JP2006311310A - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator Download PDF

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JP2006311310A
JP2006311310A JP2005132627A JP2005132627A JP2006311310A JP 2006311310 A JP2006311310 A JP 2006311310A JP 2005132627 A JP2005132627 A JP 2005132627A JP 2005132627 A JP2005132627 A JP 2005132627A JP 2006311310 A JP2006311310 A JP 2006311310A
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electrode
external connection
piezoelectric
piezoelectric vibrator
electrode pad
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Katsuhide Ibusuki
克英 指宿
Makoto Sano
誠 佐野
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator in which a piezoelectric diaphragm can surely be mounted on a container body regardless of magnitude of formation dimension accuracy tolerance of an electrode pad even in a piezoelectric vibrator using the container body with an electrode pad with remarkably reduced formation area and formation interval formed therein in advanced miniaturization, and the piezoelectric diaphragm can be attached onto the electrode pad stably with high and uniform adhesion strength because the piezoelectric diaphragm is arranged and fixed onto a bump formed on a flat electrode for conduction formed on an insulating substrate. <P>SOLUTION: In the piezoelectric vibrator, a flat insulating substrate on which an electrode for conduction electrically connected between both principal planes is formed on the both principal planes facing the electrode pad and an electrode for external connection is arranged between the electrode pad and the electrode for external connection, and the electrode pad and the electrode for external connection are electrically connected and attached through the electrode for conduction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、圧電振動子における圧電振動板の搭載形態に関し、特に小型化に対応した圧電振動子に関する。   The present invention relates to a mounting form of a piezoelectric diaphragm in a piezoelectric vibrator, and more particularly to a piezoelectric vibrator corresponding to downsizing.

近年では、移動体通信機器等の機器類の著しい小型化に伴い、これら機器に用いられる圧電振動子等の電子部品についても更なる小型化が求められている。現在では、２．５ｍｍ×２．０ｍｍの外形サイズの圧電振動子が主流になっており、それ以下のサイズの圧電振動子も開発されている。電子部品の一つである圧電振動子に使用される圧電振動板は、圧電素板の表裏主面上に、圧電素板を励振させる励振電極と、圧電振動板を収納する絶縁性容器に形成される電極パッドとの接続をとるための接続用電極と、励振電極と接続用電極とを導通接続する引き出し電極とを形成して構成されている。圧電振動板形状として小型化に有利な短冊形状が主流となってきた。更に小型化に対応するために、最近では金などの導電性金属を使用したバンプを導通固着手段として用いるようになってきた。   In recent years, along with the remarkable miniaturization of devices such as mobile communication devices, further miniaturization of electronic components such as piezoelectric vibrators used in these devices is required. At present, piezoelectric vibrators having an outer size of 2.5 mm × 2.0 mm have become mainstream, and piezoelectric vibrators of smaller sizes have been developed. Piezoelectric diaphragms used for piezoelectric vibrators, which are one of the electronic components, are formed on the front and back main surfaces of a piezoelectric element board in an excitation electrode that excites the piezoelectric element plate and an insulating container that houses the piezoelectric diaphragm. A connection electrode for connecting to the electrode pad to be connected and a lead electrode for conductively connecting the excitation electrode and the connection electrode are formed. As a piezoelectric diaphragm shape, a strip shape which is advantageous for downsizing has become mainstream. In order to cope with further downsizing, bumps using a conductive metal such as gold have recently been used as the conductive fixing means.

図４は、従来技術の一例として、各種電極を形成した圧電振動板を絶縁性容器体に収納しバンプにより導通固着した状態を示した圧電振動子の幅方向の断面図である。即ち、矩形状の圧電振動板４１を構成する圧電素板４２の表裏主面上には、対向する励振用電極４３と、励振用電極４３から圧電素板４２の一方の短辺へ延設した引き出し電極（図示しない）と、引き出し電極と電気的に接続し且つ容器体４６側の電極パッド４７との導通を取るための外部接続用電極４５とが形成されている。   FIG. 4 is a cross-sectional view in the width direction of a piezoelectric vibrator showing a state in which a piezoelectric diaphragm on which various electrodes are formed is housed in an insulating container body and conductively fixed by bumps as an example of the prior art. That is, on the front and back main surfaces of the piezoelectric element plate 42 constituting the rectangular piezoelectric diaphragm 41, the opposing excitation electrode 43 and the excitation electrode 43 are extended to one short side of the piezoelectric element plate 42. An extraction electrode (not shown) and an external connection electrode 45 are formed for electrical connection with the extraction electrode and electrical connection with the electrode pad 47 on the container body 46 side.

このように構成された圧電振動板４１を、容器体４６の凹部空間内に配置する。その際に、圧電振動板４１側の外部接続用電極４５と容器体４６側の電極パッド４７との間を、金等の金属材料によるバンプ４８により導通接続を行っている。又、このバンプ４８は圧電振動板４１を容器４６内部で姿勢保持も行っている。   The piezoelectric diaphragm 41 configured as described above is disposed in the recessed space of the container body 46. At this time, a conductive connection is made between the external connection electrode 45 on the piezoelectric diaphragm 41 side and the electrode pad 47 on the container body 46 side by a bump 48 made of a metal material such as gold. The bump 48 also holds the posture of the piezoelectric diaphragm 41 inside the container 46.

圧電振動板４１を内部空間に搭載した容器体４６の開口部に、金属製の蓋（図示せず）を配置し、容器４６内の凹部空間を気密封止することで、圧電振動子が形成される。   A metal lid (not shown) is arranged in the opening of the container body 46 in which the piezoelectric vibration plate 41 is mounted in the internal space, and the recessed space in the container 46 is hermetically sealed, thereby forming a piezoelectric vibrator. Is done.

前述のような圧電振動子については、以下のような文献が開示されている。   The following documents are disclosed regarding the piezoelectric vibrator as described above.

特開２０００−２９５０６４号公報JP 2000-295064 A

尚、出願人は前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を、本件出願時までに発見するに至らなかった。   In addition, the applicant has not found any prior art documents related to the present invention by the time of filing of the present application other than the prior art documents specified by the above prior art document information.

上述したような圧電振動子において、通常、容器体に形成する電極パッドの形成寸法精度公差は、圧電振動子に形成される外部接続用電極の形成寸法精度公差に比較して大きいため、圧電振動子の小型化が進むにつれ、圧電振動子内に搭載する圧電振動板に形成される外部接続用電極と、圧電振動子を構成する容器体に形成される電極パッドとの間に形成位置ズレが生じる場合があり、外部接続用電極及び電極パッドの形成面積でのズレ分の補正も、小型化による外部接続用電極及び電極パッドの形成面積の縮小のため難しく、最悪の場合は、外部接続用電極と電極パッドとの間が不導通且つ固着不能となる可能性がある。   In the piezoelectric vibrator as described above, the dimensional accuracy tolerance of the electrode pad formed on the container body is generally larger than the dimensional precision tolerance of the external connection electrode formed on the piezoelectric vibrator. As miniaturization of the child progresses, there is a displacement in the formation position between the external connection electrode formed on the piezoelectric diaphragm mounted in the piezoelectric vibrator and the electrode pad formed on the container body constituting the piezoelectric vibrator. In some cases, it is difficult to correct the displacement in the formation area of the external connection electrode and electrode pad due to the reduction in the formation area of the external connection electrode and electrode pad due to downsizing. There is a possibility that the electrode and the electrode pad are not conductive and cannot be fixed.

又、容器体の電極パッドはメッキ形成であるため、電極パッドの外部接続用電極接続側主面辺縁部が曲率を有した形状で形成されるが、電極パッドの形成面積が小型化により縮小するため、曲率が形成される領域が、外部接続用電極接続側主面の中央部分まで及んでしまう。そのため、このような電極パッド上に導通固着に使用するバンプを、圧電振動板の外部接続用電極の表面に対し正対した形態で形成することが難しく、圧電振動板を所望の形態で且つ安定的に電極パッド上に固着することが困難となる恐れがある。   In addition, since the electrode pad of the container body is formed by plating, the outer peripheral electrode connection side main surface edge of the electrode pad is formed with a curved shape, but the electrode pad formation area is reduced by downsizing. Therefore, the region where the curvature is formed extends to the central portion of the external connection electrode connection side main surface. For this reason, it is difficult to form bumps used for conductive fixation on such electrode pads in a form facing the surface of the external connection electrode of the piezoelectric diaphragm, and the piezoelectric diaphragm can be stably formed in a desired form. In particular, it may be difficult to adhere to the electrode pad.

本発明は前述した問題点を解決するために成されたものであり、絶縁材料により形成された容器体内の上方に開口した凹部空間内に、圧電振動板を、この凹部空間底面に形成された２個の電極パッドと、この電極パッドに対応する圧電振動板に形成された外部接続用電極とを電気的に接続する形態で収納固着した圧電振動子において、
電極パッドと外部接続用電極の間に、電極パッド及び外部接続用電極に対向する両主面上に両主面間で電気的に接続している導通用電極が形成された平板状の絶縁基板が配置されており、この導通用電極を介して電極パッドと外部接続用電極が電気的に接続且つ固着されていることを特徴とする圧電振動子である。 The present invention has been made to solve the above-described problems, and a piezoelectric diaphragm is formed on the bottom surface of the recess space in the recess space opened upward in the container body made of an insulating material. In the piezoelectric vibrator housed and fixed in a form in which two electrode pads and an external connection electrode formed on the piezoelectric diaphragm corresponding to the electrode pad are electrically connected,
A flat insulating substrate having conductive electrodes electrically connected between the main surfaces on both main surfaces facing the electrode pads and the external connection electrodes between the electrode pads and the external connection electrodes The piezoelectric vibrator is characterized in that the electrode pad and the external connection electrode are electrically connected and fixed through the conductive electrode.

又、上記絶縁基板の材質が、圧電振動板を形成する材料と同じ材質であることを特徴とする前段落記載の圧電振動子でもある。   The piezoelectric vibrator according to the preceding paragraph, wherein the insulating substrate is made of the same material as that of the piezoelectric diaphragm.

更に、電極パッドと導通用電極との間、及び導通用電極と外部接続用電極との間の電気的接続及び固着にバンプを用いたことを特徴とする上記段落記載の圧電振動子でもある。   Furthermore, the piezoelectric vibrator according to the above paragraph is characterized in that bumps are used for electrical connection and fixation between the electrode pad and the conduction electrode and between the conduction electrode and the external connection electrode.

更に又、圧電振動板に形成されている外部接続用電極の外形状が概略正方形であり、この外部接続用電極の一辺の寸法が０．３ｍｍ以下であることを特徴とする上記段落記載の圧電振動子でもある。   Furthermore, the external shape of the external connection electrode formed on the piezoelectric diaphragm is substantially square, and the dimension of one side of the external connection electrode is 0.3 mm or less. It is also a vibrator.

又、圧電振動子に形成されている外部接続用電極において、隣り合って形成されている外部接続用電極間の間隔が０．３ｍｍ以下であることを特徴とする上記段落記載の圧電振動子でもある。   Further, in the external connection electrodes formed on the piezoelectric vibrator, the interval between the external connection electrodes formed adjacent to each other is 0.3 mm or less. is there.

従って、本発明の圧電振動子により、小型化が進み、形成面積及び形成間隔が著しく縮小した電極パッドを形成した容器体を用いた圧電振動子でも、電極パッドの形成寸法精度公差の大小に関係なく、圧電振動板を確実に容器体に搭載可能となる。又、圧電振動板を絶縁基板に形成された平坦な導通用電極上に形成されたバンプ上に配置し固着しているため、圧電振動板を安定的な形態で電極パッド上に固着することができ、固着強度も高く且つ均一にできる。   Accordingly, the piezoelectric vibrator according to the present invention is miniaturized, and the piezoelectric vibrator using the container body in which the electrode pad having the formation area and the formation interval is remarkably reduced is related to the size tolerance of the electrode pad. Therefore, the piezoelectric diaphragm can be reliably mounted on the container body. Further, since the piezoelectric diaphragm is disposed and fixed on the bump formed on the flat conductive electrode formed on the insulating substrate, the piezoelectric diaphragm can be fixed on the electrode pad in a stable form. It is possible to make the fixing strength high and uniform.

更に、絶縁基板の材質が、その上部に搭載する圧電振動板を形成する材料と同じ材質であることにより、熱膨張率の違いによる加熱時の熱ストレスの発生が抑制でき、圧電振動子の諸特性の悪化を防止できる。   Furthermore, since the insulating substrate is made of the same material as that of the piezoelectric diaphragm mounted on the insulating substrate, it is possible to suppress the generation of thermal stress during heating due to the difference in thermal expansion coefficient. Deterioration of characteristics can be prevented.

このことにより、小型化の進行に対応しつつ特性の悪化がない圧電振動子を提供する効果を奏する。尚、この効果は、圧電振動板に形成されている外部接続用電極の外形状が概略正方形であり、この外部接続用電極の一辺の寸法が０．３ｍｍ以下であるとき、或いは圧電振動子に形成されている外部接続用電極において、隣り合って形成されている外部接続用電極間の間隔が０．３ｍｍ以下であるときに顕著となる。   As a result, there is an effect of providing a piezoelectric vibrator that does not deteriorate in characteristics while responding to the progress of miniaturization. This effect is obtained when the external shape of the external connection electrode formed on the piezoelectric diaphragm is approximately square, and the dimension of one side of the external connection electrode is 0.3 mm or less, or In the formed external connection electrodes, this is noticeable when the interval between the adjacent external connection electrodes is 0.3 mm or less.

以下に、本発明における圧電振動子の実施形態を、図面を参照しながら説明する。
図１は、本発明における圧電振動子を、圧電振動子の一形態である水晶振動子で例示した概略平面図である。図２は、図１記載の仮想切断線Ａ１−Ａ２で切断した場合の概略断面図である。図３は、図１に図示した水晶振動子における水晶振動板搭載前の形態を示した概略平面図である。尚、各図では、説明を明りょうにするため構造体の一部を図示せず、また寸法も一部誇張して図示している。特に各部分の厚み方向の寸法は誇張して図示している。 Embodiments of a piezoelectric vibrator according to the present invention will be described below with reference to the drawings.
FIG. 1 is a schematic plan view illustrating a piezoelectric vibrator according to the present invention as a crystal vibrator that is one form of the piezoelectric vibrator. FIG. 2 is a schematic cross-sectional view taken along the virtual cutting line A1-A2 shown in FIG. FIG. 3 is a schematic plan view showing a form of the crystal resonator shown in FIG. 1 before mounting the crystal diaphragm. In each of the drawings, a part of the structure is not shown, and some dimensions are exaggerated for the sake of clarity. In particular, the dimension in the thickness direction of each portion is exaggerated.

即ち、図１，図２及び図３において、短冊薄型状の外形形状の水晶素板１１の表裏主面上は、水晶素板１１のほぼ中央に略長方形の励振用電極１２が表裏主面で対向するように蒸着法により形成されており、この励振用電極１２から支障素板１１の一方の短辺方向へ延設した引き出し電極１３と、引き出し電極１３と電気的に接続し、且つ容器体１５に形成された電極パッド１６との導通を取るための外部接続用電極１４とが形成されている。尚、外部接続用電極１４の外形形状は概略正方形である。   That is, in FIGS. 1, 2 and 3, on the front and back main surfaces of the rectangular thin plate crystal plate 11, a substantially rectangular excitation electrode 12 is formed on the front and back main surfaces in the approximate center of the crystal plate 11. The electrodes 13 are formed by vapor deposition so as to face each other. The lead electrode 13 extending from the excitation electrode 12 toward one short side of the obstacle plate 11 is electrically connected to the lead electrode 13 and is a container body. An external connection electrode 14 is formed for electrical connection with the electrode pad 16 formed on the electrode 15. The external shape of the external connection electrode 14 is approximately square.

このような形状の圧電振動板１０を搭載する容器体１５は、表面に導体パターンやビアホールを形成したセラミックス層を積層して形成されており、容器体１５には上方に開口した圧電振動子が挿入可能な凹部空間１７が形成されている。この凹部空間１７の底面には凹部空間１７の一方の短辺近傍に、この短辺と平行する形態で２個の電極パッド１６が形成されている。この電極パッド１６はメッキで形成されている。   The container body 15 on which the piezoelectric diaphragm 10 having such a shape is mounted is formed by laminating a ceramic layer having a conductor pattern or a via hole formed on the surface, and the container body 15 has a piezoelectric vibrator opened upward. An insertable recess space 17 is formed. Two electrode pads 16 are formed on the bottom surface of the concave space 17 in the vicinity of one short side of the concave space 17 so as to be parallel to the short side. The electrode pad 16 is formed by plating.

この電極パッド１６の上には第１のバンプ１９が形成されており、その第１のバンプ１９の上には、両主面間で電気的に接続している導通用電極２０が形成された矩形平板状の絶縁基板２１が、第１のバンプに絶縁基板２１の一方の主面側の導通用電極２０が接触するように配置され、第１のバンプ１９により、絶縁基板２１の一方の主面に形成された導通用電極２０と電極パッド１６とが電気的に接続されている。又、絶縁基板２１本体も第１のバンプ１９によって電極パッド１６に固着されている。尚、絶縁基板２１の本体素材は水晶である。   A first bump 19 is formed on the electrode pad 16, and a conductive electrode 20 is formed on the first bump 19 so as to be electrically connected between both main surfaces. The rectangular flat insulating substrate 21 is arranged so that the conductive electrode 20 on one main surface side of the insulating substrate 21 is in contact with the first bump, and the first bump 19 causes one main substrate of the insulating substrate 21 to be in contact with the first bump. The conductive electrode 20 formed on the surface and the electrode pad 16 are electrically connected. The main body of the insulating substrate 21 is also fixed to the electrode pad 16 by the first bump 19. The main body material of the insulating substrate 21 is quartz.

電極パッド１６の上に配置した絶縁基板２１の他方の主面に形成された導通用電極２０の上には第２のバンプ２２が形成されており、その第２のバンプ２２の上には、各種電極を形成した水晶振動板１０が、第２のバンプ２２に水晶振動板１０に形成されている外部接続用電極１４が選書するように配置され、第２のバンプ２２により、絶縁基板２１の他方の主面に形成された導電用電極２０と外部接続用電極１４とが電気的に接続されている。又、水晶振動板１０本体も第２のバンプ２２によって絶縁基板２１に固着されている。   A second bump 22 is formed on the conductive electrode 20 formed on the other main surface of the insulating substrate 21 disposed on the electrode pad 16, and on the second bump 22, The quartz crystal plate 10 on which various electrodes are formed is arranged so that the external connection electrodes 14 formed on the quartz plate 10 are selected on the second bumps 22. The conductive electrode 20 formed on the other main surface and the external connection electrode 14 are electrically connected. The main body of the crystal diaphragm 10 is also fixed to the insulating substrate 21 by the second bumps 22.

水晶振動板１０を内部空間１７に搭載した容器体１５の開口部に、金属製の蓋（図示せず）を配置し、容器体１５の内部空間１７を気密封止することで、水晶振動子が形成される。   By placing a metal lid (not shown) in the opening of the container body 15 in which the crystal diaphragm 10 is mounted in the internal space 17 and hermetically sealing the internal space 17 of the container body 15, the crystal resonator Is formed.

このような形態の水晶振動子を形成することにより、小型化が進み、形成面積及び形成間隔が著しく縮小した電極パッド１６を形成した容器体１５を用いた圧電振動子でも、電極パッド１６の形成寸法精度大きな公差を、形成寸法精度公差が比較的小さい絶縁基板２１を電極パッド１６と外部接続用電極１４との間に配置することで緩和する。このことにより、水晶振動板１０を精度良く且つ確実に容器体内の凹部空間１７内に搭載可能となる。又、圧電振動板１０を絶縁基板１７に形成された平坦な導通用電極２０上に形成された第２のバンプ２２上に配置し固着しているため、圧電振動板１０をバランス良く安定的な形態で固着することができ、固着強度も高く且つ均一にできる。   By forming the crystal resonator in such a form, the piezoelectric pad using the container body 15 in which the electrode pad 16 in which the formation area and the formation interval are remarkably reduced is advanced and the electrode pad 16 is formed. Tolerance with large dimensional accuracy is alleviated by disposing the insulating substrate 21 having a relatively small dimensional accuracy tolerance between the electrode pad 16 and the external connection electrode 14. As a result, the crystal diaphragm 10 can be accurately and reliably mounted in the recessed space 17 in the container. In addition, since the piezoelectric diaphragm 10 is disposed and fixed on the second bump 22 formed on the flat conductive electrode 20 formed on the insulating substrate 17, the piezoelectric diaphragm 10 is balanced and stable. It can be fixed in the form, and the fixing strength can be high and uniform.

又、絶縁基板２１の材質が、その上部に搭載する水晶振動板１０と同じ材質である水晶であることにより、熱膨張率の違いによるエージング等の加熱時の熱ストレスの発生が抑制でき、因って、水晶振動板１０へ必要以上のストレスが加わることをなくなり、水晶振動板１０の振動特性が安定化する。   In addition, since the insulating substrate 21 is made of the same crystal material as the quartz crystal plate 10 mounted thereon, the generation of thermal stress during heating such as aging due to the difference in thermal expansion coefficient can be suppressed. As a result, unnecessary stress is not applied to the quartz diaphragm 10 and the vibration characteristics of the quartz diaphragm 10 are stabilized.

尚、本発明は圧電振動板１０に形成する外部接続用電極１４の形成寸法や各外部接続用電極１４間の形成間隔により、その効果の現れ方に違いがある。本発明の効果は、圧電振動子の小型化が進むにつれ外部接続用電極１４の形成寸法や各外部接続用電極１４間の形成間隔が極めて縮小した場合で、特に外部接続用電極１４が概略正方形の場合では外形寸法の異辺の長さが０．３ｍｍ以下の場合、或いは外部接続用電極１４間の形成間隔が０．３ｍｍ以下の場合に顕著となる。   In the present invention, there are differences in how the effects appear depending on the formation dimensions of the external connection electrodes 14 formed on the piezoelectric diaphragm 10 and the formation intervals between the external connection electrodes 14. The effect of the present invention is when the dimensions of the external connection electrodes 14 and the formation interval between the external connection electrodes 14 are extremely reduced as the size of the piezoelectric vibrator is reduced. In particular, the external connection electrodes 14 are substantially square. In this case, it becomes remarkable when the length of the different side of the outer dimension is 0.3 mm or less, or when the formation interval between the external connection electrodes 14 is 0.3 mm or less.

尚、上記実施例では、電極パッド１６と絶縁基板２１に形成した導通用電極との電気的接続、及び電極パッド１６と絶縁基板２１との固着に、バンプ（第１のバンプ１９）を用いた場合を開示したが、他の形態として、導電性接着剤を使用して電極パッド１６と絶縁基板２１に形成した導通用電極との電気的接続、及び電極パッド１６と絶縁基板２１との固着を行っても良い。更に、電極パッド１６と絶縁基板２１に形成した導通用電極との電気的接続機能と、電極パッド１６と絶縁基板２１との固着機能を、別の部材で賄っても良く、例えば、電気的接続にボンディングワイヤを用い、固着には絶縁性接着剤やバンプを用いる。   In the above embodiment, bumps (first bumps 19) are used for electrical connection between the electrode pads 16 and the conductive electrodes formed on the insulating substrate 21 and for fixing the electrode pads 16 and the insulating substrate 21. Although the case has been disclosed, as another embodiment, electrical connection between the electrode pad 16 and the conductive electrode formed on the insulating substrate 21 using a conductive adhesive, and adhesion between the electrode pad 16 and the insulating substrate 21 are performed. You can go. Further, the electrical connection function between the electrode pad 16 and the conductive electrode formed on the insulating substrate 21 and the fixing function between the electrode pad 16 and the insulating substrate 21 may be provided by different members. A bonding wire is used for fixing, and an insulating adhesive or bump is used for fixing.

又、上記実施例では、圧電振動板及び絶縁基板の材質として水晶を用いた場合を開示したが、本発明は実施例開示の材質に限定されるものではなく、他にタンタル酸リチウム、ニオブ酸リチウム又は圧電セラミックスなどを使用しても良い。更に、絶縁基板の材質も圧電振動板の材質の諸特性と近似する特性を有するのであれば、同一の材質に限定するものでもない。   Further, in the above embodiment, the case where quartz is used as the material of the piezoelectric diaphragm and the insulating substrate is disclosed, but the present invention is not limited to the material disclosed in the embodiment, and other than that, lithium tantalate, niobic acid Lithium or piezoelectric ceramics may be used. Furthermore, the material of the insulating substrate is not limited to the same material as long as it has characteristics that approximate the various characteristics of the material of the piezoelectric diaphragm.

更に、上記実施例では矩形状の水晶振動板を開示して説明したが、圧電振動板の外観形状は実施例開示の形状に限定されるものでなく、例えば音叉型の圧電振動板を使用した場合においても、本発明は有効に実施可能である。   Furthermore, in the above embodiment, the rectangular quartz crystal diaphragm has been disclosed and described. However, the external shape of the piezoelectric diaphragm is not limited to the shape disclosed in the embodiment. For example, a tuning fork type piezoelectric diaphragm is used. Even in this case, the present invention can be effectively implemented.

図１は、本発明における圧電振動子を、圧電振動子の一形態である水晶振動子で例示した概略平面図である。FIG. 1 is a schematic plan view illustrating a piezoelectric vibrator according to the present invention as a crystal vibrator that is one form of the piezoelectric vibrator. 図２は、図１記載の仮想切断線Ａ１−Ａ２で切断した場合の概略断面図である。FIG. 2 is a schematic cross-sectional view taken along the virtual cutting line A1-A2 shown in FIG. 図３は、図１に図示した水晶振動子における水晶振動板搭載前の形態を示した概略平面図である。FIG. 3 is a schematic plan view showing a form of the crystal resonator shown in FIG. 1 before mounting the crystal diaphragm. 図４は、従来の水晶振動子の一形態を示す幅方向の断面図である。FIG. 4 is a cross-sectional view in the width direction showing one embodiment of a conventional crystal resonator.

符号の説明Explanation of symbols

１０・・・水晶振動板（圧電振動板）
１１・・・水晶素板
１２・・・励振用電極
１３・・・引出電極
１４・・・外部接続用電極
１５・・・容器体
１６・・・電極パッド
１７・・・凹部空間
１９・・・第１のバンプ
２０・・・導電用電極
２１・・・絶縁基板
２２・・・第２のバンプ 10 ... Quartz diaphragm (piezoelectric diaphragm)
DESCRIPTION OF SYMBOLS 11 ... Crystal base plate 12 ... Excitation electrode 13 ... Extraction electrode 14 ... External connection electrode 15 ... Container body 16 ... Electrode pad 17 ... Recessed space 19 ... First bump 20... Conductive electrode 21... Insulating substrate 22.

Claims (5)

絶縁材料により形成された容器体内の上方に開口した凹部空間内に、圧電振動板を、該凹部空間底面に形成された２個の電極パッドと、該電極パッドに対応する該圧電振動板に形成された外部接続用電極とを電気的に接続する形態で収納固着した圧電振動子において、
該電極パッドと該外部接続用電極の間に、該電極パッド及び外部接続用電極に対向する両主面上に両主面間で電気的に接続する導通用電極が形成された平板状の絶縁基板が配置されており、該導通用電極を介して該電極パッドと該外部接続用電極が電気的に接続且つ固着されていることを特徴とする圧電振動子。 A piezoelectric diaphragm is formed in two recessed electrode spaces formed in an insulating material and opened in the upper part of the container body, and two electrode pads formed on the bottom surface of the recessed space and the piezoelectric diaphragm corresponding to the electrode pads. In the piezoelectric vibrator housed and fixed in a form of electrically connecting the external connection electrode,
A plate-like insulation having a conductive electrode electrically connected between the main surfaces on both main surfaces facing the electrode pad and the external connection electrode between the electrode pad and the external connection electrode A piezoelectric vibrator having a substrate disposed thereon, wherein the electrode pad and the external connection electrode are electrically connected and fixed via the conductive electrode. 該絶縁基板の材質が、圧電振動板を形成する材料と同じ材質であることを特徴とする請求項１記載の圧電振動子。   2. The piezoelectric vibrator according to claim 1, wherein the insulating substrate is made of the same material as that of the piezoelectric diaphragm. 該電極パッドと該導通用電極との間、及び該導通用電極と該外部接続用電極との間の電気的接続及び固着にバンプを用いたことを特徴とする請求項１記載の圧電振動子。   2. The piezoelectric vibrator according to claim 1, wherein bumps are used for electrical connection and fixation between the electrode pad and the conduction electrode and between the conduction electrode and the external connection electrode. . 該圧電振動板に形成されている外部接続用電極の外形状が概略正方形であり、該外部接続用電極の一辺の寸法が０．３ｍｍ以下であることを特徴とする請求項１記載の圧電振動子。   2. The piezoelectric vibration according to claim 1, wherein an outer shape of the external connection electrode formed on the piezoelectric vibration plate is substantially square, and a dimension of one side of the external connection electrode is 0.3 mm or less. Child. 該圧電振動子に形成されている外部接続用電極において、隣り合って形成されている外部接続用電極間の間隔が０．３ｍｍ以下であることを特徴とする請求項１記載の圧電振動子。   2. The piezoelectric vibrator according to claim 1, wherein, in the external connection electrodes formed on the piezoelectric vibrator, a distance between the external connection electrodes formed adjacent to each other is 0.3 mm or less.
JP2005132627A 2005-04-28 2005-04-28 Piezoelectric vibrator Pending JP2006311310A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1976115A1 (en) * 2007-01-30 2008-10-01 Nihon Dempa Kogyo Co., Ltd. Tuning-fork type piezoelectric unit
JP2010239329A (en) * 2009-03-31 2010-10-21 Kyocera Kinseki Corp Piezoelectric vibrator and piezoelectric oscillator
JP2011097553A (en) * 2009-09-30 2011-05-12 Seiko Instruments Inc Piezoelectric resonator, oscillator and oscillator package
WO2022024880A1 (en) * 2020-07-29 2022-02-03 京セラ株式会社 Piezoelectric device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1976115A1 (en) * 2007-01-30 2008-10-01 Nihon Dempa Kogyo Co., Ltd. Tuning-fork type piezoelectric unit
US7888850B2 (en) 2007-01-30 2011-02-15 Nihon Dempa Kogyo Co., Ltd. Tuning-fork type piezoelectric unit
JP2010239329A (en) * 2009-03-31 2010-10-21 Kyocera Kinseki Corp Piezoelectric vibrator and piezoelectric oscillator
JP2011097553A (en) * 2009-09-30 2011-05-12 Seiko Instruments Inc Piezoelectric resonator, oscillator and oscillator package
WO2022024880A1 (en) * 2020-07-29 2022-02-03 京セラ株式会社 Piezoelectric device

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