ９の外端を纏めて囲繞するものを使用してもよいし、或いは縦通路ｔ１〜ｔ９の個々の外端を個別に囲繞するものを使用してもよい。 Moreover, the holder H is tightly coupled to the end surface of the base end Se of the measuring head S by fastening the bolt B, thereby closing the outer ends of the plurality of vertical passages t1 to t9 on the end surface. Since it is also used as the closing means of the present invention, the closing structure can be simplified. An annular sealing means such as an O-ring that hermetically seals between the holder H and the end surface of the head base end portion Se may be provided. In this case, the annular sealing means may be one that collectively surrounds the outer ends of the plurality of vertical passages t1 to t9, or that individually surrounds the respective outer ends of the vertical passages t1 to t9. May be used.
測定ヘッドＳは、合金工具鋼を真空焼き入れして形成され、また第１〜第９縦通路ｔ１〜ｔ９、第１〜第９横通路ｙ１〜ｙ９並びに第１〜第９連絡通路ｉ１〜ｉ９はそれぞれ細孔放電加工により所定位置・所定形態に形成される。これにより、各々複数の縦通路ｔ１〜ｔ９／横通路ｙ１〜ｙ９／連絡通路ｉ１〜ｉ９が細く且つ長いものであっても、それら通路を比較的小径の測定ヘッドＳの内部に精度よく、しかも孔潰れを回避しつつ的確に孔加工することができる。 The measuring head S is formed by vacuum quenching of alloy tool steel, and also includes first to ninth vertical passages t1 to t9, first to ninth horizontal passages y1 to y9, and first to ninth communication passages i1 to i9. Are each formed in a predetermined position and a predetermined form by fine hole electric discharge machining. As a result, even if each of the plurality of longitudinal passages t1 to t9 / lateral passages y1 to y9 / communication passages i1 to i9 is narrow and long, the passages can be accurately inserted into the measurement head S having a relatively small diameter. Holes can be precisely drilled while avoiding crushing.
また、第１〜第９空気導管Ｌ１〜Ｌ９の途中には、その全部の導管Ｌ１〜Ｌ９の中間部を纏めてワンタッチで接続・分離可能なワンタッチジョイントＪが介装される。このようなワンタッチジョイントＪの採用により、空気導管Ｌ１〜Ｌ９が複数有っても、その空気導管群の、測定ヘッドＳ側と検査システムにおける検査用圧縮空気供給系との間をワンタッチで簡単に接続・分離することができるため、測定ヘッドＳをメンテナンスしたり或いは他の測定ヘッド（例えば後述する第２実施例の測定ヘッドＳ′）と交換したりする場合に、作業能率を高めることができる。 Further, in the middle of the first to ninth air conduits L1 to L9, a one-touch joint J that can be connected / separated with a single operation by putting together the intermediate portions of all the conduits L1 to L9 is interposed. By adopting such a one-touch joint J, even if there are a plurality of air conduits L1 to L9, it is easy to perform a one-touch operation between the measurement head S side of the air conduit group and the compressed air supply system for inspection in the inspection system. Since the measuring head S can be connected and disconnected, the work efficiency can be improved when the measuring head S is maintained or replaced with another measuring head (for example, the measuring head S ′ of the second embodiment described later). .
次に前記第１実施例の作用について説明する。この実施例に係る内径同時検査システムを用いた内径同時検査方法は、空気マイクロメータＭの測定ヘッドＳをワークとしてのバルブボディＷの孔Ｗｈに挿入して、その測定ヘッドＳの外周面に開口する第１〜第９横通路ｙ１〜ｙ９の両端開口を該孔Ｗｈの第１〜第９スプール孔部ｈ１〜ｈ９にそれぞれ対向させる工程と、測定ヘッドＳの第１〜第９空気導入口ａ１〜ａ９に検査用圧縮空気を同時に供給して第１〜第９横通路ｙ１〜ｙ９の両端開口より第１〜第９スプール孔部ｈ１〜ｈ９に対し同時に噴射する工程と、その噴射時の背圧を測定し、その測定された背圧に基づいて第１〜第９スプール孔部ｈ１〜ｈ９の内径の適否を判定する工程とを含むものであり、以下にその具体的手順の一例を説明する。 Next, the operation of the first embodiment will be described. In the simultaneous inner diameter inspection method using the inner diameter simultaneous inspection system according to this embodiment, the measurement head S of the air micrometer M is inserted into the hole Wh of the valve body W as a work, and the measurement head S is opened to the outer peripheral surface. The first to ninth lateral passages y1 to y9 to be opposed to the first to ninth spool holes h1 to h9 of the hole Wh, respectively, and the first to ninth air inlets a1 of the measuring head S ~ A9 simultaneously supplying compressed air for inspection to simultaneously inject the first to ninth spool holes h1 to h9 from both ends of the first to ninth lateral passages y1 to y9, and the back during the injection. Measuring the pressure and determining the suitability of the inner diameters of the first to ninth spool holes h1 to h9 based on the measured back pressure, and an example of the specific procedure will be described below. To do.
先ず、空気マイクロメータＭの測定ヘッドＳにおける第１〜第９空気導入口ａ１〜ａ９に、内径同時検査システムの対応する空気導管Ｌ１〜Ｌ９をそれぞれ接続した上で、その測定ヘッドＳを、それの基端部ＳｅがバルブボディＷの外端に当接する挿入限界位置まで該バルブボディＷの孔Ｗｈに挿入して、そのヘッド軸部Ｓｍの外周面に開口する第１〜第９横通路ｙ１〜ｙ９の両端開口を第１〜第９スプール孔部ｈ１〜ｈ９にそれぞれ対向させる。 First, after connecting the corresponding air conduits L1 to L9 of the inner diameter simultaneous inspection system to the first to ninth air introduction ports a1 to a9 in the measurement head S of the air micrometer M, the measurement head S is Are inserted into the hole Wh of the valve body W up to the insertion limit position where the base end Se of the valve body W comes into contact with the outer end of the valve body W, and the first to ninth horizontal passages y1 opened on the outer peripheral surface of the head shaft Sm. The opening at both ends of .about.y9 is opposed to the first to ninth spool holes h1 to h9, respectively.
しかる後に、第１〜第９開閉弁Ｖ１〜Ｖ９を同時に開弁して、圧縮空気源Ａからの検査用圧縮空気を測定ヘッドＳの第１〜第９空気導入口ａ１〜ａ９に同時に供給すれば、第１〜第９縦通路ｔ１〜ｔ９を経て第１〜第９横通路ｙ１〜ｙ９の両端開口より、検査用圧縮空気が第１〜第９スプール孔部ｈ１〜ｈ９に対し同時に噴射され、その噴射時の背圧が第１〜第９背圧検出手段Ｓ１〜Ｓ９により測定される。 Thereafter, the first to ninth on-off valves V1 to V9 are simultaneously opened, and the compressed air for inspection from the compressed air source A is simultaneously supplied to the first to ninth air introduction ports a1 to a9 of the measuring head S. For example, the compressed air for inspection is simultaneously injected into the first to ninth spool holes h1 to h9 from both end openings of the first to ninth horizontal passages y1 to y9 via the first to ninth vertical passages t1 to t9. The back pressure during the injection is measured by the first to ninth back pressure detecting means S1 to S9.
その測定された背圧データは電子制御部Ｃに出力され、該制御部Ｃは、その背圧データに応じてモニターＭＯに背圧の測定値を表示させる。その表示を見て、作業員は、各スプール孔部ｈ１〜ｈ９の内径の適否を判定する。尚、その適否判定を電子制御部Ｃに行わせ、その判定結果をモニターＭＯに表示するようにしてもよい。そして、作業員は、内径が不適と判定されたバルブボディＷを不良品として取り除く。 The measured back pressure data is output to the electronic control unit C, and the control unit C displays the measured value of the back pressure on the monitor MO according to the back pressure data. By looking at the display, the worker determines whether or not the inner diameters of the spool holes h1 to h9 are appropriate. Note that the suitability determination may be performed by the electronic control unit C, and the determination result may be displayed on the monitor MO. Then, the worker removes the valve body W whose inner diameter is determined to be inappropriate as a defective product.
かくして、複数の被検査孔部（第１〜第９スプール孔部ｈ１〜ｈ９）に対する内径検査を単一の測定ヘッドＳにより同時に行うことができるため、検査作業の能率向上に大いに寄与することができる。また測定ヘッドＳの軸線に沿って直線状に延びる前記複数の縦通路ｔ１〜ｔ９は、測定ヘッドの軸線と直交する投影面で見て、周方向に互いに間隔をおいて環状に配列されて相互に独立しており、また複数の被検査孔部ｈ１〜ｈ９に対応した位置で該ヘッドをそれぞれ横切る前記複数の横通路ｙ１〜ｙ９は、前記投影面で見て、孔の中心線Ｏと複数の縦通路ｔ１〜ｔ９とを各々結ぶ相異なる複数の直径線に沿ってそれぞれ直線状に延びるので、被検査孔部ｈ１〜ｈ９の数に応じて検査用圧縮空気の通路系統を多く（例えば４系統以上と）しても、それらを測定ヘッドＳ内部で相互に干渉させることなく無理なく取り回すことができ、それらの細孔放電加工も比較的容易となり、コスト節減が図られる。 Thus, since the inner diameter inspection for the plurality of hole portions to be inspected (first to ninth spool hole portions h1 to h9) can be performed simultaneously by the single measuring head S, it greatly contributes to the improvement of the efficiency of the inspection work. it can. Further, the plurality of vertical passages t1 to t9 extending linearly along the axis of the measuring head S are arranged in an annular manner with a space therebetween in the circumferential direction when viewed from a projection plane orthogonal to the axis of the measuring head. And the plurality of lateral passages y1 to y9 that respectively cross the head at positions corresponding to the plurality of holes to be inspected h1 to h9 are formed with a plurality of hole centerlines O and a plurality of holes. Since each of the longitudinal passages t1 to t9 extends in a straight line along a plurality of different diameter lines, the number of inspection compressed air passage systems increases depending on the number of holes to be inspected h1 to h9 (for example, 4 Even if it is more than the system, they can be handled without any interference inside the measuring head S, and the pore electric discharge machining becomes relatively easy, thereby reducing the cost.
ところで第１実施例の測定ヘッドＳでは、孔Ｗｈにおける被検査孔部ｈ１〜ｈ９が複数個（実施例では９個）のワークに対して単独で対応可能としたものを示したが、孔Ｗｈにおける被検査孔部が前記複数個（実施例では９個）を超える場合には、別の少なくとも１個の測定ヘッドＳ′も併せて使用する必要がある。 By the way, in the measurement head S of the first embodiment, the inspection hole portions h1 to h9 in the hole Wh can be individually handled with respect to a plurality of workpieces (9 in the embodiment). When the number of hole portions to be inspected exceeds the plurality (9 in the embodiment), it is necessary to use at least one other measuring head S ′.
図８には、そのような場合に使用される第２実施例の測定ヘッドＳ′が示されている。即ち、ワークとしてのバルブボディＷの孔Ｗｈには、第１〜第９スプール孔部ｈ１〜ｈ９に連なって第１０〜第１８スプール孔部ｈ１０〜ｈ１８が設けられており、それらスプール孔部ｈ１０〜ｈ１８の数に対応して、空気マイクロメータＭ′の測定ヘッドＳ′には、第１実施例の測定ヘッドＳと同様に各々複数の横通路ｙ１〜ｙ９、縦通路ｔ１〜ｔ９、連絡通路ｉ１〜ｉ９、空気導入口ａ１〜ａ９等が設けられる。 FIG. 8 shows the measurement head S ′ of the second embodiment used in such a case. That is, the hole Wh of the valve body W as a work is provided with tenth to eighteenth spool holes h10 to h18 connected to the first to ninth spool holes h1 to h9, and these spool holes h10. Corresponding to the number of h18, the measurement head S 'of the air micrometer M' includes a plurality of horizontal passages y1 to y9, vertical passages t1 to t9, and communication passages, like the measurement head S of the first embodiment. i1-i9, air inlets a1-a9, etc. are provided.
この第２実施例の測定ヘッドＳ′の使用態様は、第１実施例の測定ヘッドＳのそれと基本的に同じであり、測定ヘッドＳを用いた内径同時検査の前又は後に、測定ヘッドＳ′を用いた内径同時検査が行われる。 The usage of the measuring head S ′ of the second embodiment is basically the same as that of the measuring head S of the first embodiment, and before or after the inner diameter simultaneous inspection using the measuring head S, the measuring head S ′. The inside diameter simultaneous inspection using is performed.
以上、本発明の実施例について説明したが、本発明はそれら実施例に限定されることなく、本発明の範囲内で種々の実施例が可能である。 As mentioned above, although the Example of this invention was described, this invention is not limited to these Examples, A various Example is possible within the scope of the present invention.
例えば、前記実施例では、検査用圧縮気体として圧縮空気を用いたものを示したが、本発明では、検査用圧縮気体として圧縮空気以外の気体、例えばチッソガス等の不活性ガスを使用してもよい。 For example, in the above embodiment, the compressed air is used as the compressed gas for inspection. However, in the present invention, a gas other than compressed air, for example, an inert gas such as nitrogen gas is used as the compressed gas for inspection. Good.
また前記実施例では、ワークの孔Ｗｈにおける被検査孔部ｈ１〜ｈ９が９個（第１実施例）又は１８個（第２実施例）のものを示したが、本発明では、被検査孔部の設置個数は任意の複数であり、２個以上であれば、何個でもよい。 Moreover, in the said Example, although the to-be-inspected hole parts h1-h9 in the hole Wh of a workpiece | work showed the thing of 9 (1st Example) or 18 (2nd Example), in this invention, to-be-inspected hole The number of installed parts is an arbitrary plural number, and any number may be used as long as it is two or more.
また前記実施例では、測定ヘッドＳの軸線方向に沿って直線状に延びる複数の縦通路ｔ１〜ｔ９の、該ヘッド基端部Ｓｅ側の開口端をホルダＨにより閉塞するようにしたものを示したが、本発明では、複数の縦通路ｔ１〜ｔ９の開口端を、ホルダＨ以外の閉塞手段、例えば、該開口端に差し込んだ栓体で閉塞するようにしてもよい。 Further, in the above-described embodiment, the opening end on the head base end portion Se side of the plurality of longitudinal passages t1 to t9 extending linearly along the axial direction of the measuring head S is closed by the holder H. However, in the present invention, the opening ends of the plurality of vertical passages t1 to t9 may be closed with closing means other than the holder H, for example, a plug inserted into the opening ends.
また前記実施例では、複数の空気導入口ａ１〜ａ９を測定ヘッドＳの基端部Ｓｅの外周面に並列開口させたものを示したが、その開口位置は、上記基端部Ｓｅの外周面に限定されず、例えば、上記基端部Ｓｅの外端面であってもよい。この場合、特に測定ヘッドＳの軸部Ｓｍ，Ｓｍ′が大径の場合は、縦通路ｔ１〜ｔ９のヘッド基端部Ｓｅ側の開口端をそのまま空気導入口ａ１〜ａ９として用いるようにしてもよく、そのときは、上記開口端をホルダＨ等の閉塞手段で特別に閉塞する必要はなくなる。 Moreover, in the said Example, although what opened several air inlets a1-a9 in parallel with the outer peripheral surface of the base end part Se of the measurement head S was shown, the opening position is the outer peripheral surface of the said base end part Se. For example, the outer end surface of the base end portion Se may be used. In this case, particularly when the shaft portions Sm and Sm ′ of the measuring head S have a large diameter, the opening ends on the head base end portion Se side of the longitudinal passages t1 to t9 may be used as they are as the air introduction ports a1 to a9. In that case, it is not necessary to specifically close the open end with a closing means such as the holder H.
また前記実施例では、ワークＷの複数の被検査孔部としての複数のスプール孔部ｈ１〜ｈ９；ｈ１０〜ｈ１８の内径を全て同径としたものを示したが、本発明では、それらスプール孔部ｈ１〜ｈ９；ｈ１０〜ｈ１８の一部又は全部が異径であってもよく、これに合わせて測定ヘッドＳ，Ｓ′の軸部Ｓｍ，Ｓｍ′の外周面も段付きとなる。 Moreover, in the said Example, although what showed all the internal diameters of several spool hole parts h1-h9; h10-h18 as several to-be-inspected hole parts of the workpiece | work W, in this invention, these spool holes are shown. Part or all of the parts h1 to h9; h10 to h18 may have different diameters, and the outer peripheral surfaces of the shaft parts Sm and Sm ′ of the measuring heads S and S ′ are stepped accordingly.
また前記実施例では、測定ヘッドＳの拡径基端部ＳｅをバルブボディＷの外端に係合させることで測定ヘッドＳの孔Ｗｈへの挿入限界位置を規定するようにしたものを示したが、本発明では、上記拡径基端部Ｓｅとは別個独立した位置決め手段により、測定ヘッドＳの孔Ｗｈへの挿入限界位置を規定するようにしてもよい。 In the above-described embodiment, the insertion limit position of the measurement head S into the hole Wh is defined by engaging the enlarged diameter base end Se of the measurement head S with the outer end of the valve body W. However, in the present invention, the insertion limit position of the measuring head S into the hole Wh may be defined by positioning means that is independent from the diameter-enlarging base end portion Se.
Ａ・・・・・・圧縮気体源としての圧縮空気源
ａ１〜ａ９・・複数の気体導入口としての第１〜第９空気導入口
Ｈ・・・・・・閉塞手段としてのホルダ
ｈ１〜ｈ９・・複数の被検査孔部としての第１〜第９スプール孔部
ｈ１０〜ｈ１８・・複数の被検査孔部としての第１０〜第１８スプール孔部
ｉ１〜ｉ９・・複数の第１〜第９連絡通路
Ｍ，Ｍ′・・・背圧式気体マイクロメータとしての背圧式空気マイクロメータ
ＭＯ・・・・・表示手段としてのモニター
Ｊ・・・・・・ワンタッチジョイント
Ｌ１〜Ｌ９・・複数の気体導管としての第１〜第９空気導管
Ｏ・・・・・・中心線
Ｓ，Ｓ′・・・測定ヘッド
ＳＡ・・・・・圧縮気体供給手段としての圧縮空気供給手段
Ｓｅ・・・・・基端部
Ｓ１〜Ｓ９・・背圧検出手段
ｔ１〜ｔ９・・複数の縦通路としての第１〜第９縦通路
Ｖ１〜Ｖ９・・複数の開閉弁としての第１〜第９開閉弁
Ｗ・・・・・・ワークとしてのバルブボディ
Ｗｈ・・・・・孔
ｙ１〜ｙ９・・複数の横通路としての第１〜第９横通路
A ···· Compressed air sources a1 to a9 as compressed gas sources ··· First to ninth air inlets H as plural gas inlets ··· Holders h1 to h9 as closing means .. First to ninth spool hole portions h10 to h18 as a plurality of hole portions to be inspected. Tenth to eighteenth spool hole portions i1 to i9 as a plurality of hole portions to be inspected. 9. Communication passages M, M '... Back pressure air micrometer MO as back pressure gas micrometer ... Monitor J as display means ... One-touch joints L1-L9 ... Multiple gases 1st to 9th air conduits as conduits... Center line S, S '... Measuring head SA... Compressed air supply means Se as compressed gas supply means. Base ends S1 to S9 .. Back pressure detecting means t1 to t9. First to ninth longitudinal passages V1 to V9 as a plurality of on-off valves as first to ninth on-off valves W as a work valve body Wh as holes y1 to y9・ First to ninth side passages as a plurality of side passages
Claims (9)
前記測定ヘッド（Ｓ，Ｓ′）には、前記複数の被検査孔部（ｈ１〜ｈ９；ｈ１０〜ｈ１８）にそれぞれ対応して該測定ヘッド（Ｓ，Ｓ′）の外周面に両端が開口するように、該測定ヘッド（Ｓ，Ｓ′）をその軸方向に相互に間隔をおいて横切る複数の横通路（ｙ１〜ｙ９）と、その複数の横通路（ｙ１〜ｙ９）に内端がそれぞれ開口し且つ外端が該測定ヘッド（Ｓ，Ｓ′）の基端部（Ｓｅ）の端面まで該測定ヘッド（Ｓ，Ｓ′）の軸線方向に沿って直線状に延びる複数の縦通路（ｔ１〜ｔ９）とが形成され、
前記複数の縦通路（ｔ１〜ｔ９）は、前記測定ヘッド（Ｓ，Ｓ′）の軸線と直交する投影面で見て、周方向に互いに間隔をおいて環状に配列されて相互に独立しており、
前記複数の横通路（ｙ１〜ｙ９）は、前記投影面で見て、前記孔（Ｗｈ）の中心線（Ｏ）と前記複数の縦通路（ｔ１〜ｔ９）とを各々結ぶ相異なる複数の直径線に沿ってそれぞれ直線状に延びており、
前記測定ヘッド（Ｓ，Ｓ′）には、前記複数の縦通路（ｔ１〜ｔ９）の外端部を外気から遮断して複数の気体導管（Ｌ１〜Ｌ９）に個別に連通させる圧縮気体導入手段（ＳＡ）が設けられ、それら気体導管（Ｌ１〜Ｌ９）より前記複数の縦通路（ｔ１〜ｔ９）の外端部に前記検査用圧縮気体を個別に導入可能であることを特徴とする、背圧式気体マイクロメータ。 Measuring heads (S, S ′) having a plurality of holes to be inspected (h1 to h9; h10 to h18) arranged coaxially with each other and removably inserted into holes (Wh) provided in the workpiece (W) ), And the plurality of hole portions (h1 to h9; h10) based on the back pressure when the compressed gas for inspection is respectively injected into the plurality of hole portions (h1 to h9; h10 to h18). A back pressure gas micrometer used to simultaneously inspect the inner diameter of h18),
Both ends of the measurement head (S, S ′) are opened on the outer peripheral surface of the measurement head (S, S ′) corresponding to the plurality of holes to be inspected (h1 to h9; h10 to h18). As described above, the inner ends of the plurality of transverse passages (y1 to y9) and the plurality of transverse passages (y1 to y9) crossing the measuring head (S, S ′) in the axial direction are spaced apart from each other. A plurality of vertical passages (t1) that open and whose outer ends extend linearly along the axial direction of the measurement head (S, S ') to the end face of the base end (Se) of the measurement head (S, S') To t9) are formed,
The plurality of vertical passages (t1 to t9) are arranged in an annular shape at intervals in the circumferential direction when viewed from a projection plane orthogonal to the axis of the measurement head (S, S ′) and are independent of each other. And
The plurality of horizontal passages (y1 to y9) have a plurality of different diameters respectively connecting the center line (O) of the hole (Wh) and the plurality of vertical passages (t1 to t9) when viewed in the projection plane. Each extends along a straight line,
The measurement head (S, S ′) has compressed gas introduction means for blocking the outer ends of the plurality of longitudinal passages (t1 to t9) from the outside air and individually communicating with the plurality of gas conduits (L1 to L9). (SA) is provided, and the compressed gas for inspection can be individually introduced into the outer ends of the plurality of vertical passages (t1 to t9) from the gas conduits (L1 to L9). Pressure gas micrometer.
前記請求項１〜６の何れか１項に記載の背圧式気体マイクロメータ（Ｍ，Ｍ′）と、該メータ（Ｍ，Ｍ′）の測定ヘッド（Ｓ，Ｓ′）における縦通路（ｔ１〜ｔ９）に前記複数の気体導管（Ｌ１〜Ｌ９）を介して検査用圧縮気体を供給可能な圧縮気体源（Ａ）と、前記気体導管（Ｌ１〜Ｌ９）にそれぞれ介装される複数の開閉弁（Ｖ１〜Ｖ９）と、その各開閉弁（Ｖ１〜Ｖ９）と測定ヘッド（Ｓ，Ｓ′）間の各気体導管（Ｌ１〜Ｌ９）に接続されて前記背圧を検出する背圧検出手段（Ｓ１〜Ｓ９）と、その背圧検出手段（Ｓ１〜Ｓ９）の検出結果を表示する表示手段（ＭＯ）とを備えたことを特徴とする、複数の被検査孔部の内径同時検査システム。 An internal diameter simultaneous inspection system for a plurality of holes to be inspected (h1 to h9; h10 to h18) provided in a hole (Wh) opened at one end of a workpiece (W) and arranged coaxially with each other,
The back pressure type gas micrometer (M, M ') according to any one of claims 1 to 6 and a longitudinal passage (t1 to t1) in a measuring head (S, S') of the meter (M, M '). a compressed gas source (A) capable of supplying a compressed gas for inspection via the plurality of gas conduits (L1 to L9) at t9), and a plurality of on-off valves respectively interposed in the gas conduits (L1 to L9) (V1 to V9) and back pressure detecting means (D) connected to the gas conduits (L1 to L9) between the on-off valves (V1 to V9) and the measuring heads (S, S ′) to detect the back pressure ( S1 to S9) and a display means (MO) for displaying the detection results of the back pressure detection means (S1 to S9), a simultaneous inner diameter inspection system for a plurality of holes to be inspected.
前記請求項２〜６の何れか１項に記載の背圧式気体マイクロメータ（Ｍ，Ｍ′）の測定ヘッド（Ｓ，Ｓ′）を前記孔（Ｗｈ）に挿入して、その測定ヘッド（Ｓ，Ｓ′）の外周面に開口する前記複数の横通路（ｙ１〜ｙ９）の両端開口を該孔（Ｗｈ）の前記複数の被検査孔部（ｈ１〜ｈ９；ｈ１０〜ｈ１８）にそれぞれ対向させる工程と、
前記測定ヘッド（Ｍ）の複数の気体導入口（ａ１〜ａ９）に検査用圧縮気体を同時に供給して、前記複数の横通路（ｙ１〜ｙ９）の両端開口より前記複数の被検査孔部（ｈ１〜ｈ９；ｈ１０〜ｈ１８）に対し検査用圧縮気体を同時に噴射する工程と、
その噴射時の背圧を測定し、その測定された背圧に基づいて前記複数の被検査孔部（ｈ１〜ｈ９；ｈ１０〜ｈ１８）の内径の適否を判定する工程とを含むことを特徴とする、複数の被検査孔部の内径同時検査方法。 An inner diameter simultaneous inspection method for a plurality of holes to be inspected (h1 to h9; h10 to h18) provided in a hole (Wh) opened at one end of a workpiece (W) and arranged coaxially with each other,
The measurement head (S, S ') of the back pressure gas micrometer (M, M') according to any one of claims 2 to 6 is inserted into the hole (Wh), and the measurement head (S , S ′) are open at both ends of the plurality of lateral passages (y1 to y9) that are open to the outer peripheral surface of the plurality of inspection hole portions (h1 to h9; h10 to h18) of the holes (Wh). Process,
The compressed gas for inspection is simultaneously supplied to the plurality of gas inlets (a1 to a9) of the measurement head (M), and the plurality of hole portions to be inspected (from the openings at both ends of the plurality of lateral passages (y1 to y9)). h1 to h9; h10 to h18), and simultaneously injecting compressed gas for inspection;
Measuring the back pressure at the time of the injection, and determining whether or not the inner diameters of the plurality of holes to be inspected (h1 to h9; h10 to h18) are appropriate based on the measured back pressure. A method for simultaneously inspecting the inner diameter of a plurality of holes to be inspected.
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