JP2007192760A - Method and device for measuring liquid weight - Google Patents

Method and device for measuring liquid weight Download PDF

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JP2007192760A
JP2007192760A JP2006013346A JP2006013346A JP2007192760A JP 2007192760 A JP2007192760 A JP 2007192760A JP 2006013346 A JP2006013346 A JP 2006013346A JP 2006013346 A JP2006013346 A JP 2006013346A JP 2007192760 A JP2007192760 A JP 2007192760A
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Takahiro Kasahara
孝宏 笠原
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Dai Nippon Printing Co Ltd
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Dai Nippon Printing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for measuring liquid weight having volatility and a device therefor. <P>SOLUTION: An auxiliary liquid feeding section 11 of the device 1 for measuring liquid weight feeds auxiliary liquid 17 to a container 9. An electronic balance 3 measures the weight A of the auxiliary liquid 17 in the container 9. A section 13 for feeding liquid 19 to be measured feeds the liquid 19 to be measured to the container 9. The specific gravity of the liquid 19 is larger than that of the liquid 17, which results in separation into two layers of the liquids 17 and 19 and the liquid 19 stays at the lower side of the liquid 17. The electronic balance 3 measures the total weight B of the auxiliary liquid 17 and the liquid to be measured in the container 9. A controller 15 measures the difference B-A in weight before and after the addition of the liquid 19 to the liquid 17. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、揮発性を有する液体の重量を測定する液体重量測定方法及び液体重量測定装置に関する。   The present invention relates to a liquid weight measuring method and a liquid weight measuring apparatus for measuring the weight of a volatile liquid.

従来、基板上に液晶ディスプレイやＰＤＰ（Ｐｌａｓｍａ Ｄｉｓｐｌａｙ Ｐａｎｅｌ）や有機ＥＬ（ｏｒｇａｎｉｃ ＥｌｅｃｔｒｏＬｕｍｉｎｅｓｃｅｎｃｅ）等の表示装置に用いるカラーフィルタ製造方法としてインクジェット方式がある。インクジェット方式ではＲ（赤）及びＧ（緑）及びＢ（青）の３色のインクを基板上に吐出して着色層を形成することによりカラーフィルタが製造される。   2. Description of the Related Art Conventionally, there is an inkjet method as a color filter manufacturing method used for a display device such as a liquid crystal display, a PDP (Plasma Display Panel), or an organic EL (Organic ElectroLuminescence) on a substrate. In the inkjet method, a color filter is manufactured by ejecting R (red), G (green), and B (blue) inks onto a substrate to form a colored layer.

カラーフィルタに色むら等が生じるのを防止するためには、インク吐出量を適正に管理する必要がある。そこで、電子天秤によりインク滴の重量を直接測定することによりインク吐出量を管理するインク重量測定方法が提案されている（例えば、［特許文献１］参照。）。また、塗布したインクの面積をカメラにより測定してインクの体積を算出することによりインク吐出量が算出される。   In order to prevent color unevenness from occurring in the color filter, it is necessary to appropriately manage the ink discharge amount. In view of this, an ink weight measurement method has been proposed in which the ink discharge amount is managed by directly measuring the weight of ink droplets using an electronic balance (see, for example, [Patent Document 1]). Further, the ink ejection amount is calculated by measuring the area of the applied ink with a camera and calculating the volume of the ink.

特開平１１−２４８９２７号公報Japanese Patent Laid-Open No. 11-248927

しかしながら、従来のインク重量測定方法では、インクが含有する溶剤等の揮発性成分が揮発して重量が減少するので正確な重量測定が困難であるという問題点がある。
また、カメラによる測定方法では、２次元画像からインクの体積を算出するので精度が低下するという問題点がある。 However, the conventional ink weight measurement method has a problem in that accurate weight measurement is difficult because volatile components such as a solvent contained in the ink volatilize and the weight is reduced.
In addition, the measurement method using a camera has a problem that accuracy is lowered because the volume of ink is calculated from a two-dimensional image.

本発明は、以上の問題点に鑑みてなされたものであり、揮発性を有する液体の重量を高精度に測定する液体重量測定方法及び液体重量測定装置を提供することを目的とする。   The present invention has been made in view of the above problems, and an object of the present invention is to provide a liquid weight measuring method and a liquid weight measuring apparatus for measuring the weight of a volatile liquid with high accuracy.

前述した目的を達成するために第１の発明は、被測定液体の重量を測定する液体重量測定方法であって、前記被測定液体と比較して低比重かつ低揮発性の補助液体を容器に入れ、前記容器内の補助液体に前記被測定液体を入れ、前記被測定液体を入れる前後の重量差を計測し、前記重量差に基づいて前記被測定液体の重量を測定することを特徴とする液体重量測定方法である。   In order to achieve the above-mentioned object, a first invention is a liquid weight measuring method for measuring the weight of a liquid to be measured, wherein an auxiliary liquid having a low specific gravity and a low volatility as compared with the liquid to be measured is contained in a container. And putting the liquid to be measured into the auxiliary liquid in the container, measuring a weight difference before and after adding the liquid to be measured, and measuring the weight of the liquid to be measured based on the weight difference. This is a liquid weight measurement method.

第１の発明では、被測定液体と比較して低比重かつ低揮発性の補助液体を容器に入れ、容器内の補助液体に被測定液体を入れ、被測定液体を入れる前後の重量差を計測し、この重量差に基づいて被測定液体の重量を測定する。   In the first invention, an auxiliary liquid having a low specific gravity and low volatility compared to the liquid to be measured is put in the container, the liquid to be measured is put in the auxiliary liquid in the container, and the weight difference before and after the liquid to be measured is measured is measured. The weight of the liquid to be measured is measured based on this weight difference.

被測定液体は、測定対象の液体であり、例えば、インクジェットヘッドやディスペンサから吐出される粒状の液体や、パイプなどで連続的に供給される液体である。
補助液体は、被測定液体と比較して低比重かつ低揮発性の液体である。補助液体は、特定の液体に限定されず、被測定液体の揮発を抑制するものであればよい。被測定液体に応じて、比重、粘度、沸点、揮発性等の観点から適切な補助液体を選択することが望ましい。
重量計測手段としては、電子天秤を用いることが望ましい。 The liquid to be measured is a liquid to be measured, for example, a granular liquid discharged from an inkjet head or a dispenser, or a liquid continuously supplied through a pipe or the like.
The auxiliary liquid is a liquid having a low specific gravity and a low volatility as compared with the liquid to be measured. The auxiliary liquid is not limited to a specific liquid and may be any liquid that suppresses volatilization of the liquid to be measured. Depending on the liquid to be measured, it is desirable to select an appropriate auxiliary liquid from the viewpoints of specific gravity, viscosity, boiling point, volatility, and the like.
It is desirable to use an electronic balance as the weight measuring means.

第１の発明によれば、被測定液体の表面は補助液体に覆われて揮発が抑制されるので、揮発による測定誤差を軽減し、揮発性を有する被測定液体の重量測定を高精度に行うことができる。   According to the first aspect, since the surface of the liquid to be measured is covered with the auxiliary liquid and volatilization is suppressed, measurement errors due to volatilization are reduced, and the weight of the liquid to be measured having high volatility is measured with high accuracy. be able to.

また、電子天秤の分解能に満たない液滴量を測定するためには、複数の液滴（例えば、１０００００滴）を入れ、被測定液体の液滴数を計数して１滴当たりの被測定液体の重量を測定することもできる。
また、インクジェットヘッド等が有する複数のノズルのうち測定対象のノズルから順次前記被測定液体を吐出して測定した重量に基づいて、各ノズル毎に吐出量を測定することもできる。
また、インクジェットヘッド等が有する複数のノズルの全てから被測定液体を吐出して測定した重量（Ｄ）と、測定対象のノズルから被測定液体の吐出を行わず測定対象のノズル以外の全てのノズルから前記被測定液体を吐出して測定した重量（Ｃ）と、の重量差（Ｄ−Ｃ）に基づいて、各ノズル毎に吐出量を測定することもできる。これにより、インクジェットヘッドに発生するクロストーク等による隣接ノズルの吐出の影響を抑制し、全ノズル同時に吐出した時における各ノズルからの吐出量を正確に測定することができる。 In addition, in order to measure the amount of liquid droplets that does not satisfy the resolution of the electronic balance, a plurality of liquid droplets (for example, 100,000 droplets) are inserted, the number of liquid droplets to be measured is counted, and the liquid liquid to be measured per droplet The weight of can also be measured.
In addition, the discharge amount can be measured for each nozzle based on the weight measured by sequentially discharging the liquid to be measured from the nozzles to be measured among the plurality of nozzles of the inkjet head or the like.
Also, the weight (D) measured by discharging the liquid to be measured from all of the plurality of nozzles of the inkjet head, etc., and all the nozzles other than the nozzle to be measured without discharging the liquid to be measured from the nozzle to be measured The discharge amount can be measured for each nozzle based on the weight difference (DC) measured by discharging the liquid to be measured from (C). Thereby, it is possible to suppress the influence of the discharge of the adjacent nozzles due to the crosstalk generated in the ink jet head, and to accurately measure the discharge amount from each nozzle when all the nozzles are discharged simultaneously.

第２の発明は、被測定液体の重量を測定する液体重量測定装置であって、液体を収容する容器と、前記容器に収容した液体の重量を計測する重量計測手段と、前記容器に前記被測定液体と比較して低比重かつ低揮発性の補助液体を入れる補助液体供給手段と、前記容器内の補助液体に前記被測定液体を入れる被測定液体供給手段と、前記重量計測手段により計測した前記被測定液体を入れる前後の重量差に基づいて、前記被測定液体の重量を測定する被測定液体重量測定手段と、を具備することを特徴とする液体重量測定装置である。   A second invention is a liquid weight measuring apparatus for measuring the weight of a liquid to be measured, comprising a container for storing a liquid, weight measuring means for measuring the weight of the liquid stored in the container, and the container Measured by an auxiliary liquid supply means for putting an auxiliary liquid having a low specific gravity and a low volatility compared to the measurement liquid, a measured liquid supply means for putting the measured liquid in the auxiliary liquid in the container, and the weight measuring means. A liquid weight measuring apparatus comprising: a liquid weight measuring unit to measure a weight of the liquid to be measured based on a weight difference before and after the liquid to be measured is placed.

第２の発明は、第１の発明の液体重量測定方法を用いて測定を行う液体重量測定装置に関する発明である。   The second invention is an invention relating to a liquid weight measuring apparatus for performing measurement using the liquid weight measuring method of the first invention.

本発明によれば、揮発性を有する液体の重量を高精度に測定する液体重量測定方法及び液体重量測定装置を提供することができる。   ADVANTAGE OF THE INVENTION According to this invention, the liquid weight measuring method and liquid weight measuring apparatus which measure the weight of the volatile liquid with high precision can be provided.

以下、添付図面を参照しながら、本発明に係る液体重量測定装置等の好適な実施形態について詳細に説明する。なお、以下の説明及び添付図面において、略同一の機能構成を有する構成要素については、同一の符号を付することにより重複説明を省略することにする。   Hereinafter, preferred embodiments of a liquid weight measuring apparatus and the like according to the present invention will be described in detail with reference to the accompanying drawings. In the following description and the accompanying drawings, the same reference numerals are given to components having substantially the same functional configuration, and redundant description will be omitted.

最初に、図１を参照しながら、本発明の第１の実施の形態に係る液体重量測定装置１の構成について説明する。
図１は、液体重量測定装置１の構成図である。 Initially, the structure of the liquid weight measuring apparatus 1 which concerns on the 1st Embodiment of this invention is demonstrated, referring FIG.
FIG. 1 is a configuration diagram of a liquid weight measuring apparatus 1.

液体重量測定装置１は、重量計測部５及び表示部７を備える電子天秤３、液体を収容する容器９、補助液体１７を容器９に供給する補助液体供給部１１、被測定液体１９を容器９に供給する被測定液体供給部１３から構成される。   The liquid weight measuring apparatus 1 includes an electronic balance 3 including a weight measuring unit 5 and a display unit 7, a container 9 for storing liquid, an auxiliary liquid supply unit 11 for supplying auxiliary liquid 17 to the container 9, and a liquid to be measured 19 in the container 9. It is comprised from the to-be-measured liquid supply part 13 supplied to.

制御部１５は、液体重量測定装置１を構成する各装置の動作制御や演算処理を行う装置であり、例えば、ＣＰＵやメモリを備える電子計算機やコンピュータ等を用いることができる。
被測定液体１９は、測定対象の液体であり、例えば、インクジェットヘッド２１から吐出されるインクである。
補助液体１７は、被測定液体１９と比較して低比重かつ低揮発性の液体であり、例えば、シリコーンオイルを用いることができる。
補助液体供給部１１は、補助液体の供給元である。
被測定液体供給部１３は、測定対象の液体の供給元であり、例えば、インクジェットヘッド２１、ディスペンサなど液体を供給し供給量を制御可能なものであり、液体流量制御装置なども含まれる。 The control unit 15 is a device that performs operation control and arithmetic processing of each device constituting the liquid weight measuring device 1, and for example, an electronic computer or a computer that includes a CPU and a memory can be used.
The liquid 19 to be measured is a liquid to be measured, and is, for example, ink ejected from the inkjet head 21.
The auxiliary liquid 17 is a liquid having a low specific gravity and a low volatility as compared with the liquid 19 to be measured. For example, silicone oil can be used.
The auxiliary liquid supply unit 11 is a supply source of the auxiliary liquid.
The liquid supply unit to be measured 13 is a supply source of the liquid to be measured. For example, the liquid supply unit 13 can supply a liquid such as an inkjet head 21 or a dispenser to control the supply amount, and includes a liquid flow rate control device.

次に、図２を参照しながら、液体重量測定装置１の動作について説明する。
図２は、液体重量測定装置１の動作を示すフローチャートである。 Next, the operation of the liquid weight measuring apparatus 1 will be described with reference to FIG.
FIG. 2 is a flowchart showing the operation of the liquid weight measuring apparatus 1.

液体重量測定装置１の補助液体供給部１１は、容器９に補助液体１７を供給する（ステップ１０１）。電子天秤３は、容器９内の補助液体１７の重量（Ａ）を計測する（ステップ１０２）。被測定液体供給部１３は、容器９に被測定液体１９を供給する（ステップ１０３）。被測定液体１９の比重は補助液体１７の比重より大きいので、被測定液体１９及び補助液体１７は２層に分離し、被測定液体１９は補助液体１７の下側に滞留する。すわなち、被測定液体１９は、容器の内面及び補助液体１７により内包されて外気に直接触れることがない。電子天秤３は、容器９内の補助液体１７及び被測定液体１９の総重量（Ｂ）を計測する（ステップ１０４）。   The auxiliary liquid supply unit 11 of the liquid weight measuring apparatus 1 supplies the auxiliary liquid 17 to the container 9 (step 101). The electronic balance 3 measures the weight (A) of the auxiliary liquid 17 in the container 9 (step 102). The liquid under measurement supply unit 13 supplies the liquid under measurement 19 to the container 9 (step 103). Since the specific gravity of the liquid to be measured 19 is larger than the specific gravity of the auxiliary liquid 17, the liquid to be measured 19 and the auxiliary liquid 17 are separated into two layers, and the liquid to be measured 19 stays below the auxiliary liquid 17. In other words, the liquid 19 to be measured is contained by the inner surface of the container and the auxiliary liquid 17 and does not directly contact the outside air. The electronic balance 3 measures the total weight (B) of the auxiliary liquid 17 and the liquid 19 to be measured in the container 9 (step 104).

制御部１５は、ステップ１０２の処理で計測した重量（Ａ）とステップ１０４の処理で計測した重量（Ｂ）との重量差（Ｂ−Ａ）を測定する（ステップ１０５）。また、測定可能な液滴量を確保すべく容器９に複数の液滴（例えば、１０００００滴）を供給して測定を行う場合には、容器９に供給した被測定液体１９の液滴数を計数し、１滴当たりの被測定液体１９の重量（（Ｂ−Ａ）／（液滴数））を測定するようにしてもよい。表示部７は、測定結果を表示する（ステップ１０６）。   The control unit 15 measures a weight difference (B−A) between the weight (A) measured in the process of Step 102 and the weight (B) measured in the process of Step 104 (Step 105). Further, in the case where measurement is performed by supplying a plurality of droplets (for example, 100,000 droplets) to the container 9 in order to secure a measurable droplet amount, the number of droplets of the liquid 19 to be measured supplied to the container 9 is determined. Counting may be performed to measure the weight ((B−A) / (number of droplets)) of the liquid 19 to be measured per droplet. The display unit 7 displays the measurement result (step 106).

以上の過程を経て、液体重量測定装置１は、補助液体１７に被測定液体１９を注ぎ込み、被測定液体１９を外気に触れないようにして、被測定液体１９の重量測定を行う。
このように、被測定液体１９の表面は補助液体１７に覆われて揮発が抑制されるので、揮発による測定誤差を軽減し、揮発性を有する被測定液体１９の重量測定を高精度に行うことができる。 Through the above process, the liquid weight measuring apparatus 1 measures the weight of the liquid to be measured 19 by pouring the liquid to be measured 19 into the auxiliary liquid 17 so that the liquid to be measured 19 is not exposed to the outside air.
Thus, since the surface of the liquid 19 to be measured is covered with the auxiliary liquid 17 and volatilization is suppressed, measurement errors due to volatilization are reduced, and the weight of the liquid 19 to be measured having high volatility is measured with high accuracy. Can do.

尚、補助液体１７の揮発等により、測定時間経過による測定誤差が見込まれる場合には当該測定誤差を補正するようにしてもよい。この測定誤差は、補助液体１７を用いずに被測定液体１９の重量を直接計測する場合と比較して非常に小さい。従って、誤差補正処理を行う場合であっても高精度の液体重量測定を行うことができる。   If a measurement error due to the passage of the measurement time is expected due to volatilization of the auxiliary liquid 17 or the like, the measurement error may be corrected. This measurement error is very small as compared with the case where the weight of the liquid 19 to be measured is directly measured without using the auxiliary liquid 17. Therefore, even when error correction processing is performed, highly accurate liquid weight measurement can be performed.

次に、図３及び図４を参照しながら、インクジェットヘッド２１の各ノズル２３からのインク吐出量の測定について説明する。
図３及び図４は、複数のノズル２３を有するインクジェットヘッド２１を示す図である。図３は、測定対象ノズル２３−１からの液滴吐出を示し、図４は、測定対象ノズル２３−１以外からの液滴吐出を示す。 Next, the measurement of the ink discharge amount from each nozzle 23 of the inkjet head 21 will be described with reference to FIGS.
3 and 4 are views showing an ink jet head 21 having a plurality of nozzles 23. FIG. 3 shows droplet discharge from the measurement target nozzle 23-1, and FIG. 4 shows droplet discharge from other than the measurement target nozzle 23-1.

図３に示すように、液体重量測定装置１は、ノズル２３−２〜ノズル２３−５からは液滴を吐出させず、測定対象の１つのノズル２３−１から液滴２５を吐出して重量測定を行い、ノズル２３−１のインク吐出量を測定することができる。   As shown in FIG. 3, the liquid weight measuring apparatus 1 does not discharge droplets from the nozzles 23-2 to 23-5, but discharges droplets 25 from one nozzle 23-1 to be measured and weights it. Measurement can be performed to measure the ink discharge amount of the nozzle 23-1.

また、図４に示すように、液体重量測定装置１は、測定対象の１つのノズル２３−１から液滴を吐出させず、その他のノズル２３−２〜ノズル２３−５から液滴２５を吐出して重量（Ｃ＝ノズル２３−２の液滴重量〜ノズル２３−５の液滴重量の総和）を測定する。また、液体重量測定装置１は、全てのノズル２３−１〜ノズル２３−５から液滴２５を吐出して重量（Ｄ＝ノズル２３−１の液滴重量〜ノズル２３−５の液滴重量の総和）を測定する。そしてこれらの重量差（Ｄ−Ｃ）を測定することにより、ノズル２３−１のインク吐出量を測定することができる。   Further, as shown in FIG. 4, the liquid weight measuring apparatus 1 does not eject droplets from one nozzle 23-1 to be measured and ejects droplets 25 from the other nozzles 23-2 to 23-5. Then, the weight (C = total droplet weight of the nozzle 23-2 to the total droplet weight of the nozzle 23-5) is measured. Further, the liquid weight measuring apparatus 1 discharges the droplets 25 from all the nozzles 23-1 to 23-5 and is weighted (D = the droplet weight of the nozzle 23-1 to the droplet weight of the nozzle 23-5). Measure the sum. By measuring these weight differences (D-C), the ink discharge amount of the nozzle 23-1 can be measured.

このように、図４に示す測定方法によれば、全ノズル同時に吐出した時の状態に近似させて重量測定を行うので、測定精度を向上させることができる。図４に示す測定方法は、インクジェットヘッドに発生するクロストークと呼ばれる隣接ノズルの吐出の影響により、全ノズル同時に吐出した時の各ノズルからの吐出量を正確に測定できない場合に使用することが望ましい。   As described above, according to the measurement method shown in FIG. 4, since the weight measurement is performed by approximating the state when all the nozzles are discharged simultaneously, the measurement accuracy can be improved. The measurement method shown in FIG. 4 is desirably used when the discharge amount from each nozzle cannot be accurately measured due to the influence of the discharge of adjacent nozzles called crosstalk that occurs in the ink jet head. .

尚、図３及び図４に示す液体重量測定において、図１及び図２を用いて先述したように補助液体１７に液滴２５を注ぎ込み重量測定を行うことにより、揮発による測定誤差を軽減して測定精度を向上させることができる。   In the liquid weight measurement shown in FIGS. 3 and 4, the measurement error due to volatilization is reduced by pouring the droplet 25 into the auxiliary liquid 17 and measuring the weight as described above with reference to FIGS. 1 and 2. Measurement accuracy can be improved.

次に、図５及び図６を参照しながら、液体重量測定装置１による測定結果に基づいて塗布処理を行う塗布装置２７について説明する。
図５は、塗布装置２７の構成図である。
図６は、塗布装置２７の動作を示すフローチャートである。 Next, the coating apparatus 27 that performs the coating process based on the measurement result of the liquid weight measuring apparatus 1 will be described with reference to FIGS. 5 and 6.
FIG. 5 is a configuration diagram of the coating device 27.
FIG. 6 is a flowchart showing the operation of the coating apparatus 27.

塗布装置２７は、制御部２９、複数のノズル２３を有するインクジェットヘッド２１、塗布対象の基板３３を支持する基板支持部３１から構成される。
塗布装置２７は、基板３３に対して液滴２５を吐出して塗布を行う装置である。塗布装置２７は、例えば、基板にＲ、Ｇ、Ｂの３色のインクを塗布して着色層パターンを形成するカラーフィルタ製造装置である。 The coating device 27 includes a control unit 29, an inkjet head 21 having a plurality of nozzles 23, and a substrate support unit 31 that supports a substrate 33 to be coated.
The coating device 27 is a device that performs coating by discharging droplets 25 onto the substrate 33. The coating device 27 is, for example, a color filter manufacturing device that forms a colored layer pattern by coating three color inks of R, G, and B on a substrate.

制御部２９は、塗布装置２７を構成する各装置の動作制御や演算処理を行う装置であり、例えば、ＣＰＵやメモリを備える電子計算機やコンピュータ等を用いることができる。
インクジェットヘッド２１及び基板支持部３１は、制御部２９からの制御信号に基づいて互いに相対的に位置決めされ、基板３３における液滴２５の着弾位置が定められる。 The control unit 29 is a device that performs operation control and arithmetic processing of each device constituting the coating device 27. For example, an electronic computer or a computer that includes a CPU and a memory can be used.
The inkjet head 21 and the substrate support unit 31 are positioned relative to each other based on a control signal from the control unit 29, and the landing position of the droplet 25 on the substrate 33 is determined.

液体重量測定装置１の制御部１５は、インクジェットヘッド２１の各ノズル２３毎に液滴２５の１滴当たりの重量測定を行い、測定結果情報３５を塗布装置２７の制御部２９に入力する（ステップ２０１）。   The control unit 15 of the liquid weight measuring apparatus 1 measures the weight of each droplet 25 for each nozzle 23 of the inkjet head 21 and inputs measurement result information 35 to the control unit 29 of the coating apparatus 27 (step). 201).

塗布装置２７の制御部２９は、インクジェットヘッド２１及び基板支持部３１の移動を行う（ステップ２０２及びステップ２０３）。尚、移動機構としては、汎用のものを用いることができ、例えば、移動用アクチュエータとして、ステップモータ、サーボモータ、リニアモータを用い、ガイド機構として、ＬＭガイド（ＴＨＫ株式会社製）、エアースライド等を用いることができる。また、移動量の計測に関しては、レーザ干渉計、スケール、エンコーダ等を用いることができる。   The control unit 29 of the coating apparatus 27 moves the inkjet head 21 and the substrate support unit 31 (Step 202 and Step 203). In addition, a general purpose thing can be used as a moving mechanism, for example, a step motor, a servo motor, and a linear motor are used as a moving actuator, and an LM guide (manufactured by THK Co., Ltd.), an air slide, etc. are used as a guide mechanism. Can be used. Further, a laser interferometer, a scale, an encoder, or the like can be used for measuring the movement amount.

制御部２９は、測定結果情報３５に基づいて、各ノズル２３毎に液滴２５の吐出量を調整する（ステップ２０４）。尚、吐出量の調整に関しては、各ノズル２３に設けられる圧電素子（ピエゾ素子）への印加電圧制御や液滴数制御を行うことが望ましい。制御部２９は、各ノズル２３から基板３３に液滴２５を吐出して塗布処理を行う（ステップ２０５）。   Based on the measurement result information 35, the control unit 29 adjusts the discharge amount of the droplet 25 for each nozzle 23 (step 204). Regarding the adjustment of the discharge amount, it is desirable to control the voltage applied to the piezoelectric elements (piezo elements) provided in each nozzle 23 and the number of droplets. The controller 29 performs the coating process by discharging the droplets 25 from the nozzles 23 onto the substrate 33 (step 205).

以上の過程を経て、塗布装置２７は、液体重量測定装置１から入力される測定結果情報３５に基づいて、各ノズル２３毎に吐出量を調整して塗布処理を行う。
このように、液体重量測定装置１から取得した高精度の測定結果情報を塗布装置２７における塗布処理にフィードバックすることにより、塗布処理の精度を向上させることができる。 Through the above process, the coating apparatus 27 performs the coating process by adjusting the discharge amount for each nozzle 23 based on the measurement result information 35 input from the liquid weight measuring apparatus 1.
Thus, by feeding back the highly accurate measurement result information acquired from the liquid weight measuring apparatus 1 to the coating process in the coating apparatus 27, the precision of the coating process can be improved.

尚、上述の実施の形態では、液体重量測定装置１は、主としてインクジェットヘッドからのインク吐出量を測定するものとして説明したが、液体重量を測定するものであれば用途は限られない。また、補助液体１７中に被測定液体１９を入れた後に重量測定を行うものとして説明したが、重量測定を行うタイミングはこれに限られない。
例えば、液体重量測定装置１を用いて流量計の校正を行うことができる。被測定液体供給部１３として流量計を適用し、流量計出口から補助液体１７中に被測定液体１９として基準流量の流体を注ぎ込み重量測定することにより流量計の校正を行うことができる。また、流量計出口からの流体を補助液体１７中に連続的に注ぎ込みつつ逐次、重量推移を測定することにより流量計の校正を行うこともできる。また、液体重量測定装置１により流体の基準流量を測定して、当該基準流量の流体を校正対象の流量計に流入させるようにしてもよい。 In the above-described embodiment, the liquid weight measuring apparatus 1 has been described as mainly measuring the amount of ink discharged from the inkjet head, but the application is not limited as long as the liquid weight is measured. Moreover, although it demonstrated as what measures a weight after putting the to-be-measured liquid 19 in the auxiliary | assistant liquid 17, the timing which performs a weight measurement is not restricted to this.
For example, the flow meter can be calibrated using the liquid weight measuring apparatus 1. The flow meter can be calibrated by applying a flow meter as the measured liquid supply unit 13 and pouring a fluid at a reference flow rate as the measured liquid 19 into the auxiliary liquid 17 from the outlet of the flow meter and measuring the weight. Further, the flow meter can be calibrated by measuring the weight transition successively while continuously pouring the fluid from the outlet of the flow meter into the auxiliary liquid 17. Alternatively, the reference flow rate of the fluid may be measured by the liquid weight measuring device 1, and the fluid having the reference flow rate may be allowed to flow into the flow meter to be calibrated.

以上、添付図面を参照しながら、本発明に係る液体重量測定装置等の好適な実施形態について説明したが、本発明はかかる例に限定されない。当業者であれば、本願で開示した技術的思想の範疇内において、各種の変更例または修正例に想到し得ることは明らかであり、それらについても当然に本発明の技術的範囲に属するものと了解される。   The preferred embodiments of the liquid weight measuring device and the like according to the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to such examples. It will be apparent to those skilled in the art that various changes or modifications can be conceived within the scope of the technical idea disclosed in the present application, and these are naturally within the technical scope of the present invention. Understood.

液体重量測定装置１の構成図Configuration diagram of liquid weight measuring apparatus 1 液体重量測定装置１の動作を示すフローチャートFlow chart showing the operation of the liquid weight measuring device 1 複数のノズル２３を有するインクジェットヘッド２１を示す図（測定対象ノズル２３−１からの液滴吐出）The figure which shows the inkjet head 21 which has the some nozzle 23 (Droplet discharge from the measurement object nozzle 23-1) 複数のノズル２３を有するインクジェットヘッド２１を示す図（測定対象ノズル２３−１以外からの液滴吐出）The figure which shows the inkjet head 21 which has several nozzle 23 (Droplet discharge from other than measurement object nozzle 23-1) 塗布装置２７の構成図Configuration diagram of coating device 27 塗布装置２７の動作を示すフローチャートFlow chart showing the operation of the coating device 27

符号の説明Explanation of symbols

１………液体重量測定装置
３………電子天秤
５………重量計測部
７………表示部
９………容器
１１………補助液体供給部
１３………被測定液体供給部
１５………制御部
１７………補助液体
１９………被測定液体
２１………インクジェットヘッド
２３………ノズル
２５………液滴（インク）
２７………塗布装置
２９………制御部
３１………基板支持部
３３………基板
３５………測定結果情報 DESCRIPTION OF SYMBOLS 1 ......... Liquid weight measuring device 3 ......... Electronic balance 5 ......... Weight measuring part 7 ......... Display part 9 ......... Vessel 11 ......... Auxiliary liquid supply part 13 ......... Measurement liquid supply part 15 ......... Control unit 17 ......... Auxiliary liquid 19 ......... Measurement liquid 21 ......... Inkjet head 23 ......... Nozzle 25 ......... Droplet (ink)
27 ......... Coating device 29 ......... Control unit 31 ......... Substrate support unit 33 ......... Substrate 35 ......... Measurement result information

Claims (8)

被測定液体の重量を測定する液体重量測定方法であって、
前記被測定液体と比較して低比重かつ低揮発性の補助液体を容器に入れ、前記容器内の補助液体に前記被測定液体を入れ、前記被測定液体を入れる前後の重量差を計測し、前記重量差に基づいて前記被測定液体の重量を測定することを特徴とする液体重量測定方法。 A liquid weight measuring method for measuring the weight of a liquid to be measured,
An auxiliary liquid having a low specific gravity and low volatility compared with the liquid to be measured is put in a container, the liquid to be measured is put in the auxiliary liquid in the container, and a weight difference before and after the liquid to be measured is measured is measured. A liquid weight measuring method, wherein the weight of the liquid to be measured is measured based on the weight difference. 前記容器内に入れた前記被測定液体の液滴数を計数し、前記被測定液体を入れる前後の重量差と前記液滴数とに基づいて１滴当たりの前記被測定液体の重量を測定することを特徴とする請求項１に記載の液体重量測定方法。   The number of droplets of the liquid to be measured placed in the container is counted, and the weight of the liquid to be measured per droplet is measured based on the weight difference before and after the liquid to be measured and the number of droplets. The liquid weight measuring method according to claim 1. 前記被測定液体を供給する複数のノズルのうち測定対象のノズルから順次前記被測定液体を吐出して測定した重量に基づいて、各ノズル毎に吐出量を測定することを特徴とする請求項１または請求項２に記載の液体重量測定方法。   2. The discharge amount is measured for each nozzle based on a weight measured by sequentially discharging the liquid to be measured from nozzles to be measured among a plurality of nozzles that supply the liquid to be measured. Or the liquid weight measuring method of Claim 2. 前記被測定液体を供給する複数のノズルの全てから前記被測定液体を吐出して測定した重量と、測定対象のノズルから前記被測定液体の吐出を行わず前記測定対象のノズル以外の全てのノズルから前記被測定液体を吐出して測定した重量と、の重量差に基づいて、各ノズル毎に吐出量を測定することを特徴とする請求項１または請求項２に記載の液体重量測定方法。   Weight measured by discharging the liquid to be measured from all of the plurality of nozzles supplying the liquid to be measured, and all nozzles other than the nozzle to be measured without discharging the liquid to be measured from the nozzle to be measured 3. The liquid weight measuring method according to claim 1, wherein a discharge amount is measured for each nozzle based on a weight difference between the measured liquid and the weight measured by discharging the liquid to be measured. 被測定液体の重量を測定する液体重量測定装置であって、
液体を収容する容器と、
前記容器に収容した液体の重量を計測する重量計測手段と、
前記容器に前記被測定液体と比較して低比重かつ低揮発性の補助液体を入れる補助液体供給手段と、
前記容器内の補助液体に前記被測定液体を入れる被測定液体供給手段と、
前記重量計測手段により計測した前記被測定液体を入れる前後の重量差に基づいて、前記被測定液体の重量を測定する被測定液体重量測定手段と、
を具備することを特徴とする液体重量測定装置。 A liquid weight measuring device for measuring the weight of a liquid to be measured,
A container containing a liquid;
A weight measuring means for measuring the weight of the liquid contained in the container;
Auxiliary liquid supply means for putting an auxiliary liquid having a low specific gravity and a low volatility as compared with the liquid to be measured in the container,
A liquid to be measured supplying means for putting the liquid to be measured into the auxiliary liquid in the container;
Based on the weight difference before and after the liquid to be measured measured by the weight measuring means, the liquid weight measuring means to be measured for measuring the weight of the liquid to be measured;
A liquid weight measuring apparatus comprising: 前記被測定液体重量測定手段は、前記容器内に入れた前記被測定液体の液滴数を計数し、前記被測定液体を入れる前後の重量差と前記液滴数とに基づいて１滴当たりの前記被測定液体の重量を測定することを特徴とする請求項５に記載の液体重量測定装置。   The measured liquid weight measuring means counts the number of droplets of the measured liquid placed in the container, and determines the weight per droplet based on the weight difference before and after the liquid to be measured and the number of droplets. The liquid weight measuring apparatus according to claim 5, wherein the weight of the liquid to be measured is measured. 前記被測定液体重量測定手段は、前記被測定液体供給手段が有する複数のノズルのうち測定対象のノズルから順次前記被測定液体を吐出して測定した重量に基づいて、各ノズル毎に吐出量を測定することを特徴とする請求項５または請求項６に記載の液体重量測定装置。   The measured liquid weight measuring unit is configured to determine a discharge amount for each nozzle based on a weight measured by sequentially discharging the measured liquid from a nozzle to be measured among a plurality of nozzles included in the measured liquid supply unit. The liquid weight measuring device according to claim 5, wherein the liquid weight measuring device measures the liquid weight. 前記被測定液体重量測定手段は、前記被測定液体供給手段が有する複数のノズルの全てから前記被測定液体を吐出して測定した重量と、測定対象のノズルから前記被測定液体の吐出を行わず前記測定対象のノズル以外の全てのノズルから前記被測定液体を吐出して測定した重量と、の重量差に基づいて、各ノズル毎に吐出量を測定することを特徴とする請求項５または請求項６に記載の液体重量測定装置。   The measured liquid weight measuring means does not discharge the measured liquid from the weight measured by discharging the measured liquid from all of the plurality of nozzles of the measured liquid supply means and the measurement target nozzle. 6. The discharge amount is measured for each nozzle based on a weight difference from a weight measured by discharging the liquid to be measured from all nozzles other than the nozzle to be measured. Item 7. The liquid weight measuring device according to Item 6.
JP2006013346A 2006-01-23 2006-01-23 Method and device for measuring liquid weight Pending JP2007192760A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101832809A (en) * 2010-04-01 2010-09-15 司玛特自动化科技(厦门)有限公司 Liquid weighing device and automatic control method thereof
JP2010266349A (en) * 2009-05-15 2010-11-25 A & D Co Ltd Performance inspection container for quantitative titration apparatus, and measuring environment determination method using the container
KR20110069244A (en) * 2009-12-17 2011-06-23 주식회사 탑 엔지니어링 Apparatus for measuring lc weight and lc dispenser including the same
KR101052652B1 (en) 2008-01-14 2011-07-28 주식회사 엘지화학 Dispensing stability test method and apparatus of ink

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101052652B1 (en) 2008-01-14 2011-07-28 주식회사 엘지화학 Dispensing stability test method and apparatus of ink
JP2010266349A (en) * 2009-05-15 2010-11-25 A & D Co Ltd Performance inspection container for quantitative titration apparatus, and measuring environment determination method using the container
KR20110069244A (en) * 2009-12-17 2011-06-23 주식회사 탑 엔지니어링 Apparatus for measuring lc weight and lc dispenser including the same
KR101665051B1 (en) * 2009-12-17 2016-10-12 주식회사 탑 엔지니어링 Apparatus for measuring LC weight and LC dispenser including the same
CN101832809A (en) * 2010-04-01 2010-09-15 司玛特自动化科技(厦门)有限公司 Liquid weighing device and automatic control method thereof

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