JP2008239473A - 圧電/電歪磁器組成物および圧電/電歪素子 - Google Patents
圧電/電歪磁器組成物および圧電/電歪素子 Download PDFInfo
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- 239000000203 mixture Substances 0.000 title claims abstract description 64
- 229910052573 porcelain Inorganic materials 0.000 title claims abstract description 34
- 150000001875 compounds Chemical class 0.000 claims abstract description 44
- 229910052744 lithium Inorganic materials 0.000 claims abstract description 12
- 229910052758 niobium Inorganic materials 0.000 claims abstract description 12
- 229910052700 potassium Inorganic materials 0.000 claims abstract description 12
- 229910052708 sodium Inorganic materials 0.000 claims abstract description 12
- 229910052715 tantalum Inorganic materials 0.000 claims abstract description 11
- 239000000919 ceramic Substances 0.000 claims description 17
- 230000005684 electric field Effects 0.000 abstract description 26
- 238000000034 method Methods 0.000 abstract description 14
- 229910052748 manganese Inorganic materials 0.000 abstract description 5
- 239000011572 manganese Substances 0.000 description 47
- 239000002994 raw material Substances 0.000 description 23
- 239000000758 substrate Substances 0.000 description 23
- 239000013078 crystal Substances 0.000 description 18
- 239000010955 niobium Substances 0.000 description 18
- 239000011734 sodium Substances 0.000 description 18
- 238000010304 firing Methods 0.000 description 16
- 239000012071 phase Substances 0.000 description 15
- 239000000843 powder Substances 0.000 description 15
- 239000002003 electrode paste Substances 0.000 description 12
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 12
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 10
- 229910001928 zirconium oxide Inorganic materials 0.000 description 10
- 238000006073 displacement reaction Methods 0.000 description 8
- 239000010410 layer Substances 0.000 description 8
- 239000000956 alloy Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000002612 dispersion medium Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 239000002245 particle Substances 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 238000007650 screen-printing Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000002356 single layer Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 238000005452 bending Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000001354 calcination Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 238000003746 solid phase reaction Methods 0.000 description 3
- 239000003381 stabilizer Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- 238000004998 X ray absorption near edge structure spectroscopy Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000000443 aerosol Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 2
- 239000004014 plasticizer Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 150000002697 manganese compounds Chemical class 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011268 mixed slurry Substances 0.000 description 1
- 235000016337 monopotassium tartrate Nutrition 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- -1 oxides Chemical class 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- UZLYXNNZYFBAQO-UHFFFAOYSA-N oxygen(2-);ytterbium(3+) Chemical compound [O-2].[O-2].[O-2].[Yb+3].[Yb+3] UZLYXNNZYFBAQO-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229960003975 potassium Drugs 0.000 description 1
- KYKNRZGSIGMXFH-ZVGUSBNCSA-M potassium bitartrate Chemical compound [K+].OC(=O)[C@H](O)[C@@H](O)C([O-])=O KYKNRZGSIGMXFH-ZVGUSBNCSA-M 0.000 description 1
- 229940086065 potassium hydrogentartrate Drugs 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- LLVQEXSQFBTIRD-UHFFFAOYSA-M sodium;2,3,4-trihydroxy-4-oxobutanoate;hydrate Chemical compound O.[Na+].OC(=O)C(O)C(O)C([O-])=O LLVQEXSQFBTIRD-UHFFFAOYSA-M 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 150000003892 tartrate salts Chemical class 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910003454 ytterbium oxide Inorganic materials 0.000 description 1
- 229940075624 ytterbium oxide Drugs 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
【解決手段】本発明の圧電/電歪磁器組成物は、Aサイト元素としてLi,NaおよびKを含み、Bサイト元素としてNbおよびTaのうちの少なくともNbを含み、Bサイト元素の総原子数に対するAサイト元素の総原子数の比が1より大きいペロブスカイト型酸化物に、微量のMn化合物を添加したものである。主成分であるペロブスカイト型酸化物の組成は、一般式{Liy(Na1-xKx)1-y}a(Nb1-zTaz)O3で表される。A/B比aは、1<a≦1.05を満たすことが好ましい。副成分であるMn化合物は、ペロブスカイト型酸化物100モル部に対するMn原子換算の添加量が3モル部以下となるように添加することが望ましい。
【選択図】図1
Description
{組成}
本発明の圧電/電歪磁器組成物は、Aサイト元素としてリチウム(Li),ナトリウム(Na)およびカリウム(K)を含み、Bサイト元素としてニオブ(Nb)およびタンタル(Ta)のうちの少なくともNbを含み、Bサイト元素の総原子数に対するAサイト元素の総原子数の比(いわゆるA/B比)が1より大きいペロブスカイト型酸化物に、微量のMn化合物を添加したものである。なお、ペロブスカイト型酸化物は、Aサイト元素として銀(Ag)等の1価元素をさらに含んでいてもよいし、Bサイト元素としてアンチモン(Sb)やバナジウム(V)等の5価元素をさらに含んでいてもよい。ただし、本発明の圧電/電歪磁器組成物は、Sbを含まない場合でも高電界印加時の電界誘起歪を大きくすることができるので、人体に対する毒性を鑑みれば、本質的にSbを含まないようにすることが好ましい。ここで、「本質的にSbを含まない」とは、不純物として不可避的に混入する量を超えるSbを含まないという趣旨である。
係る圧電/電歪磁器組成物の原料粉末の製造にあたっては、まず、圧電/電歪磁器組成物の構成元素(Li,Na,K,Nb,TaおよびMn等)の素原料に分散媒を加えてボールミル等で混合する。素原料としては、酸化物、炭酸化塩および酒石酸塩等の化合物を用いることができ、分散媒としては、エタノール、トルエンおよびアセトン等の有機溶剤を用いることができる。そして、得られた混合スラリーから蒸発乾燥および濾過等の手法により分散媒を除去し、混合原料を得る。続いて、混合原料を600〜1300℃で仮焼することにより、原料粉末を得ることができる。なお、所望の粒子径の原料粉末を得るために、仮焼後にボールミル等で粉砕を行ってもよい。また、固相反応法ではなくアルコキシド法や共沈法により原料粉末を製造することも妨げられない。さらに、ペロブスカイト型酸化物を合成した後にMn化合物を構成するMnを供給するMnの素原料を添加してもよい。この場合、Mnの素原料として二酸化マンガン(MnO2)を合成したペロブスカイト型酸化物に添加することが望ましい。このようにして添加された二酸化マンガンを構成する4価のMnは、焼成中に還元されて2価のMnとなり、電界誘起歪の向上に寄与する。また、Bサイト元素のコンロバイト化合物を経由してペロブスカイト型酸化物を合成してもよい。
{全体構造}
図1および図2は、先述の圧電/電歪磁器組成物を用いた圧電/電歪アクチュエータ1,2の構造例の模式図であり、図1は、単層型の圧電/電歪アクチュエータ1の断面図、図2は、多層型の圧電/電歪アクチュエータ2の断面図となっている。
圧電/電歪体膜122,222,224は、先述の圧電/電歪磁器組成物の焼結体である。
電極膜121,123,221,223,225の材質は、白金、パラジウム、ロジウム、金もしくは銀等の金属またはこれらの合金である。中でも、焼成時の耐熱性が高い点で白金または白金を主成分とする合金が好ましい。また、焼成温度によっては、銀−パラジウム等の合金も好適に用いることができる。
基体11,21の材質は、セラミックスであるが、その種類に制限はない。もっとも、耐熱性、化学的安定性および絶縁性の観点から、安定された酸化ジルコニウム、酸化アルミニウム、酸化マグネシウム、ムライト、窒化アルミニウム、窒化ケイ素、ガラスからなる群から選択される少なくとも1種類を含むセラミックスが好ましい。中でも、機械的強度および靭性の観点から安定化された酸化ジルコニウムがさらに好ましい。ここで、「安定化された酸化ジルコニウム」とは、安定化剤の添加によって結晶の相転移を抑制した酸化ジルコニウムをいい、安定化酸化ジルコニウムの他、部分安定化酸化ジルコニムを包含する。
単層型の圧電/電歪アクチュエータ1の製造にあたっては、まず、基体11の上に電極膜121を形成する。電極膜121は、イオンビーム、スパッタリング、真空蒸着、PVD(Physical Vapor Deposition)、イオンプレーティング、CVD(Chemical Vapor Deposition)、メッキ、エアロゾルデポジション、スクリーン印刷、スプレーまたはディッピング等の方法で形成することができる。中でも、基体11と圧電/電歪体膜122との接合性の観点から、スパッタリング法またはスクリーン印刷法が好ましい。形成された電極膜121は、熱処理により、基体11および圧電/電歪体膜122と固着することができる。熱処理の温度は、電極膜121の材質や形成方法に応じて異なるが、概ね500〜1400℃である。
図4〜図6は、先述の圧電/電歪磁器組成物を用いた圧電/電歪アクチュエータ4の構造例の模式図であり、図4は、圧電/電歪アクチュエータ4の斜視図、図5は、圧電/電歪アクチュエータ4の縦断面図、図6は、圧電/電歪アクチュエータ4の横断面図となっている。
122,222,224,402 圧電/電歪体膜
121,123,221,223,225 電極膜
404 内部電極膜
416,418 外部電極膜
Claims (7)
- Aサイト元素としてLi,NaおよびKを含み、Bサイト元素としてNbおよびTaのうちの少なくともNbを含み、Bサイト元素の総原子数に対するAサイト元素の総原子数の比が1より大きいペロブスカイト型酸化物と、
前記ペロブスカイト型酸化物に添加されたMn化合物と、
を含む圧電/電歪磁器組成物。 - 前記ペロブスカイト型酸化物の組成が、一般式{Liy(Na1-xKx)1-y}a(Nb1-zTaz)O3で表され、a,x,yおよびzが1<a≦1.05,0.30≦x≦0.70,0.02≦y≦0.10および0.0≦z≦0.5を満たす請求項1に記載の圧電/電歪磁器組成物。
- 前記ペロブスカイト型酸化物100モル部に対する前記Mn化合物の添加量がMn原子換算で3モル部以下である請求項1または請求項2に記載の圧電/電歪磁器組成物。
- 本質的にSbを含まない請求項1ないし請求項3のいずれかに記載の圧電/電歪磁器組成物。
- 前記Mn化合物が、原子価が主として2価のMnの化合物である請求項1ないし請求項4のいずれかに記載の圧電/電歪磁器組成物。
- 前記Mn化合物が母相である前記ペロブスカイト型酸化物に対して異相としてセラミックス焼結体の内部に存在している請求項1ないし請求項5のいずれかに記載の圧電/電歪磁器組成物。
- 請求項1ないし請求項6のいずれかに記載の圧電/電歪磁器組成物の焼結体である圧電/電歪体膜と、
前記圧電/電歪体膜の両主面上の電極膜と、
を備える圧電/電歪素子。
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US12/036,373 US8128834B2 (en) | 2007-02-27 | 2008-02-25 | Piezoelectric/electrostrictive porcelain composition and piezoelectric/electrostrictive element |
EP08250633A EP1965450B1 (en) | 2007-02-27 | 2008-02-25 | Piezoelectric/electrostrictive porcelain composition and piezoelectric/electrostrictive element |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011144100A (ja) * | 2009-12-14 | 2011-07-28 | Ngk Insulators Ltd | 圧電/電歪セラミックス焼結体 |
JP2011144101A (ja) * | 2009-12-14 | 2011-07-28 | Ngk Insulators Ltd | 圧電/電歪セラミックス焼結体 |
JP2015534257A (ja) * | 2012-09-21 | 2015-11-26 | Tdk株式会社 | 薄膜圧電素子、圧電アクチュエータ、圧電センサ、ハードディスクドライブおよびインクジェットプリンタ装置 |
JP2015534714A (ja) * | 2012-09-21 | 2015-12-03 | Tdk株式会社 | 薄膜圧電素子、圧電アクチュエータ、圧電センサ、ハードディスクドライブおよびインクジェットプリンタ装置 |
JP2021005627A (ja) * | 2019-06-26 | 2021-01-14 | 株式会社村田製作所 | 圧電磁器組成物、圧電磁器組成物の製造方法及び圧電セラミック電子部品 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8022604B2 (en) * | 2007-10-19 | 2011-09-20 | Ngk Insulators, Ltd. | (Li, Na, K)(Nb, Ta)O3 type piezoelectric/electrostrictive ceramic composition containing 30-50 mol% Ta and piezoelectric/electrorestrictive device containing the same |
JP5281786B2 (ja) * | 2007-11-14 | 2013-09-04 | 日本碍子株式会社 | (Li,Na,K)(Nb,Ta)O3系圧電材料、及びその製造方法 |
WO2012086449A1 (ja) * | 2010-12-24 | 2012-06-28 | 太陽誘電株式会社 | 圧電セラミックス、圧電セラミックス部品、及び該圧電セラミックス部品を用いた圧電デバイス |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5047193A (ja) * | 1973-08-15 | 1975-04-26 | ||
WO2006095716A1 (ja) * | 2005-03-08 | 2006-09-14 | Ngk Insulators, Ltd. | 圧電/電歪磁器組成物及びその製造方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56120180A (en) | 1981-02-12 | 1981-09-21 | Nec Corp | Piezoelectric porcelain |
JP4039871B2 (ja) | 2002-03-20 | 2008-01-30 | Tdk株式会社 | 圧電磁器 |
TW560094B (en) * | 2001-06-15 | 2003-11-01 | Tdk Corp | Piezoelectric ceramic and method of manufacturing |
EP1382588B9 (en) * | 2002-07-16 | 2012-06-27 | Denso Corporation | Piezoelectric ceramic composition and method of production of same |
JP2004155601A (ja) * | 2002-11-05 | 2004-06-03 | Nippon Ceramic Co Ltd | 圧電磁器組成物 |
JP4480967B2 (ja) | 2003-01-23 | 2010-06-16 | 株式会社デンソー | 圧電磁器組成物,圧電素子,及び誘電素子 |
JP4449331B2 (ja) | 2003-04-28 | 2010-04-14 | 株式会社村田製作所 | 圧電磁器およびそれを用いた圧電磁器素子 |
JP4524558B2 (ja) | 2003-12-22 | 2010-08-18 | Tdk株式会社 | 圧電磁器およびその製造方法 |
JP4513948B2 (ja) | 2003-12-22 | 2010-07-28 | Tdk株式会社 | 圧電磁器およびその製造方法 |
JP4926389B2 (ja) * | 2004-06-17 | 2012-05-09 | 株式会社豊田中央研究所 | 結晶配向セラミックス、及びその製造方法 |
US7332851B2 (en) * | 2004-09-29 | 2008-02-19 | Ngk Insulators, Ltd. | Piezoelectric/electrostrictive film type device and method of manufacturing the same |
JP2006315909A (ja) | 2005-05-12 | 2006-11-24 | Univ Nagoya | 圧電セラミックス |
US7494601B2 (en) * | 2006-02-28 | 2009-02-24 | The Hong Kong Polytechnic University | Piezoelectric ceramic composition and the method for preparing the same |
-
2007
- 2007-12-28 JP JP2007338923A patent/JP5021452B2/ja not_active Expired - Fee Related
-
2008
- 2008-02-25 EP EP08250633A patent/EP1965450B1/en not_active Not-in-force
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5047193A (ja) * | 1973-08-15 | 1975-04-26 | ||
WO2006095716A1 (ja) * | 2005-03-08 | 2006-09-14 | Ngk Insulators, Ltd. | 圧電/電歪磁器組成物及びその製造方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011144100A (ja) * | 2009-12-14 | 2011-07-28 | Ngk Insulators Ltd | 圧電/電歪セラミックス焼結体 |
JP2011144101A (ja) * | 2009-12-14 | 2011-07-28 | Ngk Insulators Ltd | 圧電/電歪セラミックス焼結体 |
JP2015534257A (ja) * | 2012-09-21 | 2015-11-26 | Tdk株式会社 | 薄膜圧電素子、圧電アクチュエータ、圧電センサ、ハードディスクドライブおよびインクジェットプリンタ装置 |
JP2015534714A (ja) * | 2012-09-21 | 2015-12-03 | Tdk株式会社 | 薄膜圧電素子、圧電アクチュエータ、圧電センサ、ハードディスクドライブおよびインクジェットプリンタ装置 |
JP2021005627A (ja) * | 2019-06-26 | 2021-01-14 | 株式会社村田製作所 | 圧電磁器組成物、圧電磁器組成物の製造方法及び圧電セラミック電子部品 |
JP7352140B2 (ja) | 2019-06-26 | 2023-09-28 | 株式会社村田製作所 | 圧電磁器組成物の製造方法及び圧電セラミック電子部品 |
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EP1965450A2 (en) | 2008-09-03 |
US8128834B2 (en) | 2012-03-06 |
JP5021452B2 (ja) | 2012-09-05 |
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