JP2008058014A - X線分析装置 - Google Patents
X線分析装置 Download PDFInfo
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- JP2008058014A JP2008058014A JP2006232192A JP2006232192A JP2008058014A JP 2008058014 A JP2008058014 A JP 2008058014A JP 2006232192 A JP2006232192 A JP 2006232192A JP 2006232192 A JP2006232192 A JP 2006232192A JP 2008058014 A JP2008058014 A JP 2008058014A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- Analytical Chemistry (AREA)
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Abstract
【解決手段】X線レンズ2と試料Sの間に、X線レンズからのX線を形状を制御するために開口部を備え、Xレンズ側よりも試料側の開口が小さくなっている先細りの形状を有するコリメータ3を設置した。
【選択図】 図1
Description
図4は、従来技術によるX線分析装置の構成を示した概略図である。X線を発生するX線管球1、X線を集光するX線レンズ2として用いられるポリキャピラリ、測定対象物となる試料S、及び蛍光X線を検出する検出器5として用いるエネルギー分散型X線検出器、から構成されている。
A. Bjeoumikhov et.al.、「New generation of polycapillary lenses: manufacture and applications」X-ray Spectrom.、 2003、 32、P.172-178
2 X線レンズ
3 コリメータ
4 ケース
5 X線検出器(検出器)
6 2軸駆動部
A 集光光路
B ハロー光路
C X線レンズの焦点
D X線レンズの光軸
E ハロー成分
S 試料
Claims (6)
- X線を発生するX線管球と、
前記X線を集光して試料に照射するX線レンズと、
前記X線レンズと前記試料との間に設けられたコリメータと、
前記X線の照射により前記試料から放出された放射線または光を検出する検出器と、からなるX線分析装置であって、
前記コリメータに設けられた開口部は、前記X線レンズ側より前記試料側の方が小さい形状であることを特徴とするX線分析装置。 - 前記コリメータの開口部が、前記X線レンズからのX線の集光光路の形状と略同じ形状であることを特徴とする請求項1記載のX線分析装置。
- 前記コリメータの開口部が、前記X線レンズからのX線の集光光路の形状より小さい形状であることを特徴とする請求項1記載のX線分析装置。
- 前記先細形状のコリメータを、前記X線レンズよりも試料に近い位置に設置することを特徴とする請求項1から請求項3のいずれか1項に記載のX線分析装置。
- 前記検出器が、X線を検出する機能を有していることを特徴とする請求項1から請求項4のいずれか1項に記載のX線分析装置。
- 前記X線レンズが、ポリキャピラリであることを特徴とする請求項1から請求項5のいずれか1項に記載のX線分析装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006232192A JP5100063B2 (ja) | 2006-08-29 | 2006-08-29 | X線分析装置 |
US11/845,540 US7508907B2 (en) | 2006-08-29 | 2007-08-27 | X-ray analysis apparatus |
CNA200710148846XA CN101135657A (zh) | 2006-08-29 | 2007-08-29 | X射线分析设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006232192A JP5100063B2 (ja) | 2006-08-29 | 2006-08-29 | X線分析装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2008058014A true JP2008058014A (ja) | 2008-03-13 |
JP2008058014A5 JP2008058014A5 (ja) | 2009-05-07 |
JP5100063B2 JP5100063B2 (ja) | 2012-12-19 |
Family
ID=39151528
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006232192A Expired - Fee Related JP5100063B2 (ja) | 2006-08-29 | 2006-08-29 | X線分析装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7508907B2 (ja) |
JP (1) | JP5100063B2 (ja) |
CN (1) | CN101135657A (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE532723C2 (sv) * | 2007-05-03 | 2010-03-23 | Lars Lantto | Anordning för alstring av röntgenstrålning med stort reellt fokus och behovsanpassat virtuellt fokus |
JP2012024339A (ja) * | 2010-07-23 | 2012-02-09 | Fujifilm Corp | 放射線画像撮影システム及びコリメータユニット |
CN102543243B (zh) | 2010-12-28 | 2016-07-13 | Ge医疗***环球技术有限公司 | 集成毛细管式平行x射线聚焦透镜 |
JP5598926B2 (ja) * | 2011-09-26 | 2014-10-01 | 株式会社リガク | X線回折測定データの解析方法 |
JP6096418B2 (ja) * | 2012-04-12 | 2017-03-15 | 株式会社堀場製作所 | X線検出装置 |
JP6096419B2 (ja) * | 2012-04-12 | 2017-03-15 | 株式会社堀場製作所 | X線検出装置 |
JP6082634B2 (ja) * | 2013-03-27 | 2017-02-15 | 株式会社日立ハイテクサイエンス | 蛍光x線分析装置 |
JP6397690B2 (ja) * | 2014-08-11 | 2018-09-26 | 株式会社日立ハイテクノロジーズ | X線透過検査装置及び異物検出方法 |
JP6745621B2 (ja) * | 2016-03-24 | 2020-08-26 | 株式会社日立ハイテクサイエンス | 放射線分析装置、及び放射線分析方法 |
CN106872502A (zh) * | 2016-12-28 | 2017-06-20 | 中国科学院长春光学精密机械与物理研究所 | 一种带光束调整的edxrf检测装置 |
CN109029310B (zh) * | 2018-08-10 | 2021-07-30 | 深圳市善时仪器有限公司 | 一种高性能微焦点x射线测厚仪 |
CN115389538B (zh) * | 2022-08-09 | 2023-12-29 | 深圳市埃芯半导体科技有限公司 | X射线分析装置及方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01141343A (ja) * | 1987-11-27 | 1989-06-02 | Hitachi Ltd | X線分析装置及びx線分析方法 |
JPH09329557A (ja) * | 1996-06-11 | 1997-12-22 | Seiko Instr Inc | マイクロ蛍光x線分析装置 |
JP2002195963A (ja) * | 2000-12-25 | 2002-07-10 | Ours Tex Kk | X線分光装置およびx線分析装置 |
JP2003337110A (ja) * | 2002-05-21 | 2003-11-28 | Japan Science & Technology Corp | 擬接触型キャピラリーを用いる微小領域x線分析方法及びその装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2237241Y (zh) * | 1996-02-17 | 1996-10-09 | 中国航天工业总公司 | 一种x射线荧光分析仪 |
-
2006
- 2006-08-29 JP JP2006232192A patent/JP5100063B2/ja not_active Expired - Fee Related
-
2007
- 2007-08-27 US US11/845,540 patent/US7508907B2/en not_active Expired - Fee Related
- 2007-08-29 CN CNA200710148846XA patent/CN101135657A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01141343A (ja) * | 1987-11-27 | 1989-06-02 | Hitachi Ltd | X線分析装置及びx線分析方法 |
JPH09329557A (ja) * | 1996-06-11 | 1997-12-22 | Seiko Instr Inc | マイクロ蛍光x線分析装置 |
JP2002195963A (ja) * | 2000-12-25 | 2002-07-10 | Ours Tex Kk | X線分光装置およびx線分析装置 |
JP2003337110A (ja) * | 2002-05-21 | 2003-11-28 | Japan Science & Technology Corp | 擬接触型キャピラリーを用いる微小領域x線分析方法及びその装置 |
Also Published As
Publication number | Publication date |
---|---|
US20080056442A1 (en) | 2008-03-06 |
CN101135657A (zh) | 2008-03-05 |
JP5100063B2 (ja) | 2012-12-19 |
US7508907B2 (en) | 2009-03-24 |
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