JP2009056539A - Surface-coated cutting tool having hard coating layer exhibiting excellent chipping resistance in heavy cutting - Google Patents
Surface-coated cutting tool having hard coating layer exhibiting excellent chipping resistance in heavy cutting Download PDFInfo
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Abstract
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この発明は、特に、切刃に対して大きな機械的負荷がかかる鋼や鋳鉄の重切削加工で、硬質被覆層がすぐれた耐欠損性を発揮する表面被覆切削工具（以下、被覆工具という）に関するものである。 In particular, the present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits a fracture resistance with a hard coating layer excellent in heavy cutting of steel or cast iron that requires a large mechanical load on the cutting edge. Is.
一般に、被覆工具には、各種の鋼や鋳鉄などの被削材の旋削加工にバイトの先端部に着脱自在に取り付けて用いられるインサートや、前記インサートを着脱自在に取り付けて、面削加工や溝加工、さらに肩加工などに用いられるソリッドタイプのエンドミルと同様に切削加工を行うインサート式エンドミルなどが知られている。
また、被覆工具として、炭化タングステン（以下、ＷＣで示す）基超硬合金、炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットまたは各種の立方晶窒化ほう素（以下、ｃＢＮで示す）基超高圧焼結材料で構成された工具本体の表面に、（Ａｌ１−Ｘ ＣｒＸ ）Ｎ（ただし、原子比で、Ｘは０．３０〜０．６０）を満足するＡｌとＣｒの複合窒化物［以下、（Ａｌ，Ｃｒ）Ｎで示す］層からなる硬質被覆層を物理蒸着してなる被覆工具が提案され、各種の鋼や鋳鉄などの連続切削や断続切削加工に用いられている。
Further, as a coated tool, tungsten carbide (hereinafter referred to as WC) based cemented carbide, titanium carbonitride (hereinafter referred to as TiCN) based cermet, or various types of cubic boron nitride (hereinafter referred to as cBN) based ultra high pressure. A composite nitride of Al and Cr satisfying (Al 1-X Cr X ) N (wherein X is 0.30-0.60) on the surface of the tool body made of the sintered material [ Hereinafter, a coated tool formed by physically vapor-depositing a hard coating layer composed of (Al, Cr) N] has been proposed and used for continuous cutting and intermittent cutting of various steels and cast irons.
近年の切削装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化の傾向にあるが、上記の従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での切削加工に用いた場合には問題はないが、特にこれを切削条件の厳しい重切削加工に用いた場合は、硬質被覆層を構成する（Ａｌ，Ｃｒ）Ｎ層の高温強度が不十分なため、刃先の境界部分に異常損傷（以下、境界異常損傷という）を生じ、欠損を発生しやすいため、比較的短時間で使用寿命に至るのが現状である。 In recent years, the performance of cutting machines has been remarkable. On the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting, and along with this, cutting has been on the trend of higher speed. For coated tools, there is no problem when this is used for cutting under normal conditions such as steel or cast iron, but when this is used for heavy cutting with severe cutting conditions, a hard coating layer is required. The high-temperature strength of the (Al, Cr) N layer is insufficient, causing abnormal damage (hereinafter referred to as boundary abnormal damage) to the boundary part of the cutting edge, which tends to cause chipping. Is the current situation.
そこで、本発明者等は、上述のような観点から、上記被覆工具の耐欠損性の向上を図るべく、これの硬質被覆層である（Ａｌ，Ｃｒ）Ｎ層、すなわち図２に模式図で示される通り、格子点にＡｌ、Ｃｒおよび窒素からなる構成原子がそれぞれ存在するＮａＣｌ型面心立方晶の結晶構造を有する（Ａｌ，Ｃｒ）Ｎ層に着目し、鋭意研究を行った結果、
（ａ）従来被覆工具の硬質被覆層を構成する従来（Ａｌ，Ｃｒ）Ｎ層は、例えば、図１に示される通常の物理蒸着装置の１種であるアークイオンプレーティング装置に工具基体を装入し、ヒータで装置内を例えば３００〜５００℃に加熱した状態で、所定組成のＡｌ−Ｃｒ合金からなるカソード電極（蒸発源）とアノード電極との間に例えば６０〜１００Ａのアーク放電電流を発生させ、同時に装置内に反応ガスとして窒素ガスを導入して、例えば１〜６Ｐａの反応雰囲気とし、一方工具基体には例えばバイアス電源から−２０〜−１００Ｖの直流バイアス電圧を印加するという条件下で成膜される（以下、通常成膜条件という）が、
その蒸着条件を変更し、例えば、ヒータで装置内を８５０℃に加熱して成膜温度を高くし、さらに、工具基体にバイアス電源からバイポーラパルスバイアスを印加してアークイオンプレーティングを行う（以下、改質成膜条件という）と、この条件で蒸着形成された（Ａｌ，Ｃｒ）Ｎ層（以下、改質（Ａｌ，Ｃｒ）Ｎ層という）は、通常成膜条件で形成された（Ａｌ，Ｃｒ）Ｎ層に比べ、結晶粒の粒界強度が強化され、その結果、硬質被覆層の高温強度が一段と向上するため、切刃に対して大きな機械的負荷がかかる重切削加工であっても、前記硬質被覆層はすぐれた耐欠損性を発揮し、長期にわたってすぐれた耐摩耗性を示すこと。
In view of the above, the present inventors, from the above viewpoint, in order to improve the fracture resistance of the coated tool, the hard coating layer (Al, Cr) N layer, that is, a schematic diagram in FIG. As shown, as a result of conducting extensive research, focusing on the (Al, Cr) N layer having a NaCl-type face-centered cubic crystal structure in which constituent atoms composed of Al, Cr, and nitrogen are present at lattice points,
(A) The conventional (Al, Cr) N layer constituting the hard coating layer of the conventional coated tool is, for example, a tool base mounted on an arc ion plating apparatus which is one type of the normal physical vapor deposition apparatus shown in FIG. An arc discharge current of, for example, 60 to 100 A is applied between a cathode electrode (evaporation source) made of an Al—Cr alloy having a predetermined composition and an anode electrode while the inside of the apparatus is heated to, for example, 300 to 500 ° C. with a heater. At the same time, nitrogen gas is introduced into the apparatus as a reaction gas to form a reaction atmosphere of 1 to 6 Pa, for example, while a DC bias voltage of −20 to −100 V is applied to the tool base from a bias power source, for example. (Hereinafter referred to as normal film formation conditions)
The deposition conditions are changed, for example, the inside of the apparatus is heated to 850 ° C. with a heater to increase the film forming temperature, and further, a bipolar pulse bias is applied to the tool base from a bias power source to perform arc ion plating (hereinafter referred to as “arc ion plating”). And the (Al, Cr) N layer (hereinafter referred to as the modified (Al, Cr) N layer) formed by vapor deposition under these conditions are formed under the normal film formation conditions (Al , Cr) N grain layer strength is strengthened compared to the N layer, and as a result, the high temperature strength of the hard coating layer is further improved. However, the hard coating layer exhibits excellent fracture resistance and exhibits excellent wear resistance over a long period of time.
（ｂ）上記の従来被覆工具の硬質被覆層を構成する（Ａｌ，Ｃｒ）Ｎ層（以下、従来（Ａｌ，Ｃｒ）Ｎ層という）と上記（ａ）の改質（Ａｌ，Ｃｒ）Ｎ層について、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１００｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成すると、例えば、図３に示されるように、３０〜４０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記３０〜４０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示すこと。
(B) The (Al, Cr) N layer (hereinafter referred to as the conventional (Al, Cr) N layer) constituting the hard coating layer of the conventional coated tool and the modified (Al, Cr) N layer of (a). about,
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal grain is normal to the surface polished surface. The tilt angle formed by the normal of the {100} plane, which is the crystal plane, is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, when an inclination angle number distribution graph is created by counting the frequencies existing in each section, for example, as shown in FIG. 3, the highest peak exists in the inclination angle section within the range of 30 to 40 degrees. In addition, an inclination angle distribution graph in which the total frequency existing in the range of 30 to 40 degrees occupies a ratio of 60% or more of the entire frequencies in the inclination angle distribution graph is shown.
（ｃ）また、上記従来（Ａｌ，Ｃｒ）Ｎ層と上記改質（Ａｌ，Ｃｒ）Ｎ層について、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、この場合前記結晶粒は、上記の通り格子点にＡｌ、Ｃｒ、窒素からなる構成原子がそれぞれ存在するＮａＣｌ型面心立方晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ＮはＮａＣｌ型面心立方晶の結晶構造上２以上の偶数となる）存在する構成原子共有格子点形態をΣＮ＋１で表し、個々のΣＮ＋１がΣＮ＋１全体（ただし、頻度の関係でＮの上限値を２８とする）に占める分布割合を示す構成原子共有格子点分布グラフを作成した場合、いずれのＴｉＡｌＮ層もΣ３に最高ピークが存在するが、前記従来（Ａｌ，Ｃｒ）Ｎ層は、図６に例示される通り、Σ３の分布割合が３０％以下の相対的に低い構成原子共有格子点分布グラフを示すのに対して、前記改質（Ａｌ，Ｃｒ）Ｎ層は、図５に例示される通り、Σ３の分布割合が５０％以上のきわめて高い構成原子共有格子点分布グラフを示すこと。
(C) In addition, for the conventional (Al, Cr) N layer and the modified (Al, Cr) N layer,
Using a field emission scanning electron microscope, each crystal grain existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal plane of the crystal grain is normal to the surface polished surface { 112} plane normal angle is measured. In this case, the crystal grains have a NaCl-type face-centered cubic crystal structure in which constituent atoms composed of Al, Cr, and nitrogen are present at lattice points as described above. And, based on the measured tilt angle obtained as a result, at the interface between adjacent crystal grains, each of the constituent atoms shares one constituent atom between the crystal grains (constituent atom sharing). (Lattice point) distribution is calculated, and there are N lattice points (N is an even number of 2 or more in the crystal structure of the NaCl-type face-centered cubic crystal) between the constituent atom shared lattice points. The atomic shared lattice point form is represented by ΣN + 1, and each ΣN When a constitutive atomic shared lattice distribution graph showing the distribution ratio of +1 in the entire ΣN + 1 (however, the upper limit value of N is 28 due to the frequency) is created, the highest peak exists in Σ3 in any TiAlN layer However, the conventional (Al, Cr) N layer, as illustrated in FIG. 6, shows a relatively low constituent atom shared lattice point distribution graph in which the distribution ratio of Σ3 is 30% or less. The quality (Al, Cr) N layer, as illustrated in FIG. 5, shows a very high constituent atom shared lattice point distribution graph in which the distribution ratio of Σ3 is 50% or more.
（ｄ）上記の改質（Ａｌ，Ｃｒ）Ｎ層は、従来（Ａｌ，Ｃｒ）Ｎ層自体が具備する高温硬さと高温強度に加えて、上記従来（Ａｌ，Ｃｒ）Ｎ層に比して一段と高い高温強度を有するので、これを硬質被覆層として蒸着形成してなる被覆工具は、切刃に対して特に大きな機械的負荷がかかる重切削加工に用いた場合にも、前記従来（Ａｌ，Ｃｒ）Ｎ層を蒸着形成してなる被覆工具に比して、硬質被覆層が一段とすぐれた耐欠損性を発揮するようになること。
以上（ａ）〜（ｄ）に示される研究結果を得たのである。
(D) The above-described modified (Al, Cr) N layer is higher than the conventional (Al, Cr) N layer in addition to the high-temperature hardness and high-temperature strength of the conventional (Al, Cr) N layer itself. Since it has a much higher high-temperature strength, the coated tool formed by vapor deposition as a hard coating layer can be used even in heavy cutting where a particularly large mechanical load is applied to the cutting edge (Al, Compared to a coated tool formed by vapor-depositing a Cr) N layer, the hard coating layer will exhibit even better fracture resistance.
The research results shown in (a) to (d) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、
「（１） 炭化タングステン基超硬合金、炭窒化チタン基サーメット、または立方晶窒化ほう素基超高圧焼結材料で構成された工具基体の表面に、１〜１０μｍの平均層厚を有するＡｌとＣｒの複合窒化物層からなる硬質被覆層を蒸着形成してなる表面被覆切削工具において、
前記ＡｌとＣｒの複合窒化物層は、
組成式：（Ａｌ１−ＸＣｒＸ）Ｎで表したときに、
０．３≦Ｘ≦０．６（ただし、Ｘは原子比を示す）を満足し、かつ、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１００｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、３０〜４０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記３０〜４０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示し、表面研磨面の法線方向に対して、前記ＡｌとＣｒの複合窒化物の｛１１２｝面が強配向していることを特徴とする表面被覆切削工具（被覆工具）。
（２） 前記（１）記載の表面被覆切削工具において、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する前記ＡｌとＣｒの複合窒化物について、立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、この場合前記結晶粒は、格子点にＡｌ、Ｃｒ、窒素からなる構成原子がそれぞれ存在するＮａＣｌ型面心立方晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ＮはＮａＣｌ型面心立方晶の結晶構造上２以上の偶数となる）存在する構成原子共有格子点形態をΣＮ＋１で表した場合、個々のΣＮ＋１がΣＮ＋１全体（ただし、頻度の関係でＮの上限値を２８とする）に占める分布割合を示す構成原子共有格子点分布グラフにおいて、Σ３に最高ピークが存在し、かつ前記Σ３のΣＮ＋１全体に占める分布割合が５０％以上である構成原子共有格子点分布グラフを示すことを特徴とする前記（１）記載の表面被覆切削工具（被覆工具）。」
に特徴を有するものである。
This invention was made based on the above research results,
“(1) Al having an average layer thickness of 1 to 10 μm on the surface of a tool base made of tungsten carbide-based cemented carbide, titanium carbonitride-based cermet, or cubic boron nitride-based ultrahigh pressure sintered material; In the surface-coated cutting tool formed by vapor-depositing a hard coating layer composed of a composite nitride layer of Cr,
The composite nitride layer of Al and Cr is
Composition formula: When expressed by (Al 1-X Cr X ) N,
0.3 ≦ X ≦ 0.6 (where X represents an atomic ratio), and
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal grain is normal to the surface polished surface. The tilt angle formed by the normal of the {100} plane, which is the crystal plane, is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, in the inclination angle number distribution graph obtained by counting the frequencies existing in each section, the highest peak exists in the inclination angle section within the range of 30 to 40 degrees, and exists within the range of 30 to 40 degrees. The inclination frequency distribution graph in which the total frequency to be used accounts for 60% or more of the entire frequency in the inclination angle distribution graph, and the composite nitride of Al and Cr with respect to the normal direction of the surface polished surface. The {112} plane is strongly oriented A surface-coated cutting tool (coated tool).
(2) In the surface-coated cutting tool according to (1),
Using a field emission scanning electron microscope, the surface polished surface is irradiated with an electron beam on each of the crystal grains having a cubic crystal lattice for the composite nitride of Al and Cr existing within the measurement range of the surface polished surface. The inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, is measured. In this case, the crystal grain has constituent atoms composed of Al, Cr, and nitrogen at lattice points. Each of the constituent atoms has a crystal structure of NaCl-type face-centered cubic crystals, and based on the measured inclination angle obtained as a result, each of the constituent atoms is between the crystal grains at the interface between adjacent crystal grains. The distribution of lattice points that share one constituent atom (constituent atom shared lattice point) is calculated, and N lattice points that do not share constituent atoms between the constituent atom shared lattice points (N is a NaCl-type face-centered cubic crystal) (It becomes an even number of 2 or more on the crystal structure) In the constituent atom shared lattice point distribution graph showing the distribution ratio of each ΣN + 1 in the whole ΣN + 1 (however, the upper limit value of N is 28 in relation to the frequency) when the form of the shared atomic lattice point is represented by ΣN + 1, The surface-coated cutting tool (covered) according to (1) above, wherein a constituent atom shared lattice point distribution graph in which the highest peak exists in Σ3 and the distribution ratio of Σ3 to the entire ΣN + 1 is 50% or more is shown. tool). "
It has the characteristics.
まず、この発明の改質（Ａｌ，Ｃｒ）Ｎ層について、詳細に説明する。
（ａ）組成式（Ａｌ１−ＸＣｒＸ）Ｎ
組成式（Ａｌ１−ＸＣｒＸ）Ｎで表される成分組成の硬質被覆層におけるＣｒ成分は高温強度の維持、Ａｌ成分は高温硬さと耐熱性の向上に寄与することから、硬質被覆層は、所定の高温強度、高温硬さおよび耐熱性を具備する層であるが、Ｃｒの含有割合Ｘが３０原子％未満であると、硬質被覆層の高温硬さと耐熱性は向上するものの、Ｃｒ含有割合の相対的な減少によって、高温強度が低下し欠損を発生しやすくなり、一方、Ｃｒの含有割合Ｘが６０原子％を超えると、高温硬さと耐熱性が低下し、その結果、耐摩耗性の低下がみられるようになることから、Ｃｒの含有割合Ｘの値を０．３〜０．６と定めた。
First, the modified (Al, Cr) N layer of the present invention will be described in detail.
(A) the composition formula (Al 1-X Cr X) N
Since the Cr component in the hard coating layer of the component composition represented by the composition formula (Al 1-X Cr X ) N contributes to maintaining high-temperature strength, and the Al component contributes to improvement in high-temperature hardness and heat resistance, the hard coating layer is Although the layer has a predetermined high-temperature strength, high-temperature hardness, and heat resistance, if the Cr content ratio X is less than 30 atomic%, the high-temperature hardness and heat resistance of the hard coating layer are improved, but the Cr content Due to the relative decrease in the ratio, the high-temperature strength is reduced and defects are likely to occur. On the other hand, when the Cr content ratio X exceeds 60 atomic%, the high-temperature hardness and heat resistance decrease, resulting in wear resistance. Therefore, the Cr content ratio X was determined to be 0.3 to 0.6.
（ｂ）結晶面の配向割合
上記の改質（Ａｌ，Ｃｒ）Ｎ層について、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１００｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成したところ、図３に示すように、３０〜４０度の範囲内の傾斜角区分に最高ピークが存在し、しかも、３０〜４０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示すことから、改質（Ａｌ，Ｃｒ）Ｎ層は、表面研磨面の法線方向に対して｛１１２｝面が強配向していることがわかり、このような結晶配向性によって、通常成膜条件で形成した従来（Ａｌ，Ｃｒ）Ｎ層に比して、結晶粒の粒界強度が一段と向上し、その結果、硬質被覆層として改質（Ａｌ，Ｃｒ）Ｎ層を備えた被覆工具は、重切削加工条件下でも耐欠損性が一段と向上する。
(B) Orientation ratio of crystal plane For the above modified (Al, Cr) N layer, using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface Irradiate an electron beam to measure the tilt angle formed by the normal of the {100} plane, which is the crystal plane of the crystal grain, with respect to the normal of the surface polished surface. As shown in FIG. 3, a tilt angle distribution graph was created by dividing the measured tilt angle within the range of 45 degrees into pitches of 0.25 degrees and totaling the frequencies existing in each section. In addition, the highest peak is present in the inclination angle section within the range of 30 to 40 degrees, and the sum of the frequencies existing within the range of 30 to 40 degrees is 60% or more of the entire degrees in the inclination angle frequency distribution graph. Since the distribution graph of the number of inclination angles occupying the ratio is shown, In the (Al, Cr) N layer, it can be seen that the {112} plane is strongly oriented with respect to the normal direction of the surface-polished surface. Compared with the Al, Cr) N layer, the grain boundary strength of the crystal grains is further improved. As a result, the coated tool provided with the modified (Al, Cr) N layer as a hard coating layer is subjected to heavy cutting conditions. However, the fracture resistance is further improved.
（ｃ）Σ３の分布割合
さらに、上記の改質（Ａｌ，Ｃｒ）Ｎ層について、同じく、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、この場合前記結晶粒は、上記の通り格子点にＡｌ、Ｃｒ、窒素からなる構成原子がそれぞれ存在するＮａＣｌ型面心立方晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ＮはＮａＣｌ型面心立方晶の結晶構造上２以上の偶数となる）存在する構成原子共有格子点形態をΣＮ＋１で表し、個々のΣＮ＋１がΣＮ＋１全体（ただし、頻度の関係でＮの上限値を２８とする）に占める分布割合を示す構成原子共有格子点分布グラフを作成したところ、前記改質（Ａｌ，Ｃｒ）Ｎ層は、図５に例示される通り、Σ３に最高ピークが存在するとともに、Σ３の分布割合が５０％以上のきわめて高い構成原子共有格子点分布グラフを示すことから、この点からも、改質（Ａｌ，Ｃｒ）Ｎ層は、結晶粒の粒界強度が一段と向上し、その結果、耐欠損性が一段と向上していることがわかる。
なお、図６に例示される通り、従来（Ａｌ，Ｃｒ）Ｎ層もΣ３に最高ピークが存在するものの、Σ３の分布割合は３０％以下に過ぎず、改質（Ａｌ，Ｃｒ）Ｎ層に比べ、相対的に低い構成原子共有格子点分布グラフを示している。
以上のとおり、改質（Ａｌ，Ｃｒ）Ｎ層は、｛１１２｝面の配向性が高く、また、Σ３の分布割合も高いため、従来（Ａｌ，Ｃｒ）Ｎ層のもつ高温硬さと高温強度と耐熱性に加えて、さらに一段とすぐれた高温強度を有するようになる。
(C) Distribution ratio of Σ3 Further, for the modified (Al, Cr) N layer, similarly, using a field emission scanning electron microscope, an electron beam is applied to each crystal grain existing within the measurement range of the surface polished surface. Irradiation is performed to measure the inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, with respect to the normal of the surface-polished surface. Have a NaCl type face centered cubic crystal structure in which constituent atoms composed of Al, Cr, and nitrogen respectively exist, and based on the measured tilt angle obtained as a result, at the interface between adjacent crystal grains, A distribution of lattice points (constituent atom shared lattice points) in which each constituent atom shares one constituent atom among the crystal grains is calculated, and there are N lattice points that do not share constituent atoms between the constituent atom shared lattice points. (N is 2 on the crystal structure of NaCl type face centered cubic crystal) The constituent atomic shared lattice point form existing (which is an even number above) is represented by ΣN + 1, and each ΣN + 1 represents the distribution ratio of the entire ΣN + 1 (provided that the upper limit of N is 28 due to frequency). When a lattice point distribution graph is created, the modified (Al, Cr) N layer has a very high configuration in which the highest peak exists in Σ3 and the distribution ratio of Σ3 is 50% or more as illustrated in FIG. Since the atomic shared lattice point distribution graph is shown, the modified (Al, Cr) N layer also has improved the grain boundary strength of the crystal grains, and as a result, the fracture resistance has further improved. I understand that.
As illustrated in FIG. 6, the conventional (Al, Cr) N layer also has the highest peak in Σ3, but the distribution ratio of Σ3 is only 30% or less, and the modified (Al, Cr) N layer In comparison, a relatively low constituent atom shared lattice point distribution graph is shown.
As described above, the modified (Al, Cr) N layer has a high {112} plane orientation and a high Σ3 distribution ratio, so that the conventional (Al, Cr) N layer has high temperature hardness and high temperature strength. In addition to heat resistance, it has even higher temperature strength.
（ｄ）平均層厚
改質（Ａｌ，Ｃｒ）Ｎ層の平均層厚が１μｍ未満では、自身のもつ耐熱性、高温硬さおよび高温強度を長期に亘って維持することができず、工具寿命短命の原因となり、一方その平均層厚が１０μｍを越えると、チッピングが発生し易くなることから、その平均層厚を１〜１０μｍと定めた。
(D) Average layer thickness If the average layer thickness of the modified (Al, Cr) N layer is less than 1 μm, the heat resistance, high-temperature hardness and high-temperature strength possessed by itself cannot be maintained over a long period of time, resulting in tool life. On the other hand, if the average layer thickness exceeds 10 μm, chipping is likely to occur. Therefore, the average layer thickness is set to 1 to 10 μm.
次に、この発明の改質（Ａｌ，Ｃｒ）Ｎ層の成膜条件について、詳細に説明する。
硬質被覆層として、アークイオンプレーティングで蒸着形成した改質（Ａｌ，Ｃｒ）Ｎ層を備えた被覆工具を製造するにあたり、
アークイオンプレーティング装置内の回転テーブル上に工具基体を配設し、カソード電極としてＡｌ−Ｃｒ合金を配置し、
前記装置内の回転テーブル上に配設された工具基体をＡｒガス雰囲気中でＡｒイオンによってボンバード洗浄した後、
装置内に反応ガスとして窒素ガスを導入して１〜６Ｐａの反応雰囲気とすると共に、装置内を加熱し、工具基体温度を７５０〜９００℃に保持した状態で、回転テーブル上の工具基体に、印加電圧＋５〜−１００（ｖ）×印加時間２０００〜２００００（ｎｓ）の負バイアスおよび印加電圧＋３２〜＋４２（ｖ）×印加時間１００〜５０００（ｎｓ）の正バイアスからなるバイポーラパルスバイアスを印加し、かつ前記Ａｌ−Ｃｒ合金からなるカソード電極とアノード電極との間に６０〜２００Ａの電流を流してアーク放電を発生させて、工具基体表面に、組成式：（Ａｌ１−ＸＣｒＸ）Ｎで表したときに、０．３≦Ｘ≦０．６（ただし、Ｘは原子比を示す）を満足する改質（Ａｌ，Ｃｒ）Ｎ層を蒸着形成する。
上記蒸着条件のうち、工具基体温度については、その温度が７５０℃未満では、｛１１２｝面への配向率が極めて小さくなり、目的とする皮膜が得られず、粒界強度が不足することから、工具基体温度は７５０℃以上とする必要がある。工具基体温度についての上限は特にないが、アークイオンプレーティング装置の仕様の点から、実際上は、工具基体温度を７５０〜９００℃にすることが望ましい。ただ、これは、工具基体温度を９００℃以上に高めてはならないということを意味するものではない。
また、バイポーラパルスバイアスについては、印加電圧＋５〜−１００（ｖ）×印加時間２０００〜２００００（ｎｓ）の負バイアスおよび印加電圧＋３２〜＋４２（ｖ）×印加時間１００〜５０００（ｎｓ）の正バイアスからなるバイポーラパルスバイアスを印加することが必要であり、負バイアス、正バイアスの印加電圧及び印加時間が上記数値範囲から外れた場合には、目的としている｛１１２｝面の強配向性の皮膜とならないため、成膜時の工具基体へのバイアス付加条件を上記の通りに定めた。
Next, the film forming conditions for the modified (Al, Cr) N layer of the present invention will be described in detail.
In producing a coated tool having a modified (Al, Cr) N layer formed by arc ion plating as a hard coating layer,
A tool base is arranged on a rotary table in the arc ion plating apparatus, an Al-Cr alloy is arranged as a cathode electrode,
After bombarding the tool base disposed on the rotary table in the apparatus with Ar ions in an Ar gas atmosphere,
Introducing nitrogen gas as a reaction gas into the apparatus to make a reaction atmosphere of 1 to 6 Pa, heating the inside of the apparatus, and maintaining the tool base temperature at 750 to 900 ° C., the tool base on the rotary table, A bipolar pulse bias composed of a negative bias of applied voltage +5 to −100 (v) × application time 2000 to 20000 (ns) and a positive bias of applied voltage +32 to +42 (v) ×
Among the above deposition conditions, the tool base temperature is less than 750 ° C., because the orientation rate to the {112} plane is extremely small, the intended film cannot be obtained, and the grain boundary strength is insufficient. The tool substrate temperature needs to be 750 ° C. or higher. Although there is no particular upper limit on the tool base temperature, in practice, the tool base temperature is preferably 750 to 900 ° C. from the viewpoint of the specifications of the arc ion plating apparatus. However, this does not mean that the tool substrate temperature should not be raised above 900 ° C.
As for the bipolar pulse bias, a negative bias of applied voltage +5 to −100 (v) × application time 2000 to 20000 (ns) and a positive bias of applied voltage +32 to +42 (v) ×
この発明の被覆工具およびその製造方法によれば、切刃に対してきわめて大きな機械的負荷がかかる鋼や鋳鉄などの重切削加工でも、硬質被覆層である改質（Ａｌ，Ｃｒ）Ｎ層が一段とすぐれた高温強度を有し、すぐれた耐欠損性を発揮する被覆工具を提供することができ、そして、この被覆工具は、硬質被覆層に欠損が発生することはなく、長期に亘ってすぐれた耐摩耗性を発揮するものである。 According to the coated tool of the present invention and the manufacturing method thereof, the modified (Al, Cr) N layer, which is a hard coating layer, is formed even in heavy cutting processing such as steel and cast iron in which a very large mechanical load is applied to the cutting edge. It is possible to provide a coated tool having excellent high-temperature strength and exhibiting excellent fracture resistance, and this coated tool does not cause a defect in the hard coating layer and is excellent over a long period of time. High wear resistance.
つぎに、この発明の被覆工具を実施例により具体的に説明する。 Next, the coated tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で２４時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４０８に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders were blended into the composition shown in Table 1, added with wax, ball milled in acetone for 24 hours, dried under reduced pressure, and pressed into a green compact with a predetermined shape at a pressure of 98 MPa. The green compact was vacuum sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge portion was R: 0.07 mm honing By performing the processing, tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape specified in ISO · CNMG120408 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比でＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで２４時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０７ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体Ｇ〜Ｌを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion was subjected to a honing process of R: 0.07 mm. Tool bases G to L made of TiCN-based cermet having a standard / CNMG12041 chip shape were formed.
さらに、原料粉末として、いずれも０．５〜４μｍの範囲内の平均粒径を有する立方晶窒化硼素（ｃＢＮ）粉末、窒化チタン（ＴｉＮ）粉末、Ａｌ粉末、酸化アルミニウム（Ａｌ２Ｏ３）粉末を用意し、これら原料粉末を表３に示される配合組成に配合し、ボールミルで８０時間湿式混合し、乾燥した後、１２０ＭＰａの圧力で直径：５０ｍｍ×厚さ：１．５ｍｍの寸法をもった圧粉体にプレス成形し、ついでこの圧粉体を、圧力：１Ｐａの真空雰囲気中、９００〜１３００℃の範囲内の所定温度に６０分間保持の条件で焼結して切刃片用予備焼結体とし、この予備焼結体を、別途用意した、Ｃｏ：８質量％、ＷＣ：残りの組成、並びに直径：５０ｍｍ×厚さ：２ｍｍの寸法をもったＷＣ基超硬合金製支持片と重ね合わせた状態で、通常の超高圧焼結装置に装入し、通常の条件である圧力：５ＧＰａ、温度：１２００〜１４００℃の範囲内の所定温度に保持時間：０．８時間の条件で超高圧焼結し、焼結後上下面をダイヤモンド砥石を用いて研磨し、ワイヤー放電加工装置にて一辺３ｍｍの正三角形状に分割し、さらにＣｏ：５質量％、ＴａＣ：５質量％、ＷＣ：残りの組成およびＣＩＳ規格ＳＮＧＡ１２０４１２の形状（厚さ：４．７６mm×一辺長さ：１２．７mmの正三角形）をもったＷＣ基超硬合金製チップ本体のろう付け部（コーナー部）に、質量％で、Ｃｕ：２６％、Ｔｉ：５％、Ｎｉ：２．５％、Ａｇ：残りからなる組成を有するＡｇ合金のろう材を用いてろう付けし、所定寸法に外周加工した後、切刃部に幅：０．１３ｍｍ、角度：２５°のホーニング加工を施し、さらに仕上げ研摩を施すことによりＩＳＯ規格ＳＮＧＡ１２０４１２のチップ形状をもった工具基体Ｍ〜Ｒをそれぞれ製造した。 Furthermore, as raw material powders, cubic boron nitride (cBN) powder, titanium nitride (TiN) powder, Al powder, aluminum oxide (Al 2 O 3 ) powder each having an average particle diameter in the range of 0.5 to 4 μm. These raw material powders were blended in the composition shown in Table 3, wet-mixed with a ball mill for 80 hours, dried, and then had a diameter of 50 mm × thickness: 1.5 mm at a pressure of 120 MPa. The green compact is press-molded, and then the green compact is sintered in a vacuum atmosphere at a pressure of 1 Pa at a predetermined temperature within the range of 900 to 1300 ° C. for 60 minutes and pre-baked for cutting edge pieces. A WC-based cemented carbide support piece having a size of Co: 8% by mass, WC: remaining composition, and diameter: 50 mm × thickness: 2 mm was prepared as a sintered body. Super After charging into a high-pressure sintering apparatus, sintering under ultrahigh pressure at a predetermined temperature in the range of pressure: 5 GPa, temperature: 1200 to 1400 ° C., holding time: 0.8 hours, after sintering The upper and lower surfaces are polished with a diamond grindstone and divided into 3 mm regular triangles with a wire electric discharge machine, and Co: 5% by mass, TaC: 5% by mass, WC: remaining composition and CIS standard SNGA120412 In the brazed portion (corner portion) of the WC-based cemented carbide chip body having a shape (thickness: 4.76 mm × one side length: 12.7 mm), the mass percentage is Cu: 26%, Ti: 5%, Ni: 2.5%, Ag: Brazing using a brazing material of an Ag alloy having the remaining composition, and after processing the outer periphery to a predetermined dimension, the width of the cutting edge is 0.13 mm, Angle: 25 ° honing process, The tool substrate M~R having a tip shape of ISO standard SNGA120412 by performing finish polishing was produced, respectively.
つぎに、これらの工具基体Ａ〜Ｆ、Ｇ〜ＬおよびＭ〜Ｒのそれぞれを、アセトン中で超音波洗浄し、乾燥した状態で、図１に示されるアークイオンプレーティング装置内の回転テーブル上の中心軸から半径方向に所定距離離れた位置に外周部にそって装着し、カソード電極（蒸発源）として、表５〜７に示される目標組成に対応した成分組成をもった改質（Ａｌ，Ｃｒ）Ｎ層形成用のＡｌ−Ｃｒ合金を配置し、
（ｂ）まず、装置内を排気して１×１０−２Ｐａ以下の真空に保持しながら、ヒーターで装置内を４００℃に加熱した後、Ａｒガスを導入して、２．０Ｐａの雰囲気とすると共に、前記テーブル上で自転しながら回転する工具基体に−２００Ｖの直流バイアス電圧を印加し、もって工具基体表面をアルゴンイオンによってボンバード洗浄し、
（ｃ）装置内に反応ガスとして窒素ガスを導入して２Ｐａの反応雰囲気とすると共に、装置内を加熱し、工具基体温度を表４に示される温度に保持し、前記回転テーブル上で自転しながら回転する工具基体に、バイアス電源から、同じく表４に示される条件のバイポーラパルスバイアスを印加し、かつ前記カソード電極（改質（Ａｌ，Ｃｒ）Ｎ層形成用のＡｌ−Ｃｒ合金）とアノード電極との間に１００Ａの電流を流してアーク放電を発生させ、前記工具基体の表面に、表５〜７に示される目標組成および目標層厚の改質（Ａｌ，Ｃｒ）Ｎ層を蒸着形成することにより、本発明被覆工具１〜１８をそれぞれ製造した。
Next, each of these tool bases A to F, G to L, and M to R is ultrasonically cleaned in acetone and dried, on the rotary table in the arc ion plating apparatus shown in FIG. Attached along the outer periphery at a position that is a predetermined distance in the radial direction from the central axis of the electrode, and modified as a cathode electrode (evaporation source) with a component composition corresponding to the target composition shown in Tables 5 to 7 (Al , Cr) Al-Cr alloy for forming N layer is arranged,
(B) First, the inside of the apparatus is evacuated and kept at a vacuum of 1 × 10 −2 Pa or less, and the inside of the apparatus is heated to 400 ° C. with a heater, and then Ar gas is introduced to adjust the atmosphere to 2.0 Pa. And applying a -200 V DC bias voltage to the rotating tool base while rotating on the table, and bombarding the surface of the tool base with argon ions,
(C) Nitrogen gas is introduced into the apparatus as a reaction gas to make a reaction atmosphere of 2 Pa, the inside of the apparatus is heated, the tool base temperature is maintained at the temperature shown in Table 4, and the table rotates on the rotary table. A bipolar pulse bias having the conditions shown in Table 4 is applied from a bias power source to the rotating tool base, and the cathode electrode (Al-Cr alloy for forming a modified (Al, Cr) N layer) and anode A current of 100 A is passed between the electrodes to generate an arc discharge, and a modified (Al, Cr) N layer having a target composition and a target layer thickness shown in Tables 5 to 7 is deposited on the surface of the tool base. By doing this, this invention coated tool 1-18 was manufactured, respectively.
また、比較の目的で、蒸着形成時の条件を、表４に示される工具基体温度、同じく表４に示される印加バイアス条件とした以外は、本発明被覆工具１〜１８の製造の場合と全く同じ条件で従来（Ａｌ，Ｃｒ）Ｎ層を蒸着形成することにより、従来被覆工具１〜１８をそれぞれ製造した。 Further, for the purpose of comparison, the conditions at the time of vapor deposition were set to the tool substrate temperature shown in Table 4 and the applied bias conditions shown in Table 4 as well, and the case of manufacturing the coated tools 1 to 18 of the present invention was completely different. Conventional coated tools 1-18 were produced by depositing a conventional (Al, Cr) N layer under the same conditions.
ついで、上記の本発明被覆工具と従来被覆工具の硬質被覆層を構成する改質（Ａｌ，Ｃｒ）Ｎ層および従来（Ａｌ，Ｃｒ）Ｎ層について、電界放出型走査電子顕微鏡を用いて、傾斜角度数分布グラフおよび構成原子共有格子点分布グラフをそれぞれ作成した。
まず、上記傾斜角度数分布グラフは、上記の改質（Ａｌ，Ｃｒ）Ｎ層および従来（Ａｌ，Ｃｒ）Ｎ層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射し、電子後方散乱回折像装置を用いて、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である{１００}面の法線がなす傾斜角を測定し、この測定結果に基づいて、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計することにより作成した。
また、上記構成原子共有格子点分布グラフは、上記の改質（Ａｌ，Ｃｒ）Ｎ層および従来（Ａｌ，Ｃｒ）Ｎ層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ＮはＮａＣｌ型面心立方晶の結晶構造上２以上の偶数となる）存在する構成原子共有格子点形態をΣＮ＋１で表した場合、個々のΣＮ＋１がΣＮ＋１全体（ただし、頻度の関係でＮの上限値を２８とする）に占める分布割合を求めることにより作成した。
Subsequently, the modified (Al, Cr) N layer and the conventional (Al, Cr) N layer constituting the hard coating layer of the present invention coated tool and the conventional coated tool are tilted using a field emission scanning electron microscope. An angular number distribution graph and a constituent atom shared lattice point distribution graph were prepared.
First, the tilt angle number distribution graph is shown in the column of a field emission scanning electron microscope in a state where the surfaces of the modified (Al, Cr) N layer and the conventional (Al, Cr) N layer are polished surfaces. Irradiating the polished surface with an electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees with an irradiation current of 1 nA on each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface Then, using an electron backscatter diffraction image apparatus, a {100} plane which is a crystal plane of the crystal grain with respect to the normal line of the surface polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step The inclination angle formed by the normal line is measured, and based on the measurement result, among the measurement inclination angles, the measurement inclination angle within the range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, Created by counting the frequencies existing in each category.
Further, the constituent atomic shared lattice point distribution graph shows a mirror of a field emission scanning electron microscope in a state where the surfaces of the modified (Al, Cr) N layer and the conventional (Al, Cr) N layer are polished surfaces. An electron beam with an acceleration voltage of 15 kV at an incident angle of 70 degrees is applied to the polished surface with an irradiation current of 1 nA to each crystal grain existing within the measurement range of the surface polished surface. Using a backscatter diffraction image apparatus, the normal of the {112} plane, which is the crystal plane of the crystal grain, with respect to the normal of the surface-polished surface in a 30 × 50 μm region at an interval of 0.1 μm / step Lattice points at which each of the constituent atoms shares one constituent atom between the crystal grains at the interface between adjacent crystal grains based on the measured inclination angle obtained as a result of the measurement. Calculate the distribution of (constituent atom shared lattice points) When ΣN + 1 represents a constituent atom shared lattice point form in which there are N lattice points that do not share constituent atoms between child shared lattice points (N is an even number of 2 or more in the crystal structure of NaCl type face centered cubic crystal) Each ΣN + 1 was created by determining the distribution ratio of ΣN + 1 in the entire ΣN + 1 (however, the upper limit value of N is 28 in relation to the frequency).
この結果得られた各種の改質（Ａｌ，Ｃｒ）Ｎ層および従来（Ａｌ，Ｃｒ）Ｎ層の傾斜角度数分布グラフにおいて、３０〜４０度の測定傾斜角区分内に存在する度数を表５〜７にそれぞれ示し、また、改質（Ａｌ，Ｃｒ）Ｎ層および従来（Ａｌ，Ｃｒ）Ｎ層の構成原子共有格子点分布グラフにおいて、ΣＮ＋１全体（Ｎは２〜２８の範囲内のすべての偶数）に占めるΣ３の分布割合を表５〜７にそれぞれ示した。 In the gradient angle distribution graphs of various modified (Al, Cr) N layers and conventional (Al, Cr) N layers obtained as a result, the frequencies existing in the measured gradient angle section of 30 to 40 degrees are shown in Table 5. In addition, in the constituent atomic share lattice distribution graphs of the modified (Al, Cr) N layer and the conventional (Al, Cr) N layer, all of ΣN + 1 (N is in the range of 2 to 28). The distribution ratio of Σ3 in the even number) is shown in Tables 5 to 7, respectively.
上記の各種の傾斜角度数分布グラフおよび構成原子共有格子点分布グラフにおいて、表５〜７にそれぞれ示される通り、本発明被覆工具の改質（Ａｌ，Ｃｒ）Ｎ層は、｛１１２｝面の配向割合が非常に高く（傾斜角度数分布グラフにおける度数全体の６０％以上の割合）、また、Σ３の分布割合も非常に高い（構成原子共有格子点分布グラフにおける度数全体の５０％以上の割合）のに対して、従来被覆工具の従来（Ａｌ，Ｃｒ）Ｎ層は、｛１１２｝面の配向割合およびΣ３の分布割合のいずれもが低いものであった。
なお、図３は、本発明被覆工具１の改質（Ａｌ，Ｃｒ）Ｎ層の傾斜角度数分布グラフ、図４は、従来被覆工具１の従来（Ａｌ，Ｃｒ）Ｎ層の傾斜角度数分布グラフをそれぞれ示し、また、図５は、本発明被覆工具１の改質（Ａｌ，Ｃｒ）Ｎ層の構成原子共有格子点分布グラフ、図６は、従来被覆工具１の従来（Ａｌ，Ｃｒ）Ｎ層の構成原子共有格子点分布グラフをそれぞれ示す。
In each of the above-mentioned various inclination angle number distribution graphs and constituent atom shared lattice point distribution graphs, as shown in Tables 5 to 7, the modified (Al, Cr) N layer of the coated tool of the present invention has a {112} plane. The orientation ratio is very high (ratio of 60% or more of the whole frequency in the tilt angle distribution graph), and the distribution ratio of Σ3 is also very high (ratio of 50% or more of the whole frequency in the constituent atom sharing lattice distribution graph). In contrast, the conventional (Al, Cr) N layer of the conventional coated tool has a low orientation ratio of {112} plane and a distribution ratio of Σ3.
3 is an inclination angle number distribution graph of the modified (Al, Cr) N layer of the coated tool 1 of the present invention, and FIG. 4 is an inclination angle number distribution of the conventional (Al, Cr) N layer of the conventional coated tool 1. FIG. 5 is a graph showing the distribution of constituent atomic shared lattice points of the modified (Al, Cr) N layer of the coated tool 1 of the present invention, and FIG. 6 is a conventional (Al, Cr) of the conventional coated tool 1. The constituent atomic shared lattice point distribution graph of N layer is shown, respectively.
さらに、上記の本発明被覆工具１〜１８および従来被覆工具１〜１８について、これの硬質被覆層の構成層を電子線マイクロアナライザー（ＥＰＭＡ）およびオージェ分光分析装置を用いて観察（層の縦断面を観察）したところ、前者および後者とも目標組成と実質的に同じ組成を有する（Ａｌ，Ｃｒ）Ｎ層からなることが確認された。また、これらの被覆工具の硬質被覆層の厚さを、走査型電子顕微鏡を用いて測定（同じく縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Further, for the above-mentioned coated tools 1-18 of the present invention and the conventional coated tools 1-18, the constituent layers of the hard coating layer were observed using an electron beam microanalyzer (EPMA) and an Auger spectroscopic analyzer (longitudinal section of the layer). As a result, it was confirmed that both the former and the latter were composed of an (Al, Cr) N layer having substantially the same composition as the target composition. Moreover, when the thickness of the hard coating layer of these coating tools was measured using a scanning electron microscope (same longitudinal section measurement), the average layer thickness (5 point measurement) was substantially the same as the target layer thickness. Average value).
つぎに、上記の各種の被覆工具をいずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、本発明被覆工具１〜１８および従来被覆工具１〜１８について、以下のような切削試験を行った。 Next, with the various coated tools described above, the present coated tools 1 to 18 and the conventional coated tools 1 to 18 in the state where each of the above various coated tools is screwed to the tip of the tool steel tool with a fixing jig, as follows. Cutting tests were conducted.
本発明被覆工具１〜６および従来被覆工具１〜６について、
切削条件（Ａ−１）；
被削材：ＪＩＳ・ＳＮＣＭ４３９の長さ方向等間隔４本縦溝入丸棒、
切削速度： ２００ ｍ／ｍｉｎ、
切り込み： ３．２ ｍｍ、
送り： ０．３２ ｍｍ／ｒｅｖ、
切削時間： ３ 分、
の条件での合金鋼の乾式断続重切削試験（通常の切込みおよび送りは、それぞれ、１．５ｍｍ、０．２ｍｍ／ｒｅｖ ）、
切削条件（Ｂ−１）；
被削材：ＪＩＳ・Ｓ４５Ｃの長さ方向等間隔４本縦溝入丸棒、
切削速度： ３００ ｍ／ｍｉｎ、
切り込み： ３．０ ｍｍ、
送り： ０．３２ ｍｍ／ｒｅｖ、
切削時間： ３ 分、
の条件での炭素鋼の乾式断続重切削試験（通常の切込みおよび送りは、それぞれ、１．５ｍｍ、０．２ｍｍ／ｒｅｖ）、
切削条件（Ｃ−１）；
被削材：ＪＩＳ・ＳＵＳ３０４の丸棒、
切削速度： １８０ ｍ／ｍｉｎ、
切り込み： ２．０ ｍｍ、
送り： ０．３５ ｍｍ／ｒｅｖ、
切削時間： ３ 分、
の条件でのステンレス鋼の乾式連続重切削試験（通常の切込みおよび送りは、それぞれ、１．２ｍｍ、０．１５ｍｍ／ｒｅｖ）、
を行い、切刃の逃げ面摩耗幅を測定した。この測定結果を表８に示した。
About this invention coated tools 1-6 and conventional coated tools 1-6,
Cutting conditions (A-1);
Work material: JIS / SNCM439 round direction rods with four equal grooves in the length direction,
Cutting speed: 200 m / min,
Infeed: 3.2 mm,
Feed: 0.32 mm / rev,
Cutting time: 3 minutes,
A dry interrupted heavy cutting test of alloy steel under the conditions of (normal cutting and feeding are 1.5 mm and 0.2 mm / rev, respectively),
Cutting conditions (B-1);
Work material: JIS-S45C lengthwise equal 4 round grooved round bars,
Cutting speed: 300 m / min,
Cutting depth: 3.0 mm,
Feed: 0.32 mm / rev,
Cutting time: 3 minutes,
Carbon steel dry interrupted heavy cutting test under normal conditions (normal cutting and feeding are 1.5 mm and 0.2 mm / rev, respectively),
Cutting conditions (C-1);
Work material: JIS / SUS304 round bar,
Cutting speed: 180 m / min,
Cutting depth: 2.0 mm,
Feed: 0.35 mm / rev,
Cutting time: 3 minutes,
Stainless steel dry continuous heavy cutting test under the following conditions (normal cutting and feeding are 1.2 mm and 0.15 mm / rev, respectively),
The flank wear width of the cutting blade was measured. The measurement results are shown in Table 8.
また、本発明被覆工具７〜１２および従来被覆工具７〜１２について、
切削条件（Ａ−２）；
被削材：ＪＩＳ・ＳＮＣＭ４３９の長さ方向等間隔４本縦溝入丸棒、
切削速度： ２２０ ｍ／ｍｉｎ、
切り込み： １．５ ｍｍ、
送り： ０．１２ ｍｍ／ｒｅｖ、
切削時間： ５ 分、
の条件での合金鋼の乾式断続重切削試験（通常の切削速度および送りは、それぞれ、１５０ｍ／ｍｉｎ、０．１０ｍｍ／ｒｅｖ ）、
切削条件（Ｂ−２）；
被削材：ＪＩＳ・ＳＣＭ４４０の丸棒、
切削速度： ２２０ ｍ／ｍｉｎ、
切り込み： １．８ ｍｍ、
送り： ０．１２ ｍｍ／ｒｅｖ、
切削時間： ５ 分、
の条件での合金鋼の乾式高速高切込み連続切削試験（通常の切削速度および切り込みは、それぞれ、１５０ｍ／ｍｉｎ、１．５ｍｍ）、
切削条件（Ｃ−２）；
被削材：ＪＩＳ・Ｓ５０Ｃの長さ方向等間隔４本縦溝入り丸棒、
切削速度： ２２０ ｍ／ｍｉｎ、
切り込み： １．３ ｍｍ、
送り： ０．２５ ｍｍ／ｒｅｖ、
切削時間： ５ 分、
の条件での炭素鋼の乾式高送り断続切削試験（通常の送りは０．１５ｍｍ／ｒｅｖ）、
を行い、切刃の逃げ面摩耗幅を測定した。この測定結果を表９に示した。
Moreover, about this invention coated tool 7-12 and conventional coated tool 7-12,
Cutting conditions (A-2);
Work material: JIS / SNCM439 round direction rods with four equal grooves in the length direction,
Cutting speed: 220 m / min,
Cutting depth: 1.5 mm,
Feed: 0.12 mm / rev,
Cutting time: 5 minutes,
Dry interrupted heavy cutting test of alloy steel under the conditions of (normal cutting speed and feed are 150 m / min and 0.10 mm / rev, respectively),
Cutting conditions (B-2);
Work material: JIS / SCM440 round bar,
Cutting speed: 220 m / min,
Cutting depth: 1.8 mm,
Feed: 0.12 mm / rev,
Cutting time: 5 minutes,
Dry high-speed high-cut continuous cutting test of alloy steel under the following conditions (normal cutting speed and cutting are 150 m / min and 1.5 mm, respectively)
Cutting conditions (C-2);
Work material: JIS / S50C lengthwise equal 4 round grooved round bars,
Cutting speed: 220 m / min,
Cutting depth: 1.3 mm,
Feed: 0.25 mm / rev,
Cutting time: 5 minutes,
Carbon steel dry high feed intermittent cutting test under the conditions of (normal feed is 0.15mm / rev),
The flank wear width of the cutting blade was measured. The measurement results are shown in Table 9.
また、本発明被覆工具１３〜１８および従来被覆工具１３〜１８について、
切削条件（Ａ−３）；
被削材：ＪＩＳ・ＳＣｒ４２０（ＨＲＣ６０）の長さ方向等間隔４本縦溝入り丸棒、
切削速度： １８０ ｍ／ｍｉｎ、
切り込み： ０．２ ｍｍ、
送り： ０．２２ ｍｍ／ｒｅｖ、
切削時間： ８ 分、
の条件でのクロム鋼の乾式高速高送り断続切削試験（通常の切削速度および送りは、それぞれ、１２０ｍ／ｍｉｎ、０．１５ｍｍ／ｒｅｖ ）、
切削条件（Ｂ−３）；
被削材：ＪＩＳ・ＳＵＪ２の焼入れ材（ＨＲＣ６０）の長さ方向等間隔４本縦溝入り丸棒、
切削速度： １６０ ｍ／ｍｉｎ、
切り込み： ０．３５ ｍｍ、
送り： ０．１５ ｍｍ／ｒｅｖ、
切削時間： １０ 分、
の条件での軸受鋼の焼入れ材の乾式高速高切込み断続切削試験（通常の切削速度および切り込みは、それぞれ、１２０ｍ／ｍｉｎ、０．２ｍｍ）、
切削条件（Ｃ−３）；
被削材：ＪＩＳ・ＳＫＤ６１（ＨＲＣ６１）の丸棒、
切削速度： ２００ ｍ／ｍｉｎ、
切り込み： ０．２６ ｍｍ、
送り： ０．２４ ｍｍ／ｒｅｖ、
切削時間： ４ 分、
の条件でのダイス鋼の焼入れ材の乾式連続重切削試験（通常の切り込みおよび送りは、それぞれ、０．１５ｍｍ、０．１５ｍｍ／ｒｅｖ）、
を行い、切刃の逃げ面摩耗幅を測定した。この測定結果を表１０に示した。
Moreover, about this invention coated tool 13-18 and conventional coated tool 13-18,
Cutting conditions (A-3);
Work material: JIS · SCr420 (HRC60) lengthwise equal 4 round bars with longitudinal grooves,
Cutting speed: 180 m / min,
Cutting depth: 0.2 mm,
Feed: 0.22 mm / rev,
Cutting time: 8 minutes,
Chrome steel dry high-speed high-feed intermittent cutting test under the following conditions (normal cutting speed and feed are 120 m / min and 0.15 mm / rev, respectively),
Cutting conditions (B-3);
Work material: JIS / SUJ2 quenching material (HRC60), 4 longitudinally spaced round bars with equal intervals in the length direction,
Cutting speed: 160 m / min,
Cutting depth: 0.35 mm,
Feed: 0.15 mm / rev,
Cutting time: 10 minutes,
Dry high-speed high-cut intermittent cutting test of the quenching material of the bearing steel under the conditions (normal cutting speed and cutting are 120 m / min and 0.2 mm, respectively),
Cutting conditions (C-3);
Work material: JIS SKD61 (HRC61) round bar,
Cutting speed: 200 m / min,
Cutting depth: 0.26 mm,
Feed: 0.24 mm / rev,
Cutting time: 4 minutes,
Dry continuous heavy cutting test of die steel hardened material under the following conditions (normal cutting and feeding are 0.15 mm and 0.15 mm / rev, respectively)
The flank wear width of the cutting blade was measured. The measurement results are shown in Table 10.
表５〜１０に示される結果から、本発明被覆工具１〜１８は、｛１１２｝面の配向割合が非常に高く（傾斜角度数分布グラフにおける度数全体の６０％以上の割合）、また、Σ３の分布割合も非常に高い（構成原子共有格子点分布グラフにおける度数全体の５０％以上の割合）改質（Ａｌ，Ｃｒ）Ｎ層で硬質被覆層が構成され、機械的負荷がきわめて大きい鋼や鋳鉄の重切削加工でも、前記改質（Ａｌ，Ｃｒ）Ｎ層が一段とすぐれた高温強度を有することから、すぐれた耐欠損性を示すと同時にすぐれた耐摩耗性を発揮するのに対して、｛１１２｝面の配向割合およびΣ３の分布割合のいずれもが低い従来（Ａｌ，Ｃｒ）Ｎ層で硬質被覆層が構成された従来被覆工具１〜１８においては、いずれも高速断続切削では硬質被覆層の高温強度が不十分であるために、重切削加工では硬質被覆層に欠損が発生し、比較的短時間で使用寿命に至ることが明らかである。 From the results shown in Tables 5 to 10, the coated tools 1 to 18 of the present invention have a very high orientation ratio of {112} plane (a ratio of 60% or more of the entire frequency in the tilt angle number distribution graph), and Σ3 The distribution ratio of is also very high (a ratio of 50% or more of the total frequency in the constituent atomic shared lattice distribution graph). The hard coating layer is composed of the modified (Al, Cr) N layer, and the mechanical load is extremely high. Even in heavy cutting of cast iron, the modified (Al, Cr) N layer has excellent high-temperature strength, so it exhibits excellent fracture resistance and at the same time exhibits excellent wear resistance. In the conventional coated tools 1 to 18 in which the hard coating layer is composed of the conventional (Al, Cr) N layer, which has a low {112} plane orientation ratio and Σ3 distribution ratio, all of them are hard coated by high-speed intermittent cutting. Insufficient high-temperature strength of the layer Therefore, it is clear that in the heavy cutting process, defects are generated in the hard coating layer and the service life is reached in a relatively short time.
上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に高い高温強度が要求される重切削加工でも硬質被覆層がすぐれた耐欠損性を示し、長期に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated tool of the present invention has an excellent hard coating layer not only for continuous cutting and interrupted cutting under normal conditions such as various steels and cast iron, but also for heavy cutting that requires high high-temperature strength. It exhibits excellent chipping resistance and exhibits excellent cutting performance over a long period of time, so that it can sufficiently satisfy high performance cutting equipment, labor saving and energy saving of cutting processing, and cost reduction. It is.
Claims (2)
前記ＡｌとＣｒの複合窒化物層は、
組成式：（Ａｌ１−ＸＣｒＸ）Ｎで表したときに、
０．３≦Ｘ≦０．６（ただし、Ｘは原子比を示す）を満足し、かつ、
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１００｝面の法線がなす傾斜角を測定し、前記測定傾斜角のうち、０〜４５度の範囲内にある測定傾斜角を０．２５度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフにおいて、３０〜４０度の範囲内の傾斜角区分に最高ピークが存在すると共に、前記３０〜４０度の範囲内に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の６０％以上の割合を占める傾斜角度数分布グラフを示すことを特徴とする表面被覆切削工具。 A composite nitriding of Al and Cr having an average layer thickness of 1 to 10 μm on the surface of a tool base made of tungsten carbide based cemented carbide, titanium carbonitride based cermet, or cubic boron nitride based ultra high pressure sintered material In a surface-coated cutting tool formed by vapor-depositing a hard coating layer consisting of a physical layer,
The composite nitride layer of Al and Cr is
Composition formula: When expressed by (Al 1-X Cr X ) N,
0.3 ≦ X ≦ 0.6 (where X represents an atomic ratio), and
Using a field emission scanning electron microscope, each crystal grain having a cubic crystal lattice existing within the measurement range of the surface polished surface is irradiated with an electron beam, and the crystal grain is normal to the surface polished surface. The tilt angle formed by the normal of the {100} plane, which is the crystal plane, is measured, and among the measured tilt angles, the measured tilt angles within the range of 0 to 45 degrees are classified for each pitch of 0.25 degrees. In addition, in the inclination angle number distribution graph obtained by counting the frequencies existing in each section, the highest peak exists in the inclination angle section within the range of 30 to 40 degrees, and exists within the range of 30 to 40 degrees. The surface covering cutting tool characterized by showing the inclination angle number distribution graph for which the sum total of frequency to occupy accounts for 60% or more of the whole frequency in an inclination angle number distribution graph.
電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する前記ＡｌとＣｒの複合窒化物について、立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である｛１１２｝面の法線がなす傾斜角を測定し、この場合前記結晶粒は、格子点にＡｌ、Ｃｒ、窒素からなる構成原子がそれぞれ存在するＮａＣｌ型面心立方晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ＮはＮａＣｌ型面心立方晶の結晶構造上２以上の偶数となる）存在する構成原子共有格子点形態をΣＮ＋１で表した場合、個々のΣＮ＋１がΣＮ＋１全体（ただし、頻度の関係でＮの上限値を２８とする）に占める分布割合を示す構成原子共有格子点分布グラフにおいて、Σ３に最高ピークが存在し、かつ前記Σ３のΣＮ＋１全体に占める分布割合が５０％以上である構成原子共有格子点分布グラフを示すことを特徴とする請求項１記載の表面被覆切削工具。 The surface-coated cutting tool according to claim 1,
Using a field emission scanning electron microscope, the surface polished surface is irradiated with an electron beam on each of the crystal grains having a cubic crystal lattice for the composite nitride of Al and Cr existing within the measurement range of the surface polished surface. The inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, is measured. In this case, the crystal grain has constituent atoms composed of Al, Cr, and nitrogen at lattice points. Each of the constituent atoms has a crystal structure of NaCl-type face-centered cubic crystals, and based on the measured inclination angle obtained as a result, each of the constituent atoms is between the crystal grains at the interface between adjacent crystal grains. The distribution of lattice points that share one constituent atom (constituent atom shared lattice point) is calculated, and N lattice points that do not share constituent atoms between the constituent atom shared lattice points (N is a NaCl-type face-centered cubic crystal) (It becomes an even number of 2 or more on the crystal structure) In the constituent atom shared lattice point distribution graph showing the distribution ratio of each ΣN + 1 in the whole ΣN + 1 (however, the upper limit value of N is 28 in terms of frequency) when the atomic atom shared lattice point form is represented by ΣN + 1, 2. The surface-coated cutting tool according to claim 1, which shows a constituent atom shared lattice point distribution graph in which a highest peak exists in Σ3 and a distribution ratio of the Σ3 in the entire ΣN + 1 is 50% or more.
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