JP2009143703A - Horizontally rotating type substrate transfer carrier device in carrying of double row substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transfer carrier device, in which substrates in double rows can be transferred and carried at high speed from a carrying-out part of one processing tank of processing tanks in two rows disposed in parallel to a carrying-in part of the other processing tank adjoining it at an interval, and there is no interference such as contact with each other between thin substrates in double rows while they are transferred and carried. <P>SOLUTION: On the transfer carrier device 10, a horizontally rotating device 12 is provided, comprising a transfer rail 11 to rotate and move between a carrying-out side rail part 6a of one carrying rail 6 and a carrying-in side rail part 7a of the other carrying rail 7 in a rotation actuation part. On the horizontally rotating device, a substrate guide member 30 and a double row substrate enclosure 40 are provided to integrally rotate and move with the transfer rail. A transfer position fixing means 50 is also provided to fix a hanger tool 3 to suspend the double row substrate W to a transfer position of the transfer rail. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、二列の処理槽の端部間を空中で乗換え搬送する基板の乗換え搬送装置であり、特に複数の基板を垂直な複列状態で乗換え搬送するのに好適な乗換え搬送装置に関する。   The present invention relates to a transfer / transfer apparatus for substrates that transfer and transfer between the ends of two rows of processing tanks in the air, and more particularly to a transfer / transfer apparatus that is suitable for transferring and transferring a plurality of substrates in a vertical double-row state.

離間して平行に配置した二列の処理槽の一方の処理槽端部（搬出部）から互いに離間して隣り合う他方の処理槽端部（搬入部）へ基板を空中で乗換え搬送する基板乗換え搬送装置としては、本出願人の特許である特許第３２９７４２６号「メッキ装置の製品乗換え装置における製品ガイド装置」（特許文献１）の図３に示した製品乗換え装置がある。   Substrate transfer for transferring and transferring a substrate in the air from one processing tank end (unloading section) of two rows of processing tanks spaced apart and parallel to the other processing tank end (loading section) adjacent to each other As the transfer device, there is a product transfer device shown in FIG. 3 of Japanese Patent No. 3297426 “Product Guide Device in Product Transfer Device of Plating Device” (Patent Document 1), which is a patent of the present applicant.

同文献の図３に示した製品乗換え装置は、離間して並行に配置された複数の移送用レールと、これらの移送用レールの一方の端部と互いのレール軌道を択一的に整合されるように前記移送用レールの端部間を移動可能な乗換え用レールとを設けてあり、これらのレールにスライド自在に保持される治具を介して懸垂状態で且つレール軌道方向に端部側を向けて支持される基板等のシート状製品を前記乗換え用レールと前記移送用レールとの整合状態において前記乗換え用レールに受け入れて支持し、前記シート状製品を支持した前記乗換え用レールを離間して並行に配置された他の移送用レールとの整合位置まで乗換え移動し、この移動先の整合位置で前記シート状製品を他の移送用レールに受け渡すように構成され、前記乗換え用レールは移送用レールの端部間を横移動するように構成してある。この乗換え装置は乗換えレールを横方向に移動させるもので、この乗換えレールに治具を介して吊持した基板は、その基板面をレール横移動方向（乗換え搬送方向）に向けおり、高速の乗換え搬送には不向きである。   In the product transfer device shown in FIG. 3 of the same document, a plurality of transfer rails that are spaced apart from each other and one end of these transfer rails are alternately aligned with each other. And a transfer rail that is movable between the end portions of the transfer rail so as to be suspended through jigs that are slidably held by these rails and in the rail track direction end side A sheet-like product, such as a substrate, that is supported toward the transfer rail is received and supported by the transfer rail in the aligned state of the transfer rail and the transfer rail, and the transfer rail that supports the sheet-like product is separated. The transfer rail is configured to transfer to an alignment position with another transfer rail arranged in parallel, and to deliver the sheet-like product to the other transfer rail at the alignment position of the transfer destination. Is It is constructed between the end of the feed rail such that lateral movement. This transfer device moves the transfer rail in the horizontal direction, and the board suspended on the transfer rail via a jig has its board surface oriented in the rail horizontal movement direction (transfer transfer direction). Not suitable for transportation.

また、同文献の製品ガイド装置は、前記乗換え用レールに前記治具を介して支持される前記シート状製品を両シート面方向からガイドする一対のガイド部材を有し、このガイド部材はシート状製品を前記乗換え用レールに受け入れるための開放位置と受け入れられた前記シート状製品の揺れを防止する閉止位置とに開閉制御可能に構成したものである。この製品ガイド装置は、一枚の基板を乗換え搬送する装置には適するが、各基板間の間隔幅に制限がある複列基板の乗換え搬送には適さない。   Further, the product guide device of the same document has a pair of guide members that guide the sheet-like product supported by the transfer rail via the jig from both sheet surface directions, and the guide members are formed in a sheet shape. Opening and closing control can be performed between an open position for receiving the product on the rail for transfer and a closed position for preventing the received sheet-like product from shaking. This product guide device is suitable for a device for transferring and transferring a single substrate, but is not suitable for transferring and transferring a double row substrate having a limited interval width between the substrates.

特許第３２９７４２６号公報Japanese Patent No. 3297426

本発明者は、すでに、複数枚の基板を表面処理する方法として、レールにハンガー治具を介して複数枚の基板を各基板面が所定間隔を空けて向き合う並列状態に吊持し、この複数枚の基板をレールに沿って薬液中を垂直搬送させながら表面処理する複列基板垂直搬送による表面処理方法と、この表面処理方法に用いる複列チャックハンガーを提案した（特願２００７−１０１８５２）。   As a method for surface-treating a plurality of substrates, the inventor has already suspended a plurality of substrates in a parallel state in which the substrate surfaces face each other with a predetermined interval on a rail via a hanger jig. A surface treatment method by a double-row substrate vertical conveyance that performs surface treatment of a single substrate along the rail while vertically conveying the chemical solution, and a double-row chuck hanger used in this surface treatment method have been proposed (Japanese Patent Application No. 2007-101852).

この複列基板（複列基板とは、複数枚の基板を各基板面が所定間隔を空けて向き合う並列状態にハンガー治具で吊持した基板を言い、本明細書においては、複数枚の基板を各基板面が所定間隔を空けて向き合う並列な垂直状態で且つ各基板の一側端部をレールに沿う移動方向に向けた垂直状態にハンガー治具で吊持した基板を言う。）を、離間して平行に配置した二列の処理槽の一方の処理槽端部（搬出部）から互いに離間して隣り合う他方の処理槽端部（搬入部）へ空中で乗換え搬送するに際して、特に薄物の複列基板を高速で乗換え搬送する場合には、高速乗換え搬送中に各薄物基板が互いに干渉し合い、基板に傷をつける弊害がある。   This double-row substrate (a double-row substrate is a substrate in which a plurality of substrates are suspended by a hanger jig in a parallel state in which the respective substrate surfaces face each other at a predetermined interval. In this specification, a plurality of substrates Is a substrate in which the substrate surfaces are suspended by a hanger jig in a parallel vertical state in which the substrate surfaces face each other at a predetermined interval and one side end of each substrate is directed in the moving direction along the rail. When transferring and transporting in the air from one processing tank end (unloading section) of two rows of processing tanks spaced apart and in parallel to the other processing tank end (loading section) adjacent to each other. In the case of transferring and transporting the double-row substrates at a high speed, the thin substrates interfere with each other during the high-speed transfer and transfer, and the substrate is damaged.

本発明は、このような実情に鑑み、特に薄物の複列基板を高速で乗換え搬送でき、しかも高速乗換え搬送中に複列の各薄物基板が互いに接触などの干渉が無い様に工夫した複列基板の乗換え搬送装置を提供しようとするものである。   In view of such circumstances, the present invention is particularly capable of transferring and transporting thin double-row substrates at high speed, and that the double-row thin substrates are designed so that there is no interference such as contact with each other during the high-speed transfer and transfer. It is an object of the present invention to provide a substrate transfer / transfer apparatus.

前記課題を解決するため、本発明は、二列の処理槽を離間して平行に配置し、一方の処理槽の搬出部から互いに離間して隣り合う他方の処理槽の搬入部へ基板を垂直状態にして搬入する基板の乗換え搬送装置において、前記基板はレールに沿って移動自在に支持されたハンガー治具に垂直状態に吊持されており、このハンガー治具は複数の基板を吊持できる複列構造のチャック部を有し、このチャック部によって複数の基板を各基板面が所定間隔を空けて向き合う並列な垂直状態で、且つ各基板の一側端部をレールに沿う移動方向に向けた垂直状態に吊持し得るようにしてあり、このハンガー治具に吊持された複列基板を前記各処理槽に対応して離間して平行に配設した一方の移送レールの搬出側レール部から他方の移送レールの搬入側レール部へ乗換え搬送する複列基板の乗換え搬送装置であり、この乗換え搬送装置を、前記搬出側レール部と互いに直列状態のレール軌道を成す受け入れ位置と前記搬入側レール部と互いに直列状態のレール軌道を成す送り出し位置との間を水平方向に略１８０度旋回移動する乗換えレールを旋回作動部に備えた水平旋回装置と、前記ハンガー治具を前記搬出側レール部から乗換えレールの所定の乗換え位置へ直列状態のレール軌道に沿って乗換え移送する受け入れ送り手段と、前記ハンガー治具を乗換えレールの前記乗換え位置から搬入側レール部へ直列状態のレール軌道に沿って乗換え移送する送り出し送り手段とで構成したことを特徴とする複列基板搬送における水平旋回式基板乗換え搬送装置を提供する。   In order to solve the above-mentioned problems, the present invention is arranged such that two rows of treatment tanks are spaced apart and arranged in parallel, and the substrate is vertically moved from the carry-out part of one treatment tank to the carry-in part of the other treatment tank adjacent to each other. In the transfer and transfer device for a substrate to be loaded in a state, the substrate is suspended in a vertical state by a hanger jig supported so as to be movable along a rail, and the hanger jig can suspend a plurality of substrates. The chuck unit has a double-row structure, and a plurality of substrates are arranged in a parallel vertical state in which the substrate surfaces face each other at a predetermined interval, and one side end of each substrate is directed in the moving direction along the rail. The transfer-side rail of one transfer rail in which the double-row substrates suspended on the hanger jig are spaced apart and arranged in parallel corresponding to the processing tanks. The other side of the transfer rail A transfer apparatus for transferring and transferring double-row substrates to and from a receiving section, wherein the transfer and transfer apparatus includes a receiving position that forms a rail track in series with the carry-out side rail part, and a rail track that is in series with the carry-in side rail part. And a horizontal turning device having a turning rail that turns about 180 degrees horizontally between the feed position and the hanger jig from the carry-out side rail portion to a predetermined changing position of the changing rail. The receiving and feeding means for transferring and transferring along the rail track in the series state, and the sending and feeding means for transferring and transferring the hanger jig from the transfer position of the changing rail to the loading side rail portion along the rail track in the serial state. There is provided a horizontal swivel type substrate transfer transfer device in double row substrate transfer.

また、本発明は、前記した複列基板搬送における水平旋回式基板乗換え搬送装置の前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される基板ガイド体を設け、この基板ガイド体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された複列基板に対して並列な各基板の基板面を略均等な対向空間に隔てる隔壁案内板を配設して構成したことを特徴とする。この基板ガイド体（隔壁案内板）によって、乗換えレールの所定の乗換え位置にハンガー治具を介して吊持された複列基板の旋回移動中においても、各基板を互いに干渉させずに、複列基板の垂直姿勢を均等に保持できるようにしている。   According to the present invention, a substrate guide body that is pivotally moved integrally with the transfer rail is provided in a swing operation portion of the horizontal swing device of the horizontal swing type substrate transfer transport device in the double row substrate transfer described above, and this substrate guide A partition wall guide plate is provided for separating the substrate surface of each substrate parallel to the double-row substrate transferred to and from the transfer position of the transfer rail via the hanger jig into a substantially equal facing space. It is characterized by being configured. By this substrate guide body (partition wall guide plate), even when the double-row substrate suspended by the hanger jig is suspended at a predetermined transfer position of the transfer rail, the multiple rows are not interfered with each other. The vertical posture of the substrate can be held evenly.

また、本発明は、前記した複列基板搬送における水平旋回式基板乗換え搬送装置の前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される複列基板囲み体を設け、この複列基板囲み体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された複列基板に対して該複列基板の全体を側部方向から囲む垂直壁の囲繞板壁面で構成し、この囲繞板壁面を、開閉制御可能な受け入れ側板状扉部と、開閉制御可能な送り出し側板状扉部と、側面板壁部とで構成したことを特徴とする。   Further, the present invention provides a double row substrate enclosure that is pivotally moved integrally with the transfer rail in the turning operation portion of the horizontal turning device of the horizontal turning type substrate transfer transfer device in the double row substrate transfer described above. A wall surface of a vertical wall that surrounds the entire double-row substrate from the side direction with respect to the double-row substrate transferred to the transfer position of the transfer rail via the hanger jig. The wall surface of the surrounding board is composed of a receiving side plate-like door portion that can be controlled to open and close, a sending-out side plate-like door portion that can be controlled to open and close, and a side plate wall portion.

前記受け入れ側板状扉部は、複列基板を前記搬出側レール部から乗換えレールへ受け入れる際には受け入れ送り可能に開けられ、受け入れ後に閉じられる。前記送り出し側板状扉部は、複列基板を乗換えレールから前記搬入側レール部へ送り出す際には送り出し送り可能に開けられ、送り出し後に閉じられる。この受け入れ側板状扉部と送り出し側板状扉部は、前記乗換えレールの旋回移動中は閉じられ、乗換えレールにハンガー治具を介して吊持された複列基板（及びこの複列基板をガイドする前記隔壁案内板）を側部方向から囲む垂直壁の囲繞板壁面で構成した複列基板囲み体で遮蔽することによって、旋回移動中に複列基板にかかる空気抵抗を緩和でき、複列基板の揺れを減少できるようにしている。   The receiving side plate-like door portion is opened so as to be able to receive and feed when the double row substrate is received from the carry-out side rail portion to the transfer rail, and is closed after being received. The sending-out side plate-like door portion is opened so as to be able to be sent out when the double-row substrate is sent from the transfer rail to the loading-side rail portion, and is closed after the sending out. The receiving-side plate-like door portion and the sending-out-side plate-like door portion are closed during the turning movement of the transfer rail, and the double-row substrate (and guides this double-row substrate) suspended on the transfer rail via a hanger jig. By shielding the partition guide plate) with a double-row substrate enclosure composed of a vertical wall surrounding the wall from the side, the air resistance applied to the double-row substrate during the swiveling movement can be reduced. The shaking can be reduced.

また、本発明は、前記した複列基板搬送における水平旋回式基板乗換え搬送装置の前記水平旋回装置の旋回作動部に前記乗換えレールの前記乗換え位置に乗換え移送された前記ハンガー治具を旋回移動時に該乗換え位置に固定できる該ハンガー治具の乗換え位置固定手段を設けたことを特徴とする。前記ハンガー治具はレールとスライド係合されるレール係合部を有し、このレール係合部を乗換えレールの側面に向けて圧接し得る押圧固定具によって、このハンガー治具を乗換えレールの所定の乗換え位置に固定するように構成した。この乗換え位置固定手段（押圧固定具）によって乗換えレールの旋回移動中にハンガー治具を乗換えレールの所定の乗換え位置から脱落移動しないように固定できる。   In the present invention, the hanger jig transferred and transferred to the turning position of the horizontal turning device of the horizontal turning device of the horizontal turning type substrate transfer transfer device in the double row substrate transfer described above is moved during the turning movement. A change position fixing means for the hanger jig that can be fixed at the change position is provided. The hanger jig has a rail engagement portion that is slidably engaged with the rail, and the hanger jig is fixed to the transfer rail by a pressing fixture that can press the rail engagement portion toward the side surface of the transfer rail. It was configured to be fixed at the transfer position. With this transfer position fixing means (pressing fixture), the hanger jig can be fixed so as not to fall off from a predetermined transfer position of the transfer rail during the turning movement of the transfer rail.

複列基板の乗換え搬送装置について提案した上記の技術思想は、一枚の基板を同様に乗換え搬送する場合にも適用できる。次に一枚基板の乗換え搬送装置の発明を提案する。   The above technical idea proposed for the transfer / transfer apparatus for double-row substrates can also be applied to transfer and transfer a single substrate in the same manner. Next, an invention of a transfer transfer device for a single substrate is proposed.

本発明は、二列の処理槽を離間して平行に配置し、一方の処理槽の搬出部から互いに離間して隣り合う他方の処理槽の搬入部へ基板を垂直状態にして搬入する基板搬送装置において、前記基板はレールに沿って移動自在に支持されたハンガー治具に該基板の一側端部をレールに沿う移動方向に向けた垂直状態に吊持されており、このハンガー治具に吊持された基板を前記各処理槽に対応して離間して平行に配設した一方の移送レールの搬出側レール部から他方の移送レールの搬入側レール部へ乗換え搬送する基板の乗換え搬送装置であり、この乗換え搬送装置を、前記搬出側レール部と互いに直列状態のレール軌道を成す受け入れ位置と前記搬入側レール部と互いに直列状態のレール軌道を成す送り出し位置との間を水平方向に略１８０度旋回移動する乗換えレールを旋回作動部に備えた水平旋回装置と、前記ハンガー治具を前記搬出側レール部から乗換えレールの所定の乗換え位置へ直列状態のレール軌道に沿って乗換え移送する受け入れ送り手段と、前記ハンガー治具を乗換えレールの前記乗換え位置から搬入側レール部へ直列状態のレール軌道に沿って乗換え移送する送り出し送り手段とで構成したことを特徴とする基板搬送における水平旋回式基板乗換え搬送装置を提供する。   In the present invention, two rows of processing tanks are arranged in parallel apart from each other, and the substrate is transferred in a vertical state from the carry-out section of one processing tank to the carry-in section of the other processing tank adjacent to each other. In the apparatus, the substrate is suspended by a hanger jig supported so as to be movable along the rail in a vertical state in which one side end portion of the substrate is directed in the moving direction along the rail. Substrate transfer and transfer device for transferring and transferring the suspended substrate from the carry-out side rail portion of one transfer rail to the carry-in side rail portion of the other transfer rail, which are spaced apart and arranged in parallel corresponding to each processing tank. The transfer transport device is substantially horizontally arranged between a receiving position that forms a rail track in series with the carry-out side rail portion and a delivery position that forms a rail track in series with the carry-in rail portion. 180 degree rotation A horizontal turning device provided with a moving transfer rail in a turning operation unit; and a receiving and feeding means for transferring the hanger jig from the carry-out side rail portion to a predetermined transfer position of the transfer rail along a serial rail track. A horizontal swivel type substrate transfer transport in substrate transport, characterized in that the hanger jig is composed of a feed-out means for transferring and transferring along the rail track in a series state from the transfer position of the transfer rail to the carry-in rail portion. Providing equipment.

そして、前記した基板搬送における水平旋回式基板乗換え搬送装置の前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される基板ガイド体を設け、この基板ガイド体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された基板に対して該基板の基板面を略均等な対向空間に隔てる一対の案内板を配設して構成したことを特徴とする。   And the board | substrate guide body swiveled integrally with the said change rail is provided in the turning action | operation part of the said horizontal turning apparatus of the horizontal turning type board | substrate transfer conveyance apparatus in the above-mentioned board | substrate conveyance, This board | substrate guide body is provided with the said switching rail A pair of guide plates that divide the substrate surface of the substrate into a substantially equal facing space with respect to the substrate transferred and transferred through the hanger jig to the transfer position are arranged.

そして、前記した基板搬送における水平旋回式基板乗換え搬送装置の前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される基板囲み体を設け、この基板囲み体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された基板に対して該基板（及びこの基板をガイドする前記案内板）の全体を側部方向から囲む垂直壁の囲繞板壁面で構成し、この囲繞板壁面を、開閉制御可能な受け入れ側板状扉部と、開閉制御可能な送り出し側板状扉部と、側面板壁部とで構成したことを特徴とする。   A substrate enclosure that is pivotally moved integrally with the transfer rail is provided in a turning operation portion of the horizontal turning device of the horizontal turning type substrate transfer transfer device in the substrate transfer described above. The substrate (and the guide plate for guiding the substrate) is transferred to the transfer position via the hanger jig. The wall surface of the surrounding plate is composed of a receiving side plate-like door portion that can be controlled to open and close, a sending side plate-like door portion that can be controlled to open and close, and a side plate wall portion.

そして、前記した基板搬送における水平旋回式基板乗換え搬送装置の前記水平旋回装置の旋回作動部に前記乗換えレールの前記乗換え位置に乗換え移送された前記ハンガー治具を旋回移動時に該乗換え位置に固定できる該ハンガー治具の乗換え位置固定手段を設け、この乗換え位置固定手段を、前記ハンガー治具のレール係合部を乗換えレールの側面に向けて圧接し得る押圧固定具によって構成したことを特徴とする。   Then, the hanger jig transferred and transferred to the change-over position of the change-over rail can be fixed to the change-over position during the turn-movement of the horizontal-turning device of the horizontal turn-type substrate transfer transfer device in the substrate transfer described above. The changing position fixing means of the hanger jig is provided, and the changing position fixing means is constituted by a pressing fixture that can press-contact the rail engaging portion of the hanger jig toward the side surface of the changing rail. .

本発明の複列基板搬送における水平旋回式基板乗換え搬送装置によれば、複列基板を、離間して平行に配置した二列の処理槽の一方の処理槽端部（搬出部）から互いに離間して隣り合う他方の処理槽端部（搬入部）へ空中で乗換え搬送するに際して、特に薄物の複列基板を高速で乗換え搬送でき、しかも高速乗換え搬送中に複列の各薄物基板が互いに干渉なく、各基板に傷をつけずに乗換え搬送できる。   According to the horizontal swirl type substrate transfer / conveying apparatus in the double row substrate transfer of the present invention, the double row substrates are separated from one processing bath end (unloading portion) of the two rows of processing baths arranged in parallel. When transferring and transporting in the air to the other processing tank end (loading section) in the air, it is possible to transfer and transport thin double-row substrates at high speed, and the multiple thin-film substrates interfere with each other during high-speed transfer and transfer. And transfer and transfer without damaging each substrate.

以下、本発明の好ましい実施形態を図面に基づき説明する。図１は複列基板の乗換え搬送装置の平面図、図２は同装置の正面図、図３は同装置の受け入れ側から看た側面図である。   Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of a transfer apparatus for transferring double-row substrates, FIG. 2 is a front view of the apparatus, and FIG. 3 is a side view as viewed from the receiving side of the apparatus.

図１，２は、離間して平行に配置した二列の処理槽１，２の一方の処理槽１の端部側の搬出部１ａから互いに離間して隣り合う他方の処理槽２の端部側の搬入部２ａへ垂直状態の基板Ｗを乗換え搬送装置１０で空中において乗換え搬送する状態を示している。図１，２は、一方の処理槽１から他方の処理槽２へ基板Ｗを乗換え搬送し、各処理槽１，２で基板Ｗに水洗処理や化学銅メッキ処理などの必要な表面処理を施していく表面処理装置の乗換え搬送部分を示している。   FIGS. 1 and 2 show the end of the other processing tank 2 that is separated from the unloading part 1a on the end side of one processing tank 1 of two rows of processing tanks 1 and 2 arranged in parallel and spaced apart from each other. A state is shown in which the substrate W in the vertical state is transferred and transferred by the transfer transfer device 10 in the air to the loading unit 2a on the side. In FIGS. 1 and 2, the substrate W is transferred and transferred from one processing tank 1 to the other processing tank 2, and the substrate W is subjected to necessary surface treatments such as a water washing process and a chemical copper plating process in each processing tank 1 and 2. The transfer transfer portion of the surface treatment apparatus is shown.

前記基板Ｗはレール（後述する移送レール６，７、乗換えレール１１）に沿って移動可能に支持されるハンガー治具３に垂直状態に吊持されている。このハンガー治具３は、レールとスライド係合されるレール係合部４と、複数（図示の実施例では３枚）の基板Ｗの各上部を挟持して吊持できる複列構造のチャック部５を有し、このチャック部５によって複数の基板Ｗを各基板面が所定間隔を空けて向き合う並列な垂直状態で、且つ各基板の一側端部をレールに沿う移動方向に向けた垂直状態に吊持し得るようにしてある。図示の実施例では、３列構造のチャック部５（５ａ，５ｂ，５ｃ）とし、各列４個の挟持チャックを設けた合計１２個の挟持チャックで３枚の基板Ｗを３列状態に吊持している。   The substrate W is suspended in a vertical state on a hanger jig 3 supported so as to be movable along rails (transfer rails 6 and 7 and transfer rails 11 described later). This hanger jig 3 includes a rail engaging portion 4 that is slidably engaged with a rail, and a chuck portion having a double row structure that can hold and suspend each upper portion of a plurality (three in the illustrated embodiment) of substrates W. 5 in which the plurality of substrates W are arranged in a parallel vertical state in which the respective substrate surfaces face each other at a predetermined interval, and one side end portion of each substrate is directed in the moving direction along the rail. It can be hung on. In the illustrated embodiment, the chuck unit 5 (5a, 5b, 5c) having a three-row structure is used, and three substrates W are suspended in a three-row state by a total of twelve pinch chucks each provided with four pinch chucks. I have it.

前記乗換え搬送装置１０は、このハンガー治具３に吊持された複列基板Ｗを各処理槽１，２に対応して離間して平行に配設した一方の移送レール６の搬出側レール部６ａから他方の移送レール７の搬入側レール部７ａへ乗換え搬送させるものである。前記搬出側レール部６ａと搬入側レール部７ａは互いに離間して隣り合う位置に配設されている。前記搬出側レール部６ａを含む一方の移送レール６と搬入側レール部７ａを含む他方の移送レール７は、昇降動するように構成され、該レール６，７の下降位置においてハンガー治具３を介して吊持した基板Ｗを処理槽内の処理液中に入れ、該レール６，７の上昇位置（図３に示した位置）においてハンガー治具３を介して吊持した基板Ｗを該レールに沿って空中で送れるようにしてある。   The transfer transfer device 10 includes a transfer-side rail portion of one transfer rail 6 in which the double-row substrates W suspended on the hanger jig 3 are spaced apart and arranged in parallel corresponding to the processing tanks 1 and 2. 6a is transferred to the carry-in side rail portion 7a of the other transfer rail 7. The carry-out side rail portion 6a and the carry-in side rail portion 7a are disposed at positions adjacent to each other while being separated from each other. One transfer rail 6 including the carry-out side rail portion 6a and the other transfer rail 7 including the carry-in side rail portion 7a are configured to move up and down, and the hanger jig 3 is moved at the lowered position of the rails 6 and 7. The substrate W suspended via the hanger jig 3 is put into the rail at the ascending position of the rails 6 and 7 (position shown in FIG. 3). Can be sent in the air along.

前記乗換え搬送装置１０は、上昇位置にある前記搬出側レール部６ａと互いに直列状態のレール軌道を成す受け入れ位置（図１に実線で示した乗換えレール１１の位置）と上昇位置にある前記搬入側レール部７ａと互いに直列状態のレール軌道を成す送り出し位置（図１に二点鎖線で示した乗換えレール１１の位置）との間を略１８０度の範囲で水平方向に旋回移動する乗換えレール１１を旋回作動部に備えた水平旋回装置１２と、前記ハンガー治具３を前記搬出側レール部６ａから乗換えレール１１の所定の乗換え位置へ直列状態のレール軌道に沿って乗換え移送する受け入れ送り手段２０と、前記ハンガー治具３を乗換えレール１１の前記乗換え位置から搬入側レール部７ａへ直列状態のレール軌道に沿って乗換え移送する送り出し送り手段２１とで構成してある。   The transfer transport device 10 has a receiving position (a position of the transfer rail 11 indicated by a solid line in FIG. 1) that forms a rail track in series with the carry-out side rail portion 6 a in the raised position and the carry-in side in the raised position. A transfer rail 11 that pivots in the horizontal direction within a range of approximately 180 degrees between the rail portion 7a and the feed position (the position of the transfer rail 11 indicated by a two-dot chain line in FIG. 1) that forms a rail track in series with each other. A horizontal turning device 12 provided in the turning operation portion, and a receiving and feeding means 20 for transferring and transferring the hanger jig 3 from the carry-out side rail portion 6a to a predetermined transfer position of the transfer rail 11 along a rail track in a series state. Sending and sending the hanger jig 3 from the transfer position of the transfer rail 11 to the carry-in rail portion 7a along the rail track in series. It is constituted in the stage 21.

前記水平旋回装置１２は、乗換え位置の処理槽１，２間の中心位置に固定配置した反転モーター１３と、この反転モーター１３の回転軸１３ａに一端側を支持固定され、この回転軸１３ａを中心として他端側を旋回作動部１４ａとした水平旋回アーム１４を有し、この水平旋回アーム１４の旋回作動部１４ａ側の端部に前記乗換えレール１１を該アーム１４とレール軌道を直交させた状態に固定してある。   The horizontal turning device 12 is fixedly arranged at the center position between the processing tanks 1 and 2 at the transfer position, and one end side is supported and fixed to the rotating shaft 13a of the rotating motor 13, and the rotating shaft 13a is centered. The other end side has a horizontal turning arm 14 having a turning operation portion 14a, and the transfer rail 11 is placed at the end of the horizontal turning arm 14 on the turning operation portion 14a side so that the arm 14 and the rail track are orthogonal to each other. It is fixed to.

前記受け入れ送り手段２０と送り出し送り手段２１は、いわゆるプッシャー式送り手段を採用している。この送り手段について、図３（乗換え搬送装置の受け入れ側から看た側面図）に基づき説明すれば、この送り手段は、レール軌道に沿って往復移動する送り杆２２と、この送り杆２２に所定間隔をおいて取付けた送り係合体２３とから成り、この送り杆２２の搬送方向への往移動（矢印方向への移動）においては送り係合体２３がレールに支持されたハンガー治具３（ハンガー治具３の上部に突設した係合突起２４）に係合し該ハンガー治具３をレールに沿って一方向に移送するが、送り杆２２の反搬送方向への復移動（反矢印方向への移動）においては送り係合体２３がレールに支持されたハンガー治具３（ハンガー治具３の上部に突設した係合突起２４）に係合されず該ハンガー治具３を移送しないように構成してある。   The receiving and feeding means 20 and 21 are so-called pusher type feeding means. The feeding means will be described with reference to FIG. 3 (side view as seen from the receiving side of the transfer transport device). The feeding means includes a feeding rod 22 that reciprocates along the rail track, and a predetermined amount to the feeding rod 22. A hanger jig 3 (hanger) in which the feed engagement body 23 is supported by a rail in the forward movement in the conveyance direction (movement in the direction of the arrow). The hanger jig 3 is engaged in one direction along the rail by engaging with an engaging protrusion 24) projecting from the upper part of the jig 3, but the feed rod 22 is moved back in the opposite direction (counter arrow direction). In this case, the feed engagement body 23 is not engaged with the hanger jig 3 supported by the rail (the engagement protrusion 24 projecting from the top of the hanger jig 3) and the hanger jig 3 is not transferred. It is configured.

前記乗換え搬送装置１０の前記水平旋回装置１２の旋回作動部に前記乗換えレール１１と一体的に旋回移動される基板ガイド体３０を設け、この基板ガイド体３０を、前記乗換えレール１１の前記乗換え位置に前記ハンガー治具３を介して乗換え移送された複列基板に対して並列な各基板の基板面を略均等な対向空間に隔てる隔壁案内板３１を配設して構成している。この基板ガイド体３０の隔壁案内板３１は、前記ハンガー治具３に吊持された複列基板Ｗの乗換えレール１１への受け入れ側と乗換えレール１１からの送り出し側を複列基板Ｗの送りを許容するフリーな通過空間としてあり、前記隔壁案内板３１の基板受け入れ側の端部は、基板の受け入れを容易にするため、図１に示したように基板受け入れ側をハ字状に拡開した傾斜面に形成してある。この基板ガイド体３０（隔壁案内板３１）によって、乗換えレール１１の所定の乗換え位置にハンガー治具３を介して吊持された複列基板Ｗの旋回移動中においても、各基板を互いに干渉させずに、複列基板の垂直姿勢を均等に保持できるようにしている。   A board guide body 30 that is pivotally moved integrally with the transfer rail 11 is provided in a turning operation portion of the horizontal turning apparatus 12 of the transfer conveying device 10, and the board guide body 30 is moved to the transfer position of the transfer rail 11. In addition, a partition wall guide plate 31 is provided for separating the substrate surfaces of the substrates parallel to the double row substrates transferred and transferred via the hanger jig 3 into substantially equal facing spaces. The partition wall guide plate 31 of the substrate guide body 30 feeds the double-row substrates W on the receiving side of the double-row substrates W suspended on the hanger jig 3 to the transfer rail 11 and on the delivery side from the transfer rails 11. It is a free passage space to be allowed, and the end of the partition wall guide plate 31 on the substrate receiving side is expanded in a letter C shape as shown in FIG. 1 in order to facilitate the reception of the substrate. It is formed on an inclined surface. The substrate guide body 30 (partition wall guide plate 31) causes the substrates to interfere with each other even during the swiveling movement of the double-row substrates W suspended through the hanger jig 3 at a predetermined transfer position on the transfer rail 11. In addition, the vertical posture of the double-row substrate can be held evenly.

また、前記乗換え搬送装置１０の前記水平旋回装置１２の旋回作動部に前記乗換えレール１１と一体的に旋回移動される複列基板囲み体４０を設け、この複列基板囲み体４０を、前記乗換えレール１１の前記乗換え位置に前記ハンガー治具３を介して乗換え移送された複列基板Ｗに対して該複列基板Ｗ（及びこの複列基板Ｗをガイドする前記隔壁案内板３１）の全体を側部方向から囲む垂直壁の囲繞板壁面で構成し、この囲繞板壁面を、開閉制御可能な受け入れ側板状扉部４１と、開閉制御可能な送り出し側板状扉部４２と、側面板壁部４３，４３とで構成した。   Further, a double row substrate enclosure 40 that is pivotally moved integrally with the transfer rail 11 is provided in the turning operation portion of the horizontal turning device 12 of the transfer conveying device 10, and the double row substrate enclosure 40 is transferred to the transfer rail 11. The entire double-row substrate W (and the partition guide plate 31 that guides the double-row substrate W) is transferred to the double-row substrate W transferred and transferred to the transfer position of the rail 11 via the hanger jig 3. It is composed of a surrounding wall of a vertical wall that surrounds from the side direction, and this surrounding wall is composed of a receiving side plate door 41 that can be controlled to open and close, a sending side plate door 42 that can be controlled to open and close, and a side plate wall 43, And 43.

前記受け入れ側板状扉部４１は、その下部をスライド支持ガイド４５で支持され、前記水平旋回アーム１４の旋回作動部１４ａ側にクロス状に固着した支持杆４６の端部に固定された受け入れ側扉部開閉制御シリンダー４７の往復動ロッド部に上部を連結して保持され、前記受け入れ側扉部開閉制御シリンダー４７の往復動ロッド部の往復動によってスライド移動させて開閉を制御している。前記受け入れ側板状扉部４１は、ハンガー治具３に吊持された基板を乗換えレール１１の乗換え位置へ乗換え移送する受け入れ送りに際しては受け入れ送り可能に開けられ、受け入れ後に閉じられるように、前記受け入れ側扉部開閉制御シリンダー４７によって制御される。   The lower part of the receiving side plate-like door part 41 is supported by a slide support guide 45, and is fixed to the end of a support rod 46 which is fixed in a cross shape to the turning operation part 14a side of the horizontal turning arm 14. The upper part is connected to and held by the reciprocating rod part of the partial opening / closing control cylinder 47, and the sliding movement is performed by the reciprocating movement of the reciprocating rod part of the receiving side door opening / closing control cylinder 47 to control the opening / closing. The receiving side plate-like door portion 41 is opened so as to be able to receive and feed when the substrate suspended from the hanger jig 3 is transferred to the transfer position of the transfer rail 11 and is closed after receiving. It is controlled by the side door opening / closing control cylinder 47.

前記送り出し側板状扉部４２も、その下部をスライド支持ガイド４５で支持され、前記支持杆４６の反対側に固定された送り出し側扉部開閉制御シリンダー４８の往復動ロッド部に上部を連結して保持され、前記送り出し側扉部開閉制御シリンダー４８の往復動ロッド部の往復動によってスライド移動させて開閉を制御している。前記送り出し側板状扉部４２は、ハンガー治具３に吊持された基板を乗換えレール１１の乗換え位置から搬入側レール部７ａへ乗換え移送する送り出し送りに際しては送り出し可能に開けられ、送り出し後に閉じられるように、前記送り出し側扉部開閉制御シリンダー４８によって制御される。   The delivery side plate-like door part 42 is also supported at its lower part by a slide support guide 45 and connected to the reciprocating rod part of the delivery side door part opening / closing control cylinder 48 fixed to the opposite side of the support rod 46. It is held and controlled to open and close by being slid by the reciprocating motion of the reciprocating rod portion of the delivery side door portion opening / closing control cylinder 48. The delivery-side plate-like door portion 42 is opened so as to be able to deliver when the substrate suspended from the hanger jig 3 is transferred and transferred from the transfer position of the transfer rail 11 to the carry-in rail portion 7a, and is closed after the transfer. As described above, the delivery side door portion opening / closing control cylinder 48 is controlled.

受け入れ側板状扉部４１と送り出し側板状扉部４２は乗換えレール１１の旋回移動中は閉じられ、乗換えレール１１にハンガー治具３を介して吊持された複列基板Ｗ（及びこの複列基板をガイドする前記隔壁案内板３１）を側部方向から囲む垂直壁の囲繞板壁面で構成した複列基板囲み体４０で遮蔽することによって、旋回移動中に複列基板にかかる空気抵抗を緩和でき、複列基板の揺れを減少できるようにしている。   The receiving side plate-like door portion 41 and the sending-out side plate-like door portion 42 are closed during the turning movement of the transfer rail 11, and the double-row substrate W (and this double-row substrate) suspended on the transfer rail 11 via the hanger jig 3. By shielding the partition wall guide plate 31) that guides the wall with the double-row substrate enclosure 40 that is formed by the wall surface of the vertical wall surrounding the side wall, the air resistance applied to the double-row substrate during the swiveling movement can be reduced. In this way, the shaking of the double row substrate can be reduced.

また、前記乗換え搬送装置１０の前記水平旋回装置１２の旋回作動部に前記乗換えレール１１の前記乗換え位置に乗換え移送されたハンガー治具３を旋回移動時に該乗換え位置に固定できるハンガー治具３の乗換え位置固定手段５０を設けている。   Further, the hanger jig 3 that can be fixed to the change position when the hanger jig 3 transferred to the change position of the change rail 11 is turned to the turning position of the horizontal turning device 12 of the transfer conveying device 10 during the turning movement. A transfer position fixing means 50 is provided.

前記乗換え位置固定手段５０は前記水平旋回アーム１４の旋回作動部１４ａ側の端部近くに設けた押圧固定具５１によって構成され、前記ハンガー治具３の前記レール係合部４を乗換えレール１１の側面に向けて圧接と圧接解除を制御可能な押圧固定具５１によって、前記ハンガー治具３を乗換えレール１１の所定の乗換え位置に固定するように構成している。前記押圧固定具５１による圧接と圧接解除の制御は押圧固定制御シリンダー５２の往復動ロッド部の往復動によって行なわれる。この乗換え位置固定手段５０（押圧固定具５１）によって乗換えレール１１の旋回移動中にハンガー治具３を乗換えレール１１の所定の乗換え位置から脱落移動しないように固定できる。   The transfer position fixing means 50 is constituted by a pressing fixture 51 provided near the end of the horizontal turning arm 14 on the turning operation part 14 a side, and the rail engaging part 4 of the hanger jig 3 is connected to the changing rail 11. The hanger jig 3 is configured to be fixed at a predetermined transfer position of the transfer rail 11 by a pressing fixture 51 that can control the pressure contact and pressure release toward the side surface. Control of pressure contact and pressure release by the pressing fixture 51 is performed by reciprocating movement of the reciprocating rod portion of the pressing and fixing control cylinder 52. By this transfer position fixing means 50 (pressing fixture 51), the hanger jig 3 can be fixed so as not to drop off from a predetermined transfer position of the transfer rail 11 during the turning movement of the transfer rail 11.

次に乗換え搬送装置１０によるハンガー治具３（複列基板Ｗ）の乗換え作動について説明する。先ず、前記ハンガー治具３（複列基板Ｗ）は上昇位置の搬出側レール部６ａから受け入れ位置に移動している乗換えレール１１の乗換え位置へ受け入れ送り手段２０によって乗換え移送され、乗り換えられた複列基板Ｗは基板ガイド体３０の隔壁案内板３１によって各基板の垂直姿勢が規制される。ハンガー治具３（複列基板Ｗ）の乗換えレール１１への受け入れに際して、前記受け入れ側板状扉部４１は開扉状態に制御されており、受け入れ後に閉扉状態に制御される。同様に複列基板Ｗの乗換えレール１１への受け入れに際して、前記乗換え位置固定手段５０（押圧固定具５１）は固定解除状態に制御されており、受け入れ後に固定状態に制御される。   Next, a transfer operation of the hanger jig 3 (double-row substrate W) by the transfer transport device 10 will be described. First, the hanger jig 3 (double-row substrate W) is transferred and transferred by the receiving and feeding means 20 to the transfer position of the transfer rail 11 that has moved from the unloading-side rail portion 6a at the raised position to the receiving position. In the row substrate W, the vertical posture of each substrate is regulated by the partition wall guide plate 31 of the substrate guide body 30. When the hanger jig 3 (double-row substrate W) is received by the transfer rail 11, the receiving side plate-like door portion 41 is controlled to be in an open state, and after being received, is controlled to be in a closed state. Similarly, when the double-row substrate W is received by the transfer rail 11, the transfer position fixing means 50 (the pressing fixture 51) is controlled to be in a fixed release state, and is controlled to be in a fixed state after reception.

この状態で乗換えレール１１は受け入れ位置から送り出し位置まで略１８０度水平旋回移動され、ハンガー治具３（複列基板Ｗ）を受け入れ位置から送り出し位置まで搬送する。したがって、ハンガー治具３（複列基板Ｗ）を受け入れ位置から送り出し位置まで旋回移動させる際には、前記乗換え位置固定手段５０（押圧固定具５１）によって移送レールの乗換え位置から脱落移動しないように固定されると共に、前記複列基板Ｗは、前記基板ガイド体３０の隔壁案内板３１で垂直姿勢を規制ガイドされた状態で、複列基板囲み体４０の囲繞板壁面板でその全体を側部方向から囲まれ、旋回移動中に複列基板にかかる空気抵抗を緩和でき、複列基板の揺れを減少できる。このことによって、複列基板を高速で乗換え搬送でき、しかも高速乗換え搬送中に複列基板が互いに干渉なく、各基板に傷をつけずに乗換え搬送できる。特に薄物の複列基板を乗換え搬送する場合に効果大である。   In this state, the transfer rail 11 is horizontally swung about 180 degrees from the receiving position to the sending position, and conveys the hanger jig 3 (double-row substrate W) from the receiving position to the sending position. Therefore, when the hanger jig 3 (double-row substrate W) is swung from the receiving position to the sending position, the transfer position fixing means 50 (pressing fixture 51) prevents the transfer rail from dropping off from the transfer position. The double-row substrate W is fixed in the vertical direction by the partition wall guide plate 31 of the substrate guide body 30 and is guided in the lateral direction by the surrounding wall surface plate of the double-row substrate enclosure 40. The air resistance applied to the double-row substrate during the swiveling movement can be reduced, and the shaking of the double-row substrate can be reduced. As a result, the double row substrates can be transferred and transferred at high speed, and the double row substrates can be transferred and transferred without damaging each substrate during the high speed transfer and transfer. This is particularly effective when transferring and transferring thin double-row substrates.

乗換えレール１１が送り出し位置に移動された後、前記送り出し側板状扉部４２は閉扉状態から開扉状態に制御され、前記乗換え位置固定手段５０（押圧固定具５１）は固定状態から固定解除状態に制御され、ハンガー治具３（複列基板Ｗ）は乗換えレール１１から上昇位置の搬入側レール部７ａへ送り出し送り手段２１によって乗換え移送される。そして、この送り出し後に前記送り出し側板状扉部４２は開扉状態から閉扉状態に制御され、前記乗換えレール１１は受け入れ位置に水平旋回移動して戻され、次のハンガー治具３（複列基板Ｗ）を受け入れるべく前記受け入れ側板状扉部４１が閉扉状態から開扉状態に制御される。   After the transfer rail 11 is moved to the delivery position, the delivery-side plate-like door portion 42 is controlled from the closed state to the open state, and the transfer position fixing means 50 (the pressing fixture 51) is changed from the fixed state to the unlocked state. The hanger jig 3 (double-row substrate W) is controlled and transferred from the transfer rail 11 to the carry-in side rail portion 7a at the raised position by the transfer means 21. After the delivery, the delivery-side plate-like door portion 42 is controlled from the open state to the closed state, and the transfer rail 11 is moved back to the receiving position by being pivoted back to the next hanger jig 3 (double row substrate W). ) Is received from the closed state to the open state.

以上、本発明に係る基板乗換え搬送装置として、複列基板搬送の実施形態について説明した。しかしながら、この基板乗換え搬送装置の技術思想は、前述したように、一枚の基板を同様に乗換え搬送する場合にも適用できる。一枚基板の乗換え搬送装置では、複列基板用の前記ハンガー治具３を一枚基板用のハンガー治具（例えば、図２に５ｂで示した一列のチャック部で構成したハンガー治具。）に変更すれば良く、基板乗換え搬送装置の他の構成及び作動は複列基板搬送のものと実質的に同じである。   The embodiment of the double row substrate transfer has been described above as the substrate transfer transfer device according to the present invention. However, as described above, the technical idea of the substrate transfer / transfer apparatus can also be applied to transfer and transfer a single substrate in the same manner. In the single substrate transfer transfer device, the hanger jig 3 for the double-row substrate is a hanger jig for a single substrate (for example, a hanger jig constituted by a single-row chuck portion shown by 5b in FIG. 2). The other configuration and operation of the substrate transfer / transfer apparatus are substantially the same as those of the double-row substrate transfer.

複列基板の乗換え搬送装置の平面図である。It is a top view of the transfer conveyance apparatus of a double row board | substrate. 複列基板の乗換え搬送装置の正面図である。It is a front view of the transfer conveyance apparatus of a double row board | substrate. 複列基板の乗換え搬送装置の側面図である。It is a side view of the transfer conveyance apparatus of a double row board | substrate.

符号の説明Explanation of symbols

１，２ 処理槽
Ｗ 基板（複列基板）
１ａ 搬出部
２ａ 搬入部
３ ハンガー治具
４ レール係合部
５ チャック部
６，７ 移送レール
６ａ 搬出側レール部
７ａ 搬入側レール部
１０ 乗換え搬送装置
１１ 乗換えレール
１２ 水平旋回装置
１３ 反転モーター
１４ 水平旋回アーム
１４ａ 旋回作動部
２０ 受け入れ送り手段
２１ 送り出し送り手段
３０ 基板ガイド体
３１ 隔壁案内板
４０ 複列基板囲み体
４１ 受け入れ側板状扉部
４２ 送り出し側板状扉部
４３，４３ 側面板壁部
４７ 受け入れ側扉部開閉制御シリンダー
４８ 送り出し側扉部開閉制御シリンダー
５０ 乗換え位置固定手段
５１ 押圧固定具
５２ 押圧固定制御シリンダー 1, 2 treatment tank W substrate (double row substrate)
DESCRIPTION OF SYMBOLS 1a Carry-out part 2a Carry-in part 3 Hanger jig 4 Rail engaging part 5 Chuck part 6,7 Transfer rail 6a Carry-out side rail part 7a Carry-in side rail part 10 Change transfer apparatus 11 Transfer rail 12 Horizontal turning apparatus 13 Reverse motor 14 Horizontal turning Arm 14a Rotating operation part 20 Receiving and feeding means 21 Sending and feeding means 30 Substrate guide body 31 Bulkhead guide plate 40 Double row board enclosure 41 Receiving side plate-like door part 42 Sending side plate-like door part 43, 43 Side plate wall part 47 Receiving side door part Opening / closing control cylinder 48 Delivery side door opening / closing control cylinder 50 Transfer position fixing means 51 Press fixing tool 52 Press fixing control cylinder

Claims (8)

二列の処理槽を離間して平行に配置し、一方の処理槽の搬出部から互いに離間して隣り合う他方の処理槽の搬入部へ基板を垂直状態にして搬入する基板の乗換え搬送装置において、前記基板はレールに沿って移動自在に支持されたハンガー治具に垂直状態に吊持されており、このハンガー治具は複数の基板を吊持できる複列構造のチャック部を有し、このチャック部によって複数の基板を各基板面が所定間隔を空けて向き合う並列な垂直状態で、且つ各基板の一側端部をレールに沿う移動方向に向けた垂直状態に吊持し得るようにしてあり、このハンガー治具に吊持された複列基板を前記各処理槽に対応して離間して平行に配設した一方の移送レールの搬出側レール部から他方の移送レールの搬入側レール部へ乗換え搬送する複列基板の乗換え搬送装置であり、この乗換え搬送装置を、前記搬出側レール部と互いに直列状態のレール軌道を成す受け入れ位置と前記搬入側レール部と互いに直列状態のレール軌道を成す送り出し位置との間を水平方向に略１８０度旋回移動する乗換えレールを旋回作動部に備えた水平旋回装置と、前記ハンガー治具を前記搬出側レール部から乗換えレールの所定の乗換え位置へ直列状態のレール軌道に沿って乗換え移送する受け入れ送り手段と、前記ハンガー治具を乗換えレールの前記乗換え位置から搬入側レール部へ直列状態のレール軌道に沿って乗換え移送する送り出し送り手段とで構成したことを特徴とする複列基板搬送における水平旋回式基板乗換え搬送装置。   In a substrate transfer and transfer apparatus in which two rows of processing tanks are spaced apart and arranged in parallel, and the substrates are placed in a vertical state from the unloading part of one processing tank to the loading part of the other processing tank adjacent to each other. The substrate is suspended in a vertical state by a hanger jig supported so as to be movable along the rail, and the hanger jig has a chuck portion having a double-row structure capable of hanging a plurality of substrates. The chuck unit can suspend a plurality of substrates in a parallel vertical state in which the substrate surfaces face each other at a predetermined interval, and one side end of each substrate can be suspended in a vertical state in the moving direction along the rail. Yes, the double-row substrate suspended on the hanger jig is spaced apart and arranged in parallel corresponding to each processing tank, from the carry-out side rail part of one transfer rail to the carry-in side rail part of the other transfer rail Transfer of double-row board to transfer to A transfer device, wherein the transfer and transfer device is horizontally disposed between a receiving position that forms a rail track in series with the carry-out side rail portion and a delivery position that forms a rail track in series with the carry-in side rail portion. And a horizontal turning device provided with a changing rail that turns about 180 degrees in the turning operation portion, and the hanger jig is transferred from the carry-out side rail portion to a predetermined changing position of the changing rail along the rail track in a series state. A double-row substrate transport comprising: a receiving and feeding means configured to transfer the hanger jig from the transfer position of the transfer rail to the loading-side rail portion along the rail track in a serial state. Horizontal swivel board transfer and transfer device. 前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される基板ガイド体を設け、この基板ガイド体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された複列基板に対して並列な各基板の基板面を略均等な対向空間に隔てる隔壁案内板を配設して構成したことを特徴とする請求項１記載の複列基板搬送における水平旋回式基板乗換え搬送装置。   A substrate guide body that is pivotally moved integrally with the transfer rail is provided in a swing operation portion of the horizontal swing device, and the substrate guide body is transferred to the transfer position of the transfer rail via the hanger jig. 2. The horizontal swivel type for transporting double-row substrates according to claim 1, wherein a partition guide plate is provided for separating the substrate surfaces of the respective substrates parallel to the double-row substrates into substantially equal facing spaces. Substrate transfer transfer device. 前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される複列基板囲み体を設け、この複列基板囲み体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された複列基板に対して該複列基板の全体を側部方向から囲む垂直壁の囲繞板壁面で構成し、この囲繞板壁面を、開閉制御可能な受け入れ側板状扉部と、開閉制御可能な送り出し側板状扉部と、側面板壁部とで構成したことを特徴とする請求項１記載の複列基板搬送における水平旋回式基板乗換え搬送装置。   A double row substrate enclosure that is pivotally moved integrally with the transfer rail is provided in a turning operation portion of the horizontal turning device, and the double row substrate enclosure is disposed at the transfer position of the transfer rail via the hanger jig. A double-sided board that has been transferred and transferred, and the double-sided board is constituted by a vertical wall wall that surrounds the entire double-row board from the side direction, and the side wall of the surrounding board can be controlled to be opened and closed, 2. The horizontal turning type substrate transfer / conveying apparatus in double row substrate conveyance according to claim 1, characterized in that it comprises a delivery side plate-like door portion that can be opened and closed and a side plate wall portion. 前記水平旋回装置の旋回作動部に前記乗換えレールの前記乗換え位置に乗換え移送された前記ハンガー治具を旋回移動時に該乗換え位置に固定できる該ハンガー治具の乗換え位置固定手段を設け、この乗換え位置固定手段を、前記ハンガー治具のレール係合部を乗換えレールの側面に向けて圧接し得る押圧固定具によって構成したことを特徴とする請求項１記載の複列基板搬送における水平旋回式基板乗換え搬送装置。   A change position fixing means for the hanger jig capable of fixing the hanger jig transferred and transferred to the transfer position of the transfer rail to the change position during the turning movement is provided in the turning operation portion of the horizontal turning device, and this change position 2. The horizontal swivel type substrate transfer in the double row substrate transfer according to claim 1, wherein the fixing means is constituted by a pressing fixture capable of pressing the rail engaging portion of the hanger jig toward the side surface of the transfer rail. Conveying device. 二列の処理槽を離間して平行に配置し、一方の処理槽の搬出部から互いに離間して隣り合う他方の処理槽の搬入部へ基板を垂直状態にして搬入する基板搬送装置において、前記基板はレールに沿って移動自在に支持されたハンガー治具に該基板の一側端部をレールに沿う移動方向に向けた垂直状態に吊持されており、このハンガー治具に吊持された基板を前記各処理槽に対応して離間して平行に配設した一方の移送レールの搬出側レール部から他方の移送レールの搬入側レール部へ乗換え搬送する基板の乗換え搬送装置であり、この乗換え搬送装置を、前記搬出側レール部と互いに直列状態のレール軌道を成す受け入れ位置と前記搬入側レール部と互いに直列状態のレール軌道を成す送り出し位置との間を水平方向に略１８０度旋回移動する乗換えレールを旋回作動部に備えた水平旋回装置と、前記ハンガー治具を前記搬出側レール部から乗換えレールの所定の乗換え位置へ直列状態のレール軌道に沿って乗換え移送する受け入れ送り手段と、前記ハンガー治具を乗換えレールの前記乗換え位置から搬入側レール部へ直列状態のレール軌道に沿って乗換え移送する送り出し送り手段とで構成したことを特徴とする基板搬送における水平旋回式基板乗換え搬送装置。   In the substrate transfer apparatus for disposing two rows of processing tanks apart and in parallel, and carrying the substrate in a vertical state from the carrying-out part of one processing tank to the carrying-in part of the other processing tank adjacent to the other, The substrate is suspended in a vertical state in which one side end of the substrate is directed in the direction of movement along the rail, and is supported by the hanger jig supported movably along the rail. A substrate transfer and transfer device for transferring and transferring a substrate from a carry-out side rail portion of one transfer rail to a load-side rail portion of the other transfer rail, which are spaced apart and arranged in parallel corresponding to each processing tank, The transfer transport device is pivoted approximately 180 degrees horizontally between a receiving position that forms a rail track in series with the carry-out side rail portion and a delivery position that forms a rail track in series with the carry-in side rail portion. Do A horizontal turning device provided with a turning rail in the turning operation portion, and a receiving and feeding means for transferring and transferring the hanger jig from the carrying-out side rail portion to a predetermined changing position of the changing rail along a rail track in a series state; A horizontal swivel type substrate transfer / transfer apparatus for substrate transfer, characterized in that the hanger jig is configured to include transfer and transfer means for transferring and transferring along a rail track in series from the transfer position of the transfer rail to the carry-in rail portion. 前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される基板ガイド体を設け、この基板ガイド体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された基板に対して該基板の基板面を略均等な対向空間に隔てる一対の案内板を配設して構成したことを特徴とする請求項５記載の基板搬送における水平旋回式基板乗換え搬送装置。   A substrate guide body that is pivotally moved integrally with the transfer rail is provided in a swing operation portion of the horizontal swing device, and the substrate guide body is transferred to the transfer position of the transfer rail via the hanger jig. 6. A horizontal swivel type substrate transfer / transfer apparatus for substrate transfer according to claim 5, wherein a pair of guide plates are provided to separate the substrate surface of the substrate into substantially equal facing spaces. 前記水平旋回装置の旋回作動部に前記乗換えレールと一体的に旋回移動される基板囲み体を設け、この基板囲み体を、前記乗換えレールの前記乗換え位置に前記ハンガー治具を介して乗換え移送された基板に対して該基板の全体を側部方向から囲む垂直壁の囲繞板壁面で構成し、この囲繞板壁面を、開閉制御可能な受け入れ側板状扉部と、開閉制御可能な送り出し側板状扉部と、側面板壁部とで構成したことを特徴とする請求項５記載の基板搬送における水平旋回式基板乗換え搬送装置。   A substrate enclosure that is pivotally moved integrally with the transfer rail is provided in a turning operation portion of the horizontal turning device, and the substrate enclosure is transferred to and transferred to the transfer position of the transfer rail via the hanger jig. The board is composed of a vertical wall wall that surrounds the entire board from the side, and the wall surface of the board is a receiving side plate door that can be controlled to open and close, and a delivery side plate door that can be controlled to open and close. 6. The horizontal revolving substrate transfer / transfer apparatus for substrate transfer according to claim 5, wherein the horizontal turn-type substrate transfer / transfer apparatus is configured by a portion and a side plate wall portion. 前記水平旋回装置の旋回作動部に前記乗換えレールの前記乗換え位置に乗換え移送された前記ハンガー治具を旋回移動時に該乗換え位置に固定できる該ハンガー治具の乗換え位置固定手段を設け、この乗換え位置固定手段を、前記ハンガー治具のレール係合部を乗換えレールの側面に向けて圧接し得る押圧固定具によって構成したことを特徴とする請求項５記載の基板搬送における水平旋回式基板乗換え搬送装置。   A change position fixing means for the hanger jig capable of fixing the hanger jig transferred and transferred to the transfer position of the transfer rail to the change position during the turning movement is provided in the turning operation portion of the horizontal turning device, and this change position 6. A horizontal swivel type substrate transfer / transfer apparatus for substrate transfer according to claim 5, wherein the fixing means is constituted by a pressing fixture capable of pressing the rail engaging portion of the hanger jig toward the side surface of the transfer rail. .

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