JP2008241438A - ボロメータ型THz波検出器 - Google Patents
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0215—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/0235—Spacers, e.g. for avoidance of stiction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
- G01J5/024—Special manufacturing steps or sacrificial layers or layer structures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0815—Light concentrators, collectors or condensers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
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- G01J5/08—Optical arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
【解決手段】ボロメータ薄膜7を含む温度検出部14(ダイアフラム)が支持部13によって回路基板2から浮いた状態で支持されるマイクロブリッジ構造において、回路基板2上にTHz波を反射する反射膜3を形成し、温度検出部14上にTHz波を吸収する吸収膜11を形成し、反射膜3と温度検出部14とで光学的共振構造を形成すると共に、反射膜3と温度検出部14との間隔は赤外線の波長を基準にして赤外線の波長の略1/4(例えば、略1.5乃至2.5の範囲)に設定し、温度検出部14のシート抵抗はTHz波を基準にしてTHz波の吸収率が所定値以上となる範囲(略10乃至100Ω/sq.の範囲)に設定する。これにより、ボロメータ型赤外線検出器の構造及び製造技術を利用しつつTHz波の吸収率を大幅に改善する。
【選択図】図1
Description
2 回路基板
2a 読出回路
3 反射膜
4 コンタクト
5 第1保護膜
6 第2保護膜
7 ボロメータ薄膜
8 第3保護膜
9 電極配線
10 第4保護膜
11 吸収膜
12 庇
13 支持部
14 温度検出部
15 空洞部
16 光学膜
17 犠牲層
18 第2犠牲層
20 基板
21 ガラス層
22 金属アンテナ
23 ヒータ膜
24、26 絶縁体
25 感熱抵抗層
27 検知素子
28 脚
Claims (7)
- 基板に形成された読出回路に接続される電極配線を含む支持部により、前記電極配線に接続されるボロメータ薄膜を含む温度検出部が、前記基板から浮いた状態で支持されるマイクロブリッジ構造を有するボロメータ型THz波検出器であって、
前記基板上の前記温度検出部に対向する位置にTHz波を反射する反射膜が形成され、前記温度検出部上に前記THz波を吸収する吸収膜が形成され、前記反射膜と前記温度検出部とで光学的共振構造が形成され、
前記反射膜と前記温度検出部との間隔は赤外線の波長を基準にして設定され、かつ、前記温度検出部のシート抵抗は前記THz波を基準にして設定されることを特徴とするボロメータ型THz波検出器。 - 基板に形成された読出回路に接続される電極配線を含む支持部により、前記電極配線に接続されるボロメータ薄膜を含む温度検出部が、前記基板から浮いた状態で支持されるマイクロブリッジ構造を有するボロメータ型THz波検出器であって、
前記基板上の前記温度検出部に対向する位置にTHz波を反射する反射膜が形成され、前記温度検出部上に前記THz波を吸収する吸収膜が形成され、前記反射膜と前記温度検出部との間に前記THz波を透過する光学膜が配置され、前記反射膜と前記温度検出部とで光学的共振構造が形成され、
前記反射膜と前記温度検出部との間隔は赤外線の波長を基準にして設定され、かつ、前記温度検出部のシート抵抗は前記THz波を基準にして設定されることを特徴とするボロメータ型THz波検出器。 - 前記光学膜は、シリコン酸化膜、シリコン窒化膜、シリコン酸窒化膜、シリコン膜のいずれかであることを特徴とする請求項2記載のボロメータ型THz波検出器。
- 更に、前記温度検出部上に、該温度検出部の周縁部から外側に延びる庇が形成され、前記吸収膜が、前記温度検出部上及び前記庇上に形成されることを特徴とする請求項1乃至3のいずれか一に記載のボロメータ型THz波検出器。
- 前記反射膜と前記温度検出部との間隔は、略1.5乃至2.5μmの範囲に設定され、
前記温度検出部のシート抵抗は、前記反射膜と前記温度検出部との間の光路長における、前記温度検出部のシート抵抗と前記THz波の吸収率との相関関係に基づいて、前記THz波の吸収率がピーク近傍となる範囲に設定されることを特徴とする請求項1乃至4のいずれか一に記載のボロメータ型THz波検出器。 - 前記温度検出部のシート抵抗は、前記THz波の吸収率が略10%以上となる範囲に設定されることを特徴とする請求項5記載のボロメータ型THz波検出器。
- 前記温度検出部のシート抵抗は、略10乃至100Ω/squareの範囲に設定されることを特徴とする請求項5又は6に記載のボロメータ型THz波検出器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007081827A JP5597862B2 (ja) | 2007-03-27 | 2007-03-27 | ボロメータ型THz波検出器 |
US12/056,569 US7741604B2 (en) | 2007-03-27 | 2008-03-27 | Bolometer-type THz-wave detector |
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JP2007081827A JP5597862B2 (ja) | 2007-03-27 | 2007-03-27 | ボロメータ型THz波検出器 |
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JP2008241438A true JP2008241438A (ja) | 2008-10-09 |
JP5597862B2 JP5597862B2 (ja) | 2014-10-01 |
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JP (1) | JP5597862B2 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008241439A (ja) * | 2007-03-27 | 2008-10-09 | Nec Corp | ボロメータ型THz波検出器 |
JP2010210293A (ja) * | 2009-03-06 | 2010-09-24 | Nec Corp | 熱型赤外線センサ、及び熱型赤外線センサの製造方法 |
JP2011106825A (ja) * | 2009-11-12 | 2011-06-02 | Nec Corp | ボロメータ型THz波検出器 |
JP2012002603A (ja) * | 2010-06-15 | 2012-01-05 | Nec Corp | ボロメータ型テラヘルツ波検出器 |
JP2012194080A (ja) * | 2011-03-17 | 2012-10-11 | Nec Corp | ボロメータ型THz波検出器 |
JP2015087270A (ja) * | 2013-10-31 | 2015-05-07 | アンリツ株式会社 | THz帯検査装置およびTHz帯を用いた検査方法 |
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WO2009131674A2 (en) * | 2008-04-21 | 2009-10-29 | Research Foundation Of State University Of New York | Bolometric sensor with high tcr and tunable low resistivity |
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US20080237467A1 (en) | 2008-10-02 |
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