JP2008211773A - Tuning fork type piezoelectric vibrator - Google Patents

Tuning fork type piezoelectric vibrator Download PDF

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Publication number
JP2008211773A
JP2008211773A JP2008009143A JP2008009143A JP2008211773A JP 2008211773 A JP2008211773 A JP 2008211773A JP 2008009143 A JP2008009143 A JP 2008009143A JP 2008009143 A JP2008009143 A JP 2008009143A JP 2008211773 A JP2008211773 A JP 2008211773A
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tuning fork
metal bump
piezoelectric vibrator
type piezoelectric
flat portion
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JP2008211773A5 (en
JP5100408B2 (en
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Ryoichi Ichikawa
了一 市川
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Nihon Dempa Kogyo Co Ltd
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Nihon Dempa Kogyo Co Ltd
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Priority to JP2008009143A priority Critical patent/JP5100408B2/en
Priority to US12/011,507 priority patent/US7888850B2/en
Priority to EP08250348A priority patent/EP1976115A1/en
Priority to TW97103213A priority patent/TWI419387B/en
Priority to CN2008100090407A priority patent/CN101237223B/en
Publication of JP2008211773A publication Critical patent/JP2008211773A/en
Publication of JP2008211773A5 publication Critical patent/JP2008211773A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16195—Flat cap [not enclosing an internal cavity]

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tuning fork type piezoelectric vibrator capable of securing fixing strength while maintaining vibration characteristics in a static state when miniaturized and also capable of suppressing frequency changes before and after a drop impact. <P>SOLUTION: In the tuning fork type piezoelectric vibrator comprising a container body 1 having a recessed shape, electrode pads 4 arranged in the recess of the container body 1, metal bump 6 formed on the electrode pads 4, a tuning fork-like piezoelectric piece 7 in which one main surface of a tuning fork base part 10 extended from a pair of tuning fork arms 9 is fixed on metal bumps 6 formed on the electrode pads 4 by conductive adhesive 8 and a cover 2 joined with the end face of an opening of the container body 1 to air-tightly seal the tuning fork-like piezoelectric piece 7, the area of an upper flat portion of the metal bump 6 is smaller than the bottom area of the metal bump 6. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は表面実装用とした音叉型圧電振動子を技術分野とし、特に音叉状圧電片を容器本体に接続する金属バンプに関する。 The present invention relates to a tuning fork type piezoelectric vibrator for surface mounting, and more particularly to a metal bump for connecting a tuning fork piezoelectric piece to a container body.

（発明の背景）
音叉型圧電振動子は電子機器のクロック周波数源として広く使われている。近年では、これらが内蔵される電子機器の小型化にともない、音叉型圧電振動子の大きさについても小型化及び薄型化が要求されている。 (Background of the Invention)
Tuning fork type piezoelectric vibrators are widely used as clock frequency sources for electronic equipment. In recent years, with the miniaturization of electronic devices in which these are incorporated, the size and size of tuning fork-type piezoelectric vibrators are also required to be reduced.

(従来技術の一例)
第５図(a)(b)及び第６図(a)(b)は従来例を説明する図で、第５図(a)は一部開放とした内部を示す音叉型圧電振動子の斜視図、同図(b)は同断面図、第６図(a)は典型的な音叉状圧電片の正面図、同図（b）は音叉状圧電片の電気的結線を示す模式的な平面図である。 (Example of conventional technology)
FIGS. 5 (a), 5 (b) and 6 (a), (b) are diagrams for explaining a conventional example, and FIG. 5 (a) is a perspective view of a tuning-fork type piezoelectric vibrator showing a partially opened interior. Fig. 6 (b) is a cross-sectional view, Fig . 6 (a) is a front view of a typical tuning fork-shaped piezoelectric piece, and Fig. 6 (b) is a schematic plan view showing the electrical connection of the tuning-fork-shaped piezoelectric piece. FIG.

音叉型圧電振動子は、音叉状圧電片７を容器本体１の内部に収容して金属カバー２を被せ、音叉状圧電片７を密閉封入して構成される。音叉状圧電片７は圧電材を例えば水晶とし、一対の音叉腕９が音叉基部１０から延出する。一対の音叉腕９は励振電極９ａを各４面に有し、図示しない配線パターンによって音叉基部１０の一主面に引出電極１０ａを延出する。引出電極１０ａは音叉基部１０の一主面における両端側に形成される。 The tuning fork-type piezoelectric vibrator is configured by accommodating a tuning fork-shaped piezoelectric piece 7 in the container body 1, covering the metal cover 2, and sealingly enclosing the tuning-fork-shaped piezoelectric piece 7 . The tuning fork-shaped piezoelectric piece 7 is made of, for example, crystal as a piezoelectric material, and a pair of tuning fork arms 9 extend from the tuning fork base 10. The pair of tuning fork arms 9 has excitation electrodes 9a on each of four surfaces , and the extraction electrode 10a extends to one main surface of the tuning fork base 10 by a wiring pattern (not shown ). The extraction electrodes 10 a are formed on both end sides of one main surface of the tuning fork base 10.

励振電極９は各音叉腕９の両主面及び両側面間を同電位として結線され、一対の音叉腕９の間では両主面と両側面との励振電極９ａが同電位として結線される。そして、音叉基部１０の一主面に設けた一対の引出電極１０ａに接続する。The excitation electrode 9 is connected with the same potential between both main surfaces and both side surfaces of each tuning fork arm 9, and between the pair of tuning fork arms 9, the excitation electrodes 9a on both main surfaces and both side surfaces are connected with the same potential. And it connects to a pair of extraction electrode 10a provided in one main surface of the tuning fork base 10.

容器本体１は例えば分割された段部３を一端側の内壁に有し、横断面を凹状とした積層セラミックからなる。この例では、開放面側から順にセラミック板（１ａ、１ｂ、１ｃ）からなる３層構造とする。容器本体１における内壁段部３の上面には電極パッド４が形成される。電極パッド４は例えばタングステン（Ｗ）を下地電極とし、例えばニッケル（Ｎｉ）膜を中継材として金（Ａｕ）膜からなる導電層が形成される。 The container body 1 have a stepped portion 3, which is for example divided into the inner wall of the one end side, a laminated ceramic cross-section and concave. In this example, a three-layer structure including ceramic plates (1a, 1b, 1c) in order from the open surface side is adopted . An electrode pad 4 is formed on the upper surface of the inner wall step 3 in the container body 1 . The electrode pad 4 is formed with a conductive layer made of, for example, a gold (Au) film using tungsten (W) as a base electrode and a nickel (Ni) film as a relay material.

下地電極（Ｗ）は例えば印刷及び焼成によって、中継材（Ｎｉ）及び導電層（Ａｕ）は電解メッキによって形成される。そして、電極パッド４の上面には金（Ａｕ）からなる金属バンプ６が形成される。金属バンプ６は前述した印刷及び焼成によって、あるいは電解メッキ等によって形成される。要するに、金属バンプ６は印刷バンプやメッキバンプによって形成される。For example, the base electrode (W) is formed by printing and baking, and the relay material (Ni) and the conductive layer (Au) are formed by electrolytic plating. A metal bump 6 made of gold (Au) is formed on the upper surface of the electrode pad 4. The metal bumps 6 are formed by printing and baking described above, or by electrolytic plating. In short, the metal bumps 6 are formed by printing bumps or plating bumps.

そして、励振電極９ａから引出電極１０ａが延出した音叉基部１０の一主面における両端側が、導電性接着剤８によって金属バンプ６に固着される。導電性接着剤８は例えば加熱硬化型とし、金属バンプ６上に塗布した後、音叉基部１０が位置決めされる。そして、音叉基部１０の上方から加圧（圧縮）して加熱硬化される。 Then, both end sides of one main surface of the tuning fork base 10 where the extraction electrode 10 a extends from the excitation electrode 9 a are fixed to the metal bump 6 by the conductive adhesive 8. The conductive adhesive 8 is, for example, a heat-curing type, and after being applied on the metal bump 6, the tuning fork base 10 is positioned. Then, it is pressurized (compressed) from above the tuning fork base 10 and cured by heating.

これらにより、一対の音叉腕９の励振電極９ａから延出した引出電極１０ａは、金属バンプ６、電極パッド４及び図示しない配線路を経て、容器本体１の底面に設けた実装端子５に電気的に接続される。金属カバー２はシーム溶接等によって容器本体１の開口端面に接合し、音叉状圧電片７を密閉封入する。 Thus, the lead electrode 10a extending from the excitation electrode 9a of the pair of tuning fork arms 9 is electrically connected to the mounting terminal 5 provided on the bottom surface of the container body 1 through the metal bump 6, the electrode pad 4, and the wiring path (not shown ). Connected to. The metal cover 2 is joined to the opening end surface of the container body 1 by seam welding or the like, and the tuning fork-shaped piezoelectric piece 7 is hermetically sealed.

特開２００４−３１２０５７号公報JP 2004-312057 A

（従来技術の問題点）
しかしながら、上記構成の音叉型圧電振動子では、金属バンプ６を平坦状とすることから、引出電極１０ａの延出した音叉基部１０の一主面における両端側では全面的に対面するとともに密接して固着される。したがって、音叉状圧電片７の固着強度は金属バンプ６に対する密接した接触面積に依存する。一方、音叉状圧電片７は外部衝撃に対する導電性接着剤８の固着強度及び電気的導通度を高めるため、金属バンプ６との接触面積（対向面積）を大きくすることが求められる。 (Problems of conventional technology)
However, in the tuning fork type piezoelectric vibrator having the above configuration, since the metal bumps 6 are made flat, both ends of one main surface of the tuning fork base 10 where the extraction electrode 10a is extended face each other and closely contact each other. It is fixed. Therefore, the fixing strength of the tuning fork-shaped piezoelectric piece 7 depends on the close contact area with the metal bump 6. On the other hand, the tuning fork-shaped piezoelectric piece 7 is required to have a large contact area (opposed area) with the metal bump 6 in order to increase the fixing strength and electrical conductivity of the conductive adhesive 8 against external impact.

この場合、一対の音叉腕９による音叉振動の音叉基部１０からの振動漏れは、金属バンプ６との接触面積に比例して大きくなる。そして、振動漏れが大きくなるほど、音叉振動の振動効率を低下させてクリスタルインピーダンス（ＣＩ）を高める等の静的状態（外部から衝撃がない状態）での振動特性を悪化させる。さらに、静的状態での振動特性を維持しても、接触面積が大きいほど、音叉基部１０と金属バンプ６との間の導電性接着剤８の量も増加し、落下衝撃試験の前後では振動周波数の変化が大きくなる。In this case, vibration leakage from the tuning fork base 10 of the tuning fork vibration by the pair of tuning fork arms 9 increases in proportion to the contact area with the metal bump 6. As the vibration leakage increases, the vibration characteristics in the static state (the state in which there is no impact from the outside), such as decreasing the vibration efficiency of the tuning fork vibration and increasing the crystal impedance (CI), are deteriorated. Furthermore, even if the vibration characteristics in the static state are maintained, the amount of the conductive adhesive 8 between the tuning fork base 10 and the metal bump 6 increases as the contact area increases, and vibration occurs before and after the drop impact test. The change in frequency becomes large.

すなわち、導電性接着剤８は落下衝撃によって状態が変化し、音叉基部１０に対する保持状態を変化させる。この場合、衝撃によって固着強度が低下し、音叉基部１０の拘束力も弱まって、振動周波数を低下させる。そして、導電性接着剤８の量が多いほど、保持状態も大きく変化することから、落下衝撃前後での周波数変化量も大きくなる。これらのことから、平坦状とした金属バンプ６と導電性接着剤８によって密接する接触面積は一定値以内に厳しく制限される。That is, the state of the conductive adhesive 8 is changed by a drop impact, and the holding state with respect to the tuning fork base 10 is changed. In this case, the fixing strength is reduced by the impact, the binding force of the tuning fork base 10 is weakened, and the vibration frequency is reduced. As the amount of the conductive adhesive 8 increases, the holding state also changes greatly, so that the amount of frequency change before and after the drop impact also increases. For these reasons, the contact area intimately contacted by the flat metal bump 6 and the conductive adhesive 8 is severely limited within a certain value.

しかし、音叉状圧電片７の大きさが小さくなると、例えば音叉状圧電片７の厚みを0.12ｍｍとして、全長が2.3ｍｍ、幅が0.5ｍｍで、音叉基部１０の長さが0.5ｍｍ程度以下になると、金属バンプ６に対する音叉基部１０の位置決めが困難となる。したがって、金属バンプ６を平坦状とした音叉型圧電振動子では、固着強度及び電気的導通度を確保して静的状態での振動特性を維持した上で、落下衝撃前後での周波数変化を抑制するには限界となる問題があった。
（発明の目的）
本発明は小型化に際しての静的状態での振動特性を維持した上で固着強度を確保し、しかも落下衝撃前後での周波数変化を抑制した音叉型圧電振動子を提供することを目的とする。 However, when the size of the tuning fork-shaped piezoelectric piece 7 is reduced, for example, the thickness of the tuning-fork-shaped piezoelectric piece 7 is 0.12 mm, the overall length is 2.3 mm, the width is 0.5 mm, and the length of the tuning fork base 10 is about 0.5 mm or less. As a result, positioning of the tuning fork base 10 with respect to the metal bump 6 becomes difficult. Therefore, in the tuning fork type piezoelectric vibrator having the metal bump 6 flat, the fixing strength and the electrical continuity are ensured to maintain the vibration characteristics in the static state, and the frequency change before and after the drop impact is suppressed. There was a limit problem.
(Object of invention)
It is an object of the present invention to provide a tuning fork type piezoelectric vibrator that maintains the vibration characteristics in a static state when downsizing and secures the fixing strength and suppresses the frequency change before and after the drop impact .

本発明の特許請求の範囲（請求項１）に示したように、凹状とした容器本体と、前記容器本体の凹部内に設けられた電極パッドと、前記電極パッド上に形成された金属バンプと、一対の音叉腕が延出した音叉基部の一主面を導電性接着剤によって前記金属バンプに固着される音叉状圧電片と、前記容器本体の開口端面に接合して前記音叉状圧電片を密閉封入するカバーとからなる音叉型圧電振動子において、前記金属バンプの上面平坦部の面積が前記金属バンプの底面積に比して小さくなっている構成とする。 As shown in the claims of the present invention (Claim 1), a container body having a concave shape, an electrode pad provided in the recess of the container body, and a metal bump formed on the electrode pad; A tuning fork-shaped piezoelectric piece in which one main surface of a tuning fork base portion from which a pair of tuning-fork arms extends is fixed to the metal bump by a conductive adhesive, and the tuning-fork-shaped piezoelectric piece bonded to the opening end surface of the container body in the tuning fork type piezoelectric vibrator comprising a cover for hermetically encapsulated, a structure in which the area of the top surface flat portion of the metal bump is smaller than the bottom surface area of the metal bump.

このような構成であれば、音叉基部の一主面が導電性接着剤によって上方から加圧して固着される際、金属バンプの上面平坦部は底面積よりも小さいので、音叉基部の一主面との間の導電性接着剤による密接した接触面積を従来例よりも少なくできる。したがって、外部衝撃によって接着状態が変化してもその影響を小さくすることができる。これにより、落下衝撃前後での周波数変化特性を良好にする。 With such a configuration, when the main surface of the tuning fork base is pressed and fixed from above with a conductive adhesive, the flat surface of the upper surface of the metal bump is smaller than the bottom area. The intimate contact area by the conductive adhesive can be reduced as compared with the conventional example. Therefore, even if the adhesive state changes due to external impact, the influence can be reduced. Thereby, the frequency change characteristic before and after a drop impact is made favorable.

さらに、金属バンプにおける上面平坦部の外側領域では、音叉基部と金属バンプの間に隙間ができるため、導電性接着剤が加圧時に圧縮されずに音叉基部と金属バンプを固着することになる。したがって、外側領域での導電性接着剤が弾性的に音叉基部を保持することになり、実施形態で述べるように、上面平坦部を小さくした分の固着強度を補完し、上面平坦部とともに固着強度を確保できる。 Further, since a gap is formed between the tuning fork base and the metal bump in the outer region of the upper flat portion of the metal bump, the conductive adhesive is not compressed when pressed, and the tuning fork base and the metal bump are fixed. Therefore, the conductive adhesive in the outer region elastically holds the tuning fork base, and as described in the embodiment, it complements the fixing strength of the smaller upper flat portion, and the fixing strength together with the upper flat portion. Can be secured.

（実施態様項）
本発明の請求項２では、請求項１の前記金属バンプは少なくとも一端側に斜面又は階段形状を有する。これにより、金属バンプの底面よりも上面平坦部の面積を小さくして、請求項１の効果を得る。 (Embodiment section)
According to a second aspect of the present invention, the metal bump according to the first aspect has an inclined surface or a step shape on at least one end side. Thus, the area of the upper flat portion is made smaller than the bottom surface of the metal bump, and the effect of claim 1 is obtained.

同請求項３では、請求項１の前記金属バンプは前記音叉状圧電片の幅方向となる両端側に斜面もしくは階段形状を有する。これにより、密接に接着する上面平坦部は音叉腕の延出方向となるので、幅方向に設けた場合に比較し、一対の音叉腕の先端側の垂れ下がりを防止する。 In the third aspect of the present invention, the metal bumps of the first aspect have slopes or stepped shapes on both end sides in the width direction of the tuning fork-shaped piezoelectric piece . As a result, the top flat portion that adheres closely is in the direction in which the tuning fork arms extend, so that the tip side of the pair of tuning fork arms is prevented from sagging as compared with the case where the tuning fork arms are provided in the width direction.

同請求項４では、請求項１の前記音叉状圧電片の幅方向における前記金属バンプの上面平坦部の長さは前記金属バンプ底面の長さの２０〜９０％とする。これにより、落下衝撃試験に伴う周波数変化を最小限にすることができる。例えば実施形態で示すように、落下衝撃前後での周波数変化を２０ｐｐｍ以内にできる。 According to the fourth aspect of the present invention, the length of the upper flat portion of the metal bump in the width direction of the tuning fork-shaped piezoelectric piece of the first aspect is 20 to 90% of the length of the bottom surface of the metal bump. Thereby , the frequency change accompanying a drop impact test can be minimized. For example, as shown in the embodiment, the frequency change before and after the drop impact can be made within 20 ppm.

（第１実施形態）
第１図(a)(b)(c)は本発明の第１実施形態を説明する音叉型圧電振動子の図で、同図(a)は音叉状圧電片及びカバーを除いて内部を示す一部開放の斜視図、同図(b)はカバーは除いて音叉状圧電片の固着状態を示す一部開放の斜視図、同図(c)は幅方向の断面図である。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。 (First embodiment)
FIGS. 1 (a), 1 (b) and 1 (c) are diagrams of a tuning fork type piezoelectric vibrator for explaining the first embodiment of the present invention. FIG. 1 (a) shows the inside except for the tuning fork-shaped piezoelectric piece and the cover. FIG. 4B is a partially opened perspective view showing a fixed state of the tuning fork-shaped piezoelectric piece except for the cover , and FIG. 5C is a sectional view in the width direction . In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.

音叉型圧電振動子は、前述同様に、音叉状圧電片７を容器本体１に収容してカバー２を被せ、音叉状圧電片７を密閉封入して構成される。音叉状圧電片７はこの例でも圧電材を水晶とする。そして、引出電極１０ａの延出した音叉基部１０の一主面の両端側が、容器本体１の一端側における内壁段部３に設けられた電極パッド４上の金属バンプ６に導電性接着剤８によって固着される。 As described above, the tuning fork type piezoelectric vibrator is configured by accommodating the tuning fork-shaped piezoelectric piece 7 in the container body 1 and covering the cover 2, and sealing the tuning-fork-shaped piezoelectric piece 7 . The tuning fork-shaped piezoelectric piece 7 is also made of quartz as a piezoelectric material in this example. Then, both ends of one main surface of the tuning fork base 10 where the extraction electrode 10 a extends are attached to the metal bumps 6 on the electrode pads 4 provided on the inner wall step 3 on one end of the container body 1 by the conductive adhesive 8. It is fixed.

電極パッド４は印刷焼成による下地電極（Ｗ）、及び電解メッキによる中継材（Ｎｉ）及び導電膜（Ａｕ）からなり、金属バンプ（Ａｕ）６は印刷バンプやメッキバンプからなる。この実施形態では金属バンプ６の幅方向の両端側には円弧状の曲面が形成され、中央領域を上面平坦部とする。そして、音叉状圧電片７は例えば32.768ｋＨｚを振動周波数とし、音叉状圧電片７の厚みを0.12ｍｍとして、全長を2.3ｍｍ、幅を0.5ｍｍ、音叉基部１０の長さを0.5ｍｍとする。 The electrode pad 4 is made of a base electrode (W) obtained by printing and baking, a relay material (Ni) and a conductive film (Au) obtained by electrolytic plating, and the metal bump (Au) 6 is made of a printed bump or a plated bump. In this embodiment, arc-shaped curved surfaces are formed on both ends in the width direction of the metal bump 6, and the central region is the upper flat portion . For example, the tuning fork-shaped piezoelectric piece 7 has a vibration frequency of 32.768 kHz, the thickness of the tuning-fork-shaped piezoelectric piece 7 is 0.12 mm, the total length is 2.3 mm, the width is 0.5 mm, and the length of the tuning fork base 10 is 0.5 mm.

この例では、電極パッド４の厚みをおよそ20μｍとして、金属バンプ６は音叉腕の長さ方向となる縦寸法を370μｍ、幅寸法を215μｍ、厚み（高さ）寸法を30μｍとする。そして、音叉基部１０の一主面と接続する金属バンプ６の全体の幅寸法は220μｍとして、上面平坦部の幅寸法は100μｍとし、両端側の曲面の幅寸法はそれぞれ60μｍとする。In this example, the electrode pad 4 has a thickness of approximately 20 μm, and the metal bump 6 has a vertical dimension in the length direction of the tuning fork arm of 370 μm, a width dimension of 215 μm, and a thickness (height) dimension of 30 μm. The entire width of the metal bump 6 connected to one main surface of the tuning fork base 10 is 220 μm, the width of the upper flat portion is 100 μm, and the width of the curved surfaces on both ends is 60 μm.

このような構成であれば、音叉状圧電片７（音叉基部１０）が導電性接着剤８によって金属バンプ６に固着される際、金属バンプ６の上面平坦部の幅寸法を短くすることから、金属バンプ６と密接に接触する接着面積が減少する。したがって、外部衝撃（落下衝撃）によって接着状態が変化したとしても、振動特性に対する影響を小さくして振動周波数の変化を抑制できる。そして、上面平坦部の両端部には曲面部が設けられて音叉基部１０を保持することから、音叉状圧電片７の固着強度を維持できる。In such a configuration, when the tuning fork-shaped piezoelectric piece 7 (tuning fork base 10) is fixed to the metal bump 6 by the conductive adhesive 8, the width dimension of the upper flat portion of the metal bump 6 is shortened. The adhesion area in close contact with the metal bump 6 is reduced. Therefore, even if the adhesion state changes due to an external impact (drop impact), it is possible to reduce the influence on the vibration characteristics and suppress the change of the vibration frequency. And since the curved surface part is provided in the both ends of the upper surface flat part and the tuning fork base 10 is hold | maintained, the adhering strength of the tuning fork-shaped piezoelectric piece 7 can be maintained.

要するに、金属バンプ６の上面平坦部と両端側の曲面によって音叉状圧電片７の固着強度を維持し、さらに音叉基部１０と密接に接着する上面平坦部を短くすることから落下衝撃前後での振動特性の変化に伴う周波数変化を防止する。換言すれば、上面平坦部が固着強度及び振動特性を支配して、両端側の曲面が固着強度を補完するとも言える。したがって、音叉状圧電片７を確実に保持することと、落下衝撃時の周波数変化を小さくすることの両立が可能となる。 In short, the bonding strength of the tuning fork-shaped piezoelectric piece 7 is maintained by the flat surface of the upper surface of the metal bump 6 and the curved surfaces at both ends, and the flat surface of the upper surface that adheres closely to the tuning fork base 10 is shortened. Prevents frequency changes associated with characteristic changes. In other words, it can be said that the upper flat portion dominates the fixing strength and the vibration characteristics, and the curved surfaces on both ends complement the fixing strength. Accordingly, it is possible to both hold the tuning fork-shaped piezoelectric piece 7 reliably and reduce the frequency change at the time of a drop impact.

第２図は金属バンプ６の上面平坦部の長さを変えたときの落下衝撃試験前後の周波数変化を示すグラフである。なお、ここでの落下衝撃試験は1.8ｍ上方から音叉型振動子をコンクリート板に落下させたときの、落下前と落下後における振動周波数の周波数偏差Δｆ／ｆである。但し、Δｆは落下前の振動周波数ｆと落下後の振動周波数ｆ´との周波数差（ｆ−ｆ´）である。また、音叉型圧電振動子は荷重150ｇとしたセット基板に搭載されて落下される。 FIG. 2 is a graph showing the frequency change before and after the drop impact test when the length of the upper flat portion of the metal bump 6 is changed. Here, the drop impact test is a frequency deviation Δf / f of vibration frequency before and after dropping when a tuning fork vibrator is dropped onto a concrete plate from 1.8 m above. However, Δf is a frequency difference (f−f ′) between the vibration frequency f before dropping and the vibration frequency f ′ after dropping. The tuning fork type piezoelectric vibrator is mounted on a set substrate with a load of 150 g and dropped.

このグラフから明らかなように、金属バンプ６の上面平坦部の幅寸法に対する落下衝撃前後での振動周波数の変化特性は、上面平坦部の幅寸法を約100μｍとしたときに周波数変化（偏差）を8ｐｐｍの最小値とした放物線状となる。そして、上面平坦部の幅寸法が約200μｍ以内では周波数変化の実用的な目安としての20ｐｐｍ以下となる。但し、上面平坦部の幅寸法が約50μｍ未満では、落下衝撃によって音叉状圧電片７が金属バンプ６からの剥離や破損を引き起こす。また、いずれの場合でも、Δｆ／ｆが正なので落下衝撃後では振動周波数が低下する。As is apparent from this graph, the change characteristic of the vibration frequency before and after the drop impact with respect to the width dimension of the upper flat portion of the metal bump 6 is the frequency change (deviation) when the width dimension of the upper flat portion is about 100 μm. It becomes a parabolic shape with a minimum value of 8 ppm. And when the width dimension of the upper flat portion is within about 200 μm, it becomes 20 ppm or less as a practical guide for frequency change. However, if the width dimension of the upper flat portion is less than about 50 μm, the tuning fork-like piezoelectric piece 7 causes peeling or breakage from the metal bump 6 due to a drop impact. In any case, since Δf / f is positive, the vibration frequency decreases after a drop impact.

これらの金属バンプ６の上端平坦部の幅寸法に依存した周波数変化、特に最小値を有する理由は次によると推察される。すなわち、金属バンプ６の上面平坦部が音叉基部１０の一主面と密接して接触する接着面積（以下、密着面積とする）が小さいと、落下衝撃によって剛性が損なわれる。したがって、落下衝撃後の剛性は落下衝撃前の固着時よりも小さくなるので、剛性（固着強度）に比例した振動漏れは少なくなる。したがって、落下衝撃前後での振動周波数の低下度合いが大きくなり、周波数変化量は大きくなる。The reason for having a frequency change depending on the width dimension of the upper flat portion of the metal bump 6, particularly the minimum value, is presumed as follows. That is, if the upper surface flat part of the metal bump 6 is in close contact with one main surface of the tuning fork base 10 (hereinafter referred to as the “contact area”), the rigidity is impaired by the drop impact. Therefore, since the rigidity after the drop impact is smaller than that at the time of fixing before the drop impact, vibration leakage proportional to the rigidity (fixing strength) is reduced. Therefore, the degree of decrease in the vibration frequency before and after the drop impact increases, and the frequency change amount increases.

次に、上面平坦部による密着面積の増加に伴って剛性の低下度合いが小さくなり、落下衝撃後の剛性は落下衝撃前の固着時に接近して大きくなる。したがって、音叉基部１０からの振動漏れも、落下衝撃前の固着時に接近して多くなる。したがって、落下衝撃前後での振動周波数の低下度合いは小さくなって、周波数変化量も小さくなる。Next, as the contact area increases due to the upper flat portion, the degree of decrease in rigidity decreases, and the rigidity after the drop impact approaches and increases at the time of fixing before the drop impact. Therefore, vibration leakage from the tuning fork base 10 also approaches and increases at the time of fixing before the drop impact. Accordingly, the degree of decrease in the vibration frequency before and after the drop impact is reduced, and the amount of frequency change is also reduced.

そして、密着面積がさらに増加すると剛性の低下度合いは同様に小さくなる。しかし、密着面積が一定の剛性（固着強度）を維持する面積以上に大きくなると、余剰となる密着面積が増えた分、落下衝撃による剛性の低下も大きくなって全体の振動漏れは、落下衝撃前の固着時よりも少なくなる。したがって、落下衝撃前後での振動周波数の低下度合が大きくなり、周波数変化量は大きくなる。これらのことから、落下衝撃前後での周波数変化特性は、上面平坦部による導電性接着剤８の密着面積と剛性とに依存した最小値を有する放物線状となると推察される。As the contact area further increases, the degree of decrease in rigidity is similarly reduced. However, if the contact area becomes larger than the area that maintains a certain level of rigidity (adhesion strength), the excess contact area will increase, and the decrease in rigidity due to drop impact will increase, and overall vibration leakage will occur before the drop impact. It is less than the time of fixing. Accordingly, the degree of decrease in the vibration frequency before and after the drop impact is increased, and the frequency change amount is increased. From these facts, it is presumed that the frequency change characteristic before and after the drop impact becomes a parabolic shape having a minimum value depending on the contact area and rigidity of the conductive adhesive 8 by the flat portion on the upper surface.

上記の実験結果では、先ず、金属バンプ６の上面平坦部の幅寸法が５０μｍ付近では音叉基部１０との密着面積が小さい。したがって、落下衝撃試験の際には小さい接着面積に衝撃が集中するため、導電性接着剤による剛性は低下する。これにより、落下衝撃前後での周波数変化は比較的に大きくなる（約16ｐｐｍ）。In the above experimental results, first, the contact area with the tuning fork base 10 is small when the width dimension of the upper flat portion of the metal bump 6 is around 50 μm. Therefore, in the drop impact test, the impact is concentrated on a small adhesion area, and the rigidity of the conductive adhesive is lowered. Thereby, the frequency change before and after the drop impact becomes relatively large (about 16 ppm).

次に、上面平坦部の幅寸法が５０μｍ以上では密着面積が増加し、落下衝撃時の衝撃が分散されるため、導電性接着剤による剛性の低下度合は小さくなる。したがって、落下衝撃前後での周波数変化は徐々に小さくなる。そして、上面平坦部の幅寸法が１００μｍ付近で密着面積による剛性がある一定の値となって、落下衝撃前後での周波数変化は最小（８ｐｐｍ）となる。Next, when the width dimension of the upper flat portion is 50 μm or more, the contact area increases and the impact at the time of the drop impact is dispersed, so the degree of decrease in rigidity due to the conductive adhesive is reduced. Therefore, the frequency change before and after the drop impact is gradually reduced. Then, when the width dimension of the upper flat portion is around 100 μm, the rigidity due to the contact area becomes a constant value, and the frequency change before and after the drop impact becomes the minimum (8 ppm).

次に、上面平坦部の幅寸法が１００μｍ付近を越えるほど、密着面積はある一定の値となる剛性を維持する面積以上に大きくなる。したがって、前述のように余剰面積分の剛性低下も加わって、落下衝撃による全体の振動漏れは落下衝撃前の固着時よりも少なくなり、落下衝撃前後での周波数変化量は大きくなると、推察される。Next, as the width dimension of the upper flat portion exceeds about 100 μm, the contact area becomes larger than the area for maintaining the rigidity to be a certain value. Therefore, it is presumed that the rigidity of the surplus area is reduced as described above, and the total vibration leakage due to the drop impact is smaller than that at the time of fixing before the drop impact, and the frequency change amount before and after the drop impact is increased. .

これらのことから、金属バンプ６の上面平坦部の幅寸法は、周波数変化が最小の50ｐｐｍを中心として、剥離や破損を生じない程度の値である50ｐｐｍ以上であって、周波数変化の実用的な目安としての20ｐｐｍ以下となる200μｍ以下であれば、落下衝撃前後での周波数変化特性を良好に維持できる。勿論、その他の例えばＣＩ等の振動特性をも良好に維持する。For these reasons, the width dimension of the upper flat portion of the metal bump 6 is 50 ppm or more, which is a value that does not cause peeling or breakage, centered on 50 ppm at which the frequency change is minimum, and the frequency change is practical. If it is 200 μm or less, which is 20 ppm or less as a guide, the frequency change characteristics before and after the drop impact can be maintained well. Of course, other vibration characteristics such as CI are also maintained well.

さらに、落下衝撃前後での周波数変化特性を良好に維持する金属バンプ６の上面平坦部の幅寸法50μｍ〜200μｍは、金属バンプ６の幅寸法（220μｍ）に対して20〜90％になる。したがって、金属バンプ６幅寸法に対して上面平坦部が20〜90％であれば、落下衝撃前後での振動特性特に周波数変化特性を良好に維持できる。Furthermore, the width dimension 50 μm to 200 μm of the upper flat portion of the metal bump 6 that maintains a good frequency change characteristic before and after the drop impact is 20 to 90% with respect to the width dimension (220 μm) of the metal bump 6. Therefore, if the upper flat portion is 20 to 90% with respect to the width of the metal bump 6, the vibration characteristics before and after the drop impact, particularly the frequency change characteristics can be maintained well.

（第２実施形態）
第３図(a)(b)は本発明の第２実施形態を説明する音叉型圧電振動子の幅方向の断面図である。なお、前実施形態と同一部分の説明は省略又は簡略する。すなわち、第１実施形態では金属バンプ６（上面平坦部）の両端側は円弧状の曲面としたが、第２実施形態では例えば両端側を直線状の傾斜面とする「同図（ａ）」、あるいは階段状の段差を設ける「同図（ｂ）」。 (Second Embodiment)
3 (a) and 3 (b) are cross-sectional views in the width direction of a tuning fork type piezoelectric vibrator for explaining a second embodiment of the present invention. In addition, description of the same part as previous embodiment is abbreviate | omitted or simplified. That is, in the first embodiment, both end sides of the metal bump 6 (upper surface flat portion) are arcuate curved surfaces, but in the second embodiment, for example, both end sides are linear inclined surfaces. Or “step (b)” provided with a stepped step.

このような金属バンプ６の形状であっても、上面平坦部が密着面積となって振動特性及び固着強度を支配し、両端側の傾斜面及び階段状の下段が固着強度を補完する。したがって、第１実施形態と同様に、固着強度を維持して落下衝撃前後での周波数変化を抑制できる。  Even in such a shape of the metal bump 6, the flat portion on the upper surface becomes the contact area and governs the vibration characteristics and the fixing strength, and the inclined surfaces on both end sides and the stepped lower stage complement the fixing strength. Therefore, similarly to the first embodiment, it is possible to maintain the fixing strength and suppress the frequency change before and after the drop impact.

（第３実施形態）
第４図は本発明の第３実施形態を説明する音叉型圧電振動子の長さ方向の断面図である。第１及び第２実施形態では金属バンプ６の幅方向に傾斜面又は段差を設けたが、第３実施形態では長さ方向に傾斜面あるいは階段状の段差を設ける。この場合でも、前述同様に、固着強度を維持して落下衝撃前後での周波数変化を抑制できる。 (Third embodiment)
FIG. 4 is a longitudinal sectional view of a tuning fork type piezoelectric vibrator for explaining a third embodiment of the present invention . In the first and second embodiments, an inclined surface or a step is provided in the width direction of the metal bump 6, but in the third embodiment, an inclined surface or a stepped step is provided in the length direction. Even in this case, the frequency change before and after the drop impact can be suppressed while maintaining the fixing strength as described above.

(他の事項)
上記実施形態では金属バンプの幅又は長さ方向の両端側に傾斜面又は段差面を設けたが、金属バンプ６の例えば全外周に設けてもよく、要は、傾斜面又は段差面は音叉基部１０と対面する金属バンプの少なくとも一端側に設けてあればよい。そして、金属バンプ６は矩形状としたが、これに限らず円や楕円等としてもよく、上面平坦部が底面よりも小さくなっていれば同様の効果を奏する。また、音叉状圧電片７は典型的な例で説明したが、一対の音叉腕９の両主面に電界効率を高める溝を設けたり、音叉腕９の先端側に周波数調整用の金属膜を設けたりした場合でも同様に適用できる。 (Other matters)
In the above embodiment, the inclined surface or step surface is provided on both ends of the metal bump in the width or length direction, but it may be provided on the entire outer periphery of the metal bump 6, for example, the inclined surface or step surface is the tuning fork base. What is necessary is just to provide in the at least one end side of the metal bump which faces 10. The metal bump 6 has a rectangular shape, but is not limited thereto, and may be a circle, an ellipse, or the like. If the upper flat portion is smaller than the bottom surface, the same effect can be obtained. Although the tuning fork-shaped piezoelectric piece 7 has been described as a typical example, grooves for increasing electric field efficiency are provided on both main surfaces of the pair of tuning fork arms 9, or a metal film for frequency adjustment is provided on the tip side of the tuning fork arm 9. Even if it is provided, the same applies.

本発明は落下衝撃前後での特に周波数変化を抑制して固着強度を維持する金属バンプ６の形状に関し、特に音叉基部１０との密着面積を決定する金属バンプ６の上面平坦部の幅寸法を限定するものであるから、金属バンプ６が電極パッド４と接する底面積（金属バンプ６の全幅寸法）に対して、金属バンプ６上面平坦部の面積を小さくする趣旨の変更は本発明の技術的範囲に包含される。 The present invention relates to the shape of the metal bump 6 that suppresses the frequency change before and after the drop impact and maintains the fixing strength . In particular , the width dimension of the upper flat portion of the metal bump 6 that determines the contact area with the tuning fork base 10 is limited. Therefore, the technical scope of the present invention is to change the purpose of reducing the area of the flat portion of the upper surface of the metal bump 6 with respect to the bottom area (the total width dimension of the metal bump 6) where the metal bump 6 is in contact with the electrode pad 4. Is included .

第１図(a)(b)(c)は本発明の第１実施形態を説明する音叉型圧電振動子の図で、同図(a)は音叉状圧電片及びカバーを除いて内部を示す一部開放の斜視図、同図(b)はカバーは除いて内部を示す即ち音叉状圧電片の固着状態を示す一部開放の斜視図、同図(c)は断面図である。FIGS. 1 (a), 1 (b) and 1 (c) are diagrams of a tuning fork type piezoelectric vibrator for explaining the first embodiment of the present invention. FIG. 1 (a) shows the inside except for the tuning fork-shaped piezoelectric piece and the cover. FIG. 4B is a partially open perspective view showing the inside, ie, a state where the tuning fork-shaped piezoelectric piece is fixed , and FIG. 5C is a cross-sectional view. 本発明の第１実施形態の作用を説明する落下衝撃前後の周波数変化特性図である。 It is a frequency change characteristic figure before and behind the drop impact explaining the effect | action of 1st Embodiment of this invention . 本発明の第２実施形態のを説明する図で、同図(a)（ｂ）ともに特に金属バンプの形状を示す音叉型圧電振動子の幅方向の断面図である。FIGS. 6A and 6B are diagrams for explaining a second embodiment of the present invention, and FIGS. 5A and 5B are cross-sectional views in the width direction of a tuning fork type piezoelectric vibrator showing a shape of a metal bump . 本発明の第３実施形態を説明する図で、特に金属バンプの形状を示す音叉型圧電振動子の長さ方向の断面図である。It is a figure explaining 3rd Embodiment of this invention, and is sectional drawing of the length direction of the tuning fork type piezoelectric vibrator which shows the shape of a metal bump especially . 従来例を説明する音叉型圧電振動子の図で、同図 (a)は一部開放とした内部を示す斜視図、同図(b)は同断面図である。FIG. 2 is a diagram of a tuning-fork type piezoelectric vibrator for explaining a conventional example, in which FIG. 1 (a) is a perspective view showing the inside partially opened, and FIG. 従来例を説明する音叉状圧電片図で、同図(a)は正面図、同図（b）は電気的結線を示す模式的な平面図である。FIG. 2 is a tuning-fork-shaped piezoelectric piece diagram for explaining a conventional example, in which FIG. 1 (a) is a front view and FIG. 1 (b) is a schematic plan view showing electrical connections.

符号の説明Explanation of symbols

１ 容器本体、２ カバー、３ 段部、４ 電極パッド、５ 実装端子、６ 金属バンプ、７ 音叉状圧電片、８ 導電性接着剤、９ 音叉腕、９ａ 励振電極、１０ 基部、１０ａ 引出電極。 DESCRIPTION OF SYMBOLS 1 Container body, 2 cover, 3 step part, 4 electrode pad, 5 mounting terminal, 6 metal bump, 7 tuning fork-shaped piezoelectric piece, 8 conductive adhesive, 9 tuning fork arm, 9a excitation electrode, 10 base, 10a extraction electrode.

Claims (4)

凹状とした容器本体と、前記容器本体の凹部内に設けられた電極パッドと、前記電極パッド上に形成された金属バンプと、一対の音叉腕が延出した音叉基部の一主面を導電性接着剤によって前記金属バンプに固着される音叉状圧電片と、前記容器本体の開口端面に接合して前記音叉状圧電片を密閉封入するカバーとからなる音叉型圧電振動子において、前記金属バンプの上面平坦部の面積が前記金属バンプの底面積よりも小さいことを特徴とする音叉型圧電振動子。 The main surface of the tuning fork base, in which a pair of tuning fork arms is extended, is electrically conductive. The container body has a concave shape, the electrode pad provided in the recess of the container main body, the metal bump formed on the electrode pad, and the tuning fork arm. In a tuning fork type piezoelectric vibrator comprising a tuning fork-shaped piezoelectric piece fixed to the metal bump by an adhesive and a cover that is bonded to the opening end surface of the container body and hermetically encloses the tuning fork-shaped piezoelectric piece , tuning fork type piezoelectric vibrator is the area of the top surface flat portion and wherein the smaller than the bottom area of the metal bump. 前記金属バンプは少なくとも一端側に斜面又は階段形状を有する請求項１に記載の音叉型圧電振動子。The tuning fork type piezoelectric vibrator according to claim 1, wherein the metal bump has a slope or a step shape on at least one end side. 前記金属バンプは前記音叉状圧電片の幅方向となる両端側に斜面もしくは階段形状を有する請求項１に記載の音叉型圧電振動子。 2. The tuning fork type piezoelectric vibrator according to claim 1, wherein the metal bump has a slope or a step shape on both end sides in the width direction of the tuning fork-shaped piezoelectric piece . 前記音叉状圧電片の幅方向における前記金属バンプの上面平坦部の長さは、前記金属バンプ底面の長さの２０〜９０％である請求項１に記載の音叉型圧電振動子。 2. The tuning fork type piezoelectric vibrator according to claim 1 , wherein a length of a flat portion on an upper surface of the metal bump in a width direction of the tuning fork-shaped piezoelectric piece is 20 to 90% of a length of a bottom surface of the metal bump.
JP2008009143A 2007-01-30 2008-01-18 Tuning fork type piezoelectric vibrator Expired - Fee Related JP5100408B2 (en)

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JP2008009143A JP5100408B2 (en) 2007-01-30 2008-01-18 Tuning fork type piezoelectric vibrator
US12/011,507 US7888850B2 (en) 2007-01-30 2008-01-28 Tuning-fork type piezoelectric unit
EP08250348A EP1976115A1 (en) 2007-01-30 2008-01-29 Tuning-fork type piezoelectric unit
TW97103213A TWI419387B (en) 2007-01-30 2008-01-29 Tuning-fork type piezoelectric unit
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