JP2008093759A - Super-strong adhesive sheet for polishing device - Google Patents
Super-strong adhesive sheet for polishing device Download PDFInfo
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- JP2008093759A JP2008093759A JP2006275882A JP2006275882A JP2008093759A JP 2008093759 A JP2008093759 A JP 2008093759A JP 2006275882 A JP2006275882 A JP 2006275882A JP 2006275882 A JP2006275882 A JP 2006275882A JP 2008093759 A JP2008093759 A JP 2008093759A
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- polishing apparatus
- foam material
- plastic foam
- pressure
- sensitive adhesive
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- 238000005498 polishing Methods 0.000 title claims abstract description 109
- 239000000853 adhesive Substances 0.000 title claims abstract description 91
- 230000001070 adhesive effect Effects 0.000 title claims abstract description 90
- 239000000463 material Substances 0.000 claims abstract description 80
- 239000002984 plastic foam Substances 0.000 claims abstract description 70
- 239000012790 adhesive layer Substances 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000011084 recovery Methods 0.000 claims abstract description 5
- 239000004820 Pressure-sensitive adhesive Substances 0.000 claims description 78
- 239000010410 layer Substances 0.000 claims description 37
- 238000001179 sorption measurement Methods 0.000 claims description 22
- 239000006261 foam material Substances 0.000 claims description 11
- 230000006835 compression Effects 0.000 claims description 6
- 238000007906 compression Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- 230000000274 adsorptive effect Effects 0.000 abstract 1
- 239000002390 adhesive tape Substances 0.000 description 27
- 238000003825 pressing Methods 0.000 description 10
- 239000006260 foam Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000010008 shearing Methods 0.000 description 4
- 239000011800 void material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- -1 polyethylene terephthalate Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- 229920005830 Polyurethane Foam Polymers 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000011496 polyurethane foam Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007761 roller coating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Adhesive Tapes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Description
本発明は、被研磨物を固定し所定の研磨を行なう研磨装置に使用される研磨装置用超強粘着シートに関し、特に吸着機能を併せ備えることによって、粘着面に対して安定に粘着される研磨装置用超強粘着シートに関する。 The present invention relates to a super-strong adhesive sheet for a polishing apparatus that is used in a polishing apparatus that fixes an object to be polished and performs predetermined polishing, and in particular, polishing that is stably adhered to an adhesive surface by having an adsorption function. The present invention relates to an ultra-strong adhesive sheet for equipment.
半導体製造分野では、半導体素子や薄型ディスプレイの微細化及び多層化による高集積化に伴い、半導体層や金属層の平坦化技術が重要な要素技術となっている。ウエハ上に集積回路を形成する場合、配線や電極などを高精度で再現性良く形成するためには、平坦化技術が不可欠であり、そのような平坦化処理を行なう研磨装置としてＣＭＰ（Chemical Mechanical Planarization）装置が用いられている。 In the semiconductor manufacturing field, as semiconductor elements and thin displays are highly integrated by miniaturization and multilayering, planarization techniques for semiconductor layers and metal layers have become important elemental technologies. When forming an integrated circuit on a wafer, planarization technology is indispensable in order to form wiring and electrodes with high accuracy and good reproducibility. As a polishing apparatus for performing such planarization processing, CMP (Chemical Mechanical Planarization) equipment is used.
このような平坦化を行なうＣＭＰ装置は、一般に回転定盤部、研磨回転部、スラリ供給部などが設けられており、回転定盤部、研磨回転部には、それぞれ回転機構が接続している（例えば、特許文献１参照。）。研磨の対象物としてのウエハは、回転定盤部上に位置する研磨パット上に配設されており、回転定盤部と研磨パットの間は、磨耗した研磨パットなどを取り替えたりする目的から、両面に粘着面が形成された粘着シートが使用されている。 A CMP apparatus for performing such flattening is generally provided with a rotating platen unit, a polishing rotating unit, a slurry supply unit, and the like, and a rotating mechanism is connected to each of the rotating platen unit and the polishing rotating unit. (For example, refer to Patent Document 1). The wafer as an object to be polished is disposed on a polishing pad located on the rotating platen part, and for the purpose of replacing a worn polishing pad or the like between the rotating platen part and the polishing pad, An adhesive sheet having adhesive surfaces formed on both sides is used.
一方、両面粘着テープ等を用いた取り付け物品の粘着、止め着けにあっては、取り付け物品が、取り付け対象面に対して固定的に止着されることが無く、取り付け面においてずれ出し、あるいは取り付け面から引き剥がされる等の難がある。粘着面におけるずれ出し、あるいは引き剥しは、取り付け物品の重さ等に対応して、粘着面にもたらされる荷重が大きくなるほど顕著に生ずるとともに、粘着後の時間の経過に伴って、より顕著に生ずる難がある。 On the other hand, in the case of adhesion and fastening of an attachment article using a double-sided adhesive tape or the like, the attachment article is not fixedly attached to the surface to be attached, and is shifted or attached on the attachment surface. There are difficulties such as peeling off from the surface. The sticking out or peeling off of the adhesive surface becomes more prominent as the load applied to the adhesive surface becomes larger corresponding to the weight of the attached article, etc., and more prominent with the passage of time after adhesion. There are difficulties.
このような状況から、本願出願人は、プラスチックフォームの吸着機能を利用した強粘構造を既に提案している（特許文献２参照。）。この強粘構造は、粘着剤層を備えるプラスチックフォーム材において、少なくとも粘着対象面に粘着される粘着剤層を備えた面に開口されている孔が、該プラスチックフォーム材の圧縮変形後における弾性復帰に伴って、前記粘着対象面に吸着する吸着機能を備えており、粘着剤層による粘着機能と、孔による吸着機能とが、同時に取付け物の取付け面に作用することとなり、取付け物を確実に止着状態に保持することができる特長を有している。 Under such circumstances, the present applicant has already proposed a strong-viscosity structure utilizing the adsorption function of plastic foam (see Patent Document 2). This strong-viscosity structure is such that, in a plastic foam material provided with a pressure-sensitive adhesive layer, at least the holes opened in the surface provided with the pressure-sensitive adhesive layer that adheres to the surface to be adhered are elastically restored after the plastic foam material is compressed and deformed. As a result, an adhesion function for adsorbing to the surface to be adhered is provided, and the adhesion function by the adhesive layer and the adsorption function by the holes act on the attachment surface of the attachment at the same time. It has the feature that it can be held in a fastened state.
前述のようなＣＭＰ装置においては、加工精度を高めるためには、粘着シートにはより一層強い強度で粘着することが求められており、種々の粘着シートが開発されているが、現在要求されている精度において十分な粘着力を有しているとは言えない状態である。このような研磨加工分野への応用として、特許文献１記載の強粘構造及びそれを備える粘着テープによれば、比較的に強い接着固定力を得ることができ、しかも比較的簡単に剥がせ、剥離後に跡が残ることもない等、幾多の長所を有することから、半導体製造分野への転用でその有用性は確実である。そして、この粘着シートをより更に一層改良することで、現在要求されている精度を満たすような十分な粘着力を有する粘着シートを提供することが求められており、本発明はこのような技術的な課題を解決するものである。 In the CMP apparatus as described above, in order to increase the processing accuracy, the adhesive sheet is required to adhere with a stronger strength, and various adhesive sheets have been developed. It is in a state where it cannot be said that it has sufficient adhesive strength with a certain accuracy. As an application to such a polishing field, according to the strong-viscosity structure described in Patent Document 1 and the pressure-sensitive adhesive tape including the same, it is possible to obtain a relatively strong adhesive fixing force, and relatively easily peel off, Since it has many advantages such as no traces remaining after peeling, its usefulness is certain in diversion to the semiconductor manufacturing field. Further, by further improving the pressure-sensitive adhesive sheet, it is required to provide a pressure-sensitive adhesive sheet having a sufficient pressure-sensitive adhesive strength that satisfies the currently required accuracy. It solves various problems.
本発明は、前記特許文献１記載の強粘構造を有する粘着シートをより一層改良して、研磨装置に適用することを目的に提案されたものである。すなわち、本発明は、特許文献１記載の強粘構造よりも優れた接着力を実現することが可能な研磨装置用超強粘着シートを提供することを目的とする。 The present invention has been proposed for the purpose of further improving the pressure-sensitive adhesive sheet having the strong-viscosity structure described in Patent Document 1 and applying it to a polishing apparatus. That is, an object of the present invention is to provide a super strong pressure-sensitive adhesive sheet for a polishing apparatus capable of realizing an adhesive force superior to that of the strong-viscosity structure described in Patent Document 1.
本発明の研磨装置用超強粘着シートは、被研磨物を固定し所定の研磨を行なう研磨装置に使用される研磨装置用超強粘着シートであって、前記粘着シートは、粘着対象面に臨むように開口された孔が形成されたプラスチックフォーム材と、前記孔に対応する位置に凹部を形成するように前記プラスチックフォーム材の粘着対象面に備えられた粘着剤層とを有し、前記プラスチックフォーム材の圧縮変形にともなって前記凹部が略平面状に変形し、前記プラスチックフォーム材の弾性復帰に応じて吸着機能を有してなり、前記研磨装置の可動部に粘着されることを特徴とする。 The super-strong pressure-sensitive adhesive sheet for a polishing apparatus of the present invention is a super-strong pressure-sensitive adhesive sheet for a polishing apparatus that is used in a polishing apparatus that fixes an object to be polished and performs predetermined polishing, and the pressure-sensitive adhesive sheet faces an adhesion target surface. The plastic foam material in which the opened holes are formed, and the pressure-sensitive adhesive layer provided on the adhesion target surface of the plastic foam material so as to form a recess at a position corresponding to the holes, the plastic The concave portion is deformed into a substantially flat shape with the compression deformation of the foam material, and has an adsorption function according to the elastic return of the plastic foam material, and is adhered to the movable portion of the polishing apparatus. To do.
本発明の研磨装置用超強粘着シートによれば、粘着剤層の吸盤状の凹部による吸着機能により、粘着剤の粘着力と吸盤状の凹部の吸着力によって粘着対象物をより強く粘着することができる。また、前記凹部は、吸盤状であることから、孔を粘着剤によって吸盤状とすることで、単なる吸着機能に比べせん断接着力が向上させることができる。また、本発明の研磨装置用超強粘着シートにおいて、前記プラスチックフォーム材をシート状基材上に形成されていることを特徴とする。また、本発明の研磨装置用超強粘着シートにおいて、前記プラスチックフォーム材は、前記シート状基材の両面に粘着対象面を外側となるように形成されていることを特徴とする。これにより、両面に粘着することができる。 According to the super strong pressure-sensitive adhesive sheet for a polishing apparatus of the present invention, the adhesion function of the pressure-sensitive adhesive layer by the sucker-like recesses allows the adhesion target to be more strongly adhered by the adhesive force of the pressure-sensitive adhesive and the suction force of the sucker-like recesses Can do. Moreover, since the said recessed part is sucker shape, a shearing adhesive force can be improved compared with a simple adsorption function by making a hole into a sucker shape with an adhesive. Moreover, the super-strong adhesive sheet for polishing apparatus of the present invention is characterized in that the plastic foam material is formed on a sheet-like substrate. In the super strong adhesive sheet for a polishing apparatus of the present invention, the plastic foam material is formed on both surfaces of the sheet-like substrate so that the adhesion target surface is on the outside. Thereby, it can adhere to both surfaces.
さらに、本発明の研磨装置用超強粘着シートによれば、前記粘着剤層と接して離型処理された剥離シートが設けられ、使用時に前記剥離シートが粘着剤層から剥離されることを特徴とする。これにより、粘着剤層の経時劣化や埃等の進入を防止することができ、粘着剤層の粘着力の低下を防ぐことができる。 Furthermore, according to the super strong pressure-sensitive adhesive sheet for polishing apparatus of the present invention, a release sheet that has been subjected to a release treatment in contact with the pressure-sensitive adhesive layer is provided, and the release sheet is peeled off from the pressure-sensitive adhesive layer during use. And As a result, it is possible to prevent deterioration of the pressure-sensitive adhesive layer with time and entry of dust and the like, and it is possible to prevent a decrease in the adhesive strength of the pressure-sensitive adhesive layer.
また本発明の研磨装置用超強粘着シートは、被研磨物を固定し所定の研磨を行なう研磨装置に使用される研磨装置用超強粘着シートであって、前記粘着シートは、粘着対象面に臨むように開口され当該フォーム材の厚み方向に延在される空隙部を以って形成されたプラスチックフォーム材と、前記プラスチックフォーム材の粘着対象面に備えられた粘着剤層とを有し、前記プラスチックフォーム材の圧縮変形にともなって前記空隙部が略平面状に変形し、前記プラスチックフォーム材の弾性復帰に応じて吸着機能を有してなり、前記研磨装置の可動部に粘着されることを特徴とする。 The super strong adhesive sheet for a polishing apparatus of the present invention is a super strong adhesive sheet for a polishing apparatus used for a polishing apparatus that fixes a polished object and performs predetermined polishing, and the adhesive sheet is on an adhesive target surface. A plastic foam material formed with a gap that is open to face and extend in the thickness direction of the foam material, and an adhesive layer provided on the adhesion target surface of the plastic foam material, As the plastic foam material is compressed and deformed, the gap portion is deformed into a substantially flat shape, has an adsorption function according to the elastic return of the plastic foam material, and is adhered to the movable portion of the polishing apparatus. It is characterized by.
さらに、本発明の研磨装置における部材の固定方法は、粘着対象面に臨むように開口された孔が形成されたプラスチックフォーム材と、前記プラスチックフォーム材の粘着対象面に備えられた粘着剤層とをシート状基材の両面に有する研磨装置用超強粘着シートを用意し、研磨装置の可動部に、前記研磨装置用超強粘着シートを、そのプラスチックフォーム材の圧縮変形にともなって前記凹部が略平面状に変形し、前記プラスチックフォーム材の弾性復帰に応じて吸着するように片面を粘着させ、所要の部材を前記研磨装置用超強粘着シートの他の面に粘着させることを特徴とする。 Furthermore, the method for fixing the member in the polishing apparatus of the present invention includes a plastic foam material in which holes opened so as to face the adhesion target surface, and an adhesive layer provided on the adhesion target surface of the plastic foam material, Is prepared on both sides of the sheet-like substrate, and the concave portion is formed in accordance with the compression deformation of the plastic foam material. It is deformed into a substantially flat shape, one surface is adhered so as to be adsorbed according to the elastic recovery of the plastic foam material, and a required member is adhered to the other surface of the super-strong adhesive sheet for the polishing apparatus. .
本発明の研磨装置用超強粘着シートによれば、粘着剤層の吸盤状の凹部による吸着機能により、粘着剤の粘着力と凹部の吸着力によって粘着対象物をより強く粘着することができ、研磨装置における可動部をより強く粘着することが可能である。また、孔を粘着剤によって吸盤状とすること、或いは当該フォーム材の厚み方向に延在される空隙部を形成することで、従来のものに比べて著しく高いせん断接着力を実現することが可能である。 According to the super-strong pressure-sensitive adhesive sheet for polishing apparatus of the present invention, the adhesion function of the pressure-sensitive adhesive layer by the suction cup-shaped concave portion allows the adhesive object to be more strongly adhered by the adhesive force of the pressure-sensitive adhesive and the suction force of the concave portion, It is possible to more strongly adhere the movable part in the polishing apparatus. In addition, it is possible to realize a significantly higher shear adhesive force than conventional ones by making the holes sucker-like with an adhesive or forming a void extending in the thickness direction of the foam material. It is.
以下、本発明の研磨装置用超強粘着シートについて、図面を参照して詳細に説明する。図１はＣＭＰ処理を施すための研磨装置の要部を示す図であり、研磨装置は、図示しない機構部により回転駆動される回転定盤部１１を有している。回転定盤部１１は所定の厚みを有した円盤状であり、その底面中心に形成された回転軸に機構部からの回転力が与えられ、所定の方向に回転する。回転定盤部１１の上面は平面となっており、その上面に本実施形態の研磨装置用超強粘着シート１２が貼り合わせられ、その研磨装置用超強粘着シート１２の上面に大きな円板状の研磨パッド１３が貼り合わせられている。研磨パッド１３は所要の樹脂の積層構造を有しており、裏面側が研磨装置用超強粘着シート１２を介して回転定盤部１１に固定されることになる。表面側はシリコンウエハの如きウエハ１４に接触し、そのウエハ１４を研磨する。この研磨パッド１３においては上側の層は、例えば、ポリウレタンなどの発泡性の合成樹脂を発泡硬化させて形成される硬質層であり、下側の層はウレタンを含浸させて得られる不織布タイプまたはフォームタイプの軟質層である。 Hereinafter, the super strong pressure-sensitive adhesive sheet for polishing apparatus of the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram showing a main part of a polishing apparatus for performing a CMP process, and the polishing apparatus has a rotating surface plate part 11 that is rotationally driven by a mechanism part (not shown). The rotating platen portion 11 has a disk shape having a predetermined thickness, and a rotational force from the mechanism portion is applied to a rotating shaft formed at the center of the bottom surface of the rotating surface plate portion 11 to rotate in a predetermined direction. The upper surface of the rotating surface plate portion 11 is a flat surface, and the super strong adhesive sheet 12 for polishing apparatus of the present embodiment is bonded to the upper surface, and a large disk shape is formed on the upper surface of the super strong adhesive sheet 12 for polishing apparatus. The polishing pad 13 is bonded together. The polishing pad 13 has a required resin laminate structure, and the back surface side is fixed to the rotating platen part 11 via the ultra-high pressure-sensitive adhesive sheet 12 for polishing apparatus. The surface side comes into contact with a wafer 14 such as a silicon wafer, and the wafer 14 is polished. In this polishing pad 13, the upper layer is a hard layer formed by foaming and curing foaming synthetic resin such as polyurethane, for example, and the lower layer is a nonwoven fabric type or foam obtained by impregnating urethane. It is a soft layer of the type.
この研磨パッド１３には、スラリーが供給され、回転定盤部１１と研磨回転部１５のそれぞれの回転に従い、ウエハ１４が研磨、すなわちＣＭＰ処理が施される。研磨回転部１５は、ウエハ１４を研磨パッド１３上で相対的に移動させるための機構である。なお、この研磨回転部１５の底面側にも、研磨用の部材１７を取り付けることができ、例えば点線で示す位置に本実施形態の研磨装置用超強粘着シート１６を配置し、研磨パッドや研磨シートなどの研磨用の部材１７を取り付けることも可能である。 Slurry is supplied to the polishing pad 13, and the wafer 14 is polished, that is, subjected to CMP processing in accordance with the rotation of the rotary platen unit 11 and the polishing rotating unit 15. The polishing rotation unit 15 is a mechanism for relatively moving the wafer 14 on the polishing pad 13. A polishing member 17 can also be attached to the bottom surface side of the polishing rotating unit 15. For example, the super strong adhesive sheet 16 for the polishing apparatus of the present embodiment is disposed at a position indicated by a dotted line, and a polishing pad or a polishing pad is provided. It is also possible to attach a polishing member 17 such as a sheet.
このように両面粘着型の研磨装置用超強粘着シート１２、１６の一方の面を研磨装置の可動部である回転定盤部１１や研磨回転部１５に対して貼り合わせ、さらに他の面に研磨用のパッドや部材を貼り合わせることで、粘着対象物をより強く粘着することができ、精度の高いＣＭＰ加工が可能となる。それぞれ研磨装置用超強粘着シート１２、１６は、後述するように、フォーム材の厚み方向に延在される空隙部である孔を有しており、その空隙部が略平面状に変形して、プラスチックフォーム材の弾性復帰に応じて吸着機能を発するように構成されているため、大変優れた粘着力を発揮することになる。 In this way, one surface of the double-sided adhesive type ultra-strong adhesive sheet 12 or 16 for a polishing apparatus is bonded to the rotary platen part 11 or the polishing rotating part 15 which is a movable part of the polishing apparatus, and further to the other surface. By adhering the polishing pad or member, the object to be adhered can be more strongly adhered, and highly accurate CMP processing can be performed. Each of the ultra-high pressure-sensitive adhesive sheets 12 and 16 for a polishing apparatus has a hole which is a void extending in the thickness direction of the foam material, as will be described later, and the void is deformed into a substantially flat shape. Since the plastic foam material is configured to exhibit an adsorbing function in response to the elastic recovery of the plastic foam material, a very excellent adhesive force is exhibited.
図２は研磨装置の他の構造例であり、ベルト型の研磨装置の例である。このベルト型の研磨装置では、一対の円筒状の駆動部２１、２１を有し、これら円筒状の駆動部２１、２１の周囲に巻回されるようにエンドレスのベルト部２２が設けられ、その外周囲には研磨装置用超強粘着シート２３を介して研磨材２４が取り付けられている。この研磨装置用超強粘着シート２３は、前述の研磨装置用超強粘着シート１２、１６と同様に、フォーム材の厚み方向に延在される空隙部である孔を有しており、その空隙部が略平面状に変形して、プラスチックフォーム材の弾性復帰に応じて吸着機能を発するように構成されているため、大変優れた粘着力を発揮することになる。 FIG. 2 shows another example of the structure of the polishing apparatus, which is an example of a belt-type polishing apparatus. The belt-type polishing apparatus has a pair of cylindrical drive units 21 and 21, and an endless belt unit 22 is provided so as to be wound around the cylindrical drive units 21 and 21. An abrasive 24 is attached to the outer periphery via a super-strong adhesive sheet 23 for a polishing apparatus. This super strong pressure-sensitive adhesive sheet 23 for polishing apparatus has holes, which are void portions extending in the thickness direction of the foam material, as in the above-described super strong pressure-sensitive adhesive sheets 12 and 16 for polishing apparatus. Since the portion is deformed into a substantially flat shape and exhibits an adsorption function in accordance with the elastic return of the plastic foam material, it exhibits a very excellent adhesive force.
このようなベルト型の研磨装置に対しても、本発明にかかる研磨装置用超強粘着シート２３を用いることができ、プラスチックフォーム材の弾性復帰に応じて吸着機能を発するように構成されているため、吸盤としての機能が向上し、高いせん断接着力が実現され、粘着対象物をより強く粘着することができる。 Also for such a belt-type polishing apparatus, the super-adhesive sheet 23 for polishing apparatus according to the present invention can be used, and is configured to emit an adsorption function in response to elastic recovery of the plastic foam material. Therefore, the function as a suction cup is improved, a high shear adhesive force is realized, and the sticking object can be more strongly stuck.
ここで、本発明にかかる研磨装置用超強粘着シートについてさらに詳しく説明すると、その基本構成は、図３のように、シート状基材１と、粘着対象面に望むように開口される孔２０及び内部に空間を有するプラスチックフォーム材２と、プラスチックフォーム材２の粘着対象面に形成される粘着剤層３と、粘着剤層３と接して離型処理された剥離シート４とにより構成されている。 Here, the super-strong pressure-sensitive adhesive sheet for polishing apparatus according to the present invention will be described in more detail. As shown in FIG. 3, the basic structure thereof is a sheet-like substrate 1 and a hole 20 opened as desired on the surface to be adhered. And a plastic foam material 2 having a space inside, a pressure-sensitive adhesive layer 3 formed on the surface of the plastic foam material 2 to be adhered, and a release sheet 4 that has been subjected to a release treatment in contact with the pressure-sensitive adhesive layer 3. Yes.
シート状基材１は、プラスチックフォーム材２と粘着剤層３とを有する強粘構造を備えるシート状の部材である。このシート状基材１は、粘着テープの用途に応じて材質等を適宜変更することができ、例えば、ポリエチレンテレフタレートといったポリマーを使用したシートとすることができる。さらに、例えばこのシート状基材１を非通気性の材料を使用することで、下記で説明する粘着剤層３の凹部３０の気密性を高めることができ、吸着機能を高めることができる。 The sheet-like substrate 1 is a sheet-like member having a strong-viscosity structure having a plastic foam material 2 and an adhesive layer 3. The sheet-like substrate 1 can be appropriately changed in material or the like according to the use of the adhesive tape, and can be a sheet using a polymer such as polyethylene terephthalate, for example. Furthermore, for example, by using a non-breathable material for the sheet-like base material 1, the airtightness of the concave portion 30 of the pressure-sensitive adhesive layer 3 described below can be enhanced, and the adsorption function can be enhanced.
プラスチックフォーム材２は、内部や表面に孔２０を有する多孔質構造で、粘着テープに対する押圧にともなって圧縮変形し、この押圧を解除した際に、押圧前の状態に弾性復帰する各種のプラスチックフォーム材である。例えば、ポリウレタンフォーム材、ポリエチレンフォーム材、ポリアクリルフォーム材等が挙げられる。このプラスチックフォーム材は、本実施形態の如き研磨装置用超強粘着シートの場合、シート状基材１上に形成され、本発明に特有の強粘構造の使用を容易にさせることができる。 The plastic foam material 2 has a porous structure having pores 20 inside and on its surface, and is variously compressed and deformed by pressing against the adhesive tape. When the pressing is released, the plastic foam material 2 is elastically restored to the state before pressing. It is a material. For example, a polyurethane foam material, a polyethylene foam material, a polyacrylic foam material, etc. are mentioned. This plastic foam material is formed on the sheet-like substrate 1 in the case of the super-strong adhesive sheet for polishing apparatus as in the present embodiment, and can easily use the strong-viscosity structure unique to the present invention.
このプラスチックフォーム材２は、図３のように、少なくとも粘着対象面に孔２０が開口されている。この孔２０は、プラスチックフォーム材２の形成時に形成された孔２０であり、粘着対象面に限らず、プラスチックフォーム材２の内部に形成されている。 As shown in FIG. 3, the plastic foam material 2 has holes 20 opened at least on the adhesion target surface. The hole 20 is a hole 20 formed when the plastic foam material 2 is formed, and is formed not only on the surface to be adhered but also inside the plastic foam material 2.
このプラスチックフォーム材２は、粘着テープに対する押圧時に変形し、その押圧が解除された際に弾性復帰するものであれば、いかなる態様の発泡体孔であってもよい。例えば、連続気泡タイプのプラスチックフォーム材、独立気泡タイプのプラスチックフォーム材、及び独立気泡と連続気泡との混在タイプのプラスチックフォーム材等、任意のフォ−ム材を用いることができる。 The plastic foam material 2 may be any form of foam hole as long as it is deformed when pressed against the adhesive tape and returns elastically when the pressure is released. For example, an arbitrary foam material such as an open cell type plastic foam material, a closed cell type plastic foam material, and a mixed type plastic foam material of closed cells and open cells can be used.
粘着剤層３は、粘着剤からなる層で、少なくとも、プラスチックフォーム材２の粘着対象面に形成されている。そして、この粘着剤層３は、プラスチックフォーム材２の粘着対象面にある孔２０に対応する位置に凹部３０が形成されている。 The pressure-sensitive adhesive layer 3 is a layer made of a pressure-sensitive adhesive, and is formed at least on the surface to be bonded of the plastic foam material 2. In the pressure-sensitive adhesive layer 3, a recess 30 is formed at a position corresponding to the hole 20 on the adhesion target surface of the plastic foam material 2.
この凹部３０は、プラスチックフォーム材２の孔２０に孔２０の大方を埋めるように粘着剤が入り込んでいる。そして、図４のように、凹部３０の中心近傍が孔２０に入り込むように凹部３０の中心に向かって徐々に深くする。この吸盤状の凹部３０は、粘着剤の量や層の厚さを調節して、このような形状いわゆる吸盤状となるように形成されている。この凹部３０の吸着機能により粘着対象物を吸着することができる。そして、凹部３０を吸盤状とすることで、凹部３０と粘着対象物との気密性が高くなり、吸着力が向上する。したがって、吸盤としての機能が向上し、高いせん断接着力が実現され、粘着対象物をより強く粘着することができる。また、押しつけることで、強いせん断接着力が実現される。 In this recess 30, an adhesive enters the hole 20 of the plastic foam material 2 so as to fill most of the hole 20. Then, as shown in FIG. 4, the depth is gradually increased toward the center of the recess 30 so that the vicinity of the center of the recess 30 enters the hole 20. The suction cup-shaped recess 30 is formed so as to have such a so-called suction cup shape by adjusting the amount of the adhesive and the thickness of the layer. The adhesion target can be adsorbed by the adsorption function of the recess 30. And by making the recessed part 30 into sucker shape, the airtightness of the recessed part 30 and the adhesion target object becomes high, and adsorption | suction power improves. Therefore, the function as a suction cup is improved, a high shear adhesive force is realized, and the pressure-sensitive adhesive object can be more strongly adhered. Moreover, strong shearing adhesive force is implement | achieved by pressing.
この凹部３０を吸盤状とするためには、プラスチックフォーム材２の孔２０が気泡１つによって形成されている方が好ましい。あるいは、２つ以上の気泡が連なって形成された状態であっても、例えば気泡１つから２つ程度のあまり深くない孔２０が好ましい。深すぎる孔の場合、粘着剤層３の形成時に凹部３０の略中央のくぼみが深くなり、粘着対象物の粘着の際に凹部３０が略平面となりにくくなり、凹部３０の気密性が損なわれる。 In order to make this recessed part 30 into a sucker shape, it is preferable that the hole 20 of the plastic foam material 2 is formed by one bubble. Or even if it is in the state where two or more bubbles were formed in a row, for example, one or two bubbles 20 that are not so deep are preferable. In the case of a hole that is too deep, the depression at the approximate center of the recess 30 becomes deep when the pressure-sensitive adhesive layer 3 is formed, and the recess 30 becomes difficult to be substantially flat when the adhesive object is adhered, and the airtightness of the recess 30 is impaired.
したがって、気泡１つすなわち単独気泡タイプのフォーム材を使用するか、連続気泡タイプ又は混在タイプのフォーム材の場合、プラスチックフォーム材２の厚さを薄くしたものを使用することで好適となる。例えば、プラスチックフォーム材２の厚さを１０ｍｍから０．０１ｍｍとすることが好ましい。プラスチックフォーム材２の厚さを薄くすることで、単独の気泡を増加させることができ、２つ以上の気泡が連なって形成された孔２０であっても、１つから２つ程度のあまり深くないものとなる。したがって、孔２０の大部分を粘着剤によって埋めるのが容易となる。 Therefore, it is preferable to use one foam type, that is, a single-cell type foam material, or in the case of an open-cell type or mixed type foam material, the one in which the thickness of the plastic foam material 2 is reduced. For example, the thickness of the plastic foam material 2 is preferably 10 mm to 0.01 mm. By reducing the thickness of the plastic foam material 2, a single bubble can be increased, and even if the hole 20 is formed by connecting two or more bubbles, the depth is about one to two. It will not be. Therefore, it becomes easy to fill most of the holes 20 with the adhesive.
粘着剤層３は、典型的には、溶剤タイプのウレタン系粘着剤、溶剤タイプのアクリル系粘着剤、あるいはエマルジョンタイプの酢酸ビニル系粘着剤、紫外線硬化型接着剤等を用いることができる。例えば、粘着剤層３は、比較的粘性の強い粘着剤を、ローラーコーティング法等によって、プラスチックフォーム材２の貼着面に塗布することによって形成することができる。 For the pressure-sensitive adhesive layer 3, typically, a solvent-type urethane-based pressure-sensitive adhesive, a solvent-type acrylic pressure-sensitive adhesive, an emulsion-type vinyl acetate-based pressure-sensitive adhesive, an ultraviolet curable adhesive, or the like can be used. For example, the pressure-sensitive adhesive layer 3 can be formed by applying a relatively strong pressure-sensitive adhesive to the sticking surface of the plastic foam material 2 by a roller coating method or the like.
また、この粘着剤層３の凹部３０を非気密構造とすることで、より強い吸着機能が得られる。そのために、例えば、プラスチックフォーム材２の粘着対象面に、その形状に合わせ、粘着剤層３の凹部３０の形成を阻害しない程度に薄く合成樹脂を塗布して、粘着剤層３の凹部３０への通気を防ぐことができ、吸着機能が向上する。また、また、例えば、プラスチックフォーム材の貼着面以外の面に合成樹脂液を塗布し、貼着面以外の面を非通気性の樹脂コーティング面としても同様の効果が得られる。 Moreover, a stronger adsorbing function can be obtained by forming the recess 30 of the pressure-sensitive adhesive layer 3 into a non-airtight structure. For this purpose, for example, a synthetic resin is thinly applied to the surface to be adhered of the plastic foam material 2 in accordance with the shape thereof so as not to inhibit the formation of the concave portion 30 of the pressure-sensitive adhesive layer 3, to the concave portion 30 of the pressure-sensitive adhesive layer 3. Can be prevented and the adsorption function is improved. Also, for example, the same effect can be obtained by applying a synthetic resin liquid to a surface other than the adhesive surface of the plastic foam material and using a surface other than the adhesive surface as a non-breathable resin coating surface.
剥離シート４は、粘着テープが粘着対象物に粘着する前に粘着剤層３に接するように設けられている。この剥離シート４は、すくなくとも、粘着剤層３と接する面に離型処理が施され、容易に粘着剤層３から剥離することができる。 The release sheet 4 is provided so as to contact the pressure-sensitive adhesive layer 3 before the pressure-sensitive adhesive tape adheres to the pressure-sensitive adhesive object. At least the release sheet 4 is subjected to a release treatment on the surface in contact with the pressure-sensitive adhesive layer 3 and can be easily peeled off from the pressure-sensitive adhesive layer 3.
このように形成される粘着テープは、粘着剤による粘着機能と、粘着剤層３に形成された凹部３０の吸着機能とが、同時に粘着対象物５に作用し、粘着対象物相互を確実に粘着することができる。すなわち、この粘着テープは、プラスチックフォーム材２における粘着対象面、粘着剤層３の凹部３０の開口周縁が、粘着剤によって、粘着対象面に対して粘着されることとなり、このプラスチックフォーム材２に吸着機能をもたらす孔の吸着面に対する気密状態での密着を可能としている。 In the pressure-sensitive adhesive tape formed in this way, the pressure-sensitive adhesive function and the suction function of the recess 30 formed in the pressure-sensitive adhesive layer 3 act on the pressure-sensitive adhesive object 5 at the same time, thereby securely bonding the pressure-sensitive adhesive objects to each other. can do. That is, in this adhesive tape, the adhesive target surface of the plastic foam material 2 and the opening peripheral edge of the recess 30 of the adhesive layer 3 are adhered to the adhesive target surface by the adhesive. Adhesion in an airtight state is possible with respect to the adsorption surface of the hole that provides the adsorption function.
上述のように構成される粘着テープにおいては、図４及び図５のように粘着対象物５を粘着テープの粘着機能と吸着機能とにより、強固に粘着することができる。図４は、粘着テープに粘着対象物５が粘着する前の状態を示す図であり、図５は、粘着対象物５の粘着テープに対する押圧によって、粘着テープに粘着させている状態を示す図である。 In the adhesive tape comprised as mentioned above, the adhesion target object 5 can be firmly adhere | attached with the adhesion function and adsorption function of an adhesive tape like FIG.4 and FIG.5. FIG. 4 is a diagram illustrating a state before the adhesive object 5 is adhered to the adhesive tape, and FIG. 5 is a diagram illustrating a state in which the adhesive object 5 is adhered to the adhesive tape by pressing the adhesive object 5 against the adhesive tape. is there.
図４のように、粘着テープの粘着剤層３には、吸盤状の凹部３０が形成されている。この粘着テープに粘着対象物５を粘着する際、剥離シート４を剥離し、表出した粘着剤層３に対する粘着対象物５の押圧によって、プラスチックフォーム材２が弾性圧縮する。このとき、プラスチックフォーム材２の孔２０が変形する。そして、この孔２０の対応する位置に形成されている吸盤状の凹部３０が粘着対象物５に押し付けられる。 As shown in FIG. 4, a sucker-like recess 30 is formed in the adhesive layer 3 of the adhesive tape. When the adhesive object 5 is adhered to the adhesive tape, the release sheet 4 is peeled, and the plastic foam material 2 is elastically compressed by pressing the adhesive object 5 against the exposed adhesive layer 3. At this time, the hole 20 of the plastic foam material 2 is deformed. Then, the suction cup-shaped recess 30 formed at the corresponding position of the hole 20 is pressed against the adhesion target object 5.
凹部３０が粘着対象物５に押し付けられることで、図３のように、凹部３０の粘着対象物５との接触部分が略平面となる。これにより、凹部３０と粘着対象物５とが密着し、粘着対象物５が押し付ける前に存在した凹部３０内の空気が外に逃げ、負圧となる。すなわち、粘着対象物５に対して凹部３０が吸着する。したがって、粘着対象物５の粘着テープに対する押圧を解除しても、凹部３０の吸着機能により、粘着対象物５を吸着することができる。また、同時に、粘着剤層３０の粘着機能を有するため、粘着対象物５を粘着テープにより強固に粘着させることができる。また、凹部３０が吸盤状であるため、せん断接着力が強い。 By pressing the concave portion 30 against the adhesion target object 5, the contact portion of the concave portion 30 with the adhesion target object 5 becomes substantially flat as shown in FIG. 3. Thereby, the recessed part 30 and the adhesion target object 5 closely_contact | adhere, the air in the recessed part 30 which existed before the adhesion target object 5 pressed down escapes outside, and becomes a negative pressure. That is, the concave portion 30 is attracted to the adhesion target object 5. Therefore, even if the pressing of the adhesive object 5 against the adhesive tape is released, the adhesive object 5 can be adsorbed by the adsorption function of the recess 30. Moreover, since it has the adhesion function of the adhesive layer 30, simultaneously, the adhesion target object 5 can be firmly adhered with an adhesive tape. Moreover, since the recessed part 30 is a suction cup shape, the shear adhesive force is strong.
このようにして構成される粘着テープにおいては、粘着対象物に対して、圧縮後における弾性復帰に伴う孔の有する吸着機能と、この孔を有する面における粘着剤層による粘着機能とによって、強固な止着状態を作り出すことができる。そして、凹部３０が吸盤としての機能を備えることで、せん断接着力が向上する。一方、凹部３０は吸盤として機能するため、粘着対象物を粘着テープから引き剥がすことで容易に引き剥がすことができる。 In the pressure-sensitive adhesive tape configured as described above, the adhesive object has a strong adhesion function due to the adsorption function of the hole accompanying the elastic return after compression and the adhesion function of the pressure-sensitive adhesive layer on the surface having the hole. A stationary state can be created. And since the recessed part 30 is equipped with the function as a suction cup, a shearing adhesive force improves. On the other hand, since the recessed part 30 functions as a suction cup, it can be easily peeled off by peeling off the adhesive object from the adhesive tape.
先の実施の形態で説明した粘着テープは、片面の粘着テープに限られるものではなく、例えば、シート状基材の両面に粘着対象面を外側となるようにプラスチックフォーム材を有するような両面粘着テープであってもよい。 The pressure-sensitive adhesive tape described in the previous embodiment is not limited to a single-sided pressure-sensitive adhesive tape. For example, a double-sided pressure-sensitive adhesive having a plastic foam material on both surfaces of a sheet-like substrate so that the surface to be bonded is outside. It may be a tape.
この両面粘着テープは、図６のように、シート状基材１の両面に、プラスチックフォーム材２と、粘着剤層３と、剥離シート４とを備えている。そして、プラスチックフォーム材２の粘着対象面には、孔２０を備えている。そして、粘着剤層３は、その孔２０の対応する位置に吸盤状の凹部３０を備えている。尚、実施の形態２で説明する両面粘着テープの各部材は、同一の番号を付し、説明を省略する。 As shown in FIG. 6, this double-sided pressure-sensitive adhesive tape includes a plastic foam material 2, a pressure-sensitive adhesive layer 3, and a release sheet 4 on both surfaces of a sheet-like substrate 1. The adhesive foam surface of the plastic foam material 2 is provided with holes 20. The pressure-sensitive adhesive layer 3 includes a sucker-like recess 30 at a position corresponding to the hole 20. In addition, each member of the double-sided pressure-sensitive adhesive tape described in Embodiment 2 is assigned the same number, and description thereof is omitted.
両面に強粘構造を備えた両面粘着テープとすることで、粘着テープの両側から２つの粘着対象物５の粘着テープに対する押圧によって、上述と同様に、粘着テープの粘着剤層３０に２つの粘着対象物５が押し付けられる。２つの粘着対象物５が押し付けられることで、凹部３０が粘着対象物５に対して略平面となり、吸着機能が生じ、粘着テープが粘着機能と吸着機能とによって強固に粘着する。また、凹部３０が吸盤状であることで、せん断接着力が高くなる。また、粘着対象物５を両面粘着テープから引き剥がすことも容易である。 By making the double-sided adhesive tape having a strong-viscosity structure on both sides, two adhesives are applied to the adhesive layer 30 of the adhesive tape by pressing the two adhesive objects 5 against the adhesive tape from both sides of the adhesive tape, as described above. The object 5 is pressed. When the two adhesion objects 5 are pressed, the concave portion 30 becomes substantially flat with respect to the adhesion object 5, an adsorption function is generated, and the adhesive tape is firmly adhered by the adhesion function and the adsorption function. Moreover, since the recessed part 30 is a suction cup shape, a shearing adhesive force becomes high. It is also easy to peel off the adhesive object 5 from the double-sided adhesive tape.
図７は、一方の面が圧縮された状態の両面粘着テープの断面を示すものである。シート状基材１は、プラスチックフォーム材２と粘着剤層３が備えられ、図７にはシート状基材１を構成する繊維１０が確認できる。そして、シート状基材１の図７中下方には、シート状基材１から粘着剤層３に向かうように図中垂直方向に延在される空隙部３５が形成されている。一方、シート状基材１の図７中上方は、プラスチックフォーム材２が圧縮されている。粘着対象物を粘着させる際に、この粘着テープを図７のような状態となるように粘着対象物を押しつけることで、吸着力が向上し、粘着対象物をより強く粘着することができるとともに、強いせん断接着力が実現される。 FIG. 7 shows a cross section of the double-sided pressure-sensitive adhesive tape in a state where one surface is compressed. The sheet-like base material 1 is provided with a plastic foam material 2 and an adhesive layer 3, and the fibers 10 constituting the sheet-like base material 1 can be confirmed in FIG. 7. And the space | gap part 35 extended in the orthogonal | vertical direction in the figure so that it may go to the adhesive layer 3 from the sheet-like base material 1 is formed in the lower part of the sheet-like base material 1 in FIG. On the other hand, the plastic foam material 2 is compressed above the sheet-like substrate 1 in FIG. When adhering the adhesive object, by pressing the adhesive object such that the adhesive tape is in a state as shown in FIG. 7, the adsorption force is improved, and the adhesive object can be more strongly adhered, Strong shear adhesion is achieved.
１ シート状基材
２ プラスチックフォーム材
３ 粘着剤層
４ 剥離シート
１１ 回転定盤部
１２ 研磨装置用超強粘着シート
１３ 研磨パッド
１４ ウエハ
１５ 研磨回転部
１６ 研磨装置用超強粘着シート
１７ 研磨用の部材
２０ 孔
２１ 駆動部
２２ ベルト部
２３ 研磨装置用超強粘着シート
２４ 研磨材
３０ 凹部
３５ 空隙部
DESCRIPTION OF SYMBOLS 1 Sheet-like base material 2 Plastic foam material 3 Adhesive layer 4 Release sheet 11 Rotating surface plate part 12 Super strong adhesive sheet for polishing apparatus 13 Polishing pad 14 Wafer 15 Polishing rotation part 16 Super strong adhesive sheet for polishing apparatus 17 For polishing Member 20 Hole 21 Driving part 22 Belt part 23 Super strong adhesive sheet 24 for polishing apparatus Abrasive material 30 Recess 35 Recess
Claims (9)
前記粘着シートは、粘着対象面に臨むように開口された孔が形成されたプラスチックフォーム材と、前記孔に対応する位置に凹部を形成するように前記プラスチックフォーム材の粘着対象面に備えられた粘着剤層とを有し、
前記プラスチックフォーム材の圧縮変形にともなって前記凹部が略平面状に変形し、前記プラスチックフォーム材の弾性復帰に応じて吸着機能を有してなり、
前記研磨装置の可動部に粘着されることを特徴とする研磨装置用超強粘着シート。 In a super-strong adhesive sheet for a polishing apparatus used in a polishing apparatus that fixes a workpiece and performs predetermined polishing,
The pressure-sensitive adhesive sheet is provided on a pressure-sensitive adhesive surface of the plastic foam material so as to form a recess at a position corresponding to the hole, and a plastic foam material having a hole opened to face the pressure-sensitive adhesive surface. Having an adhesive layer,
With the compression deformation of the plastic foam material, the concave portion is deformed into a substantially flat shape, and has an adsorption function according to the elastic return of the plastic foam material,
A super strong pressure-sensitive adhesive sheet for a polishing apparatus, which is adhered to a movable part of the polishing apparatus.
前記粘着シートは、粘着対象面に臨むように開口され当該フォーム材の厚み方向に延在される空隙部を以って形成されたプラスチックフォーム材と、前記プラスチックフォーム材の粘着対象面に備えられた粘着剤層とを有し、
前記プラスチックフォーム材の圧縮変形にともなって前記空隙部が略平面状に変形し、前記プラスチックフォーム材の弾性復帰に応じて吸着機能を有してなり、
前記研磨装置の可動部に粘着されることを特徴とする研磨装置用超強粘着シート。 In a super-strong adhesive sheet for a polishing apparatus used in a polishing apparatus that fixes a workpiece and performs predetermined polishing,
The pressure-sensitive adhesive sheet is provided on a pressure-sensitive adhesive surface of the plastic foam material and a plastic foam material formed with a gap that is opened to face the pressure-sensitive adhesive surface and extends in the thickness direction of the foam material. An adhesive layer,
With the compression deformation of the plastic foam material, the gap is deformed into a substantially flat shape, and has an adsorption function according to the elastic return of the plastic foam material,
A super strong pressure-sensitive adhesive sheet for a polishing apparatus, which is adhered to a movable part of the polishing apparatus.
研磨装置の可動部に、前記研磨装置用超強粘着シートを、そのプラスチックフォーム材の圧縮変形にともなって前記凹部が略平面状に変形し、前記プラスチックフォーム材の弾性復帰に応じて吸着するように片面を粘着させ、
所要の部材を前記研磨装置用超強粘着シートの他の面に粘着させることを特徴とする研磨装置における部材の固定方法。 Super strong for polishing apparatus having a plastic foam material having holes opened so as to face the adhesion target surface, and an adhesive layer provided on the adhesion target surface of the plastic foam material on both surfaces of the sheet-like substrate Prepare an adhesive sheet,
The super strong adhesive sheet for polishing apparatus is attached to the movable part of the polishing apparatus so that the concave portion is deformed into a substantially flat shape due to the compression deformation of the plastic foam material, and is adsorbed according to the elastic recovery of the plastic foam material. Adhere one side to
A method for fixing a member in a polishing apparatus, wherein a required member is adhered to the other surface of the super-strong adhesive sheet for the polishing apparatus.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI421146B (en) * | 2010-11-18 | 2014-01-01 | San Fang Chemical Industry Co | A sheet for mounting a workpiece |
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| JPH0642059U (en) * | 1992-11-16 | 1994-06-03 | 千代田株式会社 | Surface plate for attaching polishing cloth of polishing machine |
| JPH07166139A (en) * | 1993-12-13 | 1995-06-27 | Kansai Form Kako Kk | Tacky adhesive tape or sheet |
| JP2005019669A (en) * | 2003-06-26 | 2005-01-20 | Matsushita Electric Ind Co Ltd | Polishing pad, polishing device and method for polishing wafer |
| JP2006095657A (en) * | 2004-09-30 | 2006-04-13 | Topcon Corp | Adhesive sheet for fitting spectacle lens |
| WO2006041024A1 (en) * | 2004-10-15 | 2006-04-20 | Musashi Chemicals Industry Co., Ltd. | Pressure-sensitive adhesive tape for fixing lens and method for processing lens using the same |
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| JPH0623664A (en) * | 1992-07-07 | 1994-02-01 | Shin Etsu Handotai Co Ltd | Sheet-form resilient foam and jig for polishing wafer by using it |
| JPH0642059U (en) * | 1992-11-16 | 1994-06-03 | 千代田株式会社 | Surface plate for attaching polishing cloth of polishing machine |
| JPH07166139A (en) * | 1993-12-13 | 1995-06-27 | Kansai Form Kako Kk | Tacky adhesive tape or sheet |
| JP2005019669A (en) * | 2003-06-26 | 2005-01-20 | Matsushita Electric Ind Co Ltd | Polishing pad, polishing device and method for polishing wafer |
| JP2006095657A (en) * | 2004-09-30 | 2006-04-13 | Topcon Corp | Adhesive sheet for fitting spectacle lens |
| WO2006041024A1 (en) * | 2004-10-15 | 2006-04-20 | Musashi Chemicals Industry Co., Ltd. | Pressure-sensitive adhesive tape for fixing lens and method for processing lens using the same |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI421146B (en) * | 2010-11-18 | 2014-01-01 | San Fang Chemical Industry Co | A sheet for mounting a workpiece |
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