JP2007303875A - 放射線検出器およびその製造方法 - Google Patents
放射線検出器およびその製造方法 Download PDFInfo
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02322—Optical elements or arrangements associated with the device comprising luminescent members, e.g. fluorescent sheets upon the device
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
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- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
- H01L27/14658—X-ray, gamma-ray or corpuscular radiation imagers
- H01L27/14663—Indirect radiation imagers, e.g. using luminescent members
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- H—ELECTRICITY
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- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
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Abstract
【解決手段】少なくとも基台18の表面側に配置された光電変換基板12の受光部15および基板側電極パッド16、基台側電極パッド23、および配線25を保護層27で一体に被覆する。保護層27の表面にシンチレータ層29を形成する。保護層27により、受光部15の光電変換素子14や各電極パッド16,23および配線25の腐食を防止する。保護層27で一体に被覆することで、光電変換基板12の受光部15と基板側電極パッド16との距離を近付けて配置することを可能とし、小形化もしくは受光部15の拡大ができる。
【選択図】図1
Description
12 光電変換基板
14 光電変換素子
15 受光部
16 基板側電極パッド
18 基台
23 基台側電極パッド
25 配線
27 保護層
29 シンチレータ層
Claims (6)
- 表面側に光電変換素子を有する受光部が設けられるとともにこの受光部より外側に光電変換素子と電気的に接続されている基板側電極パッドが設けられた光電変換基板と、
表面側に前記光電変換基板が配置されるとともにこの光電変換基板の基板側電極パッドと電気的に接続される基台側電極パッドが配置された基台と、
前記光電変換基板の基板側電極パッドと前記基台の基台側電極パッドとを電気的に接続する配線と、
少なくとも前記基台の表面側に配置された光電変換基板の受光部および基板側電極パッド、基台側電極パッド、および配線を一体に被覆する保護層と、
この保護層の表面に形成されたシンチレータ層と
を具備していることを特徴とする放射線検出器。 - 保護層は、絶縁性、水蒸気遮断性、シンチレータ層の発光に対する透過性、シンチレータ層を構成する物質に対する耐腐食性を有する
ことを特徴とする請求項1記載の放射線検出器。 - 保護層は、パラキシリレンを主成分とする有機物から形成されている
ことを特徴とする請求項1または2記載の放射線検出器。 - 保護層は、炭素結晶を主成分とする無機物から形成されている
ことを特徴とする請求項1または2記載の放射線検出器。 - シンチレータ層は、少なくともハロゲン化合物を含む高輝度蛍光物質で構成されている
ことを特徴とする請求項1ないし4いずれか記載の放射線検出器。 - 表面側に光電変換素子を有する受光部が設けられるとともにこの受光部より外側に光電変換素子と電気的に接続されている基板側電極パッドが設けられた光電変換基板を基台の表面側に配置し、
光電変換基板の基板側電極パッドと基台の表面側に配置された基台側電極パッドとを配線で電気的に接続し、
少なくとも基台の表面側に配置された光電変換基板の受光部および基板側電極パッド、基台側電極パッド、および配線を保護層で一体に被覆し、
保護層の表面にシンチレータ層を形成する
ことを特徴とする放射線検出器の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006130406A JP4455534B2 (ja) | 2006-05-09 | 2006-05-09 | 放射線検出器およびその製造方法 |
EP07743052.8A EP2034335B1 (en) | 2006-05-09 | 2007-05-09 | Radiation detector and method for manufacturing the same |
KR1020087025591A KR101138038B1 (ko) | 2006-05-09 | 2007-05-09 | 방사선 검출기와 그 제조 방법 |
PCT/JP2007/059617 WO2007129742A1 (ja) | 2006-05-09 | 2007-05-09 | 放射線検出器及びその製造方法 |
US12/266,185 US9219176B2 (en) | 2006-05-09 | 2008-11-06 | Radial ray detector and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006130406A JP4455534B2 (ja) | 2006-05-09 | 2006-05-09 | 放射線検出器およびその製造方法 |
Publications (3)
Publication Number | Publication Date |
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JP2007303875A true JP2007303875A (ja) | 2007-11-22 |
JP2007303875A5 JP2007303875A5 (ja) | 2008-12-25 |
JP4455534B2 JP4455534B2 (ja) | 2010-04-21 |
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JP2006130406A Active JP4455534B2 (ja) | 2006-05-09 | 2006-05-09 | 放射線検出器およびその製造方法 |
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Country | Link |
---|---|
US (1) | US9219176B2 (ja) |
EP (1) | EP2034335B1 (ja) |
JP (1) | JP4455534B2 (ja) |
KR (1) | KR101138038B1 (ja) |
WO (1) | WO2007129742A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010147357A (ja) * | 2008-12-22 | 2010-07-01 | Sony Corp | 固体撮像装置の製造方法及び固体撮像装置 |
JP2011058964A (ja) * | 2009-09-10 | 2011-03-24 | Toshiba Corp | X線平面検出器及びその製造方法 |
WO2019176137A1 (ja) * | 2018-03-12 | 2019-09-19 | キヤノン電子管デバイス株式会社 | 放射線検出パネル、放射線検出器、および放射線検出パネルの製造方法 |
KR20200044998A (ko) * | 2012-02-14 | 2020-04-29 | 아메리칸 사이언스 앤 엔지니어링, 인크. | 파장-편이 섬유-결합 신틸레이션 검출기를 사용한 x-선 검사 |
JP2021124308A (ja) * | 2020-02-03 | 2021-08-30 | 浜松ホトニクス株式会社 | 放射線検出装置 |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2315249A1 (en) * | 2009-10-26 | 2011-04-27 | Fondazione Bruno Kessler | Semiconductor sensor for detecting electromagnetic radiation |
KR101217808B1 (ko) | 2010-09-30 | 2013-01-21 | 주식회사 디알텍 | 방사선 검출기 및 방사선 검출 방법 |
WO2012043908A1 (ko) * | 2010-09-30 | 2012-04-05 | (주)디알텍 | 방사선 검출기 및 방사선 검출 방법 |
JP5693174B2 (ja) * | 2010-11-22 | 2015-04-01 | キヤノン株式会社 | 放射線検出装置及び放射線検出システム |
JP5693173B2 (ja) * | 2010-11-22 | 2015-04-01 | キヤノン株式会社 | 放射線検出装置及び放射線検出システム |
US10921467B2 (en) * | 2017-09-15 | 2021-02-16 | Analogic Corporation | Detector array for imaging modality |
US11193898B1 (en) | 2020-06-01 | 2021-12-07 | American Science And Engineering, Inc. | Systems and methods for controlling image contrast in an X-ray system |
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US5434418A (en) * | 1992-10-16 | 1995-07-18 | Schick; David | Intra-oral sensor for computer aided radiography |
FR2782388B1 (fr) * | 1998-08-11 | 2000-11-03 | Trixell Sas | Detecteur de rayonnement a l'etat solide a duree de vie accrue |
JP2001074845A (ja) * | 1999-09-03 | 2001-03-23 | Canon Inc | 半導体装置及びそれを用いた放射線撮像システム |
US6414315B1 (en) | 1999-10-04 | 2002-07-02 | General Electric Company | Radiation imaging with continuous polymer layer for scintillator |
WO2001088568A1 (fr) * | 2000-05-19 | 2001-11-22 | Hamamatsu Photonics K.K. | Detecteur de rayonnement et procede de fabrication de ce detecteur |
JP4447752B2 (ja) * | 2000-08-03 | 2010-04-07 | 浜松ホトニクス株式会社 | 放射線検出器 |
US6720561B2 (en) * | 2001-12-06 | 2004-04-13 | General Electric Company | Direct CsI scintillator coating for improved digital X-ray detector assembly longevity |
JP2004264239A (ja) * | 2003-03-04 | 2004-09-24 | Canon Inc | 放射線撮像装置 |
JP4247017B2 (ja) * | 2003-03-10 | 2009-04-02 | 浜松ホトニクス株式会社 | 放射線検出器の製造方法 |
JP2004335870A (ja) * | 2003-05-09 | 2004-11-25 | Canon Inc | 放射線検出装置 |
US7193218B2 (en) * | 2003-10-29 | 2007-03-20 | Canon Kabushiki Kaisha | Radiation detection device, method of producing the same, and radiation image pick-up system |
JP4208790B2 (ja) * | 2004-08-10 | 2009-01-14 | キヤノン株式会社 | 放射線検出装置の製造方法 |
JP4612876B2 (ja) * | 2004-08-10 | 2011-01-12 | キヤノン株式会社 | 放射線検出装置、シンチレータパネル、これらの製造方法及び放射線検出システム |
JP4012182B2 (ja) * | 2004-08-19 | 2007-11-21 | キヤノン株式会社 | カセッテ型x線画像撮影装置 |
-
2006
- 2006-05-09 JP JP2006130406A patent/JP4455534B2/ja active Active
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2007
- 2007-05-09 EP EP07743052.8A patent/EP2034335B1/en active Active
- 2007-05-09 KR KR1020087025591A patent/KR101138038B1/ko active IP Right Grant
- 2007-05-09 WO PCT/JP2007/059617 patent/WO2007129742A1/ja active Application Filing
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2008
- 2008-11-06 US US12/266,185 patent/US9219176B2/en active Active
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010147357A (ja) * | 2008-12-22 | 2010-07-01 | Sony Corp | 固体撮像装置の製造方法及び固体撮像装置 |
JP2011058964A (ja) * | 2009-09-10 | 2011-03-24 | Toshiba Corp | X線平面検出器及びその製造方法 |
KR20200044998A (ko) * | 2012-02-14 | 2020-04-29 | 아메리칸 사이언스 앤 엔지니어링, 인크. | 파장-편이 섬유-결합 신틸레이션 검출기를 사용한 x-선 검사 |
KR102293638B1 (ko) * | 2012-02-14 | 2021-08-24 | 아메리칸 사이언스 앤 엔지니어링, 인크. | 파장-편이 섬유-결합 신틸레이션 검출기를 사용한 x-선 검사 |
WO2019176137A1 (ja) * | 2018-03-12 | 2019-09-19 | キヤノン電子管デバイス株式会社 | 放射線検出パネル、放射線検出器、および放射線検出パネルの製造方法 |
JP2021124308A (ja) * | 2020-02-03 | 2021-08-30 | 浜松ホトニクス株式会社 | 放射線検出装置 |
JP7402068B2 (ja) | 2020-02-03 | 2023-12-20 | 浜松ホトニクス株式会社 | 放射線検出装置 |
Also Published As
Publication number | Publication date |
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US9219176B2 (en) | 2015-12-22 |
EP2034335B1 (en) | 2019-08-07 |
JP4455534B2 (ja) | 2010-04-21 |
EP2034335A1 (en) | 2009-03-11 |
US20090050817A1 (en) | 2009-02-26 |
WO2007129742A1 (ja) | 2007-11-15 |
EP2034335A4 (en) | 2017-05-17 |
KR101138038B1 (ko) | 2012-04-23 |
KR20090007338A (ko) | 2009-01-16 |
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