JP2008016579A - Temperature adjustment apparatus for plate workpiece, and method for starting the same - Google Patents

Temperature adjustment apparatus for plate workpiece, and method for starting the same Download PDF

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JP2008016579A
JP2008016579A JP2006185112A JP2006185112A JP2008016579A JP 2008016579 A JP2008016579 A JP 2008016579A JP 2006185112 A JP2006185112 A JP 2006185112A JP 2006185112 A JP2006185112 A JP 2006185112A JP 2008016579 A JP2008016579 A JP 2008016579A
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temperature
plate
workpiece
air flow
starting
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Koichi Ota
浩一 太田
Kazunori Asanuma
一範 浅沼
Masatoshi Terajima
雅俊 寺島
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Orion Machinery Co Ltd
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Orion Machinery Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature adjustment apparatus for plate workpiece and a method for starting the same apparatus for easily implementing simultaneous temperature adjustment for a plurality of plate workpieces, to which sophisticated processes are implemented by keeping the predetermined intervals, and for quickly starting temperature adjustment of the plate work on the occasion of starting the process. <P>SOLUTION: The temperature adjustment apparatus is provided with a rack body 10 as a laminating means to form a laminated body by laminating in parallel a plurality of plate workpieces via the predetermined interval, an air-flow supplying unit 20 for supplying the air flow to the entire surface of one end side of the laminated body formed by laminating the plurality of plate workpieces in order to allow the air-flow as the parallel flow along both surfaces of each plate workpiece, and a thermal exchange 32 as a heater 30 and a cooling means for adjusting the air-flow to the predetermined temperature. This temperature adjusting apparatus is characterized by providing a control unit 24 for controlling the heater 30 to set a frame temperature measured with a frame temperature sensor 46, for measuring temperature of the frame forming the rack body 10 to the preset temperature range when the temperature adjusting apparatus starts the operation. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は板状ワークの温度調整装置及びその始動開始方法に関し、更に詳細には精密加工が施される複数枚の板状ワークを同時に温度調整できる温度調整装置及びその始動開始方法に関する。   The present invention relates to a plate-shaped workpiece temperature adjusting device and a start-up method thereof, and more particularly to a temperature-adjusting device capable of simultaneously adjusting the temperature of a plurality of plate-like workpieces subjected to precision machining and a start-up method thereof.

液晶ディスプレイの製造では、温湿度制御されたクリーンルーム内でガラス板上に、スパッタリングやプラズマＣＶＤでの成膜や露光装置による露光等の精密加工が施される。
かかる精密加工では、温度変化に因るガラス板の大きさ変動が、その加工精度に影響するため、精密加工を施す前に、予め温度変化に因るガラス板の大きさ変動を解消すべく、クリーンルーム内に設置した図４に示す棚体１０にガラス板を所定時間載置することが行われている。図４に示す棚体１０では、枠体に平行に設けられた複数の棚１２，１２・・の各々に、立設されたピン１４，１４・・上にガラス板１６が載置される。
図４に示す棚体１０に所定時間載置し、クリーンルーム内の温度に調整されたガラス板に、精密加工が施される。
しかし、近年では、液晶ディスプレイの大型化等に伴って基板として用いるガラス板も、大型のガラス板が採用されてきている。このため、クリーンルームの温度変化に因るガラス板の大きさ変動が、精密加工の加工精度に影響を与えるようになってきている。 In the production of a liquid crystal display, precision processing such as film formation by sputtering or plasma CVD or exposure by an exposure apparatus is performed on a glass plate in a clean room controlled in temperature and humidity.
In such precision processing, the size fluctuation of the glass plate due to temperature change affects its processing accuracy, so in order to eliminate the glass plate size fluctuation due to temperature change in advance before performing precision processing, A glass plate is placed on the shelf 10 shown in FIG. 4 installed in a clean room for a predetermined time. In the shelf 10 shown in FIG. 4, the glass plate 16 is placed on the pins 14, 14... Standing on each of the plurality of shelves 12, 12.
The glass plate placed on the shelf 10 shown in FIG. 4 for a predetermined time and adjusted to the temperature in the clean room is subjected to precision processing.
However, in recent years, a large glass plate has been adopted as a glass plate used as a substrate along with an increase in the size of a liquid crystal display. For this reason, the variation in the size of the glass plate due to the temperature change in the clean room has come to affect the processing accuracy of precision processing.

この様な、大型のガラス板の温度変化に因る大きさ変動を可及的に少なくすべく、下記特許文献１及び特許文献２には、図５に示す温度調整装置が提案されている。
図５に示す温度調整装置には、上下動可能に設けられた板体１０４に立設されたピン１０６，１０６・・に載置されたガラス板１６の上下面側に、ヘッド１００ａ，１００ｂが設けられている。かかるヘッド１００ａ，１００ｂの各々には、ガラス板１６の上面及び下面に対して直交する方向に空気流を噴出する複数のノズル１０２，１０２・・が設けられている。このノズル１０２，１０２・・の各々からは、温度変化がクリーンルームよりも小さくなるように温度調整された空気流が噴出する。
特開２００２−７２４９２号公報 特開２００４−２００７０６号公報 In order to minimize such a variation in size due to the temperature change of a large glass plate, the following Patent Document 1 and Patent Document 2 propose a temperature adjusting device shown in FIG.
5, the heads 100a and 100b are provided on the upper and lower surfaces of the glass plate 16 placed on the pins 106, 106,. Is provided. Each of the heads 100a, 100b is provided with a plurality of nozzles 102, 102,... That eject an air flow in a direction orthogonal to the upper surface and the lower surface of the glass plate 16. From each of the nozzles 102, 102,..., An air flow whose temperature is adjusted so that the temperature change is smaller than that in the clean room is ejected.
JP 2002-72492 A JP 2004-200706 A

図５に示す温度調整装置によれば、ピン１０６，１０６・・に載置されたガラス板１６の温度変化を、クリーンルームの温度変化よりも小さくでき、ガラス板１６上に施す精密加工の加工精度を向上できる。
また、ガラス板１６の温度調整を迅速に行うことができ、液晶ディスプレイの生産性の向上を図ることができる。
しかし、図５に示す温度調整装置では、ガラス板１６に対し、その両面側から空気流が吹き付けられているため、図４に示す様に、複数枚のガラス板１６が多層に積層されている場合には、図５に示す温度調整装置を適用することは極めて困難である。
また、図５に示す温度調整装置では、ピン１０６，１０６・・上にガラス板１６を載置した状態を保持して、ガラス板１６の上下面に空気流を吹き付ける際に、ガラス板１６が極めて薄いため、ガラス板１６の上下面からの空気噴射量等のバランスが崩れると、ガラス板１６の位置ずれやガラス板１６に損傷等を与えるおそれがある。このため、ノズル１０２，１０２・・の各々からの噴射空気量等をきめ細かに調整しなければならない。 5, the temperature change of the glass plate 16 placed on the pins 106, 106... Can be made smaller than the temperature change of the clean room, and the processing accuracy of precision processing performed on the glass plate 16 is improved. Can be improved.
Further, the temperature of the glass plate 16 can be adjusted quickly, and the productivity of the liquid crystal display can be improved.
However, in the temperature adjusting device shown in FIG. 5, since the air flow is blown from both sides of the glass plate 16, a plurality of glass plates 16 are laminated in multiple layers as shown in FIG. In that case, it is extremely difficult to apply the temperature adjusting device shown in FIG.
In the temperature adjusting device shown in FIG. 5, when the glass plate 16 is placed on the pins 106, 106... And the air flow is blown onto the upper and lower surfaces of the glass plate 16, the glass plate 16 Since it is extremely thin, if the balance of the amount of air injection from the upper and lower surfaces of the glass plate 16 is lost, the glass plate 16 may be misaligned, or the glass plate 16 may be damaged. Therefore, the amount of air jetted from each of the nozzles 102, 102,... Must be finely adjusted.

しかも、ヘッド１００ａ，１００ｂの各々に立設できるノズル数には限界が存在するため、図５に示す温度調整装置によって温度調整できるガラス板１６の大きさにも限界が存在する。
また、図５に示す温度調整装置では、その始動開始の際には、ヘッド１００ａ，１００ｂのノズル１０２，１０２・・の各々から噴射される空気流の温度が所定温度に到達して安定するまで、長時間の予備運転を行うことが必要であり、予備運転中にはガラス板１６の温度調整を行うことができないことも判明した。
そこで、本発明の課題は、所定間隔を置いて精密加工が施される複数枚の板状ワークに対して同時に温度調整を容易に施すことができ、且つ始動開始の際に、板状ワークの温度調整を早期に開始できる板状ワークの温度調整装置及びその始動開始方法を提供することにある。 Moreover, since there is a limit on the number of nozzles that can be erected on each of the heads 100a and 100b, there is also a limit on the size of the glass plate 16 that can be temperature-adjusted by the temperature adjusting device shown in FIG.
In the temperature adjusting device shown in FIG. 5, at the start of starting, the temperature of the air flow ejected from each of the nozzles 102, 102... Of the heads 100a, 100b reaches a predetermined temperature and stabilizes. It has also been found that it is necessary to perform a preliminary operation for a long time, and the temperature of the glass plate 16 cannot be adjusted during the preliminary operation.
Therefore, the problem of the present invention is that temperature adjustment can be easily performed simultaneously on a plurality of plate-like workpieces that are subjected to precision machining at predetermined intervals, and at the start of starting, It is an object of the present invention to provide a plate-like workpiece temperature adjustment device capable of starting temperature adjustment at an early stage and a method for starting the same.

本発明者等は、前記課題を解決すべく検討を重ねた結果、所定間隔を置いて積層された
複数枚の板状ワークの各々に、温度調整した空気流を板状ワークに対して平行流として吹き付けることによって、板状ワークの各両面に沿って温度調整した空気流を流すことができること、及び複数枚の板状ワークを積層する棚体を構成する枠体の枠体温度を、予め設定した温度範囲内となるように温度調整手段を制御することによって、始動開始の際に、板状ワークの温度調整を早期に開始できることを見出し、本発明に到達した。 すなわち、本発明は、精密加工が施される複数枚の板状ワークを所定間隔を介して平行に積層して積層体を形成する積層手段としての棚体と、前記板状ワークの各々の両面に沿って空気流が平行流として流れるように、前記複数枚の板状ワークが積層されている積層体の一端側の全面に亘って前記空気流を供給する空気流供給手段と、前記空気流を所定温度に調整する温度調整手段とを具備する温度調整装置であって、前記温度調整装置の始動開始の際に、前記棚体を構成する枠体の温度を測定する枠体温度センサで測定された枠体温度が予め設定した温度範囲内となるように温度調整手段を制御する制御手段が設けられていることを特徴とする板状ワークの温度調整装置にある。
また、本発明は、精密加工が施される複数枚の板状ワークを所定間隔を介して平行に積層して積層体を形成する積層手段としての棚体と、前記板状ワークの各々の両面に沿って空気流が平行流として流れるように、前記複数枚の板状ワークが積層されている積層体の一端側の全面に亘って前記空気流を供給する空気流供給手段と、前記空気流を所定温度に調整する温度調整手段とを具備する温度調整装置を用い、前記温度調整装置を始動開始する際に、前記棚体を構成する枠体の温度を測定する枠体温度センサで測定した枠体温度を予め設定した温度範囲内となるように、制御手段によって前記温度調整手段を制御することを特徴とする板状ワークの温度調整装置の始動開始方法でもある。 As a result of repeated studies to solve the above-mentioned problems, the present inventors have applied a temperature-adjusted air flow to each of the plurality of plate-like workpieces stacked at a predetermined interval, in parallel with the plate-like workpiece. As a result, it is possible to flow a temperature-adjusted air flow along both surfaces of the plate-shaped workpiece, and to set the frame temperature of the frame body that constitutes the shelf that stacks a plurality of plate-shaped workpieces in advance. It has been found that the temperature adjustment of the plate-like workpiece can be started at an early stage by starting the start-up by controlling the temperature adjusting means so as to be within the temperature range. That is, the present invention provides a shelf as a laminating means for laminating a plurality of plate workpieces to be precision processed in parallel at a predetermined interval to form a laminate, and both surfaces of each of the plate workpieces. An air flow supply means for supplying the air flow over the entire surface on one end side of the laminate in which the plurality of plate-like workpieces are laminated so that the air flow flows in parallel as And a temperature adjusting device for adjusting the temperature to a predetermined temperature, measured by a frame temperature sensor that measures the temperature of the frame constituting the shelf when the temperature adjusting device starts. The temperature adjusting device for a plate-like workpiece is provided with a control means for controlling the temperature adjusting means so that the set frame temperature is within a preset temperature range.
Further, the present invention provides a shelf as a stacking means for forming a laminate by laminating a plurality of plate-like workpieces subjected to precision machining in parallel at a predetermined interval, and both surfaces of each of the plate-like workpieces. An air flow supply means for supplying the air flow over the entire surface on one end side of the laminate in which the plurality of plate-like workpieces are laminated, so that the air flow flows in parallel as And a temperature adjusting device comprising a temperature adjusting means for adjusting the temperature to a predetermined temperature, and when starting the temperature adjusting device, the temperature was measured by a frame temperature sensor for measuring the temperature of the frame constituting the shelf. It is also a start method for starting the temperature adjusting device for a plate-like workpiece, wherein the temperature adjusting means is controlled by the control means so that the frame body temperature falls within a preset temperature range.

かかる本発明において、予め設定した枠体温度の温度範囲を、板状ワークの制御温度（Ｔ℃）±１℃とすることが好ましい。
この温度調整装置の始動開始の際に、温度調整手段を制御する制御手段では、枠体温度センサで測定した枠体温度に基づいて計算した枠体の現在有する熱量と予め設定された枠体熱容量とから、枠体温度が予め設定した温度範囲に到達するまでの時定数を算出し、始動運転に要する時間を表示することによって、始動開始時間を予め知ることができる。
また、棚体として、複数枚の板状ワークが所定間隔を介して平行に積層されると共に、前記板状ワークに対して直交し且つ互いに対向する二面が、前記板状ワークの端面の各々が露出するように開放されている棚体を用い、空気流供給手段を、前記棚体の開放面の一方を閉塞するフィルタによって一壁面が形成されているチャンバーと、前記板状ワークの各両面に沿って平行流として流れる空気流を、前記フィルタの全面から吹き出すように、前記チャンバー内に送風してチャンバーの内圧を所定圧とする送風手段とから構成することが好ましい。
更に、温度調整手段として、冷却手段と加熱手段とを設け、前記加熱手段を制御手段によって制御することによって、板状ワークに送風する空気流の温度制御を容易に行うことができる。
尚、冷却手段として、温度調整装置内に設置された熱交換器と前記温度調整装置外に設置された冷凍機とから構成することによって、温度調整装置の小型化を図ることができる。 In the present invention, it is preferable that the temperature range of the preset frame body temperature is the control temperature (T ° C.) ± 1 ° C. of the plate workpiece.
At the start of the start of the temperature adjusting device, the control means for controlling the temperature adjusting means uses the current heat amount of the frame body calculated based on the frame body temperature measured by the frame body temperature sensor and the preset frame body heat capacity. From this, the time constant until the frame temperature reaches a preset temperature range is calculated, and the time required for the start operation is displayed, so that the start start time can be known in advance.
Further, as a shelf, a plurality of plate-like workpieces are stacked in parallel at a predetermined interval, and two surfaces orthogonal to the plate-like workpiece and facing each other are each an end surface of the plate-like workpiece. Using a shelf that is open so as to expose the airflow supply means, a chamber in which one wall surface is formed by a filter that closes one of the open surfaces of the shelf, and both surfaces of the plate-like workpiece It is preferable that the air flow that flows as a parallel flow along the line is blown into the chamber so as to blow out from the entire surface of the filter, and is constituted by a blowing unit that sets the internal pressure of the chamber to a predetermined pressure.
Furthermore, by providing a cooling means and a heating means as temperature adjusting means, and controlling the heating means by the control means, it is possible to easily control the temperature of the air flow sent to the plate-like workpiece.
In addition, as a cooling means, it comprises the heat exchanger installed in the temperature control apparatus and the refrigerator installed outside the said temperature control apparatus, and size reduction of a temperature control apparatus can be achieved.

本発明によれば、所定間隔で平行に積層した、精密加工を施す複数枚の板状ワークの端面の一方側から、所定温度に温度調整した空気流を板状ワークの各々に対して平行流として供給し、板状ワークの各両面側に所定温度に温度調整した空気流を流すことができる。
ここで、温度調整装置の始動開始の際には、棚体を構成する枠体は、その熱容量が他の構成部材に比較して大きいため、空気流が有する熱量の大部分が枠体の昇温等に使用される。このため、枠体の熱容量が所定値以上とならなければ、板状ワークを棚体に載置しても、板状ワークの温度調整に利用できる空気流の熱量は少なく、板状ワークの温度調整には長時間かかる。
この点、本発明では、枠体の温度を測定する枠体温度センサで測定した枠体温度を予め設定した温度範囲内となるように、制御手段によって温度調整手段を制御する。このため、枠体の温度を所定温度までスムースに調整できる。
その結果、複数枚の板状ワークを同時に且つ容易に温度調整でき、温度調整装置の始動開始の際にも、早期に板状ワークの温度調整を行うことができるため、各板状ワークに対して精密加工を迅速に施すことができる。 According to the present invention, an air flow adjusted to a predetermined temperature is flowed in parallel to each of the plate-like workpieces from one side of the end surfaces of the plurality of plate-like workpieces that are laminated in parallel at predetermined intervals and subjected to precision machining. And an air flow adjusted to a predetermined temperature can be allowed to flow on each side of the plate-like workpiece.
Here, when starting the temperature control device, the frame constituting the shelf has a larger heat capacity than the other components, so that most of the heat quantity of the airflow is increased by the frame. Used for temperature etc. For this reason, if the heat capacity of the frame does not exceed a predetermined value, even if the plate-like workpiece is placed on the shelf, the amount of heat of the air flow that can be used for temperature adjustment of the plate-like workpiece is small, and the temperature of the plate-like workpiece Adjustment takes a long time.
In this regard, in the present invention, the temperature adjusting means is controlled by the control means so that the frame temperature measured by the frame temperature sensor for measuring the temperature of the frame falls within a preset temperature range. For this reason, the temperature of the frame can be adjusted smoothly to a predetermined temperature.
As a result, the temperature of a plurality of plate workpieces can be adjusted simultaneously and easily, and the temperature of the plate workpiece can be adjusted at an early stage even when starting the temperature adjustment device. Precision processing can be performed quickly.

本発明に係る温度調整装置の一例を図１に示す。図１に示す温度調整装置には、積層手段としての棚体１０と、空気流供給手段としての空気供給部２０とが設けられている。
この棚体１０には、枠体に平行に設けられた複数の棚１２，１２・・の各々に、ピン１４，１４・・立設され、このピン１４，１４・・上に板状ワークとしての液晶ディスプレイ用のガラス板１６（以下、単にガラス板１６と称することがある）が載置されている。従って、棚体１０には、複数枚のガラス板１６，１６・・が所定間隔を介して積層されている。
更に、かかる棚体１０では、積層されたガラス板１６，１６・・に対して直交し且つ互いに対向する二面が、ガラス板１６，１６・・の各端面が露出するように開放されている。この棚体１０の開放面を、ガラス板１６と同幅又はガラス板１６よりも広幅の開放面に形成することによって、ガラス体１６の両面の全面に亘って温度調整した空気流を流すことができる。
尚、図１に示す棚体１０の開放面は、通常、パネル板で覆われている部分であり、ガラ
ス板１６，１６・・の積層状態を説明するため、パネル板を取り去って形成したものであ
る。 An example of the temperature control apparatus according to the present invention is shown in FIG. The temperature control apparatus shown in FIG. 1 is provided with a shelf 10 as a stacking unit and an air supply unit 20 as an air flow supply unit.
In this shelf 10, pins 14, 14,... Are erected on each of a plurality of shelves 12, 12,... Provided in parallel to the frame, and a plate-like workpiece is placed on the pins 14, 14,. A glass plate 16 for liquid crystal display (hereinafter sometimes simply referred to as glass plate 16) is placed. Therefore, a plurality of glass plates 16, 16... Are stacked on the shelf body 10 with a predetermined interval.
Furthermore, in this shelf 10, two surfaces that are orthogonal to the laminated glass plates 16, 16,... And face each other are opened so that the end surfaces of the glass plates 16, 16,. . By forming the open surface of the shelf 10 on the open surface having the same width as the glass plate 16 or wider than the glass plate 16, a temperature-adjusted air flow can flow over the entire surface of both surfaces of the glass body 16. it can.
The open surface of the shelf 10 shown in FIG. 1 is usually a portion covered with a panel plate, and is formed by removing the panel plate in order to explain the laminated state of the glass plates 16, 16,. It is.

かかる棚体１０の開放面の一方側には、空気供給部２０が設けられている。この空気供給部２０は、棚体１０の開放面の一方を閉塞するフィルタ２２によって一壁面が形成されているチャンバー２４と、ガラス板１６の各両面に沿って流れる空気流を、フィルタ２２
の全面からガラス板１６，１６・・の各々に対して平行流として吹き出すように、チャン
バー２４内に送風してチャンバー２４の内圧を所定圧とする送風手段としての送風機２６から構成されている。送風機２６は、チャンバー２４の直下に設けられており、チャンバー２４の大きさによっては、複数台の送風機２６，２６・・を設けてもよい。
このチャンバー２４としては、直方体状であって、棚体１０の開放面の一方を閉塞するフィルタ２２によって一壁面が形成されている矩形状のチャンバー２４を好適に用いることができる。矩形状のチャンバー２４内では、空気流の循環を活発化でき、フィルタ２２から吹き出す空気流の温度分布を均一化できる。また、矩形状のチャンバー２４は、その容積を大きくでき、送風機２６を複数台設けても、各送風機２６からの送風にバラツキが存在しても、フィルタ２２から吹き出す空気流のバラツキを可及的に小さくできる。
かかるフィルタ２２としては、０．３μｍの粒子を捕集できるHEPAフィルタ（High Effieiency Particulate Air filter）又は０．１５μｍの粒子を捕集できるULPAフィルタ（Ultra Low Penetration Air filter）を用いると、高度に除塵された空気流をフィルタ２２の全面から吹き出すことができ好ましい。 An air supply unit 20 is provided on one side of the open surface of the shelf 10. The air supply unit 20 is configured to filter the air flow that flows along both surfaces of the chamber 24 in which one wall surface is formed by the filter 22 that closes one of the open surfaces of the shelf 10 and the glass plate 16.
Are blown out as a parallel flow to each of the glass plates 16, 16... From a blower 26 serving as a blowing means for blowing air into the chamber 24 and setting the internal pressure of the chamber 24 to a predetermined pressure. The blower 26 is provided immediately below the chamber 24, and a plurality of blowers 26, 26... May be provided depending on the size of the chamber 24.
As the chamber 24, a rectangular chamber 24 having a rectangular parallelepiped shape and having one wall surface formed by a filter 22 that closes one of the open surfaces of the shelf 10 can be suitably used. In the rectangular chamber 24, the circulation of the air flow can be activated, and the temperature distribution of the air flow blown out from the filter 22 can be made uniform. In addition, the rectangular chamber 24 can be increased in volume, and even if a plurality of blowers 26 are provided, or even if there is a variation in the ventilation from each blower 26, the variation in the air flow blown out from the filter 22 is as much as possible. Can be made smaller.
As such a filter 22, if a HEPA filter (High Efficiency Particulate Air filter) capable of collecting 0.3 μm particles or a ULPA filter (Ultra Low Penetration Air filter) capable of collecting 0.15 μm particles is used, the dust is highly removed. This is preferable because the air flow can be blown out from the entire surface of the filter 22.

チャンバー２４内には、送風機２６によって、空気供給部２０の外壁面に開口された開口部２８から吸い込まれ、所定温度に調整された空気が送風される。チャンバー２４内に送風する空気流の温度調整手段として、開口部２８と送風機２６との間に冷却手段と加熱手段とが設けられている。この加熱手段としては、加熱ヒータ３０が用いられ、冷却手段としては、冷凍機に連結された熱交換器３２が用いられる。
かかる熱交換器３２は、図２に示す様に、棚体１０及び空気供給部２０から成る温度調整装置内に設けられており、温度調整装置外に設置されている冷凍機３４と、冷媒の循環配管３６を介して連結されている。この冷媒として、水を用いることによって熱交換器３２の補修等を容易に行うことができる。
この様に、熱交換器３２よりも大型の冷凍機３４を温度調整装置外に設置することによって、温度調整装置の小型化を図ることができる。
尚、熱交換器３２の下方には、漏水センサ３８が設けられており、加熱ヒータ３０の上方には、過昇温防止サーモ４０が設けられている。 Into the chamber 24, air blown from an opening 28 opened on the outer wall surface of the air supply unit 20 and adjusted to a predetermined temperature is blown by the blower 26. A cooling means and a heating means are provided between the opening portion 28 and the blower 26 as temperature adjusting means for the air flow blown into the chamber 24. As the heating means, a heater 30 is used, and as the cooling means, a heat exchanger 32 connected to a refrigerator is used.
As shown in FIG. 2, the heat exchanger 32 is provided in a temperature adjustment device including the shelf body 10 and the air supply unit 20, and includes a refrigerator 34 installed outside the temperature adjustment device, a refrigerant They are connected via a circulation pipe 36. By using water as the refrigerant, the heat exchanger 32 can be easily repaired.
Thus, by installing the refrigerator 34 larger than the heat exchanger 32 outside the temperature adjusting device, the temperature adjusting device can be reduced in size.
A water leakage sensor 38 is provided below the heat exchanger 32, and an excessive temperature rise prevention thermo 40 is provided above the heater 30.

また、図１及び図２に示す棚体１０及び空気供給部２０から成る温度調整装置では、熱交換器３２には、冷凍機３４によって所定温度に冷却した冷媒としての水を循環することによって、開口部２８から吸い込まれた空気を熱交換器３２により冷却した後、加熱ヒータ３０によって所定温度に調整する。
この加熱ヒータ３０は、温度調整装置外に設けられた制御部４２によって制御されている。かかる制御部４２では、フィルタ２２から吹き出される空気流の温度を検知する空気流温度センサ４４と、棚体１０の他方の開口部近傍の枠体に設けられた枠体温度センサ４６とによって検知された温度に基づいて、加熱ヒータ３０での加熱温度を調整する。
かかる加熱ヒータ３０を通過しつつ所定温度に調整された空気流を、送風機２６によってチャンバー２４内に送風し、チャンバー２４内を所定圧力に保持する。このチャンバー２４内の圧力としては、フィルタ２２の破壊圧力の２０〜９９％とすることが好ましい。
この様に、チャンバー２４を所定圧力に保持することによって、フィルタ２２の全面から所定温度に調整された空気流を吹き出すことができる。吹き出した空気流は、棚体１０に積層されたガラス板１６，１６・・の各々に対して平行流である。
このため、棚体１０に積層されたガラス板１６，１６・・の各両面に沿って、温度調整された空気流を流すことができ、ガラス板１６，１６・・の全体を同時に所定温度に調整できる。
所定温度に調整したガラス板１６，１６・・には、成膜や露光等の精密加工を迅速に且つ正確に施すことができ、得られたガラス板１６を用いた液晶ディスプレイの生産性及び信頼性の向上を図ることができる。 Moreover, in the temperature control apparatus consisting of the shelf 10 and the air supply unit 20 shown in FIGS. 1 and 2, water as a refrigerant cooled to a predetermined temperature by the refrigerator 34 is circulated in the heat exchanger 32. After the air sucked from the opening 28 is cooled by the heat exchanger 32, it is adjusted to a predetermined temperature by the heater 30.
The heater 30 is controlled by a control unit 42 provided outside the temperature adjusting device. The control unit 42 detects the air flow temperature sensor 44 that detects the temperature of the air flow blown from the filter 22 and the frame body temperature sensor 46 that is provided in the frame body near the other opening of the shelf body 10. The heating temperature in the heater 30 is adjusted based on the obtained temperature.
The air flow adjusted to a predetermined temperature while passing through the heater 30 is blown into the chamber 24 by the blower 26, and the inside of the chamber 24 is maintained at a predetermined pressure. The pressure in the chamber 24 is preferably 20 to 99% of the breaking pressure of the filter 22.
In this way, by maintaining the chamber 24 at a predetermined pressure, an air flow adjusted to a predetermined temperature can be blown from the entire surface of the filter 22. The blown air flow is a parallel flow with respect to each of the glass plates 16, 16.
For this reason, it is possible to flow a temperature-adjusted air flow along both surfaces of the glass plates 16, 16... Stacked on the shelf 10, and simultaneously bring the entire glass plates 16, 16. Can be adjusted.
The glass plates 16, 16... Adjusted to a predetermined temperature can be subjected to precision processing such as film formation and exposure quickly and accurately, and productivity and reliability of a liquid crystal display using the obtained glass plate 16. It is possible to improve the performance.

図１及び図２に示す温度調整装置では、図３に示すフローチャートの様に、ガラス板１６の制御温度（Ｔ℃）と、実験的に求めた枠体の熱容量（ｍｃ）とを入力した後、運転を開始する。
始動開始の際に、制御部４２では、枠体温度センサ４２で測定された枠体温度（ｔ℃）に基づいて枠体の現在有する熱量を計算し、入力された枠体の熱容量（ｍｃ）とから、ガラス板１６の制御温度（Ｔ℃）に到達するまでの時定数を計算し、始動時間に要する時間を表示する。枠体の熱容量（ｍｃ）は、棚体１０について予め実験を行い、枠体の昇温曲線等を求めて実験的に定めることが好ましい。
また、制御部４２では、枠体温度センサ４２で測定された枠体温度（ｔ℃）が予め設定した温度範囲（｜Ｔ−ｔ｜±１）となるように加熱ヒータ３０を制御し、フィルタ２２の全面から吹き出す空気流の温度を調整する。
かかる空気流の温度調整によって、枠体温度（ｔ℃）を予め設定した温度範囲（｜Ｔ−ｔ｜±１）に到達させることができ、迅速に始動開始運転を終了できる。
始動開始運転が終了したときは、始動開始時間の表示をＯＦＦとし、空気流温度センサ４４で測定された空気流温度（α℃）による制御運転に入る。この制御運転では、空気流の温度を始動開始運転の枠体の温度よりも厳密に制御する。例えば、空気流の温度（α℃）を（｜Ｔ−α｜±０．１）の範囲で制御することが好ましい。 1 and FIG. 2, after inputting the control temperature (T ° C.) of the glass plate 16 and the experimentally determined heat capacity (mc) of the frame body, as in the flowchart shown in FIG. Start driving.
At the start of starting, the control unit 42 calculates the amount of heat the frame body currently has on the basis of the frame body temperature (t ° C.) measured by the frame body temperature sensor 42, and the input heat capacity (mc) of the frame body. The time constant until the control temperature (T ° C.) of the glass plate 16 is reached is calculated, and the time required for the starting time is displayed. It is preferable to experimentally determine the heat capacity (mc) of the frame body by conducting an experiment on the shelf body 10 in advance and obtaining a temperature rise curve of the frame body.
The controller 42 controls the heater 30 so that the frame temperature (t ° C.) measured by the frame temperature sensor 42 falls within a preset temperature range (| T−t | ± 1), and the filter The temperature of the air flow blown out from the entire surface of 22 is adjusted.
By adjusting the temperature of the air flow, the frame body temperature (t ° C.) can reach the preset temperature range (| T−t | ± 1), and the start start operation can be completed quickly.
When the start start operation is finished, the display of the start start time is turned OFF, and the control operation is started by the air flow temperature (α ° C.) measured by the air flow temperature sensor 44. In this control operation, the temperature of the air flow is controlled more strictly than the temperature of the frame in the start operation. For example, it is preferable to control the temperature (α ° C.) of the air flow in the range of (| T−α | ± 0.1).

図１及び図２に示す棚体１０及び空気供給部２０から成る温度調整装置をクリーンルーム内に設置することによって、開口部２８から吸引したクリーンルーム内の空気を熱交換器３２により冷却した後、加熱ヒータ３０によって所定温度に調整するため、ガラス板１６，１６・・の各々に吹き付ける空気流の温度変化を、クリーンルーム内の温度変化よりも小さくできる。
このため、ガラス板１６，１６・・の各々の温度調整を、更に一層厳密に行うことができ、更に一層精密な精密加工を迅速に且つ正確に施すことができる結果、得られたガラス板１６を用いた液晶ディスプレイの生産性及び信頼性の向上を図ることができる。
尚、これまでの説明では、ワークとして液晶ディスプレイのガラス板１６について説明してきたが、半導体ウェーハの温度調整にも、図１及び図２に示す温度調整装置を用いることができる。 1 and 2 is installed in the clean room, the air in the clean room sucked from the opening 28 is cooled by the heat exchanger 32 and then heated. Since the temperature is adjusted to a predetermined temperature by the heater 30, the temperature change of the air flow blown to each of the glass plates 16, 16,... Can be made smaller than the temperature change in the clean room.
Therefore, the temperature adjustment of each of the glass plates 16, 16,... Can be performed more strictly, and as a result of further accurate precision processing being performed quickly and accurately, the resulting glass plate 16 is obtained. The productivity and reliability of the liquid crystal display using the can be improved.
In the description so far, the glass plate 16 of the liquid crystal display has been described as the workpiece. However, the temperature adjusting device shown in FIGS. 1 and 2 can also be used for temperature adjustment of the semiconductor wafer.

本発明に係る温度調整装置の一例を説明する正面図である。It is a front view explaining an example of the temperature control apparatus which concerns on this invention. 図１に示す温度調整装置内の空気流の流れを説明する説明図である。It is explanatory drawing explaining the flow of the airflow in the temperature control apparatus shown in FIG. 始動開始運転の際の制御を説明するフローチャートである。It is a flowchart explaining the control in the start start operation. クリーンルーム内に設置されていた棚体を説明する正面図である。It is a front view explaining the shelf body installed in the clean room. 改良された温度調整装置を説明する概略図である。It is the schematic explaining the improved temperature control apparatus.

符号の説明Explanation of symbols

１０ 棚体
１２ 棚
１４ ピン
１６ ガラス板
２０ 空気供給部
２２ フィルタ
２４ チャンバー
２６ 送風機
２８ 開口部
３０ 加熱ヒータ
３２ 熱交換器
３４ 冷凍機
３６ 循環配管
３８ 漏水センサ
４０ 過昇温防止サーモ
４２ 制御部
４４ 空気流温度センサ
４６ 枠体温度センサ DESCRIPTION OF SYMBOLS 10 Shelf body 12 Shelf 14 Pin 16 Glass plate 20 Air supply part 22 Filter 24 Chamber 26 Blower 28 Opening part 30 Heater 32 Heat exchanger 34 Refrigerating machine 36 Circulation piping 38 Water leakage sensor 40 Over temperature rise prevention thermo 42 Control part 44 Air Flow temperature sensor 46 Frame temperature sensor

Claims (12)

精密加工が施される複数枚の板状ワークを所定間隔を介して平行に積層して積層体を形成する積層手段としての棚体と、前記板状ワークの各々の両面に沿って空気流が平行流として流れるように、前記複数枚の板状ワークが積層されている積層体の一端側の全面に亘って前記空気流を供給する空気流供給手段と、前記空気流を所定温度に調整する温度調整手段とを具備する温度調整装置であって、
前記温度調整装置の始動開始の際に、前記棚体を構成する枠体の温度を測定する枠体温度センサで測定された枠体温度が予め設定した温度範囲内となるように温度調整手段を制御する制御手段が設けられていることを特徴とする板状ワークの温度調整装置。 A plurality of plate-like workpieces to be precision processed are stacked in parallel at a predetermined interval to form a laminate, and a shelf body as a stacking means, and an air flow along each side of each of the plate-like workpieces Air flow supply means for supplying the air flow over the entire surface on one end side of the stacked body in which the plurality of plate-like workpieces are stacked so as to flow as a parallel flow, and the air flow is adjusted to a predetermined temperature. A temperature adjusting device comprising a temperature adjusting means,
At the start of starting the temperature adjusting device, the temperature adjusting means is arranged so that the frame temperature measured by the frame temperature sensor that measures the temperature of the frame constituting the shelf is within a preset temperature range. A temperature adjusting device for a plate-like workpiece, characterized in that a control means for controlling is provided. 予め設定した枠体温度の温度範囲が、板状ワークの制御温度（Ｔ℃）±１℃である請求項１記載の板状ワークの温度調整装置。   The temperature adjusting device for a plate-like workpiece according to claim 1, wherein the preset temperature range of the frame temperature is a control temperature (T ° C) ± 1 ° C of the plate-like workpiece. 制御手段では、温度調整装置の始動開始の際に、枠体温度センサで測定された枠体温度に基づいて計算した枠体の現在有する熱量と予め設定された枠体熱容量とから、枠体温度が予め設定した温度範囲に到達するまでの時定数を算出し、始動運転に要する時間を表示する請求項１又は請求項２記載の板状ワークの温度調整装置。   In the control means, the frame body temperature is calculated from the current amount of heat of the frame body calculated based on the frame body temperature measured by the frame body temperature sensor and the preset frame body heat capacity when starting the temperature adjustment device. The temperature adjusting device for a plate-like workpiece according to claim 1 or 2, wherein a time constant until the temperature reaches a preset temperature range is calculated and a time required for the starting operation is displayed. 棚体が、複数枚の板状ワークが所定間隔を介して平行に積層されると共に、前記ワークに対して直交し且つ互いに対向する二面が、前記板状ワークの端面の各々が露出するように開放されている棚体であって、
空気流供給手段が、前記棚体の開放面の一方を閉塞するフィルタによって一壁面が形成されているチャンバーと、前記板状ワークの各両面に沿って平行流として流れる空気流を、前記フィルタの全面から吹き出すように、前記チャンバー内に送風してチャンバーの内圧を所定圧とする送風手段とから構成される請求項１〜３のいずれか一項記載の板状ワークの温度調整装置。 A plurality of plate-like workpieces are stacked in parallel with each other at a predetermined interval, and two end surfaces of the shelf that are orthogonal to the workpiece and facing each other are exposed so that each end surface of the plate-like workpiece is exposed. A shelf that is open to
The air flow supply means includes a chamber in which one wall surface is formed by a filter that closes one of the open surfaces of the shelf, and an air flow that flows in parallel along each side of the plate-like workpiece. The temperature adjusting device for a plate-like workpiece according to any one of claims 1 to 3, comprising air blowing means for blowing air into the chamber so as to blow out from the entire surface and setting the internal pressure of the chamber to a predetermined pressure. 温度調整手段には、冷却手段と加熱手段とが設けられており、前記加熱手段が制御手段によって制御されている請求項１〜４のいずれか一項記載の板状ワークの温度調整装置。   The temperature adjusting means is provided with a cooling means and a heating means, and the heating means is controlled by the control means. 冷却手段が、温度調整装置内に設置された熱交換器と前記温度調整装置外に設置された冷凍機とから構成される請求項５記載の板状ワークの温度調整装置。   6. The temperature adjusting device for a plate-like workpiece according to claim 5, wherein the cooling means includes a heat exchanger installed in the temperature adjusting device and a refrigerator installed outside the temperature adjusting device. 精密加工が施される複数枚の板状ワークを所定間隔を介して平行に積層して積層体を形成する積層手段としての棚体と、前記板状ワークの各々の両面に沿って空気流が平行流として流れるように、前記複数枚の板状ワークが積層されている積層体の一端側の全面に亘って前記空気流を供給する空気流供給手段と、前記空気流を所定温度に調整する温度調整手段とを具備する温度調整装置を用い、
前記温度調整装置を始動開始する際に、前記棚体を構成する枠体の温度を測定する枠体温度センサで測定した枠体温度を予め設定した温度範囲内となるように、制御手段によって前記温度調整手段を制御することを特徴とする板状ワークの温度調整装置の始動開始方法。 A shelf as a stacking means for laminating a plurality of plate workpieces to be precision processed in parallel at a predetermined interval to form a laminate, and an air flow along each side of each of the plate workpieces Air flow supply means for supplying the air flow over the entire surface on one end side of the stacked body in which the plurality of plate-like workpieces are stacked so as to flow as a parallel flow, and the air flow is adjusted to a predetermined temperature. Using a temperature adjustment device comprising a temperature adjustment means,
When starting the temperature adjusting device, the control means controls the frame body temperature measured by the frame body temperature sensor that measures the temperature of the frame body constituting the shelf body to be within a preset temperature range. A starting method for starting a temperature adjusting device for a plate-like workpiece, characterized by controlling temperature adjusting means. 予め設定した枠体温度の温度範囲を、板状ワークの制御温度（Ｔ℃）±１℃とする請求項７記載の板状ワークの温度調整装置の始動開始方法。   The start method for starting the temperature adjusting device for a plate-shaped workpiece according to claim 7, wherein the temperature range of the frame temperature set in advance is a control temperature (T ° C) ± 1 ° C of the plate-shaped workpiece. 温度調整装置の始動開始の際に、温度調整手段を制御する制御手段では、枠体温度センサで測定した枠体温度に基づいて計算した枠体の熱量と現在有する熱量と予め設定された枠体熱容量とから、枠体温度が予め設定した温度範囲に到達するまでの時定数を算出し、始動運転に要する時間を表示する請求項７又は請求項８記載の板状ワークの温度調整装置の始動開始方法。   At the start of starting the temperature adjusting device, the control means for controlling the temperature adjusting means, the heat amount of the frame body calculated based on the frame body temperature measured by the frame body temperature sensor, the current heat amount, and the preset frame body The start of the temperature adjusting device for a plate-like workpiece according to claim 7 or 8, wherein a time constant until the frame body temperature reaches a preset temperature range is calculated from the heat capacity, and a time required for the start operation is displayed. How to start. 棚体として、複数枚の板状ワークが所定間隔を介して平行に積層されると共に、前記板状ワークに対して直交し且つ互いに対向する二面が、前記板状ワークの端面の各々が露出するように開放されている棚体を用い、
空気流供給手段を、前記棚体の開放面の一方を閉塞するフィルタによって一壁面が形成されているチャンバーと、前記板状ワークの各両面に沿って平行流として流れる空気流を、前記フィルタの全面から吹き出すように、前記チャンバー内に送風してチャンバーの内圧を所定圧とする送風手段とから構成する請求項７〜９のいずれか一項記載の板状ワークの温度調整装置の始動開始方法。 As a shelf, a plurality of plate-like workpieces are stacked in parallel at a predetermined interval, and two end surfaces of the plate-like workpiece are exposed at two surfaces orthogonal to the plate-like workpiece and facing each other. Use a shelf that is open to
The air flow supply means includes a chamber in which one wall surface is formed by a filter that closes one of the open surfaces of the shelf, and an air flow that flows as a parallel flow along both surfaces of the plate-like workpiece. The start method for starting the temperature adjusting device for a plate-like workpiece according to any one of claims 7 to 9, comprising air blowing means for blowing air into the chamber so as to blow out from the entire surface and setting the internal pressure of the chamber to a predetermined pressure. . 温度調整手段として、冷却手段と加熱手段とを設け、前記加熱手段を制御手段によって制御している請求項７〜１０のいずれか一項記載の板状ワークの温度調整装置の始動開始方法。   The method for starting the temperature adjustment device for a plate-like workpiece according to any one of claims 7 to 10, wherein a cooling means and a heating means are provided as the temperature adjustment means, and the heating means is controlled by the control means. 冷却手段として、温度調整装置内に設置された熱交換器と前記温度調整装置外に設置された冷凍機とから構成される請求項１１記載の板状ワークの温度調整装置の始動開始方法。   The method for starting the temperature adjustment device for a plate-shaped workpiece according to claim 11, wherein the cooling means includes a heat exchanger installed in the temperature adjustment device and a refrigerator installed outside the temperature adjustment device.
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JPH04326509A (en) * 1991-04-26 1992-11-16 Hitachi Ltd Photoresist processing method and equipment and substrate storing equipment
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