JP2009070868A - Container for substrate storage - Google Patents

Container for substrate storage Download PDF

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Publication number
JP2009070868A
JP2009070868A JP2007234938A JP2007234938A JP2009070868A JP 2009070868 A JP2009070868 A JP 2009070868A JP 2007234938 A JP2007234938 A JP 2007234938A JP 2007234938 A JP2007234938 A JP 2007234938A JP 2009070868 A JP2009070868 A JP 2009070868A
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lid
opening
pressure
substrate storage
housing
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JP2007234938A
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Japanese (ja)
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Nobutaka Hayashi
信孝 林
Shinji Hirata
信治 平田
Kenichiro Hori
健一郎 堀
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Panasonic Corp
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Panasonic Corp
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Priority to JP2007234938A priority Critical patent/JP2009070868A/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a container for substrate storage, which includes an opening/closing mechanism for a lid body, and which can achieve size reduction by simplifying load lock chambers attached to various facilities. <P>SOLUTION: The container for substrate storage includes: a box-shaped housing 10 having an opening portion on one surface; the lid body 12 which is turnably supported at its one end by the housing 10, covers a peripheral edge of the opening portion 8 and is sucked by pressure reduction; and a driving mechanism 13 comprising a turning mechanism which is fixed to one surface of the housing 10 and turns the lid body 12 and a drive source thereof, wherein the drive source is composed of a pressure cylinder 16 and turns the lid body 12 with the pressure difference between the inside and outside of the pressure cylinder 16 to open and close the opening portion 8 of the housing 10. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、内部を真空に保つことで外部からの汚染を防止しながら、収納した基板を搬送可能な基板収納用容器に関するものである。   The present invention relates to a substrate storage container capable of transporting a stored substrate while keeping the inside vacuum to prevent contamination from the outside.

半導体やＭＥＭＳセンサ、液晶ディスプレイなどの電子機器の製造は、その主な工程は発塵の少ないクリーンルーム内で行っている。各工程では、シリコンウエハやガラスなどの基板上に、スパッタ装置やエッチング装置などを用いて様々な処理を行うため、これら装置間の移動で、基板を塵埃や汚れを付着させることなく、清浄に保つ必要がある。   Manufacture of electronic devices such as semiconductors, MEMS sensors, and liquid crystal displays is performed in a clean room where dust generation is small. In each process, various processing is performed on a substrate such as silicon wafer or glass using a sputtering device or an etching device. Therefore, the substrate can be cleaned without attaching dust or dirt by moving between these devices. Need to keep.

図５は、このような各種装置間で基板１を搬送するために用いる基板収納用容器の一例である。一面側を開口させた箱状のコンテナ本体２と、開口部３を塞ぐ状態でコンテナ本体２に対して減圧吸着される蓋体４とを備え、開口部３の縁部をその全周にわたって外側に広げたフランジ５とし、このフランジ５に、蓋体４と当接する箇所にＯリング６を敷設したものである。   FIG. 5 is an example of a substrate storage container used for transporting the substrate 1 between such various apparatuses. A box-shaped container body 2 having an opening on one side, and a lid 4 that is vacuum-adsorbed to the container body 2 in a state of closing the opening 3, and the edge of the opening 3 is located outside the entire circumference. The flange 5 is widened, and an O-ring 6 is laid on the flange 5 at a position where the lid 4 abuts.

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献１が知られている。
特開２００２−２４６４５６号公報 As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP 2002-246456 A

上記の基板収納用容器は、開口部３を塞ぐ蓋体４を開放あるいは減圧吸着させる機構が無く、そのため、各種装置に付属するロードロック室内に、減圧して外れた蓋体４を保持して移動させる機構が必要となる。その結果、ロードロック室が大型化して装置全体が大きくなるという課題があった。   The above-mentioned substrate storage container does not have a mechanism for opening or adsorbing the lid 4 that closes the opening 3 under reduced pressure. Therefore, the lid 4 that has been removed under reduced pressure is held in a load lock chamber attached to various apparatuses. A moving mechanism is required. As a result, there has been a problem that the load lock chamber becomes larger and the entire apparatus becomes larger.

そこで本発明は、装置の小型化に対応することができる、開閉機構を備えた基板収納用容器を提供することを目的とする。   SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate storage container provided with an opening / closing mechanism that can cope with downsizing of the apparatus.

上記目的を達成するために、本発明は、基板収納用容器に関するものであり、一面を開口部とした箱状の筐体と、この筐体にその一端を回動可能に支持され、前記開口部の周縁部を覆って減圧吸着させる蓋体と、筐体の一面に固定され、前記蓋体を回動させる回動機構およびその駆動源とからなる駆動機構を備え、前記駆動源は圧力シリンダーからなり、この圧力シリンダーの内部と外部との圧力差で蓋体を回動させて、筐体の開口部を開閉させるものである。   In order to achieve the above object, the present invention relates to a substrate storage container, a box-shaped housing having an opening on one side, and one end of which is rotatably supported by the housing. A lid that covers the peripheral edge of the part and is vacuum-adsorbed, and a driving mechanism that is fixed to one surface of the housing and that rotates the lid, and a driving source thereof, the driving source being a pressure cylinder The lid is rotated by the pressure difference between the inside and the outside of the pressure cylinder to open and close the opening of the housing.

本発明に係る基板収納用容器は、一面を開口部とした箱状の筐体に、この筐体に一端を回動可能に支持され、開口部に減圧吸着させる蓋体と、この蓋体を回動させることで開口部を開閉させる駆動機構を筐体の一面に設けている。この駆動機構は、回動機構と圧力シリンダーからなる駆動源を有し、この圧力シリンダー内部の圧力と、周囲の圧力との差により、圧力シリンダーを駆動させて回動機構を介して蓋体を回動させる。そのため、ロードロック室内で内部に収納した基板を取り出す際は、圧力シリンダー内の圧力より真空度を高くすればよく、また、基板を収納する際は、圧力シリンダー内の圧力より周囲の真空度が低くなった後に、蓋体が回動して開口部に密着するとともに押圧されることで、大気圧に取出したときに蓋体は減圧吸着されるものである。その結果、ロードロック室内に、蓋体の開閉機構を新たに設ける必要がなく、簡素で小型のロードロック室として装置を小型化することができるとともに、内部を真空に保つことで外部からの汚染を防止することができる作用効果を奏する。   A substrate storage container according to the present invention includes a box-shaped housing having an opening on one side, a lid that is rotatably supported at one end by the housing, and a vacuum body that is vacuum-adsorbed to the opening. A drive mechanism that opens and closes the opening by rotating is provided on one surface of the housing. This drive mechanism has a drive source consisting of a rotation mechanism and a pressure cylinder, and the pressure cylinder is driven by the difference between the pressure inside the pressure cylinder and the surrounding pressure, and the lid is moved via the rotation mechanism. Rotate. Therefore, when taking out the substrate stored in the load lock chamber, the degree of vacuum should be higher than the pressure in the pressure cylinder. When storing the substrate, the surrounding vacuum degree should be higher than the pressure in the pressure cylinder. After the height is lowered, the lid body is rotated and brought into close contact with the opening and pressed, so that the lid body is adsorbed under reduced pressure when taken out to atmospheric pressure. As a result, it is not necessary to newly provide a lid opening / closing mechanism in the load lock chamber, and the device can be miniaturized as a simple and small load lock chamber. There exists an effect which can prevent.

以下、本発明の詳細について図を用いて説明する。   Hereinafter, the details of the present invention will be described with reference to the drawings.

本実施の形態における基板収納用容器は、各種ＩＣや、液晶ディスプレイ、電子部品などを形成するための基材となるシリコンウエハ、ガラス、セラミックからなる基板を、真空などの減圧下や、Ｎ2ガスやアルゴンガスなどの不活性ガス雰囲気で収納することで、これらの基板上に塵埃や汚れを付着させることなく搬送、移載させるためのものである。 The substrate storage container in the present embodiment is a substrate made of silicon wafer, glass, or ceramic, which serves as a base material for forming various ICs, liquid crystal displays, electronic components, etc., under reduced pressure such as vacuum or N 2 By storing in an inert gas atmosphere such as gas or argon gas, the substrate is transferred and transferred without attaching dust or dirt on these substrates.

図１は、本発明の基板収納用容器を説明するための斜視図であり、開放した状態である。   FIG. 1 is a perspective view for explaining a substrate storage container of the present invention, and is in an open state.

この基板収納用容器７は、以下の部品から構成される。一面を開口部８として、その内部に複数の基板９を収納するための筐体１０と、この筐体１０に設けた支軸１１にその一端を回動可能に支持された蓋体１２と、開口部８を除く筐体１０の一面に固定されて、蓋体１２を回動駆動させる駆動機構１３とから構成されている。   The substrate storage container 7 includes the following parts. A housing 10 for storing a plurality of substrates 9 therein with an opening 8 as one surface, a lid 12 having one end rotatably supported by a support shaft 11 provided in the housing 10, The driving mechanism 13 is fixed to one surface of the casing 10 excluding the opening 8 and rotates the lid 12.

駆動機構１３は、例えば、ピニオンギア１４とラック１５などからなる回動機構１３ａと、および駆動源となる圧力シリンダー１６などから構成されている。すなわち、蓋体１２の支軸１１にピニオンギア１４を設け、このピニオンギア１４と結合させたラック１５および直線ガイド１７と、このラック１５を駆動させるための圧力シリンダー１６を、蓋体１２を挟んだ筐体１０の側面に少なくとも一つ以上設けている。本実施の形態では、圧力シリンダー１６にその一端を支持されたラック１５を、直線ガイド１７に沿って移動させることで、このラック１５に結合されたピニオンギア１４を回動させて蓋体１２を回動させるものである。尚、蓋体１２の質量などにより、大きな駆動力を必要とする場合は、同様の駆動機構１３を、蓋体１２を挟んだ筐体１０の両側面に対と成るように設ければ良い。   The drive mechanism 13 includes, for example, a rotation mechanism 13a including a pinion gear 14 and a rack 15 and a pressure cylinder 16 serving as a drive source. That is, a pinion gear 14 is provided on the support shaft 11 of the lid 12, and a rack 15 and a linear guide 17 coupled to the pinion gear 14 and a pressure cylinder 16 for driving the rack 15 are sandwiched between the lid 12. At least one is provided on the side surface of the casing 10. In the present embodiment, the rack 15 supported at one end thereof by the pressure cylinder 16 is moved along the linear guide 17 to rotate the pinion gear 14 coupled to the rack 15 so that the lid 12 is moved. It is intended to rotate. If a large driving force is required due to the mass of the lid body 12 or the like, the same driving mechanism 13 may be provided as a pair on both side surfaces of the housing 10 with the lid body 12 interposed therebetween.

蓋体１２は、上述した駆動機構１３により、水平を０度として上下ともに約９０度の範囲で回動可能とした。   The lid 12 can be rotated in the range of about 90 degrees both vertically by setting the horizontal to 0 degrees by the drive mechanism 13 described above.

開口部８の内側面には、少なくとも基板９の二点あるいは二辺を支持するための複数の支持体１８を、対応する位置に設けている。本実施の形態では、これらの支持体１８により基板９を略水平に支持しているが、開口部８側が若干高くなるように支持体１８を傾斜させている。こうすることにより、蓋体１２を開放させたときに、その内部から基板９が滑り落ちることを防止することができ、特に鏡面に近い基板９を収納搬送する際に有効である。   On the inner surface of the opening 8, a plurality of supports 18 for supporting at least two points or two sides of the substrate 9 are provided at corresponding positions. In the present embodiment, the substrate 9 is supported substantially horizontally by these supports 18, but the support 18 is inclined so that the opening 8 side is slightly higher. By doing so, it is possible to prevent the substrate 9 from slipping from the inside when the lid 12 is opened, and this is particularly effective when storing and transporting the substrate 9 close to a mirror surface.

また、本実施の形態では蓋体１２の、開口部８に対向する面に内蓋１９をさらに設けている。この内蓋１９は蓋体１２と一定の間隙Ａを設けるとともに、その両側面の一点を支軸２０として蓋体１２に回動可能に支持されている。すなわち、この支軸２０を支点として内蓋１９はシーソーのごとく一定の角度で回動可能となっている。このようにすることで、駆動機構１３により蓋体１２を回動させて開口部８へ密着させる際に、開口部８の周縁部８ａに相当する内蓋１９の全面を密着させることができるので、図２の斜視図に示すように確実に蓋体１２を密着させることができる。   In the present embodiment, an inner lid 19 is further provided on the surface of the lid 12 that faces the opening 8. The inner lid 19 is provided with a certain gap A from the lid body 12 and is rotatably supported by the lid body 12 with one point on both side surfaces as a support shaft 20. That is, the inner lid 19 can be rotated at a fixed angle like a seesaw with the support shaft 20 as a fulcrum. By doing so, when the lid 12 is rotated by the drive mechanism 13 and brought into close contact with the opening 8, the entire inner lid 19 corresponding to the peripheral edge 8a of the opening 8 can be brought into close contact. As shown in the perspective view of FIG. 2, the lid body 12 can be securely attached.

また、開口部８の周縁部８ａ、あるいは内蓋１９の、開口部８の周縁部８ａに当接させる部位には浅い溝を設けて、この溝へＯリング２１を敷設している。駆動機構１３により回動した蓋体１２は、内蓋１９で開口部８を覆ってその周縁部８ａに当接させた後、外部を大気圧等にすることにより、内外の圧力差によって開口部８に減圧吸着される。   In addition, a shallow groove is provided in the peripheral edge 8a of the opening 8 or a portion of the inner lid 19 that is in contact with the peripheral edge 8a of the opening 8, and an O-ring 21 is laid in this groove. The lid 12 rotated by the drive mechanism 13 covers the opening 8 with the inner lid 19 and abuts on the peripheral edge 8a, and then the outside is brought to atmospheric pressure or the like, so that the opening is caused by the pressure difference between the inside and outside. 8 is adsorbed under reduced pressure.

ここで重要なのが、この内蓋１９の支軸２０を、内蓋１９の重心位置からずらすことである。例えば図２のように蓋体１２を閉じた状態で、内蓋１９の支軸２０をその重心位置から高い位置とすることで、蓋体１２を開放させたとき、内蓋１９の先端（蓋体１２が閉じた状態での下端側）は常に開口部８に向けて傾斜することとなり、この先端部分から確実に開口部８の周縁部８ａに当接させて密着させることができる。また、蓋体１２の回動角度を調整し、例えば垂直下方を超えて回動可能とすることにより、蓋体１２を閉じる直前に開口部８の周縁部８ａに対して内蓋１９を略平行にすることができるため、確実に開口部８の周縁部８ａ全体に蓋体１２を密着させて減圧吸着させることができる。   What is important here is that the support shaft 20 of the inner lid 19 is shifted from the position of the center of gravity of the inner lid 19. For example, when the lid 12 is opened by making the support shaft 20 of the inner lid 19 higher than the center of gravity position with the lid 12 closed as shown in FIG. The lower end side in the state where the body 12 is closed always inclines toward the opening portion 8, and can be brought into close contact with the peripheral edge portion 8 a of the opening portion 8 from the tip portion. Further, the inner lid 19 is substantially parallel to the peripheral edge portion 8a of the opening 8 immediately before the lid body 12 is closed by adjusting the rotation angle of the lid body 12 so that the lid body 12 can be rotated beyond the vertical downward direction, for example. Therefore, the lid 12 can be securely adhered to the entire peripheral edge 8a of the opening 8 and can be adsorbed under reduced pressure.

尚、内蓋１９を厚みの均等な矩形板で構成する場合、支軸２０の位置は内蓋１９の中心線からずらした位置とする。また、支軸２０を内蓋１９の中心線上とする場合、内蓋１９の一部を異なる材料または、厚みを変えることにその重心位置を中心線上からずらせばよい。   When the inner lid 19 is composed of a rectangular plate having a uniform thickness, the position of the support shaft 20 is shifted from the center line of the inner lid 19. When the support shaft 20 is on the center line of the inner lid 19, the center of gravity position may be shifted from the center line by changing a part of the inner lid 19 with a different material or thickness.

次に基板収納用容器７の開閉動作について説明する。   Next, the opening / closing operation of the substrate storage container 7 will be described.

図３は、ロードロック室２２内における蓋体１２の動作を示す概念図であり、ロードロック室２２内に本実施の形態の基板収納用容器７を載置した状態を示している。   FIG. 3 is a conceptual diagram showing the operation of the lid 12 in the load lock chamber 22 and shows a state in which the substrate storage container 7 of the present embodiment is placed in the load lock chamber 22.

スパッタ装置やエッチング装置などには、減圧された加工室から大気圧下へ基板９を取出したり、逆に大気圧下から減圧された加工室へ基板９を投入するためのロードロック室２２を備えている。基板９を取出す際は、ロードロック室２２内に基板収納用容器７を載置し、加工室から取り出した基板９を基板収納用容器内７に挿入して移し替えた後に、大気圧に戻し基板収納用容器７を外部へ取出す。基板９を投入する場合は、この逆の動作を行えばよく、ロードロック室２２は、加工室と圧力弁を介して連接しており、独立して内部の真空度を調整可能となっている。   A sputtering apparatus, an etching apparatus, or the like includes a load lock chamber 22 for taking out the substrate 9 from the reduced pressure processing chamber to the atmospheric pressure, or conversely, loading the substrate 9 into the processing chamber reduced in pressure from the atmospheric pressure. ing. When the substrate 9 is taken out, the substrate storage container 7 is placed in the load lock chamber 22, the substrate 9 taken out from the processing chamber is inserted into the substrate storage container 7 and transferred, and then returned to atmospheric pressure. The substrate storage container 7 is taken out. When the substrate 9 is loaded, the reverse operation may be performed. The load lock chamber 22 is connected to the processing chamber via a pressure valve, and the internal vacuum degree can be adjusted independently. .

まず初めに、ロードロック室２２内に本実施の形態の基板収納用容器７を載置する。このとき、ロードロック室２２内は大気圧Ｐ0であり、予め圧力シリンダー１６内には、少なくとも大気圧Ｐ0よりも真空度の高い圧力Ｐ1で気体が封入されている。この圧力シリンダー１６の内外の圧力差により、ラック１５はシリンダーロット１６ａを介して矢印Ｂ方向に駆動し、蓋体１２および内蓋１９を開口部８（図１）の周縁部８ａ全体に密着させ押圧している。このとき、シリンダーロット１６ａのストロークを適宜調整することにより、基板収納用容器７の内部には、Ｐ1よりも低く、大気圧Ｐ0よりも高い真空度に置換され、ロードロック室２２内部との差圧で蓋体１２および内蓋１９は開口部８に減圧吸着されているものである。 First, the substrate storage container 7 of the present embodiment is placed in the load lock chamber 22. At this time, the inside of the load lock chamber 22 is at the atmospheric pressure P 0 , and the gas is previously sealed in the pressure cylinder 16 at a pressure P 1 having a degree of vacuum higher than at least the atmospheric pressure P 0 . Due to the pressure difference between the inside and outside of the pressure cylinder 16, the rack 15 is driven in the direction of the arrow B through the cylinder lot 16a to bring the lid 12 and the inner lid 19 into close contact with the entire peripheral edge 8a of the opening 8 (FIG. 1). Pressing. At this time, by appropriately adjusting the stroke of the cylinder lot 16a, the inside of the substrate storage container 7 is replaced with a vacuum level lower than P 1 and higher than the atmospheric pressure P 0. The lid body 12 and the inner lid 19 are adsorbed in the opening 8 under reduced pressure by the differential pressure.

次に図４に示すごとく、真空ポンプなどを用いてロードロック室２２の内部を、大気圧Ｐ0から少なくとも圧力シリンダー１６内の圧力Ｐ1より高い真空度Ｐ2となるように減圧していく。圧力シリンダー１６の内部より外部の真空度が高くなった時点で、シリンダーロット１６ａを介してラック１５は矢印Ｃ方向へ移動する。そして、ラック１５に結合されたピニオンギア１４とともに蓋体１２を回動させることで、蓋体１２を開口部８から開放する。そして、基板収納用容器７の内部から基板９を取出して加工室内へ投入するものである。 Next, as shown in FIG. 4, the inside of the load lock chamber 22 is depressurized from the atmospheric pressure P 0 to at least a pressure P 2 higher than the pressure P 1 in the pressure cylinder 16 using a vacuum pump or the like. . When the degree of vacuum outside becomes higher than inside the pressure cylinder 16, the rack 15 moves in the direction of arrow C via the cylinder lot 16a. The lid 12 is opened from the opening 8 by rotating the lid 12 together with the pinion gear 14 coupled to the rack 15. And the board | substrate 9 is taken out from the inside of the container 7 for board | substrate storage, and is thrown into a process chamber.

尚、基板９を取出して収納する場合は、上記と逆の手順で行う。   In addition, when taking out and storing the board | substrate 9, it performs by the reverse procedure to the above.

このとき重要なのがシリンダーロッド１６ａの移動距離、すなわちストローク長である。ストローク長は、内部に封入されている気体の圧力と内部容積に依存するため、蓋体１２を開放させる角度や、大気圧に取出した際の基板収納用容器７内部の圧力を考慮して、適宜圧力シリンダー１６の内部容積と封入する気体の圧力を調整するものである。すなわち、基板収納用容器７内の圧力を例えばＰ1に設定したい場合、シリンダーロッド１６ａのストローク長は、ロードロック室２２内をＰ1まで減圧させたときに、少なくとも蓋体１２を開口部８へ密着させるとともに若干量押圧できるように調整するものである。 What is important at this time is the moving distance of the cylinder rod 16a, that is, the stroke length. Since the stroke length depends on the pressure and internal volume of the gas sealed inside, considering the angle at which the lid 12 is opened and the pressure inside the substrate storage container 7 when taken out to atmospheric pressure, The internal volume of the pressure cylinder 16 and the pressure of the gas to be sealed are adjusted as appropriate. That is, when it is desired to set the pressure in the substrate storage container 7 to P 1 , for example, the stroke length of the cylinder rod 16 a is set so that at least the lid 12 is opened to the opening 8 when the load lock chamber 22 is depressurized to P 1. It adjusts so that it can be made to press and a little amount can be pressed.

このような構成とすることで、特別な機構を設けずに、圧力シリンダー１６の内部および外部との圧力差により蓋体１２を開閉させて、基板収納用容器７の内部を一定圧力以下に減圧した状態で基板９を収納、保管、搬送させることできる。この基板収納用容器７内部の圧力は、圧力シリンダー１６内に封入されている気体の圧力とシリンダーロッド１６ａのストローク長により、容易に調整することができる。   With such a configuration, the lid 12 is opened and closed by a pressure difference between the inside and outside of the pressure cylinder 16 without providing a special mechanism, and the inside of the substrate storage container 7 is reduced to a certain pressure or less. In this state, the substrate 9 can be stored, stored, and transported. The pressure inside the substrate storage container 7 can be easily adjusted by the pressure of the gas sealed in the pressure cylinder 16 and the stroke length of the cylinder rod 16a.

本実施の形態は、回動機構としてラック１５とピニオンギア１４を用いたが、これらに限定されるものではなく、駆動源である圧力シリンダー１６で蓋体１２を駆動できれば、同様の効果が得られるものである。   In this embodiment, the rack 15 and the pinion gear 14 are used as the rotation mechanism. However, the present invention is not limited to these, and the same effect can be obtained if the lid 12 can be driven by the pressure cylinder 16 that is a drive source. It is what

上述した基板収納用容器を用いることにより、ロードロック室に蓋体を開放させる特別な機構が不要となるので、ロードロック室を小型化かつ簡素にして、装置を小型化することができるとともに、基板の表面に塵埃や汚染を付着させることなく、容易に搬送が可能となる。   By using the above-described substrate storage container, a special mechanism for opening the lid body in the load lock chamber becomes unnecessary, so that the load lock chamber can be downsized and simplified, and the apparatus can be downsized. The substrate can be easily transported without attaching dust or contamination to the surface of the substrate.

本発明に係る基板収納用容器は、一面を開口部とした箱状の筐体に、この筐体に一端を回動可能に支持され、開口部に減圧吸着させる蓋体と、この蓋体を回動させることで開口部を開閉させる駆動機構を筐体の一面に設けている。この駆動機構は、回動機構と圧力シリンダーからなる駆動源を有し、この圧力シリンダー内部の圧力と、周囲の圧力との差により、圧力シリンダーを駆動させて回動機構を介して蓋体を回動させる。そのため、ロードロック室内で内部に収納した基板を取り出す際は、圧力シリンダー内の圧力より真空度を高くすればよく、また、基板を収納する際は、圧力シリンダー内の圧力より周囲の真空度が低くなった後に、蓋体が回動して開口部に密着するとともに押圧されることで、大気圧に取出したときに蓋体は減圧吸着されるものである。その結果、ロードロック室内に、蓋体の開閉機構を新たに設ける必要がなく、簡素で小型のロードロック室として装置を小型化することができるとともに、内部を真空に保つことで外部からの汚染を防止することができる作用効果を奏するので、収納した基板を搬送可能な基板収納用容器に有用である。   A substrate storage container according to the present invention includes a box-shaped housing having an opening on one side, a lid that is rotatably supported at one end by the housing, and a vacuum body that is vacuum-adsorbed to the opening. A drive mechanism that opens and closes the opening by rotating is provided on one surface of the housing. This drive mechanism has a drive source consisting of a rotation mechanism and a pressure cylinder, and the pressure cylinder is driven by the difference between the pressure inside the pressure cylinder and the surrounding pressure, and the lid is moved via the rotation mechanism. Rotate. Therefore, when taking out the substrate stored in the load lock chamber, the degree of vacuum should be higher than the pressure in the pressure cylinder. When storing the substrate, the surrounding vacuum degree should be higher than the pressure in the pressure cylinder. After the height is lowered, the lid body is rotated and brought into close contact with the opening and pressed, so that the lid body is adsorbed under reduced pressure when taken out to atmospheric pressure. As a result, it is not necessary to newly provide a lid opening / closing mechanism in the load lock chamber, and the device can be miniaturized as a simple and small load lock chamber. Therefore, the present invention is useful for a substrate storage container capable of transporting a stored substrate.

本発明の一実施の形態における基板収納用容器を説明する斜視図The perspective view explaining the container for board | substrate storage in one embodiment of this invention 図１における蓋体の開放時における基板収納用容器の斜視図FIG. 1 is a perspective view of a substrate storage container when the lid in FIG. 1 is opened. 本発明の一実施の形態における基板収納用容器の蓋体の動作を説明する概念図The conceptual diagram explaining operation | movement of the cover body of the container for container storage in one embodiment of this invention 本発明の一実施の形態における基板収納用容器の蓋体の動作を説明する概念図The conceptual diagram explaining operation | movement of the cover body of the container for container storage in one embodiment of this invention 従来の基板収納用容器の構造を説明する斜視図A perspective view explaining the structure of a conventional substrate storage container

符号の説明Explanation of symbols

７ 基板収納用容器
８ 開口部
９ 基板
１０ 筐体
１１ 支軸
１２ 蓋体
１３ 駆動機構
１４ ピニオンギア
１５ ラック
１６ 圧力シリンダー
１７ 直線ガイド
１９ 内蓋
２０ 支軸 DESCRIPTION OF SYMBOLS 7 Substrate storage container 8 Opening part 9 Substrate 10 Housing 11 Support shaft 12 Cover body 13 Drive mechanism 14 Pinion gear 15 Rack 16 Pressure cylinder 17 Linear guide 19 Inner cover 20 Support shaft

Claims (4)

一面を開口部とした箱状の筐体と、この筐体にその一端を回動可能に支持され、前記開口部の周縁部を覆って減圧吸着させる蓋体と、筐体の一面に固定され、前記蓋体を回動させる回動機構およびその駆動源とからなる駆動機構を備え、前記駆動源は圧力シリンダーからなり、この圧力シリンダーの内部と外部との圧力差で蓋体を回動させて、筐体の開口部を開閉させる基板収納用容器。 A box-shaped housing having an opening on one side, a lid that is rotatably supported on one end of the housing, covers the peripheral edge of the opening, and is attached to one surface of the housing. A drive mechanism comprising a rotation mechanism for rotating the lid and a drive source thereof, the drive source comprising a pressure cylinder, and the lid is rotated by a pressure difference between the inside and the outside of the pressure cylinder. A substrate storage container that opens and closes the opening of the housing. 蓋体は、筐体の開口部側に内蓋を有し、この内蓋の側面を支点として蓋体に回動可能に支持した請求項１に記載の基板収納用容器。 2. The substrate storage container according to claim 1, wherein the lid has an inner lid on the opening side of the housing, and is supported rotatably on the lid with the side surface of the inner lid as a fulcrum. 支点は、内蓋の重心位置からずらした請求項２に記載の基板収納用容器。 The substrate storage container according to claim 2, wherein the fulcrum is shifted from the center of gravity of the inner lid. 回動機構は、蓋体の回動軸に固定されたピニオンギアと、このピニオンギアに結合されたラックおよびガイドからなる請求項３に記載の基板収納用容器。 4. The substrate storage container according to claim 3, wherein the rotation mechanism includes a pinion gear fixed to the rotation shaft of the lid, and a rack and a guide coupled to the pinion gear.
JP2007234938A 2007-09-11 2007-09-11 Container for substrate storage Pending JP2009070868A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012003240A2 (en) * 2010-06-30 2012-01-05 Crossing Automation, Inc. Port door positioning apparatus and associated methods
US8540473B2 (en) 2010-08-07 2013-09-24 Sinfonia Technology Co., Ltd. Load port
CN108109947A (en) * 2016-11-25 2018-06-01 沈阳芯源微电子设备有限公司 It can keep the loading device of air-tightness
CN114291401A (en) * 2022-02-10 2022-04-08 湖南工业大学 Medical packing carton with intelligence waterproof material

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012003240A2 (en) * 2010-06-30 2012-01-05 Crossing Automation, Inc. Port door positioning apparatus and associated methods
WO2012003240A3 (en) * 2010-06-30 2012-04-12 Crossing Automation, Inc. Port door positioning apparatus and associated methods
CN103155132A (en) * 2010-06-30 2013-06-12 布鲁克斯自动化公司 Port door positioning apparatus and associated methods
US8870516B2 (en) 2010-06-30 2014-10-28 Brooks Automation, Inc. Port door positioning apparatus and associated methods
US8540473B2 (en) 2010-08-07 2013-09-24 Sinfonia Technology Co., Ltd. Load port
CN108109947A (en) * 2016-11-25 2018-06-01 沈阳芯源微电子设备有限公司 It can keep the loading device of air-tightness
CN114291401A (en) * 2022-02-10 2022-04-08 湖南工业大学 Medical packing carton with intelligence waterproof material

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