JP2007179706A - 多層光記録媒体 - Google Patents

多層光記録媒体 Download PDF

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JP2007179706A
JP2007179706A JP2005380045A JP2005380045A JP2007179706A JP 2007179706 A JP2007179706 A JP 2007179706A JP 2005380045 A JP2005380045 A JP 2005380045A JP 2005380045 A JP2005380045 A JP 2005380045A JP 2007179706 A JP2007179706 A JP 2007179706A
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layer
dielectric layer
recording medium
optical recording
information
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Hiroshi Shinkai
浩 新開
Eimei Miura
栄明 三浦
Tatsuya Kato
達也 加藤
寛史 ▲高▼▲崎▼
Hiroshi Takasaki
Hironori Kakiuchi
宏憲 柿内
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TDK Corp
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TDK Corp
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Priority to JP2005380045A priority Critical patent/JP2007179706A/ja
Priority to US11/638,360 priority patent/US20070148395A1/en
Publication of JP2007179706A publication Critical patent/JP2007179706A/ja
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Abstract

【課題】波長４０５ｎｍのレーザー光で、且つ開口数ＮＡ＝０．８５の光学系を有する光記録システムにおいて、Ｓｂを主成分とする記録膜材料を用いた場合でも、透過率と変調度が高く、且つバランスをとることができる多層光記録媒体を提供する。
【解決手段】多層光記録媒体１０は、基板１２上に設けられた全反射型の第１の情報層１４と、スペーサ層２２を介して設けられた半透明情報層である第２の情報層１６とを備え、第２の情報層１６は、基板１２側からＴｉＯ２層１６Ａ、第１誘電体層１６Ｂ、反射膜１６Ｃ、第２誘電体層１６Ｄ、記録膜１６Ｅ、第３誘電体層１６Ｆをこの順で積層して構成され、第１誘電体層１６Ｂは、ＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３を材料として、且つ屈折率が１．８４〜２．２０となるように構成されている。
【選択図】図１

Description

この発明は、２層以上の情報層を有する多層光記録媒体に関する。
現在、波長λ＝４０５ｎｍのレーザーダイオードと、開口数ＮＡ＝０．８５の光学系を有するブルーレイディスク（ＢＬＵ−ＲＡＹＤＩＳＣ；登録商標）システムが提案されていて、その１つとして、全反射情報層と半透明情報層の、２層の情報層を片面に有する５０ＧＢの光記録媒体が提案されている。
ここで、上記２層あるいは２層以上の情報層を有する多層光記録媒体においては、光入射面から最も遠い情報層の記録再生のためには、この最も遠い情報層以外の情報層は半透明とする必要があり、この場合は、この半透明情報層における記録膜及び反射膜を薄膜化しなければならない。
２層以上の情報層を有する多層光記録媒体において、光入射面から最も遠い情報層をＬ０層、その光入射面側に隣接する半透過情報層をＬ１層、以下Ｌ２層・・・とした場合、Ｌ１層の透過率は４０％以上必要であるとされている。
このような高い透過率を確保するために、記録膜や反射膜の膜厚を薄くする他は、例えば特許文献１に開示されるように、高い屈折率を有する誘電体を用いて、高い透過率を実現する方法がある。
しかしながら、一般的に、情報層における透過率を高くすると、変調度が低下して、記録信号の品質を損なう。ここで、変調度とは、（未記録部の反射率−記録部の反射率）／（未記録部の反射率）で示され、各情報層において４０％以上が必要であるとされている。この変調度は、記録膜材料によって異なり、例えばＳｂを主成分とするＳｂ共晶系材料を用いた記録膜の場合、情報層の透過率と変調度のバランスをとることは困難であった。
上記特許文献１に記載されるような構成で、半透明情報層の透過率を高くすることは可能であるが、この構成を、記録膜材料がＳｂを主成分とする半透明情報層に用いた場合、変調度が大幅に低下して、記録特性が悪化してしまうという問題点を生じる。
又、半透明情報層は、膜厚が薄いために、レーザー光照射時に熱が溜まり易く、例えば特許文献２の光記録媒体では、２層以上の光入射面側の情報層が、透明誘電体、記録層、透明誘電体、透過型反射層、透明放熱層によって構成されていて、この透明放熱層の材料としては、ＡｌＮ、Ａｌ２Ｏ３、ＳｉＣ等が用いられているが、この光記録媒体では、半透明情報層の透過率、変調度、ジッタ等の記録特性のバランスが良くないという問題点がある。
同様に、特許文献３に開示されている光記録媒体においては、情報層間のスペーサ層と半透明情報層における半透明反射層との間にＩＴＯ等の中間放熱層を設けて、急冷構造として記録特性を改善するようにしたものが提案されている。しかしながら、この引用文献３の光記録媒体においても、半透明情報層における透過率及び変調度は不十分であるという問題点が残る。
更に、特許文献４に開示される光記録媒体では、半透過反射膜上に、ＺｎＳ：ＳｉＯ２からなる誘電体層を設けているが、この場合についても、半透明情報層として必要な透過率及び変調度は備えていない。
特開２００３−１６６８７号公報 特許第３６３９２１８号公報 特開２００４−３０８７８号公報 特開平９−９１７５５号公報
この発明は、Ｓｂを主成分とする記録膜を含む半透明情報層を有する多層光記録媒体においても、半透明情報層の透過率と変調度を高い値でバランスさせることができるようにした多層光記録媒体を提供することを課題とする。
本発明者は、鋭意研究の結果、情報層間のスペーサ層と半透明情報層における第２誘電体層又は反射膜との間にＴｉＯ２層及びＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３からなる第１誘電体層とを設けることによって、高い透過率及び変調度をバランス良く達成することができることを見出した。
即ち、以下の実施例により上記課題を解決することができる。
（１）基板と、この基板上に設けられた第１の情報層と、この第１の情報層の上に設けられた少なくとも１層の半透明情報層と、前記各情報層間に設けられたスペーサ層と、を有してなり、前記基板から遠い側から記録用レーザー光が入射される多層光記録媒体であって、少なくとも１層の前記半透明情報層は、前記基板側から、ＴｉＯ２層、第１誘電体層、第２誘電体層、Ｓｂを主成分とする記録膜、第３誘電体層をこの順で積層して構成され、前記第１誘電体層は、ＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３を材料として、且つ、屈折率が１．８４〜２．２０となるように構成されていることを特徴とする多層光記録媒体。
（２）前記第１誘電体層と第２誘電体層との間に、半透過反射膜を配置したことを特徴とする（１）に記載の多層光記録媒体。
（３）前記第１誘電体層は、消衰係数が０．１以下とされていることを特徴とする（１）又は（２）に記載の多層光記録媒体。
（４）前記第１誘電体層は、ＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３の組成が、（７０：１０：２０）、（１０：５０：４０）、（１０：２０：７０）、（２０：１０：７０）mol％の組成範囲内であることを特徴とする（１）、（２）又は（３）に記載の多層光記録媒体。
（５）前記第１誘電体層は、膜厚が５ｎｍ乃至２５ｎｍ及び１００ｎｍ乃至１２０ｎｍのいずれかとされたことを特徴とする（１）乃至（４）のいずれかに記載の多層光記録媒体。
（６）前記第１誘電体層は、膜厚が５ｎｍ乃至２５ｎｍとされたことを特徴とする（１）乃至（４）のいずれかに記載の多層光記録媒体。
この発明においては、屈折率の高い誘電体であるＴｉＯ２を用いて、透過率を高く維持すると同時に、屈折率の小さい第１誘電体を、ＴｉＯ２と反射膜又は第１誘電体層との間に配置して、ＴｉＯ２による変調度低下を抑制することができるという効果を有する。
この発明の最良の実施の形態は、多層光記録媒体を、全反射情報層からなる第１の情報層と、この第１の情報層に対してスペーサ層を介して配置された半透明情報層である第２の情報層を設け、この第２の情報層は、基板側からＴｉＯ２、第１誘電体層、半透過反射膜、第２誘電体層、Ｓｂを主成分とする記録膜、第３誘電体層をこの順で積層して構成され、第１誘電体層は、ＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３を材料として、且つ、屈折率が１．８４〜２．２０、消衰係数が０．１以下、ＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３の組成が、（７０：１０：２０）、（１０：５０：４０）、（１０：２０：７０）、（２０：１０：７０）mol％の組成範囲内であり、膜厚が５ｎｍ乃至２５ｎｍとなるように構成したものである。
次に、図１を参照して、本発明の実施例１に係る多層光記録媒体１０について説明する。
この多層光記録媒体１０は、基板１２と、この基板１２上に設けられた全反射型の第１の情報層１４と、この第１の情報層１４の上に設けられた、半透明情報層である第２の情報層１６と、これらの間に設けられたスペーサ層２２と、前記第２の情報層１６を被って形成された光透過層であるカバー層２４と、を有してなり、前記基板１２から遠い側から記録用レーザー光が入射される構成となっている。
前記第２の情報層１６は、前記基板１２側から、ＴｉＯ２層１６Ａ、第１誘電体層１６Ｂ、反射膜１６Ｃ、第２誘電体層１６Ｄ、記録膜１６Ｅ、第３誘電体層１６Ｆをこの順で積層して構成されている。
前記第１誘電体層１６Ｂは、ＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３を材料として、且つ、屈折率が１．８４〜２．２０となるように構成されている。
前記基板１２は厚さ１．１ｍｍのポリカーボネイトからなり、全反射型の第１の情報層１４は、スパッタリングにより構成されているが、従来の単層型の光記録媒体における情報層と同一の構成であるので説明は省略する。
前記スペーサ層２２は、厚さ２５μｍであって、Ｇｒを転写して構成したものである。又、カバー層２４は、厚さ７５μｍである。
前記第２の情報層１６は、スペーサ層２２上に形成されたものであり、ＴｉＯ２層１６Ａは、その膜厚が３ｎｍ〜２０ｎｍであるが、４ｎｍ〜１０ｎｍとしても良い。
反射膜１６Ｃは、放熱と光干渉効果のために設けられ、材料として好ましくはＡｇ合金が用いられる。その膜厚は、半透過構造とするために０ｎｍ以上２０ｎｍ以下である。情報層が、２層の媒体の場合は、５ｎｍ〜１５ｎｍが良く、３層以上の場合は、０ｎｍ〜１２ｎｍが良い。
前記第２誘電体層１６Ｄは、記録膜からの放熱を制御するものであり、材料は特に限定されるものではなく、Ｔｉ、Ｚｒ、Ｈｆ、Ｔａ、Ｓｉ、Ａｌ、Ｍｇ、Ｙ、Ｃｅ、Ｚｎ、Ｉｎ、Ｃｒ、Ｎｂなどから選ばれる少なくとも１種の金属を含む酸化物、窒化物、硫化物、炭化物、フッ化物、あるいはこれらの混合物などが用いられる。膜厚は２ｎｍ以上２０ｎｍ以下である。膜厚が２ｎｍ未満では記録膜の保護が不十分であり、２０ｎｍより厚いと、記録膜の放熱性が低下してしまう。
前記記録膜１６Ｅは、Ｓｂを６０〜９０at％含む構成であり、７５〜８８at％としても良い。この記録膜１６Ｅは、前記Ｓｂ以外に、Ｔｅ／Ｇｅ／Ｉｎ／Ｓｎ／Ｚｎ／Ｓｉ／Ｍｇ等が含まれていても良い。記録膜１６Ｅの膜厚は２ｎｍ〜９ｎｍであるが、３ｎｍ〜８ｎｍとしてもよい。
前記第３誘電体層１６Ｆは、材料は特に限定されないが、複数の誘電体から構成しても良い。又、前記記録膜１６Ｅ上に、界面層／ＺｎＳ＋ＳｉＯ２／放熱層から構成しても良い。
界面層としては、Ｃｒ２Ｏ３を主成分とした材料を用いることが好ましい。主成分とは、全体に占めるモル比が５０％以上である。界面層の膜厚は、０．２ｎｍ以上８ｎｍ以下が良い。ＺｎＳ＋ＳｉＯ２層の好ましいＺｎＳとＳｉＯ２のモル比は、５０：５０から９５：５である。この範囲を外れると、ＺｎＳとＳｉＯ２の混合物の屈折率が変化し、光学特性の調整が困難となる。第３誘電体層１６Ｆの膜厚は、５ｎｍ以上５０ｎｍ以下が好ましい。５ｎｍより薄いと記録層の保護及び光学特性の調整が困難となり、５０ｎｍより厚いと記録膜から放熱層への放熱性が低下する。
放熱層は、記録膜からの放熱を制御し、記録膜の冷却効果を高めて正確にアモルファスマークを形成し易くするためのものである。材料は特に限定されないが、ＺｎＳ＋ＳｉＯ２層よりも熱伝導率の高い材料が好ましく、ＡｌＮ、ＳｉＮ、ＢＮ、Ａｌ２Ｏ３、ＴｉＯ２等が好ましい。最良の実施形態では、ＡｌＮによって形成される。放熱層の好ましい膜厚は、１５ｎｍ以上１５０ｎｍ以下であり、更に好ましくは２０ｎｍ以上１２０ｎｍ以下である。放熱層の膜厚が１５ｎｍ未満であると、記録層からの放熱効果が小さくなり、又、１５０ｎｍ以上になると成膜に要する時間が長くなり生産性の低下を引き起こす。
この実施例１における前記第１誘電体層１６Ｂは、ＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３（６５：１０：２５mol％）と、ＺｒＯ２：Ｃｒ２Ｏ３（９０：１０mol％）を用い、ＴｉＯ２層と第１誘電体層の膜厚をそれぞれ変えてサンプル１〜８として、それぞれ変調度と透過率の測定を行なったところ、表１及び表２のようになった。なお、他の層の膜厚及び材料は次のとおりとした。反射膜１６Ｃ；１０ｎｍ、ＡｇＰｄＣｕ、第２誘電体層１６Ｄ；４ｎｍ、ＺｒＯ２：Ｃｒ２Ｏ３（９０：１０mol％）、記録膜１６Ｅ；６ｎｍ、ＳｂＧｅ（８７：１３at％）、第３誘電体層１６Ｆ；界面層、Ｃｒ２Ｏ３、膜厚５ｎｍ／ＺｎＳ＋ＳｉＯ２（８０：２０mol％）、膜厚２０ｎｍ／放熱層、ＡｌＮ、膜厚４５ｎｍ。
Figure 2007179706
Figure 2007179706
表１からは、サンプル１〜４が、変調度、透過率ともに４０％以上を満たしていることが分かるのに対して、表２からは、サンプル５〜８が変調度、透過率のいずれかが４０％を満たしていないことが分かる。
又、上記ＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３と、ＺｒＯ２：Ｃｒ２Ｏ３の場合のそれぞれの単層膜の、記録用レーザー光の波長λ＝４０５ｎｍの場合での屈折率ｎと消衰係数ｋを測定したところ、表３のようになった。
Figure 2007179706
この表３からは、第１誘電体層の屈折率が２．２を超えると、透過率を高めることができるが、変調度が低下してしまい、従って、屈折率は２．２以下が好ましいことが分かる。
上記と同様の光記録媒体において、膜厚１０ｎｍの第１誘電体層（ＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３）の組成比を変えて、透過率を測定したところ、表４のようになった。
Figure 2007179706
この表４からは、第１誘電体層の屈折率が１．８４未満になると透過率が４０％未満となることが分かる。従って、屈折率は１．８４以上が好ましい。
前記第１誘電体層を構成する材料であるＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３の各単層の屈折率は、それぞれ２．２６、２．６５、１．６０であるが、これら混合酸化物の屈折率は、各酸化物の組成比率によって計算できる。これらの組成比と計算した屈折率は次の表５のようになる。
Figure 2007179706
この表５からは、屈折率が１．８４以上２．１９以下となるＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３の組成範囲（mol％）は、図２におけるＡ（７０：１０：２０）、Ｂ（１０：５０：４０）、Ｃ（１０：２０：７０）、Ｄ（２０：１０：７０）を結ぶ斜線で示された領域内である。
次に表６及び図３に、上記屈折率、透過率、変調度の相互の関係を示す。
Figure 2007179706
これらからは、屈折率が２．１２のとき、透過率と変調度の最適バランスがとれていることが分る。
又、前記第１誘電体層１６Ｂにおいて、屈折率の最も高いＣｒ２Ｏ３と最も低いＡｌ２Ｏ３を用いたＣｒ２Ｏ３：Ａｌ２Ｏ３誘電体を作成し、その組成比を変化させて光学定数の測定を行なったところ、次の表７及び図４に示されるようになった。
Figure 2007179706
この表７及び図４からは、屈折率を２．２以下にするためには、Ｃｒ２Ｏ３組成を６０mol％以下にする必要があり、消衰係数は０．１以下とする必要があることが分かる。
前記第１誘電体層の膜厚に対する変調度及び透過率の関係を次の表８に示される膜構造で膜厚Ｘを変えて測定したところ表９及び図５に示されるようになった。
Figure 2007179706
Figure 2007179706
これらから、第１誘電体層（ＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３、組成比６５：１０：２５mol％）の膜厚は、５ｎｍ以上２５ｎｍ以下及び１００ｎｍ以上１２０ｎｍ以下のとき、変調度及び透過率が高く、且つ、バランスがよく、特に、５ｎｍ以上２５ｎｍ以下のときが変調度、透過率が高いことが分る。
次に、図６を参照して、本発明の実施例２について説明する。
この実施例２に係る多層光記録媒体３０は４層光記録媒体であり、前記実施例１に係る多層光記録媒体１０の構成に、各々半透明情報層である第３の情報層１８と第４の情報層２０と、第２の情報層１６と第３の情報層１８の間及び第３の情報１８と第４の情報層２０との間にそれぞれスペーサ層２２を設け、第４の情報層２０を被ってカバー層２４を設けたものである。
前記第３の情報層１８も、第２の情報層１６と同様に、ＴｉＯ２層１８Ａ、第１誘電体層１８Ｂ、反射膜１８Ｃ、第２誘電体層１８Ｄ、記録膜１８Ｅ、第３誘電体層１８Ｆをこの順で積層して構成されている。
更に又、第４の情報層２０も、ＴｉＯ２層２０Ａ、第１誘電体層２０Ｂ、反射膜２０Ｃ、第２誘電体層２０Ｄ、記録膜２０Ｅ、第３誘電体層２０Ｆをこの順で積層して構成されている。
これら第３及び第４の情報層１８、２０は、前記第２の情報層１６と同様の構成であるので、その構成の詳細な説明は省略するものとする。
但し、この実施例２の多層光記録媒体３０において、前記第４の情報層２０、第３の情報層１８、第２の情報層１６は、この順で、光透過率が順次小さくなるように構成されている。
なお、本発明は、上記第１及び第２実施例の２層又は４層光記録媒体に限定されるものでなく、３層光記録媒体であってもよい。
本発明の実施例１に係る多層光記録媒体を模式的に示す断面図 実施例１における第１誘電体層を構成するＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３の組成比の関係を示す３元図 半透明情報層における屈折率、透過率及び変調度の関係を示す線図 実施例１における、第１誘電体層のＣｒ２Ｏ３：Ａｌ２Ｏ３を作成した場合のその組成比と光学定数との関係を示す線図 実施例１における、第１誘電体層の膜厚と透過率及び変調度との関係を示す線図 本発明の実施例２に係る多層光記録媒体を模式的に示す断面図
符号の説明
１０、３０…多層光記録媒体
１２…基板
１４…第１の情報層
１６…第２の情報層（半透明情報層）
１６Ａ、１８Ａ、２０Ａ…ＴｉＯ２層
１６Ｂ、１８Ｂ、２０Ｂ…第１誘電体層
１６Ｃ、１８Ｃ、２０Ｃ…反射膜
１６Ｄ、１８Ｄ、２０Ｄ…第２誘電体層
１６Ｅ、１８Ｅ、２０Ｅ…記録膜
１６Ｆ、１８Ｆ、２０Ｆ…第３誘電体層
１８…第３の情報層（半透明情報層）
２０…第４の情報層（半透明情報層）
２２…スペーサ層
２４…カバー層

Claims (6)

  1. 基板と、この基板上に設けられた第１の情報層と、この第１の情報層の上に設けられた少なくとも１層の半透明情報層と、前記各情報層間に設けられたスペーサ層と、を有してなり、前記基板から遠い側から記録用レーザー光が入射される多層光記録媒体であって、
    少なくとも１層の前記半透明情報層は、前記基板側から、ＴｉＯ２層、第１誘電体層、第２誘電体層、Ｓｂを主成分とする記録膜、第３誘電体層をこの順で積層して構成され、前記第１誘電体層は、ＺｒＯ２、Ｃｒ２Ｏ３、Ａｌ２Ｏ３を材料として、且つ、屈折率が１．８４〜２．２０となるように構成されていることを特徴とする多層光記録媒体。
  2. 請求項１において、
    前記第１誘電体層と第２誘電体層との間に、半透過反射膜を配置したことを特徴とする多層光記録媒体。
  3. 請求項１又は２において、
    前記第１誘電体層は、消衰係数が０．１以下とされていることを特徴とする多層光記録媒体。
  4. 請求項１、２又は３において、
    前記第１誘電体層は、ＺｒＯ２：Ｃｒ２Ｏ３：Ａｌ２Ｏ３の組成が、（７０：１０：２０）、（１０：５０：４０）、（１０：２０：７０）、（２０：１０：７０）mol％の組成範囲内であることを特徴とする多層光記録媒体。
  5. 請求項１乃至４のいずれかにおいて、
    前記第１誘電体層は、膜厚が５ｎｍ乃至２５ｎｍ及び１００ｎｍ乃至１２０ｎｍのいずれかとされたことを特徴とする多層光記録媒体。
  6. 請求項１乃至４のいずれかにおいて、
    前記第１誘電体層は、膜厚が５ｎｍ乃至２５ｎｍとされたことを特徴とする多層光記録媒体。
JP2005380045A 2005-12-28 2005-12-28 多層光記録媒体 Withdrawn JP2007179706A (ja)

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EP2015394A1 (en) 2007-07-09 2009-01-14 Asahi Glass Company, Limited High frequency wave antenna for an automobile

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US7960006B2 (en) * 2007-01-23 2011-06-14 Tdk Corporation Optical recording medium and recording film material

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JP3689612B2 (ja) * 2000-01-26 2005-08-31 株式会社日立製作所 情報記録媒体
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2015394A1 (en) 2007-07-09 2009-01-14 Asahi Glass Company, Limited High frequency wave antenna for an automobile

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