JP2009121907A - Magnetic rotor, manufacturing method therefor, and encoder device using magnetic rotor - Google Patents

Magnetic rotor, manufacturing method therefor, and encoder device using magnetic rotor Download PDF

Info

Publication number
JP2009121907A
JP2009121907A JP2007295272A JP2007295272A JP2009121907A JP 2009121907 A JP2009121907 A JP 2009121907A JP 2007295272 A JP2007295272 A JP 2007295272A JP 2007295272 A JP2007295272 A JP 2007295272A JP 2009121907 A JP2009121907 A JP 2009121907A
Authority
JP
Japan
Prior art keywords
magnetic
pattern
rotating member
memory disk
reflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007295272A
Other languages
Japanese (ja)
Other versions
JP5239303B2 (en
Inventor
Tetsuya Hikichi
哲也 引地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP2007295272A priority Critical patent/JP5239303B2/en
Publication of JP2009121907A publication Critical patent/JP2009121907A/en
Application granted granted Critical
Publication of JP5239303B2 publication Critical patent/JP5239303B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To reduce the parts count of an encoder device and achieve compactification and performance improvement in the device. <P>SOLUTION: The magnetic rotor (memory disc 17) includes a rotating member 18, which rotates together with a rotating shaft 2, a pattern to be detected (reflection pattern 21) to be read by pattern detection means (light-emitting element 26 and a light-receiving element 27) is provided on at least part of the rotating member 18. The rotating member 18 is made of a magnetic substance which allows the rotating state thereof to be detected by a magnetic rotation detection means ( magnetic sensor 24). <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、エンコーダ装置のメモリー円板等に用いられる磁気回転体およびその製造方法に関するものである。   The present invention relates to a magnetic rotating body used for a memory disk or the like of an encoder device and a method for manufacturing the same.

例えば特許文献１に開示されているエンコーダ装置では、メモリー円板が回転軸と一体に回転するように設けられ、このメモリー円板の周部等には微小回転角検出用の被検出パターンが形成されるとともに、メモリー円板の少なくとも一面に磁性体からなる回転検出部材が付設された構成である。メモリー円板の厚みが薄い場合には、メモリー円板の歪みを防止するべく、ターンテーブル状に形成されたハブと呼ばれる部材が回転軸と一体に回転するように設けられ、このハブにメモリー円板と回転検出部材とが貼着等により固定される。   For example, in the encoder device disclosed in Patent Document 1, a memory disk is provided so as to rotate integrally with a rotating shaft, and a detected pattern for detecting a minute rotation angle is formed on the periphery of the memory disk. In addition, a rotation detection member made of a magnetic material is attached to at least one surface of the memory disk. When the thickness of the memory disk is thin, a member called a hub formed in a turntable shape is provided so as to rotate integrally with the rotating shaft in order to prevent distortion of the memory disk. The plate and the rotation detection member are fixed by sticking or the like.

また、メモリー円板の近傍には、上記回転検出部材の回転的動作、即ちメモリー円板の回転速度や回転方向等を検出する磁気回転検出手段と、メモリー円板のより繊細な回転的動作を被検出パターンの動きから読み取るパターン検出手段とが設けられている。
特開２００７−１１４０３２号公報 Also, in the vicinity of the memory disk, there is a rotational operation of the rotation detection member, that is, a magnetic rotation detection means for detecting the rotational speed and direction of the memory disk, and a more delicate rotational operation of the memory disk. Pattern detection means for reading from the movement of the pattern to be detected is provided.
Japanese Patent Laid-Open No. 2007-114032

しかしながら、上記のように従来のメモリー円板は、その一面に磁性体からなる回転検出部材が別途付設された構成であったため、部品点数が多くなるとともに、回転検出部材の存在によりメモリー円板の回転軸方向に沿う寸法が大きくなり、ひいてはこれがエンコーダ装置全体のコンパクト化を妨げる要因になっていた。   However, as described above, the conventional memory disk has a structure in which a rotation detection member made of a magnetic material is separately provided on one surface thereof, so that the number of parts is increased and the presence of the rotation detection member causes the memory disk to be The dimension along the direction of the rotation axis has increased, which in turn has been a factor that hinders the overall compactness of the encoder device.

また、回転検出部材を設置する場所がメモリー円板の中心部付近に限定されるため、自ずと回転検出部材の直径サイズに制約が加わり、その結果、回転検出部材の直径を大きくして磁力を増大させ、前述した磁気回転検出手段による検出性能の向上を図ることができなかった。これは、取りも直さずエンコーダ装置の性能向上に歯止めを掛けていた。   In addition, since the place where the rotation detection member is installed is limited to the vicinity of the center of the memory disk, there is a restriction on the diameter size of the rotation detection member, and as a result, the diameter of the rotation detection member is increased to increase the magnetic force. As a result, it has been impossible to improve the detection performance by the magnetic rotation detection means described above. This has stopped the improvement of the performance of the encoder device without any change.

本発明は、このような事情に鑑みてなされたものであり、エンコーダ装置等の部品点数を削減するとともに、装置のコンパクト化と性能向上を図ることのできる磁気回転体およびその製造方法ならびに磁気回転体を用いたエンコーダ装置を提供することを目的とする。   The present invention has been made in view of such circumstances, and can reduce the number of parts of an encoder device and the like, and can reduce the size and improve the performance of the device, the manufacturing method thereof, and the magnetic rotation An object is to provide an encoder device using a body.

かかる目的を達成するために、本発明に係る磁気回転体は、回転軸と一体に回転するように設けられる回転部材を備え、前記回転部材の少なくとも一部にはパターン検出手段により読み込まれる被検出パターンが設けられ、前記回転部材の材質は、それ自体の回転状態を磁気回転検出手段に検出可能にさせる磁性体であることを特徴とする。   In order to achieve this object, a magnetic rotating body according to the present invention includes a rotating member provided to rotate integrally with a rotating shaft, and at least a part of the rotating member is detected by a pattern detection means. A pattern is provided, and the material of the rotating member is a magnetic material that enables the magnetic rotation detecting means to detect the rotation state of the rotating member.

また、本発明に係る磁気回転体の製造方法は、前記回転部材を希土類磁石で形成し、前記回転部材のパターンニング面にＮｉメッキ層を施し、前記Ｎｉメッキ層の表面を鏡面研磨し、前記鏡面研磨したＮｉメッキ層の表面に反射率８５％以上のＡｌメッキ層を施し、前記Ａｌメッキ層の表面にＣｒ蒸着により非反射膜を形成し、前記Ｃｒ蒸着により形成した非反射膜をエッチングにより部分的に削除して露出反射部を形成することにより、反射検出式の被検出パターンとしての反射パターンを形成することを特徴とする。   Further, in the method of manufacturing a magnetic rotating body according to the present invention, the rotating member is formed of a rare earth magnet, a Ni plating layer is applied to a patterning surface of the rotating member, a surface of the Ni plating layer is mirror-polished, An Al plating layer having a reflectivity of 85% or more is applied to the surface of the mirror-polished Ni plating layer, a non-reflective film is formed on the surface of the Al plating layer by Cr vapor deposition, and the non-reflective film formed by the Cr vapor deposition is etched. A reflection pattern as a detection pattern of a reflection detection type is formed by partially deleting and forming an exposed reflection portion.

さらに、本発明に係るエンコーダ装置は、本発明に係る磁気回転体をメモリー円板として用いたことを特徴とする。   Furthermore, the encoder device according to the present invention is characterized in that the magnetic rotating body according to the present invention is used as a memory disk.

本発明に係る磁気回転体によれば、回転部材そのものが磁気を持ち、従来では別体に設けられていた磁性体からなる回転検出部材としての機能を有するようになるため、従来の回転検出部材を省略することができ、これによりエンコーダ装置等の部品点数を削減するとともに、装置をコンパクト化することができる。   According to the magnetic rotating body according to the present invention, the rotating member itself has magnetism, and since it has a function as a rotation detecting member made of a magnetic body that has been provided separately in the prior art, the conventional rotating detecting member Thus, the number of parts such as an encoder device can be reduced and the device can be made compact.

しかも、回転部材全体が磁気を帯びた回転検出部材となって大径化されるため、従来の付加的な回転検出部材よりも磁力を向上させることができ、結果としてエンコーダ装置等の性能向上を図ることができる。   In addition, since the entire rotation member becomes a magnetic rotation detection member and has a large diameter, the magnetic force can be improved compared to the conventional additional rotation detection member, resulting in improved performance of the encoder device and the like. Can be planned.

また、本発明に係る磁気回転体の製造方法によれば、磁性体で形成された回転部材に反射検出式の被検出パターンを確実かつ容易に形成することができる。   In addition, according to the method for manufacturing a magnetic rotating body according to the present invention, it is possible to reliably and easily form a reflection detection type detection pattern on a rotating member formed of a magnetic body.

さらに、本発明に係るエンコーダ装置によれば、部品点数を削減するとともに、装置のコンパクト化と性能向上を図ることができる。   Furthermore, according to the encoder apparatus according to the present invention, the number of parts can be reduced, and the apparatus can be made compact and the performance can be improved.

以下、本発明の実施の形態について説明する。
［発明の実施の形態１］ Embodiments of the present invention will be described below.
Embodiment 1 of the Invention

図１は、本発明の実施の形態１に係る磁気回転体をメモリー円板として使用したエンコーダ装置を示す縦断面図である。このエンコーダ装置１は、図示しない電動モータの出力軸により駆動される回転軸２をハウジング３に取付けられた上下のベアリング４，５により回転自在に支持している。回転軸２はハウジング３内においてその先端部を上方に向けており、ハウジング３には回転軸２の先端部を覆うように下方に開口した円筒状のカバー部材６が取付けられている。ここで、エンコーダ装置１が電動モータと一体に構成されるモジュラー型であれば、回転軸２を電動モータの出力軸そのものとしてもよい。   FIG. 1 is a longitudinal sectional view showing an encoder apparatus using a magnetic rotating body according to Embodiment 1 of the present invention as a memory disk. In the encoder device 1, a rotary shaft 2 driven by an output shaft of an electric motor (not shown) is rotatably supported by upper and lower bearings 4 and 5 attached to a housing 3. The rotary shaft 2 has its tip portion facing upward in the housing 3, and a cylindrical cover member 6 that opens downward is attached to the housing 3 so as to cover the tip portion of the rotary shaft 2. Here, if the encoder device 1 is a modular type configured integrally with the electric motor, the rotary shaft 2 may be the output shaft itself of the electric motor.

ハウジング３の上面開口部には回路基板８が固定され、その上方には回路基板９がカラー１０により回路基板８に対して所定の間隔を持って平行に設置され、これら２枚の回路基板８，９がビス１１でハウジング３に共締めされている。   A circuit board 8 is fixed to the opening of the upper surface of the housing 3, and a circuit board 9 is disposed above the circuit board 8 in parallel with the circuit board 8 by a collar 10 at a predetermined interval. , 9 are fastened to the housing 3 with screws 11.

回転軸２の上端は回路基板８を貫通して回路基板９の直下まで延びており、回転軸２の回路基板８よりも突出した部分に形成された水平段部２ａにハブ１４が載置されている。このハブ１４は、薄肉な円板状のプレート部１４ａと、回転軸２上端に同軸的に固定するための管状のボス部１４ｂとが一体に形成されており、ボス部１４ｂがビス１５で回転軸２に締結されることにより、ハブ１４全体が回転軸２と一体に回転するように設けられる。   The upper end of the rotating shaft 2 passes through the circuit board 8 and extends directly below the circuit board 9, and the hub 14 is placed on the horizontal step portion 2 a formed at a portion protruding from the circuit board 8 of the rotating shaft 2. ing. The hub 14 is integrally formed with a thin disk-shaped plate portion 14 a and a tubular boss portion 14 b for coaxially fixing to the upper end of the rotary shaft 2, and the boss portion 14 b is rotated by a screw 15. By being fastened to the shaft 2, the entire hub 14 is provided to rotate integrally with the rotating shaft 2.

さらに、図２にも示すように、ハブ１４のプレート部１４ａの上面に、本願発明に係る磁気回転体としてのメモリー円板１７が設けられている。このメモリー円板１７は、強い磁力を持つ希土類磁石等の磁性体材料により形成された円板状の回転部材１８を主体にしている。回転部材１８はハブ１４のプレート部１４ａ上面に貼着等により固着され、ハブ１４を介して回転軸２に対し一体に回転するように設けられる。メモリー円板１７の中央部にはハブ１４のボス部１４ｂに密に嵌合する嵌合穴１７ａが穿設されている。また、メモリー円板１７の外径はプレート部１４ａの外径よりも一回り大きくされている。   Further, as shown in FIG. 2, a memory disk 17 as a magnetic rotating body according to the present invention is provided on the upper surface of the plate portion 14 a of the hub 14. The memory disk 17 is mainly composed of a disk-shaped rotating member 18 formed of a magnetic material such as a rare earth magnet having a strong magnetic force. The rotating member 18 is fixed to the upper surface of the plate portion 14 a of the hub 14 by sticking or the like, and is provided so as to rotate integrally with the rotating shaft 2 via the hub 14. A fitting hole 17a is formed in the central portion of the memory disk 17 so as to closely fit the boss portion 14b of the hub 14. Further, the outer diameter of the memory disk 17 is made slightly larger than the outer diameter of the plate portion 14a.

メモリー円板１７の例えば上面の外周部付近には、被検出パターンが形成されている。この被検出パターンは、メモリー円板１７の上面を鏡面研磨し、この鏡面研磨した面に反射膜と非反射膜とを順次形成してから上記非反射膜を部分的に削除して反射パターン２１を形成した反射検出式である。被検出パターン（反射パターン２１）の詳細な形成方法については後述する。   For example, a detected pattern is formed near the outer peripheral portion of the upper surface of the memory disk 17. The pattern to be detected is obtained by mirror-polishing the upper surface of the memory disk 17 and sequentially forming a reflective film and a non-reflective film on the mirror-polished surface, and then partially removing the non-reflective film to obtain a reflective pattern 21. Is a reflection detection type. A detailed method of forming the detection pattern (reflection pattern 21) will be described later.

一方、回路基板９の下面側において、メモリー円板１７の上面外周部付近に対向する位置に磁気センサ２４（磁気回転検出手段）が設けられている。先述のように、メモリー円板１７は希土類磁石等の磁性体材料により形成されているために磁気を発しており、このメモリー円板１７の磁気（極性）が磁気センサ２４に検知されることにより、メモリー円板１７自体の回転状態が検出される。磁気センサ２４はメモリー円板１７の磁気に応じた電圧信号を出力し、磁気センサ２４から出力された電圧信号は図示しない増幅器によって増幅された後、処理回路においてディジタル信号に変換されてメモリー円板１７（回転軸２）の回転的動作（回転方向および回転速度等）が検出される。   On the other hand, on the lower surface side of the circuit board 9, a magnetic sensor 24 (magnetic rotation detection means) is provided at a position facing the vicinity of the outer periphery of the upper surface of the memory disk 17. As described above, since the memory disk 17 is made of a magnetic material such as a rare earth magnet, it generates magnetism, and the magnetic sensor 24 detects the magnetism (polarity) of the memory disk 17. Then, the rotation state of the memory disk 17 itself is detected. The magnetic sensor 24 outputs a voltage signal corresponding to the magnetism of the memory disk 17, and the voltage signal output from the magnetic sensor 24 is amplified by an amplifier (not shown) and then converted into a digital signal in a processing circuit to be converted into a memory disk. A rotational operation (rotational direction, rotational speed, etc.) of 17 (rotating shaft 2) is detected.

また、同じく回路基板９の下面側において、メモリー円板１７の上面外周部付近に対向する位置に、発光素子２６及び受光素子２７（パターン検出手段）が近接して設けられている。発光素子２６が発光した光はメモリー円板１７の反射パターン２１において反射された後に受光素子２７に受光され、受光素子２７は反射パターン２１の表示に応じた電圧信号を出力する。受光素子２７から出力された電圧信号は図示しない増幅器により増幅された後、処理回路においてディジタル信号に変換されてメモリー円板１７の位置が求められ、このメモリー円板１７の位置の変化に基づいて、回転軸２の回転量（回転方向を含む回転角度や回転速度）がより精密に検出される。   Similarly, on the lower surface side of the circuit board 9, a light emitting element 26 and a light receiving element 27 (pattern detecting means) are provided close to each other at a position facing the vicinity of the outer periphery of the upper surface of the memory disk 17. The light emitted from the light emitting element 26 is reflected by the reflection pattern 21 of the memory disk 17 and then received by the light receiving element 27, and the light receiving element 27 outputs a voltage signal corresponding to the display of the reflection pattern 21. The voltage signal output from the light receiving element 27 is amplified by an amplifier (not shown) and then converted into a digital signal by a processing circuit to determine the position of the memory disk 17. Based on the change in the position of the memory disk 17. The amount of rotation of the rotating shaft 2 (the rotation angle and rotation speed including the rotation direction) is detected more precisely.

次に、図３を参照しながらメモリー円板１７の被検出パターン（反射パターン２１）の形成方法について説明する。   Next, a method for forming the detection pattern (reflection pattern 21) of the memory disk 17 will be described with reference to FIG.

まず、希土類磁石で形成された回転部材１８のパターンニング面（ここでは上面）にＮｉメッキ層３１を施す（図３(a)参照）。   First, the Ni plating layer 31 is applied to the patterning surface (here, the upper surface) of the rotating member 18 formed of a rare earth magnet (see FIG. 3A).

次に、Ｎｉメッキ層３１の表面を鏡面研磨する（図３(b)参照）。   Next, the surface of the Ni plating layer 31 is mirror-polished (see FIG. 3B).

さらに、鏡面研磨したＮｉメッキ層３１の表面に反射率８５％以上のＡｌメッキ層３２を施す（図３(c)参照）。   Further, an Al plating layer 32 having a reflectivity of 85% or more is applied to the surface of the mirror-polished Ni plating layer 31 (see FIG. 3C).

そして、Ａｌメッキ層３２の表面にＣｒ蒸着により非反射膜３３を形成する（図３(d)参照）。   Then, a non-reflective film 33 is formed on the surface of the Al plating layer 32 by Cr vapor deposition (see FIG. 3D).

最後に、Ｃｒ蒸着により形成した非反射膜３３をエッチングにより部分的に削除して露出反射部３４を形成することにより、反射検出式の被検出パターンとしての反射パターン２１を形成し、メモリー円板１７が完成する。   Finally, the non-reflective film 33 formed by Cr vapor deposition is partially deleted by etching to form an exposed reflective portion 34, thereby forming a reflective pattern 21 as a reflection detection type detected pattern, and a memory disk 17 is completed.

上記のような方法手順によれば、磁性体で形成された回転部材１８に反射検出式の被検出パターン（反射パターン２１）を確実かつ容易に形成することができる。   According to the method procedure as described above, it is possible to reliably and easily form a reflection detection type detection pattern (reflection pattern 21) on the rotating member 18 formed of a magnetic material.

エンコーダ装置１は、そのメモリー円板１７を構成する回転部材１８の材質が希土類磁石等の磁性体であるため、メモリー円板１７の回転状態をそのまま磁気センサ２４に検出させることができる。このため、従来のようにメモリー円板１７の一面に磁性体からなる回転検出部材を別部品として付設し、この回転検出部材の磁力によりメモリー円板１７の回転状態を磁気センサに検出させる必要がない。   In the encoder device 1, since the rotating member 18 constituting the memory disk 17 is made of a magnetic material such as a rare earth magnet, the magnetic sensor 24 can detect the rotation state of the memory disk 17 as it is. For this reason, it is necessary to attach a rotation detection member made of a magnetic material as a separate part to one surface of the memory disk 17 as in the prior art, and to cause the magnetic sensor to detect the rotation state of the memory disk 17 by the magnetic force of the rotation detection member. Absent.

従って、エンコーダ装置１の部品点数を削減するとともに、エンコーダ装置１をコンパクト化することができる。ここでは特にエンコーダ装置１の高さ方向の寸法がコンパクト化される。   Therefore, the number of parts of the encoder device 1 can be reduced and the encoder device 1 can be made compact. Here, the dimension in the height direction of the encoder device 1 is particularly reduced.

しかも、回転部材１８全体がそのまま磁気を帯びた大径な回転検出部材となるため、従来の付加的かつ小径な回転検出部材よりも磁力、即ち検出出力を大幅に向上させることができ、結果として磁気センサ２４の検出エラー等を確実に防止してエンコーダ装置１の性能向上を図ることができる。
［発明の実施の形態２］ Moreover, since the entire rotation member 18 becomes a large-diameter rotation detection member that is magnetized as it is, the magnetic force, that is, the detection output can be greatly improved as compared with the conventional additional and small-diameter rotation detection member. The detection error of the magnetic sensor 24 and the like can be reliably prevented and the performance of the encoder device 1 can be improved.
[Embodiment 2 of the Invention]

図４は、本発明の実施の形態２に係る磁気回転体をメモリー円板として使用したエンコーダ装置を示す縦断面図である。このエンコーダ装置４１において、実施の形態１のエンコーダ装置１と構成が同様な部分には同じ符号を付して説明は省略する。   FIG. 4 is a longitudinal sectional view showing an encoder apparatus using the magnetic rotating body according to the second embodiment of the present invention as a memory disk. In this encoder device 41, the same reference numerals are given to the same components as those of the encoder device 1 of the first embodiment, and the description thereof is omitted.

このエンコーダ装置４１でも、メモリー円板４２を形作る回転部材４３が磁性体材料により形成されており、この回転部材４３がハブ４４（プレート部４４ａ，ボス部４４ｂ）を介して回転軸２と一体回転するように設けられている。回転部材４３の直径はハブ４４（プレート部４４ａ）の直径よりも大きく、メモリー円板４２（回転部材４３）の、プレート部４４ａ外周からはみ出した部分の下面に、実施の形態１の反射パターン２１と同様な反射パターン４５が形成されている。   Also in this encoder device 41, the rotating member 43 that forms the memory disk 42 is formed of a magnetic material, and the rotating member 43 rotates integrally with the rotating shaft 2 via the hub 44 (plate portion 44a, boss portion 44b). It is provided to do. The diameter of the rotating member 43 is larger than the diameter of the hub 44 (plate portion 44a), and the reflection pattern 21 of the first embodiment is formed on the lower surface of the portion of the memory disk 42 (rotating member 43) that protrudes from the outer periphery of the plate portion 44a. The same reflection pattern 45 is formed.

そして、メモリー円板４２の下方に位置する回路基板４７の上面において、メモリー円板４２の反射パターン４５に対向する位置に磁気センサ４８（磁気回転検出手段）と発光素子４９及び受光素子５０（パターン検出手段）とが設けられている。磁気センサ４８、発光素子４９、受光素子５０の作用は実施の形態１のエンコーダ装置１と同様である。   A magnetic sensor 48 (magnetic rotation detecting means), a light emitting element 49, and a light receiving element 50 (pattern) are arranged on the upper surface of the circuit board 47 located below the memory disk 42 at positions facing the reflective pattern 45 of the memory disk 42. Detection means). The operations of the magnetic sensor 48, the light emitting element 49, and the light receiving element 50 are the same as those of the encoder device 1 of the first embodiment.

メモリー円板４２の上方には回路基板等が設けられておらず、メモリー円板４２の上方がカバー部材６に覆われている。   A circuit board or the like is not provided above the memory disk 42, and the upper part of the memory disk 42 is covered with the cover member 6.

このように、メモリー円板４２の下面外周部に反射パターン４５を形成し、メモリー円板４２の下方に設けた回路基板４７の上に磁気センサ４８と発光素子４９及び受光素子５０を設けるレイアウトとすることにより、エンコーダ装置４１の高さ方向の寸法をよりコンパクト化することができる。
［発明の実施の形態３］ As described above, the reflective pattern 45 is formed on the outer peripheral portion of the lower surface of the memory disk 42, and the magnetic sensor 48, the light emitting element 49, and the light receiving element 50 are provided on the circuit board 47 provided below the memory disk 42. By doing so, the dimension of the encoder apparatus 41 in the height direction can be made more compact.
Embodiment 3 of the Invention

図５は、本発明の実施の形態３に係る磁気回転体をメモリー円板として使用したエンコーダ装置を示す縦断面図である。このエンコーダ装置５１において、実施の形態２のエンコーダ装置４１と構成が同様な部分には同じ符号を付して説明は省略する。   FIG. 5 is a longitudinal sectional view showing an encoder device using the magnetic rotating body according to the third embodiment of the present invention as a memory disk. In the encoder device 51, the same reference numerals are given to the same components as those of the encoder device 41 of the second embodiment, and the description thereof is omitted.

このエンコーダ装置５１では、回転軸５２に鍔状のプレート部５２ａが一体に形成されており、このプレート部５２ａの上面にメモリー円板４２を構成する回転部材４３が直接載置され、貼着等により固着されて回転軸５２に対し一体に回転するように設けられる。よって、実施の形態１および実施の形態２に示すハブ１４，４４は省略されている。その他の構成は実施の形態２のエンコーダ装置４１と同様である。   In the encoder device 51, a bowl-shaped plate portion 52a is integrally formed on the rotating shaft 52, and the rotating member 43 constituting the memory disk 42 is directly placed on the upper surface of the plate portion 52a, and is attached thereto. It is fixed so as to rotate integrally with the rotary shaft 52. Therefore, the hubs 14 and 44 shown in the first and second embodiments are omitted. Other configurations are the same as those of the encoder device 41 of the second embodiment.

このように、回転軸５２に一体に形成したプレート部５２ａにメモリー円板４２を直接固定してハブを省略したことにより、部品点数をさらに削減するとともに、図１および図４に示すようにハブ１４，４４を回転軸２に固定するためのボス部１４ｂ，４４ｂによる段差が無くなるため、実施の形態２のエンコーダ装置４１よりもカバー部材６をメモリー円板４２に近付けてカバー部材６の高さを下げ、エンコーダ装置５１の高さ方向の寸法をエンコーダ装置４１の場合よりもさらにコンパクト化することができる。   Thus, by directly fixing the memory disk 42 to the plate portion 52a formed integrally with the rotating shaft 52 and omitting the hub, the number of parts is further reduced, and the hub as shown in FIGS. 1 and 4 is used. Since the steps due to the boss portions 14b, 44b for fixing the 14, 44 to the rotating shaft 2 are eliminated, the cover member 6 is brought closer to the memory disk 42 than the encoder device 41 of the second embodiment, and the height of the cover member 6 is increased. Thus, the height dimension of the encoder device 51 can be made more compact than that of the encoder device 41.

なお、前記実施の形態１乃至３では、何れもメモリー円板１７，４２が円板状に形成されているが、円板状に限らず、例えば環状や円柱状、椀状、筒状等の軸対称な形状であれば、他の形状であっても構わない。   In the first to third embodiments, the memory disks 17 and 42 are each formed in a disk shape. However, the memory disks 17 and 42 are not limited to a disk shape, and may be, for example, an annular shape, a cylindrical shape, a bowl shape, or a cylindrical shape. Other shapes may be used as long as they are axisymmetric.

本発明の実施の形態１に係る磁気回転体をメモリー円板として使用したエンコーダ装置を示す縦断面図である。It is a longitudinal cross-sectional view which shows the encoder apparatus which uses the magnetic rotary body which concerns on Embodiment 1 of this invention as a memory disk. 同実施の形態に係るハブとメモリー円板の分解斜視図である。It is a disassembled perspective view of the hub and memory disk which concern on the same embodiment. 被検出パターン（反射パターン）の形成手順を示すもので、(a)は回転部材のパターンニング面にＮｉメッキ層が施された状態を示す縦断面図であり、(b)はＮｉメッキ層の表面が鏡面研磨された状態を示す縦断面図であり、(c)は鏡面研磨されたＮｉメッキ層の表面にＡｌメッキ層が施された状態を示す縦断面図であり、(d)はＡｌメッキ層の表面にＣｒ蒸着により非反射膜が形成された状態を示す縦断面図であり、(e)は非反射膜を部分的に削除して反射検出式の被検出パターンが形成された状態を示す縦断面図である。The procedure for forming the pattern to be detected (reflective pattern) is shown. (A) is a longitudinal sectional view showing a state in which the Ni plating layer is applied to the patterning surface of the rotating member, and (b) is a diagram of the Ni plating layer. It is a longitudinal cross-sectional view showing a state in which the surface is mirror-polished, (c) is a longitudinal cross-sectional view showing a state in which an Al plating layer is applied to the surface of the mirror-polished Ni plating layer, (d) is an Al It is a longitudinal cross-sectional view which shows the state by which the non-reflective film was formed by Cr vapor deposition on the surface of a plating layer, (e) is the state in which the non-reflective film was partially deleted and the detection pattern of the reflection detection type was formed FIG. 本発明の実施の形態２に係る磁気回転体をメモリー円板として使用したエンコーダ装置を示す縦断面図である。It is a longitudinal cross-sectional view which shows the encoder apparatus which uses the magnetic rotary body which concerns on Embodiment 2 of this invention as a memory disk. 本発明の実施の形態３に係る磁気回転体をメモリー円板として使用したエンコーダ装置を示す縦断面図である。It is a longitudinal cross-sectional view which shows the encoder apparatus which uses the magnetic rotary body which concerns on Embodiment 3 of this invention as a memory disk.

符号の説明Explanation of symbols

１ エンコーダ装置
２ 回転軸
３ ハウジング
６ カバー部材
１４ ハブ
１７ メモリー円板（磁気回転体）
１８ 回転部材
２１ 反射パターン（被検出パターン）
２４ 磁気センサ（磁気回転検出手段）
２６ 発光素子（パターン検出手段）
２７ 受光素子（パターン検出手段）
３１ Ｎｉメッキ層
３２ Ａｌメッキ層
３３ 非反射膜
３４ 露出反射部 DESCRIPTION OF SYMBOLS 1 Encoder apparatus 2 Rotating shaft 3 Housing 6 Cover member 14 Hub 17 Memory disk (magnetic rotating body)
18 Rotating member 21 Reflection pattern (detected pattern)
24 Magnetic sensor (magnetic rotation detection means)
26 Light emitting element (pattern detection means)
27 Light receiving element (pattern detection means)
31 Ni plating layer 32 Al plating layer 33 Non-reflective film 34 Exposed reflective part

Claims (4)

回転軸と一体に回転するように設けられる回転部材を備え、前記回転部材の少なくとも一部にはパターン検出手段により読み込まれる被検出パターンが設けられ、前記回転部材の材質は、それ自体の回転状態を磁気回転検出手段に検出可能にさせる磁性体であることを特徴とする磁気回転体。   A rotating member provided so as to rotate integrally with the rotating shaft, and a detected pattern to be read by a pattern detecting means is provided on at least a part of the rotating member, and the material of the rotating member is its own rotation state A magnetic rotator characterized in that the magnetic rotator is a magnetic body that can be detected by a magnetic rotation detector. 前記被検出パターンは、前記回転部材の少なくとも一部を鏡面研磨し、この鏡面研磨した面に反射膜と非反射膜とを順次形成してから前記非反射膜を部分的に削除して反射パターンを形成した反射検出式であることを特徴とする請求項１に記載の磁気回転体。   The pattern to be detected is a reflection pattern in which at least a part of the rotating member is mirror-polished, a reflection film and a non-reflection film are sequentially formed on the mirror-polished surface, and then the non-reflection film is partially deleted. The magnetic rotating body according to claim 1, wherein the magnetic rotating body is a reflection detection type in which is formed. 請求項１又は２に記載の磁気回転体の製造方法であって、
前記回転部材を希土類磁石で形成し、
前記回転部材のパターンニング面にＮｉメッキ層を施し、
前記Ｎｉメッキ層の表面を鏡面研磨し、
前記鏡面研磨したＮｉメッキ層の表面に反射率８５％以上のＡｌメッキ層を施し、
前記Ａｌメッキ層の表面にＣｒ蒸着により非反射膜を形成し、
前記Ｃｒ蒸着により形成した非反射膜をエッチングにより部分的に削除して露出反射部を形成することにより、反射検出式の被検出パターンとしての反射パターンを形成することを特徴とする磁気回転体の製造方法。 It is a manufacturing method of the magnetic rotating body according to claim 1 or 2,
The rotating member is formed of a rare earth magnet;
Ni plating layer is applied to the patterning surface of the rotating member,
Mirror polishing the surface of the Ni plating layer,
Applying an Al plating layer having a reflectance of 85% or more to the surface of the mirror-polished Ni plating layer,
Forming a non-reflective film on the surface of the Al plating layer by Cr vapor deposition;
A reflection pattern as a reflection detection type detected pattern is formed by partially removing the non-reflective film formed by the Cr deposition by etching to form an exposed reflection portion. Production method. 請求項１又は２に記載の磁気回転体をメモリー円板として用いたことを特徴とするエンコーダ装置。   An encoder device using the magnetic rotating body according to claim 1 as a memory disk.
JP2007295272A 2007-11-14 2007-11-14 Magnetic rotating body manufacturing method and encoder device Active JP5239303B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007295272A JP5239303B2 (en) 2007-11-14 2007-11-14 Magnetic rotating body manufacturing method and encoder device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007295272A JP5239303B2 (en) 2007-11-14 2007-11-14 Magnetic rotating body manufacturing method and encoder device

Publications (2)

Publication Number Publication Date
JP2009121907A true JP2009121907A (en) 2009-06-04
JP5239303B2 JP5239303B2 (en) 2013-07-17

Family

ID=40814219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007295272A Active JP5239303B2 (en) 2007-11-14 2007-11-14 Magnetic rotating body manufacturing method and encoder device

Country Status (1)

Country Link
JP (1) JP5239303B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012225677A (en) * 2011-04-15 2012-11-15 Nikon Corp Encoder, driving device, and robot device
JP2014130104A (en) * 2012-12-28 2014-07-10 Yaskawa Electric Corp Encoder and motor with encoder
KR101475428B1 (en) * 2013-04-23 2014-12-23 한국로봇융합연구원 Encoder
WO2019087312A1 (en) * 2017-10-31 2019-05-09 三菱電機株式会社 Rotation angle detection device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875004A (en) * 1981-10-30 1983-05-06 Mitsutoyo Mfg Co Ltd Reflective scale for photoelectric displacement detector and its production
JPH085409A (en) * 1994-06-20 1996-01-12 Nikon Corp Encoder
JP2005321218A (en) * 2004-05-06 2005-11-17 Mitsutoyo Corp Optical pattern forming method, optical scale and displacement measuring device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875004A (en) * 1981-10-30 1983-05-06 Mitsutoyo Mfg Co Ltd Reflective scale for photoelectric displacement detector and its production
JPH085409A (en) * 1994-06-20 1996-01-12 Nikon Corp Encoder
JP2005321218A (en) * 2004-05-06 2005-11-17 Mitsutoyo Corp Optical pattern forming method, optical scale and displacement measuring device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012225677A (en) * 2011-04-15 2012-11-15 Nikon Corp Encoder, driving device, and robot device
JP2014130104A (en) * 2012-12-28 2014-07-10 Yaskawa Electric Corp Encoder and motor with encoder
KR101475428B1 (en) * 2013-04-23 2014-12-23 한국로봇융합연구원 Encoder
WO2019087312A1 (en) * 2017-10-31 2019-05-09 三菱電機株式会社 Rotation angle detection device
JPWO2019087312A1 (en) * 2017-10-31 2019-11-14 三菱電機株式会社 Rotation angle detector

Also Published As

Publication number Publication date
JP5239303B2 (en) 2013-07-17

Similar Documents

Publication Publication Date Title
JP4169536B2 (en) Actuator
EP2382446B1 (en) Method for mounting a modular rotary encoder and a modular rotary encoder
JP5239303B2 (en) Magnetic rotating body manufacturing method and encoder device
WO2013100061A1 (en) Encoder, production method for encoder scale, production method for encoder, and drive device
US20140354118A1 (en) Encoder for a compact revolution transmitter and electric motor with a compact revolution transmitter
JP2010271174A (en) Encoder
JP2010136588A (en) Actuator
JP5200778B2 (en) Linear motion rotary motor position detection device and linear motion rotary motor
JP2007078534A (en) Magnetic encoder device
JPH07134047A (en) Multiple-rotation encoder
US20080012452A1 (en) Brushless Motor Having a Contact-less Sensor
JP2011112441A (en) Encoder, method for mounting encoder, and motor device
JP2010210287A (en) Encoder
JP2015127638A (en) Encoder for robot hands, and robot hand
JP2005229698A (en) Brushless motor
JP5343592B2 (en) Encoder
JPH1164043A (en) Multi-rotational absolute encoder
JP2005156496A (en) Speed detector
JP2012225674A (en) Position information detection sensor, manufacturing method for position information detection sensor, encoder, motor device, and robot device
JPH11351908A (en) Rotation detector and its attaching method
JP4161248B2 (en) Combined detector
JP5445074B2 (en) Encoder and mounting method of encoder
JP2010271229A (en) Encoder
JP2005302655A (en) Rotating operation type input device
JP2011007734A (en) Encoder and method of attaching the same

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20101027

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20121009

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20121127

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20121127

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130305

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130318

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20160412

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 5239303

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250