JP2007323898A - X-ray tube device and x-ray ct device - Google Patents

X-ray tube device and x-ray ct device Download PDF

Info

Publication number
JP2007323898A
JP2007323898A JP2006151486A JP2006151486A JP2007323898A JP 2007323898 A JP2007323898 A JP 2007323898A JP 2006151486 A JP2006151486 A JP 2006151486A JP 2006151486 A JP2006151486 A JP 2006151486A JP 2007323898 A JP2007323898 A JP 2007323898A
Authority
JP
Japan
Prior art keywords
anode
ray tube
ray
envelope
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006151486A
Other languages
Japanese (ja)
Other versions
JP5106789B2 (en
JP2007323898A5 (en
Inventor
Hidefumi Okamura
秀文 岡村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Healthcare Manufacturing Ltd
Original Assignee
Hitachi Medical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Medical Corp filed Critical Hitachi Medical Corp
Priority to JP2006151486A priority Critical patent/JP5106789B2/en
Publication of JP2007323898A publication Critical patent/JP2007323898A/en
Publication of JP2007323898A5 publication Critical patent/JP2007323898A5/ja
Application granted granted Critical
Publication of JP5106789B2 publication Critical patent/JP5106789B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • X-Ray Techniques (AREA)
  • Apparatus For Radiation Diagnosis (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray tube device with a compact size and large capacity, capable of displacing a focusing point in the tube container. <P>SOLUTION: The device includes a support structure 16 having a support by an X-ray tube support 12 inside the tube container 14 at a colliding position of electrons on a target 6 surface in an anode direction 2, and having a support in a range up to an end part of an outer surrounding apparatus 3 of an opposite direction to a connection position of the anode 2 and the outer surrounding apparatus 3 based on the above position, and to be offset by displacement of the anode 2 due to heat at the time of X-ray generation by expansion of the outer surrounding apparatus 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、X線CT装置に関わり、その内部に搭載されるX線管装置の焦点移動を低減する技術である。   The present invention relates to an X-ray CT apparatus, and is a technique for reducing the focal shift of an X-ray tube apparatus mounted therein.

X線CT装置などで使用中のX線管の焦点移動に対応するために、従来は焦点移動を検出する機構を設け、この検出結果に基づきX線管から照射されるX線の範囲を制御するコリメータを変位させて焦点移動をキャンセルする方法があり、特許文献1が開示されている。
また、焦点移動の検出結果に基づき、X線検出装置の検出感度分布を変化させて、焦点移動によるアーチファクトを防止する機構もあり、「特許文献2」、「特許文献3」などが開示されている。
特開2000-51209号公報 特開平6-269443号公報 特開平6-169914号公報 In order to respond to the focal movement of the X-ray tube in use in an X-ray CT system, a mechanism to detect focal movement has been provided in the past, and the X-ray range irradiated from the X-ray tube is controlled based on the detection result. There is a method of canceling the focus movement by displacing the collimator, and Patent Document 1 is disclosed.
There is also a mechanism for preventing artifacts due to focal movement by changing the detection sensitivity distribution of the X-ray detection device based on the detection result of focal movement, and "Patent Document 2", "Patent Document 3", etc. are disclosed. Yes.
JP 2000-51209 A JP-A-6-269443 JP-A-6-169914

しかし、上記従来技術は、外部機構または制御回路を使用しており、小型大容量X線管を設置するための配慮がされていなかった。
本発明の目的は、焦点移動を管容器内で対策可能とし、かつ小型大容量のX線管装置を提供することにある。
また、その他の目的は上記X線管装置を採用してシステムの小型化を図ったX線CT装置を提供することにある。 However, the above prior art uses an external mechanism or a control circuit, and has not been considered for installing a small-sized large-capacity X-ray tube.
An object of the present invention is to provide a compact and large-capacity X-ray tube apparatus that enables countermeasures against focal movement in a tube container.
Another object of the present invention is to provide an X-ray CT apparatus that employs the X-ray tube apparatus to reduce the size of the system.

上記目的は、熱電子を放出する機能を有した陰極と、これに対向し、且つ陰極から放出された電子が陰極と陽極間に印加される高電圧により衝突するターゲットを有する陽極と、これらを保持するための外囲器とから構成され、陽極が、その一端で外囲器と接続された構造のX線管と、そのX線管を収納する管容器から構成されるX線管装置において、管容器内部のX線管支持具による支持を、陽極方向で、ターゲット表面の電子が衝突する位置、及び、その位置を基準とし陽極と外囲器の接続位置に対して反対方向の外囲器端部までの範囲で支持し、前記外囲器の膨張によりX線発生時の熱による陽極の移動を相殺する機構部を有したことで達成される。   The object is to provide a cathode having a function of emitting thermoelectrons, an anode having a target facing the cathode and colliding with a high voltage applied between the cathode and the anode. In an X-ray tube device comprising an X-ray tube having a structure in which an anode is connected to the envelope at one end thereof, and a tube container for storing the X-ray tube. , Support by the X-ray tube support inside the tube container in the anode direction, the position where the electrons on the target surface collide, and the envelope in the opposite direction with respect to the connection position of the anode and the envelope based on that position This is achieved by having a mechanism portion that supports in the range up to the vessel end and cancels the movement of the anode due to heat when X-rays are generated by expansion of the envelope.

本発明により、焦点移動を管容器内で対策可能とし、かつ小型大容量のX線管装置を提供できる。   According to the present invention, it is possible to provide a compact and large-capacity X-ray tube apparatus that can take measures against focal point movement in the tube container.

本発明によるX線管装置20の例として陽極2が回転しない場合を図1に、陽極2が回転する場合を図2に示す。
内装されるX線管10は先に述べたように絶縁のため真空中に設置された陰極1、陽極2、及び、これらを真空気密するための外囲器3から構成され、外囲器3はX線4を照射するための放射窓7を有している。 As an example of the X-ray tube apparatus 20 according to the present invention, FIG. 1 shows a case where the anode 2 does not rotate, and FIG. 2 shows a case where the anode 2 rotates.
The X-ray tube 10 provided in the interior is composed of the cathode 1 and the anode 2 installed in a vacuum for insulation as described above, and the envelope 3 for vacuum-tightening them, and the envelope 3 Has a radiation window 7 for irradiating X-rays 4.

X線管装置20は、このX線管10を有し、これを絶縁し、且つ保持するための絶縁油11、支持具12、及び陰極、陽極への高電圧導入部13を有し、これらを収納する為の管容器14から構成され、陽極2が回転する機構を有している場合は、これを回転するためのコイル29を有している。   The X-ray tube device 20 has the X-ray tube 10, and has an insulating oil 11 for insulating and holding the X-ray tube 10, a support 12, and a high-voltage introducing portion 13 to the cathode and the anode. In the case where the anode 2 has a mechanism for rotating, a coil 29 for rotating this is provided.

このX線管装置20の管容器14内部においてX線管10は、比較的重量の大きくなる陽極2と外囲器3の接合部で支持される場合が多い。しかし、本発明では、この管支持位置を外囲器3表面の陽極2軸方向で焦点8の位置から、焦点8位置を基準とし、陽極2と外囲器3の接合部に対して反対側の外囲器3端部、即ち図1、図2においては陰極1側の端部までの範囲としている。但し、大容量X線管装置などでは陽極2の重量が非常に大きくなる為、陽極2の端部にも支持点が必要となるが、この場合には陽極2が軸方向には自由に熱膨張できるようなスライド可能な支持構造16としている。   In many cases, the X-ray tube 10 is supported at the junction between the anode 2 and the envelope 3 that are relatively heavy inside the tube container 14 of the X-ray tube device 20. However, in the present invention, this tube support position is determined from the position of the focal point 8 in the direction of the axis of the anode 2 on the surface of the envelope 3 with respect to the junction of the anode 2 and the envelope 3 with respect to the position of the focal point 8. This is the range up to the end of the envelope 3, that is, the end on the cathode 1 side in FIGS. However, since the weight of the anode 2 becomes very large in a large-capacity X-ray tube apparatus or the like, a support point is also required at the end of the anode 2, but in this case, the anode 2 can be heated freely in the axial direction. A slidable support structure 16 that can be expanded is used.

X線4の発生時には陽極2の温度が上昇し、これにより陽極2がεa熱膨張30し、焦点8の位置がεfだけ移動する。図3(a)に、一定のX線4を照射した場合の陽極2の熱膨張εa30の変化を示す。この状態で使用すると陽極2の熱膨張量30が焦点移動量15となり、式(1)のようになる。
εf＝εa …(1)
大きい場合には数100μmの焦点移動15が発生する。 When X-rays 4 are generated, the temperature of the anode 2 rises, whereby the anode 2 undergoes εa thermal expansion 30 and the position of the focal point 8 moves by εf. FIG. 3 (a) shows a change in the thermal expansion εa30 of the anode 2 when a certain X-ray 4 is irradiated. When used in this state, the thermal expansion amount 30 of the anode 2 becomes the focal point movement amount 15, which is expressed by the equation (1).
εf = εa (1)
If it is larger, a focal shift 15 of several hundred μm occurs.

しかし、実際には外囲器3も陽極2の発熱により温度上昇し、熱膨張による伸びεv31が発生する。このため、図1、図2に示す支持構造を採用すると、この外囲器3の熱膨張εv31により、陽極2の伸びεa30が相殺されるため、焦点移動量εf15は式(2)で表現される。
εf＝εa-εv …(2)
式(1)、(2)の比較から図1、図2の構造を採用することで、外囲器3の熱膨張εv31だけ焦点移動量15が低減されているのがわかる。 However, in reality, the temperature of the envelope 3 also rises due to the heat generated by the anode 2, and an elongation εv31 due to thermal expansion occurs. For this reason, when the support structure shown in FIGS. 1 and 2 is adopted, the expansion εa30 of the anode 2 is canceled out by the thermal expansion εv31 of the envelope 3, so that the focal movement amount εf15 is expressed by the equation (2). The
εf ＝ εa-εv (2)
From the comparison of the equations (1) and (2), it can be seen that the focal shift amount 15 is reduced by the thermal expansion εv31 of the envelope 3 by adopting the structure of FIGS.

図1、図2の支持構造を採用した場合の陽極2の熱膨張30、外囲器3の熱膨張31の、X線管装置20使用時間による変化を図3(b)に示す。図3(b)に示した陽極伸び30と外囲器伸び31の差(図3(b)中の斜線部分)が焦点移動量15となる。   FIG. 3B shows changes in the thermal expansion 30 of the anode 2 and the thermal expansion 31 of the envelope 3 depending on the usage time of the X-ray tube device 20 when the support structure of FIGS. 1 and 2 is adopted. The difference between the anode extension 30 and the envelope extension 31 (shaded area in FIG. 3B) shown in FIG.

図3(b)で熱膨張による伸びが最大となっている範囲で検討すると、例えば陽極２の軸方向寸法が200mmの回転陽極2を考えた場合、陽極2全体での平均熱膨張率が1.1×10-6程度であり、陽極2平均温度の最大上昇幅が700℃程度である為、熱膨張による陽極2の伸び30は約150μm程度である。これに対して、外囲器3の陽極2軸方向寸法を300mm、平均熱膨張率5.4×10-6、平均温度上昇が70℃程度である為、外囲器3の熱膨張による伸び31は113μmとなり、焦点移動量15は150−113＝37μm程度に抑えることができる。 Considering the range in which the elongation due to thermal expansion is maximum in FIG. 3 (b), for example, when considering the rotating anode 2 in which the axial dimension of the anode 2 is 200 mm, the average thermal expansion coefficient of the anode 2 as a whole is 1.1. × is about 10 -6, because the maximum rise of the anode 2 an average temperature of about 700 ° C., elongation 30 of the anode 2 due to thermal expansion is about 150 [mu] m. On the other hand, since the dimensions of the envelope 3 in the axial direction of the anode 2 are 300 mm, the average thermal expansion coefficient is 5.4 × 10 −6 , and the average temperature rise is about 70 ° C., the elongation 31 due to thermal expansion of the envelope 3 is 113 μm, and the focal point movement amount 15 can be suppressed to about 150−113 = 37 μm.

更に陽極2軸方向で外囲器3の焦点8位置で支持した場合には外囲器3の焦点8から陽極2と外囲器3との接合部までの距離が200mmである為、外囲器3の熱膨張による伸び31は76μmとなり、焦点移動量15は150−76＝74μm程度になり、いずれの場合でも100μm以下に低減することができる。   Furthermore, when supported at the focus 8 position of the envelope 3 in the direction of the anode 2 axis, the distance from the focus 8 of the envelope 3 to the junction between the anode 2 and the envelope 3 is 200 mm. The elongation 31 due to the thermal expansion of the vessel 3 is 76 μm, and the focal distance 15 is about 150−76 = 74 μm, and in any case, it can be reduced to 100 μm or less.

更に、本発明によるX線管装置20の例として陽極2を、その電子ビーム5が衝突する面の側と、その反対の面の側の両端で保持する場合を図4に示す。この場合には外囲器3の焦点8位置にてX線管10を支持することで、焦点8位置から陽極2側での焦点移動量εf15は陽極2及び外囲器3の伸び(εa1、εv1)30、31、焦点8位置から陽極2と反対の側での陽極2及び外囲器3の伸び(εa2、εv2)30、31により決定されることとなり、焦点8位置を基準として両側に伸びることとなるため、図1、図2の場合に比べて焦点移動量15を更なる低減が可能となる。
更に、焦点8近傍の外囲器3でターゲット6を覆う部分でX線管10を支持した場合にも同等の効果を得ることができる。 Further, as an example of the X-ray tube apparatus 20 according to the present invention, FIG. 4 shows a case where the anode 2 is held at both ends on the side where the electron beam 5 collides and the opposite side. In this case, by supporting the X-ray tube 10 at the focal point 8 position of the envelope 3, the focal movement amount εf15 on the anode 2 side from the focal point 8 position is the elongation of the anode 2 and the envelope 3 (εa1, εv1) 30, 31, the elongation of the anode 2 and the envelope 3 on the opposite side of the anode 2 from the focus 8 position (εa2, εv2) 30, 31 will be determined on both sides with respect to the focus 8 position Since it extends, the focal point movement amount 15 can be further reduced as compared with the cases of FIGS.
Furthermore, the same effect can be obtained when the X-ray tube 10 is supported by a portion covering the target 6 with the envelope 3 in the vicinity of the focal point 8.

本発明に採用されるX線CT装置17は被検体18を乗せ、被検体18を任意の位置に移動可能な台座19と、X線管装置20、とこれに対向して設置されたX線検出装置21、X線の制御システム23、X線発生用高圧電源26を有し、X線検出装置21により得られるデータは画像計測システム22で処理された後、モニタ装置24に出力される。X線管装置20、X線検出装置21、X線の制御システム23、X線発生用高圧電源26は、回転ガントリ25に搭載されており、駆動用モータ27などにより被検体18周囲を回転する。X線CT検査装置17では、X線発生装置20とX線検出装置21が被検体18周囲を回転することで、被検体18の断層像を得ることが可能であり、更にこれらの断層像データを積層することで3次元形状の取得が可能である。
尚、搭載されるX線管装置20が回転陽極2型のX線管装置20である場合には、X線の制御システム23内部などにコイル電源28が含まれる場合もある。 The X-ray CT apparatus 17 employed in the present invention carries a subject 18 and a pedestal 19 that can move the subject 18 to an arbitrary position, an X-ray tube device 20, and an X-ray installed opposite thereto. A detection device 21, an X-ray control system 23, and a high-voltage power supply 26 for X-ray generation are provided. Data obtained by the X-ray detection device 21 is processed by the image measurement system 22 and then output to the monitor device 24. An X-ray tube device 20, an X-ray detection device 21, an X-ray control system 23, and an X-ray generation high-voltage power supply 26 are mounted on a rotating gantry 25, and are rotated around the subject 18 by a drive motor 27 and the like. . In the X-ray CT examination apparatus 17, it is possible to obtain a tomographic image of the subject 18 by rotating the X-ray generation device 20 and the X-ray detection device 21 around the subject 18, and the tomographic image data thereof. It is possible to acquire a three-dimensional shape by stacking layers.
When the mounted X-ray tube device 20 is a rotary anode 2 type X-ray tube device 20, the coil power supply 28 may be included in the X-ray control system 23 or the like.

本発明による固定陽極型X線管の一例を示す図。The figure which shows an example of the fixed anode type | mold X-ray tube by this invention. 本発明による片持ち回転陽極型X線管の一例を示す図。The figure which shows an example of the cantilever rotary anode type | mold X-ray tube by this invention. (a)従来構造での陽極熱伸びによる焦点移動量の推移、(b)本発明構造での陽極熱伸びによる焦点移動量の推移を示す図。(a) Transition of the focal movement amount due to the thermal expansion of the anode in the conventional structure, (b) A diagram showing the transition of the focal movement amount due to the thermal expansion of the anode in the structure of the present invention. 本発明による両持ち回転陽極型X線管の一例を示す図。The figure which shows an example of the double-supported rotary anode type | mold X-ray tube by this invention. X線CT検査装置の一例を示す図。The figure which shows an example of an X-ray CT inspection apparatus.

符号の説明Explanation of symbols

1 陰極、2 陽極(回転陽極)、3 外囲器、4 照射用X線又はX線錐、5 陰極による電子ビーム又は管電流、6 ターゲット、7 放射窓、8 焦点面、9 カソードまたはフィラメント、10 X線管、11 絶縁油、12 X線管支持具、13 陰極、陽極への高電圧導入部、14 管容器、15 焦点移動、16 支持構造、17 X線検査装置、18 被検体、19 台座、20 X線管装置、21 X線検出器、22 画像計測システム、23 X線制御システム、24 モニタ装置 25 回転ガントリ 26 X線発生用高圧電源、27 モータ、28 コイル電源、29 ステータコイル、30 陽極熱膨張による伸び、31 外囲器熱膨張による伸び 32 X線管支持範囲   1 cathode, 2 anode (rotary anode), 3 envelope, 4 irradiation X-ray or X-ray cone, 5 cathode electron beam or tube current, 6 target, 7 emission window, 8 focal plane, 9 cathode or filament, 10 X-ray tube, 11 Insulating oil, 12 X-ray tube support, 13 Cathode, High voltage introduction part to the anode, 14 tube container, 15 Focus movement, 16 Support structure, 17 X-ray inspection device, 18 Subject, 19 Pedestal, 20 X-ray tube device, 21 X-ray detector, 22 Image measurement system, 23 X-ray control system, 24 Monitor device 25 Rotating gantry 26 High voltage power supply for X-ray generation, 27 Motor, 28 coil power supply, 29 Stator coil, 30 Elongation due to anode thermal expansion, 31 Elongation due to envelope thermal expansion 32 X-ray tube support range

Claims (2)

熱電子を放出する機能を有した陰極と、これに対向し、且つ陰極から放出された電子が陰極と陽極間に印加される高電圧により衝突するターゲットを有する陽極と、これらを保持するための外囲器とから構成され、陽極が、その一端で外囲器と接続された構造のＸ線管と、そのＸ線管を収納する管容器から構成されるＸ線管装置において、管容器内部のＸ線管支持具による支持を、陽極方向で、ターゲット表面の電子が衝突する位置、及び、その位置を基準とし陽極と外囲器の接続位置に対して反対方向の外囲器端部までの範囲で支持し、前記外囲器の膨張によりＸ線発生時の熱による陽極の移動を相殺する機構部を有したことを特徴とするＸ線管装置。   A cathode having a function of emitting thermionic electrons, an anode having a target facing the cathode and colliding with a high voltage applied between the cathode and the anode, and an electron emitted from the cathode, for holding these An X-ray tube apparatus comprising an X-ray tube having a structure in which an anode is connected to the envelope at one end thereof, and a tube container that houses the X-ray tube. The X-ray tube support is supported by the position where the electrons on the target surface collide in the anode direction and the end of the envelope in the opposite direction with respect to the connection position of the anode and the envelope based on the position. An X-ray tube apparatus comprising a mechanism portion that supports the movement of the anode due to heat when X-rays are generated by expansion of the envelope. Ｘ線管装置を被検体の周囲に回転させて、多数の角度方向からの撮影データを得、それらの投影データより前記被検体の断層像を再構成し、その再構成された断層像を表示するＸ線ＣＴ装置において、前記Ｘ線管装置は請求項１に記載のＸ線管装置であることを特徴とするＸ線ＣＴ装置。   Rotate the X-ray tube device around the subject to obtain imaging data from a number of angular directions, reconstruct the tomographic image of the subject from the projection data, and display the reconstructed tomographic image An X-ray CT apparatus, wherein the X-ray tube apparatus is the X-ray tube apparatus according to claim 1.
JP2006151486A 2006-05-31 2006-05-31 X-ray tube apparatus and X-ray CT apparatus Expired - Fee Related JP5106789B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006151486A JP5106789B2 (en) 2006-05-31 2006-05-31 X-ray tube apparatus and X-ray CT apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006151486A JP5106789B2 (en) 2006-05-31 2006-05-31 X-ray tube apparatus and X-ray CT apparatus

Publications (3)

Publication Number Publication Date
JP2007323898A true JP2007323898A (en) 2007-12-13
JP2007323898A5 JP2007323898A5 (en) 2009-07-09
JP5106789B2 JP5106789B2 (en) 2012-12-26

Family

ID=38856529

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006151486A Expired - Fee Related JP5106789B2 (en) 2006-05-31 2006-05-31 X-ray tube apparatus and X-ray CT apparatus

Country Status (1)

Country Link
JP (1) JP5106789B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010118313A (en) * 2008-11-14 2010-05-27 Hamamatsu Photonics Kk X-ray source
JP2011129430A (en) * 2009-12-18 2011-06-30 Toshiba Corp X-ray inspection device
JP2014232579A (en) * 2013-05-28 2014-12-11 株式会社日立メディコ X-ray tube device
EP2903398A4 (en) * 2012-09-26 2016-04-27 Nikon Corp X-ray device and structure manufacturing method
EP3016482A1 (en) * 2014-10-27 2016-05-04 Hitachi High-Tech Science Corporation X-ray generator and fluorescent x-ray analyzer

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916253A (en) * 1983-06-03 1984-01-27 Toshiba Corp X-ray equipment
JPH01272037A (en) * 1987-11-30 1989-10-31 Medical Electron Imaging Corp Construction of air-cooled ceramic x-ray tube
JPH09115469A (en) * 1995-06-06 1997-05-02 Varian Assoc Inc Cathodic x-ray source that is supported magnetically
JP2000340146A (en) * 1998-12-22 2000-12-08 General Electric Co <Ge> X-ray generating device
JP2002319359A (en) * 2001-02-19 2002-10-31 Hitachi Medical Corp Rotary positive electrode x-ray tube and x-ray ct device using it
JP2004152767A (en) * 2002-10-30 2004-05-27 Ge Medical Systems Global Technology Co Llc Assembly for installing radiation emitting device, radiation emitting device having this assembly, and radiographic device having this assembly and emitting device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5916253A (en) * 1983-06-03 1984-01-27 Toshiba Corp X-ray equipment
JPH01272037A (en) * 1987-11-30 1989-10-31 Medical Electron Imaging Corp Construction of air-cooled ceramic x-ray tube
JPH09115469A (en) * 1995-06-06 1997-05-02 Varian Assoc Inc Cathodic x-ray source that is supported magnetically
JP2000340146A (en) * 1998-12-22 2000-12-08 General Electric Co <Ge> X-ray generating device
JP2002319359A (en) * 2001-02-19 2002-10-31 Hitachi Medical Corp Rotary positive electrode x-ray tube and x-ray ct device using it
JP2004152767A (en) * 2002-10-30 2004-05-27 Ge Medical Systems Global Technology Co Llc Assembly for installing radiation emitting device, radiation emitting device having this assembly, and radiographic device having this assembly and emitting device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010118313A (en) * 2008-11-14 2010-05-27 Hamamatsu Photonics Kk X-ray source
JP2011129430A (en) * 2009-12-18 2011-06-30 Toshiba Corp X-ray inspection device
EP2903398A4 (en) * 2012-09-26 2016-04-27 Nikon Corp X-ray device and structure manufacturing method
US9953799B2 (en) 2012-09-26 2018-04-24 Nikon Corporation X-ray apparatus and structure manufacturing method
EP4295970A3 (en) * 2012-09-26 2024-03-27 Nikon Corporation X-ray device and structure manufacturing method
JP2014232579A (en) * 2013-05-28 2014-12-11 株式会社日立メディコ X-ray tube device
EP3016482A1 (en) * 2014-10-27 2016-05-04 Hitachi High-Tech Science Corporation X-ray generator and fluorescent x-ray analyzer
JP2016085860A (en) * 2014-10-27 2016-05-19 株式会社日立ハイテクサイエンス X-ray generation source and fluorescent x-ray analysis device
US9721749B2 (en) 2014-10-27 2017-08-01 Hitachi High-Tech Science Corporation X-ray generator and fluorescent X-ray analyzer

Also Published As

Publication number Publication date
JP5106789B2 (en) 2012-12-26

Similar Documents

Publication Publication Date Title
JP4549808B2 (en) Method and apparatus for z-axis tracking and collimation
JP2005056843A (en) Focal spot position adjusting device for imaging tube
JP5106789B2 (en) X-ray tube apparatus and X-ray CT apparatus
JP2015191795A (en) X-ray generator
JP2009158138A (en) X-ray tube and x-ray ct device
JP4581018B2 (en) Apparatus for small high voltage insulator for X-ray tube and vacuum tube, and method for assembling the same
JP2008159317A (en) X-ray tube device and x-ray apparatus using it
CN104297269A (en) X-ray testing device for material testing and method for high-resolution projections
US8284901B2 (en) Apparatus and method for improved transient response in an electromagnetically controlled x-ray tube
JP4876047B2 (en) X-ray generator and X-ray CT apparatus
JP5193594B2 (en) X-ray inspection equipment
JP2007149601A (en) X-ray tube and the x-ray inspection device using it
EP2082411A2 (en) X-ray tube with ion deflecting and collecting device made from a getter material
US20170250051A1 (en) Robust Electrode With Septum Rod For Biased X-Ray Tube Cathode
JP2006344445A (en) X-ray tube device and x-ray ct device using the same
US9131590B2 (en) Radiation generating unit and radiography system
JP5893927B2 (en) X-ray tube apparatus and X-ray CT apparatus
JP6253299B2 (en) X-ray tube apparatus and X-ray imaging apparatus
JP5766128B2 (en) X-ray tube apparatus and X-ray CT apparatus
JP5574672B2 (en) X-ray tube device and X-ray device
JP5865249B2 (en) X-ray tube apparatus, manufacturing method thereof, and X-ray diagnostic imaging apparatus
JP2011141956A (en) X-ray tube device and x-ray ct device using the same
JP6664189B2 (en) Breast tomography system
Anburajan et al. Overview of X-Ray Tube Technology
JP6318147B2 (en) X-ray tube apparatus and X-ray imaging apparatus

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090527

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090527

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111128

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120124

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20121002

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20121003

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20151012

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees