JP2009032980A - Non-contact carrying device - Google Patents

Non-contact carrying device Download PDF

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JP2009032980A
JP2009032980A JP2007196555A JP2007196555A JP2009032980A JP 2009032980 A JP2009032980 A JP 2009032980A JP 2007196555 A JP2007196555 A JP 2007196555A JP 2007196555 A JP2007196555 A JP 2007196555A JP 2009032980 A JP2009032980 A JP 2009032980A
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workpiece
hand
holding
holding surface
suction
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Toshitaka Ono
俊孝 大野
Yasuhiko Fukuchi
泰彦 福地
Kien Ishibashi
希遠 石橋
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IHI Corp
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IHI Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a non-contact carrying device capable of sufficiently suppressing the occurrence of damage of a workpiece W in transit while preventing the workpiece W from falling from a holding hand in transit. <P>SOLUTION: A Bernoulli chuck 11 is provided on the holding surface 9 of a hand body 7, the Bernoulli chuck 11 has a jet 13 connected to a working fluid supply source 15, a plurality of adsorbing pins 19 that adsorb a circumferential section of the workpiece W are provided on the holding surface 9 of the hand body 7, the adsorbing pins each have suction holes 21 connected to air suction sources 23 that can suction the air, and the adsorbing pins each are designed to protrude over the holding surface 9 of the hand body 7 in a predetermined balancing state where the pressure working on the workpiece W held contactlessly from the upper direction and the weight of the workpiece W are balanced by a clearance L between the surface of the workpiece W and the holding surface 9 of the hand body 7. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、例えばウェハ、ガラス基板等の板状のワークを上方向から非接触で保持した状態の下で搬送方向へ搬送する非接触搬送装置に関する。   The present invention relates to a non-contact conveyance device that conveys a plate-shaped workpiece such as a wafer or a glass substrate in a conveyance direction in a state where the workpiece is held in a non-contact manner from above.

例えばクリーン搬送の分野に用いられる非接触搬送装置の先行技術として特許文献１に示すものがあり、以下、先行技術に係る非接触搬送装置について簡単に説明する。   For example, as a prior art of a non-contact transport apparatus used in the field of clean transport, there is one disclosed in Patent Document 1, and the non-contact transport apparatus according to the prior art will be briefly described below.

先行技術に係る非接触搬送装置は、搬送方向へ移動可能な移動部材としての搬送アームと、この搬送アームの先端部に設けられかつ例えばウェハ等の板状のワークを非接触で保持する保持ハンドとを具備している。そして、保持ハンドの具体的な構成は、次のようになる。   A non-contact transfer device according to the prior art includes a transfer arm as a moving member that can move in the transfer direction, and a holding hand that is provided at the tip of the transfer arm and holds a plate-like workpiece such as a wafer in a non-contact manner. It is equipped with. The specific configuration of the holding hand is as follows.

搬送アームの先端部には、ハンド本体が設けられており、このハンド本体は、一側に、ワークを保持可能な保持面を有している。また、ハンド本体の保持面には、ベルヌーイ効果を利用してハンド本体の保持面とワークの表面と間に負圧を発生させるベルヌーイチャックが設けられている。そして、ベルヌーイチャックは、作動流体としてのエアを噴出可能な噴出孔を有してあって、ベルヌーイチャックの噴出孔は、エアを供給するエア供給源に接続してある。   A hand main body is provided at the tip of the transfer arm, and the hand main body has a holding surface capable of holding a workpiece on one side. In addition, a Bernoulli chuck that generates a negative pressure between the holding surface of the hand body and the surface of the work is provided on the holding surface of the hand body using the Bernoulli effect. The Bernoulli chuck has an ejection hole through which air as a working fluid can be ejected, and the ejection hole of the Bernoulli chuck is connected to an air supply source that supplies air.

ハンド本体の保持面に対して平行な方向（平行方向）のワークの移動を規制するため、ハンド本体の保持面の周縁部には、ワークの端面に突当たり可能な複数のストッパピン、及びワークの周縁部に摩擦力を伴って接触する複数の摩擦ピンが配設されている。ここで、複数の摩擦ピンとワークの周縁部との摩擦力は、ハンド本体の保持面とワークの表面と間に負圧によって生じるものである。   In order to restrict movement of the workpiece in a direction parallel to the holding surface of the hand body (parallel direction), a plurality of stopper pins that can abut against the end surface of the workpiece, A plurality of friction pins are disposed in contact with the peripheral edge of the outer periphery with frictional force. Here, the frictional force between the plurality of friction pins and the peripheral edge portion of the work is generated by a negative pressure between the holding surface of the hand body and the surface of the work.

従って、保持ハンドを上方向からワークに対して相対的に接近させる。そして、エア供給源からベルヌーイチャックの噴出孔へエアを供給して、ベルヌーイチャックの噴出孔からエアを噴出することにより、ハンド本体の保持面とワークの表面との間において高速のエアを流通させて、ベルヌーイチャックによりハンド本体の保持面とワークの表面と間に負圧を発生させる。これによって、保持ハンドによりワークを上方向から非接触で保持することができる。   Therefore, the holding hand is moved closer to the workpiece from above. Then, air is supplied from the air supply source to the ejection hole of the Bernoulli chuck, and the air is ejected from the ejection hole of the Bernoulli chuck, whereby high-speed air is circulated between the holding surface of the hand body and the surface of the workpiece. Then, a negative pressure is generated between the holding surface of the hand body and the surface of the work by the Bernoulli chuck. Accordingly, the work can be held in a non-contact manner from above by the holding hand.

ここで、複数のストッパピン及び複数の摩擦ピンにより前記平行方向のワークの移動を規制しているため、保持ハンドによるワークの拘束力が前記平行方向にも十分に働くようにすることができる。   Here, since the movement of the workpiece in the parallel direction is regulated by the plurality of stopper pins and the plurality of friction pins, the restraining force of the workpiece by the holding hand can sufficiently work in the parallel direction.

保持ハンドによりワークを上方向から非接触で保持した後に、搬送アームを搬送方向へ移動させる。これによって、ワークを上方向から非接触で保持した状態の下で搬送方向へ搬送することができる。
特開平１１−３３０２０３号公報 After the workpiece is held in a non-contact manner from above by the holding hand, the transfer arm is moved in the transfer direction. Accordingly, the work can be transported in the transport direction from a top direction in a non-contact state.
JP-A-11-330203

ところで、ワークの搬送中に保持ハンドからワークが脱落することを防止するには、前述のように、ハンド本体の保持面の周縁部に複数のストッパピン及び複数の摩擦ピンを配設して、保持ハンドによるワークの拘束力が前記平行方向にも働くようにする必要がある。   By the way, in order to prevent the workpiece from falling off the holding hand during the conveyance of the workpiece, as described above, a plurality of stopper pins and a plurality of friction pins are arranged on the peripheral edge of the holding surface of the hand body, It is necessary that the restraining force of the work by the holding hand also works in the parallel direction.

しかしながら、ハンド本体の保持面の周縁部に複数のストッパピンを配設すると、ワークの搬送中にストッパピンとワークとの間に衝突が繰り返されることによって、ワークの損傷が発生し易くなる。また、ハンド本体の保持面の周縁部に複数の摩擦ピンを配設して、複数の摩擦ピンとワークの周縁部との摩擦力を十分に確保しようとすると、ワークの中央部が保持ハンドの保持面側に反ってしまい、ワークの損傷が更に発生し易くなる。   However, when a plurality of stopper pins are provided on the peripheral edge of the holding surface of the hand body, the workpiece is easily damaged due to repeated collisions between the stopper pins and the workpiece during the conveyance of the workpiece. In addition, if a plurality of friction pins are arranged on the peripheral portion of the holding surface of the hand body and the friction force between the plurality of friction pins and the peripheral portion of the workpiece is sufficiently secured, the center portion of the workpiece is held by the holding hand. It will warp to the surface side, and it will become easy to generate | occur | produce the damage of a workpiece | work.

つまり、ワークの搬送中に保持ハンドからワークが脱落することを防止しつつ、搬送中におけるワークの損傷の発生を十分に抑制することが容易でないという問題がある。   That is, there is a problem that it is not easy to sufficiently suppress the occurrence of damage to the workpiece during conveyance while preventing the workpiece from dropping from the holding hand during conveyance of the workpiece.

そこで、本発明は、前述の問題を解決することができる、ワークの端面に突当たり可能な複数のストッパピン、及びワークの周縁部に摩擦力を伴って接触する複数の摩擦ピンを用いることなく、保持ハンドによるワークの拘束力が前記平行方向にも十分に働くようにすることができる、新規な構成の非接触搬送装置を提供することを目的とする。   Therefore, the present invention can solve the above-described problems without using a plurality of stopper pins that can abut against the end surface of the workpiece and a plurality of friction pins that contact the peripheral portion of the workpiece with a frictional force. It is an object of the present invention to provide a non-contact conveyance device having a novel configuration capable of sufficiently exerting a restraining force of a workpiece by a holding hand in the parallel direction.

本発明の特徴は、板状のワークを上方向から非接触で保持した状態の下で搬送方向へ搬送する非接触搬送装置において、搬送方向へ移動可能な移動部材と、該移動部材に設けられかつワークを上方向から非接触で保持する保持ハンドとを具備し、前記保持ハンドは、前記移動部材に設けられ、一側にワークを保持可能な保持面を有したハンド本体と、前記ハンド本体の前記保持面に設けられ、作動流体を噴出可能かつ作動流体を供給する作動流体供給源に接続した噴出孔を有し、ベルヌーイ効果を利用して前記ハンド本体の前記保持面とワークの表面と間に負圧を発生させるベルヌーイチャックと、前記ハンド本体の前記保持面の周辺部に設けられ、エアを吸込み可能かつエアを吸引するエア吸引源に接続した吸込孔をそれぞれ有し、上方向から非接触で保持されたワークに作用する圧力とワークの重量がつりあう所定の均衡状態における、前記ハンド本体の前記保持面とワークの表面とのクリアランス分だけ前記ハンド本体の前記保持面に対してそれぞれ突出するようになってあって、ワークの周辺部を吸着する複数の吸着ピンとを備えたことを要旨とする。   The present invention is characterized in that, in a non-contact conveying apparatus that conveys a plate-like workpiece in the conveying direction in a non-contact state from above, a moving member that is movable in the conveying direction and the moving member are provided. And a holding body that holds the workpiece in a non-contact manner from above, the holding hand being provided on the moving member and having a holding surface capable of holding the workpiece on one side, and the hand body. A holding hole connected to a working fluid supply source capable of ejecting the working fluid and supplying the working fluid, and utilizing the Bernoulli effect, the holding surface of the hand body and the surface of the work A Bernoulli chuck that generates a negative pressure in between, and a suction hole that is provided in the periphery of the holding surface of the hand body and that is capable of sucking air and connected to an air suction source that sucks air. In the predetermined equilibrium state in which the pressure acting on the workpiece held in a non-contact manner and the weight of the workpiece are balanced, the clearance between the holding surface of the hand body and the surface of the workpiece is the same as the holding surface of the hand body. The gist is provided with a plurality of suction pins that protrude from each other and suck the periphery of the workpiece.

なお、本願の特許請求の範囲及び明細書中において、「設けられ」とは、中間部材を介して間接的に設けられたこと、及び形成されたことを含む意である。   In the claims and specification of the present application, “provided” means provided indirectly through an intermediate member and includes being formed.

本発明の特徴によると、前記保持ハンドを上方向からワークに対して相対的に接近させる。そして、前記作動流体供給源から前記ベルヌーイチャックの前記噴出孔へ作動流体を供給して、前記ベルヌーイチャックの前記噴出孔から作動流体を噴出することにより、前記ハンド本体の前記保持面とワークの表面との間において高速の作動流体を流通させ、前記ベルヌーイチャックにより前記ハンド本体の前記保持面とワークの表面と間に負圧を発生させる。また、前記エア吸引源にエアを吸引して、複数の前記吸着ピンの前記吸込孔からエアを吸込むこことにより、複数の前記吸着ピンによりワークの周辺部を吸着する。これによって、複数の前記吸着ピンによりワークの周辺部を吸着した状態で、前記保持ハンドによりワークを上方向から非接触で保持することができる。   According to the characteristic of this invention, the said holding hand is made to approach relatively with respect to a workpiece | work from an upper direction. Then, the working fluid is supplied from the working fluid supply source to the ejection hole of the Bernoulli chuck, and the working fluid is ejected from the ejection hole of the Bernoulli chuck. A high-speed working fluid is circulated between them and a negative pressure is generated between the holding surface of the hand body and the surface of the work by the Bernoulli chuck. Further, by sucking air into the air suction source and sucking air from the suction holes of the plurality of suction pins, the peripheral portion of the workpiece is sucked by the plurality of suction pins. Accordingly, the work can be held in a non-contact manner from above by the holding hand in a state where the peripheral portion of the work is sucked by the plurality of suction pins.

ここで、複数の前記吸着ピンによりワークの周辺部を吸着しているため、ワークの端面に突当たり可能な複数のストッパピン、及びワークの周縁部に摩擦力を伴って接触する複数の摩擦ピンを用いることなく、前記保持ハンドによるワークの拘束力が前記ハンド本体の前記保持面に平行な方向（平行方向）にも十分に働くようにすることができる。また、各吸着ピンが前記所定の均衡状態における前記ハンド本体の前記保持面とワークの表面とのクリアランス分だけ前記ハンド本体の前記保持面に対してそれぞれ突出するようになっているため、ワークの中央部が前記保持ハンドの前記保持面側に反ることなく、前記保持ハンドによりワークを前記ハンド本体の前記保持面に平行に保った状態で非接触で保持することができる。   Here, since the peripheral portion of the workpiece is sucked by the plurality of suction pins, the plurality of stopper pins that can abut against the end surface of the workpiece, and the plurality of friction pins that contact the peripheral portion of the workpiece with friction force Without using the above, the restraining force of the workpiece by the holding hand can sufficiently work in a direction (parallel direction) parallel to the holding surface of the hand body. In addition, since each suction pin protrudes from the holding surface of the hand body by the clearance between the holding surface of the hand body and the surface of the work in the predetermined equilibrium state, The center portion can be held in a non-contact state while being held parallel to the holding surface of the hand main body by the holding hand without the center portion being warped toward the holding surface side of the holding hand.

前記保持ハンドによりワークを上方向から非接触で保持した後に、前記移動部材を搬送方向へ移動させる。これによって、ワークを非接触で保持した状態の下で搬送方向へ搬送することができる。   After the workpiece is held in a non-contact manner from above by the holding hand, the moving member is moved in the transport direction. Accordingly, the workpiece can be conveyed in the conveyance direction under a state where the workpiece is held in a non-contact manner.

本発明によれば、ワークの端面に突当たり可能な複数のストッパピン、及びワークの周縁部に摩擦力を伴って接触する複数の摩擦ピンを用いることなく、前記保持ハンドによるワークの拘束力が前記平行方向にも十分に働くようにすると共に、前記保持ハンドによりワークを前記ハンド本体の前記保持面に平行に保った状態で非接触で保持できるため、搬送中に前記保持ハンドからワークが脱落することを防止しつつ、搬送中におけるワークの損傷の発生を十分に抑制することができる。   According to the present invention, the holding force of the workpiece by the holding hand can be reduced without using a plurality of stopper pins that can abut against the end surface of the workpiece and a plurality of friction pins that contact the peripheral edge of the workpiece with a friction force. Since the work can be held in a non-contact state in a state where the work is held in parallel with the holding surface of the hand body by the holding hand, the work is detached from the holding hand during transportation. It is possible to sufficiently suppress the occurrence of damage to the workpiece during conveyance while preventing this.

本発明の実施形態について図１から図３を参照して説明する。   An embodiment of the present invention will be described with reference to FIGS. 1 to 3.

ここで、図１は、本発明の実施形態に係る非接触搬送装置の断面図、図２は、本発明の実施形態に係る非接触搬送装置を保持ハンドの保持面からみた図、図３は、軸方向へ位置調節可能な吸着ピンを示す図である。   Here, FIG. 1 is a cross-sectional view of a non-contact conveyance device according to an embodiment of the present invention, FIG. 2 is a view of the non-contact conveyance device according to the embodiment of the present invention as viewed from the holding surface of a holding hand, and FIG. It is a figure which shows the suction pin which can adjust a position to an axial direction.

図１及び図２に示すように、本発明の実施形態に係る非接触搬送装置１は、例えばウェハ、ガラス基板等の円形板状のワークＷを非接触で保持した状態の下で搬送方向へ搬送する装置であって、任意方向（搬送方向を含む）へ移動可能な移動部材としての多関節の搬送アーム３と、この搬送アーム３の先端部に設けられかつワークＷを上方向から非接触で保持する保持ハンド５とを具備している。なお、非接触搬送装置１は任意方向へ移動可能な多関節の搬送アーム３の代わりに、搬送方向へ移動可能な別の移動部材を備えるようにしても構わない。   As shown in FIG.1 and FIG.2, the non-contact conveying apparatus 1 which concerns on embodiment of this invention is a conveyance direction in the state which hold | maintained circular plate-shaped workpiece | work W, such as a wafer and a glass substrate, for example, non-contactingly. An articulated transport arm 3 that is a multi-joint transport arm 3 as a movable member that can move in an arbitrary direction (including the transport direction), and that is provided at the tip of the transport arm 3 and that does not contact the workpiece W from above. And a holding hand 5 held by The non-contact transfer device 1 may include another moving member that can move in the transfer direction instead of the articulated transfer arm 3 that can move in any direction.

そして、保持ハンド５の具体的な構成は、次のようになる。   The specific configuration of the holding hand 5 is as follows.

搬送アーム３の先端部には、ハンド本体７が設けられており、このハンド本体７は、一側に、ワークＷを保持可能な円形の保持面９を有している。また、ハンド本体７の保持面９には、ベルヌーイ効果を利用してハンド本体７の保持面９とワークＷの表面と間に負圧を発生させる複数のベルヌーイチャック１１が円周上に間隔を置いて設けられている。更に、各ベルヌーイチャック１１は、エアを噴出可能な噴出孔１３をそれぞれ有してあって、各ベルヌーイチャック１１の噴出孔１３は、エアを供給するエアコンプレッサ又はブロワ等のエア供給源１５にエア配管１７を介してそれぞれ接続してある。   A hand main body 7 is provided at the tip of the transfer arm 3, and the hand main body 7 has a circular holding surface 9 capable of holding the workpiece W on one side. In addition, a plurality of Bernoulli chucks 11 that generate negative pressure between the holding surface 9 of the hand body 7 and the surface of the workpiece W using the Bernoulli effect are spaced apart on the circumference of the holding surface 9 of the hand body 7. It is provided. Further, each Bernoulli chuck 11 has an ejection hole 13 through which air can be ejected, and the ejection hole 13 of each Bernoulli chuck 11 provides air to an air supply source 15 such as an air compressor or a blower for supplying air. Each is connected via a pipe 17.

ハンド本体７の保持面９の周縁部には、ワークＷの周辺部を吸着する複数の吸着ピン１９が円周上に間隔を置いて設けられている。また、各吸着ピン１９は、エアを吸込み可能な吸込孔２１をそれぞれ有してあって、各吸着ピン１９の吸込孔２１は、エアを吸引する真空ポンプ又はエジェクタ等のエア吸引源２３にエア配管２５を介して接続してある。   A plurality of suction pins 19 for sucking the peripheral portion of the work W are provided on the periphery of the holding surface 9 of the hand body 7 at intervals on the circumference. Each suction pin 19 has a suction hole 21 through which air can be sucked. The suction hole 21 of each suction pin 19 is supplied to an air suction source 23 such as a vacuum pump or an ejector that sucks air. It is connected via a pipe 25.

各吸着ピン１９は、所定の均衡状態におけるハンド本体７の保持面９とワークＷの表面とのクリアランスＬ分だけハンド本体７の保持面９に対してそれぞれ突出するようになっている。なお、所定の均衡状態とは、保持ハンド５により上方向から非接触で保持されたワークＷに作用する圧力と、ワークＷの重量がつりあう状態のことをいう。   Each suction pin 19 protrudes from the holding surface 9 of the hand body 7 by a clearance L between the holding surface 9 of the hand body 7 and the surface of the workpiece W in a predetermined equilibrium state. The predetermined equilibrium state refers to a state where the pressure acting on the workpiece W held in a non-contact manner from above by the holding hand 5 and the weight of the workpiece W are balanced.

所定の均衡状態におけるハンド本体７の保持面９とワークＷの表面とのクリアランス分だけハンド本体７の保持面９に対して突出するように、各吸着ピン１９が軸方向へそれぞれ位置調節可能になるようにしても構わない。具体的には、図３（ａ）に示すように、各吸着ピン１９がハンド本体７に螺合してあって、各吸着ピン１９の頭部側のねじ部１９ｈには、ハンド本体７に当接した調節ナット２７が螺合して設けられている。また、図３（ｂ）に示すように、各吸着ピン１９がハンド本体７に軸方向へそれぞれ移動可能であって、ハンド本体７と各吸着ピン１９の間には、対応する吸着ピン１９を先端方向へ付勢可能なスプリング２９がそれぞれ設けられており、各吸着ピン１９の先端側のねじ部１９ｔには、ハンド本体７に突当たり可能な調節ナット３１が螺合して設けられている。   Each suction pin 19 can be adjusted in position in the axial direction so as to protrude from the holding surface 9 of the hand main body 7 by the clearance between the holding surface 9 of the hand main body 7 and the surface of the workpiece W in a predetermined equilibrium state. It does not matter if it becomes. Specifically, as shown in FIG. 3A, each suction pin 19 is screwed into the hand body 7, and the screw portion 19 h on the head side of each suction pin 19 is connected to the hand body 7. An abutting adjustment nut 27 is screwed. Further, as shown in FIG. 3B, each suction pin 19 can be moved in the axial direction to the hand body 7, and a corresponding suction pin 19 is interposed between the hand body 7 and each suction pin 19. A spring 29 that can be urged in the distal direction is provided, and an adjustment nut 31 that can abut against the hand main body 7 is screwed into a screw portion 19t on the distal end side of each suction pin 19. .

続いて、本発明の実施形態の作用及び効果について説明する。   Then, the effect | action and effect of embodiment of this invention are demonstrated.

搬送アーム３を適宜方向（ワークＷに接近する方向）へ移動させて、保持ハンド５をワークＷの上方に位置させる。次に、搬送アーム３を下方向へ移動させて、保持ハンド５を上方向からワークＷに対して接近させる。そして、エア供給源１５から複数のベルヌーイチャック１１の噴出孔１３へエアを供給して、複数のベルヌーイチャック１１の噴出孔１３からエアを噴出することにより、ハンド本体７の保持面９とワークＷの表面との間において高速のエアを流通させ、複数のベルヌーイチャック１１によりハンド本体７の保持面９とワークＷの表面と間に負圧を発生させる。更に、エア吸引源２３にエアを吸引して、複数の吸着ピン１９の吸込孔２１からエアを吸込むこことにより、複数の吸着ピン１９によりワークＷの周辺部を吸着する。これによって、複数の吸着ピン１９によりワークＷの周辺部を吸着した状態で、保持ハンド５によりワークＷを上方向から非接触で保持することができる。   The transport arm 3 is moved in an appropriate direction (direction approaching the workpiece W), and the holding hand 5 is positioned above the workpiece W. Next, the transfer arm 3 is moved downward to bring the holding hand 5 closer to the workpiece W from above. Then, air is supplied from the air supply source 15 to the ejection holes 13 of the plurality of Bernoulli chucks 11, and the air is ejected from the ejection holes 13 of the plurality of Bernoulli chucks 11. High-speed air is circulated between the surface and the plurality of Bernoulli chucks 11 to generate a negative pressure between the holding surface 9 of the hand body 7 and the surface of the workpiece W. Further, air is sucked into the air suction source 23 and air is sucked from the suction holes 21 of the plurality of suction pins 19, whereby the peripheral portion of the workpiece W is sucked by the plurality of suction pins 19. Accordingly, the work W can be held in a non-contact manner from above by the holding hand 5 in a state where the peripheral portion of the work W is sucked by the plurality of suction pins 19.

ここで、複数の吸着ピン１９によりワークＷの周辺部を吸着しているため、ワークＷの端面に突当たり可能な複数のストッパピン、及びワークＷの周縁部に摩擦力を伴って接触する複数の摩擦ピンを用いることなく、保持ハンド５によるワークＷの拘束力がハンド本体７の保持面９に平行な方向（平行方向）にも十分に働くようにすることができる。また、各吸着ピン１９が所定の均衡状態におけるハンド本体７の保持面９とワークＷの表面とのクリアランスＬ分だけハンド本体７の保持面９に対してそれぞれ突出するようになっているため、ワークＷの中央部がハンド本体７の保持面９側に反ることなく、保持ハンド５によりワークＷをハンド本体７の保持面９に平行に保った状態で非接触で保持することができる。   Here, since the peripheral portion of the workpiece W is sucked by the plurality of suction pins 19, the plurality of stopper pins that can abut against the end surface of the workpiece W and the plurality that contact the peripheral portion of the workpiece W with frictional force. Without using the friction pin, the restraining force of the workpiece W by the holding hand 5 can be sufficiently exerted in the direction parallel to the holding surface 9 of the hand body 7 (parallel direction). In addition, each suction pin 19 protrudes from the holding surface 9 of the hand body 7 by a clearance L between the holding surface 9 of the hand body 7 and the surface of the workpiece W in a predetermined equilibrium state. The work W can be held in a non-contact state while being held parallel to the holding surface 9 of the hand main body 7 by the holding hand 5 without the center portion of the work W being warped toward the holding surface 9 of the hand main body 7.

保持ハンド５によりワークＷを上方向から非接触で保持した後に、搬送アーム３を上方向へ移動させて、ワークＷを所定の搬送高さ位置まで持上げる。そして、搬送アーム３を搬送方向へ移動させる。これによって、ワークＷを上方向から非接触で保持した状態の下で搬送方向へ搬送することができる。   After holding the workpiece W from the upper direction in a non-contact manner by the holding hand 5, the transfer arm 3 is moved upward to lift the workpiece W to a predetermined transfer height position. Then, the transfer arm 3 is moved in the transfer direction. As a result, the workpiece W can be conveyed in the conveying direction from above in a state where it is held in a non-contact manner.

従って、本発明の実施形態によれば、ワークＷの端面に突当たり可能な複数のストッパピン、及びワークＷの周縁部に摩擦力を伴って接触する複数の摩擦ピンを用いることなく、保持ハンド５によるワークＷの拘束力が前記平行方向にも十分に働くようにすると共に、保持ハンド５によりワークＷをハンド本体７の保持面９に平行に保った状態で非接触で保持できるため、搬送中に保持ハンド５からワークＷが脱落することを防止しつつ、搬送中におけるワークＷの損傷の発生を十分に抑制することができる。   Therefore, according to the embodiment of the present invention, the holding hand can be used without using a plurality of stopper pins that can abut against the end surface of the workpiece W and a plurality of friction pins that contact the peripheral edge of the workpiece W with friction force. 5 so that the restraining force of the work W by 5 is sufficiently exerted also in the parallel direction, and the work W can be held in a non-contact state while being held parallel to the holding surface 9 of the hand body 7 by the holding hand 5. While preventing the workpiece W from falling off from the holding hand 5, it is possible to sufficiently suppress the occurrence of damage to the workpiece W during conveyance.

（変形例）
本発明の実施形態の変形例について図４を参照して説明する。 (Modification)
A modification of the embodiment of the present invention will be described with reference to FIG.

ここで、図４は、本発明の実施形態の変形例に係る非接触搬送装置の断面図である。   Here, FIG. 4 is a cross-sectional view of a non-contact conveying apparatus according to a modification of the embodiment of the present invention.

図４に示すように、本発明の実施形態の変形例に係る非接触搬送装置１Ａは、本発明の実施形態に係る非接触搬送装置１と略同じ構成を有しており、次の点においてのみ本発明の実施形態に係る非接触搬送装置１の構成と異なる。   As shown in FIG. 4, the non-contact conveying apparatus 1A according to the modification of the embodiment of the present invention has substantially the same configuration as the non-contact conveying apparatus 1 according to the embodiment of the present invention. Only the configuration of the non-contact conveying apparatus 1 according to the embodiment of the present invention is different.

即ち、本発明の実施形態に係る非接触搬送装置１にあっては、各ベルヌーイチャック１１の噴出孔１３がエア供給源１５にエア配管１７を介してそれぞれ接続してある。これに対して、本発明の実施形態の変形例に係る非接触搬送装置１Ａにあっては、保持ハンド５の内部にエアを収容可能な供給チャンバー３３が形成され、この供給チャンバー３３がエア供給源１５にエア配管３５を介して接続してあって、各ベルヌーイチャック１１の噴出孔１３が供給チャンバー３３にそれぞれ連通してある。   That is, in the non-contact conveyance device 1 according to the embodiment of the present invention, the ejection holes 13 of each Bernoulli chuck 11 are connected to the air supply source 15 via the air pipe 17. On the other hand, in the non-contact conveyance device 1A according to the modification of the embodiment of the present invention, a supply chamber 33 capable of accommodating air is formed inside the holding hand 5, and the supply chamber 33 is supplied with air. Connected to the source 15 through an air pipe 35, the ejection holes 13 of each Bernoulli chuck 11 communicate with the supply chamber 33.

また、本発明の実施形態に係る非接触搬送装置１にあっては、各吸着ピン１９の吸込孔２１がエア吸引源２３にエア配管２５を介してそれぞれ接続してある。これに対して、本発明の実施形態の変形例に係る非接触搬送装置１Ａにあっては、保持ハンド５の内部にエアを収容可能な吸引チャンバー３７が供給チャンバー３３を囲むように形成され、この吸引チャンバー３７がエア吸引源２３にエア配管３９を介して接続してあって、各吸着ピン１９の吸込孔２１が吸引チャンバー３７にそれぞれ連通してある。   Further, in the non-contact conveyance device 1 according to the embodiment of the present invention, the suction holes 21 of the respective suction pins 19 are connected to the air suction source 23 via the air pipe 25, respectively. On the other hand, in the non-contact conveyance device 1A according to the modification of the embodiment of the present invention, the suction chamber 37 capable of accommodating air is formed inside the holding hand 5 so as to surround the supply chamber 33, The suction chamber 37 is connected to the air suction source 23 via an air pipe 39, and the suction holes 21 of the suction pins 19 communicate with the suction chamber 37.

そして、本発明の実施形態の変形例においては、本発明の実施形態と同様の作用及び効果を奏する他に、次のような特別な作用を奏する。   And in the modification of embodiment of this invention, there exist the following special effects other than the effect | action and effect similar to embodiment of this invention.

即ち、供給チャンバー３３がエア供給源１５にエア配管３５を介して接続してあって、各ベルヌーイチャック１１の噴出孔１３が供給チャンバー３３にそれぞれ連通しているため、ベルヌーイチャック１１の個数が増えても、エア供給源１５から各ベルヌーイチャック１１の噴出孔１３までのエアの圧力損失にバラツキがなくなる。同様に、吸引チャンバー３７がエア吸引源２３にエア配管３９を介して接続してあって、各吸着ピン１９の吸込孔２１が吸引チャンバー３７にそれぞれ連通しているため、吸着ピン１９の個数が増えても、各吸着ピン１９の吸込孔２１からエア吸引源２３までのエアの圧力損失にバラツキがなくなる。   That is, since the supply chamber 33 is connected to the air supply source 15 via the air pipe 35 and the ejection holes 13 of the Bernoulli chucks 11 communicate with the supply chambers 33, the number of Bernoulli chucks 11 increases. However, there is no variation in the pressure loss of air from the air supply source 15 to the ejection hole 13 of each Bernoulli chuck 11. Similarly, since the suction chamber 37 is connected to the air suction source 23 via the air pipe 39 and the suction holes 21 of the suction pins 19 communicate with the suction chambers 37, the number of suction pins 19 is reduced. Even if it increases, the pressure loss of air from the suction hole 21 of each suction pin 19 to the air suction source 23 does not vary.

本発明は、前述の本発明の実施形態（本発明の実施形態の変形例を含む）の説明に限られるものではなく、例えば、作動流体としてエアの代わりに水又は各種処理液等を用いても構わない。また、本発明の実施形態に係る非接触搬送装置１の主要部の構成を、板状のワークを下方向から非接触で保持した状態の下で搬送方向へ搬送する別タイプの非接触搬送装置に適用したり、ベルヌーイチャック１１の代わりに電磁チャックを用いたりしても構わない。なお、本発明に包含される権利範囲は、これらの実施形態に限定されないものである。   The present invention is not limited to the description of the above-described embodiments of the present invention (including modifications of the embodiments of the present invention). For example, water or various treatment liquids are used as the working fluid instead of air. It doesn't matter. In addition, another type of non-contact conveyance device that conveys the configuration of the main part of the non-contact conveyance device 1 according to the embodiment of the present invention in the conveyance direction under a state in which a plate-like workpiece is held in a non-contact manner from below. The electromagnetic chuck may be used instead of the Bernoulli chuck 11. The scope of rights encompassed by the present invention is not limited to these embodiments.

本発明の実施形態に係る非接触搬送装置の断面図である。It is sectional drawing of the non-contact conveying apparatus which concerns on embodiment of this invention. 本発明の実施形態に係る非接触搬送装置を保持ハンドの保持面からみた図である。It is the figure which looked at the non-contact conveyance apparatus which concerns on embodiment of this invention from the holding surface of the holding hand. 軸方向へ位置調節可能な吸着ピンを示す図である。It is a figure which shows the suction pin which can adjust a position to an axial direction. 本発明の実施形態の変形例に係る非接触搬送装置の断面図である。It is sectional drawing of the non-contact conveying apparatus which concerns on the modification of embodiment of this invention.

符号の説明Explanation of symbols

１ 非接触搬送装置
３ 搬送アーム
５ 保持ハンド
７ ハンド本体
９ 保持面
１１ ベルヌーイチャック
１３ 噴出孔
１５ エア供給源
１９ 吸着ピン
２１ 吸込孔
２３ エア吸引源
１Ａ 非接触搬送装置
３３ 供給チャンバー
３７ 吸引チャンバー DESCRIPTION OF SYMBOLS 1 Non-contact conveyance apparatus 3 Conveyance arm 5 Holding hand 7 Hand main body 9 Holding surface 11 Bernoulli chuck 13 Ejection hole 15 Air supply source 19 Suction pin 21 Suction hole 23 Air suction source 1A Non-contact conveyance apparatus 33 Supply chamber 37 Suction chamber

Claims (3)

板状のワークを上方向から非接触で保持した状態の下で搬送方向へ搬送する非接触搬送装置において、
搬送方向へ移動可能な移動部材と、該移動部材に設けられかつワークを上方向から非接触で保持する保持ハンドとを具備し、
前記保持ハンドは、
前記移動部材に設けられ、一側にワークを保持可能な保持面を有したハンド本体と、
前記ハンド本体の前記保持面に設けられ、作動流体を噴出可能かつ作動流体を供給する作動流体供給源に接続した噴出孔を有し、ベルヌーイ効果を利用して前記ハンド本体の前記保持面とワークの表面と間に負圧を発生させるベルヌーイチャックと、
前記ハンド本体の前記保持面に設けられ、エアを吸込み可能かつエアを吸引するエア吸引源に接続した吸込孔をそれぞれ有し、上方向から非接触で保持されたワークに作用する圧力とワークの重量がつりあう所定の均衡状態における、前記ハンド本体の前記保持面とワークの表面とのクリアランス分だけ前記ハンド本体の前記保持面に対してそれぞれ突出するようになってあって、ワークの周辺部を吸着する複数の吸着ピンとを備えたことを特徴とする非接触搬送装置。 In a non-contact conveyance device that conveys a plate-shaped workpiece in the conveyance direction under a non-contact state from above,
A movable member that is movable in the conveying direction; and a holding hand that is provided on the movable member and holds the workpiece in a non-contact manner from above.
The holding hand is
A hand body provided on the moving member and having a holding surface capable of holding a workpiece on one side;
The holding surface of the hand body is provided with an ejection hole connected to a working fluid supply source capable of ejecting working fluid and supplying working fluid, and using the Bernoulli effect, the holding surface of the hand body and the work Bernoulli chuck that generates negative pressure between the surface of
The holding surface of the hand body has suction holes connected to an air suction source capable of sucking air and sucking air. In a predetermined equilibrium state in which weights are balanced, the hand body protrudes from the holding surface of the hand body by a clearance between the holding surface of the hand body and the surface of the work, A non-contact conveyance device comprising a plurality of suction pins for suction. 前記所定の均衡状態における前記ハンド本体の前記保持面とワークの表面とのクリアランス分だけ前記ハンド本体の前記保持面に対して突出するように、各吸着ピンが軸方向へそれぞれ位置調節可能になっていることを特徴とする請求項１に記載の非接触搬送装置。   Each suction pin can be adjusted in position in the axial direction so as to protrude from the holding surface of the hand body by the clearance between the holding surface of the hand body and the surface of the workpiece in the predetermined equilibrium state. The non-contact conveying apparatus according to claim 1, wherein 前記保持ハンドの内部に作動流体を収容可能かつ前記作動流体供給源に接続した供給チャンバーが形成され、前記ベルヌーイチャックの前記噴出孔が前記供給チャンバーに連通してあることを特徴とする請求項１又は請求項２に記載の非接触搬送装置。   2. A supply chamber capable of containing a working fluid and connected to the working fluid supply source is formed in the holding hand, and the ejection hole of the Bernoulli chuck communicates with the supply chamber. Or the non-contact conveying apparatus of Claim 2.
JP2007196555A 2007-07-27 2007-07-27 Non-contact carrying device Pending JP2009032980A (en)

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