JP2008281837A - Exposure device - Google Patents

Exposure device Download PDF

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Publication number
JP2008281837A
JP2008281837A JP2007126680A JP2007126680A JP2008281837A JP 2008281837 A JP2008281837 A JP 2008281837A JP 2007126680 A JP2007126680 A JP 2007126680A JP 2007126680 A JP2007126680 A JP 2007126680A JP 2008281837 A JP2008281837 A JP 2008281837A
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Japan
Prior art keywords
filter
tile
exposure apparatus
contact
end faces
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Abandoned
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JP2007126680A
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Japanese (ja)
Inventor
Toshiya Suzuki
俊也 鈴木
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Toshiba Lighting and Technology Corp
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Harison Toshiba Lighting Corp
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Priority to JP2007126680A priority Critical patent/JP2008281837A/en
Priority to CNA2008100992069A priority patent/CN101303538A/en
Priority to TW097116999A priority patent/TW200907521A/en
Priority to KR1020080043111A priority patent/KR20080100135A/en
Publication of JP2008281837A publication Critical patent/JP2008281837A/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exposure device which is equipped with a window member with an excellent manufacturing yield. <P>SOLUTION: A filter 6 is constructed by combining a plurality of tile-shaped filters 10 and arranging them on a surface of a glass plate 5. The filter 6 is arranged on the surface of the glass plate 5 so as not to form gaps and to be in contact with the surface of the glass plate 5, and its entire circumferential section is held with a holding rib 7 provided on a casing 4. The tile-shaped filters 10 are in contact with one another on their end faces without any gap in-between, and their contact faces 9 are formed so as to be vertically superposed on each other. Four end faces of the tile-shaped filter 10 are obliquely cut so as to form substantially trapezoidal sections, and slopes are formed for respective end faces. The slopes are superposed so as to hold adjacent end faces vertically reverse to each other and the respective tile-shaped filters 10 are arranged so as to be combined with one another as the filter 6 in figure 2. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

本発明は、光洗浄、ＵＶ硬化、光化学反応、接着などに用いられる露光装置に関する。   The present invention relates to an exposure apparatus used for photocleaning, UV curing, photochemical reaction, adhesion, and the like.

従来において、液晶パネル面積の大型化に伴い、その製造工程に用いる露光装置が備える窓部材の面積も大型化している。このため、窓部材と共に一体的に構成されたフィルタ材の面積も大型化している。このフィルタ材は１枚物で製作され、重量増加防止などの理由から薄く作られている（特許文献１参照）。
特開平９−１２７３００号公報 2. Description of the Related Art Conventionally, along with an increase in the area of a liquid crystal panel, the area of a window member provided in an exposure apparatus used in the manufacturing process has also increased. For this reason, the area of the filter material integrated with the window member is also increased. This filter material is manufactured as a single piece and is made thin for reasons such as prevention of weight increase (see Patent Document 1).
JP-A-9-127300

ところが、窓部材の面積が大型化しても窓部材に求められる厚みの均一性の要求は変わらない。大型で均一な厚みの窓部材を実現するには、この窓部材の面のうちのどの場所においても光学特性が揃っている必要があり、製造技術の難易度が高まっている。この難易度の高まりに起因して、液晶パネルの製造プロセスに用いる製造設備を製造する際の歩留まりに影響を与える可能性があった。   However, even if the area of the window member is increased, the requirement for uniformity of thickness required for the window member does not change. In order to realize a large-sized and uniform window member, it is necessary to have optical characteristics at any location on the surface of the window member, which increases the difficulty of manufacturing technology. Due to this increase in difficulty, there is a possibility of affecting the yield when manufacturing the manufacturing equipment used in the manufacturing process of the liquid crystal panel.

本発明の目的は、上記に鑑みてなされたものであり、製造の歩留まりが良好な窓部材を備えた露光装置を提供することにある。   An object of the present invention is to provide an exposure apparatus provided with a window member having a good manufacturing yield.

本発明に係る露光装置は、希ガスと水銀とハロゲン金属がガラス管内に封入され、前記ガラス管内の放電空間に配置された電極と、該電極に接続されて点灯に必要な電力を供給するための電源と、前記点灯における光について特定の波長域のみを透過させるためのフィルタと、を備えた露光装置において、前記フィルタは複数枚のタイル状フィルタが互いに隙間無く接して組み合わされて構成されていることを特徴とする。   In the exposure apparatus according to the present invention, a rare gas, mercury, and a halogen metal are enclosed in a glass tube, an electrode disposed in a discharge space in the glass tube, and an electric power necessary for lighting connected to the electrode are supplied. And a filter for transmitting only a specific wavelength range of the light in the lighting, the filter is configured by combining a plurality of tile-shaped filters in contact with each other without a gap. It is characterized by being.

また、請求項２に記載の本発明は、請求項１において、前記タイル状フィルタは、垂直下方へ傾斜して延伸する端面を全周に有し、隣接する前記端面の斜面同士が接するように前記タイル状フィルタの一方に対し隣接の他方が裏面を向けて前記配置されていることを特徴とする。   Moreover, the present invention according to claim 2 is the invention according to claim 1, wherein the tile-shaped filter has an end surface inclined and extending vertically downward, and the inclined surfaces of the adjacent end surfaces are in contact with each other. The other side adjacent to one of the tile-shaped filters is arranged with the back surface facing.

また、請求項３に記載の本発明は、請求項１または２において、前記タイル状フィルタは、多角形に形成された略板形状であることを特徴とする。   According to a third aspect of the present invention, in the first or second aspect, the tile filter has a substantially plate shape formed in a polygonal shape.

本発明によれば、製造の歩留まりが良好な窓部材を備えた露光装置を提供することができる。   According to the present invention, it is possible to provide an exposure apparatus provided with a window member having a good manufacturing yield.

図１には、本発明の露光装置の実施の形態を説明するための構成図を示している。この図１には、露光装置１と、この露光装置１の本体を構成する筐体４と、この筐体４の内部空間に配置されたランプ２と、反射板３と、ランプ２から筐体４の外部へ放射される光を透過するガラス板５と、このガラス板５の面に配置されたフィルタ６と、が示されている。   FIG. 1 is a block diagram for explaining an embodiment of the exposure apparatus of the present invention. FIG. 1 shows an exposure apparatus 1, a casing 4 constituting the main body of the exposure apparatus 1, a lamp 2 disposed in the internal space of the casing 4, a reflector 3, and a lamp 2 to a casing. The glass plate 5 which permeate | transmits the light radiated | emitted to the exterior of 4 and the filter 6 arrange | positioned at the surface of this glass plate 5 are shown.

この図１に示した露光装置１は紫外線を対象物へ照射するための構成を備え、たとえば液晶パネルの製造工程において、製造過程の液晶パネルに紫外線照射をして不純物を除去するための光洗浄工程に用いられる。   The exposure apparatus 1 shown in FIG. 1 has a configuration for irradiating an object with ultraviolet rays. For example, in a manufacturing process of a liquid crystal panel, optical cleaning for irradiating the liquid crystal panel in the manufacturing process with ultraviolet rays to remove impurities. Used in the process.

露光装置１は、その内部に紫外線を発生させるためのランプ２を複数本備えている。このランプ２には、ガラス管などで形成された中空パイプ内に発光用希ガスと水銀及びハロゲンメタルが封入され、さらに電圧印加のための図示しない電極が配置されて構成されたメタルハライドランプを適用している。そしてランプ２の電極に電源より電圧を印加することにより紫外線が放射される。   The exposure apparatus 1 includes a plurality of lamps 2 for generating ultraviolet rays therein. The lamp 2 is a metal halide lamp in which a rare gas for light emission, mercury and a halogen metal are enclosed in a hollow pipe formed of a glass tube or the like, and an electrode (not shown) for applying a voltage is arranged. is doing. Then, by applying a voltage from the power source to the electrode of the lamp 2, ultraviolet rays are emitted.

それぞれのランプ２から放射された紫外線は、ランプ２の背面に配置された反射板３に到達して反射し、露光装置１の外部方向へ集光される。反射板３は表面を鏡面仕上げにされており、ランプ２と等間隔になるように配置されている。たとえば、ランプ２の円筒面と等間隔の円周位置に配置されている。   The ultraviolet rays radiated from the respective lamps 2 reach the reflecting plate 3 disposed on the back surface of the lamps 2 and are reflected and condensed toward the outside of the exposure apparatus 1. The reflecting plate 3 has a mirror-finished surface and is arranged at equal intervals with the lamp 2. For example, it is arranged at a circumferential position equidistant from the cylindrical surface of the lamp 2.

ランプ２から直接放射された紫外線と反射板３に反射して集光された紫外線は一緒にフィルタ６へ入射する。フィルタ６は波長が３００ｎｍ以下の光のみを透過する特性を備えていることが好ましい。このフィルタ６を備えることでランプ２から照射される３００ｎｍ以上の不要な波長の光を遮断し、光洗浄に有効な１８５ｎｍと２５４ｎｍの光を対象物へ効率よく照射することができる。   The ultraviolet rays directly emitted from the lamp 2 and the ultraviolet rays reflected and collected by the reflector 3 are incident on the filter 6 together. The filter 6 preferably has a characteristic of transmitting only light having a wavelength of 300 nm or less. By providing this filter 6, light with an unnecessary wavelength of 300 nm or more emitted from the lamp 2 can be blocked, and light of 185 nm and 254 nm effective for light cleaning can be efficiently irradiated to the object.

なお、このフィルタ６は一般に知られている吸収ガラスを適用してもよく、その組成の一例としては、ＳｉＯ2、Ｂ2Ｏ3、Ｐ2Ｏ5、Ａｌ2Ｏ3、Ｌｉ2Ｏ、Ｎａ2Ｏ、Ｋ2Ｏ、Ｒｂ2Ｏ、Ｃｓ2Ｏ、ＭｇＯ、ＣａＯ、ＺｎＯ、ＢａＯ、ＳｒＯ、ＰｂＯ、ＺｒＯ2、Ｌａ2Ｏ3、Ｙ2Ｏ3、Ｔａ2Ｏ3及びＧｄ2Ｏ3の中から選択されて、特定の割合で組合せたものでもよい。 Incidentally, the filter 6 may be applied to absorbing glass which is generally known, as an example of the composition, SiO 2, B 2 O 3 , P 2 O 5, Al 2 O 3, Li 2 O, Na 2 O, K 2 O, Rb 2 O, Cs 2 O, MgO, CaO, ZnO, BaO, SrO, PbO, ZrO 2 , La 2 O 3 , Y 2 O 3 , Ta 2 O 3 and Gd 2 O 3 It may be selected from among them and combined at a specific ratio.

次の図２には、本発明の露光装置の実施の形態に係るフィルタ６の配置例を説明するための構成図を示す。この図２は露光装置１のフィルタ６付近の垂直断面における構成を図示している。   FIG. 2 is a block diagram for explaining an arrangement example of the filter 6 according to the embodiment of the exposure apparatus of the present invention. FIG. 2 shows a configuration in a vertical section near the filter 6 of the exposure apparatus 1.

この図２においてフィルタ６は、複数のタイル状フィルタ１０を組み合わせてガラス板５の表面上に配置して構成されている。ガラス板５は紫外線を透過しフィルタとしては機能せず、複数枚のタイル状フィルタ１０を支持している。ガラス板５の周端部は、その全周にわたって筐体４に一体に設けられた支持リブ８により所定位置に支持されている。支持リブ８の開口部分は開口部２２であって、ここからフィルタ６を透過した紫外線が外部へ照射される。   In FIG. 2, the filter 6 is configured by combining a plurality of tile-shaped filters 10 and arranging them on the surface of the glass plate 5. The glass plate 5 transmits ultraviolet rays and does not function as a filter, and supports a plurality of tile filters 10. The peripheral edge of the glass plate 5 is supported at a predetermined position by support ribs 8 provided integrally with the housing 4 over the entire periphery. The opening portion of the support rib 8 is an opening portion 22 from which ultraviolet rays that have passed through the filter 6 are irradiated to the outside.

また、複数枚のタイル状フィルタ１０が組み合わされて構成されたフィルタ６は、ガラス板５の表面に隙間無く相互に接して配置されている。フィルタ６の全周端部は筐体４に備わる押さえリブ７によって保持されている。   Moreover, the filter 6 configured by combining a plurality of tile-shaped filters 10 is disposed in contact with the surface of the glass plate 5 without any gap. The entire peripheral edge of the filter 6 is held by a holding rib 7 provided in the housing 4.

また、タイル状フィルタ１０は端面同士が相互に隙間なく接しており、その接触面９は上下から相互に重なり合うように形成されている。接触面９を形成するために、たとえば断面が略台形となるようにタイル状フィルタ１０の４つの端面を斜めに切除して、端面にそれぞれ斜面を形成する。この斜面同士を隣り合う端面同士で上下逆に重ね、図２中のフィルタ６のようにタイル状フィルタ１０同士を組み合わせて配置する。このように重ね合わせた配置をすることにより、紫外線が接合部分の隙間からタイル状フィルタ１０を透過せず直接外部へ漏れることを阻止している。   In addition, the end faces of the tile filter 10 are in contact with each other without a gap, and the contact surfaces 9 are formed so as to overlap each other from above and below. In order to form the contact surface 9, for example, the four end surfaces of the tile filter 10 are cut obliquely so that the cross section has a substantially trapezoidal shape, and inclined surfaces are respectively formed on the end surfaces. The slopes are overlapped upside down at adjacent end faces, and tile filters 10 are combined and arranged as a filter 6 in FIG. By arranging in such a manner, ultraviolet rays are prevented from leaking directly from the gap between the joint portions to the outside without passing through the tile filter 10.

次の図３は、フィルタ６を構成するタイル状フィルタ１０の配置の一例を示している。この図３はタイル状フィルタ１０をガラス板５上に隙間なく敷き詰めた状態を示しており、図２に示したフィルタ６を垂直上方から見下ろした図である。   Next, FIG. 3 shows an example of the arrangement of the tile filters 10 constituting the filter 6. FIG. 3 shows a state in which the tile-like filter 10 is spread on the glass plate 5 without a gap, and is a view of the filter 6 shown in FIG.

タイル状フィルタ１０は正方形に形成され、その４つの端面は斜めに形成されている。この斜めに形成された端面同士が重なり合い接触して接触面９を形成している。この接触面９は垂直に対して斜めの面同士により形成されているので、隙間が生じず紫外線の光漏れも生じない。またタイル状フィルタ１０を配置する場合に、多少の配置位置のばらつきが生じても、端面が斜めに形成されていることにより、隣り合う２辺同士の斜面の重なり合いがズレるのみで隙間は生じず光漏れも生じない。   The tile filter 10 is formed in a square shape, and its four end faces are formed obliquely. The obliquely formed end faces overlap and come into contact with each other to form a contact surface 9. Since the contact surfaces 9 are formed by surfaces which are oblique with respect to the vertical, no gap is generated, and no ultraviolet light leaks. Further, when the tile-like filter 10 is arranged, even if there is some variation in the arrangement position, the end faces are formed diagonally, so that the overlap of the slopes of the two adjacent sides is displaced and no gap is produced. There is no light leakage.

次の図４には、フィルタ６の変形例を説明するための説明図を示している。この図４においては、図３に示したタイル状フィルタ１０が正方形であったことに対し、正六角形のタイル状フィルタ２１が敷き詰められている。このタイル状フィルタ２１の集合によりフィルタ２０が構成されている。複数のタイル状フィルタ２１は相互に接して組み合わされ、図２に示したガラス板５の表面上に配置されている。   FIG. 4 is an explanatory diagram for explaining a modification of the filter 6. In FIG. 4, the tile filter 10 shown in FIG. 3 is square, but a regular hexagonal tile filter 21 is spread. The set of tile-shaped filters 21 constitutes a filter 20. The plurality of tile-shaped filters 21 are combined in contact with each other and arranged on the surface of the glass plate 5 shown in FIG.

タイル状フィルタ２１の６つの端面はそれぞれタイル状フィルタ１０と同様に斜めに形成されている。このため、多少の配置ずれが生じても、隣り合う端面同士の重なり合いにより光漏れを未然に防いでいる。   The six end faces of the tile filter 21 are formed obliquely in the same manner as the tile filter 10. For this reason, even if a slight misalignment occurs, light leakage is prevented in advance by overlapping of adjacent end faces.

なお、フィルタ２０の端面は六角形のタイル状フィルタ２１の組み合わせに起因して辺部形状が不定形となるが、押さえリブ７の開口部２２の開口面積をフィルタ２０よりも小さくして、この不定形部分の影響を防止している。   Note that the end surface of the filter 20 has an indefinite side shape due to the combination of the hexagonal tile-shaped filters 21, but the opening area of the opening 22 of the holding rib 7 is smaller than that of the filter 20. Prevents the influence of irregular parts.

また、本実施の形態ではタイル状フィルタ１０、２１について説明したが、その形状は正方形や正六角形に限定することはなく、他の多角形を用いてもよい。そして、これらの多角形を適用する場合には、好ましくは多角形の頂点部分の角を面取り加工することにより、角部分が衝突した場合の欠損が生じるのを防止できる。   In the present embodiment, the tile filters 10 and 21 have been described. However, the shape is not limited to a square or a regular hexagon, and other polygons may be used. And when applying these polygons, it is possible to prevent defects when the corners collide, preferably by chamfering the corners of the vertexes of the polygons.

また、タイル状フィルタ２１を複数枚で組み合わせてフィルタ６を構成できるので、タイル状フィルタ６を均一なフィルタ特性で歩留まりよく容易に製造することができ、それらを組み合わせたフィルタ６の製造歩留まりも良好となる。   In addition, since the filter 6 can be configured by combining a plurality of tile-shaped filters 21, the tile-shaped filter 6 can be easily manufactured with uniform filter characteristics and good yield, and the manufacturing yield of the filter 6 combining them is also good. It becomes.

以上説明した実施の形態によれば、製造の歩留まりが良好な窓部材を備えた露光装置を提供することができる。   According to the embodiment described above, it is possible to provide an exposure apparatus provided with a window member having a good manufacturing yield.

露光装置の実施の形態を説明するための構成図を示す。The block diagram for demonstrating embodiment of exposure apparatus is shown. 露光装置の実施の形態に係るフィルタの配置例を説明するための構成図を示す。The block diagram for demonstrating the example of arrangement | positioning of the filter which concerns on embodiment of exposure apparatus is shown. 露光装置の実施の形態に係るフィルタの配置例を説明するための説明図を示す。An explanatory view for explaining an example of arrangement of a filter concerning an embodiment of an exposure device is shown. 露光装置の実施の形態に係るフィルタの変形例を説明するための説明図を示す。Explanatory drawing for demonstrating the modification of the filter which concerns on embodiment of exposure apparatus is shown.

符号の説明Explanation of symbols

１…露光装置
２…ランプ
３…反射板
４…筐体
５…ガラス板
６…フィルタ
９…接合部
１０…タイル状フィルタ DESCRIPTION OF SYMBOLS 1 ... Exposure apparatus 2 ... Lamp 3 ... Reflecting plate 4 ... Housing 5 ... Glass plate 6 ... Filter 9 ... Joint part 10 ... Tile filter

Claims (3)

希ガスと水銀とハロゲン金属がガラス管内に封入され、前記ガラス管内の放電空間に配置された電極と、該電極に接続されて点灯に必要な電力を供給するための電源と、前記点灯における光について特定の波長域のみを透過させるためのフィルタと、を備えた露光装置において、
前記フィルタは複数枚のタイル状フィルタが互いに隙間無く接して組み合わされて構成されていること
を特徴とする露光装置。 A rare gas, mercury, and a halogen metal are enclosed in a glass tube, an electrode disposed in a discharge space in the glass tube, a power source connected to the electrode to supply power necessary for lighting, and light in the lighting In an exposure apparatus comprising: a filter for transmitting only a specific wavelength range for
2. The exposure apparatus according to claim 1, wherein the filter is configured by combining a plurality of tile filters in contact with each other without any gap. 前記タイル状フィルタは、
垂直下方へ傾斜して延伸する端面を全周に有し、隣接する前記端面の斜面同士が接するように前記タイル状フィルタの一方に対し隣接の他方が裏面を向けて前記配置されていること
を特徴とする請求項１に記載の露光装置。 The tile filter is
It has an end face that is inclined downward and extends vertically, and is arranged so that the slopes of the adjacent end faces are in contact with each other so that the other of the tile-shaped filters faces the back side. The exposure apparatus according to claim 1, wherein: 前記タイル状フィルタは、
多角形に形成された略板形状であること
を特徴とする請求項１または２に記載の露光装置。 The tile filter is
The exposure apparatus according to claim 1, wherein the exposure apparatus has a substantially plate shape formed in a polygonal shape.
JP2007126680A 2007-05-11 2007-05-11 Exposure device Abandoned JP2008281837A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007126680A JP2008281837A (en) 2007-05-11 2007-05-11 Exposure device
CNA2008100992069A CN101303538A (en) 2007-05-11 2008-05-08 Exposure apparatus
TW097116999A TW200907521A (en) 2007-05-11 2008-05-08 Exposure device
KR1020080043111A KR20080100135A (en) 2007-05-11 2008-05-09 Exposure apparatus

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182989A (en) * 2009-02-09 2010-08-19 Ushio Inc Light irradiating device

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Publication number Priority date Publication date Assignee Title
KR101585966B1 (en) * 2015-06-10 2016-01-15 유니램 주식회사 Long Arc UV Lamp

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010182989A (en) * 2009-02-09 2010-08-19 Ushio Inc Light irradiating device
TWI392975B (en) * 2009-02-09 2013-04-11 Ushio Electric Inc Light irradiation device

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TW200907521A (en) 2009-02-16
KR20080100135A (en) 2008-11-14
CN101303538A (en) 2008-11-12

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