JP2008306468A - Piezoelectric vibration piece and piezoelectric vibrator - Google Patents

Piezoelectric vibration piece and piezoelectric vibrator Download PDF

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JP2008306468A
JP2008306468A JP2007151772A JP2007151772A JP2008306468A JP 2008306468 A JP2008306468 A JP 2008306468A JP 2007151772 A JP2007151772 A JP 2007151772A JP 2007151772 A JP2007151772 A JP 2007151772A JP 2008306468 A JP2008306468 A JP 2008306468A
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vibrating piece
groove
piezoelectric vibrating
piezoelectric
bent
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JP4985960B2 (en
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Noriya Hirasawa
憲也 平沢
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Miyazaki Epson Corp
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Miyazaki Epson Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To lower a CI value of a fundamental wave by preventing oscillation of higher harmonic waves. <P>SOLUTION: Vibration arms 14 each have first and second side faces 21 and 22 connected to both sides of front and rear faces 16. In each of the front and rear faces 16, a groove 30 extended in the length direction of the vibrating arm 14 is formed. Each groove 30 includes first and second internal faces 31 and 32 which are extended back to back with the first and second side faces 21 and 22, respectively. The pair of vibration arms 14 flexurally vibrates in such a manner that each other's first and second side faces 21 and 22 may be drawn near to and separate from each other's first and second side faces. Each vibration arm 14 has a first flexural portion 18 which bends most in a connecting portion 24 with respect to a base portion 12, and has a second flexural portion 20 which bends most next after the connecting portion 24 in a portion wherein an intermediate portion in the length direction of the groove 30 is formed. The distance between the first side face 21 and the first internal face 31 (or between the second side face 22 and the second internal face 32) is largest at the second flexural portion 20. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、圧電振動片及び圧電振動子に関する。   The present invention relates to a piezoelectric vibrating piece and a piezoelectric vibrator.

音叉型圧電振動片は、一対の振動腕を有し、振動腕には励振電極が形成されている。また、振動腕に長溝を形成してＣＩ値を下げることも知られており、長溝内にも励振電極が形成される（特許文献１）。しかし、溝を長くすると基本波のＣＩ値よりも高調波のＣＩ値が大きく下がってしまうため、溝が振動腕の長さの６０％以上になると、駆動回路によっては高調波で発振してしまうことがあった。例えば、特許文献２には、溝の形成によって３次高調波のＣＩ値を低減することが記載されている。したがって、基本波で発振させる圧電振動片には、溝を形成してＣＩ値を下げるには限界があった。
特開２００５−３５４６４９号公報 特開２００６−２４６４４８号公報 The tuning fork type piezoelectric vibrating piece has a pair of vibrating arms, and excitation electrodes are formed on the vibrating arms. It is also known that a long groove is formed in the vibrating arm to lower the CI value, and an excitation electrode is also formed in the long groove (Patent Document 1). However, if the groove is lengthened, the CI value of the harmonic wave is greatly lowered than the CI value of the fundamental wave. Therefore, if the groove is 60% or more of the length of the vibrating arm, the drive circuit oscillates with a harmonic wave. There was a thing. For example, Patent Document 2 describes that the CI value of the third harmonic is reduced by forming a groove. Therefore, the piezoelectric vibrating piece oscillated with the fundamental wave has a limit in reducing the CI value by forming a groove.
JP 2005-354649 A JP 2006-246448 A

本発明は、高調波による発振を防止して基本波のＣＩ値を下げることを目的とする。   An object of the present invention is to reduce the CI value of a fundamental wave by preventing oscillation due to harmonics.

（１）本発明に係る圧電振動片は、
基部と、
前記基部からそれぞれ延びる一対の振動腕と、
それぞれの前記振動腕に形成されている励振電極膜と、
を含み、
それぞれの前記振動腕は、相互に反対を向く表裏面と、前記表裏面の両側に接続される側面と、を有し、
前記表裏面には、それぞれ、前記振動腕の長手方向に延びる溝が形成され、
前記溝は、前記側面と背中合わせに延びる内面を含み、
前記一対の振動腕は、前記側面が相互に接近及び離隔するように屈曲振動し、最も大きく屈曲する第１の屈曲部を前記基部との接続部に有し、前記接続部の次に大きく屈曲する第２の屈曲部を前記溝の長さ方向の中間部が形成されている部分に有し、
前記側面と前記内面の間隔は、前記第２の屈曲部において最も大きい。本発明によれば、二番目に最も大きく屈曲する第２の屈曲部において、側面と内面の間隔が最も大きい。これによって、第２の屈曲部の屈曲が抑えられる。第２の屈曲部での屈曲が高調波の振動を生じさせることが明らかになっており、その屈曲が抑えられるので、高調波の発生を防止することができる。また、溝の形成によって基本波のＣＩ値を下げることができる。
（２）この圧電振動片において、
前記第１の屈曲部は、基本波モードおよび２次高調波モードにおいて最も大きく屈曲する部分であり、
前記第２の屈曲部は、２次高調波モードにおいて、前記接続部の次に大きく屈曲する部分であることを特徴とする。
（３）この圧電振動片において、
それぞれの前記振動腕は、前記第２の屈曲部で前記側面に外凸部を有してもよい。
（４）この圧電振動片において、
前記溝は、前記第２の屈曲部で前記内面に内凸部を有してもよい。
（５）この圧電振動片において、
前記溝は、前記振動腕の長さの８０％以上の長さを有してもよい。
（６）この圧電振動片において、
前記溝は、長さ方向の全てにわたって深さが均一であってもよい。
（７）この圧電振動片において、
前記溝は、前記第２の屈曲部で最も深さが浅くてもよい。
（８）本発明に係る圧電振動子は、パッケージと、前記パッケージに導電性接着剤を介して電気的機械的に接続され、かつ、前記パッケージに収納される圧電振動片と、前記パッケージの上面を封止する蓋体と、を有する圧電振動子であって、
前記圧電振動片は、
基部と、
前記基部からそれぞれ延びる一対の振動腕と、
それぞれの前記振動腕に形成されている励振電極膜と、
を含み、
それぞれの前記振動腕は、相互に反対を向く表裏面と、前記表裏面の両側に接続される側面と、を有し、
前記表裏面には、それぞれ、前記振動腕の長手方向に延びる溝が形成され、
前記溝は、前記側面と背中合わせに延びる内面を含み、
前記一対の振動腕は、前記側面が相互に接近及び離隔するように屈曲振動し、最も大きく屈曲する第１の屈曲部を前記基部との接続部に有し、前記接続部の次に大きく屈曲する第２の屈曲部を前記溝の長さ方向の中間部が形成されている部分に有し、
前記側面と前記内面の間隔は、前記第２の屈曲部において最も大きい、
ことを特徴とする。本発明によれば、二番目に最も大きく屈曲する第２の屈曲部において、側面と内面の間隔が最も大きい。これによって、第２の屈曲部の屈曲が抑えられる。第２の屈曲部での屈曲が高調波の振動を生じさせることが明らかになっており、その屈曲が抑えられるので、高調波の発生を防止することができる。また、溝の形成によって基本波のＣＩ値を下げることができる。
（９）この圧電振動子において、
前記圧電振動片の前記第１の屈曲部は、基本波モードおよび２次高調波モードにおいて最も大きく屈曲する部分であり、
前記圧電振動片の前記第２の屈曲部は、２次高調波モードにおいて、前記接続部の次に大きく屈曲する部分である、
ことを特徴とする。 (1) The piezoelectric vibrating piece according to the present invention is
The base,
A pair of vibrating arms each extending from the base;
An excitation electrode film formed on each of the vibrating arms;
Including
Each of the vibrating arms has a front surface and a reverse surface facing each other, and side surfaces connected to both sides of the front and back surfaces,
A groove extending in the longitudinal direction of the vibrating arm is formed on each of the front and back surfaces,
The groove includes an inner surface extending back to back with the side surface;
The pair of vibrating arms flexibly vibrate so that the side surfaces approach and separate from each other, and have a first bent portion that is bent most greatly at a connection portion with the base portion, and then bend greatly after the connection portion. Having a second bent portion at a portion where an intermediate portion in the longitudinal direction of the groove is formed,
The distance between the side surface and the inner surface is the largest in the second bent portion. According to the present invention, the distance between the side surface and the inner surface is the largest in the second bent portion that is bent the second most. Thereby, the bending of the second bent portion is suppressed. It has been clarified that bending at the second bent portion causes harmonic vibration, and since the bending is suppressed, generation of harmonics can be prevented. Further, the CI value of the fundamental wave can be lowered by forming the groove.
(2) In this piezoelectric vibrating piece,
The first bent portion is a portion that is bent most in the fundamental wave mode and the second harmonic mode,
The second bent portion is a portion that bends next to the connecting portion in the second harmonic mode.
(3) In this piezoelectric vibrating piece,
Each of the vibrating arms may have an outer convex portion on the side surface at the second bent portion.
(4) In this piezoelectric vibrating piece,
The groove may have an inner convex portion on the inner surface at the second bent portion.
(5) In this piezoelectric vibrating piece,
The groove may have a length of 80% or more of the length of the vibrating arm.
(6) In this piezoelectric vibrating piece,
The groove may have a uniform depth over the entire length direction.
(7) In this piezoelectric vibrating piece,
The groove may be shallowest at the second bent portion.
(8) A piezoelectric vibrator according to the present invention includes a package, a piezoelectric vibrating piece electrically and mechanically connected to the package via a conductive adhesive, and housed in the package, and an upper surface of the package A piezoelectric vibrator having a lid for sealing,
The piezoelectric vibrating piece is
The base,
A pair of vibrating arms each extending from the base;
An excitation electrode film formed on each of the vibrating arms;
Including
Each of the vibrating arms has a front surface and a reverse surface facing each other, and side surfaces connected to both sides of the front and back surfaces,
A groove extending in the longitudinal direction of the vibrating arm is formed on each of the front and back surfaces,
The groove includes an inner surface extending back to back with the side surface;
The pair of vibrating arms flexibly vibrate so that the side surfaces approach and separate from each other, and have a first bent portion that is bent most greatly at a connection portion with the base portion, and then bend greatly after the connection portion. Having a second bent portion at a portion where an intermediate portion in the longitudinal direction of the groove is formed,
The distance between the side surface and the inner surface is the largest in the second bent portion,
It is characterized by that. According to the present invention, the distance between the side surface and the inner surface is the largest in the second bent portion that is bent the second most. Thereby, the bending of the second bent portion is suppressed. It has been clarified that bending at the second bent portion causes harmonic vibration, and since the bending is suppressed, generation of harmonics can be prevented. Further, the CI value of the fundamental wave can be lowered by forming the groove.
(9) In this piezoelectric vibrator,
The first bent portion of the piezoelectric vibrating piece is a portion bent most greatly in the fundamental wave mode and the second harmonic mode,
The second bent portion of the piezoelectric vibrating piece is a portion that bends next to the connection portion in the second harmonic mode.
It is characterized by that.

（第１の実施の形態）
図１は、本発明の第１の実施の形態に係る圧電振動片（音叉型圧電振動片）を示す平面図である。なお、圧電振動片の底面図は平面図と対称に表れる。圧電振動片は、水晶、タンタル酸リチウム、ニオブ酸リチウム等の圧電材料からなる。圧電振動片は、基部１２と、基部１２から延びる一対の振動腕１４と、を含む。 (First embodiment)
FIG. 1 is a plan view showing a piezoelectric vibrating piece (tuning fork type piezoelectric vibrating piece) according to a first embodiment of the present invention. The bottom view of the piezoelectric vibrating piece appears symmetrically with the plan view. The piezoelectric vibrating piece is made of a piezoelectric material such as quartz, lithium tantalate, or lithium niobate. The piezoelectric vibrating piece includes a base portion 12 and a pair of vibrating arms 14 extending from the base portion 12.

図２は、図１に示す圧電振動片のII−II線断面拡大図である。振動腕１４は、相互に反対を向く表裏面１６と、表裏面１６を両側で接続する第１及び第２の側面２１，２２とを有する。圧電振動片を水晶から構成する場合、水晶ウエハは、Ｘ軸、Ｙ軸及びＺ軸からなる直交座標系において、Ｚ軸を中心に時計回りに０度ないし５度の範囲で回転して切り出した水晶Ｚ板を所定の厚みに切断研磨して得られるものを用いる。   FIG. 2 is an enlarged cross-sectional view taken along the line II-II of the piezoelectric vibrating piece shown in FIG. The resonating arm 14 has front and back surfaces 16 facing opposite to each other, and first and second side surfaces 21 and 22 that connect the front and back surfaces 16 on both sides. When the piezoelectric vibrating piece is made of quartz, the quartz wafer is cut out by rotating in the range of 0 to 5 degrees clockwise around the Z axis in an orthogonal coordinate system composed of the X, Y, and Z axes. A crystal Z plate obtained by cutting and polishing to a predetermined thickness is used.

一方（図１で左側）の振動腕１４の第１の側面２１と、他方（図１で右側）の振動腕１４の第２の側面２２が対向するように並列している。第１の側面２１は、表裏面１６の間隔によって定義される振動腕１４の厚みの中央方向に高くなる山型となるように形成されている（図２参照）。第１の側面２１が描く山型の高さは、第１及び第２の側面２１，２２の間隔によって定義される振動腕１４の幅の、０％超１２．５％以下である。   The first side surface 21 of one (left side in FIG. 1) and the second side surface 22 of the other (right side in FIG. 1) vibration arm 14 are arranged in parallel. The first side surface 21 is formed to have a mountain shape that increases in the center direction of the thickness of the vibrating arm 14 defined by the distance between the front and back surfaces 16 (see FIG. 2). The height of the mountain shape drawn by the first side surface 21 is more than 0% and not more than 12.5% of the width of the vibrating arm 14 defined by the distance between the first and second side surfaces 21 and 22.

振動腕１４は、基部１２に接続される接続部２４において、基部１２側に向けて幅を拡げてあり、広い幅で基部１２に接続するので剛性が高くなっている。振動腕１４は、第１及び第２の側面２１，２２の間隔によって定義される幅が、基部１２から先端に向けて細くなる第１のテーパ部２６を含む。第１のテーパ部２６を形成することにより、振動腕１４は振動しやすくなっている。振動腕１４は、第１のテーパ部２６よりも先端に近い位置に、幅が第１のテーパ部２６から先端に向けて太くなる第２のテーパ部２８を含む。第２のテーパ部２８は、錘の機能を果たすので、振動周波数を低くすることができる。振動腕１４は、第１及び第２のテーパ部２６，２８が接続される幅変更点が溝３０よりも先端近くに位置するように形成されている。   The resonating arm 14 is wide in the connecting portion 24 connected to the base 12 toward the base 12 and is connected to the base 12 with a wide width, so that the rigidity is high. The vibrating arm 14 includes a first taper portion 26 whose width defined by the distance between the first and second side surfaces 21 and 22 becomes narrower from the base portion 12 toward the tip. By forming the first tapered portion 26, the vibrating arm 14 is easily vibrated. The vibrating arm 14 includes a second taper portion 28 whose width increases from the first taper portion 26 toward the tip at a position closer to the tip than the first taper portion 26. Since the second taper portion 28 functions as a weight, the vibration frequency can be lowered. The vibrating arm 14 is formed so that the width changing point to which the first and second taper portions 26 and 28 are connected is located closer to the tip than the groove 30.

振動腕１４には、表裏面１６に、長手方向に延びる溝３０がそれぞれ形成されている。溝３０によって振動腕１４が動きやすくなって効率的に振動するのでＣＩ値を下げることができる。溝３０は、振動腕１４の長さの８０％以上の長さを有する。また、溝３０は、振動腕１４の幅の６０〜９０％の幅を有する。   The vibrating arm 14 is formed with grooves 30 extending in the longitudinal direction on the front and back surfaces 16. Since the vibrating arm 14 is easily moved by the groove 30 and vibrates efficiently, the CI value can be lowered. The groove 30 has a length of 80% or more of the length of the vibrating arm 14. Further, the groove 30 has a width of 60 to 90% of the width of the vibrating arm 14.

溝３０は、第１の側面２１と背中合わせに延びる第１の内面３１と、第２の側面２２と背中合わせに延びる第２の内面３２と、を含む。第１の内面３１は第２の内面３２よりも、表裏面１６に対する角度が垂直に近くなっている。第１の内面３１は平坦面であってもよい。第２の内面３２も平坦面であってもよいが、図２に示す例では、異なる角度の面が接続されてなる。第１及び第２の側面２１，２２は、第２の内面３２よりも表裏面１６に対する角度（表裏面１６と接続する部分の角度）が垂直に近くなっている。   The groove 30 includes a first inner surface 31 extending back to back with the first side surface 21, and a second inner surface 32 extending back to back with the second side surface 22. The first inner surface 31 is more perpendicular to the front and back surfaces 16 than the second inner surface 32. The first inner surface 31 may be a flat surface. Although the 2nd inner surface 32 may also be a flat surface, in the example shown in FIG. 2, the surface of a different angle is connected. The first and second side surfaces 21 and 22 have an angle with respect to the front and back surfaces 16 (an angle of a portion connected to the front and back surfaces 16) closer to the vertical than the second inner surface 32.

図３は、図１に示す圧電振動片のIII−III線断面拡大図である。溝３０は、第１及び第２の内面３１，３２にそれぞれ内凸部３４が形成されている。内凸部３４の形成によって、溝３０の幅が最も狭くなっている。また、内凸部３４が形成された領域では、溝３０の深さも最も浅くなっている。これは、溝３０の形成にウエットエッチングを適用したためである。   3 is an enlarged sectional view taken along line III-III of the piezoelectric vibrating piece shown in FIG. In the groove 30, an inner convex portion 34 is formed on each of the first and second inner surfaces 31 and 32. Due to the formation of the inner protrusion 34, the width of the groove 30 is the narrowest. Further, in the region where the inner convex portion 34 is formed, the depth of the groove 30 is the shallowest. This is because wet etching is applied to the formation of the groove 30.

図４は、一対の振動腕が基本波モードで駆動されたときの圧電振動片を示す図である。一対の振動腕１４は、第１及び第２の側面２１，２２が相互に接近及び離隔するように屈曲振動する。振動腕１４は、最も大きく屈曲（応力集中）する第１の屈曲部１８を基部１２との接続部２４に有する。   FIG. 4 is a diagram illustrating the piezoelectric vibrating piece when the pair of vibrating arms is driven in the fundamental wave mode. The pair of vibrating arms 14 vibrate and vibrate so that the first and second side surfaces 21 and 22 approach and separate from each other. The resonating arm 14 has a first bent portion 18 that is bent most greatly (stress concentration) at a connection portion 24 with the base portion 12.

図５は、２次高調波モードによって一対の振動腕が振動するときの圧電振動片を示す図である。２次高調波モードにおいても、振動腕１４は、最も大きく屈曲する第１の屈曲部１８を基部１２との接続部２４に有する。また、振動腕１４は、接続部２４の次に大きく屈曲（応力集中）する第２の屈曲部２０を、溝３０の長さ方向の中間部（両端部を除く領域）が形成されている部分に有する。   FIG. 5 is a diagram illustrating the piezoelectric vibrating piece when the pair of vibrating arms vibrate in the second harmonic mode. Even in the second harmonic mode, the vibrating arm 14 has the first bent portion 18 that is bent most greatly at the connection portion 24 with the base portion 12. Further, the vibrating arm 14 is a portion where the second bent portion 20 that is bent (stress concentration) next to the connecting portion 24 is formed, and an intermediate portion (region excluding both end portions) in the length direction of the groove 30 is formed. Have.

本実施の形態によれば、二番目に最も大きく屈曲する第２の屈曲部２０において、第１の側面及び第１の内面２１，３１の間隔並びに第２の側面及び第２の内面２２，３２の間隔が、他の部分よりも大きくなっている。これによって、第２の屈曲部２０の屈曲が抑えられる。第２の屈曲部２０での屈曲が高調波の振動を生じさせることが明らかになっており、その屈曲が抑えられるので、高調波の発生を防止することができる。また、溝３０の形成によって基本波のＣＩ値を下げることができる。   According to the present embodiment, in the second bent portion 20 that is bent the second most, the distance between the first side surface and the first inner surfaces 21 and 31 and the second side surface and the second inner surfaces 22 and 32. The interval of is larger than other parts. Thereby, the bending of the second bent portion 20 is suppressed. It has been clarified that bending at the second bent portion 20 causes harmonic vibrations, and since the bending is suppressed, generation of harmonics can be prevented. Further, the CI value of the fundamental wave can be lowered by forming the groove 30.

圧電振動片は、一対の支持腕３６を含む。一対の支持腕３６は、基部１２から一対の振動腕１４が延びる方向とは交差方向であってそれぞれ相互に反対方向に延び、一対の振動腕１４の延びる方向に屈曲してさらに延びる。屈曲することで、支持腕３６は小型化される。支持腕３６は、パッケージに取り付けられる部分であり、支持腕３６での取り付けによって、振動腕１４及び基部１２は浮いた状態になる。   The piezoelectric vibrating piece includes a pair of support arms 36. The pair of support arms 36 extend in directions opposite to each other in a direction intersecting with the direction in which the pair of vibrating arms 14 extend from the base portion 12, and further bend and extend in the direction in which the pair of vibrating arms 14 extend. By bending, the support arm 36 is reduced in size. The support arm 36 is a part attached to the package, and the attachment of the support arm 36 causes the vibrating arm 14 and the base 12 to be in a floating state.

基部１２には、振動腕１４の表裏面１６と同じ側の面に括れた形状が表れるように、相互に対向方向に一対の切り込み３８が形成されている。一対の切り込み３８は、それぞれ、一対の支持腕３６が基部１２から延びて屈曲する方向の側で一対の支持腕３６に隣接して基部１２に形成されている。切り込み３８によって、振動腕１４の振動の伝達が遮断されるので、振動が基部１２や支持腕３６を介して外部に伝わること（振動漏れ）を抑制し、ＣＩ値の上昇を防止することができる。切り込み３８の長さ（深さ）は、基部１２の強度を確保できる範囲で長い（深い）ほど、振動漏れ抑制効果は大きい。一対の切り込み３８の間の幅（一対の切り込み３８に挟まれた部分の幅）は、一対の振動腕１４の対向する第１及び第２の側面２１，２２の間隔よりも小さくしてもよいし大きくしてもよいし、一対の振動腕１４の相互に反対を向く第１及び第２の側面２１，２２の距離よりも小さくしてもよいし大きくしてもよい。   A pair of cuts 38 are formed in the base 12 so as to face each other so that a shape confined to the surface on the same side as the front and back surfaces 16 of the vibrating arm 14 appears. The pair of cuts 38 are formed in the base 12 adjacent to the pair of support arms 36 on the side where the pair of support arms 36 extends from the base 12 and bends. Since the transmission of the vibration of the vibrating arm 14 is blocked by the notch 38, it is possible to suppress the vibration from being transmitted to the outside (vibration leakage) via the base 12 and the support arm 36, and to prevent the CI value from increasing. . As the length (depth) of the cut 38 is longer (deeper) within a range in which the strength of the base portion 12 can be secured, the vibration leakage suppressing effect is larger. The width between the pair of cuts 38 (the width of the portion sandwiched between the pair of cuts 38) may be smaller than the distance between the first and second side surfaces 21 and 22 of the pair of vibrating arms 14 facing each other. The distance may be smaller or larger than the distance between the first and second side surfaces 21 and 22 facing the opposite sides of the pair of vibrating arms 14.

振動腕１４には、励振電極膜が形成されている。励振電極膜は、１００Å以上３００Å以下の厚みを有する下地のＣｒ膜と、Ｃｒ膜上に形成された２００Å以上５００Å以下の厚みを有するＡｕ膜と、を含む多層構造であってもよい。Ｃｒ膜は水晶との密着性が高く、Ａｕ膜は電気抵抗が低く酸化し難い。励振電極膜は、第１及び第２の側面２１，２２にそれぞれ形成された第１及び第２の側面電極膜４２，４４と、第１及び第２の内面３１，３２にそれぞれ形成された第１及び第２の内面電極膜４６，４８と、を含む。励振電極膜によって、第１及び第２の励振電極５０，５２が構成される。   An excitation electrode film is formed on the vibrating arm 14. The excitation electrode film may have a multilayer structure including a base Cr film having a thickness of 100 to 300 mm and an Au film formed on the Cr film and having a thickness of 200 to 500 mm. The Cr film has high adhesion to the crystal, and the Au film has low electrical resistance and is difficult to oxidize. The excitation electrode films are formed on the first and second side electrode films 42 and 44 formed on the first and second side faces 21 and 22, respectively, and on the first and second inner face 31 and 32, respectively. 1 and second inner surface electrode films 46 and 48. First and second excitation electrodes 50 and 52 are constituted by the excitation electrode film.

第１の励振電極５０は、溝３０に形成された第１及び第２の内面電極膜４６，４８を含む。１つの溝３０に形成された第１及び第２の内面電極膜４６，４８は、相互に連続的に形成されて電気的に接続されている。表裏面１６の一方（例えば表面）の溝３０に形成された第１及び第２の内面電極膜４６，４８と、表裏面１６の他方（例えば裏面）の溝３０に形成された第１及び第２の内面電極膜４６，４８と、は電気的に接続されている。すなわち、表裏面１６それぞれに形成された一対の第１の励振電極５０は電気的に接続されている。また、一方の振動腕１４に形成された一対の第１の励振電極５０は、基部１２上の表裏面１６それぞれに形成された引き出し電極５４に接続され、これらの引き出し電極５４が、他方の振動腕１４の第１又は第２の側面電極膜４２，４４に接続されることで電気的に接続される。   The first excitation electrode 50 includes first and second inner surface electrode films 46 and 48 formed in the groove 30. The first and second inner surface electrode films 46 and 48 formed in one groove 30 are continuously formed and electrically connected to each other. The first and second inner surface electrode films 46 and 48 formed in the groove 30 on one side (for example, the front surface) of the front and back surfaces 16 and the first and first surfaces formed in the groove 30 on the other side (for example, the back surface) of the front and back surfaces 16. The two inner surface electrode films 46 and 48 are electrically connected. That is, the pair of first excitation electrodes 50 formed on the front and back surfaces 16 are electrically connected. The pair of first excitation electrodes 50 formed on one vibrating arm 14 is connected to the extraction electrodes 54 formed on the front and back surfaces 16 on the base 12, and these extraction electrodes 54 are connected to the other vibration electrode 14. Electrical connection is established by connecting to the first or second side electrode film 42, 44 of the arm 14.

第２の励振電極５２は、第１及び第２の側面電極膜４２，４４を含む。また、第１及び第２の側面電極膜４２，４４は電気的に接続されている。その電気的接続は、振動腕１４の溝３０が形成されていない部分（例えば先端部）において、表裏面１６の少なくとも一方（あるいは両方）上に形成された接続電極５６によってなされている。   The second excitation electrode 52 includes first and second side electrode films 42 and 44. The first and second side electrode films 42 and 44 are electrically connected. The electrical connection is made by a connection electrode 56 formed on at least one (or both) of the front and back surfaces 16 in a portion (for example, a tip portion) where the groove 30 of the vibrating arm 14 is not formed.

一方の振動腕１４に形成された第１の励振電極５０と、他方の振動腕１４に形成された第２の励振電極５２と、は基部１２上の引き出し電極５４で電気的に接続されている。引き出し電極５４は、第２の励振電極５２が形成される振動腕１４の隣に並ぶ支持腕３６上に至るまで形成されている。引き出し電極５４は、支持腕３６の表裏面１６（あるいはさらに側面）に形成されている。支持腕３６上で、引き出し電極５４を外部との電気的接続部にすることができる。   The first excitation electrode 50 formed on one vibrating arm 14 and the second excitation electrode 52 formed on the other vibrating arm 14 are electrically connected by a lead electrode 54 on the base 12. . The extraction electrode 54 is formed up to the support arm 36 arranged next to the vibrating arm 14 on which the second excitation electrode 52 is formed. The extraction electrode 54 is formed on the front and back surfaces 16 (or further side surfaces) of the support arm 36. On the support arm 36, the extraction electrode 54 can be an electrical connection portion with the outside.

本実施の形態では、第１の側面電極膜４２と第１の内面電極膜４６との間に電圧を印加し、第２の側面電極膜４４と第２の内面電極膜４８との間に電圧を印加することで、振動腕１４の一方の側端を伸ばし、他方の側端を縮ませて振動腕１４を屈曲させて振動させる。言い換えると、１つの振動腕１４において、第１及び第２の励振電極５０，５２間に電圧を印加して、振動腕１４の第１及び第２の側面２１，２２を伸縮させることで振動腕１４を振動させる。   In the present embodiment, a voltage is applied between the first side electrode film 42 and the first inner surface electrode film 46, and a voltage is applied between the second side electrode film 44 and the second inner surface electrode film 48. Is applied, one side end of the vibrating arm 14 is extended, and the other side end is contracted to bend and vibrate the vibrating arm 14. In other words, in one vibrating arm 14, a voltage is applied between the first and second excitation electrodes 50 and 52 to expand and contract the first and second side surfaces 21 and 22 of the vibrating arm 14. 14 is vibrated.

図６は、本実施の形態に係る圧電振動片の動作を説明する図である。図６に示すように、一方の振動腕１４の第１及び第２の励振電極５０，５２に電圧が印加され、他方の振動腕１４の第１及び第２の励振電極５０，５２に電圧が印加される。ここで、一方（左側）の振動腕１４の第１の励振電極５０と他方（右側）の振動腕１４の第２の励振電極５２が同じ電位（図６の例では＋電位）となり、一方（左側）の振動腕１４の第２の励振電極５２と他方（右側）の振動腕１４の第１の励振電極５０が同じ電位（図６の例では−電位）となるように、第１の励振電極５０及び第２の励振電極５２は、クロス配線によって交流電源に接続され、駆動電圧としての交番電圧が印加されるようになっている。印加電圧によって、図６に矢印で示すように電界が発生し、これにより、振動腕１４は、互いに逆相振動となるように（振動腕１４の先端側が互いに接近・離間するように）励振されて屈曲振動する。また、基本モードで振動するように交番電圧が調整されている。   FIG. 6 is a diagram for explaining the operation of the piezoelectric vibrating piece according to the present embodiment. As shown in FIG. 6, a voltage is applied to the first and second excitation electrodes 50 and 52 of one vibrating arm 14, and a voltage is applied to the first and second excitation electrodes 50 and 52 of the other vibrating arm 14. Applied. Here, the first excitation electrode 50 of one (left side) vibrating arm 14 and the second excitation electrode 52 of the other (right side) vibrating arm 14 have the same potential (+ potential in the example of FIG. 6), and one ( The first excitation is performed so that the second excitation electrode 52 of the left vibration arm 14 and the first excitation electrode 50 of the other (right) vibration arm 14 have the same potential (-potential in the example of FIG. 6). The electrode 50 and the second excitation electrode 52 are connected to an AC power supply by a cross wiring, and an alternating voltage is applied as a drive voltage. An electric field is generated by the applied voltage as shown by an arrow in FIG. 6, whereby the vibrating arms 14 are excited so as to be in opposite phase vibrations (so that the distal ends of the vibrating arms 14 approach and separate from each other). Bends and vibrates. The alternating voltage is adjusted so as to vibrate in the basic mode.

なお、本実施の形態に係る圧電振動片の製造方法は、上述した構成の説明から自明な事項を含む。   In addition, the manufacturing method of the piezoelectric vibrating piece according to the present embodiment includes matters that are obvious from the description of the configuration described above.

（変形例）
図７（Ａ）及び図７（Ｂ）は、本発明の第１の実施の形態に係る圧電振動片の変形例を示す平面図である。詳しくは、図７（Ａ）は図２の変形例であり、図７（Ｂ）は図３の変形例である。この変形例では、溝１３０の第１及び第２の内面１３１，１３２が表裏面１１６に対して垂直になっている。この形状は、溝１３０の形成にドライエッチングを適用することで可能となる。また、内凸部１３４の形成によって、溝１３０の幅が狭くなっているが、溝１３０の深さは長さ方向の全てにわたって均一になっている。これも、ドライエッチングを適用したことに起因する。 (Modification)
7A and 7B are plan views showing a modification of the piezoelectric vibrating piece according to the first embodiment of the present invention. Specifically, FIG. 7A is a modification of FIG. 2, and FIG. 7B is a modification of FIG. In this modification, the first and second inner surfaces 131 and 132 of the groove 130 are perpendicular to the front and back surfaces 116. This shape can be achieved by applying dry etching to the formation of the groove 130. Further, although the width of the groove 130 is narrowed by the formation of the inner convex portion 134, the depth of the groove 130 is uniform over the entire length direction. This is also due to the application of dry etching.

（第２の実施の形態）
図８は、本発明の第２の実施の形態に係る圧電振動片を示す平面図である。図９は、図８に示す圧電振動片のIX−IX線断面拡大図である。本実施の形態では、振動腕２１４は、第２の屈曲部２２０で、第１及び第２の側面２２１，２２２に外凸部２６０を有している。本実施の形態でも、二番目に最も大きく屈曲する第２の屈曲部２２０において、第１の側面及び第１の内面２２１，２３１の間隔並びに第２の側面及び第２の内面２２２，２３２の間隔が、他の部分よりも大きくなっているので、第２の屈曲部２２０の屈曲が抑えられる。これにより、高調波の発生を防止することができる。その他の構成及び製造方法は、第１の実施の形態で説明した内容が該当する。 (Second Embodiment)
FIG. 8 is a plan view showing a piezoelectric vibrating piece according to the second embodiment of the present invention. 9 is an enlarged cross-sectional view of the piezoelectric vibrating piece shown in FIG. 8 taken along the line IX-IX. In the present embodiment, the vibrating arm 214 is the second bent portion 220 and has outer convex portions 260 on the first and second side surfaces 221 and 222. Also in the present embodiment, in the second bent portion 220 that is bent the second most, the distance between the first side surface and the first inner surfaces 221, 231 and the distance between the second side surface and the second inner surfaces 222, 232 However, since it is larger than the other portions, the bending of the second bent portion 220 is suppressed. Thereby, generation | occurrence | production of a harmonic can be prevented. Other configurations and manufacturing methods correspond to those described in the first embodiment.

（第３の実施の形態）
図１０は、本発明の第３の実施の形態に係る圧電振動片を示す平面図である。図１１は、図１０に示す圧電振動片のXI−XI線断面拡大図である。本実施の形態では、振動腕３１４は、第２の屈曲部３２０で、第１及び第２の内面３３１，３３２に内凸部３３４を有し、かつ、第１及び第２の側面３２１，３２２に外凸部３６０を有している。本実施の形態でも、第２の屈曲部３２０の屈曲が抑えられるので、高調波の発生を防止することができる。その他の構成及び製造方法は、第１の実施の形態で説明した内容が該当する。 (Third embodiment)
FIG. 10 is a plan view showing a piezoelectric vibrating piece according to the third embodiment of the present invention. 11 is an enlarged cross-sectional view taken along line XI-XI of the piezoelectric vibrating piece shown in FIG. In the present embodiment, the resonating arm 314 is the second bent portion 320, and has the first and second inner surfaces 331 and 332, the inner protrusions 334, and the first and second side surfaces 321 and 322. Has an outer convex portion 360. Also in this embodiment, since the bending of the second bent portion 320 is suppressed, generation of harmonics can be prevented. Other configurations and manufacturing methods correspond to those described in the first embodiment.

（圧電振動子の構造）
図１２は、本実施の形態に係る音叉型圧電振動片が収納された音叉型圧電振動子を示す上面図であり、図１３は、図１２に示す音叉型圧電振動子のXIII−XIII線断面図である。 (Piezoelectric vibrator structure)
12 is a top view showing a tuning fork type piezoelectric vibrator in which the tuning fork type piezoelectric vibrating piece according to the present embodiment is housed, and FIG. 13 is a cross-sectional view taken along line XIII-XIII of the tuning fork type piezoelectric vibrator shown in FIG. FIG.

パッケージ４００は、第１の基板４０２、第２の基板４０４、パッケージフレーム４０６の３層のセラミックスグリーンシートを積層し、焼成し、接合することで構成されている。   The package 400 is configured by stacking, firing, and bonding three layers of ceramic green sheets of a first substrate 402, a second substrate 404, and a package frame 406.

第２の基板４０４の上面にはパッケージ４００の焼成前にマウント電極４０８が形成されている。マウント電極４０８は、導電性接着剤４１０が塗布され、導電性接着剤４１０を介して、音叉型振動片４１２の励振電極４１４が電気的機械的に接続されている。また、第２の基板４０４には、第２の孔４１６が形成されている。   A mount electrode 408 is formed on the upper surface of the second substrate 404 before the package 400 is fired. The mount electrode 408 is coated with a conductive adhesive 410, and the excitation electrode 414 of the tuning fork type vibrating piece 412 is electrically and mechanically connected through the conductive adhesive 410. Further, a second hole 416 is formed in the second substrate 404.

マウント電極４０８は、第２の基板４０４の側面および第１の基板４０２の側面に形成された金属層（図示せず）を介して第１の基板４０２の下面に露出する端子４１８に接続され、図示しない発振回路に接続される。或いは、マウント電極４０８は、第２の基板４０４の側面および第１の基板４０２の側面に代えて、スルーホール（図示せず）を介して第１の基板４０２の下面の端子４１８に接続しても良い。   The mount electrode 408 is connected to a terminal 418 exposed on the lower surface of the first substrate 402 through a metal layer (not shown) formed on the side surface of the second substrate 404 and the side surface of the first substrate 402. It is connected to an oscillation circuit (not shown). Alternatively, the mount electrode 408 is connected to the terminal 418 on the lower surface of the first substrate 402 via a through hole (not shown) instead of the side surface of the second substrate 404 and the side surface of the first substrate 402. Also good.

第１の基板４０２には、第２の孔４１６より大きな径を有する第１の孔４２０が、第２の孔４１６と重なる位置に設けられている。さらに、後述する封止材４２２との気密性を高めるため、第１の孔４２０の側壁に金属膜４２４が形成されている。   The first substrate 402 is provided with a first hole 420 having a diameter larger than that of the second hole 416 at a position overlapping the second hole 416. Further, a metal film 424 is formed on the side wall of the first hole 420 in order to improve hermeticity with a sealing material 422 to be described later.

さらに、パケージフレーム４０６は、上面開口を塞ぐように、蓋体４２６によって封止される。蓋体４２６は、周波数調整用のレーザービームＬＢが透過できれば良く、例えば、ガラスや光透過性セラミックスから構成してもよいし、金属枠にガラスがはめ込んだ構成などが採用される。また、蓋体４２６の構成に合わせて、ロウ材による封止や、シーム封止などが適宜採用される。   Further, the package frame 406 is sealed with a lid 426 so as to close the upper surface opening. The lid 426 only needs to be able to transmit the frequency-adjusting laser beam LB. For example, the lid 426 may be made of glass or light-transmitting ceramics, or may have a structure in which glass is fitted in a metal frame. Further, in accordance with the configuration of the lid body 426, sealing with a brazing material, seam sealing, or the like is appropriately employed.

蓋体４２６によってパッケージフレーム４０６が封止された後、音叉型圧電振動子４１２の上下を逆さにして、第１の孔４２０の径より径が小さく、第２の孔４１６より径が大きい封止材４２２（Ａｕ−Ｇｅ合金、Ａｕ−Ｓｎ合金等の合金からなる金属ボール）を第１の孔４２０に入れて真空で加熱することで第１の孔４２０が封止され、音叉型圧電振動片４１２は真空収納される。ここで、第２の孔４１６は封止材４２２がパッケージ４００の内部に入らないようにするストッパーとして働く。   After the package frame 406 is sealed by the lid 426, the tuning fork type piezoelectric vibrator 412 is turned upside down so that the diameter is smaller than the diameter of the first hole 420 and larger than the diameter of the second hole 416. A material 422 (a metal ball made of an alloy such as an Au—Ge alloy or an Au—Sn alloy) is placed in the first hole 420 and heated in a vacuum, whereby the first hole 420 is sealed, and the tuning fork type piezoelectric vibrating piece. 412 is stored in a vacuum. Here, the second hole 416 functions as a stopper that prevents the sealing material 422 from entering the package 400.

なお、本実施の形態によると、第１および第２の孔４２０、４１６を使わずに蓋封止工程を真空で行った場合に比べると、ＣＩ値が低い振動子を提供することが分かっている。これは、蓋封止工程においてガスが発生し、第１および第２の孔４２０、４１６を使わない場合には、パッケージ４００内部の真空度が低下するからであると考えられている。変形例として、第１及び第２の基板４０２，４０４の代わりに、パッケージフレーム４０６とその一部が重なる位置に封止孔を有する基板を用いて、その封止孔に金属ボールを入れて真空で加熱する手法を採用することもできる（図示せず）。このようにすれば、基板が１層で足りるので、パッケージを薄型化することができる。   According to the present embodiment, it can be seen that a vibrator having a low CI value is provided compared to the case where the lid sealing process is performed in vacuum without using the first and second holes 420 and 416. Yes. This is considered because gas is generated in the lid sealing process, and the vacuum inside the package 400 decreases when the first and second holes 420 and 416 are not used. As a modification, instead of using the first and second substrates 402 and 404, a substrate having a sealing hole at a position where the package frame 406 and a part thereof overlap with each other, a metal ball is put into the sealing hole and vacuum is applied. It is also possible to employ a method of heating with (not shown). In this way, a single substrate is sufficient, so that the package can be thinned.

本発明は、上述した実施の形態に限定されるものではなく、種々の変形が可能である。例えば、本発明は、実施の形態で説明した構成と実質的に同一の構成（例えば、機能、方法及び結果が同一の構成、あるいは目的及び結果が同一の構成）を含む。また、本発明は、実施の形態で説明した構成の本質的でない部分を置き換えた構成を含む。また、本発明は、実施の形態で説明した構成と同一の作用効果を奏する構成又は同一の目的を達成することができる構成を含む。また、本発明は、実施の形態で説明した構成に公知技術を付加した構成を含む。   The present invention is not limited to the above-described embodiments, and various modifications can be made. For example, the present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same purposes and results). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.

本発明の第１の実施の形態に係る圧電振動片（音叉型圧電振動片）を示す平面図である。It is a top view which shows the piezoelectric vibrating piece (tuning fork type piezoelectric vibrating piece) which concerns on the 1st Embodiment of this invention. 図１に示す圧電振動片のII−II線断面拡大図である。It is the II-II sectional view enlarged view of the piezoelectric vibrating piece shown in FIG. 図１に示す圧電振動片のIII−III線断面拡大図である。FIG. 3 is an enlarged sectional view taken along line III-III of the piezoelectric vibrating piece shown in FIG. 1. 一対の振動腕が駆動されたときの圧電振動片を示す図である。It is a figure which shows a piezoelectric vibrating piece when a pair of vibrating arm is driven. 一対の振動腕が駆動されたときの圧電振動片を示す図である。It is a figure which shows a piezoelectric vibrating piece when a pair of vibrating arm is driven. 本実施の形態に係る圧電振動片の動作を説明する図である。It is a figure explaining operation | movement of the piezoelectric vibrating piece which concerns on this Embodiment. 図７（Ａ）及び図７（Ｂ）は、本発明の第１の実施の形態に係る圧電振動片の変形例を示す平面図である。7A and 7B are plan views showing a modification of the piezoelectric vibrating piece according to the first embodiment of the present invention. 本発明の第２の実施の形態に係る圧電振動片を示す平面図である。It is a top view which shows the piezoelectric vibrating piece which concerns on the 2nd Embodiment of this invention. 図８に示す圧電振動片のIX−IX線断面拡大図である。It is the IX-IX sectional view enlarged view of the piezoelectric vibrating piece shown in FIG. 本発明の第３の実施の形態に係る圧電振動片を示す平面図である。It is a top view which shows the piezoelectric vibrating piece which concerns on the 3rd Embodiment of this invention. 図１０に示す圧電振動片のXI−XI線断面拡大図である。It is the XI-XI sectional view enlarged view of the piezoelectric vibrating piece shown in FIG. 図１２は、本実施の形態に係る音叉型圧電振動片が収納された音叉型圧電振動子を示す上面図である。FIG. 12 is a top view showing a tuning fork type piezoelectric vibrator in which the tuning fork type piezoelectric vibrating piece according to the present embodiment is housed. 図１３は、図１２に示す音叉型圧電振動子のXIII−XIII線断面図である。13 is a cross-sectional view of the tuning fork type piezoelectric vibrator shown in FIG. 12 taken along line XIII-XIII.

符号の説明Explanation of symbols

１２…基部、 １４…振動腕、 １６…表裏面、 １８…第１の屈曲部、 ２０…第２の屈曲部、 ２１…第１の側面、 ２２…第２の側面、 ２４…接続部、 ２６…第１のテーパ部、 ２８…第２のテーパ部、 ３０…溝、 ３１…第１の内面、 ３２…第２の内面、 ３４…内凸部、 ３６…支持腕、 ３８…切り込み、 ４２…第１の側面電極膜、 ４４…第２の側面電極膜、 ４６…第１の内面電極膜、 ４８…第２の内面電極膜、 ５０…第１の励振電極、 ５２…第２の励振電極、 ５４…引き出し電極、 ５６…接続電極、 １１６…表裏面、 １３０…溝、 １３１…第１の内面、 １３２…第２の内面、 １３４…内凸部、 ２１４…振動腕、 ２２０…第２の屈曲部、 ２２１…第１の側面、 ２２２…第２の側面、 ２３１…第１の内面、 ２３２…第２の内面、 ２６０…外凸部、 ３１４…振動腕、 ３２０…第２の屈曲部、 ３２１…第１の側面、 ３２２…第２の側面、 ３３１…第１の内面、 ３３２…第２の内面、 ３３４…内凸部、 ３６０…外凸部     DESCRIPTION OF SYMBOLS 12 ... Base part, 14 ... Vibrating arm, 16 ... Front and back, 18 ... 1st bending part, 20 ... 2nd bending part, 21 ... 1st side surface, 22 ... 2nd side surface, 24 ... Connection part, 26 ... 1st taper part, 28 ... 2nd taper part, 30 ... groove | channel, 31 ... 1st inner surface, 32 ... 2nd inner surface, 34 ... inward convex part, 36 ... support arm, 38 ... notch, 42 ... First side electrode film, 44 ... Second side electrode film, 46 ... First inner surface electrode film, 48 ... Second inner surface electrode film, 50 ... First excitation electrode, 52 ... Second excitation electrode, 54 ... Extraction electrode, 56 ... Connection electrode, 116 ... Front and back surfaces, 130 ... Groove, 131 ... First inner surface, 132 ... Second inner surface, 134 ... Inner convex portion, 214 ... Vibrating arm, 220 ... Second bending 221 ... 1st side surface, 222 ... 2nd side surface, 231 ... 1st inner surface, 232: Second inner surface, 260: Outer convex portion, 314 ... Vibrating arm, 320 ... Second bent portion, 321 ... First side surface, 322 ... Second side surface, 331 ... First inner surface, 332 ... First 2 inner surface, 334 ... inner convex part, 360 ... outer convex part

Claims (9)

基部と、
前記基部からそれぞれ延びる一対の振動腕と、
それぞれの前記振動腕に形成されている励振電極膜と、
を含み、
それぞれの前記振動腕は、相互に反対を向く表裏面と、前記表裏面の両側に接続される側面と、を有し、
前記表裏面には、それぞれ、前記振動腕の長手方向に延びる溝が形成され、
前記溝は、前記側面と背中合わせに延びる内面を含み、
前記一対の振動腕は、前記側面が相互に接近及び離隔するように屈曲振動し、最も大きく屈曲する第１の屈曲部を前記基部との接続部に有し、前記接続部の次に大きく屈曲する第２の屈曲部を前記溝の長さ方向の中間部が形成されている部分に有し、
前記側面と前記内面の間隔は、前記第２の屈曲部において最も大きい圧電振動片。 The base,
A pair of vibrating arms each extending from the base;
An excitation electrode film formed on each of the vibrating arms;
Including
Each of the vibrating arms has a front surface and a reverse surface facing each other, and side surfaces connected to both sides of the front and back surfaces,
A groove extending in the longitudinal direction of the vibrating arm is formed on each of the front and back surfaces,
The groove includes an inner surface extending back to back with the side surface;
The pair of vibrating arms flexibly vibrate so that the side surfaces approach and separate from each other, and have a first bent portion that is bent most greatly at a connection portion with the base portion, and then bend greatly after the connection portion. Having a second bent portion at a portion where an intermediate portion in the longitudinal direction of the groove is formed,
The distance between the side surface and the inner surface is the largest piezoelectric vibrating piece in the second bent portion. 請求項１に記載された圧電振動片において、
前記第１の屈曲部は、基本波モードおよび２次高調波モードにおいて最も大きく屈曲する部分であり、
前記第２の屈曲部は、２次高調波モードにおいて、前記接続部の次に大きく屈曲する部分であることを特徴とする圧電振動片。 The piezoelectric vibrating piece according to claim 1,
The first bent portion is a portion that is bent most in the fundamental wave mode and the second harmonic mode,
The piezoelectric vibrating piece according to claim 2, wherein the second bent portion is a portion that bends next to the connecting portion in the second harmonic mode. 請求項１又は２に記載された圧電振動片において、
それぞれの前記振動腕は、前記第２の屈曲部で前記側面に外凸部を有する圧電振動片。 In the piezoelectric vibrating piece according to claim 1 or 2,
Each of the vibrating arms is a piezoelectric vibrating piece having an outer convex portion on the side surface at the second bent portion. 請求項１から３のいずれか１項に記載された圧電振動片において、
前記溝は、前記第２の屈曲部で前記内面に内凸部を有する圧電振動片。 In the piezoelectric vibrating piece according to any one of claims 1 to 3,
The groove is a piezoelectric vibrating piece having an inner convex portion on the inner surface at the second bent portion. 請求項１から４のいずれか１項に記載された圧電振動片において、
前記溝は、前記振動腕の長さの８０％以上の長さを有する圧電振動片。 In the piezoelectric vibrating piece according to any one of claims 1 to 4,
The groove is a piezoelectric vibrating piece having a length of 80% or more of the length of the vibrating arm. 請求項１から５のいずれか１項に記載された圧電振動片において、
前記溝は、長さ方向の全てにわたって深さが均一である圧電振動片。 In the piezoelectric vibrating piece according to any one of claims 1 to 5,
The groove is a piezoelectric vibrating piece having a uniform depth over the entire length direction. 請求項１から５のいずれか１項に記載された圧電振動片において、
前記溝は、前記第２の屈曲部で最も深さが浅い圧電振動片。 In the piezoelectric vibrating piece according to any one of claims 1 to 5,
The groove is a piezoelectric vibrating piece having a shallowest depth at the second bent portion. パッケージと、前記パッケージに導電性接着剤を介して電気的機械的に接続され、かつ、前記パッケージに収納される圧電振動片と、前記パッケージの上面を封止する蓋体と、を有する圧電振動子であって、
前記圧電振動片は、
基部と、
前記基部からそれぞれ延びる一対の振動腕と、
それぞれの前記振動腕に形成されている励振電極膜と、
を含み、
それぞれの前記振動腕は、相互に反対を向く表裏面と、前記表裏面の両側に接続される側面と、を有し、
前記表裏面には、それぞれ、前記振動腕の長手方向に延びる溝が形成され、
前記溝は、前記側面と背中合わせに延びる内面を含み、
前記一対の振動腕は、前記側面が相互に接近及び離隔するように屈曲振動し、最も大きく屈曲する第１の屈曲部を前記基部との接続部に有し、前記接続部の次に大きく屈曲する第２の屈曲部を前記溝の長さ方向の中間部が形成されている部分に有し、
前記側面と前記内面の間隔は、前記第２の屈曲部において最も大きい、
ことを特徴とする圧電振動子。 Piezoelectric vibration having a package, a piezoelectric vibrating piece electrically and mechanically connected to the package via a conductive adhesive, and housed in the package, and a lid for sealing the upper surface of the package A child,
The piezoelectric vibrating piece is
The base,
A pair of vibrating arms each extending from the base;
An excitation electrode film formed on each of the vibrating arms;
Including
Each of the vibrating arms has a front surface and a reverse surface facing each other, and side surfaces connected to both sides of the front and back surfaces,
A groove extending in the longitudinal direction of the vibrating arm is formed on each of the front and back surfaces,
The groove includes an inner surface extending back to back with the side surface;
The pair of vibrating arms flexibly vibrate so that the side surfaces approach and separate from each other, and have a first bent portion that is bent most greatly at a connection portion with the base portion, and then bend greatly after the connection portion. Having a second bent portion at a portion where an intermediate portion in the longitudinal direction of the groove is formed,
The distance between the side surface and the inner surface is the largest in the second bent portion,
A piezoelectric vibrator characterized by that. 請求項８に記載された圧電振動子において、
前記圧電振動片の前記第１の屈曲部は、基本波モードおよび２次高調波モードにおいて最も大きく屈曲する部分であり、
前記圧電振動片の前記第２の屈曲部は、２次高調波モードにおいて、前記接続部の次に大きく屈曲する部分である、
ことを特徴とする圧電振動子。 The piezoelectric vibrator according to claim 8, wherein
The first bent portion of the piezoelectric vibrating piece is a portion bent most greatly in the fundamental wave mode and the second harmonic mode,
The second bent portion of the piezoelectric vibrating piece is a portion that bends next to the connection portion in the second harmonic mode.
A piezoelectric vibrator characterized by that.
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JP2010193133A (en) * 2009-02-18 2010-09-02 Epson Toyocom Corp Bending vibrator piece and bending vibrator
KR101074975B1 (en) 2009-09-08 2011-10-21 세이코 엡슨 가부시키가이샤 Flexural vibration piece, flexural vibrator, and electronic device
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